JPH08220242A - Conductive light emitting body to diagnose ion beam - Google Patents

Abstract

PURPOSE: To stabilize light emission, and precisely measure an ion beam by arranging a thin film layer of a light emitting material on a surface of a conductive material. CONSTITUTION: A conductive light emitting body 1 is obtained by forming a thin film layer by a light emitting material 3 on a surface of a conductive material 2. The material 2 prevents accumulation of electric charge by releasing electric charge of an ion beam, and for example, iron, copper, aluminium or the like are used. A material visualized by emitting light by an ion beam, for example, a material such as glass powder having proper mechanical strength nondisruptive even if it is pressed in the material 2 is used as the material 3. The material 3 forms a thin film layer uniformly high in adhesion strength by being pressed in a surface of the material 2. In its thickness, as long as electric conductivity is secured, thicker one is suitable in respect of preventing light diffusion. In this way, the light emitting body 1 to uniformly and stably emit light can be obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive luminescent material which is used for diagnosing an ion beam and which is highly stable and capable of uniform light emission, and a method for producing the same.

[0002]

2. Description of the Related Art In recent years, ion accelerators have been used for development of highly functional materials and experiments for investigating physical phenomena. The ion accelerator utilizes the characteristics of the ion beam, and it is necessary to confirm the transport and uniformity of the ion beam during these experiments and development work.

Therefore, it is convenient to visualize the invisible ion beam, but for this reason, it is common practice to use a luminescent material whose luminescence phenomenon is excited by the ion beam.

Materials such as alumina containing impurities, quartz glass, or magnesium oxide have been used as the light emitter.

However, since these materials are electrically insulating, they are apt to cause charge accumulation and a discharge phenomenon due to charge accumulation, so that the subsequent ion beam is reflected and stable light emission cannot be obtained. However, there were problems such as the luminescent body being easily broken.

Further, these materials generally lack mechanical strength and toughness, and it is difficult to form a thin film of the light emitting body.
There was also a problem that it was not possible to effectively prevent the light scattering phenomenon in the light emitter, and it was difficult to accurately measure the size and sweep width of the ion beam.

Therefore, a light-emitting body has been proposed in which the surface of the insulating material is covered with a conductive mesh material.

However, the luminescent material covered with such a mesh-like material is not only difficult to prepare, but also has a problem that the light emission becomes discontinuous, which makes it difficult to observe the ion beam precisely and easily.

[0009]

Therefore, according to the present invention, it is possible to prevent the charge accumulation of the light emitting body, the discharge due to the charge accumulation and the repulsion of the ion beam, stabilize the light emission, and perform the precise measurement of the ion beam. It is an object of the present invention to provide a light emitting body and a method for making the same.

[0010]

Means for Solving the Problems The conventional problems can be solved by a conductive light-emitting body for ion beam diagnosis which is characterized in that a thin film layer of a light-emitting material is provided on the surface of the conductive material of the present invention.

In the present invention, "for ion beam diagnosis" means that the ion beam can be visualized, and as a result,
This means that the size and sweep width of the ion beam and the position of the ion beam can be measured.

The conductive luminescent material means a conductive material having a thin film layer formed on the surface of the conductive material.

Further, the thin film layer made of a light emitting material means a layer in which a conductive material and a light emitting material are mixed and which are generally present on the surface of the conductive material in a layer form.

The present invention will be described in detail below.

(Conductive Material) The use of a conductive material in the present invention makes the entire luminescent material conductive to effectively prevent charge accumulation in the luminescent material and to repel discharge and subsequent ion beam repulsion. This is because the light emission is eliminated and the light emission is continuously stabilized.

That is, the conductive material allows the charge of the ion beam to escape by taking a ground from the light-emitting body and easily prevent charge accumulation.

Further, the conductive material has a function of preventing the light emitting material from being destroyed due to a discharge phenomenon caused by the accumulation of electric charges, or ensuring a function of mechanically holding the light emitting material.

Examples of the conductive material suitable for the present invention include metal materials such as iron, copper, aluminum and stainless steel.

This is because these are good conductors of electricity, have excellent mechanical strength, can form a thin film of the light-emitting body, have excellent workability, and can easily obtain surface smoothness.

Here, the preferable range of conductivity of the conductive material of the present invention is in the range of 1.6x10 ^{-6 to} 2.0x10 ^-5 S / m in consideration of the better prevention effect of charge accumulation. However, from the viewpoint of the present invention, if it is not an insulator, electrical charge is less likely to occur, and in terms of conductivity, there are few restrictions on the type of conductive material.

However, from the viewpoint of thermal conductivity, workability, mechanical strength and the like, iron, aluminum, copper and stainless materials are particularly preferable, and materials such as tungsten and molybdenum are also preferable depending on the purpose of use.

Next, the shape of the conductive material of the present invention will be described.

Although such a shape can be processed arbitrarily according to the use, a square or circular flat plate shape is preferable.

This is because the luminescent material is uniformly pressed into the surface and the ion beam can be effectively and uniformly emitted.

Alternatively, a conductive material may be processed to have a so-called aperture shape as shown in FIG.

This is because the position of the ion beam can be easily corrected and the ion beam can be passed through a small hole by forming an aperture together with the conductive material and the light emitting material.

(Light-Emitting Material) The light-emitting material of the present invention may be any material as long as it can generate a light emission phenomenon by an ion beam and can visualize the ion beam, and examples thereof include glass powder. It is preferable that the conductive material has an appropriate mechanical strength so as not to be broken even if it is pressed into a conductive material such as metal.

The glass powder usable in the present invention includes:
There are beads and powders, and there are many types of compositions, shapes, sizes, etc., and it is suitable in terms of wide selectivity according to the purpose of use.

That is, with regard to the ion beam, one having a low luminous energy and a high luminous efficiency is selected, and a luminous energy having a high luminous energy is not so high, but it has a stable luminous characteristic. It is preferable to use glass powder.

Among these glass powders, especially,
The amorphous glass powder has a sharp part on the surface,
It is preferable because it can easily penetrate into the surface of the conductive material and form a stable light emitting layer.

The present invention is characterized in that the light emitting material is formed as a thin film on the surface of the conductive material.

However, in this thin film layer, the light emitting material and the conductive material are generally mixed, and the light emitting material and the conductive material are not necessarily separated and independent.

Therefore, the conductivity of the thin film layer is not significantly lost due to the increase of the thickness of the thin film layer.

Further, the luminescent characteristics change depending on the thickness of the thin film layer and the press-fitting density of the light-emitting material, and the press-fitting density is high. Generally, the thicker the thin film layer, the higher the luminous efficiency of the light-emitting body is formed.

Here, as a specific thickness of the thin film layer,
Although it depends on the type and energy of the ion to be observed, a thickness of 0.1 μm or more is suitable.

For example, in the case of 400 Kev of argon ions, the range in glass is about 0.3 μm, and the like is taken into consideration. Further, the thickness of the thin film layer is 0.1 μm.
If it is less than 1, the amount of emitted light is small and the visibility may be reduced.

The thickness of the thin film layer is
As long as conductivity is ensured, in a mixed state with a conductive material,
A thicker layer is preferable because it has no transparency and can prevent light from spreading due to light scattering.

However, in the case of forming a thick film, the average particle size of the glass powder or the like used as the luminescent material to be used becomes too large, and the handling during implantation becomes difficult.
Generally, a thickness of several tens of um or less is suitable.

(Preparation Method) The luminescent material of the present invention is, for example,
It is preferable that the light emitting material is pressed into the surface of the conductive material shown in FIG. 1 to form a thin film.

This is because the thin film can be formed uniformly and with high adhesion.

Here, the press-fitting pressure is 1 to 10 kgf / c.
A range of m ² is preferred.

This is because if the press-fitting pressure is less than 1 kgf / cm ² , the adhesive force between the conductive material and the luminescent material may be reduced, while if the pressure exceeds 10 kgf / cm ² , frictional heat or This is because the conductive material is easily deformed by the press-fitting pressure, and in order to prevent it from being deformed and to have mechanical strength correspondingly, the luminous body becomes thick.

This is also because if the pressure is too high, the amount of the electrically conductive material scraped off increases with respect to the amount of the light emitting material pressed in, and the effect of increasing the pressure decreases.

Further, the suitable range of press-fitting pressure is 3 to 8 kg.
f / cm ² , optimally in the range 5-7 kgf / cm ² .

As the press-fitting device of the present invention, a sand blast machine or the like is suitable because it allows uniform thin film formation.

In addition, after the surface of the conductive material is roughened by using corundum (average particle diameter 50 to 200 μm) in advance in order to increase the adhesion of the light emitting material to the conductive material and increase the light emitting area. It is preferable to press-fit glass powder or the like, which is a luminescent material.

[0047]

EXAMPLES The present invention will be described more specifically with reference to the following examples.

(Embodiment 1) FIG. 2 shows that the illuminant of the present invention is swept with an ion beam to cause it to emit light, and the uniformity of the ion beam is confirmed. It is a figure which shows a trajectory correction.

Here, in the luminous body of the present invention, a stainless metal plate having a length of 5 cm, a width of 5 cm, and a thickness of 1 mm is used as a conductive material, and a glass powder having an average particle diameter of 106 μm is used as the light emitting material. A direct pressure type sand blast was used as the press-fitting device, and the luminescent material was press-fitted onto the surface of the conductive material under the condition of press-fitting pressure of 6 kgf / cm ² .

Then, the ion beam emitted from the light source has just passed through the offset control of the X scanner and the Y scanner and has been irradiated onto the light emitter.

Where the surface of the light emitter is irradiated with the ion beam, the position of the light emitting surface, the light emitting state, etc. can be visually confirmed, and the position of the ion beam can be arbitrarily corrected by offset control based on this. You can do it.

(Embodiment 2) FIG. 3 shows the product of the present invention in the form of an aperture.

Here, the light-emitting body of the present invention is a metal circular plate made of stainless steel having a diameter of 5 cm and a thickness of 1 mm as a conductive material, using an ion beam passage hole having a diameter of 1 mm as a light-emitting material. , A glass powder having an average particle size of 106 um was used, and a luminescent material was press-fitted onto the conductive material surface under the condition of a pressure of 6 kgf / cm ² using a direct pressure sandblast as a press-fitting device on the entire surface of the aperture. It is a thing.

In this figure, the hatched portion around the passage hole is a light emitting portion, and the position of the ion beam can be adjusted so that the center of the ion beam is at the center position of the passage hole.

[0055]

According to the present invention, there is no charge accumulation due to ion beam irradiation, no discharge is generated, no subsequent in-beam reflection occurs, and the light emitter is not destroyed, and uniform and stable light emission is maintained. .

Further, there is an advantage that the light emitting property is good and the visibility is high, and since the heat conduction as the light emitting body is also good, it is possible to prevent the light emitting body from being deteriorated and the luminous intensity from being lowered by heat. .

Further, since the present invention has high mechanical strength and chemical stability as a light emitting body, it has good processability and can be cooled with water.

In addition, there is also an advantage that when the complicatedly processed and expensive generating characteristic is deteriorated, it can be easily reproduced.

[Brief description of drawings]

FIG. 1 shows an example of a method for producing a luminous body of the present invention.

FIG. 2 shows a usage example for confirming the uniformity of an ion beam using the light emitting body of the present invention.

FIG. 3 is a diagram showing the luminescent material of the present invention in the form of an aperture,
An example of use for correcting the position of the ion beam will be shown.

[Explanation of symbols]

 1: Luminous body 2: Conductive material 3: Thin film layer of luminescent material 4: Press-fitting device 5: x scanner 6: Y scanner 7: Ion beam 8: Light emitting part 9: Aperture

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tsuneo Kiya 1233 Watanuki-cho, Takasaki-shi, Gunma Japan Atomic Energy Research Institute Takasaki Research Institute

Claims (2)

[Claims] 1. A conductive light-emitting body for ion beam diagnosis, comprising a thin film layer of a light-emitting material provided on the surface of a conductive material. 2. The thin film layer of the light emitting material is press-fitted onto the surface of the conductive material to prepare the thin film layer.
The method for producing a conductive light-emitting body for ion beam diagnosis according to [4].