JPH08233631A - Treating liquid remainder detection sensor - Google Patents

Abstract

PURPOSE: To almost surely set nonconductive between electrodes, when the electrodes are completely exposed from the liquid face. CONSTITUTION: A treating liquid remainder detection sensor 130 is provided with a waterproofing electric wire 132 coated with waterproofing covering of chemical resistance, a pair of electrodes 133 composed of chemical resistance metal material exposedly connected to the end of the waterproofing electric wire 132, and a connection part protection member 134 for covering and protecting the connection part between the waterproofing electric wire 132 and the electrodes 133. The connecting protection member 134 is composed of fluororesin or coated with fluororesin to improve chemical resistance and water repellency to the treating liquid. The projecting bottom faces 134a of the electrodes 133 are inclined and a groove l34b is provided between the electrode 133A and the electrode 133B. The bottom face 134c of the groove 134b is also inclined.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing liquid residual quantity for detecting whether or not a remaining amount of the processing liquid in the tank is a predetermined amount when the processing liquid is being sent out from a tank containing the processing liquid. The present invention relates to a quantity detection sensor.

[0002]

2. Description of the Related Art Photosensitive materials such as exposed photosensitive paper are immersed in a processing tank filled with a processing solution such as a developing solution and a fixing solution to perform processing such as development and fixing. A treatment liquid replenishing device is connected to replenish the bath with the treatment liquid.

This processing liquid replenishing device is generally provided for each processing liquid with a replenishment tank for storing the processing liquid, a liquid delivery pipe provided from the replenishment tank to the corresponding processing tank, and And a liquid feed pump for transferring the treatment liquid from the replenishment tank to the treatment tank through the liquid feed pipe. Then, the liquid feed pump is operated for a predetermined time in response to a command from the photosensitive material processing device, so that a necessary amount of the processing liquid is replenished in the processing tank.

In such a treatment liquid replenishing device, air is fed into the treatment tank instead of the treatment liquid due to the lack of the treatment liquid in the replenishment tank, and the treatment liquid in the treatment tank is oxidized. It is necessary to detect the remaining amount of the processing liquid in the replenishment tank in order to prevent the processing quality in the processing tank from decreasing and the processing quality from decreasing.

Therefore, conventionally, a processing liquid remaining amount detecting sensor for detecting the remaining amount of the processing liquid in the replenishing tank is provided in the processing liquid replenishing device. This processing liquid remaining amount detection sensor is classified into a type in which not only an electrode but also an electric wire connected to the electrode is immersed in the processing liquid, and a type in which only the electrode is immersed in the processing liquid.

FIG. 4 is a configuration diagram showing a configuration of a conventional processing liquid remaining amount detecting sensor. In FIG. 4, (a) is a cross-sectional view showing the processing liquid residual amount detecting sensor as viewed from the front, and (b) is a side view showing a state where the processing liquid residual amount detecting sensor is mounted in the replenishment tank.

The processing liquid remaining amount detecting sensor 30 shown in FIG.
The former type of detection sensor is composed of a pair of electric wires 32 covered with a chemical resistant waterproof coating 31 and a chemical resistant metal material (for example, SUS) exposed and connected to the tip of each electric wire 32. A pair of electrodes 33 and a connection portion protection member 34 that integrally covers and protects each connection point between the electric wire 32 and the electrode 33 with a predetermined space therebetween. Here, the waterproof coating 31 and the connecting portion protection member 34 are both made of vinyl chloride (PV
C). In addition, the connection portion protection member 34,
The electric wire 32 and the root portion of the electrode 33 are simultaneously molded in a state of being enclosed therein, and have a columnar shape as a whole. Therefore, the processing liquid remaining amount detection sensor 30 easily stays in the replenishment tank 20 due to its own weight, and the processing liquid does not penetrate into the electric wire 32 even when immersed in the processing liquid.

FIG. 5 is a block diagram showing the structure of another conventional processing liquid remaining amount detecting sensor. In FIG. 5, (a)
Is a front view showing the processing liquid remaining amount detection sensor as seen from the front,
(B) is a sectional view showing a state in which the processing liquid remaining amount detection sensor is mounted in the refill tank.

A processing liquid remaining amount detecting sensor 30 'shown in FIG.
Is a detection sensor of the latter type and includes a pair of electric wires 35.
And a pair of electrodes 33, which are exposed and connected to the tips of the electric wires 35 and extend from the top to the bottom of the replenishment tank 20 and are made of a chemical resistant metal material, and the electric wires 35 and 33.
And a connection portion protection member 36 that integrally covers and surrounds each connection point with a predetermined space, and an electrode holding member 37 that holds the electrode 33A and the electrode 33B at a predetermined space. Is equipped with. Here, the electrode holding member 37 is made of vinyl chloride (PVC) having a larger specific gravity than the treatment liquid, and has a rectangular parallelepiped shape. This electrode holding member 3
By holding the electrode 33A and the electrode 33B by 7, it is possible to prevent the tips of both from contacting each other.

The result detected by the processing liquid remaining amount detecting sensor as described above is processed by the detecting circuit shown in FIG. FIG. 6 is a block diagram showing an example of the detection circuit. As shown in FIG. 6, the detection circuit 40 includes a voltage generating means 41 connected to one electrode 33A, an amplifier section 42 connected to the other electrode 33B, and the amplifier section 42.
And a control means 44 for controlling the voltage generation means 41 and the voltage detection means 43. Further, an alarm means 50 is connected to the detection circuit 40.

In FIG. 6, the processing liquid in the replenishment tank 20 is sequentially passed through the liquid feeding pipe 22, the liquid feeding pump 23, and the liquid feeding pipe 24 by the operation of the liquid feeding pump 23.
It is sent to the processing tank 10. A filter 21 for removing impurities is attached to the tip of the liquid supply pipe 22 on the refill tank 20 side.

On the other hand, under the control of the control means 44, a predetermined pulse voltage is applied from the voltage generation means 41 to the electrode 33A. When the replenishment tank 20 is filled with the treatment liquid, the resistance value of the treatment liquid is as low as several tens to several hundreds Ω · cm.
3A and the electrode 33B are electrically connected to generate a voltage at the electrode 33B. This voltage is amplified by the amplifier 42 and input to the voltage detecting means 43 in the next stage. When the voltage value from the amplifier unit 42 is equal to or higher than a predetermined value, the voltage detection unit 43 outputs a predetermined signal to the control unit 44 as the remaining amount of the processing liquid is a predetermined amount. When the replenishment tank 20 does not have a predetermined amount of the processing liquid, that is, when the processing liquid does not exist between the electrodes 33A and 33B, the electrode 3 can be applied even if a voltage is applied to the electrode 33A.
Since no voltage is generated in 3B, the output of the amplifier section 42 is also 0V.
Is. Therefore, the voltage detection means 43 determines that the remaining amount of the processing liquid is not a predetermined amount and outputs a predetermined signal to the control means 44. The control means 44 activates the alarm means 50 in response to the signal from the voltage detection means 43 to notify the outside of the presence or absence of the processing liquid. Further, the liquid feed pump may be stopped at the same time when the alarm means is activated.

In this way, the detection circuit 40 determines whether or not there is a predetermined amount of the processing liquid in the replenishment tank 20 based on the detection result of the processing liquid remaining amount detection sensor.

[0014]

The conventional processing liquid remaining amount detecting sensor shown in FIG. 4 or 5 has the following problems.

In the processing liquid remaining amount detecting sensor 30 (that is, the detection sensor in which not only the electrodes but also the electric wires are immersed in the processing liquid) 30 shown in FIG. 4, the connecting portion protecting member 34 is made of vinyl chloride (PVC). It has a cylindrical shape as a whole. However, vinyl chloride is poor in water repellency with respect to a processing solution such as a developing solution and a fixing solution, and the overall shape is a simple columnar shape, and the lower surface from which the electrode 33 projects is flat, so that Even when the liquid surface is lowered and the connection protection member 34 and the electrode 33 are completely exposed from the liquid surface,
There is a possibility that the lower surface of the connection portion protection member 34 is poorly drained and the electrodes 33A and 33B are electrically connected via the processing liquid adhering thereto. Therefore, there is a problem that the remaining amount of the processing liquid in the replenishment tank 20 is erroneously detected as a predetermined amount even though the remaining amount is not already the predetermined amount.

Further, in the processing liquid remaining amount detecting sensor 30 'shown in FIG. 5 (that is, the type detecting sensor in which only the electrodes are immersed in the processing liquid) 30', the electrode holding member 37 is made of vinyl chloride (P
VC) and forms a rectangular parallelepiped as a whole. However, as described above, vinyl chloride has poor water repellency with respect to processing solutions such as developing solutions and fixing solutions, and since the overall shape is a simple rectangular parallelepiped and its top surface is flat, Even when the surface is lowered and the electrode holding member 37 and the electrode 33 are completely exposed from the liquid surface, a liquid pool is formed on the upper surface of the electrode holding member 37, and the electrode 33A and the electrode 33B are separated by the stored processing liquid. There was a possibility that there would be continuity between them. Therefore, similarly to the above, there is a problem that the residual amount of the processing liquid in the replenishment tank 20 is erroneously detected as a predetermined amount even though the residual amount is not already a predetermined amount.

The present invention has been made in view of the above-mentioned problems of the prior art. Therefore, the object of the present invention is to almost certainly ensure the space between the electrodes when the electrodes are completely exposed from the liquid surface. Another object of the present invention is to provide a processing liquid residual amount detection sensor that can be made non-conductive.

[0018]

In order to achieve the above-mentioned object, the invention according to claim 1 is to detect whether or not the remaining amount of the processing liquid stored in the tank is a predetermined amount. A sensor for detecting the remaining amount of the treatment liquid used for, a pair of electrodes, a pair of electric wires respectively connected to the pair of electrodes, and integrally connecting each connection point between the electrode and the electric wire while maintaining mutual insulation. Covering and surrounding, and a connection portion protection member for protecting the connection portion, and the connection portion protection member, at least the surface thereof is formed of a fluororesin, a pair of electrodes respectively project from the lower surface, At least part of the lower surface is inclined with respect to the longitudinal direction of the electrode.

Therefore, according to the first aspect of the invention, when the liquid level of the treatment liquid is lowered and the connecting portion protection member is completely exposed from the liquid surface, the treatment liquid is connected by the water repellency of the fluororesin. The treatment liquid can be quickly cut from the connection portion protection member due to the inclination of the lower surface of the connection portion protection member while being repelled by the connection portion protection member.

The invention described in claim 2 is the same as claim 1.
In the sensor for detecting the remaining amount of processing liquid described in (1), the connection protection member has a groove between the pair of electrodes on the lower surface. Therefore, in the invention described in claim 2,
The presence of the groove increases the distance between the electrodes along the surface of the connection protection member.

According to a third aspect of the present invention, there is provided a processing liquid remaining amount detecting sensor used for detecting whether or not the remaining amount of the processing liquid stored in the tank is a predetermined amount, and a pair of rods each having a rod shape. An electrode, a pair of electric wires that are respectively connected to the pair of electrodes, and an electrode holding member that holds the pair of electrodes at a predetermined interval, and at least the surface of the electrode holding member is made of fluororesin. And a pair of electrodes are respectively supported, and at least a part of the upper surface is inclined with respect to the longitudinal direction of the electrodes.

Therefore, when the surface of the treatment liquid is lowered and the electrode holding member is completely exposed from the liquid surface, the treatment liquid is repelled from the electrode holding member by the water repellency of the fluororesin and the electrode holding member is also exposed. The inclination of allows the treatment liquid to be quickly cut from the electrode holding member without accumulating the treatment liquid in the electrode holding member.

According to a fourth aspect of the present invention, in the treatment liquid remaining amount detecting sensor according to the third aspect, the electrode holding member includes a pair of attachment portions to which a pair of electrodes are attached, respectively, and the pair of attachment portions. A connecting part that connects between the
And the connecting portion has a curved shape.

Therefore, if the distance between the electrodes is not changed, the distance between the electrodes along the surface of the electrode holding member will be longer than in the case where the connecting portion is in a straight line.

Further, the invention according to claim 5 is characterized in that, in the processing liquid remaining amount detecting sensor according to claim 4, the pair of mounting portions are respectively located at positions lower than the connecting portion. . Therefore, since the treatment liquid flows from the joint portion to each attachment portion, the treatment liquid can be quickly cut off from the electrode holding member without accumulating the treatment liquid on the upper surface of the joint portion.

[0026]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a configuration of a processing liquid remaining amount detection sensor as one embodiment of the present invention. In FIG.
FIG. 6A is a front view showing the processing liquid remaining amount detecting sensor partially cut away and viewed from the front, and FIG. 7B is a side view showing a state in which the processing liquid remaining amount detecting sensor is mounted in a refill tank.

The processing liquid remaining amount detecting sensor 130 shown in FIG.
Is a detection sensor of a type in which not only the electrodes but also the electric wires are immersed in the treatment liquid, and a pair of electric wires 132 covered with a chemical resistant waterproof coating, and resistances exposed and connected to the tips of the respective electric wires 132. A pair of electrodes 133 made of a chemical metal material (for example, SUS), and a connection portion protection member 134 that integrally covers and protects each connection portion between the electric wire 132 and the electrode 133 with a predetermined space therebetween. I have it.

This processing liquid remaining amount detection sensor 130 is shown in FIG.
As shown in (b), it is connected to the liquid sending pipe 122, and both are integrally submerged in the refill tank 20. A filter 121 is attached to the tip of the liquid supply pipe 122 via a filter attachment member 125.

The connecting portion protecting member 134 is provided on the rear surface of the connecting portion 134d in order to connect to the liquid delivery pipe 122 as described above.
The connecting portion 134d is further provided with a screw-fastening hole 134e for fixing to the liquid supply pipe 122.

Further, the connecting portion protection member 134 has increased chemical resistance to processing liquids such as a developing liquid and a fixing liquid (for example,
It is not easily attacked by the acid of the fixer) and is made of a fluororesin or coated in order to enhance water repellency. Here, the fluororesin specifically includes polytetrafluoroethylene (PTFE), fluorinated ethylene / propylene copolymer (FEP), perfluoroalkoxy resin (PFA), ethylene / tetrafluoroethylene copolymer (ETFE), CTFE, PVF. Say _2, etc.

Further, as shown in FIG. 1, in the connecting portion protecting member 134, the protruding lower surface 134a of the electrode 133 is inclined, and moreover, a groove is provided between the electrode 133A and the electrode 133B on the lower surface 134a. 134b is provided. The bottom surface 134c of the groove 134b is also
It is inclined like the lower surface 134a.

Therefore, when the liquid level of the treatment liquid is lowered and the connection portion protection member 134 is completely exposed from the liquid surface, the treatment liquid is repelled from the connection portion protection member 134 by the water repellency of the fluororesin described above. At the same time, due to the inclination of the lower surface 134a and the bottom surface 134c of the connection portion protection member 134, the processing liquid can be quickly cut off from the connection portion protection member 134. Therefore, even if the liquid level of the processing liquid further decreases and the electrode 133 is completely exposed from the liquid surface, the processing liquid hardly adheres to the lower surface of the connection portion protection member 134. Moreover, even if they are attached, the presence of the groove 134b causes the electrodes 133A and 133 to be provided along the surface of the connection portion protection member 134.
Since the distance to B is long, the possibility that conduction will occur between the electrodes 33A and 33B via the processing liquid that has adhered thereto is reduced.

Each of the electrodes 133 has a thin tip at the lower end. However, the tip portion is flat with a width of about 0.5 to 1 mm in order to avoid the risk of piercing.

Since the tip of the lower end of the electrode 133 is thin as described above, the liquid at the electrode 133 is easily drained, so that the liquid surface of the processing liquid is lowered and the electrode 133 is completely exposed from the liquid surface. Even in such a state, it is less likely that the treatment liquid drips from the lower end of the electrode 133 and electrical continuity occurs between the electrode 133 and the liquid surface of the treatment liquid.

As described above, according to this embodiment, the electrode 1
When 33 is completely exposed from the liquid surface, it is possible to almost certainly make non-conduction between the electrodes.
Even though the remaining amount of the processing liquid therein is not already the predetermined amount, it is unlikely to be erroneously detected as the predetermined amount. In addition,
Groove 1 provided on the lower surface 134a of the connecting portion protection member 134
The shape of 34b is not limited to the shape of this embodiment shown in FIG.

Next, FIG. 2 is a configuration diagram showing the configuration of a processing liquid remaining amount detecting sensor as another embodiment of the present invention. Figure 2
2A is a front view showing the processing liquid remaining amount detecting sensor as viewed from the front, and FIG. 7B is a cross section showing a state in which the processing liquid remaining amount detecting sensor is mounted in the refill tank.

The processing liquid remaining amount detecting sensor 130 'shown in FIG.
Is a detection sensor of a type in which only the electrodes are immersed in the treatment liquid, and is composed of a wire 135 and a pair of chemical-resistant metal materials that are exposed and connected to the tip of the wire 135 and extend from the top to the bottom of the refill tank 20. Electrode 133 and electric wire 135
And the electrode 133 are covered and protected to cover the connection portion, and the connection portion protection member 136 that integrally fixes the liquid supply pipe 122, and the screw 138 is fixed to the liquid supply pipe 122, and the electrodes 133A and 133B. And an electrode holding member 137 that holds the space between them at a predetermined interval.

This processing liquid remaining amount detecting sensor 130 'is similar to the processing liquid remaining amount detecting sensor 130 shown in FIG.
As shown in (b), it is connected to the liquid delivery pipe 122. The filter 121 is attached to the tip of the liquid supply pipe 122 via a filter attachment member 125.

The electrode holding member 137 has an increased chemical resistance to a processing solution such as a developing solution or a fixing solution (for example, is corroded by the acid of the fixing solution) like the connection portion protecting member 134 shown in FIG. (Difficult), it is made of a fluororesin or coated to enhance water repellency.

FIG. 3 is a structural view showing the structure of the electrode holding member shown in FIG. 3, (a) is a plan view, (b) is a partially cutaway front view, and (c) is a partially broken side view.

As shown in FIG. 3, the electrode holding member 137.
Is composed of electrode supporting portions 137a and 137b for supporting the electrodes 133A and 133B, a pipe fixing portion 137c for fixing to the liquid supply pipe 122, and a screw attaching portion 137d for attaching the screw 138. There is. Of these, the electrode 133 is attached to the electrode supporting portion 137a.
The electrode through hole 137e through which A is inserted is the electrode support portion 137.
Electrode penetration holes 137f for penetrating the electrodes 133B are respectively provided in b. Further, the pipe fixing portion 137c is provided with a pipe through hole 137g through which the liquid sending pipe 122 is inserted, and the screw attachment portion 137d is provided with an insertion hole 137h into which the screw 138 is inserted.

The upper surfaces of the electrode supporting portions 137a and 137b are each provided with a mountain-shaped inclination. further,
As shown in FIG. 3B, the electrode support portions 137a and 137b themselves are also inclined so as to lower toward the tip. Further, when the electrode holding member 137 is viewed from above, the electrode supporting portion 137a and the electrode supporting portion 137b are arranged so as to form a V shape, as shown in FIG.

Therefore, when the liquid surface of the processing liquid is lowered and the electrode holding member 137 is completely exposed from the liquid surface,
The treatment liquid is repelled from the electrode holding member 137 by the water repellency of the fluororesin described above, and at the same time, the electrode supporting portion 13
7a, 137b inclination on the upper surface and electrode support 137
a and 137b themselves are inclined to allow the treatment liquid to pass through the electrode supporting portion 1.
The electrode holding member 13 is not stored in 37a and 137b.
You can quickly cut from 7. Therefore, even if the liquid level of the processing liquid is further lowered and the tip of the electrode 133 is completely exposed from the liquid surface, the processing liquid hardly adheres to the upper surface or the lower surface of the electrode holding member 137. .

Further, the electrode support portion 137a and the electrode support portion 1
37b and the electrode support portion 137a and the electrode support portion 137b are arranged in a straight line, assuming that the distance between the electrodes 133A and 133B is not changed because they are arranged so as to form a V shape. Electrode holding member 1
The distance between the electrodes 133A and 133B along the surface of 37 is long. Therefore, even if the treatment liquid adheres to the upper surface and the lower surface of the electrode holding member 137,
The possibility that electrical conduction will occur between the electrodes 33A and 33B via the processing liquid that is attached is reduced.

Since the electrode supporting portions 137a and 137b are inclined so as to be lowered toward the tip, this also causes the distance between the electrodes 133A and 133B along the surface of the electrode holding member 137. It's getting longer. Therefore, the possibility of the above-mentioned conduction is further reduced.

Further, the electrodes 133 each have a thin tip at the lower end as in FIG. For this reason,
Even when the electrode 133 is well drained and the electrode 133 is completely exposed from the liquid surface, the processing liquid drips from the lower end portion of the electrode 133 to establish electrical continuity between the electrode 133 and the liquid surface of the processing liquid. Is less likely to occur.

As described above, also in the present embodiment, when the electrodes 133 are completely exposed from the liquid surface, the electrodes can be almost certainly made non-conductive, and therefore the replenishment tank 2
Although the remaining amount of the processing liquid within 0 is not already the predetermined amount, it is unlikely to be erroneously detected as the predetermined amount.

In this embodiment, the electrode supporting portion 1
37a and the electrode supporting portion 137b are arranged so as to form a V shape, but if the distance between the electrodes 133A and 133B along the surface of the electrode holding member 137 is long, it is U-shaped. Alternatively, it may be U-shaped or C-shaped. Further, in the present embodiment, the case where the upper surfaces of the electrode supporting portions 137a and 137b are sloped in a mountain shape has been described as an example, but the same slope may be formed on the lower surface.

Now, in the above two embodiments, the processing liquid residual amount detecting sensors 130 and 130 'are connected to the liquid feeding pipe 12.
It was attached to the processing tank 10 by connecting with 2 and integrating,
The remaining amount of processing liquid detection sensor 130, 130 '
22 may be cut off and attached separately.

In the above two embodiments,
Electrodes 133 protruding from the connection part protection members 134 and 136
Although the lengths of A and 133B are substantially equal to each other, the lengths may be different from each other.

[0051]

As described above, according to the first aspect of the invention, when the liquid level of the processing liquid is lowered and the connecting portion protection member is completely exposed from the liquid surface, the processing liquid is supplied. While being repelled by the protection member, the treatment liquid can be quickly cut off from the connection portion protection member. Therefore, even if the electrodes are completely exposed from the liquid surface, it is almost impossible for the treatment liquid to adhere to the lower surface of the connection part protection member, so it is almost certain that the electrodes will be non-conductive. it can.

According to the second aspect of the invention, even if the treatment liquid adheres to the lower surface of the connecting portion protecting member, the distance between the electrodes along the surface of the connecting portion protecting member becomes long. Therefore, there is less possibility that conduction will occur between the electrodes via the processing liquid that is attached.

According to the third aspect of the invention, when the surface of the treatment liquid is lowered and the electrode holding member is completely exposed from the liquid surface, the treatment liquid is repelled from the electrode holding member. Further, the treatment liquid can be quickly cut from the electrode holding member without accumulating the treatment liquid in the electrode holding member. Therefore, even when the tips of the electrodes are completely exposed from the liquid surface, the treatment liquid hardly adheres to the electrode holding member, so that the electrodes can be almost certainly made non-conductive. .

According to the fourth aspect of the invention, even if the treatment liquid adheres to the electrode holding member, the distance between the electrodes along the surface of the electrode holding member is long. It is less likely that conduction will occur between the electrodes via the processing liquid that has adhered.

According to the fifth aspect of the present invention, the treatment liquid flows from the joint portion to the attachment portion, so that the treatment liquid can be cut off more quickly from the electrode holding member without collecting the treatment liquid on the upper surface of the joint portion. You can

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of a processing liquid remaining amount detection sensor as one embodiment of the present invention.

FIG. 2 is a configuration diagram showing a configuration of a processing liquid remaining amount detection sensor as another embodiment of the present invention.

FIG. 3 is a configuration diagram showing a configuration of an electrode holding member of FIG.

FIG. 4 is a configuration diagram showing a configuration of a conventional processing liquid remaining amount detection sensor.

FIG. 5 is a configuration diagram showing a configuration of another conventional processing liquid remaining amount detection sensor.

FIG. 6 is a block diagram showing an example of a detection circuit.

[Explanation of symbols]

 10 ... Treatment tank 20 ... Replenishment tank 21 ... Filter 22 ... Liquid sending pipe 23 ... Liquid sending pump 24 ... Liquid sending pipe 30, 30 '... Treatment liquid remaining amount detection sensor 31 ... Waterproof coating 32 ... Electric wire 33A, 33B ... Electrode 34 ... connection part protection member 35 ... electric wire 36 ... connection part protection member 37 ... electrode holding member 40 ... detection circuit 41 ... voltage generation means 42 ... amplifier part 43 ... voltage detection means 44 ... control means 50 ... alarm means 121 ... filter 122 ... Liquid delivery pipe 125 ... Filter mounting member 130, 130 '... Treatment liquid residual amount detection sensor 132 ... Electric wire 133A, 133B ... Electrode 134 ... Connection part protection member 134a ... Lower surface 134b ... Groove 134c ... Bottom surface 134d ... Connection part 134e ... Hole 135 ... Electric wire 136 ... Connection portion protection member 137 ... Electrode holding member 137a, 137b ... Electrode support portion 13 c ... pipe fixing portion 137d ... screw mounting portion 137e, 137f ... electrode transmural insertion hole 137 g ... pipe transmural insertion hole 137h ... insertion holes 138 ... Screw

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kiyoshi Matsumoto 1 at 480 Takamiya-cho, Hikone-shi, Shiga Dainippon Screen Mfg. Co., Ltd. in Hikone area (72) Inventor Masahiro Nakajima, 480, Takamiya-cho, Hikone-shi, Shiga 1 Dainippon Screen Mfg. Co., Ltd. Hikone District Office

Claims (5)

[Claims] 1. A processing liquid remaining amount detecting sensor used for detecting whether or not a remaining amount of the processing liquid stored in a tank is a predetermined amount, the pair comprising a pair of electrodes and a pair of electrodes respectively connected to the pair of electrodes. A pair of electric wires, and a connecting portion protecting member that integrally covers and encloses each connecting portion of the electrode and the electric wire while maintaining mutual insulation, and protects the connecting portion. A treatment liquid residue characterized in that at least the surface thereof is formed of a fluororesin, a pair of electrodes project from the lower surface thereof, and at least a part of the lower surface is inclined with respect to the longitudinal direction of the electrodes. Quantity detection sensor. 2. The processing liquid level detecting sensor according to claim 1, wherein the connection protection member has a groove between a pair of electrodes on the lower surface. 3. A processing liquid remaining amount detecting sensor used for detecting whether or not a remaining amount of the processing liquid stored in the tank is a predetermined amount, the pair of electrodes each having a rod shape, and the pair of electrodes. A pair of electric wires connected to each other, and an electrode holding member that holds a pair of electrodes at a predetermined interval, and at least the surface of the electrode holding member is formed of fluororesin, and A processing liquid residual amount detection sensor, wherein a pair of electrodes are respectively supported, and at least a part of the upper surface is inclined with respect to the longitudinal direction of the electrodes. 4. The processing liquid residual amount detection sensor according to claim 3, wherein the electrode holding member has a pair of attachment portions to which a pair of electrodes are attached, respectively, and a connecting portion for connecting the pair of attachment portions. And a processing liquid residual amount detection sensor, wherein the connecting portion has a curved shape. 5. The processing liquid remaining amount detecting sensor according to claim 4, wherein the pair of mounting portions are respectively located at positions lower than the connecting portion.