JPH08203038A - Detecting head having magneto resistance element and displacement detecting device - Google Patents
Detecting head having magneto resistance element and displacement detecting deviceInfo
- Publication number
- JPH08203038A JPH08203038A JP7011959A JP1195995A JPH08203038A JP H08203038 A JPH08203038 A JP H08203038A JP 7011959 A JP7011959 A JP 7011959A JP 1195995 A JP1195995 A JP 1195995A JP H08203038 A JPH08203038 A JP H08203038A
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- Prior art keywords
- magnetoresistive elements
- magnetic scale
- detection head
- magnetoresistive
- pairs
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 15
- 238000001514 detection method Methods 0.000 claims description 42
- 230000004304 visual acuity Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気抵抗素子を有する検
出ヘッド及び斯かる検出ヘッドを有する変位検出装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detecting head having a magnetoresistive element and a displacement detecting device having such a detecting head.
【０００２】[0002]
【従来の技術】図４を参照して従来の変位検出装置の例
を説明する。変位検出装置は磁気スーール１１と検出ヘ
ッド１２とを有し、磁気スケール１１に対して検出ヘッ
ド１２が矢印方向に相対的に移動する。磁気スケール１
１はピッチλの磁気目盛りを有し、検出器ヘッド１２は
３対の磁気抵抗素子２１Ａ、２１Ｂ、２２Ａ、２２Ｂ、
２３Ａ、２３Ｂを有する。各対の磁気抵抗素子は互いに
λ／２だけ隔置され、隣接する対の磁気抵抗素子は互い
に（ｎ＋１／３）λだけ隔置されている。ｎは自然数で
あり、図示の例ではｎ＝ｎ1 、ｎ2 である。2. Description of the Related Art An example of a conventional displacement detecting device will be described with reference to FIG. The displacement detection device has a magnetic scroll 11 and a detection head 12, and the detection head 12 moves relative to the magnetic scale 11 in the arrow direction. Magnetic scale 1
1 has a magnetic scale with a pitch λ, and the detector head 12 has three pairs of magnetoresistive elements 21A, 21B, 22A, 22B,
It has 23A and 23B. The magnetoresistive elements of each pair are separated from each other by λ / 2, and the adjoining pairs of magnetoresistive elements are separated from each other by (n + 1/3) λ. n is a natural number, and in the illustrated example, n = n 1 and n 2 .
【０００３】図５及び図６を参照して検出ヘッドの回路
を説明する。図５は磁気抵抗素子を含む回路を示し、図
６はその等価回路を示す。２つの図にて対応する部分に
は同一の参照符号が付されている。第１の対の磁気抵抗
素子２１Ａ、２１Ｂには１対の抵抗器２０Ａ、２０Ｂが
接続されている。The circuit of the detection head will be described with reference to FIGS. 5 and 6. FIG. 5 shows a circuit including a magnetoresistive element, and FIG. 6 shows its equivalent circuit. Corresponding parts in the two figures are given the same reference numerals. A pair of resistors 20A and 20B are connected to the first pair of magnetoresistive elements 21A and 21B.
【０００４】抵抗器２０Ａ、２０Ｂと第１の対の磁気抵
抗素子２１Ａ、２１Ｂによって第１のブリッジ回路４１
が構成され、第２及び第３の対の磁気抵抗素子２２Ａ、
２２Ｂ、２３Ａ、２３Ｂによって第２のブリッジ回路４
２が構成される。A first bridge circuit 41 is formed by the resistors 20A and 20B and the first pair of magnetoresistive elements 21A and 21B.
And a second and third pair of magnetoresistive elements 22A,
2nd bridge circuit 4 by 22B, 23A, 23B
2 is configured.
【０００５】第１及び第２のブリッジ回路４１、４２の
各々は、一端にて交流電源端子３０Ｖに接続され、他端
にて接地端子５１、５２に接続されている。図示のよう
に抵抗器２０Ａ、２０Ｂの中間点は共通端子３０に接続
され、各対の磁気抵抗素子２１Ａ、２１Ｂ、２２Ａ、２
２Ｂ、２３Ａ、２３Ｂの中間点は出力端子３１、３２、
３３に接続されている。共通端子３０と３つの出力端子
３１、３２、３３との間で３相の交流信号が得られるEach of the first and second bridge circuits 41 and 42 has one end connected to the AC power supply terminal 30V and the other end connected to the ground terminals 51 and 52. As shown in the figure, the middle points of the resistors 20A and 20B are connected to the common terminal 30, and the magnetoresistive elements 21A, 21B, 22A and 2 of each pair are connected.
The intermediate points of 2B, 23A and 23B are output terminals 31, 32,
It is connected to 33. A three-phase AC signal is obtained between the common terminal 30 and the three output terminals 31, 32, and 33.
【０００６】図７は検出ヘッド１２の出力信号Ｅとして
得られる３相の交流信号３１ａ、３２ａ、３３ａの波形
を示す。位置検出装置は、斯かる３つの信号波形より距
離ｘを検出する。ここで、斯かる検出ヘッド１２による
測定値の分解能を求める。図示のように、３つの波形
は、それぞれ周期λ（＝２π）の正弦波であり、互いに
λ／３（＝π／３）だけ位相が異なる。FIG. 7 shows the waveforms of the three-phase AC signals 31a, 32a, 33a obtained as the output signal E of the detection head 12. The position detecting device detects the distance x from the three signal waveforms. Here, the resolution of the measured value by the detection head 12 is obtained. As shown in the figure, the three waveforms are sinusoidal waves each having a period λ (= 2π) and differ in phase from each other by λ / 3 (= π / 3).
【０００７】先ず、３つの信号波形がゼロとなる点を検
出する。３つの信号波形がゼロとなる点は、角度θがπ
／３、２π／３、π、４π／３、５π／３、２π等であ
り、１ピッチλ中に６点ある。次に、３つの信号波形が
互いに交わる点を検出する。斯かる交点は、角度θがπ
／６、π／２、π、５π／６、７π／６、３π／２、１
１π／６等であり１ピッチλ中に６点ある。従って、３
つの信号波形がゼロとなる点及び互いに交わる点を検出
することによって、１ピッチλ（＝２π）中に互いに等
間隔な１２点が得られる。従って、この検出ヘッドの分
解能はλ／１２となる。First, a point where the three signal waveforms become zero is detected. The angle θ is π at the point where the three signal waveforms become zero.
/ 3, 2π / 3, π, 4π / 3, 5π / 3, 2π, etc., and there are 6 points in one pitch λ. Next, the point where the three signal waveforms intersect each other is detected. Such an intersection has an angle θ of π
/ 6, π / 2, π, 5π / 6, 7π / 6, 3π / 2, 1
1π / 6, etc., and there are 6 points in 1 pitch λ. Therefore, 3
By detecting the points where two signal waveforms are zero and the points where they intersect with each other, 12 points equidistant from each other are obtained in one pitch λ (= 2π). Therefore, the resolution of this detection head is λ / 12.
【０００８】[0008]
【発明が解決しようとする課題】従来の位置検出装置に
おいて、測定精度即ち分解能は磁気スケールのピッチλ
に依存する。上述の例では、分解能はλ／１２である。
従って、測定精度即ち分解能をより良くするためには、
磁気スケールのピッチλをより小さくすればよい。In the conventional position detecting device, the measuring accuracy, that is, the resolution is determined by the pitch λ of the magnetic scale.
Depends on. In the above example, the resolution is λ / 12.
Therefore, in order to improve the measurement accuracy, that is, the resolution,
The pitch λ of the magnetic scale may be made smaller.
【０００９】しかしながら、図１に示すように、磁気ス
ケールの磁気目盛りのピッチλが小さいと、Ｎ極とＳ極
の間の磁力線の作る曲線の湾曲度が小さくなり、磁気ス
ケールと磁気抵抗素子との間の距離（ギャップ）をより
小さくする必要がある。磁気スケールと磁気抵抗素子と
の間の距離（ギャップ）を小さくすると位置検出装置の
構造により精度が必要となり製造費が高くなる。However, as shown in FIG. 1, when the pitch λ of the magnetic scales of the magnetic scale is small, the degree of curvature of the curve formed by the lines of magnetic force between the N pole and the S pole is small, and the magnetic scale and the magnetoresistive element are The distance (gap) between them needs to be smaller. When the distance (gap) between the magnetic scale and the magnetoresistive element is reduced, the structure of the position detection device requires accuracy and the manufacturing cost increases.
【００１０】本発明は斯かる点に鑑み、磁気スケールの
磁気目盛りのピッチλを小さくすることなく、測定精度
即ち測定分解能を向上することができる検出ヘッド又は
位置検出装置を提供することを目的とする。In view of the above problems, the present invention has an object to provide a detection head or a position detection device capable of improving the measurement accuracy, that is, the measurement resolution, without reducing the pitch λ of the magnetic scale of the magnetic scale. To do.
【００１１】本発明は斯かる点に鑑み、磁気スケールと
磁気抵抗素子との間の距離（ギャップ）を小さくするこ
となく、測定精度即ち測定分解能を向上することができ
る検出ヘッド又は位置検出装置を提供することを目的と
する。In view of the above points, the present invention provides a detection head or position detection device capable of improving the measurement accuracy, that is, the measurement resolution, without reducing the distance (gap) between the magnetic scale and the magnetoresistive element. The purpose is to provide.
【００１２】[0012]
【課題を解決するための手段】本発明によると、所定の
ピッチλの磁気目盛りを有する磁気スケールに対する相
対的な変位を検出するための磁気抵抗素子を有する検出
ヘッドにおいて、上記磁気抵抗素子はＮ相（但し、Ｎは
５以上の奇数。）の交流信号を出力信号として取り出せ
ることができるように、Ｎ対の磁気抵抗素子を含むこと
を特徴とする。According to the present invention, in a detection head having a magnetoresistive element for detecting a relative displacement with respect to a magnetic scale having a magnetic scale having a predetermined pitch λ, the magnetoresistive element is N It is characterized by including N pairs of magnetoresistive elements so that an AC signal of a phase (where N is an odd number of 5 or more) can be taken out as an output signal.
【００１３】本発明によると、磁気抵抗素子を有する検
出ヘッドにおいて、上記Ｎは５であることを特徴とす
る。According to the present invention, in the detection head having a magnetoresistive element, the above N is 5.
【００１４】本発明によると、磁気抵抗素子を有する検
出ヘッドにおいて、上記各対において磁気抵抗素子は互
いにλ／２の距離だけ隔置され、上記Ｎ対の磁気抵抗素
子は隣接する対の磁気抵抗素子より（ｎ＋１／Ｎ）λの
距離（ｎは自然数。）だけ隔置されていることを特徴と
する。According to the present invention, in the detection head having the magnetoresistive elements, the magnetoresistive elements in each pair are separated from each other by a distance of λ / 2, and the N pairs of magnetoresistive elements are adjacent to each other. It is characterized in that it is spaced from the element by a distance of (n + 1 / N) λ (n is a natural number).
【００１５】本発明によると、所定のピッチλの磁気目
盛りを有する磁気スケールと該磁気スケールに対する相
対的な変位を検出するための検出ヘッドとを有する変位
検出装置において、上記検出ヘッドはＮ対の磁気抵抗素
子（但し、Ｎは５以上の奇数。）を含み、上記各対にお
いて磁気抵抗素子は互いにλ／２の距離だけ隔置され、
上記Ｎ対の磁気抵抗素子は隣接する対の磁気抵抗素子よ
り（ｎ＋１／Ｎ）λの距離（ｎは自然数。）だけ隔置さ
れていることを特徴とする。According to the present invention, in a displacement detecting device having a magnetic scale having a magnetic scale having a predetermined pitch λ and a detecting head for detecting a relative displacement with respect to the magnetic scale, the detecting heads include N pairs. A magnetoresistive element (where N is an odd number of 5 or more), and the magnetoresistive elements are separated from each other by a distance of λ / 2,
The N pairs of magnetoresistive elements are separated from the adjacent pair of magnetoresistive elements by a distance of (n + 1 / N) λ (n is a natural number).
【００１６】本発明によると、変位検出装置において、
上記Ｎは５であることを特徴とする。According to the present invention, in the displacement detecting device,
The above N is characterized in that it is 5.
【００１７】[0017]
【作用】検出ヘッドは５対の磁気抵抗素子を含み、５相
の交流信号を出力信号として取り出せることができる。
５相の正弦波信号は互いに２π／５＝λ／５だけ位相が
異なるため、磁気目盛り１ピッチλ＝２π当たり１０点
にてゼロとなり、１０点にて互いに交わる。従って、磁
気目盛り１ピッチλ＝２π当たり２０点が得られ、分解
能はλ／２０となる。The detecting head includes five pairs of magnetoresistive elements and can take out five-phase AC signals as output signals.
Since the five-phase sine wave signals are different in phase from each other by 2π / 5 = λ / 5, the magnetic scale 1 pitch λ = 2π is zero at 10 points and intersects at 10 points. Therefore, 20 points are obtained per pitch of magnetic scale λ = 2π, and the resolution is λ / 20.
【００１８】従って、従来の３対の磁気抵抗素子では分
解能はλ／１２であったが、本発明によれば、分解能は
λ／２０となりる。Therefore, the resolution is λ / 12 in the conventional three pairs of magnetoresistive elements, but according to the present invention, the resolution is λ / 20.
【００１９】[0019]
【実施例】以下に図１〜図３を参照して本発明の実施例
について説明する。尚図１〜図３において図５〜図７の
対応する部分には同一の参照符号を付してその詳細な説
明は省略する。Embodiments of the present invention will be described below with reference to FIGS. 1 to 3, corresponding parts in FIGS. 5 to 7 are designated by the same reference numerals, and detailed description thereof will be omitted.
【００２０】図１及び図２を参照して本発明による検出
ヘッドの例を説明する。図１は磁気抵抗素子を含む回路
を示し、図２はその等価回路を示す。図５及び図６に示
した従来の検出ヘッドにおける磁気抵抗素子を含む回路
及びその等価回路と比較して、本例の回路は、第３のブ
リッジ回路４３が付加されている点が異なる。即ち、第
１及び第２のブリッジ回路４１、４２は従来の例の回路
と同様な構成であってよい。An example of the detection head according to the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 shows a circuit including a magnetoresistive element, and FIG. 2 shows an equivalent circuit thereof. Compared with the circuit including the magnetoresistive element in the conventional detection head shown in FIGS. 5 and 6 and its equivalent circuit, the circuit of this example is different in that a third bridge circuit 43 is added. That is, the first and second bridge circuits 41 and 42 may have the same configuration as the circuit of the conventional example.
【００２１】第３のブリッジ回路４３は第２のブリッジ
回路４２と同様な構成であってよい。即ち、第３のブリ
ッジ回路４３は２つの対、即ち、第４及び第５の対の磁
気抵抗素子２４Ａ、２４Ｂ、２５Ａ、２５Ｂを含む。各
対において２つの磁気抵抗素子は互いにλ／２だけ隔置
され、隣接する対の磁気抵抗素子は互いに（ｎ＋１／
５）λだけ隔置されている。ｎは自然数であり、図示の
例ではｎ＝ｎ3 、ｎ4 である。The third bridge circuit 43 may have the same structure as the second bridge circuit 42. That is, the third bridge circuit 43 includes two pairs of magnetoresistive elements 24A, 24B, 25A, 25B, that is, fourth and fifth pairs. In each pair, the two magnetoresistive elements are separated from each other by λ / 2, and the adjacent pair of magnetoresistive elements are separated from each other by (n + 1 /
5) Spaced by λ. n is a natural number, and in the illustrated example, n = n 3 and n 4 .
【００２２】第３のブリッジ回路４３は、一端にて交流
電源端子３０Ｖに接続され、他端にて接地端子５３に接
続されている。図示のように抵抗器２０Ａ、２０Ｂの中
間点は共通端子３０に接続され、各対の磁気抵抗素子２
１Ａ、２１Ｂ、２２Ａ、２２Ｂ、２３Ａ、２３Ｂ、２４
Ａ、２４Ｂ、２５Ａ、２５Ｂの中間点は、それぞれ出力
端子３１、３２、３３、３４、３５に接続されている。
共通端子３０と５つの出力端子３１、３２、３３、３
４、３５との間で５相の交流信号が得られる。The third bridge circuit 43 has one end connected to the AC power supply terminal 30V and the other end connected to the ground terminal 53. As shown in the figure, the middle points of the resistors 20A and 20B are connected to the common terminal 30, and the magnetoresistive elements 2 of each pair are connected.
1A, 21B, 22A, 22B, 23A, 23B, 24
The midpoints of A, 24B, 25A and 25B are connected to output terminals 31, 32, 33, 34 and 35, respectively.
Common terminal 30 and five output terminals 31, 32, 33, 3
A five-phase AC signal is obtained between 4 and 35.
【００２３】図３は本発明による検出ヘッド１２の出力
信号Ｅとして得られる５相の交流信号３１ａ、３２ａ、
３３ａ、３４ａ、３５ａの波形を示す。図７の場合と同
様に、本例による検出ヘッド１２による測定値の分解能
を求める。図示のように、５つの波形は、それぞれ周期
λ（＝２π）の正弦波であり、互いにλ／５（＝２π／
５）だけ位相が異なる。FIG. 3 shows five-phase AC signals 31a, 32a, which are obtained as the output signal E of the detection head 12 according to the present invention.
The waveforms of 33a, 34a, and 35a are shown. Similar to the case of FIG. 7, the resolution of the measurement value by the detection head 12 according to this example is obtained. As shown in the figure, the five waveforms are sinusoidal waves each having a period λ (= 2π), and λ / 5 (= 2π /).
Only 5) is different in phase.
【００２４】先ず、５つの信号波形がゼロとなる点を検
出する。５つの信号波形がゼロとなる点は、角度θがπ
／５、２π／５、３π／５、４π／５、π、６π／５、
７π／５、８π／５、９π／５、２π等であり、１ピッ
チλ（＝２π）中に１０点あり、斯かる１０点間は等間
隔である。次に、５つの信号波形が互いに交わる点を検
出する。斯かる交点は、角度θがπ／１０、２π／１
０、３π／１０、４π／１０、π、６π／１０、７π／
１０、８π／１０、９π／１０、２π等であり、１ピッ
チλ（＝２π）中に１０点あり、斯かる１０点間は等間
隔である。First, points where the five signal waveforms become zero are detected. The angle θ is π at the point where the five signal waveforms become zero.
/ 5, 2π / 5, 3π / 5, 4π / 5, π, 6π / 5,
7π / 5, 8π / 5, 9π / 5, 2π, etc., and there are 10 points in one pitch λ (= 2π), and these 10 points are equidistant. Next, the points where the five signal waveforms intersect each other are detected. Such an intersection has an angle θ of π / 10, 2π / 1.
0, 3π / 10, 4π / 10, π, 6π / 10, 7π /
10, 8π / 10, 9π / 10, 2π, etc., and there are 10 points in one pitch λ (= 2π), and these 10 points are equidistant.
【００２５】従って、５つの信号波形がゼロとなる点及
び互いに交わる点を検出することによって、１ピッチλ
（＝２π）当たり互いに等間隔な２０点が得られる。従
って、分解能は２π／２０＝λ／２０となる。Therefore, by detecting the points where the five signal waveforms are zero and the points where the five signal waveforms intersect each other, one pitch λ is obtained.
Twenty points at equal intervals are obtained per (= 2π). Therefore, the resolution is 2π / 20 = λ / 20.
【００２６】上述の例では、第１及び第２のブリッジ回
路４１、４２に第３のブリッジ回路４３を付加したが、
更に第４のブリッジ回路４４、第５のブリッジ回路４５
等を付加してもよい。それによって、７相、９相等の検
出ヘッドが得られる。一般に、Ｍ個（Ｍ≧３）のブリッ
ジ回路によってＮ相（Ｎ＝２Ｍ−１）の検出ヘッドが得
られる。斯かる場合、Ｎ対の磁気抵抗素子が配置され、
隣接する対の磁気抵抗素子は互いに（ｎ＋１／Ｎ）λだ
け隔置されている。ここで、Ｎ（≧５）は奇数である。
上述の例では、Ｍ＝３，Ｎ＝５である。In the above example, the third bridge circuit 43 is added to the first and second bridge circuits 41 and 42.
Further, a fourth bridge circuit 44 and a fifth bridge circuit 45
Etc. may be added. As a result, a 7-phase, 9-phase, etc. detection head is obtained. Generally, M (M ≧ 3) bridge circuits provide N-phase (N = 2M−1) detection heads. In such a case, N pairs of magnetoresistive elements are arranged,
Adjacent pairs of magnetoresistive elements are separated from each other by (n + 1 / N) λ. Here, N (≧ 5) is an odd number.
In the above example, M = 3 and N = 5.
【００２７】相数が大きくなると測定精度即ち分解能が
高くなるが、多数の磁気抵抗素子とブリッジ回路が必要
となり、製造費がより高くなる。従って、上述のように
５相の検出ヘッドが最も好ましい。As the number of phases increases, the measurement accuracy, that is, the resolution increases, but a large number of magnetoresistive elements and bridge circuits are required, resulting in higher manufacturing costs. Therefore, as described above, the 5-phase detection head is most preferable.
【００２８】以上本発明の実施例について詳細に説明し
てきたが、本発明は上述の実施例に限ることなく本発明
の要旨を逸脱することなく他の種々の構成が採り得るこ
とは当業者にとって容易に理解されよう。Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-mentioned embodiments, and it will be understood by those skilled in the art that various other configurations can be adopted without departing from the gist of the present invention. Easy to understand.
【００２９】[0029]
【発明の効果】本発明によると、検出ヘッド又は位置検
出装置において、磁気スケールの磁気目盛りのピッチλ
を変化させる（小さくする）ことなく、測定精度即ち測
定分解能を向上させることができる利点がある。According to the present invention, in the detecting head or the position detecting device, the pitch λ of the magnetic scale of the magnetic scale is
There is an advantage that the measurement accuracy, that is, the measurement resolution can be improved without changing (decreasing).
【００３０】本発明によると、検出ヘッド又は位置検出
装置において、磁気スケールと磁気抵抗素子の間の距離
（ギャップ）を小さくすることなく、測定精度即ち測定
分解能を向上することができる利点がある。According to the present invention, in the detection head or the position detection device, there is an advantage that the measurement accuracy, that is, the measurement resolution can be improved without reducing the distance (gap) between the magnetic scale and the magnetoresistive element.
【図１】本発明による検出ヘッドの構成例を示す図であ
る。FIG. 1 is a diagram showing a configuration example of a detection head according to the present invention.
【図２】図１の検出器ヘッドの等価回路図である。2 is an equivalent circuit diagram of the detector head of FIG.
【図３】本発明による検出ヘッドの出力信号の波形を示
す図である。FIG. 3 is a diagram showing a waveform of an output signal of the detection head according to the present invention.
【図４】従来の位置検出装置の構成例を示す図である。FIG. 4 is a diagram showing a configuration example of a conventional position detection device.
【図５】従来の検出ヘッドの構成例を示す図である。FIG. 5 is a diagram showing a configuration example of a conventional detection head.
【図６】図５の検出器ヘッドの等価回路図である。6 is an equivalent circuit diagram of the detector head of FIG.
【図７】従来の検出ヘッドの出力信号の波形を示す図で
ある。FIG. 7 is a diagram showing a waveform of an output signal of a conventional detection head.
１１ 磁気スケール １２ 検出ヘッド ２０Ａ、２０Ｂ 抵抗器 ２１Ａ、２１Ｂ、２２Ａ、２２Ｂ、２３Ａ、２３Ｂ、２
４Ａ、２４Ｂ、２５Ａ、２５Ｂ 磁気抵抗素子 ３０、３０Ｖ、３１、３２、３３、３４、３５ 端子 ４１、４２、４３ ブリッジ回路 ５１、５２、５３ 接地端子11 magnetic scale 12 detection heads 20A, 20B resistors 21A, 21B, 22A, 22B, 23A, 23B, 2
4A, 24B, 25A, 25B Magnetoresistive element 30, 30V, 31, 32, 33, 34, 35 Terminals 41, 42, 43 Bridge circuit 51, 52, 53 Ground terminal
Claims (5)
気スケールに対する相対的な変位を検出するための磁気
抵抗素子を有する検出ヘッドにおいて、 上記磁気抵抗素子はＮ相（但し、Ｎは５以上の奇数。）
の交流信号を出力信号として取り出せることができるよ
うに、Ｎ対の磁気抵抗素子を含むことを特徴とする磁気
抵抗素子を有する検出ヘッド。1. A detection head having a magnetoresistive element for detecting a relative displacement with respect to a magnetic scale having a magnetic scale having a predetermined pitch λ, wherein the magnetoresistive element is N-phase (where N is 5 or more). Odd number.)
A detection head having a magnetoresistive element, characterized in that it includes N pairs of magnetoresistive elements so that the AC signal can be taken out as an output signal.
出ヘッドにおいて、上記Ｎは５であることを特徴とする
磁気抵抗素子を有する検出ヘッド。2. A detection head having a magnetoresistive element according to claim 1, wherein N is 5 and a detection head having a magnetoresistive element.
する検出ヘッドにおいて、上記各対において磁気抵抗素
子は互いにλ／２の距離だけ隔置され、上記Ｎ対の磁気
抵抗素子は隣接する対の磁気抵抗素子より（ｎ＋１／
Ｎ）λの距離（ｎは自然数。）だけ隔置されていること
を特徴とする磁気抵抗素子を有する検出ヘッド。3. The detection head having the magnetoresistive element according to claim 1, wherein the magnetoresistive elements in each pair are separated from each other by a distance of λ / 2, and the N pairs of magnetoresistive elements are adjacent to each other. From the pair of magnetoresistive elements (n + 1 /
N) A detection head having a magnetoresistive element, which is separated by a distance of λ (n is a natural number).
気スケールと該磁気スケールに対する相対的な変位を検
出するための検出ヘッドとを有する変位検出装置におい
て、 上記検出ヘッドはＮ対の磁気抵抗素子（但し、Ｎは５以
上の奇数。）を含み、上記各対において磁気抵抗素子は
互いにλ／２の距離だけ隔置され、上記Ｎ対の磁気抵抗
素子は隣接する対の磁気抵抗素子より（ｎ＋１／Ｎ）λ
の距離（ｎは自然数。）だけ隔置されていることを特徴
とする変位検出装置。4. A displacement detection device having a magnetic scale having a magnetic scale having a predetermined pitch λ and a detection head for detecting relative displacement with respect to the magnetic scale, wherein the detection head comprises N pairs of magnetoresistive elements. (However, N is an odd number of 5 or more.), The magnetoresistive elements in each of the pairs are separated from each other by a distance of λ / 2, and the N pairs of magnetoresistive elements are more than the magnetoresistive elements of the adjacent pair ( n + 1 / N) λ
Displacement detection device characterized in that they are separated by a distance of n (n is a natural number).
上記Ｎは５であることを特徴とする変位検出装置。5. The displacement detection device according to claim 4,
The displacement detection device is characterized in that the N is 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7011959A JPH08203038A (en) | 1995-01-27 | 1995-01-27 | Detecting head having magneto resistance element and displacement detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7011959A JPH08203038A (en) | 1995-01-27 | 1995-01-27 | Detecting head having magneto resistance element and displacement detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08203038A true JPH08203038A (en) | 1996-08-09 |
Family
ID=11792163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7011959A Pending JPH08203038A (en) | 1995-01-27 | 1995-01-27 | Detecting head having magneto resistance element and displacement detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08203038A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6471566B1 (en) | 2000-09-18 | 2002-10-29 | Lam Research Corporation | Sacrificial retaining ring CMP system and methods for implementing the same |
| US6652357B1 (en) | 2000-09-22 | 2003-11-25 | Lam Research Corporation | Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing |
-
1995
- 1995-01-27 JP JP7011959A patent/JPH08203038A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6471566B1 (en) | 2000-09-18 | 2002-10-29 | Lam Research Corporation | Sacrificial retaining ring CMP system and methods for implementing the same |
| US6652357B1 (en) | 2000-09-22 | 2003-11-25 | Lam Research Corporation | Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing |
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