JPH05151556A - Magnetic disk - Google Patents

Magnetic disk

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Publication number
JPH05151556A
JPH05151556A JP3312091A JP31209191A JPH05151556A JP H05151556 A JPH05151556 A JP H05151556A JP 3312091 A JP3312091 A JP 3312091A JP 31209191 A JP31209191 A JP 31209191A JP H05151556 A JPH05151556 A JP H05151556A
Authority
JP
Japan
Prior art keywords
substrate
magnetic
magnetic disk
texture
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3312091A
Other languages
Japanese (ja)
Other versions
JP3199422B2 (en
Inventor
Hirotsugu Kodama
博次 児玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP31209191A priority Critical patent/JP3199422B2/en
Publication of JPH05151556A publication Critical patent/JPH05151556A/en
Application granted granted Critical
Publication of JP3199422B2 publication Critical patent/JP3199422B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To enable stable floating of a magnetic head with a low floating quantity by specifying the height, length and number of the projecting parts of the texture of the magnetic layer. CONSTITUTION:An aluminum alloy substrate 2 is subjected to lapping and is coated thereon with an Ni-P plating film 3 at 14 to 20mum, by which a substrate 1 is formed. The substrate 1 is mirror finished by polishing and is then textured to form grooves in a circumferential direction by using a lapping tape coated with abrasive grains of alumina. A Cr substrate film 4, a Co-Ni-Cr magnetic film 5 and a carbon protective film 6 are thereafter deposited on the substrate and the surface is coated with a lubricating film 7. The difference between the max. value and min. value of the height of the projecting parts of the texture is confined to <=200Angstrom and the number of the projecting parts within a range of 50mum length toward the radial direction is specified to >=50 pieces. Consequently, the texturing is so executed that the ratio of the height of the highest projecting part and the depth of the lowest recessed part is kept within <=0.5 range, by which the generation of abnormal projections is obviated and the surface area of the surface for sliding with the magnetic disk is increased.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、コンピュ−タなどのデ
−タ記憶装置である磁気ディスク装置に用いられる磁気
ディスクに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk used in a magnetic disk device which is a data storage device such as a computer.

【0002】[0002]

【従来の技術】近年、固定型の磁気ディスク装置に搭載
される基板としてアルミ合金基板,ガラス基板またはプ
ラスチック基板等が使用されているが現在はアルミ合金
基板が主流である。一般にアルミ合金基板上にNi−P
メッキ処理後ポリッシュ加工を施し、その後円周方向に
基板表面を粗すテクスチャ−加工が施されている。テク
スチャ−加工の目的は基板上に設けられる磁性層に円周
方向に沿って磁気異方性を付けるとともに、表面を粗す
ことにより磁気ヘッドと磁気ディスク接触時の接触面積
を減らすことにより摩擦摩耗特性,吸着特性を向上させ
ることにある。
2. Description of the Related Art In recent years, an aluminum alloy substrate, a glass substrate, a plastic substrate, or the like has been used as a substrate to be mounted on a fixed type magnetic disk device, but currently the aluminum alloy substrate is the mainstream. Generally Ni-P on aluminum alloy substrate
After the plating process, a polishing process is performed, and then a texture process for roughening the substrate surface in the circumferential direction is performed. The purpose of texture processing is to impart magnetic anisotropy to the magnetic layer provided on the substrate along the circumferential direction, and to reduce the contact area when the magnetic head and the magnetic disk come into contact by roughening the surface, resulting in frictional wear. It is to improve the characteristics and adsorption characteristics.

【0003】一般の磁気ディスク装置はコンタクト・ス
タ−ト・ストップ方式(以下CSS方式と略す)を採用
しており、装置停止時は磁気ヘッドと磁気ディスクは接
触状態である。そして、磁気ディスク装置が起動すると
磁気ヘッドと磁気ディスクは摺動し始め、磁気ディスク
が所定の回転数に達した時点で約0.2〜0.3μmの
隙間を持って磁気ヘッドは磁気ディスク上を浮上する。
A general magnetic disk device adopts a contact start stop system (hereinafter abbreviated as CSS system), and the magnetic head and the magnetic disk are in contact with each other when the device is stopped. Then, when the magnetic disk device is activated, the magnetic head and the magnetic disk start to slide, and when the magnetic disk reaches a predetermined number of rotations, the magnetic head is placed on the magnetic disk with a gap of about 0.2 to 0.3 μm. To surface.

【0004】この様に磁気ディスクと磁気ヘッドが繰り
返し摺動することにより摩擦摩耗特性が劣化し、磁気デ
ィスクが損傷する場合もある。その為、磁気ディスク表
面に固体潤滑剤または液体潤滑剤を被覆するなどの対策
が行われている。しかし磁気ディスクに潤滑剤を塗布す
ることにより磁気ヘッドと磁気ディスクが吸着を起こし
装置スタ−ト時に磁気ディスクを回転させるモ−タが回
転不可能になり磁気ヘッド,磁気ディスクに損傷を引き
起こす。
As the magnetic disk and the magnetic head slide repeatedly in this way, the friction and wear characteristics may deteriorate and the magnetic disk may be damaged. Therefore, measures are taken such as coating the surface of the magnetic disk with a solid lubricant or a liquid lubricant. However, when the lubricant is applied to the magnetic disk, the magnetic head and the magnetic disk are attracted to each other, and the motor for rotating the magnetic disk cannot be rotated at the time of starting the apparatus, and the magnetic head and the magnetic disk are damaged.

【0005】従来よりテクスチャ−加工はメカニカルテ
クスチャ−加工が主流であり、加工材には研磨砥粒をテ
−プに固定保持したラッピングテ−プが用いられてい
る。そこで加工法としては磁気ディスク基板を回転させ
ながら研磨テ−プを押し付け加工することが行われてい
る。従来からテクスチャ−粗さを表す方法としては図8
に示すように中心線粗さRa(ここでRaとはJISB
0601に規定された定義を用いる。),中心線Oから
最大凸部までの高さRp,中心線Oから最大凹部まで深
さRv,凸部の高さの最大値から最小値までの幅δh及
び半径方向に50μmの範囲での凸部の数などがある。
図9に示すように従来テクスチャ−ではRaが約80〜
100Å,Rp/Rv>0.5,δh>200Åでしか
も凸部の数は100個前後になっている。ところが近
年、磁気ディスク装置は高密度化・大容量化の要請が強
く、そのため磁気ヘッドの浮上量が低下しており、現在
では約0.1μm以下にまで達しようとしている。その
ため磁気ディスクの表面粗さRaを極力小さくしても吸
着しないようなテクスチャ−の開発が試みられている。
Conventionally, mechanical texture processing has been the mainstream of texture processing, and a lapping tape in which abrasive grains are fixedly held on a tape is used as a processing material. Therefore, as a processing method, a polishing tape is pressed while rotating the magnetic disk substrate. A conventional method for expressing texture-roughness is shown in FIG.
As shown in, the center line roughness Ra (where Ra is JISB
The definition defined in 0601 is used. ), The height Rp from the center line O to the maximum convex portion, the depth Rv from the center line O to the maximum concave portion, the width δh from the maximum value to the minimum value of the height of the convex portion, and in the range of 50 μm in the radial direction. There are numbers of convex parts.
As shown in FIG. 9, in the conventional texture, Ra is about 80-
100Å, Rp / Rv> 0.5, δh> 200Å, and the number of convex portions is about 100. However, in recent years, there has been a strong demand for higher density and larger capacity of magnetic disk devices, and therefore the flying height of the magnetic head has decreased, and now it is about 0.1 μm or less. Therefore, attempts have been made to develop a texture that does not attract even if the surface roughness Ra of the magnetic disk is made as small as possible.

【0006】[0006]

【発明が解決しょうとする課題】しかしながら従来技術
では磁気ヘッド浮上量0.1μm以下の低浮上でCSS
試験を行った場合、磁気ヘッドの摺動時間と摺動距離が
増加し磁気ディスク表面が摩耗しヘッドクラッシュが生
じてしまう問題点があった。それに加え磁気ヘッドの浮
上量を0.1μm以下で安定して浮上させる為に磁気デ
ィスクのテクスチャ−粗さRaは極力小さくされており
従来技術ではCSS特性が劣化しないような潤滑膜厚で
は磁気ヘッドと磁気ディスクが吸着し装置が回転不可能
になる問題点があった。
However, according to the prior art, the CSS is used in a low flying condition in which the flying height of the magnetic head is 0.1 μm or less.
When the test was conducted, there was a problem that the sliding time and sliding distance of the magnetic head increased, the surface of the magnetic disk was worn, and a head crash occurred. In addition, the texture-roughness Ra of the magnetic disk is made as small as possible in order to stably fly the magnetic head at a flying height of 0.1 μm or less. In the prior art, a magnetic head having a lubricating film thickness that does not deteriorate CSS characteristics is used. There is a problem that the magnetic disk is attracted and the device cannot rotate.

【0007】本発明は前記従来の問題点を解決するもの
で、磁気ヘッド浮上量0.1μm以下の低浮上量におい
てもCSS特性が劣化せず、しかも浮上特性及び吸着特
性に優れた磁気ディスクを提供することを目的とする。
The present invention solves the above-mentioned problems of the prior art by providing a magnetic disk which does not deteriorate CSS characteristics even when the flying height of the magnetic head is 0.1 μm or less and which is excellent in flying characteristics and adsorption characteristics. The purpose is to provide.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
にテクスチャ−の凸部の高さの最大値と最小値の差を1
50Å以下にするとともに半径方向に凸部の数が50μ
mの範囲で150個以上を有し、最も高い凸部の高さR
pと最も低い凹部の深さRvの比Rp/Rvが0.5以
下の範囲に入る様にした。
In order to achieve this object, the difference between the maximum value and the minimum value of the heights of the convex portions of the texture is set to 1
50 Å or less and the number of protrusions in the radial direction is 50μ
The height R of the highest protrusion has 150 or more in the range of m
The ratio Rp / Rv between p and the lowest recess depth Rv is set to fall within the range of 0.5 or less.

【0009】[0009]

【作用】この構成により、異常突起の発生がなく、磁気
ディスクとの摺動面の表面積を大きくすることができ
る。
With this structure, no abnormal protrusion is generated and the surface area of the sliding surface with respect to the magnetic disk can be increased.

【0010】[0010]

【実施例】図1は本発明の一実施例における磁気ディス
ク媒体の断面図を示す。図1において1は基板で、基板
1は直径3.5インチのアルミ合金基板2にラップ加工
を施し、その上にNi−Pメッキ膜3を15〜20μm
被覆させた構成となっている。この基板1にポリッシュ
加工を施し鏡面仕上げした後、アルミナ砥粒が塗布され
たラッピングテ−プを用いて円周方向に溝を形成するテ
クスチャ−加工を施した。その後DCマグネトロンスパ
ッタ法によりCr下地膜4,Co−Ni−Cr磁性膜
5,カ−ボン保護膜6を順次被着し更に潤滑膜7を被覆
した。
1 is a sectional view of a magnetic disk medium according to an embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a substrate. The substrate 1 is an aluminum alloy substrate 2 having a diameter of 3.5 inches, which is lapped, and a Ni—P plating film 3 is deposited on the substrate 15 to 20 μm.
It is a covered structure. After polishing and mirror-finishing the substrate 1, a lapping tape coated with alumina abrasive grains was used to perform texture processing for forming grooves in the circumferential direction. After that, a Cr underlayer film 4, a Co—Ni—Cr magnetic film 5, and a carbon protective film 6 were sequentially deposited by a DC magnetron sputtering method, and a lubricating film 7 was further coated.

【0011】図2に本実施例のテクスチャ−作製装置を
示す。本実施例のテクスチャ−は基板1を100〜30
0rpmの回転数で回転させながら各粒度のアルミナ砥
粒が塗布されたラッピングテ−プ8を0〜50cm/s
の揺動速度をもってディスク上にコンタクトロ−ル9を
介して0.5〜1.5Kg/cm2の圧力で30s間押
し当てることにより作製した。Raの変化に対してはラ
ッピングテ−プ塗布砥粒の粒度を変化させることにより
又、δh(凸部の高さの最大値から最小値までの幅)を
変化させたサンプル,Rp/Rvを変化させたサンプル
及び凸部の数(半径方向の長さ50μmの範囲に対し
て)を変化させたサンプルについては揺動速度と回転数
を変化させることにより作製した。テクスチャ−粗さ測
定に関しては、ランクテ−ラ−ホブソン社製のタリステ
ップにより測定を行った。測定条件はスタイラス径:
0.1×2.5μm,測定長:50μm,カットオフ周
波数:25Hzである。
FIG. 2 shows the texture-making apparatus of this embodiment. The texture of this embodiment is 100 to 30 for the substrate 1.
The lapping tape 8 coated with the alumina abrasive grains of each grain size is rotated at 0 rpm to 0 to 50 cm / s.
It was produced by pressing it on the disc through the contact roll 9 at a rocking speed of 0.5 to 1.5 kg / cm 2 for 30 s. For the change of Ra, by changing the grain size of the lapping tape coating abrasive grain, the sample in which δh (width from the maximum value of the height of the convex portion to the minimum value) was changed, Rp / Rv The changed sample and the sample in which the number of the convex portions (with respect to the range of the radial length of 50 μm) was changed were prepared by changing the rocking speed and the rotation speed. Regarding the texture-roughness measurement, the measurement was performed by Tallystep manufactured by Rank Teller-Hobson. Stylus diameter:
0.1 × 2.5 μm, measurement length: 50 μm, cutoff frequency: 25 Hz.

【0012】先ず信頼性試験として浮上試験を行った結
果を図3,図4に示す。浮上試験としては磁気ヘッドを
0.06μmの浮上量で磁気ディスク上に浮上させ半径
20mm〜45mmまでシ−クさせた時のヘッド・ディ
スク間の接触をAE(アコ−スティックエミッション)
センサ−にて感知しコンピュ−タによりヒット数をカウ
ントさせた。図3のサンプルとしてはδhを変化させた
サンプルであり、図4はRp/Rvを変化させたサンプ
ルでともにRaは60Åである。
First, the results of a floating test as a reliability test are shown in FIGS. As a levitation test, the contact between the head and the disk when the magnetic head is levitated on the magnetic disk with a flying height of 0.06 μm and seeks to a radius of 20 mm to 45 mm is AE (acoustic emission).
It was detected by the sensor and the number of hits was counted by the computer. The sample in FIG. 3 is a sample in which δh is changed, and FIG. 4 is a sample in which Rp / Rv is changed, and Ra is 60Å in both cases.

【0013】図3においてδhが150Å越えると急に
ヒット数が増加するのが分かる。これは基板の粗さが同
じでもテクスチャ−凸部のばらつき(δh)が少ないと
磁気ヘッドが低浮上している時ヘッド・ディスク間の接
触する確率が少ないので安定して浮上しシ−クできる為
である。また図4においてはRp/Rvが0.5を越え
る辺りから急激にAEヒット数が増加することが分か
る。これはRp/Rvが大きくなることにより異常な突
起が増加しヘッド・ディスク間の接触する確率が増える
為AEヒット数も増加する。これらのことより低浮上で
安定してシ−クするためには基板に設けられたテクスチ
ャの粗さとしてδhを約150Å以下及びRp/Rvを
0.5以下にする必要がある。
It can be seen from FIG. 3 that the number of hits suddenly increases when δh exceeds 150Å. This means that even if the roughness of the substrate is the same, if the variation (δh) in the texture-convex portion is small, the probability of contact between the head and the disk is low when the magnetic head is flying low, so it is possible to stably fly and seek. Because of that. Further, in FIG. 4, it can be seen that the number of AE hits sharply increases when Rp / Rv exceeds 0.5. This is because as Rp / Rv increases, abnormal projections increase and the probability of contact between the head and disk increases, so the number of AE hits also increases. For these reasons, in order to stably seek at a low flying height, it is necessary to set δh to about 150Å or less and Rp / Rv to 0.5 or less as the roughness of the texture provided on the substrate.

【0014】次にCSS試験を行った。結果を図5,図
6に示す。CSS試験は周速9m/sで約0.1μmの
ウインチェスタ−モノリシックマイクロスライダ−を使
用して、半径25mm,回転数3600rpm,立ち上
がり10s,立ち下がり20sのパティCSS装置にて
2万回後の動摩擦係数μKの値を測定した。
Next, a CSS test was conducted. The results are shown in FIGS. In the CSS test, a Winchester-monolithic microslider having a peripheral speed of 9 m / s and a width of about 0.1 μm was used, and a Patty CSS device with a radius of 25 mm, a rotation speed of 3600 rpm, a rise time of 10 s, and a fall time of 20 s was used after 20,000 times. The value of the dynamic friction coefficient μK was measured.

【0015】図5のサンプルとしては図3のサンプルと
同じものを用い、図6のサンプルとしては50μmの範
囲での凸部の数を変化させたものであり、ともにRaは
60Åである。図5においてδhが約200Åを越すあ
たりから2万回後のμKは0.3以上になり摩耗特性が
劣化するのが分かる。これは磁気ヘッドが低浮上してい
る時、δhが大きければ大きいほどヘッドがディスク上
の凸部の高い部分に衝突する時の衝撃が大きくなり摩耗
しやすくなりヘッドクラッシュする可能性がある。そこ
でδhが約200Å以下であれば異常に突出した突起物
がないのでCSS時に磁気ヘッドが磁気ディスク上に離
陸,着陸する際の衝激が小さく摩耗しにくくなり、磁気
ヘッドの低浮上化におけるCSS特性を満足することが
できる。また図6においては凸部の数が約150個以下
になると摩耗特性が劣化するのが分かる。これは凸部の
数はディスクの表面積に対応し多いほど表面積が大きい
と言うことである。そこで表面積が大きいとヘッド・デ
ィスク間の接触面積が減少するため摩耗特性が向上す
る。低浮上化におけるCSS特性を満足する為には凸部
の数は約150個以上が望ましい。
The sample shown in FIG. 5 is the same as the sample shown in FIG. 3, and the sample shown in FIG. 6 has a different number of protrusions in the range of 50 μm, and Ra is 60Å. It can be seen from FIG. 5 that μK becomes 0.3 or more after 20,000 times after δh exceeds about 200 Å and wear characteristics deteriorate. This means that when the magnetic head is flying low, the larger δh is, the greater the impact is when the head collides with the higher portion of the convex portion on the disk, and the head is likely to be worn and the head may crash. Therefore, if δh is about 200Å or less, there are no abnormally protruding protrusions, so the impact of the magnetic head when taking off and landing on the magnetic disk during CSS is small and wear is less likely to occur, and CSS for low flying of the magnetic head The characteristics can be satisfied. Further, in FIG. 6, it can be seen that the wear characteristics deteriorate when the number of convex portions is about 150 or less. This means that the larger the number of convex portions corresponds to the surface area of the disk, the larger the surface area. Therefore, if the surface area is large, the contact area between the head and the disk is reduced, so that the wear characteristics are improved. In order to satisfy the CSS characteristics in lowering the flying height, it is desirable that the number of protrusions is about 150 or more.

【0016】図6のサンプルについて吸着試験を行った
結果を図7に示す。吸着試験としては実際のハ−ドディ
スクドライブに磁気ディスク2枚,磁気ヘッド4個組み
込むことにより測定を行った。試験環境は60℃,80
%RHの高温高湿環境下に24時間放置後の静止摩擦係
数の上昇δμsを測定した。
FIG. 7 shows the result of the adsorption test performed on the sample of FIG. The adsorption test was carried out by incorporating two magnetic disks and four magnetic heads into an actual hard disk drive. Test environment is 60 ℃, 80
The increase in static friction coefficient δμs after standing for 24 hours in a high temperature and high humidity environment of% RH was measured.

【0017】図7において半径方向に沿って50μmの
長さの範囲の凸部の数が約100〜150個以下になる
と吸着傾向を示しており50個以下になるとδμsが
0.2以上になり磁気ディスクを回転させるモ−タが回
転困難になる。これもCSS時と同様凸部の数が多くな
ることによりディスク表面積が増加し装置停止時のヘッ
ド・ディスク間の接触面積を減少させることによる吸着
特性の向上である。
In FIG. 7, when the number of convex portions in the radial direction of 50 μm is about 100 to 150 or less, the adsorption tendency is shown, and when it is 50 or less, δμs is 0.2 or more. The motor for rotating the magnetic disk becomes difficult to rotate. This is also an improvement in the adsorption property due to the increase in the disk surface area due to the increase in the number of convex portions as in the case of CSS and the decrease in the contact area between the head and disk when the apparatus is stopped.

【0018】以上の様に本実施例では、基板1に設けら
れたテクスチャの粗さとしてδhを約150Å以下及び
Rp/Rvを0.5以下にすることによって、低浮上で
安定してシ−クすることができる。またδhが約200
Å以下で、しかも半径方向の50μmの範囲の凸部の数
が約150個以上であれば異常に突出した突起物がな
く、さらに磁気ディスクの表面積が大きくなるので、C
SS時に磁気ヘッドが磁気ディスク上に離陸,着陸する
際の衝激が小さく摩耗しにくくなり、磁気ヘッドの低浮
上化におけるCSS特性を満足することができる。さら
にテクスチャ−の凸部の高さの最大値から最小値までの
幅(δh)を150Å以下にするとともに半径方向に凸
部の数が50μmの範囲で150個以上を有し、最も高
い凸部の高さRpと最も低い凹部の深さRvの比Rp/
Rvが0.5以下の範囲に入る様にすることにより、シ
ーク時の安定した浮上と摩耗及び吸着特性(CSS特
性)を同時に満たすことができる。
As described above, in this embodiment, the roughness of the texture provided on the substrate 1 is set so that δh is about 150Å or less and Rp / Rv is 0.5 or less. You can Also, δh is about 200
If it is less than or equal to Å and the number of protrusions in the radial direction of 50 μm is about 150 or more, there are no abnormally protruding protrusions, and the surface area of the magnetic disk becomes large.
When the magnetic head takes off and lands on the magnetic disk at the time of SS, the impact is small and wear is less likely to occur, so that the CSS characteristics in low flying of the magnetic head can be satisfied. Further, the width (δh) from the maximum value to the minimum value of the heights of the convex portions of the texture is set to 150 Å or less, and the number of the convex portions in the radial direction is 150 or more in the range of 50 μm, and the highest convex portion. Ratio Rp / of the height Rp of the
By setting Rv to be in the range of 0.5 or less, it is possible to simultaneously satisfy stable floating during seek and wear and adsorption characteristics (CSS characteristics).

【0019】[0019]

【発明の効果】本発明はテクスチャーの凸部の高さの最
大値と最小値の差を150Å以下にするとともに、半径
方向に沿った長さ50μmの範囲の凸の数が150個以
下で、しかもRp/Rvを0.5以下にしたことにより
異常突起の発生を防ぐことができ磁気ヘッドが0.1μ
m以下の低浮上量で安定浮上できる。
According to the present invention, the difference between the maximum value and the minimum value of the heights of the convex portions of the texture is set to 150 Å or less, and the number of convex portions in the radial direction of 50 μm is 150 or less. Moreover, by setting Rp / Rv to 0.5 or less, the occurrence of abnormal protrusions can be prevented and the magnetic head can be set to 0.1 μm.
Stable flying is possible with a low flying height of m or less.

【0020】しかも異常な突起がないのでCSS時のヘ
ッド・ディスク間の衝撃が小さくテクスチャ−溝の密度
が大きい為ヘッド・ディスク間の接触面積が小さくなる
ことにCSS特性及び吸着特性が向上する。すなわち磁
気ヘッドの低浮上化における高信頼性のディスクが提供
できる。
Moreover, since there is no abnormal protrusion, the impact between the head and the disk during CSS is small and the density of the texture-grooves is large, so that the contact area between the head and the disk is small and the CSS characteristics and adsorption characteristics are improved. That is, it is possible to provide a highly reliable disk in which the flying height of the magnetic head is reduced.

【0021】[0021]

【図面の簡単な説明】[Brief description of drawings]

【0022】[0022]

【図1】本発明の一実施例の磁気ディスクを示す断面図FIG. 1 is a sectional view showing a magnetic disk according to an embodiment of the present invention.

【0023】[0023]

【図2】本実施例のテクスチャ−作製加工装置を示す図FIG. 2 is a diagram showing a texture-fabrication / processing apparatus of this embodiment.

【0024】[0024]

【図3】凸部のばらつき(δh)とAEヒット数を示す
FIG. 3 is a diagram showing the variation (δh) of convex portions and the number of AE hits.

【0025】[0025]

【図4】Rp/RvとAEヒット数を示す図FIG. 4 is a diagram showing Rp / Rv and the number of AE hits.

【0026】[0026]

【図5】凸部のばらつき(δh)とCSS2万回後の動
摩擦係数μKを示す図
FIG. 5 is a diagram showing a variation (δh) of a convex portion and a dynamic friction coefficient μK after CSS 20,000 times.

【0027】[0027]

【図6】凸部の数とCSS2万回後の動摩擦係数μKを
示す図
FIG. 6 is a diagram showing the number of convex portions and the coefficient of dynamic friction μK after 20,000 CSS cycles.

【0028】[0028]

【図7】凸部の数と高温高湿環境下に24時間放置後の
静止摩擦係数の上昇δμsを示す図
FIG. 7 is a diagram showing the number of convex portions and an increase δμs in static friction coefficient after leaving for 24 hours in a high temperature and high humidity environment.

【0029】[0029]

【図8】テクスチャ−粗さの表記法を示す図FIG. 8 is a diagram showing a texture-roughness notation.

【0030】[0030]

【図9】従来テクスチャ−の半径方向のプロファイルを
示す図
FIG. 9 is a diagram showing a radial profile of a conventional texture.

【0031】[0031]

【符号の説明】[Explanation of symbols]

1 基板 2 アルミ合金基板 3 Ni−Pメッキ膜 4 Cr下地膜 5 Co−Ni−Cr磁性膜 6 カ−ボン保護膜 7 潤滑膜 8 ラッピングテ−プ 9 コンタクトロ−ル 1 Substrate 2 Aluminum alloy substrate 3 Ni-P plating film 4 Cr underlayer film 5 Co-Ni-Cr magnetic film 6 Carbon protective film 7 Lubricating film 8 Lapping tape 9 Contact roll

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 テクスチャ−加工を施した非磁性基板上
に少なくとも磁性層を設けた磁気ディスクであって、テ
クスチャ−の凸部の高さの最大値と最小値の差を200
Å以下にするとともに半径方向に沿った長さ50μmの
範囲内での凸部の数が150個以上であることを特徴と
する磁気ディスク。
1. A magnetic disk in which at least a magnetic layer is provided on a textured non-magnetic substrate, and the difference between the maximum value and the minimum value of the heights of the convex portions of the texture is 200.
A magnetic disk characterized in that the number is less than or equal to Å and the number of protrusions is 50 or more within a range of 50 μm in the radial direction.
【請求項2】 テクスチャー加工を施した非磁性基板上
に少なくとも磁性層を設けた磁気ディスクであって、テ
クスチャ−の凸部の高さの最大値と最小値の差を150
Å以下にするとともに最も高い凸部の高さRpと最も低
い凹部の深さRvの比Rp/Rvが0.5以下であるこ
とを特徴とする磁気ディスク。
2. A magnetic disk in which at least a magnetic layer is provided on a textured non-magnetic substrate, and the difference between the maximum value and the minimum value of the heights of the convex portions of the texture is 150.
A magnetic disk, wherein the ratio Rp / Rv of the height Rp of the highest convex portion and the depth Rv of the lowest concave portion is 0.5 or less as well as Å or less.
【請求項3】 テクスチャー加工を施した非磁性基板上
に少なくとも磁性層を設けた磁気ディスクであって、テ
クスチャ−の凸部の高さの最大値と最小値の差を150
Å以下にするとともに半径方向に沿った長さ50μmの
範囲で凸部が150個以上であり、しかも最も高い凸部
の高さRpと最も低い凹部の深さRvの比Rp/Rvが
0.5以下であることを特徴とする磁気ディスク。
3. A magnetic disk in which at least a magnetic layer is provided on a textured non-magnetic substrate, and the difference between the maximum and minimum heights of the convex portions of the texture is 150.
Å or less and 150 or more convex portions in a radial length range of 50 μm, and the ratio Rp / Rv of the highest convex portion height Rp and the lowest concave portion depth Rv is 0. A magnetic disk characterized by being 5 or less.
JP31209191A 1991-11-27 1991-11-27 Magnetic disk Expired - Lifetime JP3199422B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31209191A JP3199422B2 (en) 1991-11-27 1991-11-27 Magnetic disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31209191A JP3199422B2 (en) 1991-11-27 1991-11-27 Magnetic disk

Publications (2)

Publication Number Publication Date
JPH05151556A true JPH05151556A (en) 1993-06-18
JP3199422B2 JP3199422B2 (en) 2001-08-20

Family

ID=18025127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31209191A Expired - Lifetime JP3199422B2 (en) 1991-11-27 1991-11-27 Magnetic disk

Country Status (1)

Country Link
JP (1) JP3199422B2 (en)

Also Published As

Publication number Publication date
JP3199422B2 (en) 2001-08-20

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