JPH0820387B2 - Electron beam micro analyzer Automatic analyzer - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron beam microanalyzer automatic analyzer.

[0002]

2. Description of the Related Art Electron Beam Micro Analyzer (EPMA)
When performing automatic analysis by, a program for instructing the analysis control must be created, but in the conventional programming, a combination of control programs for individual functions of EPMA (accelerating voltage, current, spectroscope, etc.) Either automatic analysis or a control program for a certain analysis mode (qualitative, quantitative, etc.) and interactive control parameter setting has been used. The former method is limited to the programmed automatic control analysis method, and the latter method limits the analytical parameters to those specified by the manufacturer, and cannot utilize the originality of the operator. Further, even if an operator tries to create a program for performing automatic analysis control by a unique analysis method, there is a problem that the frequency of analysis errors due to a mistake in setting a program increases and it cannot be practically used.

[0003]

SUMMARY OF THE INVENTION It is an object of the present invention to allow an operator to independently and easily program automatic analysis by EPMA.

[0004]

Means for Solving the Problems In an EPMA automatic analyzer, various basic operations are respectively set as basic control commands, various analysis operations are set as analysis control commands, and an execution program for each command is set in advance. The automatic analysis program is configured by specifying the sequential sequence of the command of, and when one of them is specified in the analysis control command, various parameters necessary for the analysis operation are displayed, and for each parameter display, Make sure that the program for the analysis control command is completed by setting the numerical values respectively.

[0005]

The operation of the EPMA is the basic operation of the EPMA, for example, the scanning of the sample surface by the electron beam and the analysis operation, for example, the X-ray spectroscope is used for several wavelength ranges designated for each designated time. There are operations such as scanning sequentially,
By setting a control program for each of these operations as a sequence of commands, the operator constructs control programs for various analysis methods that take advantage of the operator's experience, know-how, and uniqueness by combining these commands. it can. With the other analysis control command, the types of parameters that are indispensable for operation are displayed, so the operator can set those parameters without omission, and one series of control sequences determined by the analysis mode is set. An analysis command can be easily created without specifying one.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for creating a program according to the present invention will be described with reference to one example shown below. This example is an analysis program for a certain sample assembled by an operator, and it is a scanning electron microscope image (SEM image), a backscattered electron scanning electron microscope image (BSE image), a sample surface qualitative analysis, and a quantitative analysis. And so on. A program consists of a series of commands. One command is a program such as one analysis operation or control of sample surface scanning by an electron beam, and various operations are programmed in advance, and when the operator selects a certain command, the program of the command Is executed. No Command Description 1 POS1 Set sample to position 1 2 BE1 Beam ON 3 SM2 Set scan mode 2 4 SEM1 SEM image capture controlled by SEM control command mode 1 5 BSE1 BSE image capture BSE control command mode 1 Controlled by 6 SC100 Sample current set to 100 7 BSE2 BSE image acquisition controlled by BSE command mode 2 8 SM1 Scan mode set by 1 9 QL1 Qualitative control controlled by qualitative control command mode 1 10 QN2 quantitative analysis quantified Controlled by control command mode 2 :: :: :: ::

In the above, No is the order of the commands to be executed, and the commands are automatically controlled in the No order. There are basic control commands and analysis control commands,
In the above example, the basic control commands are No 1, 2, 3, 6, 8 etc., the scanning mode 1 is the sample surface scanning by the x <y drive of the sample stage, and the scanning mode 2 is the sample surface scanning by the electron beam. is there. By using these commands, it is possible to realize an operator-original analysis that does not follow the analysis sequence of the following analysis commands. The analysis command is No 4, 5, 7, 9,
10, etc., the execution program of the operation of the analysis method of EPMA such as photographing of SEM image and BSE image, qualitative and quantitative analysis, and the control parameter group for operation are set. When these commands are specified, various operational parameters necessary for the operation by the command are automatically set at the same time. That is, all the parameters necessary for the operation are incorporated in the command, and it is not necessary to directly specify the control command of the basic function of EPMA.

FIG. 1 shows a display screen of the control device when the operator selects one command in the program setting work. The figure shows a scene in which the qualitative analysis of the above-mentioned No. 0 mode 1 is selected. In this analysis, the parameters to be set for operation are the element name, X-ray wavelength, spectroscope number to be used, type of dispersive crystal, starting wavelength near the peak, scanning pitch, number of scans, integration time, background wavelength, etc. , This is displayed as a table. For example, in this example, No1 is set to iron, the wavelength is set to 1.9378Å, the spectroscope uses the first channel, and the dispersive crystal uses the main. Since the types of parameters to be set are displayed, the operator must not forget to set the parameters required for analysis operation, and if the software for setting has a check function, incorrect input or conflict You can eliminate the settings you made in advance. After these parameters are set, the EP
Since the program itself for each part of MA for the qualitative analysis is set in advance in the command, a mistake in setting the program does not occur.

The contents of the above table can be created and registered over a number of pages on the screen, and the control device has a learning ability such that an element with a high analysis frequency comes to a young No. You can leave it.

[0010]

According to the present invention, a program for automatically controlling the EPMA is divided into a basic control command and an analysis control command, each of which is preliminarily programmed, and those commands are arranged. By doing so, it is possible to easily create a program for performing comprehensive analysis measurement of EPMA. Moreover, since there is no mistake in the program and the parameter to be set is displayed by the analysis control command, If you use the basic control commands without forgetting the settings,
It has become possible to easily perform automatic analysis by an operator's own method based on the experience and thoughts of the operator.

[Brief description of drawings]

FIG. 1 is an example of a screen for setting each parameter of an analysis control command of the present invention.

Claims (1)

[Claims] 1. An electron beam microanalyzer control device, wherein various basic operations are respectively set as basic control commands, various analysis operations are set as analysis control commands, and an execution program for each command is set in advance. An automatic analysis program is configured by specifying a sequential sequence of commands, and when one of them is specified in the analysis control command, various parameters required for analysis operation are displayed, and for each parameter display, An electron beam microanalyzer automatic analyzer characterized in that a program for the analysis control command is completed by setting a numerical value.