JPH08240739A - Method for connecting optical parts and optical parts - Google Patents

Method for connecting optical parts and optical parts

Info

Publication number
JPH08240739A
JPH08240739A JP7068195A JP7068195A JPH08240739A JP H08240739 A JPH08240739 A JP H08240739A JP 7068195 A JP7068195 A JP 7068195A JP 7068195 A JP7068195 A JP 7068195A JP H08240739 A JPH08240739 A JP H08240739A
Authority
JP
Japan
Prior art keywords
optical
adhesive
optical parts
parts
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7068195A
Other languages
Japanese (ja)
Inventor
Koji Oura
宏治 大浦
Hideyuki Hosoya
英行 細谷
Teruhiko Omori
輝彦 大森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP7068195A priority Critical patent/JPH08240739A/en
Publication of JPH08240739A publication Critical patent/JPH08240739A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To simplify the work to protect the entire part of optical parts by coating these optical parts including the optical path junctures between the optical parts with an adhesive so as to cover the surfaces of the optical parts on both sides. CONSTITUTION: The optical parts 10, 20, 30 are immersed into the adhesive 52 in an uncured liquid form and at least the optical connecting area is sunk under the liquid surface of the adhesive 52. The optical parts are aligned in the state of embedding the parts into the adhesive and thereafter, the adhesive 52 in cured. The alignment is executed by aligning the end faces of the optical fibers, more preferably the centers of the core, thereby minimizing the optical connection loss and finely adjusting the mutual positions until the light power to be transmitted is maximized. A UV adhesive of an epoxy system or acrylate system having the refractive index approximate to the refractive index of the cores, etc., to be aligned is used for the optical adhesive 52. In such a case, the alignment is executed in the state of immersing the optical parts into the optical adhesive 52 and, therefore, the subsequent occurrence of misalignment by the intervention of the adhesive between the end faces of the optical parts like in alignment in the air does not arise any more.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、光部品と光部品、た
とえば光導波路型の光カプラ、光合波器などと光ファイ
バ(又は光ファイバアレイ)、あるいは光導波路同士や
光ファイバ(又は光ファイバアレイ)同士等の接続に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical component and an optical component, for example, an optical waveguide type optical coupler, an optical multiplexer and the like and an optical fiber (or an optical fiber array), or optical waveguides or an optical fiber (or an optical fiber). Arrays) for connection of each other.

【0002】[0002]

【従来の技術】現在、光部品と光部品の接続には、次の
3方式を用いている。 融着:部品間の接続点をレーザにより溶融接合す
る。 接着:屈折率を両光路の値に整合させた接着剤によ
り接着する。 機械的接触:一定の押圧で光路端同士を押し当て
る。 これらの中、低ロス、低コスト、接続プロセス容易等の
理由で、の接着が主流になっている。
2. Description of the Related Art Currently, the following are used to connect optical components to each other.
Three methods are used. Fusion: The connection points between parts are fusion-bonded by laser. Adhesion: Adhesion is performed with an adhesive whose refractive index is matched to the values of both optical paths. Mechanical contact: The optical path ends are pressed against each other with a constant pressure. Among these, adhesion is predominant because of low loss, low cost, easy connection process, and the like.

【0003】従来の、光部品の、接着による接続方法の
一例を述べる。図4は、光部品10の両側に光部品2
0,30を接続する場合である(特開平2−77704
号公報参照)。なお、光部品10はたとえば導波路型ス
プリッタ、光部品20は入力側光ファイバアレイで、2
2は光ファイバ、光部品30は出力側光ファイバアレイ
で、32は光ファイバテープである。
An example of a conventional method for connecting optical components by adhesion will be described. FIG. 4 shows the optical component 2 on both sides of the optical component 10.
This is the case of connecting 0 and 30 (Japanese Patent Laid-Open No. 2-77704).
(See the official gazette). The optical component 10 is, for example, a waveguide type splitter, and the optical component 20 is an input side optical fiber array.
Reference numeral 2 is an optical fiber, optical component 30 is an output side optical fiber array, and 32 is an optical fiber tape.

【0004】これらを、次のように接続する。 光部品10,20,30の接続面を鏡面仕上げす
る。 それから、光路の調心を行う(同図(a))。 それから光学接着剤40により互いに接続する(同
図(b))。 その後、全体に、たとえばシリコン樹脂等によるコ
ーティング42を施して、光部品モジュール44とする
(同図(c))。 その後、必要に応じて金属ケース46をかぶせる
(同図(d))。
These are connected as follows. The connection surfaces of the optical components 10, 20, 30 are mirror-finished. Then, the optical path is aligned ((a) in the figure). Then, they are connected to each other by an optical adhesive 40 (FIG. 2B). After that, a coating 42 of, for example, a silicon resin is applied to the whole to form an optical component module 44 (FIG. 7C). After that, the metal case 46 is covered if necessary ((d) of the same figure).

【0005】[0005]

【発明が解決しようとする課題】しかし、上記の方法に
は次の問題がある。 部品同士の接続とその後のコーティングのために、
接着剤を2度用いることになり、能率化の妨げになる。 調心は空気中又は真空中で行うが、その後の接着剤
塗布や接着により、光の伝搬に変化が生じ、光軸がズレ
る可能性がある。なお、接着剤塗布後に調心し直すの
は、作業の繰り返しとなるので効率的でない。 従来、コーティング42は筆塗り、ポッティング、
ディッピィングにより行っているため、形状が一定でな
い。これは、運搬を含めた金属ケーシング等の自動化工
程に不利となる。
However, the above method has the following problems. For connecting the parts together and subsequent coating,
The adhesive is used twice, which hinders efficiency. The alignment is performed in air or in vacuum, but there is a possibility that the propagation of light may change due to subsequent application or adhesion of an adhesive and the optical axis may shift. Realigning after applying the adhesive is not efficient because it requires repeated work. Conventionally, the coating 42 is brushed, potted,
The shape is not constant because it is done by dipping. This is a disadvantage for automated processes such as metal casing including transportation.

【0006】[0006]

【課題を解決するための手段】光部品を接続するに際し
て、図1に例示するように、光部品10,20,30
を、光学接着剤52中に埋没させ、埋没させた状態にお
いて、前記光部品の調心を行い、その後、前記接着剤5
2を硬化させる。
When connecting optical components, as shown in FIG. 1, the optical components 10, 20, 30 are connected.
Embedded in the optical adhesive 52, and in the embedded state, the optical component is aligned, and then the adhesive 5
Cure 2

【0007】光学接着剤52中に埋没させるというの
は、光部品10,20,30を未硬化液状の接着剤52
に浸漬し、少なくとも光接続領域を接着剤52の液面以
下に沈ませるということである。
Immersion in the optical adhesive 52 means that the optical components 10, 20, 30 are uncured liquid adhesive 52.
That is, at least the optical connection region is submerged below the liquid surface of the adhesive 52.

【0008】調心は、光路を有する部品においては、光
ファイバの端面、好ましくはコアの中心を一致させて光
接続損失を最小にすることであり、レンズを有する部品
の場合は、光軸を合わせることである。調心には、たと
えば公知のパワーモニタ法等を用いて、伝達する光パワ
−が最大となるように相互の位置を微調整する。
Alignment is to align the end faces of the optical fibers, preferably the centers of the cores, in parts having an optical path to minimize the optical connection loss, and in the case of parts having a lens, the optical axis is to be adjusted. It is to match. For alignment, a well-known power monitor method or the like is used, and the mutual positions are finely adjusted so that the transmitted optical power is maximized.

【0009】光学接着剤52には、調心するコア等と屈
折率が近似する、エポキシ系又はアクリレート系UV接
着剤を用いる。たとえば、エポキシ系のオプトダイン
(商品名、ダイキン製)を好適に用いることができる。
光学接着剤52は接着剤槽50内に入れる。後記のよう
に、接着剤槽50の内面形状が光部品モジュール56の
外形となる。通常の四角皿形の接着剤槽50を使えば、
光部品モジュール56は四角のブロックになる。また、
たとえば図2のような特殊な形状の光部品モジュール5
6を作るときは、これと同じ内面形状を持つ接着剤槽5
0を使う。
As the optical adhesive 52, an epoxy or acrylate UV adhesive having a refractive index similar to that of a centering core or the like is used. For example, epoxy-based Optodyne (trade name, manufactured by Daikin) can be preferably used.
The optical adhesive 52 is put in the adhesive tank 50. As described later, the inner surface shape of the adhesive agent tank 50 becomes the outer shape of the optical component module 56. If you use a normal square plate adhesive tank 50,
The optical component module 56 is a square block. Also,
For example, an optical component module 5 having a special shape as shown in FIG.
When making 6, adhesive tank 5 with the same inner surface shape as this
Use 0.

【0010】[0010]

【作 用】 光部品を光学接着剤52に浸した状態で調心を行う
と、空気中での調心のように、その後の光部品端面間の
接着剤介在によって狂いが生ずると言うことが無くな
り、また接着部分を含めた広い範囲を物理的特性が同じ
材料でコーティングするのであるから、光接続状態の時
間的変化あるいは物理的条件の変化による影響が大幅に
減少する。 接着剤52が、光部品間の接着と、接続部品のコー
ティングの二役を兼ね、2工程が1工程で済む。
[Operation] If alignment is performed while the optical component is dipped in the optical adhesive 52, it may be said that the alignment may occur in the air due to the interposition of the adhesive between the end faces of the optical component, like alignment in the air. Moreover, since a wide area including the adhesive portion is coated with a material having the same physical property, the influence of the temporal change of the optical connection state or the change of the physical condition is significantly reduced. The adhesive 52 doubles as the adhesion between the optical components and the coating of the connection components, and the two processes are completed in one process.

【0011】[0011]

【実施例】図1について述べる。ここで、基板型の導波
路とは、たとえばSiO2系、半導体結晶系、あるいは
誘電体結晶系など種々存在し、いずれもこれらの基板上
に火炎堆積法やCVD法等で厚みを付けた後に、ホトリ
ソ技術によりコア層、クラッド層を形成して導波路パタ
ーンを構成したものである。この図1の例は、光部品1
0の両側に光部品20と光部品30を接続する場合であ
る。光部品10はたとえば導波路チップ部品、光部品2
0はたとえば入力側光ファイバアレイで、22は光ファ
イバテープ、光部品30はたとえば出力側光ファイバア
レイで、32は光ファイバテープである。これらの光フ
ァイバアレイ20(30)は、図3のように、表面に多
心V溝26が形成された平板状のガラス板27に光ファ
イバ23を載置し、その上にガラス蓋28をかぶせて接
着剤にて固定した構造を有する。50は接着剤槽で、た
とえば細長い四角皿状である。52は光学接着剤で、た
とえばエポキシ系又はアクリレート系あるいは変性アク
リレート系のUV(紫外線硬化型)接着剤であり、紫外
線により短時間に接着することが可能である。接続は、
次のようにする。
EXAMPLE Referring to FIG. Here, there are various types of substrate-type waveguides such as SiO2 type, semiconductor crystal type, and dielectric crystal type, and all of them are formed on these substrates by a flame deposition method, a CVD method, or the like. A waveguide pattern is formed by forming a core layer and a clad layer by the photolithography technique. The example of FIG. 1 is an optical component 1.
This is a case where the optical components 20 and 30 are connected to both sides of 0. The optical component 10 is, for example, a waveguide chip component or an optical component 2
Reference numeral 0 is an input side optical fiber array, 22 is an optical fiber tape, optical component 30 is an output side optical fiber array, and 32 is an optical fiber tape. In these optical fiber arrays 20 (30), as shown in FIG. 3, an optical fiber 23 is placed on a flat glass plate 27 having a multi-core V groove 26 formed on its surface, and a glass lid 28 is placed thereon. It has a structure in which it is covered and fixed with an adhesive. Reference numeral 50 denotes an adhesive agent tank, which has, for example, an elongated rectangular dish shape. Reference numeral 52 denotes an optical adhesive, for example, an epoxy-based, acrylate-based, or modified acrylate-based UV (ultraviolet curing type) adhesive, which can be bonded in a short time by ultraviolet rays. The connection is
Do the following:

【0012】 図1(a)のように、光部品10,2
0,30にそれぞれホルダ14,24,34(たとえば
吸着ホルダ)を取り付け、接着剤槽50の接着剤52の
中に浸漬し、埋没させる。なお、ホルダ14,24,3
4としては、光部品10,20,30に着脱容易で、か
つそれらを接着剤52中に保持できるものであれば、ど
のようなものでもよい。上述のホルダ以外に、たとえば
洗濯ばさみに棒を付けたようなものでもよいが、何れの
場合でも、ホルダの図示しない端部には、ホルダの位置
を変化させるアクチュエータが取り付けられる。 接着剤52中に埋没させたまま、上記ホルダの位置
を紙面上下左右、さらに深さ方向へも適宜変化させて、
光部品10〜20、及び光部品10〜30の各端面を接
触させ、光ファイバアレイの光ファイバ端面と中間の導
波路チップの導波路(コア部)の端面を合わせるように
調心を行う(同図(b))。なお図示しないが、導波路
のコア部は光導波路部品の表面よりも幾分か下側に位置
する。
As shown in FIG. 1A, the optical components 10, 2
The holders 14, 24, and 34 (for example, suction holders) are attached to 0 and 30, respectively, and they are immersed in the adhesive 52 of the adhesive tank 50 and buried. In addition, the holders 14, 24, 3
4 may be of any type as long as it can be easily attached to and detached from the optical components 10, 20, 30 and can be held in the adhesive 52. In addition to the above-mentioned holder, for example, a clothespin with a stick may be used, but in any case, an actuator for changing the position of the holder is attached to the end portion (not shown) of the holder. While being buried in the adhesive 52, the position of the holder is appropriately changed in the vertical and horizontal directions of the paper and further in the depth direction,
The respective end faces of the optical components 10 to 20 and the optical components 10 to 30 are brought into contact with each other, and alignment is performed so that the end face of the optical fiber of the optical fiber array and the end face of the waveguide (core portion) of the intermediate waveguide chip are aligned ( The same figure (b)). Although not shown, the core portion of the waveguide is located slightly below the surface of the optical waveguide component.

【0013】 同図(c)のように、光部品10と2
0の光路接合部102、及び光部品10と30の光路接
合部103の上から紫外線54をスポット照射し、その
付近の接着剤52だけを硬化させる(接着剤52の硬化
した部分を濃いドットで示した)。 ホルダ14,24,34を光部品10,20,30
から外す(同図(d))。外しても、光部品相互間は離
脱しない。また、接着剤52の一部が槽50の底まで硬
化した状態になっているので、それに支持されて、光部
品が沈むこともない。 紫外線の照射方向と領域を変化させて、接着剤52
の全体を、紫外線54の照射により硬化させる(同図
(e))。
As shown in FIG. 1C, the optical components 10 and 2
The ultraviolet ray 54 is spot-irradiated from above the optical path joint portion 102 of 0 and the optical path joint portion 103 of the optical components 10 and 30, and only the adhesive 52 in the vicinity thereof is cured (the cured portion of the adhesive 52 is indicated by a dark dot. Indicated). The holders 14, 24, 34 are attached to the optical components 10, 20, 30.
(Fig. 4 (d)). Even if it is removed, the optical components are not separated from each other. Further, since a part of the adhesive 52 is cured to the bottom of the tank 50, the optical component is not sunk by being supported by the adhesive 52. By changing the irradiation direction and area of the ultraviolet rays, the adhesive 52
The whole is cured by irradiation of ultraviolet rays 54 ((e) in the same figure).

【0014】 硬化した光学接着剤52(接続した光
部品10,20,30を内蔵する)を、接着剤槽50か
ら離型する(同図(f))。これが光部品モジュール5
6となる。光部品モジュール56にはその後、必要に応
じて金属ケースを被せる。 ホルダ14,24,34及び接着剤槽50を、溶剤
等でクリーニングする。
The cured optical adhesive 52 (containing the connected optical components 10, 20, 30) is released from the adhesive tank 50 (FIG. 6F). This is the optical component module 5
It becomes 6. Thereafter, the optical component module 56 is covered with a metal case, if necessary. The holders 14, 24, 34 and the adhesive tank 50 are cleaned with a solvent or the like.

【0015】以上の方法において、紫外線硬化は、当
初、光路接合部103の周囲のみに行っているが、狙い
を定めたスポット的ではなく部品周囲全体を当初から硬
化させることもできる。また、ホルダ材質を、光学接着
剤から離脱容易なものにすれば、紫外線がホルダ周囲に
照射されないようにあえて考慮する必要はなく、さら
に、ホルダ材質によっては、硬化後も光学接着剤中にそ
のまま留まっても製品に悪影響を及ぼすことがない。ま
た、ホルダを抜き去った後に穴ができる場合もあるが、
この場合も、穴の容積はそれほど大きくないので、特性
に与える影響は小さい。
In the above method, the UV curing is initially performed only around the optical path joining portion 103, but it is also possible to cure the entire periphery of the component from the beginning, rather than the spot-like aiming. In addition, if the holder material is easily detached from the optical adhesive, it is not necessary to consider it so that ultraviolet rays are not irradiated around the holder, and depending on the holder material, it may remain in the optical adhesive after curing. Even if it stays, it does not adversely affect the product. Also, there may be holes after removing the holder,
Also in this case, since the volume of the hole is not so large, the influence on the characteristics is small.

【0016】[本発明の応用可能分野]上記の光導波路
チップと光ファイバの接続以外に、次の分野にも応用可
能である。 光ファイバと光ファイバの接続及び保護。 光ファイバとレンズの接続及び保護。 光部品に関する機械的、化学的保護。
[Applicable field of the present invention] In addition to the connection between the optical waveguide chip and the optical fiber described above, the present invention can be applied to the following fields. Connecting and protecting optical fibers. Connection and protection of optical fiber and lens. Mechanical and chemical protection for optical components.

【0017】次に、接着剤は、光接合部を含んで左右の
光部品の表面に跨ってコーティングし、好ましくは図示
の如く、これら光部品全体の周囲を厚みを持ってコーテ
ィングするが、調心と接着固定の工程を省略化するに
は、必ずしも光部品全体を接着剤中に封入埋没させる必
要はない。すなわち、光路接合部を含んで光部品の一部
(たとえば上半分のみ)が接着剤中に浸される治具容器
等を用いても本発明を実施できる。この場合の製品は、
両側の光部品の表面を覆うように接着剤がコーティング
されているが、光部品全体が接着剤中に封入されている
わけではない。両側の光部品の表面を覆うようにとは、
コーティング層が左右側で分離している状態や、コーテ
ィング層に多少の欠部(穴)がある場合を含むことを意
味する。
Next, the adhesive is coated over the surfaces of the left and right optical components including the optical joining portion, and preferably, as shown in the drawing, the entire periphery of these optical components is coated with a thickness, but The entire optical component does not necessarily have to be embedded and embedded in the adhesive in order to omit the process of bonding and fixing the core. That is, the present invention can be implemented by using a jig container or the like in which a part (for example, only the upper half) of the optical component including the optical path joining portion is immersed in the adhesive. The product in this case is
Although the adhesive is coated so as to cover the surfaces of the optical components on both sides, the entire optical component is not enclosed in the adhesive. To cover the surfaces of the optical components on both sides,
It means that the coating layer is separated on the left and right sides and that the coating layer has some notches (holes).

【0018】[0018]

【発明の効果】 光部品を接着する接着剤が、同時に組立部品全体を
保護するので、部品全体の保護作業を省略できる。これ
は、製作コストの削減につながる。 調心時、光路端間に空気層を挟む状態で調心するよ
りも、光学接着剤を挟んで調心する方が、高精度で速や
かに調心できる。 接着剤槽50を母材として用いることができるの
で、光部品モジュール56の形状を一定化することが可
能である。したがって、その後のケーシングも容易にな
る。
EFFECTS OF THE INVENTION Since the adhesive agent for bonding the optical parts simultaneously protects the entire assembly parts, the work of protecting the entire parts can be omitted. This leads to a reduction in production cost. At the time of alignment, it is possible to perform alignment with high accuracy and speed more quickly with alignment with an optical adhesive than with alignment with an air layer sandwiched between the optical path ends. Since the adhesive agent tank 50 can be used as a base material, the shape of the optical component module 56 can be made constant. Therefore, the subsequent casing becomes easy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を工程順に示した説明図。FIG. 1 is an explanatory view showing an embodiment of the present invention in the order of steps.

【図2】本発明により製作可能な光部品モジュール56
の一例の説明図。
FIG. 2 is an optical component module 56 that can be manufactured according to the present invention.
Explanatory drawing of an example.

【図3】光ファイバアレイの一般的説明図。FIG. 3 is a general explanatory view of an optical fiber array.

【図4】従来技術の一例を工程順に示した説明図。FIG. 4 is an explanatory view showing an example of a conventional technique in process order.

【符号の説明】[Explanation of symbols]

10,20,30 光部品 102,103 光路接合部 14,24,34 ホルダ 22,32 光ファイバテープ 23 光ファイバ 26 V溝 27 ガラス板 28 ガラス蓋 40 接着剤 42 コーティング 44 光部品モジュール 46 金属ケース 50 接着剤槽 52 光学接着剤 54 紫外線 56 光部品モジュール 10, 20, 30 Optical parts 102, 103 Optical path joint part 14, 24, 34 Holder 22, 32 Optical fiber tape 23 Optical fiber 26 V groove 27 Glass plate 28 Glass lid 40 Adhesive 42 Coating 44 Optical part module 46 Metal case 50 Adhesive tank 52 Optical adhesive 54 UV light 56 Optical component module

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 少なくとも3個以上の光部品が調心接続
され、接着剤にて固定された光部品であって、前記光部
品間の光路接続部を含んで両側の光部品の表面を覆うよ
うに前記接着剤がコーティングされている光部品。
1. An optical component in which at least three or more optical components are aligned and connected with each other and fixed by an adhesive, and the surfaces of the optical components on both sides are covered including an optical path connecting portion between the optical components. Parts coated with the adhesive as described above.
【請求項2】 光部品を接続するに際して、当該光部品
を、光学接着剤中に埋没させ、埋没させた状態におい
て、前記光部品の調心を行い、その後、前記接着剤を硬
化させる、光部品の接続方法。
2. When connecting an optical component, the optical component is embedded in an optical adhesive, the optical component is aligned in the embedded state, and then the adhesive is cured. How to connect parts.
JP7068195A 1995-03-03 1995-03-03 Method for connecting optical parts and optical parts Pending JPH08240739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7068195A JPH08240739A (en) 1995-03-03 1995-03-03 Method for connecting optical parts and optical parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7068195A JPH08240739A (en) 1995-03-03 1995-03-03 Method for connecting optical parts and optical parts

Publications (1)

Publication Number Publication Date
JPH08240739A true JPH08240739A (en) 1996-09-17

Family

ID=13438643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7068195A Pending JPH08240739A (en) 1995-03-03 1995-03-03 Method for connecting optical parts and optical parts

Country Status (1)

Country Link
JP (1) JPH08240739A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6448583B1 (en) 1998-09-08 2002-09-10 Fujitsu Limited Optical semiconductor module, its manufacture, reflection film, its manufacture, and laser and optical devices using reflection film
JPWO2018042715A1 (en) * 2016-08-30 2018-08-30 オリンパス株式会社 Endoscope optical signal transmission module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6448583B1 (en) 1998-09-08 2002-09-10 Fujitsu Limited Optical semiconductor module, its manufacture, reflection film, its manufacture, and laser and optical devices using reflection film
US6579737B2 (en) 1998-09-08 2003-06-17 Fujitsu Limited Optical semiconductor module, its manufacture, reflection film, its manufacture, and laser and optical devices using reflection film
JPWO2018042715A1 (en) * 2016-08-30 2018-08-30 オリンパス株式会社 Endoscope optical signal transmission module

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