JPH08212541A - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPH08212541A JPH08212541A JP30088495A JP30088495A JPH08212541A JP H08212541 A JPH08212541 A JP H08212541A JP 30088495 A JP30088495 A JP 30088495A JP 30088495 A JP30088495 A JP 30088495A JP H08212541 A JPH08212541 A JP H08212541A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- magnetic
- height
- disk
- unevenness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、コンピュータ等の
データ記憶手段に用いられる磁気ディスクに関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk used for data storage means such as a computer.
【0002】[0002]
【従来の技術】コンピュータ等のデータの記憶手段とし
てハードディスクドライブ装置がある。このハードディ
スクドライブ装置に用いられる媒体として優れた高密度
磁気記録特性を得るために、コバルト合金を蒸着,スパ
ッタ,メッキ,イオンプレーティング等の薄膜形成技術
により磁性薄膜媒体用基板の表面に付着させたものが開
発されてきた。これらの磁性薄膜媒体用基板として、ア
ルマイト処理後鏡面仕上げしたアルミ合金基板,あるい
はNiPメッキ処理後鏡面仕上げしたアルミ合金基板,
または鏡面仕上げしたガラス基板が使用されている。し
かし、最近ではハードディスクドライブ装置の小型・軽
量化に伴い、磁気ヘッドのコンタクト・スタート・スト
ップ型のハードディスクドライブ装置が必要とされるよ
うになり、ディスク表面の潤滑性や耐久性,コンタクト
時のヘッド・ディスク間の吸着性などの問題が重視され
るようになってきた。2. Description of the Related Art There is a hard disk drive device as a data storage means of a computer or the like. In order to obtain excellent high-density magnetic recording characteristics as a medium used in this hard disk drive, a cobalt alloy was deposited on the surface of a magnetic thin film medium substrate by a thin film forming technique such as vapor deposition, sputtering, plating, or ion plating. Things have been developed. As these magnetic thin film medium substrates, an aluminum alloy substrate which is mirror-finished after alumite treatment or an aluminum alloy substrate which is mirror-finished after NiP plating treatment,
Alternatively, a mirror-finished glass substrate is used. However, recently, as hard disk drive devices have become smaller and lighter, magnetic head contact start / stop type hard disk drive devices have become necessary, and the lubricity and durability of the disk surface and the contact head・ Problems such as adsorption between discs are becoming more important.
【0003】[0003]
【発明が解決しようとする課題】コンタクト・スタート
・ストップ型のハードディスクドライブ装置において、
鏡面仕上げした表面状態を持つ磁気ディスクを有するハ
ードディスクドライブ装置は、磁気ディスクの起動・停
止時に磁気ディスクと磁気ヘッドとの間で摩擦係数が大
きくなり、磁気ディスクあるいは磁気ヘッドが破損す
る、いわゆるヘッドクラッシュを起こすことがある。こ
の問題となる摩擦係数を小さくさせ、耐久性を向上させ
るために固体潤滑剤や液体潤滑剤を磁気ディスク表面に
被覆するなどの対策が行われている。しかし、鏡面仕上
げして表面の凹凸の最深谷から最大ピークまでの値Rp
vを200Å以下に処理された磁気ディスク表面と磁気
ヘッドとの間に液体潤滑剤あるいは大気中の水蒸気を吸
着した水分が、毛管現象により入り込み、ハードディス
クドライブ装置を停止した時、磁気ディスクと磁気ヘッ
ドは互いに強い吸着現象を引き起こすことがある。この
吸着現象は、磁気ディスクドライブ装置のスタート時に
磁気ヘッド及び磁気ヘッド支持体であるフレクシャに強
い負荷を与え、磁気ヘッドやフレクシャに損傷を引き起
こしたり、磁気ディスク表面に強いスクラッチ傷を付け
る。また、これらの現象がヘッドクラッシュの原因とな
り、磁気ディスクドライブ装置として使えなくなる可能
性がある。従って、磁気ヘッドと磁気ディスクとの吸着
現象を避けるために、磁気ディスクの表面状態を粗くし
て、吸着しないようにすることが考えられる。しかし、
単純に表面加工を施し表面状態を粗くすると、図4,図
6に示すように部分的に突起が発生する場合があり、磁
気ヘッドの浮上安定性が悪くなったり、この結果再生出
力の低下,信号対ノイズの低下,エラー数の増加などの
問題を引き起こすようになる場合があった。In a contact start / stop type hard disk drive device,
A hard disk drive device having a magnetic disk with a mirror-finished surface condition has a large friction coefficient between the magnetic disk and the magnetic head when the magnetic disk is started or stopped, and the magnetic disk or the magnetic head is damaged, so-called head crash. May occur. In order to reduce the friction coefficient which causes this problem and improve durability, measures such as coating the surface of the magnetic disk with a solid lubricant or a liquid lubricant have been taken. However, the value Rp from the deepest valley of the unevenness of the surface to the maximum peak after mirror finishing
When a liquid lubricant or moisture adsorbing water vapor in the atmosphere is trapped between the surface of the magnetic disk treated with v of 200 Å or less and the magnetic head due to a capillary phenomenon and the hard disk drive is stopped, the magnetic disk and the magnetic head are stopped. May cause strong adsorption phenomenon to each other. This adsorption phenomenon exerts a strong load on the magnetic head and the flexure that is the magnetic head support at the time of starting the magnetic disk drive device, causing damage to the magnetic head and the flexure and causing a strong scratch on the surface of the magnetic disk. Further, these phenomena may cause a head crash, which may render the magnetic disk drive device unusable. Therefore, in order to avoid the adsorption phenomenon between the magnetic head and the magnetic disk, it is conceivable to roughen the surface state of the magnetic disk so as not to adsorb. But,
If surface treatment is simply applied to roughen the surface state, protrusions may be partially generated as shown in FIGS. 4 and 6, and the flying stability of the magnetic head deteriorates. As a result, reproduction output decreases, In some cases, problems such as a decrease in signal-to-noise and an increase in the number of errors could occur.
【0004】[0004]
【課題を解決するための手段】前記の問題点を解決する
ために、本発明の磁気ディスクは表面を粗面にし、粗面
の凹凸の平均から最大ピークまでの値Rpと、表面の凹
凸の平均から最深谷までの値Rvとの比率Rp/Rvを
0.3〜1.0の範囲にするとともに凹凸の平均線から
凸部の頂点の高さを100〜500Åの範囲にしたもの
である。In order to solve the above problems, the magnetic disk of the present invention has a roughened surface, and the value Rp from the average to the maximum peak of the unevenness of the rough surface and the unevenness of the surface. The ratio Rp / Rv with the value Rv from the average to the deepest valley is set in the range of 0.3 to 1.0, and the height of the apex of the convex portion from the average line of the unevenness is set in the range of 100 to 500Å. .
【0005】[0005]
【発明の実施の形態】本発明の請求項1に記載の発明
は、基板上の上に磁性層を有すると共に、磁気記録がな
される面を粗面にし、粗面の凸部のうち最も高い凸部の
高さと凹凸の平均の高さの差が100Åから500Åの
間の範囲に入るようにすると共に、粗面の凸部のうち最
も高い凸部の高さと凹凸の平均の高さの差に対する粗面
の凹部のうち最も低い凹部の高さと凹凸の平均の高さの
差の比が0.3から1.0の間の範囲に入るようにした
ことによって、磁気ディスクの表面が適度に粗面となる
ため磁気ディスクと磁気ヘッドとの吸着作用がなくな
り、部分的に高い突起がなくなるため磁気ヘッドの浮上
が安定する。BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention has a magnetic layer on a substrate, and the surface on which magnetic recording is performed is made rough so that the highest protrusion of the rough surface is obtained. The difference between the height of the convex portion and the average height of the unevenness should be in the range between 100Å and 500Å, and the difference between the height of the highest convex portion of the rough surface and the average height of the unevenness By setting the ratio of the difference between the height of the lowest concave portion of the rough surface and the average height of the concave and convex to be in the range of 0.3 to 1.0, the surface of the magnetic disk can be appropriately adjusted. The rough surface eliminates the attraction between the magnetic disk and the magnetic head, and the high protrusions are partially eliminated to stabilize the floating of the magnetic head.
【0006】以下、本発明の実施の形態を説明する。図
1は本発明の一実施の形態における磁気ディスクの要部
断面図である。直径3.5インチのアルミニウム合金基
板1にNiPメッキ膜2を20μm被覆させた。このN
iPメッキされたアルミニウム合金基板1にラップ加工
及びポリッシュ加工を施して、表面の凹凸の最深谷から
最大ピークまでの値Rpvが200Å以下の表面精度を
有する直径3.5インチのアルミニウム合金基板1を複
数枚作製した。このそれぞれの3.5インチのアルミニ
ウム合金基板1の表面を更にそれぞれ粒度の異なるコン
パウンドを用いてラップ加工を施して、最深谷から最大
ピークまでの値Rpv,表面形状の平均線から最大ピー
クまでの値Rp,表面形状の平均線から最深谷までの値
Rv,またはその比率Rp/Rvがそれぞれ異なる値を
有するサンプルを作った。その後、それぞれのサンプル
にスパッタ法によって、磁性薄膜3,保護膜4を被着
し、更に潤滑膜5を被覆した。また、上記のサンプルと
は別のアルミニウム合金基板1を複数枚用意し、上記の
表面加工と同様であって研磨方向をアルミニウム合金基
板1の円周方向に施し、上記と同様に表面の粗さがそれ
ぞれ異なるサンプルを作製し、スパッタ膜の被着、潤滑
膜5の被覆を行った。この様に形成された本実施の形態
のディスク表面は図5、図7に示す様な構成となってい
る。Embodiments of the present invention will be described below. FIG. 1 is a sectional view of a main part of a magnetic disk according to an embodiment of the present invention. An aluminum alloy substrate 1 having a diameter of 3.5 inches was coated with a NiP plating film 2 of 20 μm. This N
By lapping and polishing the iP-plated aluminum alloy substrate 1, a 3.5-inch diameter aluminum alloy substrate 1 having a surface precision with a value Rpv from the deepest valley of the surface irregularities to the maximum peak is 200 Å or less. Multiple sheets were prepared. The surface of each of the 3.5-inch aluminum alloy substrates 1 is further lapped using compounds having different grain sizes, and the value Rpv from the deepest valley to the maximum peak and the average line to the maximum peak of the surface shape are obtained. A sample having a value Rp, a value Rv from the average line of the surface shape to the deepest valley, or a ratio Rp / Rv thereof having different values was prepared. After that, the magnetic thin film 3 and the protective film 4 were deposited on each sample by the sputtering method, and the lubricating film 5 was further covered. In addition, a plurality of aluminum alloy substrates 1 different from the above sample are prepared, and polishing is performed in the circumferential direction of the aluminum alloy substrate 1 in the same manner as the above surface processing, and the surface roughness is the same as above. Samples having different values were prepared, and a sputtered film was deposited and a lubricating film 5 was coated. The disk surface of the present embodiment thus formed has a structure as shown in FIGS.
【0007】図2は、本発明の一実施の形態における表
面図の凹凸の状態を測定した結果を示すグラフである。
つまり、図2は0.1×2.5μmスタイラスをアルミ
ニウム合金基板1上で移動させ、スタイラスの上下の動
きを縦軸にとり、スタイラスのアルミニウム合金基板1
の面と平行な動きを横軸にとったものである。図3は表
面の凹凸の状態の測定結果と凹凸の最高値平均値最低値
の関係を示すグラフである。更に以上の加工法によって
作成したサンプルのディスクのうち、Rpvがそれぞれ
大体等しく、Rp/Rvの比率がそれぞれ異なっている
ディスクを複数枚選択し、それぞれのディスク表面の欠
陥をアコースティックエラスティック(Acousti
c Elastic)素子をAlTiCよりなるスライ
ダに設けたバニッシュヘッドで計数した。その時の結果
を図8に示す。図8から明らかなようにRp/Rvは
1.0以下であれば、欠陥の数が少ないことがわかっ
た。また、この時のRpは、図9に示すように500Å
以下であるようにしなければならない。更に、上記のR
p/Rvがそれぞれ異なるディスクに対してコンタクト
・スタート・ストップ(以下CSSと略す)を繰り返し
て異常が発生しなかった回数を調べると、図10のよう
にRp/Rvが0.3以下ではCSSが2万回以下、
0.3〜1.0では2万回以上、1.0以上では2万回
以下になる。従って、Rp/Rvは、CSS回数2万回
以上にするために、0.3〜1.0としなければならな
いことがわかる。そして、Rpがそれぞれ異なるディス
クに対してCSSを繰り返して異常が発生しなかった回
数を調べると図11のようにRpが100Å以下ではC
SSが2万回以下、Rpが100Å〜500ÅではCS
Sが2万回以上、Rpが500Å以上ではCSSが2万
回以下となる。よってCSSを2万回以上にするために
はRpは100Å〜500Åの範囲にしなければならな
いこともわかった。更にRpが100Å以下となると、
吸着水分によってディスクとヘッドが互いに吸着しヘッ
ドクラッシュによる破損が起こった。また、Rpが50
0Å以上となるような粗い研磨材を用いて表面処理を行
うと、図9に示すように異常突起部分が発生することが
あり、スライダーの浮上状態が不安定になり、ディスク
が回転を停止して、スライダーがディスクと接触した時
にスライダーとディスクが強く当たることがあり、結
局、CSS回数が2万回以下で、ヘッドクラッシュを引
き起こしてしまった。FIG. 2 is a graph showing the result of measuring the state of the unevenness of the surface view in the embodiment of the present invention.
That is, in FIG. 2, a 0.1 × 2.5 μm stylus is moved on the aluminum alloy substrate 1, and the vertical movement of the stylus is taken as the vertical axis.
The horizontal axis is the movement parallel to the plane. FIG. 3 is a graph showing the relationship between the measurement result of the state of the unevenness of the surface and the maximum value average value minimum value of the unevenness. Furthermore, among the sample discs prepared by the above processing method, a plurality of discs having substantially the same Rpv and different Rp / Rv ratios were selected, and defects on the respective disc surfaces were detected by acoustic elastic (Acoustic).
c Elastic) elements were counted by a vanish head provided on a slider made of AlTiC. The result at that time is shown in FIG. As is clear from FIG. 8, when Rp / Rv is 1.0 or less, the number of defects is small. In addition, Rp at this time is 500Å as shown in FIG.
Must be: Furthermore, the above R
Examining the number of times that no abnormalities occurred by repeating contact start stop (hereinafter abbreviated as CSS) for disks with different p / Rv, if Rp / Rv is 0.3 or less as shown in FIG. Less than 20,000 times,
When it is 0.3 to 1.0, it is 20,000 times or more, and when it is 1.0 or more, it is 20,000 times or less. Therefore, it is understood that Rp / Rv must be set to 0.3 to 1.0 in order to make the CSS count 20,000 times or more. Then, when the number of times that an abnormality did not occur by repeating CSS for disks having different Rp values is checked, as shown in FIG.
When SS is less than 20,000 times and Rp is 100Å ~ 500Å, CS
When S is 20,000 times or more and Rp is 500 Å or more, CSS is 20,000 times or less. Therefore, it was also found that the Rp had to be in the range of 100Å to 500Å in order to make the CSS 20,000 times or more. Furthermore, when Rp becomes 100Å or less,
Due to the adsorbed water, the disk and the head adsorbed to each other, causing damage due to the head crash. Also, Rp is 50
If surface treatment is performed using a rough abrasive of 0 Å or more, abnormal protrusions may occur as shown in Fig. 9, causing the slider to float in an unstable state, causing the disc to stop rotating. Then, when the slider comes into contact with the disk, the slider and the disk may hit hard, eventually resulting in a head crash when the CSS count is 20,000 or less.
【0008】次にディスク表面のNiPメッキ膜2を鏡
面仕上げし、その後ディスクを回転させながら研磨を行
った場合の実施の形態を説明する。図12は本発明の磁
気ディスクの表面の凹凸を円周方向に沿って測定した結
果を示すグラフ,図13は磁気ディスクの表面の凹凸を
径方向に沿って測定した結果を示すグラフを示す。ここ
で凹凸の高さの測定は、0.1×2.5μmスライラス
をディスクの表面に接触させてスタイラスをディスクの
表面に接触させてスタイラスをディスクと相対的に移動
させることによって行った。このようにして多くのサン
プルを作成し、このサンプルのうち半径方向のRpが1
00Å〜500Åの範囲に入っているものを選別して円
周方向のRpとCSS回数との関係を調べた結果を図1
4に示す。図14から明らかなように、円周方向のRp
が150Å以下となるとCSS回数が6万回以上に向上
することがわかった。Next, an embodiment will be described in which the NiP plated film 2 on the surface of the disk is mirror-finished, and then polishing is performed while rotating the disk. FIG. 12 is a graph showing the results of measuring the surface irregularities of the magnetic disk of the present invention along the circumferential direction, and FIG. 13 is a graph showing the results of measuring the surface irregularities of the magnetic disk along the radial direction. Here, the height of the unevenness was measured by bringing the stylus into contact with the surface of the disk by moving the stylus with the surface of the disk by moving the stylus with the stylus relative to the disk. Many samples were created in this way, and the Rp in the radial direction of this sample was 1
Fig. 1 shows the results of examining the relationship between the Rp in the circumferential direction and the number of CSSs by selecting those within the range of 00Å to 500Å.
4 shows. As is clear from FIG. 14, Rp in the circumferential direction
It was found that the CSS number was improved to 60,000 or more when the value was 150 Å or less.
【0009】なお、本実施の形態では磁性薄膜3をスパ
ッタ法によって成膜しているが、メッキ法等による成膜
でも同様な効果が得られる。Although the magnetic thin film 3 is formed by the sputtering method in the present embodiment, the same effect can be obtained by forming the magnetic thin film 3 by the plating method or the like.
【0010】[0010]
【発明の効果】以上のように本発明の磁気ディスクは、
表面を粗面にし、粗面の凹凸の平均の高さと最大の高さ
の差が100Åから500Åの範囲に入るようにすると
ともに、平均の高さと最大の高さの差に対する平均の高
さと最低の高さの差の比が0.3から1.0の範囲に入
るようにしたため、磁気ディスクに磁気ヘッドのスライ
ダーが吸着することがなく、またコンタクト・スタート
・ストップ時に磁気ヘッドのスライダーが磁気ディスク
面にクラッシュすることがないため磁気ヘッドのスライ
ダーが長耐命になる。As described above, the magnetic disk of the present invention is
The surface is made rough so that the difference between the average height and the maximum height of the unevenness of the rough surface is in the range of 100 Å to 500 Å, and the average height and the minimum height for the difference between the average height and the maximum height are the same. Since the height difference ratio of the magnetic head is set to be in the range of 0.3 to 1.0, the slider of the magnetic head does not stick to the magnetic disk, and the slider of the magnetic head does not become magnetic during contact start / stop. The slider of the magnetic head has a long life because it does not crash on the disk surface.
【図1】本発明の一実施の形態における磁気ディスクの
要部断面図FIG. 1 is a sectional view of a main part of a magnetic disk according to an embodiment of the present invention.
【図2】同表面図の凹凸の状態を測定した結果を示すグ
ラフFIG. 2 is a graph showing the results of measuring the state of unevenness on the same surface view.
【図3】同表面の凹凸の状態の測定結果と凹凸の最高値
平均値最低値の関係を示すグラフFIG. 3 is a graph showing the relationship between the measurement results of unevenness on the surface and the average value of the highest value and the lowest value of the unevenness.
【図4】従来の磁気ディスクの表面の凹凸の状態を測定
した結果を示すグラフFIG. 4 is a graph showing the results of measuring the state of irregularities on the surface of a conventional magnetic disk.
【図5】本発明の磁気ディスクの表面の凹凸の状態を測
定した結果を示すグラフFIG. 5 is a graph showing the results of measuring the state of irregularities on the surface of the magnetic disk of the present invention.
【図6】従来の磁気ディスクの要部断面斜視図FIG. 6 is a cross-sectional perspective view of a main part of a conventional magnetic disk.
【図7】本発明の一実施の形態における磁気ディスクの
要部断面斜視図FIG. 7 is a cross-sectional perspective view of a main part of a magnetic disk according to an embodiment of the present invention.
【図8】凹凸の最高値と最低値の比に対する欠陥の数の
関係を示したグラフFIG. 8 is a graph showing the relationship between the number of defects and the ratio of the maximum value and the minimum value of unevenness.
【図9】凹凸の最高値と欠陥の数の関係を示したグラフFIG. 9 is a graph showing the relationship between the maximum unevenness and the number of defects.
【図10】凹凸の最高値と最低値の比に対するCSS回
数の関係を示したグラフFIG. 10 is a graph showing the relationship between the number of CSS times and the ratio of the maximum value and the minimum value of the unevenness.
【図11】凹凸の最高値に対するCSS回数の関係を示
したグラフFIG. 11 is a graph showing the relationship between the maximum value of unevenness and the number of CSS times.
【図12】本発明の磁気ディスクの表面の凹凸を円周方
向に沿って測定した結果を示すグラフFIG. 12 is a graph showing the results of measuring the surface irregularities of the magnetic disk of the present invention along the circumferential direction.
【図13】磁気ディスクの表面の凹凸を径方向に沿って
測定した結果を示すグラフFIG. 13 is a graph showing the results of measuring the surface irregularities of the magnetic disk along the radial direction.
【図14】凹凸の最高値に対するCSS回数の関係を示
すグラフFIG. 14 is a graph showing the relationship between the maximum number of irregularities and the number of CSS times.
1 アルミニウム合金基板 2 NiPメッキ膜 3 磁性薄膜 4 保護膜 5 潤滑膜 1 Aluminum alloy substrate 2 NiP plating film 3 Magnetic thin film 4 Protective film 5 Lubrication film
Claims (1)
記録がなされる面を粗面にし、粗面の凸部のうち最も高
い凸部の高さと凹凸の平均の高さの差が100Åから5
00Åの間の範囲に入るようにすると共に、粗面の凸部
のうち最も高い凸部の高さと凹凸の平均の高さの差に対
する粗面の凹部のうち最も低い凹部の高さと凹凸の平均
の高さの差の比が0.3から1.0の間の範囲に入るよ
うにしたことを特徴とする磁気ディスク。1. A magnetic layer is provided on a substrate, and a surface on which magnetic recording is performed is made rough so that the difference between the height of the highest projection of the projections of the rough surface and the average height of the unevenness is 100Å to 5
The average height of the concave portions and the concave portion of the concave portions of the rough surface with respect to the difference between the height of the highest convex portion of the convex portions of the rough surface and the average height of the concave and convex portions of the convex portion of the rough surface. A magnetic disk, characterized in that the ratio of the height difference between the two is in the range of 0.3 to 1.0.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7300884A JP2697712B2 (en) | 1995-11-20 | 1995-11-20 | Magnetic disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7300884A JP2697712B2 (en) | 1995-11-20 | 1995-11-20 | Magnetic disk |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62180473A Division JP2705068B2 (en) | 1987-07-20 | 1987-07-20 | Magnetic disk |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08212541A true JPH08212541A (en) | 1996-08-20 |
JP2697712B2 JP2697712B2 (en) | 1998-01-14 |
Family
ID=17890286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7300884A Expired - Lifetime JP2697712B2 (en) | 1995-11-20 | 1995-11-20 | Magnetic disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2697712B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019507962A (en) * | 2016-04-14 | 2019-03-22 | エフエムインダストリーズ, インクFm Industries, Inc. | COATED SEMICONDUCTOR PROCESSING MEMBER HAVING CHLORINE AND FLUORINE PLASMA CORROSION RESISTANCE AND COMPOSITE OXIDE COATING THEREOF |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61243937A (en) * | 1985-04-22 | 1986-10-30 | Toshiba Corp | Vertical magnetic recording medium |
JPS6423419A (en) * | 1987-07-20 | 1989-01-26 | Matsushita Electric Ind Co Ltd | Magnetic disk |
-
1995
- 1995-11-20 JP JP7300884A patent/JP2697712B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61243937A (en) * | 1985-04-22 | 1986-10-30 | Toshiba Corp | Vertical magnetic recording medium |
JPS6423419A (en) * | 1987-07-20 | 1989-01-26 | Matsushita Electric Ind Co Ltd | Magnetic disk |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019507962A (en) * | 2016-04-14 | 2019-03-22 | エフエムインダストリーズ, インクFm Industries, Inc. | COATED SEMICONDUCTOR PROCESSING MEMBER HAVING CHLORINE AND FLUORINE PLASMA CORROSION RESISTANCE AND COMPOSITE OXIDE COATING THEREOF |
Also Published As
Publication number | Publication date |
---|---|
JP2697712B2 (en) | 1998-01-14 |
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