JPH08194930A - Magnetic head slider, its manufacture and magnetic recorder - Google Patents

Abstract

PURPOSE: To reduce an adhesion force produced on a slider by a method wherein water-repellent surfaces are formed around the surfaces of the slider which are brought into contact with a disc. CONSTITUTION: Gimbals 1-1 and 1-2 for the flexible support are formed on the tip of a suspension 1 and a slider 2 is put on the center parts of the gimbals. A magnetic conversion element 3 for recording and reproduction is mounted on the suspension root side of the slider 2. In order to record and reproduce signals by sliding continuously on a magnetic disc medium 7 which is a magnetic recording medium, the slider 2 has, for instance, sliding pads 4-1, 4-2 and 5 at three positions. The magnetic conversion element 3 is contained in the sliding pad 5. The slider 2 is made of Al2 O3 -TiC and a very thin carbon film which has the high sliding characteristics is applied to the surface of the sliding pad 4-1. Further, water-repellent and oil-repellent treatment films 6 are applied to the side surfaces of the three sliding pads by an ion implantation method with introduced fluorine.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a magnetic disk device, a floppy disk device, a magnetic tape device (MT), a VTR.
And the like, the present invention relates to a protective film for a magnetic head slider that performs magnetic recording conversion.

[0002]

2. Description of the Related Art In a data recording device such as a magnetic disk, a floppy disk, a magnetic tape, etc., it is an even more important issue to realize a high recording density by narrowing the recording gap as the recording capacity increases. There is. In order to realize this narrowing, it is important from the perspective of tribology to consider the sliding resistance between the medium and the head, and at the same time, ensure the reliability against problems such as dust adhesion or adsorption phenomenon at startup. It is a problem. It is indispensable to design in consideration of each of these characteristics. The prior art discloses a method of forming a protective film of carbon or the like on the surface thereof as described in JP-A-3-120610 in order to optimize the sliding characteristics of the surface while considering the magnetic conversion characteristics. ing. However, the recording spacing between a magnetic disk, which is a recording medium in recent years, and a slider has become 0.1 μm, and the smoothness of the slider surface has become an important issue. In order to deal with these problems, the surface of the disk and the surface of the slider have come to be extremely smoothed, and the influence of the magnitude of the attraction force at rest is becoming more severe.

[0003]

In the interface of the low flying head disk of 0.1 micron or less, each surface is being smoothed more and more in order to achieve high reliability of sliding resistance, but at the same time Suppressing the adsorption phenomenon at the time of starting and stopping has also become a major issue.

[0004]

In order to reduce the amount of water or lubricant between the head sliders that induces this adsorption phenomenon, the slider side surface is reduced so as to reduce the amount supplied from the periphery of the slider contact surface. It is achieved by water and oil repellency treatment.

[0005]

When the liquid is generated between the two surfaces, the attracting force is generated by the meniscus. This attraction force f generated between the spherical surface and the flat surface with the radius R is calculated by Bauden-Taiber from the friction and lubrication of solids (Maruzen, 1961) using the magnitude σ of the surface tension of the liquid, and is given by It is determined.

[0006]

## EQU1 ## f = 4.pi.R.sigma. (Equation 1) That is, in order to reduce the suction force f, a liquid having a low surface tension and a small radius are used. In terms of the device configuration, the lubricant is changed and the contact slider surface is roughened. Etc. are required, but these changes are difficult in terms of sliding design.

Friction force F when generated between two planes
Since the condensed water generated by the meniscus has a negative pressure, it is proportional to the product of the negative pressure ΔP and its area A.

[0008]

## EQU00002 ## F = .DELTA.P.times.A (Equation 2) Therefore, in order to reduce the moisture and the lubricant generated between the two surfaces, it is effective to apply water and oil repellency treatment to the contact surface itself. Even if it is effective, it is difficult to maintain stable characteristics in the long term because the wear progresses due to sliding and the contact state changes. Considering the supply of water and lubricant, not only those existing only in the contact surface clearance,
In many cases, the amount supplied from the things gathered around it is dominant. Therefore, the main purpose is to reduce the amount of water and lubricant that agglomerate on the side surface that does not wear, and to reduce the amount of water and lubricant generated between the two contact surfaces by reducing the amount of water and the lubricant that are generated between the two contact surfaces. Reduce.

[0009]

Embodiments of the present invention will be described below. 1 to 3 for the first embodiment, FIG. 4 for the second embodiment, FIG. 5 for the third embodiment, and FIG. 6 shows the positional relationship in the manufacturing apparatus for forming the modified film. A magnetic disk device equipped with the magnetic head slider of the above embodiment will be described with reference to FIG. FIG. 2 is a perspective view of a magnetic head slider for contacts according to the first embodiment of the present invention.
FIG. 1 is a sectional view showing the film structure of this head slider.
Is an experimental result showing the adsorption characteristics of a slider whose side surface is treated to be water and oil repellent by ion implantation, FIG. 4 is a cross section showing a film structure of a magnetic head slider which is a second embodiment of the present invention, and FIG. FIG. 6 is a cross-sectional view showing a film structure of a flying type magnetic head slider which is a third embodiment of the invention, FIG. 6 is a positional relationship in an ion implantation manufacturing apparatus for treating the slider side surface with water and oil repellency, and FIG. FIG. 3 is a perspective view of a magnetic disk device equipped with a magnetic head slider.

FIG. 2 is a perspective view of the magnetic head slider according to the first embodiment. Gimbals 1-1 and 1-2 for flexible support are formed at the tip of the suspension 1.
A slider 2 is attached to the center of the slider. A magnetic conversion element 3 for recording and reproducing is mounted on the suspension root side of this slider. This slider has three sliding pads 4-1 and 4 for recording and reproducing while continuously sliding on the magnetic disk medium 7 which is a magnetic recording medium.
-2 and 5 are provided, and the magnetic conversion element 3 is internally provided inside the sliding pad 5. The material of the magnetic head slider 2 is Al ₂ O ₃ —TiC, and a very thin carbon film having high sliding characteristics is provided on the surface of the sliding pad 4-1. Further, on the side surfaces of the three sliding pads, as shown in FIG. 1, a water / oil repellent treatment film 6 obtained by introducing fluorine into the ion implantation method is applied. The implantation conditions are such that CF ₄ gas is ionized and the accelerating voltage is 5 to 40 kV, preferably 10 kV and 1 × 10 ¹⁵ ions / cm ^{2 is} implanted per sample area to form the modified layer. At the time of implantation, an ion source having a larger diameter than the slider size is used and a diverging beam is used to irradiate the side surface. FIG. 6 shows the positional relationship between the ion beam and the sample slider in this implantation processing apparatus. Ion beam 1 of bucket type ion source in vacuum processing apparatus 11
2 is irradiated at various angles with respect to the sample table because of its divergence. Therefore, if the slider 2 serving as a sample is installed in a position opposed to the area smaller than the ion beam irradiation diameter d, the side surface of the slider can be irradiated with ions containing fluorine. Further, if the uniformity is improved, it is also effective to rotate the sample table 13. After taking out the slider treated with fluorine in this way,
By polishing the sliding surface layer with diamond abrasive grains,
create.

In order to clarify the basic properties of this fluorinated surface, the following experiment was conducted. A flat Al ₂ O ₃ —TiC substrate was subjected to the same treatment as above and the contact angle to water was measured. The results are shown in Table 1.

[0012]

[Table 1]

Using the slider of Example 1 which has been subjected to such a treatment, the frictional force at the time of starting the rotation of the disk was evaluated.
A sample prepared by forming a sputtered carbon protective film on the upper surface of a medium formed on a smooth substrate and applying a perfluoropolyether lubricant on it was prepared. On the other hand, the contact magnetic head slider described above had a load of 0.8 gf. Then, it was pressed against the magnetic disk medium and started at a rotational speed of 0.5 m / sec, and the change in frictional force at that time was measured. The results are shown in Fig. 3. The horizontal axis represents the time after the start of rotation, and the vertical axis represents the frictional force. In the case of an uninjected head, the static friction force becomes a very large value 1.
It shows 9 gf, and then changes at about 0.25 gf.
On the other hand, when a similar test was performed using a slider whose side surface was treated with fluorine, the static frictional force generated at the time of startup was low and was at most 0.25 gf, which was a great effect in reducing the adsorption force. After that, it was stable at 0.2 gf. When these two types of sliders were repeatedly tested for starting and stopping, the untreated sample suffered fatigue fracture at the gimbal portion of the suspension after about 100 sliding cycles. On the other hand, the fluorinated slider had stable sliding characteristics even if it was carried out many times. When the area around the pad after sliding a large number of times was observed, it was found that there was less contamination (dirt) due to abrasion powder, lubricant, etc., than the untreated slider. According to the first embodiment, in addition to the effect of reducing the suction force, there is also the effect of reducing the contamination attached to the slider.

Next, a second embodiment will be described with reference to FIG. In this embodiment, the fluorinated surface is polished on the lower surface of the sliding pad under the slider 2 in the first embodiment, while the lower surface is left in this example. That is, both the side surface and the lower surface of the slider are processed. In this example, a very high water / oil repellency function is initially exhibited, but it is characterized in that it gradually decreases as the lower surface is worn, then becomes constant, and the same effect as in the first embodiment can be maintained. According to the second embodiment, in addition to the effect that the suction force can be reduced, there is an effect that the slider lower surface does not have to be polished at the time of manufacturing the slider and can be provided at a low cost.

A third embodiment will be described with reference to FIG. This is a conventional flying type taper flat type slider in which the peripheral portion of the sliding surface including the taper portion is fluorinated. That is, although the MR type magnetic conversion element 9 is attached to the outflow end of the slider 8, the film 10 having oil and water repellency is formed on both the taper portion and the magnetic conversion element 9 which are the inflow end thereof. . This is also a film in which fluorine is contained in the carbon film. The static friction test of this slider was conducted in a high temperature and high humidity environment. Humidity 80%, temperature 3 at a load of 3 gf on a magnetic disk with lubricant lubricated on a smooth carbon protective film by about 2 nm.
The disc was started to rotate while being left at 0 ° C. for 1 day. Since the slider length is 2 mm and the area is larger than that of the previous embodiment, the frictional force is increased accordingly. It was confirmed that the static friction force of the untreated product reached 12 gf, whereas that of the product having the inflow and outflow ends fluorinated was 5 gf, which had a large effect of reducing the adsorption force. Further, in such a floating type, there is a problem that a large amount of dust adheres at a place where the pressure distribution around the slider becomes negative due to the disk rotating air flow. Therefore, although a large amount of dust adheres in the vicinity of the outflow end of the slider, since the low energy surface having water and oil repellency is formed as in the present embodiment, the amount adhered to the surface is reduced. Further, in the case of the MR type element as in the present embodiment, when the solid contact with the disk is caused through the dust adhering to the head side, there is a problem that the generated heat causes electrical noise. Therefore, it is beneficial to reduce the adhesion of contaminants to such an obstacle, and it is also effective to improve the quality of the recording conversion signal.

FIG. 7 shows a magnetic disk device equipped with the magnetic head slider of the present invention. A spindle motor capable of high-speed rotation is provided on a substrate 17 of the apparatus, and a disk-shaped magnetic disk medium 7 for magnetic recording is mounted on the spindle. On the other hand, a guide arm 18 that can be rotated by a driving voice coil motor 15 that can be positioned on an arbitrary radius of the magnetic disk medium 7 and a suspension 16 at the tip thereof.
Has a pressing load of about 0.8 gf acting in the medium direction. At the tip of this suspension, a slider 14, which is water- and oil-repellent on the side surface of the present invention, is attached. In the magnetic disk drive equipped with the low-adhesion slider as described above, the attraction force generated between the slider media is extremely small even if it is stopped for a long time, so the suspension is damaged or the spindle is driven during rotation start. It is possible to realize a highly reliable magnetic disk device without a failure to do so.

[0017]

According to the present invention, by forming a water-repellent and oil-repellent surface around the slider surface in contact with the disk, the attraction force generated on the slider can be reduced. Further, it is possible to reduce the contamination attached to the side surface of the slider.

[Brief description of drawings]

FIG. 1 is a sectional view of a magnetic head slider according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the magnetic head slider of the first embodiment.

FIG. 3 is an explanatory diagram of a sliding test result by the magnetic head slider of the first embodiment.

FIG. 4 is a sectional view of a magnetic head slider according to a second embodiment of the present invention.

FIG. 5 is a sectional view of a magnetic head slider according to a third embodiment of the present invention.

FIG. 6 is a cross-sectional view showing the positional relationship of the surface treatment apparatus for a magnetic head slider of the present invention.

FIG. 7 is a perspective view of a magnetic disk device equipped with a magnetic head slider of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Suspension, 2 ... Slider, 3 ... Magnetic conversion element, 4 ... Sliding pad, 5 ... Element-mounting sliding pad, 6 ... Processing layer modified by ion implantation, 7 ... Magnetic disk medium.

Claims (6)

[Claims] 1. A slider having a magnetic head mounted thereon,
A magnetic head slider characterized in that a modification treatment film subjected to a water-repellent or oil-repellent treatment is provided on a side surface portion around a slider surface facing a recording medium. 2. A slider having a magnetic head mounted thereon,
A magnetic head slider characterized in that a reforming treatment film subjected to a water-repellent treatment or an oil-repellent treatment is provided on both a slider surface portion and a side surface portion facing a recording medium. 3. A magnetic head slider provided with a modification treatment film by an ion implantation treatment for the water repellent or oil repellent treatment according to claim 1 or 2. 4. The method of manufacturing a magnetic head slider according to claim 3, wherein an element of fluorine or a fluorine compound is implanted into a side surface or a surface of the slider under an acceleration voltage of 5 to 40 kV. 5. The ion implantation according to claim 3, wherein a diverging beam from an ion source having a diameter sufficiently larger than the slider is used,
A method of manufacturing a magnetic head slider, wherein a side surface portion is simultaneously processed by processing a surface of a slider facing a recording medium so that the beam surrounds the surface. 6. A magnetic recording device having the magnetic head slider according to claim 1, 2, 3 or 4.