CN217459667U - Seed crystal clamping device and single crystal furnace - Google Patents
Seed crystal clamping device and single crystal furnace Download PDFInfo
- Publication number
- CN217459667U CN217459667U CN202221681013.6U CN202221681013U CN217459667U CN 217459667 U CN217459667 U CN 217459667U CN 202221681013 U CN202221681013 U CN 202221681013U CN 217459667 U CN217459667 U CN 217459667U
- Authority
- CN
- China
- Prior art keywords
- seed crystal
- centre gripping
- seed
- gripping subassembly
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a seed crystal clamping device and single crystal growing furnace. Seed crystal clamping device includes outer clamping component and interior clamping component, it holds the chamber to have seted up on the outer clamping component, the outside profile of interior clamping component with the inside profile phase-match that holds the chamber, interior clamping component detachable set up in hold the intracavity, interior clamping component is including the fixed part that is used for fixed seed crystal, the fixed part by it extends to hold the intracavity the surface of outer clamping component. The embodiment of the utility model provides a, through setting up outer centre gripping subassembly and interior centre gripping subassembly, during the implementation, can use the fixed seed crystal of different interior centre gripping subassemblies to different seed crystals, then have the interior centre gripping subassembly of seed crystal to fix on outer centre gripping subassembly with the centre gripping to the realization is fixed the seed crystal on the seed crystal anchor clamps, and like this, this embodiment can improve the convenience fixed to the seed crystal.
Description
Technical Field
The embodiment of the utility model provides a relate to semiconductor processing technology field, especially relate to a seed crystal clamping device and single crystal growing furnace.
Background
In the production of silicon rods, including the step of pulling a crystal in a single crystal furnace using a seed crystal, generally, the seed crystal is held by a jig to complete the pulling operation. In the actual production process, the seed crystals with different specifications are generally required to be used according to different production requirements, which causes inconvenience in fixing the seed crystals.
Disclosure of Invention
The embodiment of the utility model provides a seed crystal clamping device and single crystal growing furnace.
In order to solve the above problem, the utility model discloses a realize like this:
in a first aspect, an embodiment of the utility model provides a seed crystal clamping device, including outer clamping component and interior clamping component, it holds the chamber to have seted up on the outer clamping component, the outside profile of interior clamping component with the inside profile phase-match that holds the chamber, interior clamping component detachable set up in hold the intracavity, interior clamping component is including the fixed part that is used for fixed seed crystal, the fixed part by hold the intracavity portion extend to the surface of outer clamping component.
In some embodiments, the number of the inner clamping assemblies is multiple, and the fixing parts of the inner clamping assemblies are matched with different types of seed crystals respectively.
In some embodiments, the receiving cavity extends in a direction from a top of the outer clamping assembly to a bottom of the outer clamping assembly, and the fixing portion extends from the bottom of the outer clamping assembly to an outer surface of the receiving cavity.
In some embodiments, the cross-sectional area of at least a portion of the receiving cavity decreases in a direction from the top of the outer clamp assembly to the bottom of the outer clamp assembly.
In some embodiments, the inner wall of the accommodating cavity is provided with a plurality of heat dissipation holes penetrating through the surface of the outer clamping component.
In some embodiments, the inner clamping assembly includes a plurality of splices that are spliced together, and the splices are spliced together in a direction that surrounds the receiving cavity.
In some embodiments, the fixing portion of the inner clamping assembly includes a limiting portion and an extending portion, the limiting portion is located on one side of the extending portion close to the top of the outer clamping assembly, and a cross-sectional dimension of at least a portion of the limiting portion is larger than a cross-sectional dimension of the extending portion.
In a second aspect, the present invention provides a single crystal furnace comprising the seed crystal holding device of any one of the above aspects.
The embodiment of the utility model provides a, through setting up outer centre gripping subassembly and interior centre gripping subassembly, during the implementation, can use the fixed seed crystal of different interior centre gripping subassemblies to different seed crystals, then have the interior centre gripping subassembly of seed crystal to fix on outer centre gripping subassembly with the centre gripping to the realization is fixed the seed crystal on the seed crystal anchor clamps, and like this, this embodiment can improve the convenience fixed to the seed crystal.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor.
FIG. 1 is a schematic structural view of a seed crystal holding device according to an embodiment of the present invention;
FIG. 2 is a schematic view of another structure of a seed crystal holding device according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of an outer clamping assembly according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an inner clamping assembly according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of an inner clamping assembly with different structures according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The terms "first," "second," and the like in the embodiments of the present invention are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus. Further, as used herein, "and/or" means at least one of the connected objects, e.g., a and/or B and/or C, means 7 cases including a alone, B alone, C alone, and both a and B present, B and C present, both a and C present, and A, B and C present.
The embodiment of the utility model provides a brilliant clamping device of seed.
As shown in FIGS. 1 and 2, in one embodiment, the seed crystal holding device comprises an outer holding assembly 101 and an inner holding assembly 102, wherein the outer holding assembly 101 is connected with a pulling selection device inside the single crystal furnace through a pulling rope.
As shown in fig. 1, fig. 2 and fig. 3, the outer clamping assembly 101 has an accommodating cavity 1011, and in this embodiment, the accommodating cavity 1011 is formed along a direction from the top to the bottom of the outer clamping assembly 101. Here, the top and bottom of the outer clamping member 101 refer to the top and bottom of the outer clamping member 101 in the use state.
As shown in fig. 1 and 2, the outer contour of the inner clamping assembly 102 matches the inner contour of the receiving cavity 1011, and in practice, the inner clamping assembly 102 may be disposed within the receiving cavity 1011 to provide a detachable connection between the inner clamping assembly 102 and the outer clamping assembly 101.
As shown in fig. 2 and 4, the inner clamping assembly 102 includes a fixing portion 1021 for fixing the seed crystal 200, and the fixing portion 1021 extends from the inside of the receiving cavity 1011 to the outer surface of the outer clamping assembly 101.
As shown in fig. 5, in the present embodiment, the number of the inner clamping assemblies 102 is plural, and the fixing portion 1021 of each inner clamping assembly 102 is matched with different types of seed crystals 200. The outer profile of each inner clamp assembly 102 is the same so that each inner clamp assembly 102 is removably disposed within the receiving cavity 1011.
In some embodiments, the cross-sectional area of at least a portion of the receiving chamber 1011 decreases from the top of the outer gripping member 101 to the bottom of the outer gripping member 101, such that the inner gripping member 102 is stably held within the receiving chamber 1011 by gravity during the crystal pulling process, and the inner gripping member 102 can be easily removed in a downward direction after the crystal pulling process.
As shown in fig. 5, the seed crystal a illustratively includes a rectangular parallelepiped portion and a cubic portion along its length, wherein the cross sectional area of the cubic portion is relatively large in size, and accordingly, the shape of the fixing portion 1021 inside the inner holder assembly 102 corresponding to the seed crystal a also matches the shape of the seed crystal a. In practice, the seed crystal a may be fixed to the fixing portion 1021 of the inner chuck assembly 102.
Referring to fig. 5, for another example, the seed crystal b includes a first cylindrical portion and a second cylindrical portion along the length direction thereof, wherein the diameter of the second cylindrical portion is larger, and correspondingly, the shape of the fixing portion 1021 of the inner clamping assembly 102 corresponding to the seed crystal b is matched with the shape of the seed crystal b, so that the seed crystal b can be fixed on the fixing portion 1021 of the inner clamping assembly 102.
In addition, the seed crystal 200 may have other shapes, and illustratively, the seed crystal c includes a cylindrical portion and a tapered portion, and the seed crystal d includes a cylindrical portion and a tapered portion, and in practice, may provide the inner clamping assembly 102 with a shape matching therewith.
The structure of the inner clamping assembly 102 can be set as required, and for example, the corresponding inner clamping assembly 102 can be a unitary structure for the seed crystal a to the seed crystal c.
As shown in fig. 4, in some embodiments, the inner clamping assembly 102 includes a plurality of splices 1022 spliced together, and each splice 1022 is spliced together in a direction around the receiving cavity 1011.
For example, the inner clamping assembly 102 corresponding to the seed crystal d may include two splicing portions 1022 spliced with each other, and in implementation, the two splicing portions 1022 may be spliced with each other to realize clamping and fixing of the seed crystal 200. After the production is finished, the splices 1022 of the inner clamping assembly 102 can be separated from each other, and the recycling of the seed crystal 200 can be facilitated.
As shown in fig. 2, in some embodiments, the fixing portion 1021 of the inner clamping assembly 102 includes a position-limiting portion 1021A and an extending portion 1021B, the position-limiting portion 1021A is located at a side of the extending portion 1021B close to the top of the outer clamping assembly 101, and a cross-sectional dimension of at least a portion of the position-limiting portion 1021A is larger than a cross-sectional dimension of the extending portion 1021B, in practice, due to the existence of the position-limiting portion 1021A, the seed crystal 200 can be clamped by the position-limiting portion 1021A, so as to prevent the seed crystal 200 from falling off.
In some embodiments, the receiving cavity 1011 extends from the top of the outer clamping assembly 101 to the bottom of the outer clamping assembly 101, and the fixing portion 1021 extends from the bottom of the outer clamping assembly 101 to the outer surface of the receiving cavity 1011. In this way, the fixing portion 1021 of the inner clamp assembly 102 can be exposed from the bottom of the outer clamp assembly 101, thereby enabling subsequent seeding and pulling steps with the seed crystal 200.
As shown in fig. 1, in some embodiments, the inner wall of the receiving cavity 1011 has a plurality of heat dissipation holes 1012 penetrating the surface of the outer clamping assembly 101, so as to improve the heat dissipation effect, and to improve the stability and reliability of the crystal pulling process.
The embodiment of the utility model provides a, through setting up outer centre gripping subassembly 101 and interior centre gripping subassembly 102, during the implementation, can use the fixed seed crystal 200 of different interior centre gripping subassembly 102 to different seed crystals 200, then the centre gripping has the interior centre gripping subassembly 102 of seed crystal 200 to fix on outer centre gripping subassembly 101 to the realization fixes seed crystal 200 on seed crystal 200 anchor clamps, and like this, this embodiment can improve the convenience fixed to seed crystal 200.
The utility model also provides a single crystal furnace, including the seed crystal clamping device of above arbitrary.
The single crystal furnace of the embodiment comprises all technical schemes of the seed crystal clamping device embodiment, so that at least all technical effects can be realized, and the details are not repeated.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and embellishments can be made without departing from the principle of the present invention, and these modifications and embellishments should also be regarded as the protection scope of the present invention.
Claims (8)
1. The utility model provides a seed crystal clamping device, its characterized in that includes outer centre gripping subassembly and interior centre gripping subassembly, it holds the chamber to have seted up on the outer centre gripping subassembly, the outside profile of interior centre gripping subassembly with the inside profile phase-match that holds the chamber, interior centre gripping subassembly detachable set up in hold the intracavity, interior centre gripping subassembly is including the fixed part that is used for fixed seed crystal, the fixed part by hold intracavity portion extend to the surface of outer centre gripping subassembly.
2. A seed crystal holding apparatus as set forth in claim 1, wherein said inner holding member is plural in number, and the fixing portions of said inner holding member are respectively matched with different types of seed crystals.
3. A seed holding apparatus according to claim 1, wherein said receiving chamber extends in a direction from a top of said outer holding member to a bottom of said outer holding member, and said fixing portion extends from the bottom of said outer holding member to an outer surface of said receiving chamber.
4. A seed holding apparatus according to claim 3, wherein at least a portion of the receiving cavity decreases in cross-sectional area in a direction from the top of the outer holding assembly to the bottom of the outer holding assembly.
5. A seed holding apparatus as claimed in claim 1, wherein the inner wall of the accommodating chamber is formed with a plurality of heat dissipation holes penetrating the surface of the outer holding member.
6. A seed holding apparatus according to claim 1, wherein said inner holding member includes a plurality of engaging portions engaged with each other, and each of said engaging portions is engaged with each other in a direction surrounding said accommodating chamber.
7. The seed crystal holding apparatus as set forth in claim 1, wherein the fixing portion of the inner holding member comprises a stopper portion and an extension portion, the stopper portion being located on a side of the extension portion adjacent to the top of the outer holding member, and a cross-sectional dimension of at least a part of the stopper portion being larger than a cross-sectional dimension of the extension portion.
8. A single crystal growing furnace comprising the seed crystal holding apparatus as claimed in any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221681013.6U CN217459667U (en) | 2022-06-30 | 2022-06-30 | Seed crystal clamping device and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221681013.6U CN217459667U (en) | 2022-06-30 | 2022-06-30 | Seed crystal clamping device and single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217459667U true CN217459667U (en) | 2022-09-20 |
Family
ID=83242645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221681013.6U Active CN217459667U (en) | 2022-06-30 | 2022-06-30 | Seed crystal clamping device and single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217459667U (en) |
-
2022
- 2022-06-30 CN CN202221681013.6U patent/CN217459667U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6237370B1 (en) | Apparatus for automated production, and/or packaging and/or testing of fiber optic devices including optical fiber system components and optical fibers | |
| US4666240A (en) | Splice organizer for optical cable splices | |
| US7054536B2 (en) | Breakout assembly for flexible circuitry | |
| US20210165167A1 (en) | Tray and clip structure for optomechanical components | |
| CN217459667U (en) | Seed crystal clamping device and single crystal furnace | |
| KR20090045144A (en) | Cable guide | |
| US2972492A (en) | Cable extension sleeve | |
| EP1238301B1 (en) | Fiber retaining system | |
| CN211088221U (en) | Crystal expansion jig for silicon-based micro display panel | |
| KR100398831B1 (en) | Spool case for bonding wire and method for handling spool using the case | |
| US20190154929A1 (en) | High density optical fiber feedthrough | |
| US11958723B2 (en) | Unloading jig, unloading method, and method for producing silicon rod | |
| US6267486B1 (en) | Locators in a net-shaped Christmas light assembly | |
| EP2834686B1 (en) | Optical fiber ribbonization apparatus and method | |
| CN219870250U (en) | Nipple and dust cover integrated test fixture | |
| US6396991B1 (en) | Fiber transport holding device and method | |
| CN216574241U (en) | Feed supplement device and medical instrument production line | |
| US11269145B2 (en) | Cable connection structure for fiber optic hardware management | |
| CN218332085U (en) | Follow-on optical cable splice box pyrocondensation pipe cassette device | |
| CN110554472A (en) | Spacer ring, optical lens and assembling method thereof | |
| JPS58117513A (en) | Storing method of connection excessive length part of optical fiber | |
| CN211140700U (en) | Tooling basket for semiconductor wafers | |
| JPH03191303A (en) | Casing pass-through part of optical fiber cable | |
| JPS6343108A (en) | Excess core storing device for optical fiber cable | |
| GB2491669A (en) | Tension testing of an accessory attached to a fabric |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |