JPH08268531A - Elliptic vibration device - Google Patents

Abstract

PURPOSE: To hold horizontal directional and vertical directional phase difference angles in an optimal value by determining a phase angle of first and second phase shifters so that a phase difference between a first vibration system and a second vibration system satisfies an optimal vibration condition of a movable part, making the first and the second vibration systems perform selfexcited vibration, and making the first vibration system perform resonance vibration. CONSTITUTION: Output of a first controller 39 is supplied to an electromagnet 41, and a horizontal directional first vibration system 32 is driven, and this vibrational displacement is detected by a vibrational displacement detector 33, and is supplied to a second controller 34. Its output is supplied to an electromagnet 36, and is supplied to a vertical directional second vibration system 37. This vibrational displacement is detected by a vibrational displacement detecting means unit 38, and is fed back in the negative to the first controller 39. A part between the vibration displacement detector 38 and the first controller 39 is opened, and in a resonance frequency, a phase difference of 180 degrees is obtained between them, and a phase difference of 60 degrees is obtained between the vibrational displacement detector 33 and the vibrational displacement detector 38 according to a phase angle of 30 degrees set by a second phase shifter 45.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an elliptical vibrating device for supplying parts by vibration.

[0002]

2. Description of the Related Art In FIG. 6, an elliptical vibrating parts feeder is designated by 1 in its entirety and comprises a known bowl 2. A spiral track is formed on the inner peripheral surface of the bowl 2, and a wiper is provided at an appropriate position on the downstream side. Although this wiper is already well known, the illustration is omitted, but the flat plate is bent, and the distance between the lower end of the wiper and the transport surface of the track is larger than the thickness of the component m (flat plate shape) to be fed. It is smaller than this time. A posture holding means is provided at the discharge end of the truck, and a component having a desired posture (for example, a component m whose long side is directed in the transfer direction) is supplied to a linear vibration feeder (not shown) through the posture holding means.

The bowl 2 is fixed to a cross-shaped upper movable frame 7 clearly shown in FIG. 7, and the bowl 2 stands upright on a cross-shaped lower movable frame 8 also clearly shown in FIG. It is connected by four sets of leaf springs 9. That is, the four end portions 7a of the upper movable frame 7
The upper end of the leaf spring 9 is fixed by bolts, and the lower end of the leaf spring 9 is fixed by bolts to the four ends 8a of the lower movable frame 8. The ends 7a and 8a are vertically aligned.

A vertical drive electromagnet 11 is fixed to the center of the fixed frame 10 so as to face the center of the upper movable frame 7, and a vertical movable core is provided on the lower surface of the upper movable frame 7 so as to face the vertical drive electromagnet 11. 13 is fixed.
In addition, a pair of horizontal drive electromagnets 14 are provided on opposite side walls of the fixed frame 10 with a vertical drive electromagnet 11 interposed therebetween.
a and 14b are fixed, and coils 15a and 15b are wound around these electromagnets 14a and 14b, respectively. On the lower surface of the upper movable frame 7, horizontal drive electromagnets 14a, 1
Horizontally movable cores 16a and 16b are fixed to face 4b.

The fixed frame 10 is integrally formed with four leg portions 17, and these leg portions 17 are made of a vibration-proof rubber 18.
It is supported on the base via. Spring mounting portions 17a extending in the lateral direction are integrally formed on the leg portions 17, and four leaf springs 19 for vertical driving are provided on both ends of the spring mounting portions 17a as shown in FIG. It is fixed by bolts. As shown in FIG. 6, the leaf springs 19 are overlapped with each other via a spacer 20, and the central portions of these are fixed to the lower movable frame 8 by bolts.

In the above structure, the horizontal drive electromagnet 14
Reference characters a and 14b are first vibration drivers that generate a horizontal exciting force, and the first vibration system driven by this is composed of the bowl 2, the leaf spring 9, the movable cores 16a and 16b, and the like. Further, the electromagnet 11 is a second vibration driver that generates a vertical exciting force, and the bowl 2 and the leaf spring 1
A second vibrating system is constituted by 9, the movable core 13, and the like.

Generally, a driving current having a frequency equal to or substantially equal to the resonance frequency of the first horizontal vibration system is supplied to the electromagnets 14a, 14b, 11 respectively, which causes the bowl 2 to move horizontally. It vibrates at a frequency f ₀ at or near the resonance state, and normally has a higher resonance frequency of several percent in the vertical direction. Therefore, as shown in FIG.
The phase difference between the force and the displacement vibrates with a delay of 90 degrees, and vibrates with a phase difference different from this in the vertical direction. Elliptical vibration is performed by these phase differences. The optimum condition, that is, the component m on the track in the bowl 2 can be conveyed at the maximum conveying speed. Therefore, the phase difference between the horizontal exciting force and the vertical exciting force is 90 degrees. Is set. That is, as is clear from FIG. 9, since the resonance frequency in the vertical direction is f ₁ , it vibrates with a phase delay of 150 degrees.

However, as is clear from vibration engineering, when the vibration system is driven at the resonance frequency, the resonance frequency fluctuates due to slight fluctuations in the power source and slight changes in the load on the components in the bowl 2. As a result, even when the resonance frequency in the horizontal direction is f ₀ and the phase difference between the force and the displacement is 90 degrees in an empty state where no parts are stored, such a change causes a large change in the phase difference. Therefore, even if the phase difference does not fluctuate much in the vertical direction driven by the forced vibration, it largely fluctuates in the horizontal direction, so that these phase differences eventually differ from 60 degrees. As a result, the optimum vibration condition for the bowl cannot be obtained.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and the phase difference angle in the horizontal direction and the vertical direction is changed even if the power source is slightly changed or the load of parts in the bowl is changed. It is an object of the present invention to provide an elliptical vibrating device that can maintain the optimum value.

[0010]

The above object is to provide a first controller having at least a first phase shifter, a first high gain amplifier and a first saturation element, and to increase the power of the output of the first controller. And a first vibration driver for generating an exciting force in a first direction by receiving an output of the first power amplifier, and a first vibration driver for applying the first vibration driver in the first direction. A first vibration system of an elliptical vibrator that receives a vibration force, a first vibration displacement detection means for detecting a vibration displacement of a movable part of the elliptical vibrator in the first direction, at least a second phase shifter, and a second high gain A second controller having an amplifier and a second saturation element for receiving the output of the first vibration displacement detecting means; a second power amplifier for amplifying the power of the output of the second controller; and the second power amplifier. A second vibration driver for receiving an output of the power amplifier and generating an exciting force in a second direction perpendicular to the first direction; From the second vibration system of the elliptical vibrator that receives the exciting force of the driver in the second direction, and the second vibration displacement detection means that detects the vibration displacement of the movable part of the elliptical vibrator in the second direction. And forming a closed loop for negatively feeding back the output of the second vibration displacement detection means to the first controller, and connecting the second vibration displacement detection means and the first controller at the resonance frequency of the first vibration system. When the space is opened, the phase difference between them becomes 180 degrees, and the displacement of the first vibration system and the second vibration system
The phase difference with the displacement of the vibration system determines the phase shift angles of the first and second phase shifters so that the phase difference with the displacement of the movable part should be the optimum vibration condition of the movable part. This is achieved by an elliptical vibrating device, characterized in that the system is caused to undergo self-excited vibration and the first vibrating system is caused to cause resonant vibration.

Further, the above object is to provide a first phase shifter, a first high gain amplifier, and a first saturation element.
A controller, a first power amplifier for amplifying the output of the first controller, and a first vibration driver for receiving an output of the first power amplifier and generating an exciting force in a first direction. A first vibration system of an elliptical vibrator that receives an exciting force of the first vibration driver in the first direction, and a vibration displacement detection for detecting a vibration displacement of a movable part of the elliptical vibrator in the first direction. Means, at least a second phase shifter, a second high gain amplifier, a second saturation element, and a second controller for receiving the output of the first vibration displacement detection means, and an output of the second controller for increasing the power. And a second vibration driver that receives an output of the second power amplifier and generates an exciting force in a second direction perpendicular to the first direction.
A second vibration system of the elliptical vibrator that receives the vibration force of the vibration driver in the second direction, and forms a closed loop that negatively feeds back the output of the vibration displacement detection means to the first controller; When the vibration displacement detecting means and the first controller are opened at the resonance frequency of one vibration system, the phase difference between them becomes 180 degrees, and the output of the vibration displacement detecting means and the second vibration The phase difference between the vibration displacement of the system and the first, so that the angle should achieve the optimum vibration condition of the movable part.
An elliptical vibrating device characterized in that a phase shift angle of a second phase shifter is determined, the first vibrating system is caused to self-excitedly vibrate, and the second vibrating system is forcedly vibrated.

Further, the above object is to provide a variable frequency power source, a first vibration driver which receives an output of the variable frequency power source and generates an exciting force in a first direction, and the first vibration driver. A first vibration system of an elliptical vibrator that receives a directional excitation force, a vibration displacement detection unit that detects a vibration displacement of the movable portion of the elliptical vibrator in the first direction, and an output of the vibration displacement detection unit. A phase shifter, a power amplifier that receives the output of the phase shifter, and a second vibration that receives the output of the power amplifier and that generates an exciting force in a second direction perpendicular to the first direction. A second vibrating system of the elliptical vibrating machine which receives a vibrating force of the second vibrating driver in the second direction, and the resonance frequency of the first vibrating system is adjusted by adjusting the variable frequency power source. The phase shift angle of the phase shifter is set to an angle that obtains the optimum vibration condition of the movable part. Elliptical vibration device according to claim Rukoto,
Achieved by

[0013]

According to the first aspect of the invention, the first vibrating system performs resonant vibration, and the second vibrating system delays or advances the phase by an angle set by the second phase shifter. It vibrates with the phase angle difference that obtains the optimum elliptical vibration. The combination of the vibration of the first vibrating system in the first direction and the vibration of the second vibrating system in the second direction is elliptical vibration. For example, when it is used to convey a component, the conveyance speed of the component is maximized. In addition, since the first vibration system is performing self-excited vibration, the phase difference between the force and the displacement is accurately maintained at π / 2, and the set angle of the second phase shifter is set to this. Since the second vibrating system is vibrated by the phase displacement only, it is possible to vibrate the first vibrating system and the second vibrating system while always providing a stable phase difference.

According to the second aspect of the present invention, the first vibrating system performs resonant vibration by self-excited vibration, and the second vibrating system performs forced vibration. Since the phase difference between the resonance vibration and the forced vibration is the set phase angle difference of the second phase shifter, the optimum elliptical vibration can be obtained, and the load of the movable portion of the first vibration system varies. Even if the power source fluctuates, resonance vibration is always performed to maintain the phase difference between the force and the displacement at π / 2, and thus the optimum phase difference can be maintained.

According to the invention of claim 3, the first vibrating system vibrates by the resonance vibration by adjusting the variable frequency power source, so that the phase difference is always maintained at π / 2, while the second vibrating system does. Since forced vibration is performed and the first vibrating system is vibrated with an appropriate phase difference angle from the second vibrating system, the optimum elliptical vibration condition can be obtained.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An elliptical vibration device according to an embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows an elliptical vibrating device according to a first embodiment of the present invention. The elliptical vibrating device is designated by 31 as a whole and, as described in the conventional example, a horizontal vibrating system, ie, a first vibrating system 32 In the horizontal direction, that is, in the horizontal direction, is detected by the vibration detector 33, and this is detected by the controller 3 for the vertical direction.
4, it is supplied to the vertical vibration system 37 via the power amplifier 35 and the vibration driver 36. This vertical vibration displacement is detected by the vibration detector 38, supplied to the horizontal controller 39, and further supplied to the horizontal vibration system 32 via the power amplifier 40 and the vibration driver 41. It The output of the vibration detector 33 is directly supplied to the controller 34, but the output of the horizontal vibration detector 38 is supplied to the controller 39 as a negative feedback signal.

FIG. 2 is a block diagram showing the first embodiment in more detail, but the portions corresponding to those in FIG. 1 are designated by the same reference numerals.

That is, the first controller 39 in this embodiment comprises a phase shifter 42, a high gain amplifier 43, and a swing adjustment limiter (saturation element) 44.
This output is supplied to the power amplifier 40, and the power amplifier output is supplied to the electromagnet 41 which is the vibration driver 41. The electromagnet 41 has a phase difference between voltage and force, and has a delay element of 1 / (s + a ₁ ). This excites the first vibration system in the horizontal direction, and this characteristic equation is m ₁ s
² + c ₁ s + k ₁ = 0. Here, m ₁ is the mass of the bowl, c ₁ is the viscous coefficient, and k ₁ is the spring constant in the horizontal direction. This horizontal vibration displacement is detected by the vibration detector 33, and this is supplied to the second controller 34. Like the first controller 39, this is the phase shifter 45, the high gain amplifier 46, and the vibration. It is composed of a width adjusting limiter (saturation element) 47, and its output is supplied to the electric power amplifier 35.
6. This also has a delay element of 1 / (s + a ₂ ), and like the horizontal electromagnet 41, causes a phase delay of 90 degrees. As a result, the vertical vibration system 37 is vibrated, and this vibration displacement is detected by the vibration detector 38, and this is negatively fed back to the first controller 39.

Further, according to this embodiment, each mechanical vibration system 3
One of the vibrations 2 and 37 is vibrated by the resonance vibration and the other is vibrated by deviating from the resonance point. Therefore, the phase difference between the force and the displacement is delayed by 90 degrees in the resonance vibration. The oscillating system in the direction has almost zero phase difference. In addition, as described above, the electromagnets 36 and 41, which are vibration drivers,
Is 90 degrees, the phase α is advanced by 60 degrees by the first phase shifter 42, and the phase difference β is advanced by 30 degrees by the second phase shifter 45 in this embodiment. Therefore, the input side of the first phase shifter 42 and the horizontal vibration system 32
There is a total phase difference of 120 degrees between the output of the vibration detector 33 and the output of the horizontal vibration detector 33, that is, the input side of the second phase shifter 45 and the output of the second mechanical vibration system 37. There is a total phase difference of 60 degrees between them. Therefore, when the input side of the first controller 39 and the output side of the vertical vibration detector 38 are cut off, there is a phase difference of 180 degrees between them. Therefore, self-excited vibration is possible.

The elliptical vibration device according to the first embodiment of the present invention is constructed as described above, and its operation will be described below.

The power amplifiers 35 and 42 are connected to a DC power source via a switch (not shown), and are brought into an operating state by closing the switch. In the closed loop as shown in FIG. 2, the output of the vibration detector 38 in the vertical direction is negatively fed back to the first controller 39, and when it is cut off at the input side of the first controller 39 of the closed loop, the output is 180 degrees. Due to the phase difference, the horizontal vibration system performs self-excited vibration, that is, resonance vibration. This vibration displacement is detected by the vibration detector 33, the vertical electromagnet 36 is excited by the second controller 34 and the power amplifier 35, and the vertical vibration system 37 also vibrates by itself. Vibrates at a far frequency.
Since the horizontal vibration system 32 is a resonance vibration, the phase difference between the force and the displacement is always maintained at 90 degrees, and the phase delay of the electromagnet 41 is constant at 90 degrees. The phase difference between the vertical vibration and the vertical vibration is stably maintained at 60 degrees. Therefore, under the optimum condition, the bowl vibrates in an elliptical manner, and the component can be transported at the maximum transport speed on the track formed therein. Even if the power supply fluctuates or the load on the parts in the bowl fluctuates, the self-excited vibration causes the horizontal vibration system to constantly perform resonant vibration, maintaining the phase difference between the force and displacement at 90 degrees. As described above, even if the phase difference is slightly deviated from the resonance point, the phase difference greatly changes from 90 degrees, but the phase difference does not change. Therefore, the optimum condition can be stably continued.

The swing width adjusting limiters 44 and 47 are provided with
Although not shown, a swing controller that receives the outputs of the horizontal vibration displacement detector 33 and the vertical vibration detector 38 is connected and has a comparator, but one input terminal is set. The amplitude is set, and the outputs of the vibration displacement detectors 33, 38 are supplied to the other input, and the amplitude adjustment limiters 44, 47 are automatically adjusted according to the deviations thereof, so that the horizontal direction is adjusted. The amplitude with the vertical direction becomes constant,
Therefore, it is possible to cause the bowl to perform elliptical vibration in a fixed direction having a fixed major axis and a minor axis.

3 and 4 show an elliptical vibrating device according to a second embodiment of the present invention, which is designated by 51 in its entirety, and
The same reference numerals are given to the portions corresponding to the embodiments, and the detailed description thereof will be omitted.

That is, according to this embodiment, the closed loop is formed only by the horizontal vibration system. That is, the output of the vibration detector 33 in the horizontal direction is negatively fed back to the first controller 52, and this output is also supplied to the controller 53 in the vertical direction.
Is supplied to.

FIG. 4 shows the details of the same block, but unlike the first embodiment of FIG. 1 only in the controllers 52 and 53, similarly, the phase shifters 55 and 58, the high gain amplifiers 56 and 59, and the amplitude range, respectively. Although the adjustment limiters 57 and 60 are used, the set phase difference α of the first phase shifter 55 is zero and the set phase difference β of the second phase shifter 58 is 30 degrees. As a result, when the horizontal vibration detector 33 and the first controller 52 are opened, the phase difference between them is 180 degrees, and the output of the second mechanical vibration system 37 and the second controller 53. There is a -60 degree phase difference with the input.

The elliptical vibration device according to the second embodiment of the present invention is constructed as described above, and its operation will be described below.

That is, in this embodiment, the horizontal vibration system forms a closed loop, and the horizontal vibration system 3 has a resonance frequency.
Since there is a 180-degree phase difference between the second controller 52 and the first controller 52, when the DC power source is connected to the power amplifiers 35 and 42 through a switch (not shown), the horizontal vibration system 32 resonates. The self-excited vibration is performed at the frequency, and the vertical vibration system 37 performs the forced vibration. Then, the phase difference between the force and the displacement of the horizontal vibration system in the resonance vibration state is stably maintained at 90 degrees, and even if the resonance frequency slightly changes in the forced vibration, the phase difference is almost constant. Since it does not change, the phase difference is constant at 60 degrees, but the optimum elliptical vibration condition can be obtained.

FIG. 5 shows an elliptical vibrating device according to a third embodiment of the present invention, which is generally designated by 61 and the output of a variable frequency power supply 62 is supplied to a first controller 63, which output power boosts. It is amplified by the device 64 and supplied to the electromagnet 65 which is a vibration driver, whereby the horizontal vibration system 66 is excited as in the above embodiment, and the horizontal vibration displacement is detected by the vibration detector 67. Is supplied to the second controller 68 in the vertical direction, and the control output is supplied to the electromagnet 70 which is a vibration driver in the vertical direction via the power amplifier 69.
And vibrates the second vibration system 71. The second
The phase difference is set to 60 degrees in the phase shift angle of the controller 68, and therefore, the vibration system 66 causes resonance vibration by adjusting the variable frequency power source 62. Since the vibrating system 71 is vertically vibrated with a phase difference, the horizontal mechanical vibrating system 66 can be provided if the automatic adjustment of the variable frequency power source 62 is accurately performed.
Resonate and vibrate, causing a phase difference 60 with respect to the vertical vibration system 71.
The optimum elliptical vibration can be obtained by keeping the degree stable. Even if the horizontal vibration system 66 is not accurately driven at the resonance point, the phase difference of vibration between the vertical vibration system 71 and the vertical vibration system 71 is maintained at an optimum value, for example, 60 degrees by the controller 68. You can

Unlike the first and second embodiments, the controllers 63 and 68 do not have a saturation element, but supply the output from the vibration detector 67 to the amplitude controller, and compare the output with a predetermined amplitude inside the amplitude controller. By supplying the deviation to the controller 63, a closed loop having a constant amplitude may be formed so that the horizontal vibration is always constant. In FIG. 5, the vertical vibration detection means is not provided. It may also be provided at the position where it is vibrated with a predetermined amplitude in the vertical direction.

Although the respective embodiments of the present invention have been described above, needless to say, the present invention is not limited to these, and various modifications can be made based on the technical idea of the present invention.

For example, in the above-mentioned embodiments, the electromagnet which is the actuator has a phase delay of 90 degrees, but when there is no phase delay like the piezoelectric type or the electrodynamic type, instead of the above-mentioned phase difference α. α = -90 degrees, β instead of β
If the angle is −90 degrees, the same action and effect can be obtained.

Not only in the case of an actuator having a 90-degree phase difference like an electromagnet, but also in the case of having a phase delay of other magnitude, the phase differences α and β are The phase values of the phase controllers 42 and 45 may be set so that the phase difference is 180 degrees and the phase difference between the horizontal direction and the vertical direction is 60 degrees.

In the above embodiment, the phase controller 4 is used.
Although the set phase difference between 2 and 45 is fixed, it may be variable. In this case, the phase difference between the signals between certain inputs and outputs is detected, and the phase controller 4 is detected according to the detected value.
The set phase difference of 2, 45 may be adjusted.

In the above embodiment, the phase difference angle between the horizontal direction and the vertical direction was optimized at 60 degrees, but according to the theory of transport of elliptical vibration, this is slightly changed according to the amplitude of the major axis. Therefore, the phase difference α and β may be changed so as to be variable within the range of 45 ° to 75 °, for example.

In the above embodiment, the first direction is the horizontal direction and the second direction is the vertical direction, but this may be reversed.

[0037]

As described above, according to the elliptical vibrating device of the present invention, the phase difference from the other vibrating system is maintained at an optimum value while performing the resonant vibration in the first or second vibrating system. Therefore, even if the power source fluctuates or the load of the movable part fluctuates, the phase angle can be stably maintained at, for example, 60 degrees, and the optimum elliptical vibration condition can be always secured.

[Brief description of drawings]

FIG. 1 is a block diagram of an elliptical vibration device according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing details of main parts of the device.

FIG. 3 is a block diagram of an elliptical vibration device according to a second embodiment of the present invention.

FIG. 4 is a block diagram showing details of main parts of the apparatus.

FIG. 5 is a block diagram of an elliptical vibrating device according to a third embodiment of the present invention.

FIG. 6 is a partial cross-sectional view of an elliptical vibration part feeder to which an embodiment of the present invention is applied.

7 is a plan view taken along line [7]-[7] in FIG.

FIG. 8 is a bottom view of the elliptical vibration part feeder of FIG.

FIG. 9 is a chart showing the relationship between frequency and phase difference.

[Explanation of symbols]

 31 Elliptical Vibration Device 33 Horizontal Vibration Detector 34 Controller 35 Vertical Vibration Detector 39 Controller 42 Phaser 45 Phaser 51 Elliptical Vibration Device 52 Controller 53 Controller 55 Controller 55 Phaser 58 Phaser 61 Elliptical Vibration Device

Claims (6)

[Claims] 1. A first controller having at least a first phase shifter, a first high gain amplifier, and a first saturation element, a first power amplifier for amplifying the power of the output of the first controller, and A first vibration driver that receives an output of the first power amplifier and generates a vibration force in a first direction, and a first elliptical vibrator that receives the vibration force of the first vibration driver in the first direction. A vibration system, a first vibration displacement detection means for detecting a vibration displacement of the movable portion of the elliptical vibrator in the first direction, and at least a second phase shifter, a second high gain amplifier, and a second saturation element, A second controller for receiving the output of the first vibration displacement detection means, a second power amplifier for amplifying the power of the output of the second controller, and a second controller for receiving the output of the second power amplifier. A second vibration driver that generates a vibration force in a second direction perpendicular to the one direction, and a vibration force of the second vibration driver in the second direction. The second vibration system of the elliptical vibrator receives the second vibration displacement detecting means for detecting the vibration displacement of the movable portion of the elliptical vibrator in the second direction, and outputs the output of the second vibration displacement detecting means. A closed loop for negative feedback to the first controller is formed, and the second loop is generated at the resonance frequency of the first vibration system.
When the vibration displacement detecting means and the first controller are opened, the phase difference between them becomes 180 degrees, and the phase difference between the displacement of the first vibration system and the displacement of the second vibration system is , The phase shift angles of the first and second phase shifters are determined so that the optimum vibration condition of the movable part should be achieved,
An elliptical vibrating device, wherein the second vibrating system is self-excited and the first vibrating system is caused to resonate. 2. A first controller having at least a first phase shifter, a first high gain amplifier, and a first saturation element, a first power amplifier for amplifying the power of the output of the first controller, and A first vibration driver that receives an output of the first power amplifier and generates a vibration force in a first direction, and a first elliptical vibrator that receives the vibration force of the first vibration driver in the first direction. A vibration system, a vibration displacement detection means for detecting a vibration displacement of the movable portion of the elliptical vibrator in the first direction, at least a second phase shifter, a second high gain amplifier, and a second saturation element; No. 1 second displacement controller for receiving the output of the vibration displacement detection means, a second power amplifier for amplifying the output of the second controller, and the first direction for receiving the output of the second power amplifier. And a second vibration driver for generating an exciting force in a second direction perpendicular to the second vibration driver, and the second vibration driver for the second vibration driver.
A second vibration system of the elliptical vibrator that receives an exciting force in a direction, forms a closed loop that negatively feeds back the output of the vibration displacement detection means to the first controller, and uses the resonance frequency of the first vibration system. When the vibration displacement detection means and the first controller are opened, the phase difference between them is 180 degrees,
The phase shift of the first and second phase shifters is such that the phase difference between the output of the vibration displacement detection means and the vibration displacement of the second vibration system becomes an angle at which the optimum vibration condition of the movable portion should be achieved. An elliptical vibrating device, wherein an angle is determined, the first vibrating system is caused to self-excitedly vibrate, and the second vibrating system is forcedly vibrated. 3. The outputs of the first and second vibration displacement detection means are respectively supplied to a swing controller, and deviations from a predetermined swing set in the swing controller are respectively fed to the first and second swing controllers. 2. The elliptical vibrating device according to claim 1, wherein the elliptical vibrating device is configured to be supplied to two controllers to adjust the amplitudes in the first and second directions to the respective predetermined amplitudes. 4. A second vibration displacement detecting means for detecting a vibration displacement of the movable portion in a second direction is provided, and outputs of the first and second vibration displacement detecting means are respectively supplied to a swing controller, The deviation from the predetermined amplitude set in the amplitude controller is supplied to the first and second controllers, respectively, and the amplitudes in the first and second directions are adjusted to the respective predetermined amplitudes. The elliptical vibrating device according to claim 2, wherein 5. A phase difference detection means and a phase difference controller are provided, and the first,
The elliptical vibration device according to any one of claims 1 to 4, wherein the phase shift angle of the second phase shifter is adjusted. 6. A variable frequency power source, a first vibration driver that receives an output of the variable frequency power source and generates a vibration force in a first direction, and a vibration force of the first vibration driver in the first direction. A first vibration system of the elliptical vibrator that receives the vibration displacement detection means, a vibration displacement detection means that detects the vibration displacement of the movable portion of the elliptical vibration machine in the first direction, and a phase shifter that receives the output of the vibration displacement detection means. An electric power amplifier that receives the output of the phase shifter; a second vibration driver that receives the output of the power amplifier and generates an exciting force in a second direction perpendicular to the first direction; A second vibrating system of the elliptical vibrating machine which receives an exciting force of a second vibrating driver in the second direction, and drives the first vibrating system at its resonance frequency by adjusting the variable frequency power source, The phase shift angle of the phase shifter is set so as to obtain an optimum vibration condition of the movable part. Elliptical vibration device.