JPH08212976A - Low pressure mercury discharge lamp and manufacture thereof - Google Patents
Low pressure mercury discharge lamp and manufacture thereofInfo
- Publication number
- JPH08212976A JPH08212976A JP3619895A JP3619895A JPH08212976A JP H08212976 A JPH08212976 A JP H08212976A JP 3619895 A JP3619895 A JP 3619895A JP 3619895 A JP3619895 A JP 3619895A JP H08212976 A JPH08212976 A JP H08212976A
- Authority
- JP
- Japan
- Prior art keywords
- arc tube
- discharge lamp
- pressure mercury
- film
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、主に２５４ｎｍの紫外
線としての殺菌線を利用して包装材料などの表面殺菌に
利用する低圧水銀放電灯に関し、特に発光管の黒化防止
のために発光管の内表面に金属酸化物被膜を形成する低
圧水銀放電灯の寿命特性の改善に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low-pressure mercury discharge lamp mainly used for sterilizing surface of packaging materials by utilizing sterilizing rays as ultraviolet rays of 254 nm, and particularly to prevent blackening of an arc tube. The present invention relates to improvement of life characteristics of a low pressure mercury discharge lamp in which a metal oxide film is formed on the inner surface of a tube.
【０００２】[0002]
【従来の技術】一般に、低圧水銀蒸気放電灯において発
光管としてのガラス管の保護あるいは内面の黒化を防止
するために、発光管の内表面にアルミナ（Ａｌ2Ｏ3），
チタニア（ＴｉＯ2）等の金属酸化物の保護被膜を形成
することが、特開平３−７７２５８号公報に開示されて
いるような構成をもって行われている。2. Description of the Related Art Generally, in a low pressure mercury vapor discharge lamp, in order to protect a glass tube as an arc tube or prevent blackening of the inner surface, alumina (Al 2 O 3 ),
Forming a protective coating of a metal oxide such as titania (TiO 2 ) is performed with the structure disclosed in JP-A-3-77258.
【０００３】一方、包装容器等の表面殺菌や水の表面殺
菌などには、２５４ｎｍの紫外線（殺菌線）を放射する
比較的電極間距離が長い（１ｍ程度）低圧水銀放電灯が
用いられる。又、この種の放電灯の発光管としては殺菌
線の透過率特性のよい石英ガラス管が用いられている。
ところで、このような構成の低圧水銀放電灯において、
発光管に保護膜を設けない場合、発光管の黒化が生じる
が、発光管の黒化現象は次のような過程で起こることが
判明した。On the other hand, for surface sterilization of packaging containers, surface sterilization of water, etc., a low-pressure mercury discharge lamp having a relatively long distance between electrodes (about 1 m) that emits ultraviolet rays (sterilization line) of 254 nm is used. Further, as a light emitting tube of this type of discharge lamp, a quartz glass tube having a good sterilizing ray transmittance characteristic is used.
By the way, in a low-pressure mercury discharge lamp with such a configuration,
It was found that when the protective film is not provided on the arc tube, the arc tube is blackened, but the blackening phenomenon of the arc tube occurs in the following process.
【０００４】一般的な低圧水銀放電灯の構成図である図
８において、２１は石英ガラスからなる発光管で、２２
は発光管の両端に配置されたタングステンフィラメント
と陽極からなる電極である。該発光管中に封入された水
銀は、フィラメントから放出された熱電子の衝突によっ
てエネルギーを受け取り励起する。励起した大部分の水
銀原子は、そのエネルギーを波長１８５ｎｍや２５４ｎ
ｍの光として放出するが、ごく一部の水銀原子は電離エ
ネルギーを得てイオン化し、発光管の電界中で加速され
て発光管を構成している石英ガラスの中にイオンの状態
で浸入し、石英ガラスの表層に分散する。又、この水銀
イオンは石英ガラス中で電子を受け取り中性化し固定さ
れる。そして、発光管内の水銀蒸気から放出された光は
石英ガラス中に固定された水銀により吸収され、そのエ
ネルギーは熱エネルギーとして石英ガラス中に発散され
てしまうため、石英ガラスの透過率が低下し、黒化した
放電灯の放射効率は低下するようになる。又、水銀原子
が石英ガラス中に分散されているために石英ガラスは黒
褐色に着色して見えることが判った。In FIG. 8, which is a structural diagram of a general low-pressure mercury discharge lamp, 21 is an arc tube made of quartz glass, and 22
Is an electrode composed of a tungsten filament and an anode arranged at both ends of the arc tube. The mercury enclosed in the arc tube receives energy and is excited by collision of thermoelectrons emitted from the filament. Most of the excited mercury atoms have energy of wavelength 185 nm or 254 n.
Although it emits as m light, a small portion of mercury atoms are ionized by obtaining ionization energy, accelerated in the electric field of the arc tube, and penetrated into the quartz glass forming the arc tube in the state of ions. , Dispersed on the surface layer of quartz glass. Further, this mercury ion receives an electron in the quartz glass to be neutralized and fixed. Then, the light emitted from the mercury vapor in the arc tube is absorbed by the mercury fixed in the quartz glass, the energy is diffused into the quartz glass as heat energy, the transmittance of the quartz glass decreases, The radiation efficiency of the blackened discharge lamp is reduced. It was also found that the quartz glass looks blackish brown because the mercury atoms are dispersed in the quartz glass.
【０００５】また、前記公開公報に開示されているよう
に発光管の内表面にＡｌ2Ｏ3，ＴｉＯ2等の金属酸化物
の薄膜を形成し黒化を抑制することは良く知られてお
り、こうした被膜は石英ガラスに比べてその組成が密で
あるため、水銀イオンの衝突に対する耐性が高く、水銀
イオンの浸入による黒化速度が大幅に遅くなるために、
低圧水銀放電灯の寿命改善に大きく寄与するものであ
る。Further, as disclosed in the above-mentioned publication, it is well known to form a thin film of a metal oxide such as Al 2 O 3 or TiO 2 on the inner surface of an arc tube to suppress blackening. Since such a coating has a denser composition than quartz glass, it has a high resistance to the collision of mercury ions, and the blackening rate due to the penetration of mercury ions is significantly slowed down.
This greatly contributes to the improvement of the life of the low-pressure mercury discharge lamp.
【０００６】そして、Ａｌ2Ｏ3やＴｉＯ2の金属酸化物
薄膜は、金属アルコキシドの溶液をディップ法により塗
布し、焼き付けることで容易に物体の表面に形成するこ
とができる。このように形成された金属酸化物膜の組成
は密で物理的、化学的に安定いており耐食性があるた
め、色々な物体の表面改質、改善などの用途で使われる
ことが多い。又、Ａｌ2Ｏ3，ＴｉＯ2などの金属酸化物
の薄膜は金属アルコキシド溶液への塗布、焼付け方法
（ゾルゲル法）によっても容易に得られるが、溶液の濃
度、粘度あるいは引き上げ速度等を調整することで、膜
厚を通常０．１〜１μｍの範囲でコントロールすること
が可能である。A metal oxide thin film of Al 2 O 3 or TiO 2 can be easily formed on the surface of an object by applying a solution of a metal alkoxide by a dip method and baking it. The composition of the metal oxide film thus formed is dense, physically and chemically stable, and has corrosion resistance, so that it is often used for surface modification and improvement of various objects. Although a thin film of a metal oxide such as Al 2 O 3 or TiO 2 can be easily obtained by coating a metal alkoxide solution or baking method (sol-gel method), the concentration, viscosity or pulling rate of the solution is adjusted. Thus, it is possible to control the film thickness within the range of usually 0.1 to 1 μm.
【０００７】[0007]
【発明が解決しようとする課題】ところで、低圧水銀放
電灯の黒化抑制を目的として薄膜を形成する場合、水銀
イオンの衝突、浸入する深さ（エネルギー）に対して十
分な膜厚がないと、黒化抑制の効果が十分に得られない
ことが以下の実験により明らかになった。実験を行った
ランプの主な仕様は次の通りである。図８において発光
管は全長約９００ｍｍの石英製発光管２１からなり、そ
の両端にはタングステンフィラメントと陽極からなる電
極２２が８４０ｍｍの距離で設置されている。発光管端
部は電極に通電するためモリブデン箔を介して溶封され
ており、ランプ電力は４００Ｗ、ランプ負荷は約５Ｗ／
ｃｍの設計になっている。また、発光管の外側にはさら
に石英製の外管２３がかぶさっており、外管と発光管の
間に温度が一定に保たれた純水２４が流されて、水銀蒸
気圧をコントロールしている。発光管に封入されている
水銀は、フィラメントから放出された熱電子によりエネ
ルギーを受け取り励起し、そのエネルギーを１８５ｎｍ
や２５４ｎｍの波長の光として放射する。電極から約２
０ｍｍのところまでは負グロー領域及びファラデー暗部
領域であり、殺菌線は放射されない。両端の電極から２
０ｍｍずつ内側の部分は陽光柱とよばれる領域で殺菌線
を効率よく放射する。そのため図８における放電灯では
陽光柱にあたる８００ｍｍを有効発光長としている。そ
して発光管の内面にゾルゲル法により発光管の有効発光
部に０．１〜０．３μｍの厚さのＡｌ2Ｏ3膜２５を形成
した低圧水銀放電灯を試作し、２０００時間の寿命試験
を行ったところ、発光管全体から放射される殺菌線（２
５４ｎｍ）の維持率について表１のような結果が得られ
た。By the way, when a thin film is formed for the purpose of suppressing blackening of a low-pressure mercury discharge lamp, it is necessary to have a sufficient film thickness with respect to the depth (energy) of collision and penetration of mercury ions. The following experiment revealed that the effect of suppressing blackening was not sufficiently obtained. The main specifications of the tested lamp are as follows. In FIG. 8, the arc tube comprises a quartz arc tube 21 having a total length of about 900 mm, and electrodes 22 composed of a tungsten filament and an anode are installed at a distance of 840 mm on both ends thereof. The end of the arc tube is sealed by a molybdenum foil to energize the electrodes. The lamp power is 400W and the lamp load is about 5W /
It is designed in cm. Further, an outer tube 23 made of quartz is further covered on the outer side of the arc tube, and pure water 24 whose temperature is kept constant is flown between the outer tube and the arc tube to control the mercury vapor pressure. There is. The mercury enclosed in the arc tube receives and is excited by the thermal electrons emitted from the filament, and the energy is 185 nm.
And emits as light having a wavelength of 254 nm. About 2 from the electrode
The area up to 0 mm is a negative glow area and a Faraday dark area, and no germicidal rays are emitted. 2 from the electrodes on both ends
The inner part of each 0 mm efficiently emits germicidal rays in a region called a positive column. Therefore, in the discharge lamp shown in FIG. 8, 800 mm, which corresponds to the positive column, is the effective emission length. Then, a low-pressure mercury discharge lamp having an Al 2 O 3 film 25 having a thickness of 0.1 to 0.3 μm formed on the inner surface of the arc tube by the sol-gel method in the effective light emitting part of the arc tube was prototyped, and a life test of 2000 hours was performed. When I went, the germicidal rays (2
The results shown in Table 1 were obtained for the maintenance rate of 54 nm).
【０００８】[0008]
【表１】 [Table 1]
【０００９】表１に示すように、膜厚が０．１５μｍ以
上で殺菌線維持率は９０％以上の高水準を示すが、寿命
試験をした放電灯の発光管の各部位の様子を詳細に調査
したところ、図９に示されるように発光管の中央部付近
の黒化が最も大きく、両端に行くほど黒化は少なくなっ
ていた。又、両端部の黒化は電極から１５０ｍｍのとこ
ろまではほとんどなく、そこから中央部に向かって黒化
が徐々に大きくなっている。更に、中央部の黒化の度合
は膜厚が薄いほど大きく、膜厚が０．１５μｍ以下では
黒化の傾向は顕著であり、前記した殺菌線出力動程図に
示される通りである。一方、膜厚が０．１５μｍ以上の
場合は黒化が少なく殺菌線照度の動程も安定している。
但し、これらの放電灯もその度合は少ないながら中央部
が黒化する傾向にあり、膜厚が０．２０〜０．３０μｍ
の範囲では２０００時間における中央部の照度維持率は
約９０％である。こうした局部的な黒化現象は、この種
放電灯の動作中の発光管内において生成される水銀イオ
ンのうち比較的高い運動エネルギーをもった水銀イオン
の密度が発光管の中央付近で高いためと推定される。As shown in Table 1, the sterilization line retention rate is as high as 90% or more when the film thickness is 0.15 μm or more, but the state of each part of the arc tube of the discharge lamp subjected to the life test is described in detail. As a result of the investigation, as shown in FIG. 9, the blackening near the central portion of the arc tube was the largest, and the blackening was smaller toward both ends. Further, the blackening at both ends hardly occurs up to 150 mm from the electrode, and the blackening gradually increases from there to the center. Further, the degree of blackening of the central portion is larger as the film thickness is thinner, and the tendency of blackening is remarkable when the film thickness is 0.15 μm or less, as shown in the above sterilization line output travel diagram. On the other hand, when the film thickness is 0.15 μm or more, there is little blackening and the range of sterilization line illuminance is stable.
However, these discharge lamps also tend to be blackened in the central portion although the degree thereof is small, and the film thickness is 0.20 to 0.30 μm.
In the above range, the illuminance maintenance rate in the central portion at 2000 hours is about 90%. It is presumed that such a localized blackening phenomenon is due to the fact that the density of mercury ions having relatively high kinetic energy among the mercury ions generated in the arc tube during operation of this type of discharge lamp is high near the center of the arc tube. To be done.
【００１０】一方、Ａｌ2Ｏ3やＴｉＯ2の金属酸化物の
薄膜はゾルゲル法により、石英製の発光管の内面に形成
される。ゾルゲル法による薄膜形成における原材料は金
属（Ｍ）の有機化合物をエタノールや酢酸エチルなどの
有機溶媒に溶解させたものであり、その溶液を石英管の
中に満たし、液面が一定の速度で降下するように溶液を
取り除く。そして、濡れた状態の石英管を乾燥器にいれ
余分な溶媒を蒸発させゲル状の膜にする。通常、ゲル膜
は空気雰囲気中で焼成される。このとき炭素（Ｃ）や水
素（Ｈ）及び水酸基（−ＯＨ）は酸素と反応して炭酸ガ
スや水蒸気になって蒸発する。残った金属成分も酸化さ
れるが焼成条件下における蒸気圧が低いためガラスの表
面上に残ってゆく。そして金属酸化物（ＭＯ2）は隣合
う金属酸化物と結合しあい（−Ｏ−Ｍ−Ｏ−）、金属酸
化物の薄膜はポーラスな状態から密に結合しあう状態へ
移行する。On the other hand, a thin film of a metal oxide of Al 2 O 3 or TiO 2 is formed on the inner surface of a quartz arc tube by the sol-gel method. The raw material for forming a thin film by the sol-gel method is an organic compound of metal (M) dissolved in an organic solvent such as ethanol or ethyl acetate. The solution is filled in a quartz tube and the liquid level drops at a constant speed. Remove the solution as you would. Then, the quartz tube in a wet state is put in a dryer to evaporate the excess solvent to form a gel film. Generally, gel films are fired in an air atmosphere. At this time, carbon (C), hydrogen (H) and hydroxyl group (-OH) react with oxygen to become carbon dioxide gas or water vapor and evaporate. The remaining metal components are also oxidized, but remain on the surface of the glass due to the low vapor pressure under firing conditions. Then, the metal oxide (MO 2 ) is bonded to the adjacent metal oxide (-O-M-O-), and the thin film of the metal oxide shifts from the porous state to the closely coupled state.
【００１１】発光管の表面にこうした金属酸化物の薄膜
が形成された放電灯は前記の通り、高い殺菌線出力維持
率を示すが、有機物を含む材料を使用するため薄膜形成
時に未分解のガス成分（Ｃ，Ｈ，−ＯＨ）が薄膜中に閉
じ込められ、発光管に加工した後にランプが点灯するこ
とによって生じるプラズマによって薄膜自体が活性化さ
れ微量ではあるが閉じ込められたガス成分が不純ガスと
なって放出され、図１０に示すようにランプの始動特性
を悪くする問題がある。As described above, a discharge lamp having such a metal oxide thin film formed on the surface of an arc tube shows a high sterilization line output maintenance rate, but since it uses a material containing an organic substance, a gas which is not decomposed when the thin film is formed is used. The components (C, H, -OH) are confined in the thin film, and the thin film itself is activated by the plasma generated when the lamp is lit after the arc tube is processed. There is a problem that the starting characteristics of the lamp are deteriorated as shown in FIG.
【００１２】前記した問題点をまとめると、発光管の内
表面にＡｌ2Ｏ3やＴｉＯ2の薄膜をゾルゲル法によって
形成した低圧水銀放電灯において、薄膜の厚さが０．１
５μｍよりも小さいと発光管中央部の黒化現象が生じ
て、殺菌線出力の局部的な低下による発光管長手方向の
殺菌線出力が不均一となり、使用の際、発光管管軸の法
線と平行に包装材料（ワーク）を流し殺菌する場合には
部分的な未殺菌部を生じさせてしまう問題があり、逆に
膜厚が大き過ぎると薄膜から発生するガス成分により、
ランプの始動電圧が高くなって不点となりランプ寿命が
短くなるという欠点が生じ、紫外線殺菌装置のメンテナ
ンスやランニングコストの上昇のにつながるという問題
がある。To summarize the above-mentioned problems, in a low-pressure mercury discharge lamp in which a thin film of Al 2 O 3 or TiO 2 is formed on the inner surface of the arc tube by the sol-gel method, the thin film has a thickness of 0.1.
If it is less than 5 μm, a blackening phenomenon occurs in the central part of the arc tube, and the sterilization line output in the longitudinal direction of the arc tube becomes non-uniform due to a local decrease in the sterilization line output. When sterilizing the packaging material (work) by flowing it in parallel with the above, there is a problem that a partial unsterilized part is generated, and conversely, if the film thickness is too large, due to the gas component generated from the thin film,
There is a problem that the starting voltage of the lamp becomes high and it becomes a defect and the life of the lamp becomes short, which leads to maintenance of the ultraviolet sterilizer and increase in running cost.
【００１３】本発明は前記に鑑みてなされたもので、発
光管内表面に黒化現象を防止するために形成された金属
酸化物薄膜を形成した低圧水銀放電灯において、寿命期
間を通して良好な殺菌線出力特性を維持することができ
るばかりでなく、放電灯の寿命特性を改善することがで
き、紫外線殺菌装置に用いる放電灯として最適な低圧水
銀放電灯及びその製造方法を提供することを目的とす
る。The present invention has been made in view of the above, and is a low-pressure mercury discharge lamp in which a metal oxide thin film is formed on the inner surface of an arc tube to prevent a blackening phenomenon, and a good sterilization line is provided throughout the life of the lamp. It is an object of the present invention to provide a low-pressure mercury discharge lamp and a manufacturing method thereof, which can not only maintain the output characteristics but also improve the life characteristics of the discharge lamp, and which is optimum as a discharge lamp used in an ultraviolet sterilizer. .
【００１４】[0014]
【課題を解決するための手段】本発明は、両端に電極を
封着し内部に少なくとも水銀を封入してなる長尺状の発
光管の内表面にＡｌ2Ｏ3やＴｉＯ2等の薄膜を被着して
なる放電灯において、発光管中央部に形成する薄膜は、
その他の部分よりも厚く形成することを特徴とする。
又、前記発光管の内表面の厚膜部が発光管両端の電極間
距離である有効発光長に対して１／３から１／２の長さ
で、前記厚膜部の膜厚が０．２μｍ〜０．３μｍであ
り、その他の部分の膜厚が０．１μｍ〜０．１５μｍで
あることを特徴とする。According to the present invention, a thin film such as Al 2 O 3 or TiO 2 is formed on the inner surface of a long arc tube in which electrodes are sealed at both ends and at least mercury is sealed inside. In the attached discharge lamp, the thin film formed at the center of the arc tube is
It is characterized in that it is formed thicker than other portions.
The thick film portion on the inner surface of the arc tube has a length of 1/3 to 1/2 of the effective light emission length which is the distance between the electrodes at both ends of the arc tube, and the film thickness of the thick film portion is 0. The thickness is 2 μm to 0.3 μm, and the film thickness of other portions is 0.1 μm to 0.15 μm.
【００１５】又、本発明に係わる低圧水銀放電灯の製造
方法は発光管の内表面にゾルゲル法により薄膜を形成す
るに際し、第一層目として管全体に膜を形成し、第二層
目を塗布乾燥させる焼成前に発光管中央部の膜厚部以外
の部分を有機溶剤に浸漬して溶解除去し、その後焼成す
ることにより前記膜厚部を形成することを特徴とする。
更に、本発明に係わる製造方法は発光管の内表面にゾル
ゲル法により薄膜を形成するに際し、第一層目として管
端部から中央部に対して発光管全長の約１／３から１／
４の長さの部分を残して膜を形成し、第二層目は発光管
を反転させて前記同様の操作を行い、０．１μｍ〜０．
１５μｍの膜を発光管中央部で重ねることにより前記膜
厚部を形成することを特徴とする。In the method of manufacturing a low-pressure mercury discharge lamp according to the present invention, when a thin film is formed on the inner surface of an arc tube by a sol-gel method, a film is formed on the entire tube as the first layer and a second layer is formed. Before coating and baking, the central part of the arc tube other than the film thickness part is immersed in an organic solvent to be dissolved and removed, and then the film thickness part is formed by baking.
Further, according to the manufacturing method of the present invention, when a thin film is formed on the inner surface of the arc tube by the sol-gel method, about 1/3 to 1/1 of the total length of the arc tube is measured from the tube end to the center as the first layer.
4 is left to form a film, and the second layer is inverted in the arc tube and the same operation as described above is carried out.
The film thickness part is formed by stacking 15 μm films at the central part of the arc tube.
【００１６】[0016]
【作用】前記構成により、発光管の中央付近の膜厚が厚
くなっているので、中央付近での黒化による局部的な透
過率低下が抑制されるために殺菌線照度低下が少なく、
寿命末期においても有効発光長全体にわたってほぼ均一
な照度分布が得られ、紫外線殺菌装置における均整度の
低下を防止することができる。又、黒化による照度低下
の少ない部分には余分な厚さの膜を形成していないの
で、膜からのガス放出が少なくランプの始動性への影響
が少なく、安定した始動特性が得られる。更に、膜厚の
制御が容易なゾルゲル法を用いることにより、全長が長
い発光管の内面に数層の積層した金属酸化物薄膜を容易
に形成することができる。With the above structure, since the film thickness near the center of the arc tube is thick, a local decrease in transmittance due to blackening near the center is suppressed, so that a decrease in sterilization line illuminance is small,
Even at the end of the life, a substantially uniform illuminance distribution is obtained over the entire effective light emission length, and it is possible to prevent a reduction in the uniformity of the ultraviolet sterilizer. Further, since a film having an excessive thickness is not formed in a portion where the illuminance is less likely to decrease due to blackening, the gas is less likely to be released from the film, the startability of the lamp is less affected, and stable starting characteristics can be obtained. Furthermore, by using the sol-gel method whose film thickness can be easily controlled, it is possible to easily form a metal oxide thin film in which several layers are laminated on the inner surface of a long arc tube.
【００１７】[0017]
【実施例】以下、本発明を図面に基づき説明する。図１
は、本発明に係わる低圧水銀放電灯用発光管に加工され
る前の石英管の断面を示す図である。長さ９００ｍｍ、
内径１５ｍｍの石英管１にアルミニウムアルコキシド
（Ａｌ（ＯＣ3Ｈ7）3）のエタノール溶液（濃度０．１
２ｍｏｌ／ｌ、以下ゾルゲル液という）を上端から３０
０ｍｍのところまで注ぎこみ、毎分１００ｍｌの速度で
下端から流し出す。その後、ゾルゲル液で濡れた石英管
を８０〜１００℃に加熱して溶媒を蒸発させゲル膜をと
し、石英管を空気中で６００℃以上に加熱するとゲル膜
が酸化されて厚さ０．１μｍのＡｌ2Ｏ3膜２が形成され
る。この後、石英管の上下を反転させて前記と同様の操
作を繰り返せば図１に示されるような、全長９００ｍｍ
の内、中央部の３００ｍｍが０．２μｍで、両端の３０
０ｍｍが０．１μｍの厚さのＡｌ2Ｏ3膜が形成された石
英管が作成される。又、他の製造方法として、あらかじ
め発光管の内表面全体に薄膜を形成した後、２層目を塗
布乾燥して液膜をゲル化する。そして、石英管の両端か
ら３００ｍｍのゲル膜の内余分な部分を有機溶剤に浸漬
して除去し、焼成することにより前記と同様な発光管が
得られる。なお、作業性は前者の方が良い。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG.
FIG. 3 is a view showing a cross section of a quartz tube before being processed into an arc tube for a low-pressure mercury discharge lamp according to the present invention. 900 mm in length,
An aluminum alkoxide (Al (OC 3 H 7 ) 3 ) ethanol solution (concentration: 0.1) was placed in a quartz tube 1 having an inner diameter of 15 mm.
2 mol / l, hereinafter referred to as sol-gel solution) 30 from the top
Pour to 0 mm and pour from the bottom at a rate of 100 ml / min. Then, the quartz tube wet with the sol-gel solution is heated to 80 to 100 ° C. to evaporate the solvent to form a gel film. When the quartz tube is heated to 600 ° C. or more in the air, the gel film is oxidized to a thickness of 0.1 μm. Al 2 O 3 film 2 is formed. Then, if the quartz tube is turned upside down and the same operation as above is repeated, the total length is 900 mm as shown in FIG.
Of which 300mm in the center is 0.2μm and 30mm at both ends
A quartz tube having an Al 2 O 3 film having a thickness of 0 μm and a thickness of 0.1 μm is prepared. As another manufacturing method, after forming a thin film on the entire inner surface of the arc tube in advance, the second layer is applied and dried to gel the liquid film. Then, an excessive portion of the gel film of 300 mm from both ends of the quartz tube is immersed in an organic solvent to be removed, and the firing is performed to obtain an arc tube similar to the above. The former is better in workability.
【００１８】図２は、本発明の実施例である低圧水銀放
電灯の加工前の発光管の断面を示す図である。図中３は
前記したアルミナ膜２を形成した内径１５ｍｍの石英ガ
ラスからなる管入力４００Ｗ用の発光管で、該発光管３
の両端には例えばＢａ，Ｃａ，Ｓｒの炭酸塩を塗布した
タングステンフィラメント４ａ，４ｂがリード線を兼ね
たフィラメント支柱５ａ，５ｂによる支持され、該支柱
５ａ，５ｂはモリブデン箔６ａ，６ｂを介して発光管３
の外部リード線７ａ，７ｂに継線され、溶封されてい
る。又、フィラメント支柱５ａ，５ｂには陽極８ａ，８
ｂが溶接されており、フィラメント４ａ，４ｂと陽極８
ａ，８ｂとで、それぞれ電極を構成している。更に、こ
の実施例における発光管の電極間距離は８４０ｍｍと
し、負グロー領域及びファラデー暗部は電極から約２０
ｍｍの部分までであり、従って有効発光部は両電極から
２０ｍｍずつ内側の領域であり、有効発光長は８００ｍ
ｍとなっている。FIG. 2 is a view showing a cross section of an arc tube before processing of a low pressure mercury discharge lamp which is an embodiment of the present invention. Reference numeral 3 in the figure denotes an arc tube for tube input 400 W made of quartz glass having an inner diameter of 15 mm and having the alumina film 2 formed thereon.
At both ends, for example, tungsten filaments 4a, 4b coated with a carbonate of Ba, Ca, Sr are supported by filament struts 5a, 5b also serving as lead wires, and the struts 5a, 5b are provided via molybdenum foils 6a, 6b. Arc tube 3
The external lead wires 7a and 7b are joined and sealed. Also, the filament columns 5a and 5b have anodes 8a and 8a, respectively.
b is welded, the filaments 4a, 4b and the anode 8
Electrodes are formed by a and 8b. Further, the distance between the electrodes of the arc tube in this example was 840 mm, and the negative glow region and the Faraday dark part were about 20 mm from the electrodes.
Therefore, the effective emission area is 20 mm inward from both electrodes, and the effective emission length is 800 m.
It has become m.
【００１９】又、発光管３には電極のフィラメントの先
端から約２０ｍｍで有効発光部となる領域以外の位置に
排気管９が接続されている。なお、発光管３の内表面に
は前記したゾルゲル法によってアルミナ膜２が、端部で
０．１μｍ，中央部で０．２μｍの膜厚により形成され
ている。まず、発光管３の有効発光部以外のいずれか一
方の部分に設けられた排気管９を介して真空ポンプを用
いて発光管内を真空にした後、タングステンフィラメン
ト４ａ，４ｂにリード線７ａ，７ｂを介して電流を流
し、抵抗加熱することによってタングステンフィラメン
トに塗布している炭酸塩を加熱分解して炭酸ガスを放出
させ、排気してタングステンフィラメント上に電子放出
性物質であるＢａ，Ｃａ，Ｓｒの酸化物を生成させる。
次に、排気管９を通して始動用ガスであるアルゴンガス
を約１ｔｏｒｒ、水銀を約２０ｍｇ封入した後、排気管
をチップオフ９ａして真空ポンプから切り放す。これに
より、図３に示すような低圧水銀放電灯の発光管が得ら
れる。そして、本実施例では発光管のランプ電圧は約７
５Ｖで、ランプ電流を約６Ａ通じてランプ電力４００Ｗ
で点灯させる。この場合、発光管全体から放射される殺
菌線のエネルギーは初期で約６０Ｗである。このように
して製作したランプの始動にあたっては両電極間に４０
０Ｖの電圧をかけることにより点灯を開始させる設計に
なっている。Further, an exhaust pipe 9 is connected to the arc tube 3 at a position about 20 mm from the tip of the filament of the electrode other than the area which becomes the effective light emitting portion. The alumina film 2 is formed on the inner surface of the arc tube 3 by the sol-gel method with a film thickness of 0.1 μm at the end and 0.2 μm at the center. First, the inside of the arc tube is evacuated by using a vacuum pump through the exhaust tube 9 provided in any one of the parts other than the effective light emitting part of the arc tube 3, and then the lead wires 7a and 7b are attached to the tungsten filaments 4a and 4b. An electric current is passed through the electrode to heat and decompose the carbonate applied to the tungsten filament to release carbon dioxide gas, which is then exhausted to emit Ba, Ca, Sr which is an electron-emitting substance on the tungsten filament. To form an oxide of.
Next, about 1 torr of starting gas and about 20 mg of mercury are sealed through the exhaust pipe 9, and then the exhaust pipe is cut off from the tip of the vacuum pump 9a. As a result, the arc tube of the low-pressure mercury discharge lamp as shown in FIG. 3 is obtained. In this embodiment, the lamp voltage of the arc tube is about 7
At 5V, the lamp current is about 6A and the lamp power is 400W.
Turn on. In this case, the energy of the germicidal radiation emitted from the entire arc tube is about 60 W at the initial stage. When starting the lamp manufactured in this way, 40
It is designed to start lighting by applying a voltage of 0V.
【００２０】次に、このように構成した発光管からなる
低圧水銀放電灯を紫外線殺菌ランプ装置として使用する
場合は、図４（ａ）及びその断面を表す図４（ｂ）に示
すように、発光管３は石英ガラス製の外管１１内に間隔
をおいて収納し、外管１１の両端には、発光管冷却用純
水の出入口となる継ぎ手１２ａ，１２ｂが接続され、発
光管１と外管１１の間隙部には、ポンプ、クーラー、ヒ
ーター等で構成される水制御装置（図示せず）により約
４０℃の温度に調整された純水１３が循環されるように
なっている。又、発光管３を収納した外管１１は発光管
から放射される殺菌線を有効に利用するために反射板１
４を備え、発光管の有効発光部以外はマスクするように
窓部１５を設けた点灯ボックス１６内に配置され、包装
材料などのワーク１７に窓部を対向させて設置されるよ
うになっている。なお、発光管３の中心からワークの表
面までの距離は、通常数ｍｍから数十ｍｍ程度である。Next, when the low-pressure mercury discharge lamp composed of the arc tube constructed as described above is used as an ultraviolet germicidal lamp device, as shown in FIG. 4 (a) and FIG. 4 (b) showing its cross section, The arc tube 3 is housed in an outer tube 11 made of quartz glass at a distance, and joints 12a and 12b serving as inlets and outlets of pure water for cooling the arc tube are connected to both ends of the outer tube 11 so as to connect to the arc tube 1. Pure water 13 adjusted to a temperature of about 40 ° C. by a water control device (not shown) including a pump, a cooler, a heater, and the like is circulated in the gap portion of the outer pipe 11. Further, the outer tube 11 accommodating the light emitting tube 3 is provided with the reflector 1 in order to effectively use the germicidal rays emitted from the light emitting tube.
4 is arranged in a lighting box 16 provided with a window 15 so as to mask except the effective light emitting portion of the arc tube, and the window is opposed to a work 17 such as packaging material. There is. The distance from the center of the arc tube 3 to the surface of the work is usually about several mm to several tens of mm.
【００２１】図５は発光管全体から放射される殺菌線の
出力維持率の動程を示す図で、曲線Ａは本発明に係わる
発光管の特性図であり、曲線Ｂ，Ｃはそれぞれ発光管全
体に均一に０．１μｍ及び０．３μｍのアルミナ膜を形
成した従来品の特性を示している。膜厚の薄いものとは
明らかに殺菌線出力維持率に差がみられ、厚いものと同
等の特性を示している。この差は特に透過率低下の大き
い発光管中央部に十分に厚いアルミナ膜を形成すること
により、イオン化した水銀の侵入による黒化を抑制した
ためである。FIG. 5 is a diagram showing the range of the output maintenance rate of the germicidal radiation emitted from the entire arc tube. Curve A is a characteristic diagram of the arc tube according to the present invention, and curves B and C are arc tubes respectively. The characteristics of the conventional product in which alumina films of 0.1 μm and 0.3 μm are uniformly formed are shown. There is a clear difference in the sterilization line output maintenance ratio from the thin film, and it shows the same characteristics as the thick film. This difference is due to the fact that a sufficiently thick alumina film is formed in the central portion of the arc tube where the transmittance is greatly reduced to suppress blackening due to the penetration of ionized mercury.
【００２２】次に、図６は２０００時間点灯後の発光管
の長手方向の初期値に対する殺菌線照度相対値の分布を
示す図である。曲線Ａは本発明による低圧水銀放電灯の
特性を示し、曲線Ｂ，Ｃはそれぞれ発光管の有効発光部
全体に均一に０．１μｍ及び０．３μｍのアルミナ膜を
形成した従来品の特性を示している。アルミナ膜の厚さ
が薄い場合には中央部における殺菌線照度相対値は約７
０％まで低下する。低圧水銀放電灯が包装材料の表面殺
菌に利用される場合、なるべく高い殺菌線照度を得て、
殺菌処理効率を上げるため、ワークは発光管から近距離
で使用される。そのため、図６の曲線Ｂのように照度む
らがあるとワークに未殺菌部を生じさせたり、殺菌線照
度の低い部分で殺菌に必要な照度を得るためにワークを
移動させる速度を低下させなければならなくなり、殺菌
装置全体の効率的な運転が出来なくなる。殺菌装置の高
速な処理速度を必要とすれば、早い時間での放電灯の交
換が要求され、結果的に放電灯の寿命が短くなってしま
う。これに対し、本発明に係わる放電灯は、有効発光部
における金属酸化物被膜は中央部の膜厚が厚くなってい
るため照度低下が少なく、発光管長手方向の殺菌線照度
分布は、図６の曲線Ａで示すように均整度が良くなり、
それによる放電灯の寿命特性の改善効果は大きい。Next, FIG. 6 is a diagram showing the distribution of the relative value of sterilization ray illuminance with respect to the initial value in the longitudinal direction of the arc tube after lighting for 2000 hours. A curve A shows the characteristics of the low-pressure mercury discharge lamp according to the present invention, and curves B and C show the characteristics of a conventional product in which 0.1 μm and 0.3 μm alumina films are uniformly formed over the entire effective light emitting portion of the arc tube. ing. When the thickness of the alumina film is thin, the sterilization line illuminance relative value at the center is about 7
It drops to 0%. When low-pressure mercury discharge lamps are used for surface sterilization of packaging materials, obtain as high sterilization line illuminance as possible,
In order to increase the sterilization efficiency, the work is used in a short distance from the arc tube. Therefore, if there is uneven illuminance as shown by the curve B in FIG. 6, an unsterilized portion should be generated in the work, or the speed at which the work is moved to obtain the illuminance necessary for sterilization in a portion with low sterilization line illuminance must be reduced. It becomes unnecessary to operate the sterilizer as a whole efficiently. If a high processing speed of the sterilizer is required, it is necessary to replace the discharge lamp in a short time, and as a result, the life of the discharge lamp is shortened. On the other hand, in the discharge lamp according to the present invention, since the metal oxide film in the effective light emitting portion has a thick central portion, the illuminance is less decreased, and the sterilization line illuminance distribution in the longitudinal direction of the arc tube is as shown in FIG. As shown by the curve A of
The effect of improving the life characteristics of the discharge lamp is great.
【００２３】更に、図７は点灯時間経過に伴う放電灯の
残存率を示す図である。曲線Ａは本発明による低圧水銀
放電灯の特性を示し、曲線Ｂ，Ｃはそれぞれ発光管内表
面に均一に０．１μｍ及び０．３μｍのアルミナ膜を形
成した従来品の特性を示している。膜厚が大きくなれ
ば、点灯時間に応じて水素、酸素、水蒸気及び炭酸ガス
のガス放出が多くなり、それら不純ガス濃度が高くなる
とランプの始動電圧が上昇していく。そして、始動電圧
が４００Ｖに近づいて来るとランプが不点となる確率が
高くなり、放電灯の寿命は短くなる。Further, FIG. 7 is a diagram showing the remaining rate of the discharge lamp with the passage of lighting time. A curve A shows the characteristics of the low-pressure mercury discharge lamp according to the present invention, and curves B and C show the characteristics of a conventional product in which 0.1 μm and 0.3 μm alumina films are uniformly formed on the inner surface of the arc tube. As the film thickness increases, the amount of hydrogen, oxygen, water vapor and carbon dioxide gas released increases according to the lighting time, and the starting voltage of the lamp increases as the concentration of impure gas increases. Then, when the starting voltage approaches 400V, the probability of the lamp becoming defective becomes high, and the life of the discharge lamp becomes short.
【００２４】[0024]
【発明の効果】以上、実施例に基づいて説明したよう
に、本発明によれば、ランプの始動特性性にほとんど影
響することなく、寿命期間中にわたって発光管中央部の
黒化による照度低下と均斉度の低下が生じず、長寿命の
低圧水銀放電灯を実現することができる。そして、表面
殺菌等の紫外線殺菌装置用放電灯として最適な低圧水銀
放電灯を得ることができる。又、ゾルゲル法を用いるこ
とにより、長尺状の発光管内面に金属酸化物薄膜を強固
に形成することができ、加工性が良好な低圧水銀放電灯
の製造方法を得ることができ、その産業上の利用価値は
大きい。As described above with reference to the embodiments, according to the present invention, there is almost no influence on the starting characteristics of the lamp, and there is a decrease in illuminance due to blackening of the central portion of the arc tube over the life of the lamp. It is possible to realize a low-pressure mercury discharge lamp having a long life without causing deterioration of the uniformity. Then, it is possible to obtain a low-pressure mercury discharge lamp which is optimal as a discharge lamp for an ultraviolet sterilizer such as surface sterilization. Further, by using the sol-gel method, a metal oxide thin film can be firmly formed on the inner surface of a long arc tube, and a processable good low-pressure mercury discharge lamp can be obtained. The utility value above is great.
【図１】本発明に係わる低圧水銀放電灯用発光管に加工
される前の石英管の断面を示す図である。FIG. 1 is a view showing a cross section of a quartz tube before being processed into an arc tube for a low-pressure mercury discharge lamp according to the present invention.
【図２】本発明に係わる実施例の低圧水銀放電灯の発光
管を示す要部断面図である。FIG. 2 is a sectional view of an essential part showing an arc tube of a low-pressure mercury discharge lamp according to an embodiment of the present invention.
【図３】同じく低圧水銀蒸気放電灯の発光管を示す要部
断面図である。FIG. 3 is a sectional view of relevant parts showing an arc tube of the low-pressure mercury vapor discharge lamp.
【図４】同じく図３に示す発光管を用いた紫外線殺菌装
置の構成例を示す平面図及びその断面図である。FIG. 4 is a plan view and a cross-sectional view showing a configuration example of an ultraviolet sterilizer using the arc tube shown in FIG.
【図５】本発明及び従来の放電灯の発光管全体から放射
される殺菌線の出力維持率の動程を示す特性図である。FIG. 5 is a characteristic diagram showing a range of an output maintenance rate of a germicidal line emitted from the entire arc tube of the discharge lamp of the present invention and the conventional discharge lamp.
【図６】本発明及び従来の放電灯の２０００時間点灯後
の発光管の長手方向の初期値に対する殺菌線照度相対値
の分布を示す特性図である。FIG. 6 is a characteristic diagram showing a distribution of relative values of sterilization ray illuminance with respect to initial values in the longitudinal direction of the arc tube of the present invention and the conventional discharge lamp after lighting for 2000 hours.
【図７】本発明及び従来の放電灯の残存率を示す特性図
である。FIG. 7 is a characteristic diagram showing the residual ratio of the present invention and the conventional discharge lamp.
【図８】従来の低圧水銀放電灯の発光管の構成例を示す
要部断面図である。FIG. 8 is a cross-sectional view of essential parts showing a configuration example of an arc tube of a conventional low-pressure mercury discharge lamp.
【図９】従来例の寿命試験における発光管各部位での殺
菌線出力維持率を示す特性図である。FIG. 9 is a characteristic diagram showing the sterilization line output maintenance rate at each part of the arc tube in the life test of the conventional example.
【図１０】従来例の寿命試験における始動電圧の経時的
変化を示す特性図である。FIG. 10 is a characteristic diagram showing a change with time of a starting voltage in a life test of a conventional example.
１ 石英管 ２ アルミナ膜 ３ 発光管 ４ａ，４ｂ タングステンフィラメント ５ａ，５ｂ フィラメント支柱 ６ａ，６ｂ モリブデン箔 ７ａ，７ｂ リード線 ８ａ，８ｂ 陽極 ９ 排気管 １１ 外管 １２ａ，１２ｂ 継手 １３ 純水 １４ 反射板 １５ 窓部 １６ 点灯ボックス １７ ワーク 1 Quartz Tube 2 Alumina Film 3 Arc Tube 4a, 4b Tungsten Filament 5a, 5b Filament Strut 6a, 6b Molybdenum Foil 7a, 7b Lead Wire 8a, 8b Anode 9 Exhaust Tube 11 Outer Tube 12a, 12b Joint 13 Pure Water 14 Reflector 15 Window 16 Lighting box 17 Work
Claims (4)
を封入してなる長尺状の発光管の内表面にＡｌ2Ｏ3やＴ
ｉＯ2等の薄膜を被着してなる放電灯において、発光管
中央部に形成する薄膜は、その他の部分よりも厚く形成
することを特徴とする低圧水銀放電灯。1. Al 2 O 3 or T is formed on the inner surface of a long arc tube in which electrodes are sealed at both ends and at least mercury is sealed inside.
A low-pressure mercury discharge lamp in which a thin film formed in the central part of the arc tube is formed thicker than other parts in a discharge lamp formed by depositing a thin film such as iO 2 .
の電極間距離である有効発光長に対して１／３から１／
２の長さで、前記厚膜部の膜厚が０．２μｍ〜０．３μ
ｍであり、その他の部分の膜厚が０．１μｍ〜０．１５
μｍであることを特徴とする請求項第１項記載の低圧水
銀放電灯。2. The thick film portion on the inner surface of the arc tube is 1/3 to 1 / of the effective light emission length which is a distance between electrodes at both ends of the arc tube.
2 and the thickness of the thick film portion is 0.2 μm to 0.3 μm.
m, and the film thickness of other portions is 0.1 μm to 0.15
The low-pressure mercury discharge lamp according to claim 1, wherein the low-pressure mercury discharge lamp has a diameter of μm.
形成するに際し、第一層目として管全体に膜を形成し、
第二層目を塗布乾燥させる焼成前に発光管中央部の膜厚
部以外の部分を有機溶剤に浸漬して溶解除去し、その後
焼成することにより前記膜厚部を形成することを特徴と
する低圧水銀放電灯の製造方法3. When forming a thin film on the inner surface of an arc tube by the sol-gel method, a film is formed on the entire tube as a first layer,
Before coating and drying the second layer, the central part of the arc tube other than the film thickness part is immersed in an organic solvent to be dissolved and removed, and then the film thickness part is formed by baking. Method of manufacturing low-pressure mercury discharge lamp
形成するに際し、第一層目として管端部から中央部に対
して発光管全長の約１／３から１／４の長さの部分を残
して膜を形成し、第二層目は発光管を反転させて前記同
様の操作を行い、０．１μｍ〜０．１５μｍの膜を発光
管中央部で重ねることにより前記膜厚部を形成すること
を特徴とする低圧水銀放電灯の製造方法4. When forming a thin film on the inner surface of an arc tube by the sol-gel method, the first layer is about 1/3 to 1/4 of the total length of the arc tube from the tube end to the center. A film is formed while leaving a portion, and the second layer is inverted to perform the same operation as described above, and the films of 0.1 μm to 0.15 μm are overlapped at the central part of the arc tube to form the film thickness portion. Method of manufacturing low-pressure mercury discharge lamp characterized by forming
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3619895A JP3509256B2 (en) | 1995-01-31 | 1995-01-31 | Low pressure mercury discharge lamp for ultraviolet sterilization and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3619895A JP3509256B2 (en) | 1995-01-31 | 1995-01-31 | Low pressure mercury discharge lamp for ultraviolet sterilization and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08212976A true JPH08212976A (en) | 1996-08-20 |
| JP3509256B2 JP3509256B2 (en) | 2004-03-22 |
Family
ID=12463041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3619895A Expired - Fee Related JP3509256B2 (en) | 1995-01-31 | 1995-01-31 | Low pressure mercury discharge lamp for ultraviolet sterilization and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3509256B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002103749A1 (en) | 2001-06-14 | 2002-12-27 | Photoscience Japan Corporation | Discharge lamp and ultraviolet irradiation system and operation method therefor |
| DE102004021336A1 (en) * | 2004-04-30 | 2005-11-24 | Mitsubishi Heavy Industries, Ltd. | Optical characteristic recovery method of optical element e.g. light transmissive window of ultraviolet lamp, involves forming vacuum region of activity energy existence, at side of photo-irradiation surface of optical system |
| US7190512B2 (en) | 2004-04-29 | 2007-03-13 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| JP2009238462A (en) * | 2008-03-26 | 2009-10-15 | Chiyoda Kohan Co Ltd | Low pressure mercury discharge lamp |
-
1995
- 1995-01-31 JP JP3619895A patent/JP3509256B2/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002103749A1 (en) | 2001-06-14 | 2002-12-27 | Photoscience Japan Corporation | Discharge lamp and ultraviolet irradiation system and operation method therefor |
| EP1403906A1 (en) * | 2001-06-14 | 2004-03-31 | Photoscience Japan Corporation | Discharge lamp and ultraviolet irradiation system and operation method therefor |
| EP1403906B1 (en) * | 2001-06-14 | 2011-03-16 | Photoscience Japan Corporation | Discharge lamp and ultraviolet irradiation system and operation method therefor |
| US7190512B2 (en) | 2004-04-29 | 2007-03-13 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7440206B2 (en) | 2004-04-29 | 2008-10-21 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7453630B2 (en) | 2004-04-29 | 2008-11-18 | Mitsubishi Heavy Industries, Ltd. | Optical properties apparatus, the restoration method, and an optical system used in the apparatus |
| US7733563B2 (en) | 2004-04-29 | 2010-06-08 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| US7813036B2 (en) | 2004-04-29 | 2010-10-12 | Mitsubishi Heavy Industries, Ltd. | Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus |
| DE102004021336A1 (en) * | 2004-04-30 | 2005-11-24 | Mitsubishi Heavy Industries, Ltd. | Optical characteristic recovery method of optical element e.g. light transmissive window of ultraviolet lamp, involves forming vacuum region of activity energy existence, at side of photo-irradiation surface of optical system |
| DE102004021336B4 (en) * | 2004-04-30 | 2008-11-27 | Mitsubishi Heavy Industries, Ltd. | Apparatus and method for improving optical properties and optical system used in the apparatus |
| JP2009238462A (en) * | 2008-03-26 | 2009-10-15 | Chiyoda Kohan Co Ltd | Low pressure mercury discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3509256B2 (en) | 2004-03-22 |
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