JPH08256395A - Ultrasonic wave transmitter-receiver - Google Patents

Ultrasonic wave transmitter-receiver

Info

Publication number
JPH08256395A
JPH08256395A JP8602195A JP8602195A JPH08256395A JP H08256395 A JPH08256395 A JP H08256395A JP 8602195 A JP8602195 A JP 8602195A JP 8602195 A JP8602195 A JP 8602195A JP H08256395 A JPH08256395 A JP H08256395A
Authority
JP
Japan
Prior art keywords
vibrator
vibration
thickness direction
counter electrode
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8602195A
Other languages
Japanese (ja)
Other versions
JP3477270B2 (en
Inventor
Hironori Mori
裕徳 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP08602195A priority Critical patent/JP3477270B2/en
Publication of JPH08256395A publication Critical patent/JPH08256395A/en
Application granted granted Critical
Publication of JP3477270B2 publication Critical patent/JP3477270B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Abstract

PURPOSE: To reduce dispersion in the characteristic without suppression of the main vibration mode by using a seat base having a recessed part so that the user cannot be in contact with an electrode of a piezoelectric porcelain vibrator and fixing the vibrator only at the outer circumferential part. CONSTITUTION: A circular or rectangular opposed electrode 9 opposite to a piezoelectric porcelain plate 1 nearly in the middle in the broadwise direction and a couple of lead electrodes 10a, 10b led in different directions so as not to be opposed to each other in the broadwise direction from the opposed electrode 9 are formed. Lead wires 6a, 6b are connected to the lead electrodes 10a, 10b to be polarized and stimulated. A recessed part 12 is provided to the seat base 2 in a range where the opposed electrode 9 is located so that the user cannot be directly in contact with the opposed electrode 9. Only the outer circumferential part of the piezoelectric vibrator 1 is adhered to the seat base 2 and water-resistance structure is provided by molding. Thus, the dispersion in the characteristic by assembling is less without dumping the vibration in the broadwise direction and the transmitter-receiver suitable for transmission reception of a high frequency ultrasonic wave is easily obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、水中で超音波の送受信
を行い、物体の探知等を行うためのセンサー部分である
超音波送受波器の改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of an ultrasonic wave transmitter / receiver which is a sensor portion for transmitting / receiving ultrasonic waves in water to detect an object.

【0002】[0002]

【従来の技術】水中を高速で移動する航走体において
は、超音波送受波器は超音波の送受信を行うための音響
窓が航走体表面と同一面をなすように航走体に埋設した
形で取り付けられるが、航走時に発生するフローノイズ
あるいはキャビテーション小気泡を含む層流が超音波送
受波器の音響性能に悪影響を与えていた。これらの影響
を低減するため、航走体の形状あるいは外表面の処理
等、構造的な面での対策がなされる一方で、送受波器に
ついても多くの対策が検討され、中でも使用周波数の高
周波化が送受波器での有効な手段であり、メガヘルツ帯
の周波数を使用した超音波送受波器の実用化が進められ
ている。
2. Description of the Related Art In a vehicle that moves at high speed in water, an ultrasonic transducer is embedded in the vehicle so that an acoustic window for transmitting and receiving ultrasonic waves is flush with the surface of the vehicle. However, the laminar flow containing cavitation small bubbles or flow noise generated during navigation had a bad influence on the acoustic performance of the ultrasonic transducer. In order to reduce these influences, structural measures such as the shape of the navigation vehicle or the treatment of the outer surface are taken, while many measures are being taken for the transducers as well. This is an effective means for the transmitter / receiver, and the ultrasonic transmitter / receiver using the frequency in the megahertz band is being put into practical use.

【0003】従来、数百kHzから数MHz近傍の周波
数帯域で使用する送受波器は円板あるいは矩形板状の圧
電磁器振動子の厚み方向振動を利用し、かかる振動子を
位置決め及び固定用の台座等に接着・固定し、ゴム状弾
性体によるモールド等の手法で防水構造を付与した構成
が一般的であった。
Conventionally, a transducer used in a frequency band of several hundreds of kHz to several MHz utilizes the vibration in the thickness direction of a piezoelectric ceramic oscillator having a disk or rectangular plate shape, and is used for positioning and fixing the oscillator. In general, the structure is such that it is adhered and fixed to a pedestal or the like, and a waterproof structure is provided by a method such as molding with a rubber-like elastic body.

【0004】[0004]

【発明が解決しようとする課題】ところで、厚み方向振
動を利用する圧電磁器振動子では、厚さ方向の対向する
両面はそれぞれほぼ全面に銀あるいはニッケル等よりな
る金属電極を形成し、この電極で分極および電気信号の
授受を行っており、厚み方向振動は、振動子全体で一様
に励振される。このような振動子で高周波化に対応する
場合、振動子の厚さは共振周波数に反比例して減少し、
また送受波器の性能である指向幅を維持しようとすれば
振動子外径あるいは幅や長さ方向の寸法を小さくしなけ
ればならず、結果的に振動子の体積減少を招くが、これ
により接着・組立作業性の悪化という組立品の特性のば
らつきを増大させる要因を増やすという問題があった。
By the way, in a piezoelectric ceramic vibrator utilizing vibration in the thickness direction, metal electrodes made of silver, nickel, or the like are formed on substantially the entire opposite surfaces in the thickness direction. Polarization and transmission / reception of electric signals are performed, and vibration in the thickness direction is uniformly excited in the entire vibrator. When using such a vibrator to handle higher frequencies, the thickness of the vibrator decreases in inverse proportion to the resonance frequency.
In addition, in order to maintain the directivity width, which is the performance of the transducer, the outer diameter of the transducer or the dimension in the width and length directions must be reduced, resulting in a reduction in the volume of the transducer. There has been a problem of increasing factors that increase variations in the characteristics of the assembled product, such as deterioration of workability in bonding and assembling.

【0005】厚み方向振動を利用する振動子において
は、よくみられる現象であるが、厚み方向振動以外の、
例えば、径方向あるいは幅や長さ方向振動の高次モード
共振等が寄生振動として現れやすいという問題がある。
200〜300kHz程度の周波数であれば、振動子の
厚さの3分の2程度の深さまでスリットを加工して寄生
振動の共振周波数を厚み方向振動の共振周波数より高く
することで影響を防ぐことも可能であるが、MHz帯ま
で高周波化すると振動子の厚さが1〜2mm、あるい
は、それ以下となるため、加工の面でも強度の面でも同
様の対策を講じることは難しい。さらに、指向特性の要
求から定まる振動子の外径あるいは幅等の寸法と、振動
子の厚み方向の寸法が、振動子の材料定数や形状から定
まる特定の寸法比に近づくと、厚み方向振動と寄生振動
間での結合振動が発生しやすくなる。結合振動が発生す
れば、本来の使用振動モードである厚み方向振動を有効
に励振できなくなると同時に、共振周波数の遷移を生
じ、目的とする周波数での使用が困難になる。
This is a phenomenon that is often seen in vibrators that utilize vibration in the thickness direction.
For example, there is a problem that higher-order mode resonance of vibration in the radial direction, width, or length direction is likely to appear as parasitic vibration.
If the frequency is about 200 to 300 kHz, the influence is prevented by processing the slit to a depth of about two-thirds of the thickness of the vibrator and making the resonance frequency of parasitic vibration higher than the resonance frequency of thickness-direction vibration. However, since the thickness of the vibrator becomes 1 to 2 mm or less when the frequency is increased to the MHz band, it is difficult to take similar measures in terms of processing and strength. Furthermore, when the dimensions such as the outer diameter or width of the vibrator, which are determined by the requirements for directional characteristics, and the dimensions in the thickness direction of the oscillator approach a specific dimensional ratio, which is determined by the material constants and shape of the oscillator, vibration in the thickness direction occurs. Coupled vibrations between parasitic vibrations are likely to occur. When the coupled vibration occurs, the vibration in the thickness direction, which is the originally used vibration mode, cannot be effectively excited, and at the same time, a transition of the resonance frequency occurs and it becomes difficult to use the vibration at the intended frequency.

【0006】また、高周波化により音波伝搬波長が短く
なることで、振動子を接着・固定するための接着剤層の
厚さの影響がみられるようになる。低い周波数で使用す
る場合、0.1〜0.2mmという接着剤層の厚さは、
波長比で数十分の一程度であり、接着剤の機械的尖鋭度
Qmの低さも無視できるが、高周波化により波長が1〜
2mm程度まで短くなると、接着剤層の厚さが無視でき
なくなり、そのQmの低さのため振動子の振動に対する
制動要因として機能し、同時に振動子の外周部分にはみ
出して硬化した接着剤も同様に制動要因となる。
Further, as the frequency of sound wave propagation is shortened by increasing the frequency, the influence of the thickness of the adhesive layer for adhering and fixing the vibrator can be seen. When used at low frequencies, the adhesive layer thickness of 0.1-0.2 mm is
The wavelength ratio is about several tenths, and the low mechanical sharpness Qm of the adhesive can be ignored, but the wavelength becomes 1
When it is shortened to about 2 mm, the thickness of the adhesive layer cannot be ignored, and because of its low Qm, it functions as a damping factor for the vibration of the vibrator, and at the same time the adhesive that sticks out to the outer peripheral part of the vibrator and hardens It becomes a braking factor.

【0007】さらには、振動子の電極面に信号授受用の
リード線を接続するが、このリード線の持つ質量、剛性
あるいは弾性も無視できず、多くは接着剤と同様に振動
子の振動に対して制動効果を及ぼす。
Furthermore, although a lead wire for transmitting and receiving a signal is connected to the electrode surface of the vibrator, the mass, rigidity, or elasticity of the lead wire cannot be ignored, and in many cases, like the adhesive, vibration of the vibrator is affected. It has a braking effect.

【0008】これらは、いずれも振動子の主たる振動姿
態である厚み方向振動の励振に対する障害であり、送受
波器としての感度低下を始めとする特性不良の原因とな
っていた。
All of these are obstacles to the excitation of the thickness direction vibration, which is the main vibration mode of the vibrator, and have been the cause of characteristic defects such as a decrease in sensitivity of the transducer.

【0009】さらに、振動子の音響面となっている電極
面上にリード線及びこれを接続するための半田点が存在
し、指向特性乱れの一因となるなど、安定した特性の送
受波器を得ることが非常に困難であった。
Further, a transducer having stable characteristics such as the presence of a lead wire and a soldering point for connecting the same on the electrode surface which is the acoustic surface of the vibrator, which causes a disturbance of the directional characteristics, is provided. Was very difficult to get.

【0010】本発明は、水中超音波送受波器の高周波化
に伴う上述の問題を解決し、容易な方法で特性のばらつ
きの少ない送受波器を提供しようとするものである。
The present invention is intended to solve the above-mentioned problems associated with increasing the frequency of an underwater ultrasonic transmitter / receiver, and to provide a transmitter / receiver with a small variation in characteristics by a simple method.

【0011】[0011]

【課題を解決するための手段】円形あるいは矩形の圧電
磁器板のほぼ中央で、厚さ方向に対向する円形あるいは
矩形の対向電極と、前記対向電極より厚さ方向に対向し
ないように各々異なる方向に引出し電極を形成し、前記
引出し電極に電気信号の授受用の電線を接続して分極お
よび励振を行うよう構成した振動子と、少なくとも対向
電極が位置する範囲に凹み部分を設けて前記対向電極が
直接触れない構造とした台座からなり、前記振動子の対
向電極が台座の凹み部分に位置するように振動子の外周
部分のみを台座に接着して振動子を固定し、ゴム状弾性
体によるモールド等の方法により防水構造を付与したこ
とを特徴とする。
DISCLOSURE OF THE INVENTION Circular or rectangular counter electrodes facing each other in the thickness direction at approximately the center of a circular or rectangular piezoelectric ceramic plate, and different directions so as not to face the counter electrode in the thickness direction. An extraction electrode is formed on the extraction electrode, an electric wire for exchanging an electric signal is connected to the extraction electrode to perform polarization and excitation, and the counter electrode is provided with a recessed portion at least in a range where the counter electrode is located. Consists of a pedestal with a structure that does not touch directly, and the oscillator is fixed by adhering only the outer peripheral part of the oscillator to the pedestal so that the counter electrode of the oscillator is located in the recessed part of the pedestal. It is characterized in that a waterproof structure is provided by a method such as molding.

【0012】水中を移動する航走体が備えている超音波
送受波器が、高速航走時に受ける悪影響を低減する方策
として、送受波器の使用周波数の高周波化が有効な手段
であり、メガヘルツ帯の周波数を使用した超音波送受波
器を実用化しようとしている。しかし、この超音波送受
波器に用いられる厚み方向振動を利用する圧電磁器振動
子について、高周波化に伴い次のような問題がある。
振動子の厚さだけではなく、指向特性の要求から振動面
の面積を小さくしなければならないことから、接着・組
立作業性の悪化による特性のばらつきの増大。厚み方
向振動特有の寄生振動が発生し易く、指向特性とのから
みで、振動面の寸法と、厚み方向の寸法比が特定の寸法
比に近づくと、厚み方向振動と寄生振動間で結合振動が
発生し、厚み方向振動を有効に励振できなくなり、さら
には目標とする共振周波数の遷移が生ずる。接着剤層
の厚さが無視できなくなり、振動子の振動に対する制動
要因になる。リード線の質量、剛性あるいは弾性も無
視できず、振動子の振動に対する制動要因になる。電
極面上のリード線及びこれを接続するための半田点が、
指向特性の乱れの一因となる。ということで、これらの
問題点を克服するために、前述の構造的な対策を講じて
解決した。
[0012] As a measure for reducing the adverse effect of the ultrasonic wave transmitter / receiver provided on the underwater vehicle in high-speed traveling, increasing the operating frequency of the wave transmitter / receiver is an effective means. We are trying to put into practical use an ultrasonic transducer that uses band frequencies. However, the piezoelectric ceramic vibrator using the vibration in the thickness direction, which is used in this ultrasonic transmitter / receiver, has the following problems as the frequency becomes higher.
Not only the thickness of the vibrator but also the area of the vibrating surface must be reduced due to the requirement of directional characteristics, which leads to an increase in variations in characteristics due to deterioration of workability in bonding and assembling. Parasitic vibration peculiar to thickness direction vibration is likely to occur, and due to the directional characteristics, when the dimension of the vibrating surface and the dimension ratio in the thickness direction approach a specific dimension ratio, coupled vibration between the thickness direction vibration and the parasitic vibration occurs. When the vibration occurs, the thickness direction vibration cannot be effectively excited, and further, the target resonance frequency transition occurs. The thickness of the adhesive layer cannot be ignored, and becomes a braking factor for the vibration of the vibrator. The mass, rigidity, or elasticity of the lead wire cannot be ignored, and becomes a braking factor for the vibration of the vibrator. The lead wire on the electrode surface and the soldering point for connecting it are
This contributes to the disturbance of the directional characteristics. Therefore, in order to overcome these problems, the structural measures described above were taken and solved.

【0013】[0013]

【実施例】以下、本発明を実施例を用いて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments.

【0014】従来の送受波器の構成例を図4(a)に上
面透視図、図4(b)に概略断面図で示す。厚み方向両
面に各々ほぼ全面に電極を施した矩形圧電磁器振動子1
の両電極にリード線26a,26bを半田付けにより接
続し、振動子21の後面は接着剤で台座22に接着し固
定されている。ケース23の貫通穴にリード線26a,
26bを通し、台座22とケース23を接着した後に、
前記リード線を気密端子28a,28bへ接続し、気密
端子をハウジング25の所定位置へ接着する。ケース2
3をハウジング25へ接着し、ケース23の後方にでき
る空間には、水圧印加時の変型あるいは破損を防止する
ためエポキシ樹脂等の充填材27を注入し硬化させた後
に、振動子21の露出側にゴム状弾性体24をモールド
して水密構造とする。
FIG. 4 (a) is a top perspective view and FIG. 4 (b) is a schematic cross-sectional view showing an example of the structure of a conventional transducer. Rectangular piezoelectric ceramic oscillator 1 with electrodes on both sides in the thickness direction
The lead wires 26a and 26b are connected to both electrodes by soldering, and the rear surface of the vibrator 21 is fixed to the pedestal 22 with an adhesive. In the through hole of the case 23, the lead wire 26a,
After passing through 26b and adhering the pedestal 22 and the case 23,
The lead wire is connected to the airtight terminals 28a and 28b, and the airtight terminal is bonded to a predetermined position of the housing 25. Case 2
3 is adhered to the housing 25, and a filler 27 such as an epoxy resin is injected into the space formed behind the case 23 to prevent deformation or damage when water pressure is applied, and after curing, the exposed side of the vibrator 21. A rubber-like elastic body 24 is molded into a watertight structure.

【0015】ここで、振動子の形状寸法について検討す
る。厚み方向振動を利用する場合の振動子の厚さは、例
えば、共振周波数を1.5MHzとすれば約1.2m
m、共振周波数を3.0MHzとすれば約0.6mmと
なる。また、振動子の厚さを1として指向特性の要求か
ら振動子の外径寸法を求めると、矩形板状の振動子の場
合、−6dB指向幅で10度とすれば矩形板の辺長は約
5、−6dB指向幅で20度とすれば辺長は約2.5と
なる。従って、1.5MHzの周波数で−6dB指向幅
で20度を得ようとすれば、矩形板状の振動子では厚さ
約1.2mmで辺長約3.0mm角の寸法となり、指向
幅をそのまま維持して周波数を3.0MHzに上げるな
らば厚さ約0.6mmで辺長約1.5mm角の大きさ、
即ち、体積では、ほぼ4分の1となるように、高周波化
につれて振動子は著しく小型化してしまう。
Now, the shape and size of the vibrator will be examined. The thickness of the vibrator when utilizing the thickness direction vibration is, for example, about 1.2 m when the resonance frequency is 1.5 MHz.
m and the resonance frequency is 3.0 MHz, it is about 0.6 mm. Further, when the outer diameter dimension of the vibrator is calculated from the requirement of the directional characteristics with the thickness of the vibrator being 1, in the case of the rectangular plate-shaped vibrator, if the -6 dB directivity width is 10 degrees, the side length of the rectangular plate is If the directional width is about 5 and -6 dB and the angle is 20 degrees, the side length is about 2.5. Therefore, if an attempt is made to obtain a -6 dB directivity width of 20 degrees at a frequency of 1.5 MHz, a rectangular plate-shaped vibrator will have a thickness of about 1.2 mm and a side length of about 3.0 mm square. If the frequency is raised to 3.0 MHz while maintaining the same value, the thickness is about 0.6 mm and the side length is about 1.5 mm square.
That is, the oscillator is significantly downsized as the frequency is increased so that the volume becomes approximately one fourth.

【0016】図5は、3MHz近傍での使用を前提とし
て、図4の構成の送受波器を製作する為に設計した正方
形板状の厚み方向振動子の特性を示す。図5(a)は振
動子単体のアドミタンス周波数特性、図5(b)はゴム
状弾性体24をモールドする前の同特性である。
FIG. 5 shows the characteristics of a square plate-shaped thickness direction oscillator designed for manufacturing the transducer having the configuration of FIG. 4 on the assumption that it is used in the vicinity of 3 MHz. 5A shows the admittance frequency characteristic of the vibrator alone, and FIG. 5B shows the same characteristic before the rubber-like elastic body 24 is molded.

【0017】従来の方法での問題として振動子における
寄生振動の発生のしやすさがあったが、図5(a)の特
性においても厚み方向振動の共振fAの他にもfB,fC
と寄生振動の共振がみられる。厚み方向振動の共振が比
較的低い周波数で振動子の体積が大きければ、台座への
接着等で幅方向振動の高次モード共振等の寄生振動を制
動し、厚み方向振動を有効に利用することも困難ではな
いが、このように小型の振動子では接着剤層の厚さある
いはリード線接続の影響が無視できない。
As a problem in the conventional method, the parasitic vibration is likely to be generated in the vibrator, but in the characteristic of FIG. 5A, in addition to the resonance f A in the thickness direction vibration, f B , f C
And resonance of parasitic vibration is seen. If the resonance of vibration in the thickness direction is relatively low and the volume of the vibrator is large, the vibration in the thickness direction should be effectively used by damping the parasitic vibration such as the higher-order mode resonance of the width direction vibration by adhering to the pedestal. However, in such a small vibrator, the influence of the thickness of the adhesive layer or the lead wire connection cannot be ignored.

【0018】図5(b)に示すように、振動子21の台
座22への接着およびリード線26a、26bの取り付
けにより、本来必要である厚み方向振動が制動されてし
まい、fAのアドミタンス値は他の寄生振動fB,fC
同等程度まで低下している。アドミタンスはインピーダ
ンスの逆数であり、これはfAにおけるインピーダンス
が大きくなり、うまく励振できなくなっていることを示
している。この状態で送受波器として組み上げても、所
期の性能を得るのが困難であることは容易に推測でき
る。組立による特性変化のしかたが一様であれば、振動
子仕様の見直し、あるいは組立方法の見直し等の対策で
特性のばらつきを押さえることも可能だが、この変化の
しかたは一様ではなく、類似の変化傾向を示す場合でも
個々の変化量は大きく異なり、容易には制御できないた
め、結果的に特性のばらつきが大きい状況を許容する
か、多数を製作し特性で選別使用するという対応が通例
であった。
As shown in FIG. 5 (b), by virtue of the bonding of the vibrator 21 to the pedestal 22 and the attachment of the lead wires 26a and 26b, the originally necessary vibration in the thickness direction is damped, and the admittance value of f A. Is reduced to the same level as the other parasitic vibrations f B and f C. The admittance is the reciprocal of the impedance, which means that the impedance at f A becomes large and the excitation becomes difficult. It can be easily inferred that it is difficult to obtain the desired performance even if the transducer is assembled in this state. If the changes in characteristics due to assembly are uniform, it is possible to suppress variations in characteristics by taking measures such as reviewing the oscillator specifications or reviewing the assembly method, but this change is not uniform, and similar Even when a change tendency is shown, the amount of change varies greatly and cannot be easily controlled.Therefore, it is customary to allow a situation in which there is a large variation in characteristics, or to produce a large number and select and use them according to characteristics. It was

【0019】図1および図2は、本発明による構成例で
あり、図1は振動子と台座の組立構造で(a)に上面
図、(b)に断面図を示し、図2は送受波器の概略断面
図を示す。矩形板状振動子1のほぼ中央に円形の対向電
極9を形成し、この対向電極から振動子の前面と背面で
各々180度異なる方向へ引出し電極10a,10bを
形成し、さらに引出し電極10a,10bの端部にはリ
ード線が半田付けにより接続される。振動子1は外周部
分にのみ接着剤11を塗布し台座2に接着・固定され
る。台座2においては、対向電極9の位置する範囲より
大きめに凹み部分12を設けており、振動子1の背面に
ある対向電極が直接台座に触れない構造となっている。
このように構成した後に、ケース3の貫通穴にリード線
6a,6bを通したのち台座2とケース3を接着して組
み立て、リード線6a,6bを気密端子8a,8bへ接
続して、気密端子をハウジング5の所定の位置に接着す
る。ケース3をハウジング5へ接着し、ケース3後方の
空間へ充填材7を注入し硬化させた後にゴム状弾性体4
を振動子1の露出面側にモールドして水密構造とする。
FIGS. 1 and 2 show an example of the structure according to the present invention. FIG. 1 shows an assembled structure of a vibrator and a pedestal, (a) is a top view and (b) is a sectional view, and FIG. The schematic sectional drawing of a container is shown. A circular counter electrode 9 is formed substantially at the center of the rectangular plate-shaped vibrator 1, and extraction electrodes 10a and 10b are formed on the front surface and the back surface of the vibrator in directions different by 180 degrees from the counter electrode. Lead wires are connected to the ends of 10b by soldering. The vibrator 1 is coated with the adhesive 11 only on the outer peripheral portion and is bonded and fixed to the pedestal 2. The pedestal 2 is provided with a recessed portion 12 that is larger than the range in which the counter electrode 9 is located, so that the counter electrode on the back surface of the vibrator 1 does not directly contact the pedestal.
After configuring in this way, the lead wires 6a and 6b are passed through the through holes of the case 3, and then the pedestal 2 and the case 3 are bonded and assembled, and the lead wires 6a and 6b are connected to the airtight terminals 8a and 8b. The terminal is adhered to the housing 5 at a predetermined position. The case 3 is adhered to the housing 5, and the filling material 7 is injected into the space behind the case 3 and cured, and then the rubber-like elastic body 4 is formed.
Is molded on the exposed surface side of the vibrator 1 to form a watertight structure.

【0020】図1に示したような電極構造を持ち、厚み
方向振動を励振する振動子は、一般的にはエネルギー閉
込め型振動子として知られるものである。このような振
動子では、厚み方向振動は対向電極部分で強く励振され
対向電極から離れるに従って、その振動は指数関数的に
減衰し、結果的に対向電極部分の近傍に振動が閉じ込め
られるという現象を示す。このような特徴を利用して、
厚み方向振動がほとんど励振されない振動子1の周辺部
分のみを接着・固定し、また振動子1の端部へリード線
を接続することにより、振動子1のほぼ中央部分に位置
する対向電極9近傍の振動を制動することなく送受波器
の構成が可能となる。
A vibrator which has an electrode structure as shown in FIG. 1 and excites vibration in the thickness direction is generally known as an energy confinement vibrator. In such a vibrator, the vibration in the thickness direction is strongly excited in the counter electrode portion, and as the distance from the counter electrode is increased, the vibration is exponentially attenuated, and as a result, the vibration is confined in the vicinity of the counter electrode portion. Show. Utilizing these characteristics,
By virtue of bonding and fixing only the peripheral portion of the vibrator 1 in which vibration in the thickness direction is hardly excited, and connecting a lead wire to the end of the vibrator 1, the vicinity of the counter electrode 9 located in the substantially central portion of the vibrator 1 It is possible to configure the wave transmitter / receiver without dampening the vibration of.

【0021】しかし、空気中での使用を前提とするなら
ば、このような振動子の利用だけで充分な効果も得られ
るが、水中で使用する場合、水圧の印加という状況を考
えなければならない。対向電極部分が台座に直接接触す
るような構成で水圧を印加した場合、その圧力により対
向電極と台座との接触状況が随時変化することになる
が、これは振動子からみた後方のインピーダンスが変化
することを意味する。このインピーダンスが変化すれ
ば、台座の方へ伝搬する音響的エネルギーが変化し、結
果的に送受波器としての感度変動をもたらすため好まし
くない。従って、振動子1の特徴を有効に利用するに
は、水圧変化に対して振動子1の後方のインピーダンス
が、ほとんど変化しないような構成をとる必要があり、
その方法としては、空隙を設けることが最も効果的であ
り、これは座グリ加工等で台座2に凹み部分12を設け
ることで容易に達成できる。凹み部分12の形成範囲
は、少なくとも対向電極9と同等の大きさが必要である
ことは明白であり、実用的には対向電極9より広い範囲
に凹み部分12を形成することが望ましい。この振動子
1と台座2を除く部分は、従来の送受波器とほぼ同様の
構成であることから、この部分の置き換えのみで容易に
改善が可能である。
However, if it is assumed that the vibrator is used in the air, a sufficient effect can be obtained only by using such a vibrator. However, when the vibrator is used in water, it is necessary to consider the situation of applying water pressure. . When water pressure is applied in such a configuration that the counter electrode part comes into direct contact with the pedestal, the contact condition between the counter electrode and the pedestal will change from time to time due to the pressure. Means to do. If this impedance changes, the acoustic energy propagating toward the pedestal changes, resulting in a change in sensitivity as a transducer, which is not preferable. Therefore, in order to effectively utilize the characteristics of the vibrator 1, it is necessary to adopt a configuration in which the impedance behind the vibrator 1 hardly changes with changes in water pressure.
As the method, it is most effective to provide a void, and this can be easily achieved by providing the dented portion 12 in the pedestal 2 by spot facing or the like. It is obvious that the formation range of the recessed portion 12 needs to be at least as large as that of the counter electrode 9, and it is desirable to form the recessed portion 12 in a wider area than the counter electrode 9 in practical use. Since the portion excluding the vibrator 1 and the pedestal 2 has substantially the same configuration as the conventional wave transmitter / receiver, it can be easily improved only by replacing this portion.

【0022】図3は、3MHz近傍での使用を前提とし
て製作した図1の構成の送受波器の特性であり、図3
(a)は振動子単体のアドミタンス周波数特性、図3
(b)はゴム状弾性体4をモールドする前の同特性を複
数個について示したものである。
FIG. 3 shows the characteristics of the transmitter / receiver having the structure shown in FIG. 1, which is manufactured on the assumption that it is used in the vicinity of 3 MHz.
(A) is the admittance frequency characteristic of the oscillator alone, FIG.
(B) shows a plurality of the same characteristics before the rubber-like elastic body 4 is molded.

【0023】図3(a)では、従来の全面電極を施した
振動子と同様に寄生振動の共振fb,fC等はみられる
が、厚み方向振動fAと比較すると、従来よりは小さく
なっており、厚み方向振動の単一共振に近づいている。
図3(b)では、fb,fCの寄生振動が消えているが、
これは振動子1の外周部分のみを接着・固定することで
幅方向振動の高次モード共振等の寄生振動に制動効果が
現れていることを示している。これに対して厚み方向振
動faは、アドミタンス値の変化も少なく、図5(b)
の特性例で見られたように、アドミタンス値が振動子単
体の5分の1程度まで小さくなるというような極端な変
化もなく、厚み方向振動が良好に励振されていることを
示す。従来の構成でみられたような特性変化の乱れもな
く、5個の送受波器は、共振周波数もアドミタンス特性
の形状も、かなりよく揃った状態で組み立てられてい
る。
In FIG. 3 (a), resonances f b , f C, etc. of parasitic vibration are seen as in the case of the conventional vibrator having the entire surface electrode, but it is smaller than the conventional case when compared with the vibration f A in the thickness direction. And approaches a single resonance of vibration in the thickness direction.
In FIG. 3B, the parasitic vibrations of f b and f C disappear,
This indicates that by bonding and fixing only the outer peripheral portion of the vibrator 1, a damping effect appears in parasitic vibration such as higher-order mode resonance of widthwise vibration. On the other hand, in the thickness direction vibration f a , there is little change in the admittance value, and the vibration ‘
As shown in the characteristic example, there is no extreme change such that the admittance value is reduced to about 1/5 of that of the vibrator alone, and the thickness direction vibration is well excited. The five transducers are assembled in a state in which the resonance frequency and the shape of the admittance characteristic are fairly well aligned without the disturbance of the characteristic change as seen in the conventional configuration.

【0024】[0024]

【発明の効果】以上に述べたように、本発明によれば、
送受波器の高周波化に対応して超音波の送受信を行う場
合に振動子の主たる振動モードとして利用される厚み方
向振動の励振において、その厚み方向振動を制動するこ
となく、また組立による特性のばらつきが少ない送受波
器を容易に得ることが可能である。
As described above, according to the present invention,
In the excitation of the thickness direction vibration used as the main vibration mode of the vibrator when transmitting and receiving ultrasonic waves corresponding to the higher frequency of the transducer, without damaging the thickness direction vibration, It is possible to easily obtain a transducer with little variation.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による水中超音波送受波器の台座部分の
組立構造を示す図で、図1(a)は上面図、図1(b)
は断面図。
1A and 1B are views showing an assembly structure of a pedestal portion of an underwater ultrasonic transducer according to the present invention, FIG. 1A being a top view and FIG. 1B.
Is a cross-sectional view.

【図2】本発明による送受波器の概略構成を示す断面
図。
FIG. 2 is a cross-sectional view showing a schematic configuration of a wave transceiver according to the present invention.

【図3】本発明で使用する圧電磁器振動子の特性を示す
図で、図3(a)は単体のアドミタンス特性、図3
(b)はモールド前の組立品のアドミタンス特性。
FIG. 3 is a diagram showing characteristics of a piezoelectric ceramic oscillator used in the present invention, FIG. 3 (a) is a admittance characteristic of a single unit, and FIG.
(B) shows the admittance characteristics of the assembly before molding.

【図4】従来の水中超音波送受波器の概略構成図で、図
4(a)は上面透視図、図4(b)は断面図。
4A and 4B are schematic configuration diagrams of a conventional underwater ultrasonic transducer, FIG. 4A is a top perspective view, and FIG. 4B is a cross-sectional view.

【図5】従来構成で使用する圧電磁器振動子の特性を示
す図で、図5(a)は単体のアドミタンス特性、図5
(b)はモールド前の組立品のアドミタンス特性。
FIG. 5 is a diagram showing characteristics of a piezoelectric ceramic oscillator used in a conventional configuration, FIG. 5 (a) is a admittance characteristic of a single unit, and FIG.
(B) shows the admittance characteristics of the assembly before molding.

【符号の説明】[Explanation of symbols]

1,21 圧電磁器または圧電磁器振動子 2,22 台座 3,23 ケース 4,24 ゴム状弾性体 5,25 ハウジング 6a,6b,26a,26b リード線 7,27 充填材 8a,8b,28a,28b 気密端子 9 対向電極 10a,10b 引出し電極 11 接着剤 12 凹み部分 1,21 Piezoelectric ceramic or piezoelectric ceramic oscillator 2,22 Pedestal 3,23 Case 4,24 Rubber-like elastic body 5,25 Housing 6a, 6b, 26a, 26b Lead wire 7,27 Filler 8a, 8b, 28a, 28b Airtight terminal 9 Counter electrodes 10a, 10b Lead-out electrode 11 Adhesive 12 Recessed part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 円形あるいは矩形板状の圧電磁器のほぼ
中央で、厚さ方向に対向する円形あるいは矩形の対向電
極と、前記対向電極より厚さ方向で対向しないように各
々異なる方向に一対の引出し電極とを形成し、前記引出
し電極に電気信号の授受用の電線を接続して分極および
励振を行うよう構成した振動子と、前記対向電極が位置
する範囲に凹み部分を設けて前記対向電極が直接触れな
い構造とした台座とからなり、前記対向電極が前記台座
の凹み部分に位置するように前記振動子の外周部分のみ
を前記台座に接着して固定し、モールドによる防水構造
を付与したことを特徴とする水中超音波送受波器。
1. A circular or rectangular counter electrode facing in the thickness direction at approximately the center of a circular or rectangular plate-shaped piezoelectric ceramic, and a pair of electrodes in different directions so as not to face the counter electrode in the thickness direction. An extraction electrode is formed, a vibrator configured to perform polarization and excitation by connecting an electric wire for exchanging an electric signal to the extraction electrode, and the counter electrode provided with a recessed portion in a range where the counter electrode is located. Consists of a pedestal with a structure that does not directly touch, and only the outer peripheral portion of the vibrator is adhered and fixed to the pedestal so that the counter electrode is located in the recessed portion of the pedestal, and a waterproof structure by a mold is provided. An underwater ultrasonic transducer.
JP08602195A 1995-03-17 1995-03-17 Ultrasonic transducer Expired - Lifetime JP3477270B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08602195A JP3477270B2 (en) 1995-03-17 1995-03-17 Ultrasonic transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08602195A JP3477270B2 (en) 1995-03-17 1995-03-17 Ultrasonic transducer

Publications (2)

Publication Number Publication Date
JPH08256395A true JPH08256395A (en) 1996-10-01
JP3477270B2 JP3477270B2 (en) 2003-12-10

Family

ID=13875017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08602195A Expired - Lifetime JP3477270B2 (en) 1995-03-17 1995-03-17 Ultrasonic transducer

Country Status (1)

Country Link
JP (1) JP3477270B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008151667A (en) * 2006-12-18 2008-07-03 Mitsubishi Electric Corp Distance measuring sensor and facility instrument equipped with the same
JP2008170306A (en) * 2007-01-12 2008-07-24 Mitsubishi Electric Corp Evaluation method of ranging sensor
JP2012198106A (en) * 2011-03-22 2012-10-18 Panasonic Corp Ultrasonic sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008151667A (en) * 2006-12-18 2008-07-03 Mitsubishi Electric Corp Distance measuring sensor and facility instrument equipped with the same
JP4598747B2 (en) * 2006-12-18 2010-12-15 三菱電機株式会社 Ranging sensor and equipment equipped with the same
JP2008170306A (en) * 2007-01-12 2008-07-24 Mitsubishi Electric Corp Evaluation method of ranging sensor
JP2012198106A (en) * 2011-03-22 2012-10-18 Panasonic Corp Ultrasonic sensor

Also Published As

Publication number Publication date
JP3477270B2 (en) 2003-12-10

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