JPH0824548A - Air purifier - Google Patents

Abstract

PURPOSE:To provide an air purifier enabling to efficiently remove various contamination substances without using chemicals. CONSTITUTION:This device is provided with a contamination substance collection room 1 for discharging contaminated air fed into a gas diffuser 7 through a suction duct 9 into water through fine vent holes 13 of the gas diffuser 7, a water condensation room 3 provided with a heat exchanger 16, an air duct 5 for recovering air of which a contamination component is removed in the water in the inside of the contamination substance collection room 1 and introducing it into the water condensation room 3, and a water discharge pipe 6 for circulating waste water from the contamination substance collection room 1, and the water discharge pipe 6 is heat-exchangeably connected to a heat exchanger 16 and the purified air is taken out by an exhaust duct 17 through the heat exchanger 16.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention purifies corrosive harmful gas generated from various chemicals in a clean room such as a manufacturing site of precision equipment such as semiconductor devices or a medical field, and supplies air to the clean room. The present invention relates to an air purification device suitable for removing contaminants such as nitrogen oxides and sulfurous acid gas suspended therein.

[0002]

2. Description of the Related Art There are various types of air purifiers, most of which remove pollutants from the air by utilizing chemical reaction, chemical neutralization reaction, catalytic action or physical adsorption action. Is.

[0003]

For this reason, not only chemicals and chemical filters are indispensable, but also these must be replaced regularly, so a large amount of maintenance cost is required. There is also a problem that the types and amounts of contaminants that can be removed are limited.

Therefore, it is an object of the present invention to provide an air purifying device which can efficiently remove various pollutants without using chemicals.

[0005]

According to the present invention, in order to achieve the above-mentioned object, polluted air fed into a gas diffuser through an intake duct is discharged into water through fine ventilation holes of the gas diffuser. The substance collection chamber, the moisture coagulation chamber provided with a heat exchanger, the air duct for collecting the air from which pollutant components have been removed in the water in the pollutant collection chamber and guiding it to the moisture coagulation chamber, and the pollutant collection chamber Equipped with a drainage pipe for circulating wastewater and an exhaust duct for taking out purified air,
An air purification apparatus is provided, wherein the drainage pipe is thermally coupled to the heat exchanger, and the air passing through the heat exchanger is guided to the exhaust duct.

[0006]

In the present invention, the polluted air is discharged into the water through the fine vent holes of the gas diffuser, so that the pollutant is absorbed into the water and wiped off. Then, the primary purified air recovered from the pollutant collection chamber is subjected to the secondary purification action in the moisture aggregation chamber provided with the heat exchanger. Particularly, the primary purified air has a high humidity, but becomes low humidity air by passing through the heat exchanger. Moreover, since the heat exchanger is cooled by using the drainage of the pollutant trap chamber, the water used can be effectively used in two ways.

[0007]

Next, an embodiment of the present invention will be described with reference to the drawings.

The air purification apparatus shown in FIG. 1 includes a first tank 2 for setting a pollutant trap chamber 1 and a heat exchange type water aggregating chamber 3.
And a second tank 4 for setting the above. The second tank 4 communicates with the first tank 2 via an air duct 5 and a drain pipe 6.

A gas diffuser 7 and ultrapure water 8 are contained in the first tank 2, and the gas diffuser 7 communicates with an intake duct 9. 10 is an agitator and 11 is a water supply pipe. As shown in FIG. 2, the gas diffuser 7 has a plurality of branched pipe portions 12, and a large number of fine ventilation holes 13 are scattered in each pipe portion 12. Then, the gas diffuser 7 has its pipe portion 12 immersed in the ultrapure water 8,
It is provided in the first tank 2. Further, a conductivity meter 14 as a water quality monitor is connected to the drainage pipe 6, and an electromagnetic opening / closing valve 15 connected to the water supply pipe 11 is
Opening / closing control is performed based on the output signal of the conductivity meter 14.

On the other hand, in the second tank 4, the heat exchanger 16
Is provided, and the drainage pipe 6 is thermally coupled to the heat exchanger 16. Reference numeral 17 denotes an exhaust duct for discharging purified air, and 18 and 19 denote drain pipes.

The intake duct 9 communicates with the inside of the clean room, and the dirty air in the clean room is taken in by the intake duct 9.
Through the gas diffuser 7 at a predetermined pressure.
The polluted air is discharged into the ultrapure water 8 as a large number of fine bubbles through the ventilation hole 13 of the pipe portion 12 of the gas diffuser 7. In this way, the ultrapure water 8 that has come into contact with the contaminated air over a wide area absorbs and collects acidic gases such as hydrochloric acid, sulfuric acid, nitric acid, and hydrofluoric acid in the contaminated air or contaminants such as ammonia.

The high-humidity air primarily purified in the first tank 2 as described above enters the second tank 4 through the air duct 5 and passes through the heat exchanger 16 in the second tank 4. Allow water to agglomerate. That is, since the heat exchanger 16 is thermally coupled to the drainage pipe 6, and the drainage from the first tank 2 flows through the drainage pipe 6, the primary purified air is cooled by the heat exchanger 16. Allow water to agglomerate. For this reason, the pollutants which are not completely removed in the pollutant trap chamber 1 but remain in the primary purified air are trapped in the heat exchange type coagulation chamber 3 in the form of being mixed with the coagulated water. It is discharged to the outside of the second tank 4 through the drainage pipe 19.

The low-humidity air that has passed through the heat exchanger 16 and is secondarily purified is supplied into the clean room through the exhaust duct 17. The water used for cooling the heat exchanger 16 is discharged through the drain pipe 18.

Contamination of the waste water in the pollutant collection chamber 1 is detected by the conductivity meter 14, and the electromagnetic opening / closing valve 15 is opened to open the first tank only when the value indicated by the conductivity meter 14 exceeds a predetermined range. The ultrapure water 8 in 2 is replenished. Therefore, the first tank 2
The ultrapure water 8 therein is always maintained at a high purity. Although the ultrapure water 8 in the above-described embodiment is high-purity water that is frequently used in the manufacturing site of precision equipment such as semiconductor devices, it does not prevent mixing of a suitable chemical agent.

[0015]

As described above, according to the present invention, the polluted air is diffused into water and the acidic gas such as hydrochloric acid, sulfuric acid, nitric acid or hydrofluoric acid contained in the polluted air, and pollutants such as ammonia are removed. Pure water can be removed as an adsorbent. In addition, since the primary purified air collected from the pollutant collection chamber is secondarily purified in the heat exchange type moisture coagulation chamber, it is possible to remove pollutants that could not be completely removed by the primary purification, and the purified air is passed through the heat exchanger. Since it is taken out, purified air with low humidity can be efficiently and inexpensively supplied into the clean room.

[Brief description of drawings]

FIG. 1 is a side view showing the overall configuration of an air purification device according to an embodiment of the present invention.

FIG. 2 is a perspective view of a pollutant trap chamber according to an embodiment of the present invention.

[Explanation of symbols]

 1 Pollutant Collection Chamber 3 Heat Exchange Moisture Coagulation Chamber 5 Air Duct 6 Drain Pipe 7 Gas Diffuser 8 Ultra Pure Water 9 Intake Duct 13 Vent Hole 16 Heat Exchanger 17 Exhaust Duct

Claims (1)

[Claims] 1. A pollutant collection chamber for discharging polluted air sent into a gas diffuser through an intake duct into water through fine ventilation holes of the gas diffuser, a water condensation chamber provided with a heat exchanger, and pollution. An air duct that collects air from which pollutants have been removed in the water in the substance collection chamber and guides it to the moisture aggregation chamber,
A drain pipe for circulating the waste water of the pollutant trap chamber, and an exhaust duct for taking out purified air, the drain pipe being thermally coupled to the heat exchanger, the air passing through the heat exchanger. Is introduced into the exhaust duct.