JPH08201399A - Inching mechanism - Google Patents
Inching mechanismInfo
- Publication number
- JPH08201399A JPH08201399A JP7007468A JP746895A JPH08201399A JP H08201399 A JPH08201399 A JP H08201399A JP 7007468 A JP7007468 A JP 7007468A JP 746895 A JP746895 A JP 746895A JP H08201399 A JPH08201399 A JP H08201399A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- piezoelectric
- movement mechanism
- fine movement
- counter electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、極めて微小な変位を発
生させる微動機構に関し、特に走査型プローブ顕微鏡に
好適な微動機構に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fine movement mechanism for generating extremely small displacements, and particularly to a fine movement mechanism suitable for a scanning probe microscope.
【０００２】[0002]
【従来の技術】μｍオーダの微小な変位を発生させる微
動機構は種々の装置で使用される。このような装置の一
例として、走査型プローブ顕微鏡が挙げられる。走査型
プローブ顕微鏡には、検出物理量によりトンネル顕微
鏡、原子間力顕微鏡、磁気力顕微鏡等があり、原子オー
ダの測定分解能を有し、各種被検体の形状計測等の各種
分野に適用されている。これらのうち、原子間力顕微鏡
を図により説明する。2. Description of the Related Art A fine movement mechanism for generating a fine displacement on the order of μm is used in various devices. An example of such a device is a scanning probe microscope. The scanning probe microscope includes tunnel microscopes, atomic force microscopes, magnetic force microscopes, and the like depending on the detected physical quantity, has a measurement resolution of atomic order, and is applied to various fields such as shape measurement of various objects. Of these, the atomic force microscope will be described with reference to the drawings.
【０００３】図９は原子間力顕微鏡の側面図、図１０は
図９に示す線Ｘ−Ｘに沿う断面図である。各図で、Ｘ、
Ｙ、Ｚは座標軸を示す。１は微動機構であり、この微動
機構１は、円筒形状の圧電体２およびこの圧電体２に貼
着、蒸着等により配置された複数の電極で構成されてい
る。これら電極のうち、電極３Ｘ1 、３Ｘ2 は圧電体２
の上部においてＸ軸方向に対向して配置された対向電
極、電極３Ｘ3 、３Ｘ4は圧電体２の下部においてＸ軸
方向に対向して配置された対向電極、電極３Ｙ1、３Ｙ2
は圧電体２の上部においてＹ軸方向に対向して配置さ
れた対向電極、電極３Ｙ3 、３Ｙ4 は圧電体２の下部に
おいてＹ軸方向に対向して配置された対向電極、３Ｚは
圧電体２の中間においてその全周に配置された電極であ
る。図２に明らかなように、圧電体２の内面全周には共
通電極３Ｃが配置されている。このような微動機構１は
例えば特開平２−２６６２０１号公報等で開示されてい
る。FIG. 9 is a side view of the atomic force microscope, and FIG. 10 is a sectional view taken along line XX shown in FIG. In each figure, X,
Y and Z indicate coordinate axes. Reference numeral 1 denotes a fine movement mechanism. The fine movement mechanism 1 is composed of a cylindrical piezoelectric body 2 and a plurality of electrodes arranged on the piezoelectric body 2 by sticking, vapor deposition or the like. Of these electrodes, the electrodes 3X 1 and 3X 2 are the piezoelectric body 2
Counter electrodes and electrodes 3X 3 and 3X 4 that are arranged to face each other in the X-axis direction in the upper part of the electrode, and counter electrodes 3Y 1 and 3Y 2 that are arranged to face the X-axis direction in the lower part of the piezoelectric body 2.
Is a counter electrode arranged in the upper part of the piezoelectric body 2 so as to face it in the Y-axis direction, electrodes 3Y 3 and 3Y 4 are counter electrodes arranged in the lower part of the piezoelectric body 2 so as to face the Y-axis direction, and 3Z is a piezoelectric body. In the middle of 2, the electrodes are arranged around the entire circumference. As is apparent from FIG. 2, the common electrode 3C is arranged on the entire circumference of the inner surface of the piezoelectric body 2. Such a fine movement mechanism 1 is disclosed in, for example, Japanese Patent Laid-Open No. 2-266201.
【０００４】４はカンチレバー、５はカンチレバー４の
先端に固定された探針、６はカンチレバー４を微動機構
１の端部に固定する固定部材である。７はこの原子間力
顕微鏡の測定対象である被検体を示し、その表面形状が
測定される。８はレーザ発信機、９は光検出器であり、
図に二点鎖線で示すように、レーザ発信機８からのレー
ザ光をカンチレバー４での背面に反射させ、その反射光
を光検出器９で検出する。Reference numeral 4 is a cantilever, 5 is a probe fixed to the tip of the cantilever 4, and 6 is a fixing member for fixing the cantilever 4 to the end of the fine movement mechanism 1. Reference numeral 7 denotes an object to be measured by this atomic force microscope, the surface shape of which is measured. 8 is a laser transmitter, 9 is a photodetector,
As shown by the chain double-dashed line in the figure, the laser light from the laser oscillator 8 is reflected on the back surface of the cantilever 4, and the reflected light is detected by the photodetector 9.
【０００５】上記の構成において、圧電体２は、＋極性
の電圧を印加すると伸長し、−極性の電圧を印加すると
縮む。そこで、微動機構１の共通電極３Ｃを０Ｖとし、
電極３Ｘ1 に＋ＥＶ、電極３Ｘ2 に−ＥＶ、電極３Ｘ3
に−ＥＶ、電極３Ｘ4 に＋ＥＶを印加すると、圧電体２
は図９に破線で示すように変形する。この結果、探針５
はＸ軸方向に距離ｘだけ変位する。通常、微動機構の寸
法は数１０ｍｍ、変位は数μｍ〜１００μｍの領域であ
り、図示破線の変形は誇張して描かれている。In the above structure, the piezoelectric body 2 expands when a positive polarity voltage is applied, and contracts when a negative polarity voltage is applied. Therefore, the common electrode 3C of the fine movement mechanism 1 is set to 0V,
Electrode 3X 1 + EV, Electrode 3X 2 -EV, Electrode 3X 3
The -EV, by applying a + EV to the electrode 3X 4, the piezoelectric body 2
Deforms as shown by the broken line in FIG. As a result, the probe 5
Is displaced by a distance x in the X-axis direction. Usually, the size of the fine movement mechanism is several tens of mm, the displacement is in the region of several μm to 100 μm, and the deformation of the broken line in the drawing is exaggerated.
【０００６】上記の構成においては、上側の対向電極と
下側の対向電極の極性を逆にして圧電体２の上部と下部
の変形モードを逆にすることにより、探針５の平行な変
位が可能となる。Ｙ軸方向の変位についても電極３Ｙ1
〜３Ｙ4 に対して同様な電圧を印加することにより同様
に変位を行うことができる。上記各電極の電圧の大きさ
を変化させることにより、探針５のＸ、Ｙ軸方向の走査
を正確に行うことができる。なお、電極３Ｚに電圧を印
加すると、その電圧に応じて圧電体２がＺ軸方向に伸縮
する。In the above structure, the polarities of the upper and lower counter electrodes are reversed and the deformation modes of the upper and lower portions of the piezoelectric body 2 are reversed, whereby the parallel displacement of the probe 5 is caused. It will be possible. For displacement in the Y-axis direction, electrode 3Y 1
It is possible to perform displacement in the same manner by applying the same voltage to ~3Y 4. By changing the magnitude of the voltage of each electrode, scanning of the probe 5 in the X and Y axis directions can be performed accurately. When a voltage is applied to the electrode 3Z, the piezoelectric body 2 expands and contracts in the Z-axis direction according to the voltage.
【０００７】上記の手段を用いた走査の間、探針５と被
検体７との間に原子間力が作用すると、カンチレバー４
にたわみを生じ、このたわみの量はレーザ発信機８およ
び光検出器９により検出される。ここで、当該走査の
間、カンチレバー４の上記たわみの量を一定に保持する
ように電極３Ｚの電圧を制御して圧電体２を伸縮させる
と、この伸縮量（電圧）が被検体７の表面形状を表すこ
とになり、その測定ができる。このような測定におい
て、仮に、Ｘ、Ｙ軸方向の走査を圧電体２の上部のみ又
は下部のみの変形で行うと、図に一点鎖線の矢印Ａで示
すように探針５に円弧運動が生じ、Ｘ軸、Ｙ軸方向に平
行な走査ができなくなり、被検体７の表面形状の高精度
の測定を行うことができなくなる。When an atomic force acts between the probe 5 and the subject 7 during scanning using the above means, the cantilever 4
Bending is generated, and the amount of this bending is detected by the laser transmitter 8 and the photodetector 9. Here, when the piezoelectric body 2 is expanded / contracted by controlling the voltage of the electrode 3Z so as to keep the amount of the deflection of the cantilever 4 constant during the scanning, this expansion / contraction amount (voltage) is the surface of the subject 7. It represents the shape and can measure it. In such a measurement, if scanning in the X and Y axis directions is performed by deforming only the upper part or only the lower part of the piezoelectric body 2, an arc motion of the probe 5 occurs as shown by a dashed line arrow A in the figure. , It becomes impossible to perform scanning parallel to the X-axis and Y-axis directions, and the surface shape of the subject 7 cannot be measured with high accuracy.
【０００８】[0008]
【発明が解決しようとする課題】上記原子間力顕微鏡だ
けでなく、その他の走査型プローブ顕微鏡や他の装置に
おいて微動機構に要求される機能は、（１）軸間干渉が
ない正確な変位が可能であり、（２）微動機構自体の寸
法が小さく、しかも充分なストロークが確保でき、
（３）剛性が高く高速応答が可能であることである。Not only the atomic force microscope but also other scanning probe microscopes and other devices are required to have a function required for a fine movement mechanism. (2) The size of the fine movement mechanism itself is small, and a sufficient stroke can be secured,
(3) High rigidity and high-speed response are possible.
【０００９】ここで、図９、１０に示す装置についてみ
ると、この装置は上記（１）の機能は満たしているもの
の、上記（２）、（３）の機能に対しては満足し得るも
のではない。即ち、被検体７には可成り大きな凹凸（段
差）を有するものがあり、このような被検体７の測定の
場合には、相当大きなＺ軸方向のストロークが必要であ
る。このためには、Ｚ軸方向の伸縮を行う電極３Ｚの長
さＬZ を長くすればよいが、長さＬZ を長くすると全体
の寸法Ｌが大きくなり、その微動機構を装着する装置の
小型化も困難になり、しかも、長さＬが長くなることに
より微動機構の剛性も低下することとなる。Referring to the apparatus shown in FIGS. 9 and 10, the apparatus satisfies the function (1) above, but can satisfy the functions (2) and (3) above. is not. That is, there are some objects 7 having considerably large irregularities (steps), and in the case of measuring such an object 7, a considerably large Z-axis direction stroke is required. For this purpose, the length L Z of the electrode 3Z that expands and contracts in the Z-axis direction may be lengthened, but if the length L Z is lengthened, the overall dimension L becomes large, and the device for mounting the fine movement mechanism is small in size. Also, it becomes difficult to realize this, and the rigidity of the fine movement mechanism is also lowered due to the length L being increased.
【００１０】本発明の目的は、上記従来技術における課
題を解決し、全体の寸法を小さくすることができ、しか
も充分なストロークを確保することができる微動機構を
提供することにある。An object of the present invention is to solve the above-mentioned problems in the prior art and to provide a fine movement mechanism capable of reducing the overall size and ensuring a sufficient stroke.
【００１１】[0011]
【課題を解決するための手段】上記の目的を達成するた
め、本発明は、圧電体に複数の電極を配置し、これら電
極に選択的に所定の電圧を印加することにより前記圧電
素子の自由端を任意方向に任意量変位させる微動機構に
おいて、前記圧電体を、径が異なる少なくとも２つの中
空の筒体で構成し、これら径が異なる各圧電体を、それ
らの少なくとも一部が径方向において互いに重なる状態
で順次連結するとともに、各圧電体に所要の電極を配置
したことを特徴とする。In order to achieve the above-mentioned object, the present invention provides a piezoelectric element having a plurality of electrodes arranged thereon and selectively applying a predetermined voltage to the electrodes, thereby freeing the piezoelectric element. In a fine movement mechanism for displacing an end in an arbitrary amount by an arbitrary amount, the piezoelectric body is composed of at least two hollow cylindrical bodies having different diameters, and at least a part of each of the piezoelectric bodies having different diameters is radially arranged. It is characterized in that the electrodes are sequentially connected in a state of being overlapped with each other, and a required electrode is arranged on each piezoelectric body.
【００１２】[0012]
【作用】筒体形状の径の大きな圧電体の内部に径の小さ
な圧電体を入れ込むことにより、それら圧電体をそれら
の径方向において重なりが生じるように配置し、内外の
圧電体を順次連結する。この構成により、圧電体の長さ
方向において同じストロークを得る場合には長さ方向の
寸法を小さくすることができ、同一寸法であればより大
きなストロークを得ることができる。[Function] By inserting a small-diameter piezoelectric body inside a cylindrical-shaped large-diameter piezoelectric body, the piezoelectric bodies are arranged so that they overlap in the radial direction, and the inner and outer piezoelectric bodies are sequentially connected. To do. With this configuration, when the same stroke is obtained in the length direction of the piezoelectric body, the dimension in the length direction can be reduced, and a larger stroke can be obtained with the same dimension.
【００１３】[0013]
【実施例】以下、本発明を図示の実施例に基づいて説明
する。図１は本発明の第１の実施例に係る微動機構の側
面図、図２は図１に示す線II−IIに沿う断面図、図３は
図２に示す線III −III に示す断面図である。なお、図
２および図３は図１に対して拡大した寸法で描かれてい
る。これらの図で、Ｘ、Ｙ、Ｚは座標軸、４はカンチレ
バー、５は探針、６は被検体であり、これらは図９に示
すものと同じである。１１は微動機構、１６は微動機構
１１にカンチレバー４を固定する固定部材である。The present invention will be described below with reference to the illustrated embodiments. 1 is a side view of a fine movement mechanism according to a first embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II shown in FIG. 1, and FIG. 3 is a sectional view taken along line III-III shown in FIG. Is. 2 and 3 are drawn with enlarged dimensions with respect to FIG. In these figures, X, Y, and Z are coordinate axes, 4 is a cantilever, 5 is a probe, and 6 is a subject, which are the same as those shown in FIG. Reference numeral 11 is a fine movement mechanism, and 16 is a fixing member for fixing the cantilever 4 to the fine movement mechanism 11.
【００１４】微動機構１１は円筒形状の３つの圧電体と
それら各圧電体に配置された電極で構成されている。各
図で、１２ａは外側の圧電体、１２ｂは圧電体１２ａよ
り径が小さく、かつ、長さ方向の寸法も僅かに小さい圧
電体、１２ｃは圧電体１２ｂより径が小さく、かつ、長
さ方向の寸法は圧電体１２ａ、１２ｂよりはるかに大き
い圧電体である。圧電体１２ａの内側に圧電体１２ｂ
が、又、圧電体１２ｂの内側に圧電体１２ｃの上部が配
置され、圧電体１２ａの下端と圧電体１２ｂの下端とが
連結リングＲ1 で連結され、圧電体１２ｂの上端と圧電
体１２ｃの上端とが連結リングＲ2 で連結されている。
圧電体１２ａ、１２ｂ、および圧電体１２ｃの上部がそ
れらの径方向において重なることになる。The fine movement mechanism 11 is composed of three cylindrical piezoelectric bodies and electrodes arranged on the respective piezoelectric bodies. In each figure, 12a is an outer piezoelectric body, 12b is a piezoelectric body having a diameter smaller than that of the piezoelectric body 12a, and a dimension in the lengthwise direction is slightly smaller. 12c is a diameter smaller than that of the piezoelectric body 12b and is in the lengthwise direction. Is much larger than the piezoelectric bodies 12a and 12b. Inside the piezoelectric body 12a, the piezoelectric body 12b
However, the upper part of the piezoelectric body 12c is arranged inside the piezoelectric body 12b, the lower end of the piezoelectric body 12a and the lower end of the piezoelectric body 12b are connected by a connecting ring R 1 , and the upper end of the piezoelectric body 12b and the piezoelectric body 12c. The upper end is connected by a connecting ring R 2 .
The upper portions of the piezoelectric bodies 12a, 12b and the piezoelectric body 12c overlap in their radial direction.
【００１５】１３Ｃ1 、１３Ｃ2 、１３Ｃ3 は各圧電体
１２ａ、１２ｂ、１２ｃの内面に配置された共通電極で
ある。１３Ｘ1 、１３Ｘ2 は圧電体１２ａの表面に配置
されＸ軸方向において対向する対向電極、１３Ｙ1 、１
３Ｙ2 は圧電体１２ａの表面に配置されＹ軸方向におい
て対向する対向電極である。１３Ｚ1 は圧電体１２ｂの
表面に配置されたＺ軸方向の伸縮を行う伸縮電極、１３
Ｚ2 は圧電体１２ｃの上部の表面に配置されたＺ軸方向
の伸縮を行う伸縮電極である。１３Ｘ3 、１３Ｘ4 は圧
電体１２ａの下部の表面に配置されＸ軸方向において対
向する対向電極、１３Ｙ3 、１３Ｙ4 は圧電体１２ａの
下部の表面に配置されＹ軸方向において対向する対向電
極である。13C 1 , 13C 2 and 13C 3 are common electrodes arranged on the inner surfaces of the piezoelectric bodies 12a, 12b and 12c. 13X 1 and 13X 2 are counter electrodes arranged on the surface of the piezoelectric body 12a and facing each other in the X-axis direction, 13Y 1 and 1
3Y 2 is a counter electrode arranged on the surface of the piezoelectric body 12a and facing each other in the Y-axis direction. 13Z 1 is a stretchable electrode arranged on the surface of the piezoelectric body 12b to stretch and shrink in the Z-axis direction, 13Z 1
Z 2 is an expansion / contraction electrode arranged on the surface of the upper portion of the piezoelectric body 12c to expand / contract in the Z-axis direction. 13X 3 and 13X 4 are counter electrodes arranged on the lower surface of the piezoelectric body 12a and facing each other in the X-axis direction, and 13Y 3 and 13Y 4 are counter electrodes arranged on the lower surface of the piezoelectric body 12a and facing each other in the Y-axis direction. is there.
【００１６】次に、上記微動機構１１の動作を図４を参
照しながら説明する。図４は各圧電体１２ａ〜１２ｃの
変形を示す図であり、これら圧電体のみが線で描かれ、
変形は誇張して描かれている。さきに述べた従来例と同
じく、共通電極１３Ｃ1 、１３Ｃ2 、１３Ｃ3 を０Ｖと
し、電極１３Ｘ1 に＋ＥＶ、電極１３Ｘ2 に−ＥＶ、
又、電極１３Ｘ3 に−ＥＶ、電極１３Ｘ4 に＋ＥＶをそ
れぞれ印加すると、圧電体１２ａ、１２ｃは図４に示す
ように変形する。Next, the operation of the fine movement mechanism 11 will be described with reference to FIG. FIG. 4 is a diagram showing the deformation of each piezoelectric body 12a to 12c, and only these piezoelectric bodies are drawn by lines,
The transformation is exaggerated. As in the conventional example described above, the common electrodes 13C 1 , 13C 2 and 13C 3 are set to 0V, the electrode 13X 1 is + EV, the electrode 13X 2 is −EV,
Further, -EV the electrode 13X 3, when a + EV to electrode 13X 4 respectively applied, the piezoelectric 12a, 12c is deformed as shown in FIG.
【００１７】一方、電極１３Ｚ1 に対して圧電体１２ｂ
を縮める方向に電圧を印加し、同時に、電極１３Ｚ2 に
対して圧電体１２ｂを伸長する方向に電圧を印加する
と、圧電体１２ｂの縮みにより圧電体１２ｃはＺ軸方向
（下方）に変位し、さらに圧電体１２ｃの伸長により当
該圧電体１２ｃはＺ軸方向（下方）に変位する。即ち、
２つのＺ軸方向（下方）への変位が加算されることにな
り、当該方向へのストロークは大きくなる。On the other hand, the piezoelectric body 12b is connected to the electrode 13Z 1 .
When a voltage is applied in a direction that contracts the piezoelectric body 12b to the electrode 13Z 2 at the same time, a contraction of the piezoelectric body 12b causes the piezoelectric body 12c to be displaced in the Z-axis direction (downward), Further, due to the extension of the piezoelectric body 12c, the piezoelectric body 12c is displaced in the Z-axis direction (downward). That is,
The displacements in the two Z-axis directions (downward) are added, and the stroke in that direction becomes large.
【００１８】このように、本実施例では、微動機構を径
の異なる３つの円筒形状の圧電体を径方向で重ねた状態
で連結したので、従来の微動機構に比較してほぼＺ軸電
極の寸法分だけ長さ方向の寸法を短くすることができ、
しかも、Ｚ軸方向のストロークを大きくすることがで
き、これにより、この微動機構を用いる装置を小型化す
ることができ、かつ、これをプローブ顕微鏡に用いた場
合には、大きな段差を有する被検体の測定にも対応する
ことができる。As described above, in this embodiment, since the fine movement mechanism is connected in the state where three cylindrical piezoelectric bodies having different diameters are overlapped in the radial direction, the fine movement mechanism has substantially the same Z-axis electrode as that of the conventional fine movement mechanism. The dimension in the length direction can be shortened by the dimension,
Moreover, the stroke in the Z-axis direction can be increased, whereby the device using this fine movement mechanism can be downsized, and when this is used in a probe microscope, an object having a large step difference can be obtained. Can also be used for measurement.
【００１９】図５は本発明の第２の実施例に係る微動機
構の側面図である。この図で、４はカンチレバー、５は
探針であり、図１に示すものと同じである。２１は本実
施例の微動機構を示す。微動機構２１は３つの円筒形状
の圧電体２２ａ、２２ｂ、２２ｃおよびそれら圧電体に
配置された各電極で構成されている。圧電体２２ａと圧
電体２２ｃは同一の内外径を有し、圧電体２２ｃは圧電
体２２ａの上方に配置されている。圧電体２２ｂは圧電
体２２ａ、２２ｃの内径より小さな外径寸法に構成さ
れ、圧電体２２ａおよび圧電体２２ｃの内部に配置され
ている。圧電体２２ａの上端は固定部に固定され、圧電
体２２ｃの下端には固定部材２６を介してカンチレバー
４が固定されている。内部の圧電体２２ｂの下端は圧電
体２２ａの下端に、上端は圧電体２２ｃの上端に固定さ
れている。このような構成は、後述する図６で、より明
瞭に示される。FIG. 5 is a side view of the fine movement mechanism according to the second embodiment of the present invention. In this figure, 4 is a cantilever and 5 is a probe, which is the same as that shown in FIG. Reference numeral 21 denotes the fine movement mechanism of this embodiment. The fine movement mechanism 21 is composed of three cylindrical piezoelectric bodies 22a, 22b, 22c and electrodes arranged on these piezoelectric bodies. The piezoelectric body 22a and the piezoelectric body 22c have the same inner and outer diameters, and the piezoelectric body 22c is arranged above the piezoelectric body 22a. The piezoelectric body 22b has an outer diameter dimension smaller than the inner diameters of the piezoelectric bodies 22a and 22c, and is arranged inside the piezoelectric bodies 22a and 22c. The upper end of the piezoelectric body 22a is fixed to the fixing portion, and the cantilever 4 is fixed to the lower end of the piezoelectric body 22c via a fixing member 26. The lower end of the piezoelectric body 22b inside is fixed to the lower end of the piezoelectric body 22a, and the upper end is fixed to the upper end of the piezoelectric body 22c. Such a configuration is shown more clearly in FIG. 6 described below.
【００２０】さきの実施例と同じく、各圧電体２２ａ、
２２ｂ、２２ｃの内面には共通電極が配置されている。
２３Ｘ1 、２３Ｘ2 は圧電体２２ａの表面に配置されＸ
軸方向において対向する対向電極、２３Ｙ1 、２３Ｙ2
は圧電体２２ａの表面に配置されＹ軸方向において対向
する対向電極である（電極２３Ｙ2 は図面には現れてい
ない）。２３Ｘ3 、２３Ｘ4 は圧電体２２ｃの表面に配
置されＸ軸方向において対向する対向電極、２３Ｙ3 、
２３Ｙ4 は圧電体２２ｃの表面に配置されＹ軸方向にお
いて対向する対向電極である（電極２３Ｙ2 は図面には
現れていない）。又、図には現れないが圧電体２２ｂの
表面にはＺ軸方向の伸縮を行う伸縮電極が配置されてい
る。これら各電極に、さきの実施例と同じく選択的に所
定の電圧を印加することにより、微動機構２１に任意の
変位を発生させることができるのは明らかである。この
変位の一発生形態を図６に示す。As in the previous embodiment, each piezoelectric body 22a,
A common electrode is arranged on the inner surfaces of 22b and 22c.
23X 1 and 23X 2 are arranged on the surface of the piezoelectric body 22a and X
Counter electrodes 23Y 1 and 23Y 2 that face each other in the axial direction
Are counter electrodes arranged on the surface of the piezoelectric body 22a and facing each other in the Y-axis direction (the electrode 23Y 2 is not shown in the drawing). 23X 3 , 23X 4 are counter electrodes arranged on the surface of the piezoelectric body 22c and facing each other in the X-axis direction, 23Y 3 ,
Reference numeral 23Y 4 is a counter electrode arranged on the surface of the piezoelectric body 22c and facing in the Y-axis direction (the electrode 23Y 2 is not shown in the drawing). Further, although not shown in the figure, an expansion / contraction electrode for expanding / contracting in the Z-axis direction is arranged on the surface of the piezoelectric body 22b. Obviously, it is possible to generate an arbitrary displacement in the fine movement mechanism 21 by selectively applying a predetermined voltage to each of these electrodes as in the previous embodiment. One form of this displacement is shown in FIG.
【００２１】図６は微動機構２１のＸ軸方向の変位発生
時の各圧電体２２ａ〜２２ｃの変形を示す図であり、こ
れら圧電体のみが線で描かれ、変形は誇張して描かれて
いる。この図で、Ｒ3 は圧電体２２ａの下端と圧電体２
２ｂの下端を連結する連結リング、Ｒ4 は圧電体２２ｂ
の上端と圧電体２２ｃの上端を連結する連結リングであ
る。又、ｘは図示の変位における変位量を示す。FIG. 6 is a diagram showing the deformation of the piezoelectric bodies 22a to 22c when the displacement of the fine movement mechanism 21 in the X-axis direction occurs. Only these piezoelectric bodies are drawn by lines, and the deformation is exaggerated. There is. In this figure, R 3 is the lower end of the piezoelectric body 22a and the piezoelectric body 2a.
A connecting ring for connecting the lower ends of 2b, R 4 is a piezoelectric body 22b
Is a connecting ring that connects the upper end of the piezoelectric body 22c and the upper end of the piezoelectric body 22c. Further, x represents the displacement amount in the illustrated displacement.
【００２２】このように、本実施例でもＺ軸方向の変位
を行う圧電体を、Ｘ、Ｙ軸方向の変位を行う圧電体の内
部に配置したので、さきの実施例と同じく、微動機構の
長さ方向の寸法を小さくすることができるとともに、Ｚ
軸方向の変位を行う圧電体の長さを大きくすることがで
きるので、Ｚ軸方向のストロークを大きくすることがで
きる。As described above, in this embodiment as well, since the piezoelectric body which is displaced in the Z-axis direction is arranged inside the piezoelectric body which is displaced in the X- and Y-axis directions, the fine movement mechanism of the same manner as in the previous embodiment is used. The size in the length direction can be reduced and Z
Since the length of the piezoelectric body that is displaced in the axial direction can be increased, the stroke in the Z-axis direction can be increased.
【００２３】さらに本実施例は、さきの実施例に比較し
て次のような効果を有する。即ち、円筒型の圧電体にお
いて、その軸方向と直交する方向の変位は、円筒の直径
と厚さに依存するので、さきの実施例のように異なる径
の圧電体を用いた場合には印加電圧に対する変位量の調
整を必要とするが、本実施例では、軸方向と直交する方
向の変位に寄与する各圧電体は同一径であるので、上記
の調整は大幅に簡素化されるという効果を奏する。Further, this embodiment has the following effects as compared with the previous embodiment. That is, in the cylindrical piezoelectric body, the displacement in the direction orthogonal to the axial direction depends on the diameter and thickness of the cylinder, and therefore when a piezoelectric body having a different diameter is used as in the previous embodiment, it is applied. Although it is necessary to adjust the amount of displacement with respect to the voltage, in the present embodiment, since the piezoelectric bodies that contribute to the displacement in the direction orthogonal to the axial direction have the same diameter, the above-described adjustment is greatly simplified. Play.
【００２４】図７は本発明の第３の実施例に係る微動機
構の断面図である。この図で、４はカンチレバー、５は
探針であり、図１に示すものと同じである。３１は本実
施例の微動機構を示す。微動機構２１は２つの円筒形状
の圧電体３２ａ（Ｚ）、３２ｂ（ＸＹ）およびそれら圧
電体に配置された各電極で構成されている。圧電体３２
ａ（Ｚ）の径は圧電体３２ｂ（ＸＹ）の径より小さく、
その下部が圧電体３２ｂ（ＸＹ）の内部に配置され、両
者はそれらの下端で連結リングＲ5 により連結されてい
る。圧電体３２ａ（Ｚ）の上端は固定部に固定されてい
る。４０は圧電体３２ｂ（ＸＹ）の径より大きな径を有
する円筒形状の構造体であり、その上端は連結リングＲ
6 により圧電体３２ｂ（ＸＹ）の上端と連結され、下端
には固定部材３６を介してカンチレバー４が固定されて
いる。FIG. 7 is a sectional view of a fine movement mechanism according to the third embodiment of the present invention. In this figure, 4 is a cantilever and 5 is a probe, which is the same as that shown in FIG. Reference numeral 31 denotes a fine movement mechanism of this embodiment. The fine movement mechanism 21 is composed of two cylindrical piezoelectric bodies 32a (Z) and 32b (XY) and respective electrodes arranged on these piezoelectric bodies. Piezoelectric body 32
The diameter of a (Z) is smaller than the diameter of the piezoelectric body 32b (XY),
The lower part thereof is arranged inside the piezoelectric body 32b (XY), and the two are connected at their lower ends by a connecting ring R 5 . The upper end of the piezoelectric body 32a (Z) is fixed to the fixed portion. Reference numeral 40 is a cylindrical structure having a diameter larger than that of the piezoelectric body 32b (XY), the upper end of which is a connecting ring R
It is connected to the upper end of the piezoelectric body 32b (XY) by 6 and the cantilever 4 is fixed to the lower end via a fixing member 36.
【００２５】圧電体３２ａ（Ｚ）、３２ｂ（ＸＹ）の内
面にはそれぞれ共通電極が配置され、圧電体３２ａ
（Ｚ）の外面全周にはＺ軸方向の伸縮を行う伸縮電極が
配置され、圧電体３２ｂ（ＸＹ）の外面にはＸ軸方向に
おいて対向する対向電極およびＹ軸方向において対向す
る対向電極が配置されているが、これら電極の配置はさ
きの各実施例に準じるので、その図示は省略する。図８
は微動機構３１の変位発生時の圧電体３２ｂ（ＸＹ）の
変形を示す図であり、各圧電体のみが線で描かれ、変形
は誇張して描かれている。A common electrode is arranged on each of the inner surfaces of the piezoelectric bodies 32a (Z) and 32b (XY).
An expandable electrode that expands and contracts in the Z-axis direction is arranged all around the outer surface of (Z), and a counter electrode facing in the X-axis direction and a counter electrode facing in the Y-axis direction are provided on the outer surface of the piezoelectric body 32b (XY). Although the electrodes are arranged, the arrangement of these electrodes is the same as that in each of the above-described embodiments, and therefore the illustration thereof is omitted. FIG.
FIG. 4 is a diagram showing deformation of the piezoelectric body 32b (XY) when displacement of the fine movement mechanism 31 occurs. Only the piezoelectric bodies are drawn by lines, and the deformation is exaggerated.
【００２６】本実施例もさきの各実施例と同様、微動機
構の長さ方向の寸法を小さくすることができ、かつ、さ
きの各実施例よりも全体構成が簡素である。なお、Ｘ、
Ｙ軸方向の変位を行う圧電体が１つのみであるので、当
該方向の変位特性が多少犠牲になるが、実際には圧電体
の変位が微小であるため、多くの場合、実用上支障は生
じないし、又、変位誤差が生じても適切な補正手段で補
正すればよい。Similar to each of the preceding embodiments, this embodiment can reduce the dimension of the fine movement mechanism in the lengthwise direction, and the overall structure is simpler than each of the preceding embodiments. Note that X,
Since there is only one piezoelectric body that displaces in the Y-axis direction, the displacement characteristics in that direction are somewhat sacrificed. Even if a displacement error does not occur, it may be corrected by an appropriate correction means.
【００２７】なお、上記各実施例の説明では、各圧電体
を円筒形状に構成する例について説明したが、円筒に限
ることはなく、他の形状の筒体であっても使用可能であ
る。又、圧電体の重なりの数を増加させれば、より大き
な変位量を得ることができるのは明らかである。In the description of each of the above embodiments, an example in which each piezoelectric body is formed in a cylindrical shape has been described. However, the shape is not limited to a cylinder, and a cylindrical body having another shape can be used. Further, it is obvious that a larger displacement amount can be obtained by increasing the number of overlapping piezoelectric bodies.
【００２８】[0028]
【発明の効果】以上述べたように、本発明では、変位を
行う圧電体を、径が異なる少なくとも２つの中空の筒体
で構成し、これら径が異なる各圧電体を、それらの少な
くとも一部がそれらの径方向において互いに重なる状態
で順次連結したので、各軸方向のストロークを確保しな
がら長さ方向の寸法を小さくすることができる。As described above, in the present invention, the piezoelectric body for displacement is composed of at least two hollow cylindrical bodies having different diameters, and at least a part of each of the piezoelectric bodies having different diameters is arranged. Since they are sequentially connected in a state of overlapping each other in the radial direction, it is possible to reduce the dimension in the length direction while ensuring the stroke in each axial direction.
【図１】本発明の第１の実施例に係る微動機構の側面図
である。FIG. 1 is a side view of a fine movement mechanism according to a first embodiment of the present invention.
【図２】図１に示す線II−IIに沿う断面図である。FIG. 2 is a sectional view taken along line II-II shown in FIG.
【図３】図２に示す線III −III に示す断面図である。FIG. 3 is a sectional view taken along line III-III shown in FIG.
【図４】図１に示す圧電体の変形を示す図である。FIG. 4 is a diagram showing a modification of the piezoelectric body shown in FIG.
【図５】本発明の第２の実施例に係る微動機構の側面図
である。FIG. 5 is a side view of a fine movement mechanism according to a second embodiment of the present invention.
【図６】図５に示す圧電体の変形を示す図である。6 is a diagram showing a modification of the piezoelectric body shown in FIG.
【図７】本発明の第３の実施例に係る微動機構の側面図
である。FIG. 7 is a side view of a fine movement mechanism according to a third embodiment of the present invention.
【図８】図７に示す圧電体の変形を示す図である。8 is a diagram showing a modification of the piezoelectric body shown in FIG.
【図９】従来のプローブ顕微鏡の側面図である。FIG. 9 is a side view of a conventional probe microscope.
【図１０】図９に示す線Ｘ−Ｘに沿う断面図である。10 is a cross-sectional view taken along line XX shown in FIG.
４ カンチレバー ５ 探針 １１ 微動機構 １２ａ、１２ｃ 圧電体 １３Ｘ1 〜１３Ｙ4 電極 １６ 固定部材4 cantilevers 5 probe 11 fine movement mechanism 12a, 12c piezoelectric 13X 1 ~13Y 4 electrode 16 fixed member
Claims (6)
極に選択的に所定の電圧を印加することにより前記圧電
素子の自由端を任意方向に任意量変位させる微動機構に
おいて、前記圧電体を、径が異なる少なくとも２つの中
空の筒体で構成し、これら径が異なる各圧電体を、それ
らの少なくとも一部が径方向において互いに重なる状態
で順次連結するとともに、各圧電体に所要の電極を配置
したことを特徴とする微動機構。1. A fine movement mechanism in which a plurality of electrodes are arranged on a piezoelectric body and a free end of the piezoelectric element is displaced by an arbitrary amount in an arbitrary direction by selectively applying a predetermined voltage to these electrodes, Is composed of at least two hollow cylindrical bodies having different diameters, and the piezoelectric bodies having different diameters are sequentially connected in a state where at least some of them overlap each other in the radial direction, and a required electrode is provided for each piezoelectric body. A fine movement mechanism characterized by having a.
は、径の大きな第１の圧電体と、径の小さな第２の圧電
体と、前記第１の圧電体と前記第２の圧電体との中間の
径を有する第３の圧電体とで構成され、前記所要の電極
は、前記第１の圧電体、前記第２の圧電体、および前記
第３の圧電体の内面にそれぞれ配置された共通電極、前
記第１の圧電体の外面に対向して配置されその筒体の径
方向の変位を与える第１の対向電極群、前記第２の圧電
体の外面全周およびこれに連結部を介して続く前記第３
の圧電体の一部の外面全周に配置されそれら筒体の径方
向と直交する方向の変位を与える伸縮電極、および前記
第３の圧電体の他部の外面に対向して配置されその筒体
の径方向の変位を与える第２の対向電極群であることを
特徴とする微動機構。2. The hollow cylindrical body according to claim 1, wherein each hollow cylindrical body has a first piezoelectric body having a large diameter, a second piezoelectric body having a small diameter, the first piezoelectric body and the second piezoelectric body. A third piezoelectric body having an intermediate diameter to the body, and the required electrodes are respectively arranged on the inner surfaces of the first piezoelectric body, the second piezoelectric body, and the third piezoelectric body. Common electrode, a first counter electrode group which is arranged so as to face the outer surface of the first piezoelectric body and gives a displacement in the radial direction of the cylindrical body, and the entire outer circumference of the second piezoelectric body and is connected thereto. The third that continues through the section
Expandable electrodes arranged on the entire outer circumference of a part of the piezoelectric body for giving displacement in a direction orthogonal to the radial direction of the cylindrical body, and the cylinder arranged so as to face the outer surface of the other part of the third piezoelectric body. A fine movement mechanism which is a second counter electrode group for giving a radial displacement of the body.
第１の圧電体と、この第１の圧電体より小さな径の第２
の圧電体と、この第２の圧電体より大きな径を有する第
３の圧電体とで構成され、前記所要の電極は、前記第１
の圧電体、前記第２の圧電体、および前記第３の圧電体
の内面にそれぞれ配置された共通電極、前記第１の圧電
体の外面に対向して配置されその筒体の径方向の変位を
与える第１の対向電極群、前記第２の圧電体の外面全周
に配置されそれら筒体の径方向と直交する方向の変位を
与える伸縮電極、および前記第３の圧電体の外面に対向
して配置されその筒体の径方向の変位を与える第２の対
向電極群であることを特徴とする微動機構。3. The hollow cylindrical body according to claim 1,
The first piezoelectric body and the second piezoelectric body having a diameter smaller than that of the first piezoelectric body
And a third piezoelectric body having a diameter larger than that of the second piezoelectric body, and the required electrode is the first piezoelectric body.
Of the piezoelectric body, the second piezoelectric body, and the common electrode respectively disposed on the inner surfaces of the third piezoelectric body, and the radial displacement of the cylindrical body disposed so as to face the outer surface of the first piezoelectric body. A first counter electrode group for providing the electric field, an expandable electrode arranged on the entire outer circumference of the second piezoelectric body for giving a displacement in a direction orthogonal to the radial direction of the cylindrical body, and facing the outer surface of the third piezoelectric body. A fine movement mechanism that is a second counter electrode group that is arranged in a manner to provide a radial displacement of the cylindrical body.
第１の圧電体と、この第１の圧電体より大きな径の第２
の圧電体とで構成され、前記所要の電極は、前記第１の
圧電体と前記第２の圧電体の内面にそれぞれ配置された
共通電極、前記第１の圧電体の外面全周に配置されその
筒体の径方向と直交する方向の変位を与える伸縮電極、
および前記第３の圧電体の外面に対向して配置されその
筒体の径方向の変位を与える対向電極群であることを特
徴とする微動機構。4. The hollow cylindrical body according to claim 1,
The first piezoelectric body and the second piezoelectric body having a diameter larger than that of the first piezoelectric body.
And the required electrodes are arranged on the entire circumference of the outer surface of the first piezoelectric body and the common electrodes arranged on the inner surfaces of the first piezoelectric body and the second piezoelectric body, respectively. A telescopic electrode that gives a displacement in a direction orthogonal to the radial direction of the cylindrical body,
And a group of opposed electrodes which are arranged so as to oppose the outer surface of the third piezoelectric body and which displace the cylindrical body in the radial direction.
いて、前記対向電極群は、それらが配置された筒体の軸
と直交する第１の軸方向において対向する第１の対向電
極と前記第１の軸と当該筒体の軸とに直交する第２の軸
方向において対向する第２の対向電極とで構成されるこ
とを特徴とする微動機構。5. The counter electrode group as claimed in claim 2, the counter electrode group, and the counter electrode group, which oppose each other in a first axial direction orthogonal to an axis of a cylindrical body in which the counter electrode group is arranged. A fine movement mechanism comprising a first counter electrode and a second counter electrode opposed in a second axis direction orthogonal to the axis of the tubular body.
極に印加する電圧の極性は、変更可能であることを特徴
とする微動機構。6. The fine movement mechanism according to claim 5, wherein the polarity of the voltage applied to each electrode of the counter electrode is changeable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007468A JPH08201399A (en) | 1995-01-20 | 1995-01-20 | Inching mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7007468A JPH08201399A (en) | 1995-01-20 | 1995-01-20 | Inching mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08201399A true JPH08201399A (en) | 1996-08-09 |
Family
ID=11666638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7007468A Pending JPH08201399A (en) | 1995-01-20 | 1995-01-20 | Inching mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08201399A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
| US6359329B1 (en) | 1998-09-04 | 2002-03-19 | Nec Corporation | Embedded wiring structure and method for forming the same |
| US20100306885A1 (en) * | 2006-08-15 | 2010-12-02 | Georgia Tech Research Corporation | Cantilevers with Integrated Actuators for Probe Microscopy |
| US9443730B2 (en) | 2014-07-18 | 2016-09-13 | Asm Ip Holding B.V. | Process for forming silicon-filled openings with a reduced occurrence of voids |
| US9837271B2 (en) | 2014-07-18 | 2017-12-05 | Asm Ip Holding B.V. | Process for forming silicon-filled openings with a reduced occurrence of voids |
| US10460932B2 (en) | 2017-03-31 | 2019-10-29 | Asm Ip Holding B.V. | Semiconductor device with amorphous silicon filled gaps and methods for forming |
-
1995
- 1995-01-20 JP JP7007468A patent/JPH08201399A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
| US6359329B1 (en) | 1998-09-04 | 2002-03-19 | Nec Corporation | Embedded wiring structure and method for forming the same |
| US20100306885A1 (en) * | 2006-08-15 | 2010-12-02 | Georgia Tech Research Corporation | Cantilevers with Integrated Actuators for Probe Microscopy |
| US8321959B2 (en) * | 2006-08-15 | 2012-11-27 | Georgia Tech Research Corporation | Cantilevers with integrated piezoelectric actuators for probe microscopy |
| US9443730B2 (en) | 2014-07-18 | 2016-09-13 | Asm Ip Holding B.V. | Process for forming silicon-filled openings with a reduced occurrence of voids |
| US9837271B2 (en) | 2014-07-18 | 2017-12-05 | Asm Ip Holding B.V. | Process for forming silicon-filled openings with a reduced occurrence of voids |
| US10460932B2 (en) | 2017-03-31 | 2019-10-29 | Asm Ip Holding B.V. | Semiconductor device with amorphous silicon filled gaps and methods for forming |
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