JPH08201700A - Crosswise moving stage - Google Patents

Abstract

PURPOSE: To provide a crosswise moving stage lowering the height of the stage itself, making the stage light in weight and decreasing the manufacturing cost. CONSTITUTION: This stage is provided with a fixed base plate 1 having two parallel linear guide grooves 1a, 1b, a movable base plate 2 having two parallel linear guide grooves 2a, 2b and arranging both linear guide grooves so as to be orthogonal to each other and a guide means 3, having four guide members 4-7 engaged with both linear guide grooves at the intersection of both linear guide grooves and guiding the movable base plate so that only the movable base plate 2 is moved in Y direction and the movable base plate 2 together with four guide members 4-7 are moved in X direction. Since the movable base plate 2 is supported by the guide means 3 so as to move in the X and Y directions on the fixed base plate, as to the base plates, only two sheets: the fixed base plate and the movable base plate are enough.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cross-moving stage used in microscopes, projectors and the like.

[0002]

2. Description of the Related Art As a conventional cross-moving stage, for example, one shown in FIG. 3 is known. This cross-moving stage is composed of three base plates 30 and 3 which are arranged in an overlapping manner.
Provided between 1, 32 and the base plates 30, 31
The base plate 31 is provided between support means 33 and 34 for supporting the base plate 31 so as to be movable in the X direction with respect to the base plate 30, and the base plate 32.
Support means 35, 36 for supporting the base plate 31 so as to be movable in the Y direction with respect to the base plate 31. Each support means 3
3 to 36 are composed of a pair of races provided so that the guide surfaces face each other, a large number of steel balls rolling on the guide surfaces of both races, and a retainer (not shown) holding the steel balls. There is. Each race of the support means 33, 34 and the support means 35,
The 36 races are orthogonal to each other.

In the conventional cruciform stage having such a structure, when the base plate 32 is moved in the X direction, the base plate 32, the supporting means 35, 36 and the base plate 31 are guided together by the supporting means 33, 34. X
When the base plate 32 is moved in the Y direction and moved in the Y direction, only the base plate 32 is moved in the Y direction by being guided by the supporting means 35 and 36.

[0004]

However, in the above prior art, (1) three base plates 30, 31, 32 are used.
Therefore, the height of the stage itself becomes high and the stage becomes heavy. (2) Supporting means 3
It is necessary to process each race of 3 to 36 with high precision, and one race 33a, 34a of each supporting means 33, 34 fixed to the lower surface of the base plate 31 and each supporting means 35 fixed to the upper surface thereof. , 36 one race 35
Since it is necessary to perform processing with high accuracy such that a and 36a are orthogonal to each other, there is a problem that the manufacturing cost becomes high.

The present invention has been made in view of the above circumstances, and a problem thereof is to provide a cross-moving stage which is intended to reduce the height of the stage itself and to reduce the weight and the manufacturing cost. It is to be.

[0006]

In order to solve the above-mentioned problems, a cross-moving stage according to the invention of claim 1 has a fixed base plate having two parallel first linear guide grooves and two fixed base plates. A movable base plate having a second parallel linear guide groove and arranged so that the linear guide grooves are orthogonal to each other, and four guides that engage with the linear guide grooves at the intersections of the linear guide grooves. A guide member for guiding the movable base plate so that the movable base plate moves in one of two orthogonal directions and the movable base plate and the four guide members move together in the other direction. And a guide means for operating.

According to a second aspect of the present invention, in the cross movement mount, the guide means includes four guide members in which two guide pieces are connected in a cross shape, and one guide piece of each guide member is the first guide piece. 1
Is slidably engaged with the second linear guide groove and the other guide piece is slidably engaged with the second linear guide groove.

According to a third aspect of the present invention, in at least one of the four guide members, the two guide pieces are fixed at right angles to each other, and the other guide members are the above-mentioned guide members. The two guide pieces are rotatably connected to each other.

According to a fourth aspect of the present invention, in the cross-moving stage, the guide means is provided between four spherical bodies as the guide members slidably engaged with the linear guide grooves and between the base plates. And a holding member that holds the four spheres at four intersections of the two linear guide grooves.

According to a fifth aspect of the present invention, the holding member is a flat plate having four holding holes.
The four holding holes are provided at positions where the center of the hole and the four intersections are coincident with each other and four corners of a virtual quadrangle connecting these four centers are at right angles, and the four spheres are It is held in each of the four holding holes.

[0011]

In the cross-moving stage according to the invention described in claim 1, since the movable base plate is guided by the guide means so as to be movable in two directions orthogonal to the fixed base plate, the fixed base plate and the movable base plate are used as the base plate. Since the number of base plates is reduced by one, the dimension of the stage itself in the height direction is reduced, the weight of the stage is reduced, and the material is small.

According to another aspect of the present invention, there is provided a cross-moving stage.
Since the guide pieces of the four guide members slidably engage with the corresponding linear guide grooves, the movable base plate is guided so as to be movable in two directions orthogonal to the fixed base plate. It does not require high-precision machining such as a support structure using steel balls. In addition, one guide piece of each guide member is engaged with the first linear guide groove of the fixed base plate, and the other guide piece of each guide member is engaged with the second linear guide groove of the movable base plate. Is completed, the assembly work is simplified.

According to the third aspect of the present invention, there is provided a cross-moving stage.
The perpendicularity of the two directions is ensured by at least one guide member fixed by making two guide pieces orthogonal to each other, and
Smooth movement of the movable base plate is ensured by another guide member which rotatably connects the two guide pieces to each other.

According to the fourth aspect of the invention described above,
Since the four spherical bodies held by the holding member slidably engage with the corresponding linear guide grooves, the movable base plate is movably supported in two directions orthogonal to the fixed base plate. It does not require high-precision machining such as a support structure using steel balls. Also,
Assembly is completed by simply engaging the four spherical bodies held by the holding member with the first linear guide grooves of the fixed base plate and engaging the four spherical bodies with the second linear guide groove of the movable base plate. Work becomes easy.

According to the fifth aspect of the present invention, in the cross-moving stage,
The squareness of the two directions is ensured by the four holding holes of the flat plate, and the smooth movement of the movable base plate is ensured by the rolling of the four spheres.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a cross motion mount according to an embodiment of the present invention. This cruciform stage comprises a fixed base plate 1, a movable base plate 2, and a guide means 3.

The fixed base plate 1 is provided with two parallel linear guide grooves 1a and 1b. The movable base plate 2 is provided with two parallel linear guide grooves 2a and 2b. The fixed base plate 1 and the movable base plate 2 have linear guide grooves 1a and 1b and linear guide grooves 2a,
2b are arranged so as to be orthogonal to each other. Each of the straight guide grooves 1a, 1b, 2a, 2b is a straight groove having a V-shaped cross section.

The guide means 3 has two straight guide grooves 1a, 1b and two straight guide grooves 1a, 1b at two intersections.
It has four guide members 4 to 7 which engage with 1b, 2a and 2b. The guide means 3 is one of two orthogonal directions, that is, a direction along the linear guide grooves 2a and 2b (Y direction).
Is movable so that only the movable base plate 2 moves and the movable base plate 2 and the four guide members 4 to 7 move together in the other direction (the X direction) along the linear guide grooves 1a and 1b. Guide the base plate 2.

The guide member 4 is formed by connecting two guide pieces 4a, 4b having a semicircular cross section in a cross shape with their planes abutting each other. The remaining guide members 5, 6, 7 are similar to the guide member 4, and are formed by connecting two guide pieces 5a, 5b, two guide pieces 6a, 6b, two guide pieces 7a, 7b in a cross shape. is there.

One of the four guide members (the guide member 4) is a screw 8 for the two guide pieces 4a, 4b in a state in which the two guide pieces 4a, 4b are exactly orthogonal to each other using a right-angle ruler or the like. Fixed by. The guide member 4 ensures a perpendicularity in two directions in which the movable base plate 2 moves. In the other guide members 5 to 7, two guide pieces are rotatably connected to each other by a pin 9.

Of the four guide members 4-7, one guide piece 4a-7a slidably engages with the linear guide groove 1a, 1b of the fixed base plate 1 and the other guide piece 4b-7.
It is arranged between the base plates 1 and 2 so that b is slidably engaged with the linear guide grooves 2a and 2b of the movable base plate 2.

At the time of assembling the cross motion mount according to the above-described embodiment, one guide piece 4a of the four guide members 4 to 7 is used.
~ 7a fixed guide plate 1 straight guide groove 1a, 1b
And the other guide pieces 4b to 7b are engaged with the linear guide grooves 2a and 2b of the movable base plate 2 to complete the assembly.

Next, the operation of the cross movement mount according to the embodiment will be described.

When the movable base plate 2 is moved in the X direction indicated by the arrow in FIG. 1 (direction along the linear guide grooves 1a, 1b), this movement causes the linear guide groove 2 of the movable base plate 2 to move.
a, 2b and the guide pieces 4b-7b of the respective guide members 4-7 are transmitted to the respective guide members 4-7 through the engaging portions, and the guide pieces 4b-
Since the guide pieces 4a to 7a connected to 7b slide in the linear guide grooves 1a and 1b of the fixed base plate 1, the movable base plate 2 moves in the X direction together with the four guide members 4 to 7.

When the movable base plate 2 is moved in the Y direction indicated by the arrow in FIG. 1 (direction along the linear guide grooves 2a, 2b), the guide members 4 to 7 are aligned with the guide pieces 4a to 7a and the fixed base plate 1. Since the movement in the Y direction is blocked by the engagement with the guide grooves 1a and 1b, the linear guide grooves 2a and 2b of the movable base plate 2 slide on the guide pieces 4a to 7a of the guide members 4 to 7. , Only the movable base plate 2 moves in the Y direction.

According to the cruciform stage according to the above-mentioned embodiment, the movable base plate 2 is guided by the guide means 3 having the four guide members 4 to 7 so as to be movable in the XY directions orthogonal to the fixed base plate 1. Therefore, only two base plates, the fixed base plate 1 and the movable base plate 2, are required as the base plates. As a result, FIG.
Compared to the conventional cross-moving stage shown in Fig. 1, the base plate is reduced by one, and the direction perpendicular to the XY directions (Z direction).
Dimension, that is, the dimension in the height direction of the stage becomes smaller,
The weight of the stage is reduced and the material is small. Therefore, the height of the stage itself is reduced, the weight of the stage is reduced, the material cost is reduced, and the manufacturing cost is reduced.

Further, since the height of the stage itself becomes low,
When using this cross-moving stage for a microscope or projector,
Measurement range in the direction perpendicular to the XY directions (measurement range in the Z direction)
Is expanded.

Further, according to the cross-moving stage according to the above embodiment, one of the guide pieces 4a to 7 of the four guide members 4 to 7 is provided.
a is in the linear guide grooves 1a and 1b of the fixed base plate 1,
The movable base plate 2 is fixed to the stationary base plate 1 by slidably engaging the other guide pieces 4b to 7b with the linear guide grooves 2a and 2b of the movable base plate 2, respectively.
On the other hand, since it is guided so as to be movable in the XY directions, it is not necessary to perform highly accurate processing such as a support structure using a race and steel balls. Therefore, the manufacturing is facilitated, which also reduces the manufacturing cost.

According to the above embodiment, one guide piece 4a-7a of each guide member 4-7 is engaged with the linear guide groove 1a, 1b of the fixed base plate 1, and the other guide piece 4 is engaged.
b to 7b, the linear guide grooves 2a, 2 of the movable base plate 2
Since the assembly is completed simply by engaging b, the assembly work is simplified. Therefore, the manufacturing is facilitated, which also reduces the manufacturing cost.

According to the above embodiment, the guide pieces 4a, 4b of one of the four guide members 4 are made orthogonal to each other and fixed by the screws 8 so that the movable base plate 2 moves. The perpendicularity of the direction can be ensured, and the two guide pieces of the other three guide members 5 to 7 are rotatably connected by the pin 9 to ensure the smooth movement of the movable base plate 2. You can

In the above embodiment, the guide member 4
Alternatively, the guide pieces 6a and 6b of the guide member 6 on a diagonal line with this member may be orthogonal to each other and fixed with screws. With this structure, the deflection of the movable base plate 2 is minimized, and the movable base plate 2 can be moved most accurately in the XY directions.

Further, in the above-described embodiment, the linear guide grooves 1 of the fixed base plate 1 and the movable base plate 2 are also provided.
The cross-sectional shape of a, 1b, 2a, 2b may be semicircular or trapezoidal instead of V-shaped. Further, the cross-sectional shape of the guide piece of each of the guide members 4 to 7 may be a trapezoidal shape or another shape instead of the semicircular shape. In addition, each linear guide groove 1a,
When the cross-sectional shape of 1b, 2a, 2b is V-shaped or trapezoidal and the cross-sectional shape of the guide pieces of each guide member 4-7 is semi-circular, the guide pieces of each guide member 4-7 are straight lines. Guide groove 1
The process for slidably engaging a, 1b, 2a, and 2b is the easiest.

When it is necessary to cut out the central portion of the movable base plate 2 as shown by the alternate long and short dash line in FIG. 1, for example, when the opening 10 for illumination is hollowed out on the cross-moving stage of the microscope, it is hollowed out. The four guide members 4 to 7 may be arranged around the opening 10.

Next, a cross movement mount according to another embodiment of the present invention shown in FIG. 2 will be described. In the description of this embodiment, the same parts as those in the above-mentioned one embodiment are designated by the same reference numerals, and the duplicated description will be omitted.

In the cross-moving stage according to this embodiment, the guide means 3 includes the linear guide grooves 1a, 1b, 2a, 2
The four spheres 20 slidably engaged with b and the flat plate 21 arranged between the two base plates 1 and 2 for holding the four spheres 20 at the four intersections of the two linear guide grooves 1a, 1b, 2a and 2b. It has and. Each sphere 20 is, for example, a steel ball.

The flat plate 21 has four holding holes 21a. The four holding holes 21a are the center 21a'-21 of each hole.
d'and the four intersections respectively match (in other words, the distance between the centers 21a 'and 21b' of the holes and the center 2 of the holes 2).
The distance between 1d 'and 21c' is equal to the distance between the grooves 1a and 1b, respectively, and the distance between the hole centers 21a 'and 21d' and the distance between the hole centers 21b 'and 21c' are respectively grooves 2a and 2b.
And the centers 21a 'of these four holes.
Four corners of a virtual quadrangle 22 connecting 21d 'are provided at right angles. 4 spheres 20
It is respectively held by one holding hole 21a. A small gap is provided between each holding hole 21a and each sphere 20 so that the sphere 20 held by engaging with the holding hole 21a can rotate in the holding hole 21a.

Further, the flat plate 21 may be provided with an illumination opening 10a corresponding to the opening 10.

When assembling the cross-moving stage according to this embodiment, the flat plate 21 is placed on the upper surface of the fixed base plate 1 and the four spheres are respectively engaged with the four holding holes 21a of the flat plate 21 and the fixed base plate. The assembly is completed by engaging the linear guide grooves 1a and 1b of No. 1 and engaging the linear guide grooves 2a and 2b of the movable base plate 2 with the four spherical bodies 20.

Next, the operation of the cross movement mount according to this embodiment will be described.

When the movable base plate 2 is moved in the X direction shown by the arrow in FIG. 2, this movement is transmitted to the four spherical bodies 20 through the linear guide grooves 2a and 2b of the movable base plate 2 and held by the flat plate 21. Since the spherical body 20 rolls in the linear guide grooves 1a and 1b of the fixed base plate 1, the movable base plate 2 moves in the X direction together with the four spherical bodies 20 and the flat plate 21.

When the movable base plate 2 is moved in the Y direction shown by the arrow in FIG. 2, the four spherical bodies 20 which are prevented from moving in the Y direction by the engagement with the linear guide grooves 1a and 1b of the fixed base plate 1 are linearly guided. Since it rotates in the grooves 1a and 1b, the linear guide grooves 2a and 2b of the movable base plate 2 slide on the four rotating spherical bodies 20, and only the movable base plate 2 moves in the Y direction. According to the other embodiment, the movable base plate 2 is supported by the guide means 3 having the four spheres 20 so as to be movable in the XY directions with respect to the fixed base plate 1, so that the fixed base plate 1 and the movable base plate are used as the base plate. Two
Only two sheets are required. As a result, as compared with the conventional cross motion stage shown in FIG. 3, the size in the direction (Z direction) perpendicular to the XY directions, that is, the size in the height direction of the stage is reduced by one base plate. It is smaller, reduces the weight of the stage, and requires less material. Therefore, the height of the stage itself is reduced, the weight of the stage is reduced, the material cost is reduced, and the manufacturing cost is reduced.

Further, since the height of the stage itself becomes low,
When using this cross-moving stage for a microscope or projector,
Measurement range in the direction perpendicular to the XY directions (measurement range in the Z direction)
Is expanded.

According to another embodiment, the flat plate 21
Four spheres 20 held by the four holding holes 21a of
Is slidably engaged with the two linear guide grooves 1a, 1b, 2a, 2b, the movable base plate 2 is guided so as to be movable in the XY directions with respect to the fixed base plate 1, so that the race and the steel ball It does not require high-precision machining like the supporting structure used. Therefore, the manufacturing is facilitated, which also reduces the manufacturing cost.

According to another embodiment, the flat plate 21
Is mounted on the upper surface of the fixed base plate 1, and the four spheres are engaged with the four holding holes 21a of the flat plate 21 and the linear guide grooves 1a and 1b of the fixed base plate 1, respectively. Since the assembly is completed simply by engaging the linear guide grooves 2a, 2b of, the assembly work is simplified.

Further, according to the other embodiment described above, the four holding holes 21a are aligned with the center points 21a 'to 21d' of the holes and the four intersection points, respectively, and the center points 2 of these four holes are arranged.
By providing the four corners of the virtual quadrangle 22 connecting 1a ′ to 21d ′ at right angles, it is possible to secure the perpendicularity in the XY directions in which the movable base plate 2 moves.

[0047]

As described above, according to the cross movement mount according to the first aspect of the invention, the movable base plate is guided by the guide means so as to be movable in two directions orthogonal to the fixed base plate. Since there are only two base plates, a fixed base plate and a movable base plate, the size in the direction perpendicular to the two directions orthogonal to each other, that is, the size in the height direction of the stage, is reduced by the reduction of one base plate. , The weight of the stage is reduced,
Also, it requires less material. Therefore, the height of the stage itself can be reduced, the weight of the stage can be reduced, the material cost can be reduced, and the manufacturing cost can be reduced.

According to the cruciform stage according to the invention as defined in claim 2, since it is not necessary to carry out highly precise processing such as a supporting structure using a race and steel balls, the manufacturing is facilitated and the manufacturing cost is reduced. In addition, since the assembling work is simplified, the manufacturing cost can be reduced.

According to the cross movement mount of the third aspect of the present invention, at least one of the two guide pieces is fixed so as to be orthogonal to each other.
It is possible to secure perpendicularity in two orthogonal directions by one guide member, and it is possible to secure smooth movement of the movable base plate by another guide member that rotatably connects the two guide pieces.

According to the fourth aspect of the present invention, since it is not necessary to carry out highly precise processing such as a supporting structure using a race and steel balls, the manufacturing is facilitated and the manufacturing cost is reduced. In addition, since the assembling work is simplified, the manufacturing cost can be reduced.

According to the fifth aspect of the present invention, the perpendicular movements in the two orthogonal directions can be ensured by the four holding holes of the flat plate, and the smooth movement of the movable base plate can be prevented by four. It can be secured by rolling the sphere.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a cross movement mount according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view showing a cross movement mount according to another embodiment of the present invention.

FIG. 3 is a perspective view showing a conventional cross motion mount.

[Explanation of symbols]

1 fixed base plate 1a, 1b linear guide groove (first linear guide groove) 2 movable base plate 2a, 2b linear guide groove (second linear guide groove) 3 guide means 4 to 7 guide members 4a, 4b, 5a, 5b, 6a, 6b, 7a, 7b Guide piece 20 Sphere (guide member) 21 Flat plate (holding member) 21a Holding hole 21a'-21d 'Center of hole

Claims (5)

[Claims] 1. A fixed base plate having two parallel first linear guide grooves and two parallel second linear guide grooves, and the two linear guide grooves are arranged so as to be orthogonal to each other. Movable guide plate and four guide members that engage with the linear guide grooves at the intersections of the linear guide grooves. The movable base plate moves in one of two orthogonal directions and the other guide member moves. In the direction, there is provided a movable cross plate and guide means for guiding the movable base plate so that the four guide members move together. 2. The guide means comprises four guide members having two guide pieces connected in a cross shape, and one guide piece of each guide member is slidably engaged with the first linear guide groove. And the other guide piece is arranged so as to slidably engage with the second linear guide groove. 3. At least one of the four guide members is fixed such that the two guide pieces are orthogonal to each other, and another guide member connects the two guide pieces so as to be rotatable with respect to each other. The cross motion stage according to claim 2, characterized in that there is. 4. The guide means includes four spheres as the guide member, which slidably engage with the linear guide grooves.
The cross movement mount according to claim 1, further comprising: a holding member which is disposed between the both base plates and holds the four spheres at four intersections of the two linear guide grooves. 5. The holding member is a flat plate having four holding holes, and each of the four holding holes is a virtual quadrangle in which the center of the hole and the four intersections are coincident with each other and which connect the four centers. 5. The cross movement mount according to claim 4, wherein the four corners are provided at right angles, and the four spheres are held in the four holding holes, respectively.