JPH08226949A - Power supply control element and power supplying method for inspecting substrate, and substrate inspecting apparatus - Google Patents

Abstract

PURPOSE: To improve a power supply system to individually supply powers to circuit patterns to be inspected by emitting a pulse-modulation laser beam to an electrostatic capacity coupling part (power supply controller) disposed at the power supply side. CONSTITUTION: A substrate inspecting apparatus Y comprises power supply control means 1 (X) for applying a voltage to a circuit pattern 5 to be inspected by electrostatic capacity coupling, pulse modulation laser beam emitting means 2, signal detecting means 3 for detecting a voltage change on the pattern 5 to be inspected by the capacity coupling, and waveform processing means 4 for waveform processing the detection signal. A pulse modulation laser beam 6 of sufficiently smaller spot than the pitch of the patterns 5 to be inspected is scanned at the transparent electrode of the power supply controller (X) and individually supplied to the patterns 5. The element structure of the controller X for inspecting a substrate has the laminated layer order of a glass base, the transparent electrode, a photoconductive or resistance film including an insulating gap, an anisotropic conductor and an insulator.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defective part such as a short circuit or a disconnection of a circuit pattern formed on an electronic circuit board such as a liquid crystal glass substrate, a ceramic laminated IC package or a laminated substrate, or a circuit component connected to the pattern. The present invention relates to a power supply control element for board inspection, a power supply method in board inspection, and a board inspection apparatus, in which a power supply method is improved so as to individually supply power to a circuit pattern to be inspected by irradiating pulse-modulated laser light in order to detect a mounting defect.

[0002]

2. Description of the Related Art In a conventional method or apparatus for inspecting an electronic circuit board, a power supply and a power receiving connection pin are provided on each of the electrodes to be inspected, power is supplied and power is received, and a signal is output from each of the electrodes to be inspected. I was checking if I was out. In addition, a positioning device was necessary to ensure this probing.

In recent years, as electronic devices have become smaller and lighter, the density of electronic circuit boards (boards to be inspected) and the pitch of mounted ICs have been rapidly increasing. Requests for workability, reliability, and cost are becoming more important.

[0004]

Here, as the pitch of the circuit pattern becomes narrower, the number of input / output points increases, and the inspection jig needs to be complicated and highly accurate, which is expensive.

[0005] Under these circumstances, a problem common to the inspection methods roughly classified into a contact type and a non-contact type is considered as a problem of probing linked to a power supply method, and a new one corresponding to the evolution of electronic circuit boards. Improvement of the power supply method (means) is desired.

The present invention has been made in view of the above circumstances, and solves the above problems and improves the power supply method in a non-contact type substrate inspection using a laser beam to obtain a high density circuit pattern. Efficiently inspects for defective parts such as short circuits and disconnections of electronic circuit boards that have the following, and for mounting defects of circuit components connected to patterns, and further speeds up product startup and inspection without the need for device configurations such as connecting pins. It is an object of the present invention to provide a power supply control element for substrate inspection, a power supply method in substrate inspection, and a substrate inspection device that realize a cost reduction of the device).

[0007]

In order to achieve the above object, the present invention provides a method of applying a voltage to a circuit pattern to be inspected by irradiating a pulse-modulated laser beam with a laser beam. A power supply control element for inspecting a substrate, wherein a power supply control element is formed by forming a capacitive coupling portion, and the element structure is opposed to a glass base (11) facing a pulse modulation laser beam irradiation side and a circuit pattern side. Between the insulator (16), a laminated portion composed of the transparent electrode (12) and the photoconductive film (13) and a laminated portion composed of the transparent electrode (12) and the resistive film (14) are arranged side by side. An insulating gap (17) is provided with the end faces separated, and an anisotropic conductor (15) is provided on the insulator (16) side of the insulating gap (17) to close one end of the insulating gap (17), Table (11), transparent electrode (1
2), photoconductive film (13) or resistance film (14) including insulating gap (17), anisotropic conductor (15) and insulator (16)
In the order of lamination.

Further, a capacitance coupling portion is formed at each end of the circuit pattern to be inspected to form a power supply side and a detection side, and a pulse-modulated laser beam is irradiated through the capacitance coupling portion on the power supply side. A power supply control element according to claim 1, wherein a voltage is applied to the circuit pattern to be inspected, wherein the power supply control element according to claim 1 is disposed at one end of the circuit pattern to be inspected, and the circuit to be inspected is provided on its transparent electrode. The present invention is characterized in that a pulse-modulated laser beam of a spot sufficiently smaller than a pattern pitch is scanned to individually supply power to a circuit pattern to be inspected.

Further, a capacitive coupling portion is formed at each end of the circuit pattern to be inspected to form a power supply side and a detection side, and a pulse-modulated laser beam is irradiated through the capacitive coupling portion on the power supply side. A substrate inspection apparatus which applies a voltage to a circuit pattern to be inspected by the method described above, receives a capacitance at a capacitive coupling portion on the detection side, and performs signal detection and waveform processing. 5) Power supply control means (1) for applying a voltage thereon, and the power supply control means (1) is irradiated with pulse-modulated laser light (6) of a spot sufficiently smaller than the pitch of the circuit pattern (5) to be inspected. Modulated laser light irradiation means (2), signal detection means (3) for detecting a voltage change on a circuit pattern to be inspected by capacitive coupling, and detection by the signal detection means (3). Is characterized in that comprises a waveform processing means (4) for waveform processing the signal.

Here, the power supply control means (1) is the power supply control element according to claim 1, and the pulse modulation laser light irradiation means (2) is the laser light scan controller (21) and the pulse modulation circuit (22). The signal detection means (3) is a capacitor section (31) formed between the inspection target circuit pattern (5) and the conductive plate (31a) via the insulator (31b), and the waveform processing means (4) is It is a waveform processing circuit (41).

Further, the substrate inspection apparatus (Y) is connected to a laser light scan controller (21) and a waveform processing circuit (41), and controls the irradiation of the pulse modulated laser light (6) and performs waveform processing including data processing. An external computer (7) constituting a secondary processing system may be provided.

[0012]

[Function] When the laser light scan controller is computer-controlled to irradiate the transparent electrode surface of the power feeding control element with pulse-modulated laser light, the resistance of the photoconductive film of the power feeding control element is pulsed only at the spot hit by the pulse-modulated laser light. It changes according to the pulse modulation of the modulated laser light, and along with this behavior, a voltage change occurs in the anisotropic conductor laminated so as to close one end of the insulation gap between the resistance film of the power feeding control element and the photoconductive film, By capacitive coupling, power is supplied to the circuit pattern immediately below the anisotropic conductor, that is, a voltage is applied to the circuit pattern to be inspected.

By forming a capacitor portion on the circuit pattern on the detection side, detecting a signal of a voltage change on the circuit pattern to be inspected by capacitive coupling, and performing waveform processing, a defect can be determined.

Here, when there is no short circuit, the same voltage change is detected in any circuit pattern as the current. If there is a short-circuited portion, the area of the capacitor section increases, the amount of current per unit time increases, and the detection voltage increases. Further, if there is a disconnection, no voltage change is detected.

[0015]

An embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is an explanatory view showing the element structure of the power feeding control element. In the figure, 11 is a glass base, 12 is a transparent electrode, 13 is a photoconductive film, 14 is a resistive film, 15 is an anisotropic conductor, 16 is an insulator, 17 is an insulating gap, and X is a power supply control for substrate inspection. It is an element.

As shown in the drawing, the element structure of the board inspection power supply control element (X) includes a glass base (11) facing the pulse modulation laser beam irradiation side and an insulator (16) facing the circuit pattern side. Between the transparent electrode (12) and the photoconductive film (1
Laminated part consisting of 3), transparent electrode (12) and resistance film (14)
An insulating gap (17) is provided by arranging the laminated part consisting of and the end faces thereof apart from each other, and an anisotropic conductor (15) is provided on the insulator (16) side of the insulating gap (17). Block one end of the insulation gap (17) to remove the glass base (1
1), transparent electrode (12), photoconductive film (13) or resistive film (14) including insulating gap (17), anisotropic conductor (15)
And a stacking order of the insulator (16).

In the power supply method using the power supply control element (X), the power supply control element (X) is disposed at one end of a circuit pattern to be inspected, and a capacitance coupling portion is provided between the power supply control element (X) and the circuit pattern. Form. And the transparent electrode (12)
In addition, the pulse-modulated laser light having a spot sufficiently smaller than the pitch of the circuit pattern is scanned to individually feed power to the circuit pattern, that is, a voltage is applied to the circuit pattern to be inspected.

Further, in the board inspecting apparatus having the above-mentioned power feeding method as the power feeding means, the capacitive coupling portions are formed at both ends of the circuit pattern to be inspected to form the power feeding side and the detection side, respectively.
A voltage is applied to the circuit pattern to be inspected by irradiating a pulse-modulated laser beam through a capacitive coupling portion on a power supply side, and a signal is detected and a waveform process is performed by receiving power at the capacitive coupling portion on a detection side. It was made.

FIG. 2 shows a schematic diagram of the apparatus configuration and FIG. 3 shows an equivalent circuit diagram. Here, 1 is a power supply control means,
2 is a pulse modulated laser beam irradiation means, 3 is a signal detection means, 4 is a waveform processing means, 5 is a circuit pattern to be inspected, 6
Is a pulse modulated laser light, 7 is an external computer, 21 is a laser light scan controller, 22 is a pulse modulation circuit, 31 is a capacitor part, 31a is a conductive plate, 31b is an insulator,
Reference numeral 41 is a waveform processing circuit (oscilloscope), and Y is a substrate inspection device.

The structure of the circuit pattern to be inspected (5)
Power supply control means (1) for applying a voltage on the circuit pattern to be inspected (5) by electrostatic coupling at one end of the power supply control element (X), and a transparent electrode of the power supply control element (X) (12) a pulse-modulated laser beam irradiating means (2) for irradiating a pulse-modulated laser beam (6) of a spot sufficiently smaller than the pitch of the circuit pattern to be inspected (5)
A signal detecting means (3) for detecting a voltage change on the circuit pattern to be inspected (5) by capacitive coupling at the other end of the circuit pattern to be inspected (5); A waveform processing means (4) for waveform-processing the detection signal is provided.

Here, the pulse-modulated laser light irradiation means (2) is the laser light scan controller (21) and the pulse modulation circuit (22), and the signal detection means (3) is the detection target circuit pattern (5) and the conductive plate. The capacitor section (31) is formed between the (31a) and the insulator (31b), and the waveform processing means (4) is the waveform processing circuit (41).
Normally, an oscilloscope is used for the waveform processing circuit (41).

Further, the substrate inspection apparatus (Y) is connected to a laser light scan controller (21) and a waveform processing circuit (41), and performs waveform processing including irradiation control of pulse modulated laser light (6) and data processing. An external computer (7) forming a secondary processing system may be provided. FIG. 4 shows a block diagram of this embodiment. In the figure, 7 is an external computer.

Now, when the laser light scan controller is computer-controlled to irradiate the transparent electrode surface of the power feeding control element with pulse-modulated laser light, a voltage is applied to the circuit pattern to be inspected, and the circuit to be inspected is detected by the capacitor section on the detection side. A voltage change on the pattern is detected.

This detection signal is subjected to waveform processing, and the output waveforms specific to the defect form are displayed on the CRT screen of the computer, so that visual judgment can be made.

FIGS. 5A, 5B and 5C show output waveforms (after waveform processing).

Here, when there is no short circuit, the same voltage change is detected in any circuit pattern as the current, and the waveform shown in FIG. When there is a short-circuited portion, the area of the capacitor section increases (the amount of current per unit time increases), the detection voltage increases, and the waveform shown in FIG. Further, when there is a broken portion (c), no voltage change is detected, and the waveform shown in FIG.

[0028]

According to the present invention, there is provided the above-mentioned structure. According to this structure, a means for forming a capacitive coupling section between a target electrode on the power supply side and a power supply control element and irradiating a pulse-modulated laser beam is provided. Since non-contact individual power is supplied, it can be applied to non-contact board inspection of an electronic circuit board having a high-density circuit pattern.

The improvement of the power supply system solves the problem of probing in accordance with the development trend and needs of electronic circuit boards in recent years. In detecting a mounting failure of a circuit component connected to a defective portion or a pattern, a connection pin, a positioning device, and the like are not required, so that a highly reliable board inspection can be performed easily and in a short time. In addition, the manufacturing cost can be reduced by simplifying the device configuration.

Further, since a waveform pattern peculiar to the defect form is visually judged on the CRT screen by the waveform processing on the detection side, it is extremely easy to grasp the defective portion.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an element structure of a power supply control element.

FIG. 2 is a schematic diagram of an apparatus configuration.

FIG. 3 is an equivalent circuit of the device of the present invention.

FIG. 4 is a block diagram of an embodiment in which an external computer is connected.

FIG. 5 is an explanatory diagram of an output waveform (after waveform processing).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Power supply control means 2 Pulse modulation laser light irradiation means 3 Signal detection means 4 Waveform processing means 5 Circuit pattern to be inspected 6 Pulse modulation laser light 7 External computer 11 Glass base 12 Transparent electrode 13 Photoconductive film 14 Resistive film 15 Anisotropy Conductor 16 Insulator 17 Insulation gap 21 Laser light scan controller 22 Pulse modulation circuit 31 Capacitor part 31a Conductive plate 31b Insulator 41 Waveform processing circuit (oscilloscope) X Power supply control element for board inspection Y Board inspection device

Claims (5)

[Claims] 1. A short circuit of a circuit pattern formed on a substrate,
Applying voltage to the circuit pattern to be inspected by irradiating pulse-modulated laser light in improving the power supply means of the board inspection device for non-contact detection of defective parts such as disconnection and mounting failure of circuit components connected to the pattern A power supply control element for substrate inspection in which an electrostatic capacitance coupling portion is formed between the circuit pattern to be inspected and an individual power supply, and the element structure faces the pulse modulation laser light irradiation side. Glass base (11) and insulator (16) facing the circuit pattern side
Between the transparent electrode (12) and the photoconductive film (13), the transparent electrode (12) and the resistive film (14). An insulating gap (17) is provided, an anisotropic conductor (15) is provided on the insulator (16) side of the insulating gap (17) to close one end of the insulating gap (17), and a glass base (11), A transparent electrode (12), a photoconductive film (13) or a resistive film (14) including an insulating gap (17), an anisotropic conductor (15), and an insulator (1
6) A power supply control element for inspecting a substrate, wherein the power supply control element has a stacking order of 6). 2. Short circuit of a circuit pattern formed on a substrate,
In the improvement of the board inspection method for non-contact detection of defective parts such as disconnection and mounting defects of circuit components connected to the pattern, capacitive coupling parts are formed at both ends of the circuit pattern to be inspected to connect to the power supply side. A power supply method in a board inspection in which a voltage is applied to a circuit pattern to be inspected by radiating pulse-modulated laser light through a capacitive coupling section on the power supply side, which constitutes a detection side, The power supply control element according to claim 1 is disposed at one end of the target circuit pattern, and the transparent electrode is scanned with a pulse-modulated laser beam of a spot sufficiently smaller than the pitch of the target circuit pattern to individually supply power to the target circuit pattern. A power supply method in board inspection. 3. A short circuit of a circuit pattern formed on a substrate,
In the improvement of the board inspection device for non-contact detection of defective parts such as disconnection or mounting failure of circuit components connected to the pattern, capacitance coupling parts are formed at both ends of the circuit pattern to be inspected and the power supply side is formed. The detection side is configured, a voltage is applied to the circuit pattern to be inspected by irradiating a pulse-modulated laser beam through the capacitance coupling portion on the power supply side, and the capacitance is coupled to the detection side to receive a signal. A board inspection apparatus configured to perform detection and waveform processing, wherein power supply control means (1) for applying a voltage to a circuit pattern to be inspected (5) by capacitive coupling, and said power supply control means (1) A pulse-modulated laser beam irradiating means (2) for irradiating a pulse-modulated laser beam (6) of a spot sufficiently smaller than the pitch of the circuit pattern to be inspected (5) with the circuit pattern to be inspected by capacitive coupling. A signal detecting means (3) for detecting a voltage change on the signal line, and a waveform processing means (4) for subjecting the detection signal of the signal detecting means (3) to waveform processing. Inspection equipment. 4. The power supply control means (1) is the power supply control element according to claim 1, and the pulse-modulated laser light irradiation means (2) is a laser light scan controller (21) and a pulse modulation circuit (22); The signal detecting means (3) is a capacitor section (31) formed between the circuit pattern to be inspected (5) and the conductive plate (31a) via an insulator (31b), and the waveform processing means (4) is a waveform processing means (4). The substrate inspection apparatus according to claim 3, which is a processing circuit (41). 5. A laser light scan controller (21)
5. An external computer (7), which is connected to the waveform processing circuit (41) and constitutes a secondary processing system for waveform processing including irradiation control of pulse-modulated laser light (6) and data processing. Board inspection device.