JPH08194065A - Proportional counter tube - Google Patents
Proportional counter tubeInfo
- Publication number
- JPH08194065A JPH08194065A JP7004977A JP497795A JPH08194065A JP H08194065 A JPH08194065 A JP H08194065A JP 7004977 A JP7004977 A JP 7004977A JP 497795 A JP497795 A JP 497795A JP H08194065 A JPH08194065 A JP H08194065A
- Authority
- JP
- Japan
- Prior art keywords
- window
- proportional counter
- reinforcing member
- tube
- beryllium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/06—Proportional counter tubes
Landscapes
- Measurement Of Radiation (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、放射線検出用の比例計
数管に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a proportional counter for detecting radiation.
【0002】[0002]
【従来の技術】図8は、従来の比例計数管の構成を示す
図である。これは横置型(サイドオン型)の比例計数管
で、外囲管10、ベリリウム(Be)窓30及び信号取
り出し用の陽極50を備えている。外囲管10は、略円
筒状の管壁11及び管壁11の両端に設けられたフラン
ジ12から構成されている。管壁11には、放射線入射
用の開口20が形成されている。管壁11は、比例計数
管の動作時には陰極となる。フランジ12は絶縁体から
構成されており、比例計数管の気密性を保持しながら陰
極となる外囲管10と陽極50とを絶縁している。Be
窓30は放射線入射口20を覆う薄膜である。Beは放
射線透過材であり、Be窓30によって比例計数管内部
への放射線の透過性が保たれながら比例計数管の内部が
外部から遮断されている。これにより、比例計数管の気
密性が保持されている。2. Description of the Related Art FIG. 8 is a diagram showing the structure of a conventional proportional counter. This is a horizontal (side-on) proportional counter, and is provided with an envelope 10, a beryllium (Be) window 30, and an anode 50 for taking out signals. The outer tube 10 is composed of a substantially cylindrical tube wall 11 and flanges 12 provided at both ends of the tube wall 11. An opening 20 for incidence of radiation is formed on the tube wall 11. The tube wall 11 serves as a cathode when the proportional counter operates. The flange 12 is made of an insulating material and insulates the anode 50 from the envelope tube 10 serving as a cathode while maintaining the airtightness of the proportional counter. Be
The window 30 is a thin film that covers the radiation entrance 20. Be is a radiation transparent material, and the inside of the proportional counter is blocked from the outside while the radiation of the radiation into the proportional counter is maintained by the Be window 30. As a result, the airtightness of the proportional counter is maintained.
【0003】一般に、Be窓30と管壁11との接合
は、拡散接合法、イオンビーム接合法、有機系接着剤に
よる接合、ろう材による接合などによって行われる。し
かし、図8の比例計数管におけるような曲面をなすBe
窓30について、拡散接合法を適用することは困難であ
る。また、イオンビーム接合法は、薄いBe窓30に応
じた条件設定が難しく、大規模の設備が必要となるので
一般的な生産ラインには向いていない。また、有機系接
着剤による接合は、接合作業の不便さのため、比例計数
管生産の自動化、量産化に適さない。さらに、有機系接
着剤による接合技術を用いてBe窓30を接合した場
合、比例計数管の製造工程における外囲管10の排気に
際して、外囲管10を十分な高温状態におくことができ
ず、製造後に管内部の不純ガスが放出する可能性が残
る。この影響は、特に比例計数管の使用環境温度に左右
されるため、比例計数管の扱いが難しくなる。Generally, the Be window 30 and the tube wall 11 are joined by a diffusion joining method, an ion beam joining method, an organic adhesive, a brazing material, or the like. However, Be having a curved surface as in the proportional counter of FIG.
It is difficult to apply the diffusion bonding method to the window 30. Further, the ion beam bonding method is not suitable for a general production line because it is difficult to set conditions according to the thin Be window 30 and large-scale equipment is required. In addition, joining with an organic adhesive is not suitable for automation and mass production of proportional counters because of the inconvenience of joining work. Furthermore, when the Be window 30 is joined by using the joining technique using the organic adhesive, the outer tube 10 cannot be kept in a sufficiently high temperature state when the outer tube 10 is exhausted in the manufacturing process of the proportional counter. However, there is a possibility that the impure gas inside the pipe may be released after manufacturing. Since this influence depends on the ambient temperature of the proportional counter, the handling of the proportional counter becomes difficult.
【0004】これに対し、銀ろう等の高温ろうを用いる
接合法は、手軽な設備と簡単な条件設定により作業を
行うことができる、比例計数管の量産化にも適してい
る、製造時の排気も十分に行えるため信頼性の高い比
例計数管を提供できる等の利点を有している。On the other hand, the joining method using a high-temperature brazing material such as silver brazing material is suitable for mass production of proportional counters, which allows work to be performed with simple equipment and simple condition setting. Since exhaust can be sufficiently performed, there is an advantage that a highly reliable proportional counter can be provided.
【0005】[0005]
【発明が解決しようとする課題】銀ろう接合によりBe
窓30を管壁11に接合する場合、Be窓30は加熱さ
れるため、Beが再結晶化して軟化が生じ、Be窓30
の強度が低下する。この結果、外囲管10の排気時に生
じる管内外の圧力差により、Be窓30が図9に示すよ
うに変形することになる。Problems to be Solved by the Invention
When the window 30 is bonded to the tube wall 11, the Be window 30 is heated, so that Be is recrystallized and softened, so that the Be window 30 is melted.
Strength decreases. As a result, the Be window 30 is deformed as shown in FIG. 9 due to the pressure difference between the inside and the outside of the outer tube 10 when the outer tube 10 is exhausted.
【0006】変形の生じたBe窓30を有する比例計数
管には、以下の問題点が生じる。The proportional counter having the modified Be window 30 has the following problems.
【0007】Be窓30に変形が生じているため、空
気漏れが生じる。これにより、比例計数管の性能維持に
不可欠な気密性が損なわれる。Since the Be window 30 is deformed, air leakage occurs. As a result, the airtightness essential for maintaining the performance of the proportional counter is impaired.
【0008】Be窓30が陰極となる場合において、
変形によりBe窓30の一部がBe窓30と同じく陰極
となる管壁11の内周面よりも内側に窪むと、比例計数
管内部に電界の乱れが生じ、比例計数管本来の性能が発
揮されなくなる。When the Be window 30 serves as a cathode,
When a part of the Be window 30 is dented inward from the inner peripheral surface of the tube wall 11 which is the cathode like the Be window 30 due to the deformation, the electric field is disturbed inside the proportional counter, and the original performance of the proportional counter is exhibited. It will not be done.
【0009】Be窓が薄いほどその変形が大きく、上記
のような問題も顕著となる。しかしながら、今日では、
石油中の硫黄分の検出など、産業界の要求はより高感度
な検出、より低エネルギー元素の検出へと向いており、
これに応じてBe窓の薄膜化傾向が強まっている。この
ため、銀ろうで接合された変形の少ないBe窓を備える
比例計数管の実現を求める要請は極めて大きい。The thinner the Be window, the greater the deformation thereof, and the above-mentioned problems become more remarkable. However, today
The demands of industry such as detection of sulfur content in petroleum are suitable for higher sensitivity detection and lower energy element detection.
In response to this, the tendency toward thinning of the Be window is increasing. Therefore, there is a great demand for realizing a proportional counter including a Be window joined by silver brazing and having a small deformation.
【0010】BeからなるX線出射窓について自らの張
力による歪みに起因する亀裂等を防止したX線照射装置
は、特開平5−67560に開示されているが、Be窓
と管壁との銀ろう接合に起因したBe窓の変形を防止し
た比例計数管は、未だ実現されていない。An X-ray irradiating device which prevents cracks and the like in an X-ray emitting window made of Be caused by strain due to its own tension is disclosed in Japanese Patent Laid-Open No. 5-67560, but silver between the Be window and the tube wall is disclosed. Proportional counters that prevent Be window deformation due to brazing have not been realized yet.
【0011】本発明は、上記の要請に応えるべくなされ
たもので、銀ろうにより外囲管に接合された変形の少な
いベリリウム窓を備える比例計数管を提供することを目
的とする。The present invention has been made in order to meet the above-mentioned demands, and an object of the present invention is to provide a proportional counter having a beryllium window joined to an outer tube with silver brazing and having a small deformation.
【0012】[0012]
【課題を解決するための手段】上記の問題点を解決する
ために、本発明の比例計数管は、検出すべき放射線が入
射する開口が管壁に形成された外囲管と、外囲管の開口
を覆い、銀ろうによって外囲管に接合されているベリリ
ウム膜と、ベリリウム膜と外囲管の開口との間に配置さ
れ、銀ろうによって外囲管及びベリリウム膜に接合され
ている補強部材と、外囲管を貫通する電極とを備えてい
る。In order to solve the above-mentioned problems, the proportional counter of the present invention has an outer tube having an opening formed in the wall of the tube into which radiation to be detected is incident, and an outer tube. The beryllium film that covers the opening of the bezel and is joined to the envelope by silver brazing, and the reinforcement that is placed between the beryllium film and the opening of the envelope and that is joined to the envelope and the beryllium film by silver brazing. A member and an electrode penetrating the envelope are provided.
【0013】補強部材の周縁部は、管壁のうち開口の周
囲に位置し管壁の外面を含む部分に設けられた凹部に埋
設されており、補強部材の表面が管壁の外面と略平坦な
面を形成していると良い。また、ベリリウム膜は、補強
部材を覆っていると良い。また、補強部材のうち外囲管
の開口上に位置する部分が、格子状であると良い。The peripheral portion of the reinforcing member is embedded in a recess provided in a portion of the pipe wall that is located around the opening and includes the outer surface of the pipe wall, and the surface of the reinforcing member is substantially flat with the outer surface of the pipe wall. It is better to form a rough surface. Further, the beryllium film may cover the reinforcing member. Further, it is preferable that the portion of the reinforcing member located above the opening of the envelope has a lattice shape.
【0014】[0014]
【作用】本発明の比例計数管は、管壁に設けられた開口
とベリリウム膜との間に補強部材が設置されているの
で、外囲管との銀ろう接合の際に軟化したベリリウム膜
に外囲管排気時に圧力が加わっても、ベリリウム膜が補
強部材によって支持される結果、ベリリウム膜の変形は
少ない。従って、本発明の比例計数管は、良好な気密性
と高い信頼性を有するとともに、ベリリウム膜が陰極と
して機能する場合にも管内に電界の乱れが発生せず良好
に動作する。In the proportional counter of the present invention, since the reinforcing member is installed between the opening provided in the wall of the tube and the beryllium film, the beryllium film softened at the time of the silver brazing joining with the envelope tube is performed. Even if pressure is applied during exhaust of the envelope, the beryllium film is supported by the reinforcing member, so that the beryllium film is hardly deformed. Therefore, the proportional counter of the present invention has good airtightness and high reliability and operates well without disturbance of the electric field in the tube even when the beryllium film functions as a cathode.
【0015】本発明の比例計数管のうち補強部材の周縁
部が管壁の凹部に埋設されているものでは、補強部材の
表面と管壁の外面とが略平坦な面を形成しており、この
平坦面上に銀ろうを介してベリリウム膜が接合されてい
るため、接合の状態は極めて良好となる。従って、この
タイプの比例計数管は、一層良好な気密性と高い信頼性
を有する。In the proportional counter of the present invention in which the peripheral portion of the reinforcing member is embedded in the recess of the pipe wall, the surface of the reinforcing member and the outer surface of the pipe wall form a substantially flat surface, Since the beryllium film is bonded on this flat surface via the silver solder, the bonding state becomes extremely good. Therefore, this type of proportional counter has better air tightness and higher reliability.
【0016】ベリリウム膜が補強部材を覆っていると、
ベリリウム膜の周縁部が銀ろうを介して管壁に接合され
るので、ベリリウム膜と管壁との接合が強固になる。こ
れにより、一層信頼性の高い比例計数管が実現される。When the beryllium film covers the reinforcing member,
Since the peripheral portion of the beryllium film is bonded to the tube wall via the silver solder, the beryllium film and the tube wall are strongly bonded. As a result, a more reliable proportional counter is realized.
【0017】[0017]
【実施例】以下、添付図面を参照しながら本発明の実施
例を詳細に説明する。なお、図面の説明において同一の
要素には同一の符号を付し、重複する説明を省略する。Embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description.
【0018】実施例1 図1は、本実施例の比例計数管の側断面図である。この
比例計数管は、横置型(サイドオン型)のもので、外囲
管10、ベリリウム(Be)窓30、補強部材40及び
線状の陽極50を備えている。管内には、電離ガスであ
るNeやArなどの希ガスにCH4 やCO2 などをクエ
ンチングガスとして少量混合したガスが封入されてい
る。Embodiment 1 FIG. 1 is a side sectional view of a proportional counter of this embodiment. The proportional counter is of a horizontal type (side-on type), and includes an envelope 10, a beryllium (Be) window 30, a reinforcing member 40, and a linear anode 50. The tube is filled with a gas in which a small amount of ionized gas such as Ne or Ar is mixed with CH 4 or CO 2 as a quenching gas.
【0019】外囲管10は、ステンレス(SUS)を材
料としており、比例計数管の動作時には陰極として働
く。この外囲管10は、略円筒状の管壁11及び管壁1
1の両端に設置されたフランジ12から構成されてい
る。管壁11には検出すべき放射線が入射する開口(放
射線入射口)20が形成されている。フランジ12は絶
縁体(本実施例では、コバールガラス)から構成されて
おり、比例計数管の気密性を保持しながら陰極となる外
囲管10と陽極50とを絶縁している。The outer tube 10 is made of stainless steel (SUS) and serves as a cathode when the proportional counter operates. The outer tube 10 includes a substantially cylindrical tube wall 11 and a tube wall 1.
It is composed of flanges 12 installed at both ends of 1. An opening (radiation entrance) 20 through which the radiation to be detected enters is formed in the tube wall 11. The flange 12 is made of an insulating material (in this embodiment, Kovar glass), and insulates the anode 50 from the envelope tube 10 serving as a cathode while maintaining the airtightness of the proportional counter.
【0020】陽極50は、太さが略一定で滑らかな表面
を有するPt線であり、外囲管10の一端にあるフラン
ジ12から他端のフランジ12にかけて外囲管10を貫
通している。比例計数管の動作時には、陽極50に正電
圧が印加され、陽極50から放射線のエネルギー及び線
量に応じた信号が取り出される。The anode 50 is a Pt wire having a uniform thickness and a smooth surface, and penetrates the envelope 10 from the flange 12 at one end of the envelope 10 to the flange 12 at the other end. During operation of the proportional counter, a positive voltage is applied to the anode 50, and a signal corresponding to the energy and dose of radiation is extracted from the anode 50.
【0021】Be窓30は約50μmのBe薄膜であ
り、補強部材40上及び放射線入射口20を覆ってい
る。Beは放射線透過材であり、従って、Be窓30に
よって比例計数管内部への放射線の透過性が保たれなが
ら比例計数管の内部が外部から遮断されており、比例計
数管の気密性が保持されている。The Be window 30 is a Be thin film of about 50 μm, and covers the reinforcing member 40 and the radiation entrance 20. Be is a radiation transmitting material. Therefore, the Be window 30 keeps the transmission of radiation into the proportional counter inside, while the inside of the proportional counter is blocked from the outside, and the airtightness of the proportional counter is maintained. ing.
【0022】また、Be窓30は銀ろうによって管壁1
1に接合されており、これによってBe窓30は、管壁
11、すなわち陰極に電気的に接続されている。従っ
て、Be窓30は、比例計数管の動作時に管壁11と同
様に陰極となる。Further, the Be window 30 is made of silver braze to form the pipe wall 1.
1, the Be window 30 is electrically connected to the tube wall 11, that is, the cathode. Therefore, the Be window 30 becomes a cathode like the tube wall 11 when the proportional counter operates.
【0023】このように本実施例の比例計数管は、Be
窓30が銀ろうにより外囲管10に接合されるものなの
で、量産が容易という長所を有している。As described above, the proportional counter of this embodiment is Be
Since the window 30 is joined to the envelope 10 by silver solder, it has an advantage that mass production is easy.
【0024】補強部材40は、Be窓30と放射線入射
口20との間に配置され、Be窓30を支持している。
この補強部材40は、銀ろうによって管壁11及びBe
窓30に接合されている。The reinforcing member 40 is arranged between the Be window 30 and the radiation entrance 20 and supports the Be window 30.
This reinforcing member 40 is made of silver brazing so that
It is joined to the window 30.
【0025】図2は、補強部材40を示す平面図であ
る。図2に示されるように、補強部材40は格子形状を
有しており、その周縁は他の部分より幅広の枠部41と
なっている。本実施例の比例計数管では、この枠部41
が放射線入射口20の周囲の管壁11上に固定されてい
る。比例計数管の動作時には、Be窓30を透過した放
射線が補強部材40の格子の隙間を透過して管内に入射
することになるので、補強部材40がBe窓30と放射
線入射口20との間に介在していても十分に良好な放射
線検出が可能である。FIG. 2 is a plan view showing the reinforcing member 40. As shown in FIG. 2, the reinforcing member 40 has a lattice shape, and its peripheral edge is a frame portion 41 wider than other portions. In the proportional counter of the present embodiment, this frame portion 41
Are fixed on the tube wall 11 around the radiation entrance 20. During operation of the proportional counter, the radiation that has passed through the Be window 30 will pass through the gaps in the lattice of the reinforcing member 40 and enter the tube, so that the reinforcing member 40 will be placed between the Be window 30 and the radiation entrance 20. It is possible to detect radiation sufficiently satisfactorily even if it is interposed in the.
【0026】本実施例では、補強部材40は外囲管10
と同じステンレス(SUS)材料から構成されている。
補強部材40は、銀ろう接合によって管壁11に電気的
に接続されているので、補強部材40も比例計数管の動
作時にはBe窓30と同様に陰極となる。In this embodiment, the reinforcing member 40 is the outer tube 10.
It is made of the same stainless steel (SUS) material as.
Since the reinforcing member 40 is electrically connected to the tube wall 11 by silver brazing, the reinforcing member 40 also serves as a cathode like the Be window 30 when the proportional counter operates.
【0027】図3は、本実施例の比例計数管のうちBe
窓30及び補強部材40と管壁11との接合部分を示す
拡大断面図である。補強部材40の枠部41は放射線入
射口20の周囲に位置する管壁11上に配置されてお
り、その上に銀ろう90を挟んでBe窓30の周縁部が
配置されている。図3のように、銀ろう90は、Be窓
30の周縁部と補強部材40の枠部41との間に介在し
ながら枠部41を覆い、管壁11にも接している。これ
によって、Be窓30及び補強部材40は管壁11に固
定されている。FIG. 3 shows Be of the proportional counter of this embodiment.
FIG. 6 is an enlarged cross-sectional view showing a joint portion between the window 30 and the reinforcing member 40 and the tube wall 11. The frame 41 of the reinforcing member 40 is arranged on the tube wall 11 located around the radiation entrance 20, and the peripheral edge of the Be window 30 is arranged on the frame wall 41 with the silver brazing material 90 interposed therebetween. As shown in FIG. 3, the silver brazing material 90 covers the frame portion 41 while being interposed between the peripheral edge portion of the Be window 30 and the frame portion 41 of the reinforcing member 40, and is also in contact with the pipe wall 11. Thereby, the Be window 30 and the reinforcing member 40 are fixed to the pipe wall 11.
【0028】図3に示されるように、補強部材40が放
射線入射口20上のBe窓30を支持するため、比例計
数管の製造工程において外囲管10の排気時に生じるB
e窓30の変形が低減される。特に、図9に示されるよ
うな管壁11の内側に達する窪みは生じなくなる。この
ため、本実施例の比例計数管は、従来に較べて空気漏れ
が少なく、良好な気密性と高い信頼性を有するととも
に、動作時に管内に電界の乱れが生じることもなく良好
に動作する。As shown in FIG. 3, since the reinforcing member 40 supports the Be window 30 on the radiation entrance 20, B generated when the envelope 10 is evacuated in the manufacturing process of the proportional counter.
e The deformation of the window 30 is reduced. In particular, the depression reaching the inside of the tube wall 11 as shown in FIG. 9 does not occur. For this reason, the proportional counter of this embodiment has less air leakage than the conventional one, has good airtightness and high reliability, and operates well without any disturbance of the electric field in the tube during operation.
【0029】また、本実施例では、Be窓30は補強部
材40よりも面積が大きく、補強部材40を覆ってい
る。これにより、Be窓30の端部は管壁11との間に
枠部41を挟まずに管壁11に接合されるので、Be窓
30の他の部分と管壁11との間に枠部41が介在して
いても接合は強固なものとなる。Further, in this embodiment, the Be window 30 has a larger area than the reinforcing member 40 and covers the reinforcing member 40. As a result, the end portion of the Be window 30 is joined to the pipe wall 11 without sandwiching the frame portion 41 with the pipe wall 11, so that the frame portion is provided between the other portion of the Be window 30 and the pipe wall 11. Even if 41 is interposed, the bond will be strong.
【0030】実施例2 図4は、本実施例の比例計数管の側断面図である。本実
施例の比例計数管は、管壁11のうち放射線入射口20
の周囲に位置し管壁11の外面を含む部分に設けられた
凹部15に補強部材40の枠部41が埋設されている点
が実施例1と異なっている。Embodiment 2 FIG. 4 is a side sectional view of the proportional counter of this embodiment. The proportional counter of this embodiment has a radiation entrance 20 on the tube wall 11.
The present embodiment is different from the first embodiment in that the frame portion 41 of the reinforcing member 40 is embedded in the concave portion 15 that is provided around the periphery of the pipe wall 11 and that includes the outer surface of the pipe wall 11.
【0031】図5は、本実施例の比例計数管のうちBe
窓30及び補強部材40と管壁11との接合部分を示す
拡大断面図である。凹部15は、補強部材40の枠部4
1の厚さと略同一の深さに形成されており、凹部15に
枠部41が埋設されると、管壁11の外面と枠部41の
表面とは略平坦な面を形成する。FIG. 5 shows Be of the proportional counter of this embodiment.
FIG. 6 is an enlarged cross-sectional view showing a joint portion between the window 30 and the reinforcing member 40 and the tube wall 11. The recess 15 is the frame portion 4 of the reinforcing member 40.
When the frame portion 41 is embedded in the recess 15, the outer surface of the pipe wall 11 and the surface of the frame portion 41 form a substantially flat surface.
【0032】実施例1と同様に、補強部材40がBe窓
30を支持するため、外囲管10の排気時に生じるBe
窓30の変形が低減される。また、Be窓30は補強部
材40を覆っており、Be窓30の端部は管壁11との
間に枠部41を挟まずに管壁11に接合されるので、強
固な接合が成されている。このため、本実施例の比例計
数管も、空気漏れが少なく、良好な気密性と高い信頼性
を有するとともに、動作時に管内に電界の乱れが生じる
こともなく良好に動作する。As in the first embodiment, since the reinforcing member 40 supports the Be window 30, the Be generated when the envelope 10 is evacuated.
The deformation of the window 30 is reduced. Further, the Be window 30 covers the reinforcing member 40, and since the end portion of the Be window 30 is joined to the pipe wall 11 without sandwiching the frame portion 41 between the Be window 30 and the pipe wall 11, a strong joint is formed. ing. Therefore, the proportional counter according to the present embodiment also has a small air leakage, has good airtightness and high reliability, and operates well without any disturbance of the electric field in the tube during operation.
【0033】さらに本実施例の比例計数管は、管壁11
と枠部41とが形成する平坦面上に存在する銀ろうによ
ってBe窓30と管壁11とが接合されているため、極
めて良好な接合が実現されている。Further, the proportional counter of the present embodiment has a tube wall 11
Since the Be window 30 and the tube wall 11 are joined to each other by the silver braze existing on the flat surface formed by the frame portion 41, extremely good joining is realized.
【0034】実施例1の比例計数管と比較すると、図3
に示されるように、実施例1の比例計数管では、枠部4
1が管壁11上に載置されているため枠部41が管壁1
1の外面上で隆起している。このため、この隆起に起因
して枠部41の近傍に割れ(図3の100)が生じやす
くなり、比例計数管の気密性が低下することがある。As compared with the proportional counter of Example 1, FIG.
In the proportional counter of the first embodiment, as shown in FIG.
1 is placed on the pipe wall 11, the frame portion 41 is
Raised on the outer surface of 1. Therefore, cracks (100 in FIG. 3) are likely to occur in the vicinity of the frame portion 41 due to the protrusion, and the airtightness of the proportional counter may be reduced.
【0035】これに対し、本実施例の比例例数管では、
管壁11の外面と枠部41の表面とからなる平坦面上に
銀ろう90が存在することでBe窓30と管壁11とが
接合されているので、枠部41の近傍に割れが生じにく
くなる。さらに、銀ろう90はBe窓30と管壁11及
び枠部41との間にほぼ均一に存在することになるの
で、良好な接合が実現されている。以上から、本実施例
の比例計数管は、極めて良好な気密性と高い信頼性を有
する。On the other hand, in the proportional number tube of this embodiment,
Since the Be window 30 and the tube wall 11 are joined by the presence of the silver solder 90 on the flat surface composed of the outer surface of the tube wall 11 and the surface of the frame section 41, a crack occurs near the frame section 41. It gets harder. Further, since the silver brazing material 90 exists substantially evenly between the Be window 30 and the tube wall 11 and the frame portion 41, good joining is realized. From the above, the proportional counter of this embodiment has extremely good airtightness and high reliability.
【0036】次に、実施例2の比例計数管に関して、補
強部材40及びBe窓30の管壁11への取り付け方法
について説明する。図6及び図7は、この取り付け方法
を説明するものである。なお、実施例1の比例計数管に
ついても、補強部材40及びBe窓30は同様の方法で
管壁11に取り付けられる。Next, regarding the proportional counter of the second embodiment, a method of attaching the reinforcing member 40 and the Be window 30 to the tube wall 11 will be described. 6 and 7 illustrate this mounting method. In addition, also in the proportional counter of Example 1, the reinforcing member 40 and the Be window 30 are attached to the tube wall 11 by the same method.
【0037】まず、銀ろう接合の下準備として、図6に
示されるように、Be窓30(図6(a))のろう付け
箇所に約3000オングストロームのTi層81を蒸着
し(図6(b))、続いて約3000オングストローム
のCu層82を蒸着する(図6(c))。First, as a preparation for silver brazing, as shown in FIG. 6, a Ti layer 81 of about 3000 angstrom is vapor-deposited on the brazing portion of the Be window 30 (FIG. 6 (a)) (see FIG. b)), and then a Cu layer 82 of about 3000 angstrom is deposited (FIG. 6C).
【0038】Cu層82は、Beに対する銀ろうの濡れ
性を高めて銀ろうをBe窓30になじみやすくするもの
である。但し、BeはCuと化合してCu−Beの合金
となりやすく、特に本実施例のような厚さ100μm以
下の薄いBe膜が合金となった場合、Be窓30非常に
割れやすくなり比例計数管の耐真空特性上問題となる。
従って、本実施例では、Cu層82の蒸着前にBeとな
じみが良くBeを合金化しにくいTi層81をBe窓3
0のろう付け箇所に蒸着し、その後に銀ろうとなじみの
良いCu層82を蒸着している。The Cu layer 82 enhances the wettability of the silver solder to Be so that the silver solder easily fits into the Be window 30. However, Be is likely to combine with Cu to form a Cu-Be alloy, and especially when a thin Be film having a thickness of 100 μm or less as in this embodiment is an alloy, the Be window 30 is very easily cracked and the proportional counter tube is formed. It becomes a problem in the vacuum resistance characteristic.
Therefore, in this embodiment, the Ti layer 81, which is well compatible with Be and is difficult to alloy with Be, is formed on the Be window 3 before the deposition of the Cu layer 82.
The Cu layer 82, which is well compatible with silver brazing, is vapor-deposited at the brazing point of 0.
【0039】一方、管壁11の材料であるSUSは銀ろ
うの濡れ性が良くないので、図7に示されるように、管
壁11のろう付け箇所にはSUS及びBeの両方に良く
なじむNi層83を予め蒸着しておく。Ni層83は厚
すぎると剥がれやすくなるので、本実施例では約200
0オングストロームの厚さに制御した。On the other hand, since SUS, which is the material of the tube wall 11, does not have good wettability of silver braze, as shown in FIG. 7, the brazing portion of the tube wall 11 is Ni which is well compatible with both SUS and Be. The layer 83 is vapor-deposited in advance. If the Ni layer 83 is too thick, it will be easily peeled off.
The thickness was controlled to 0 angstrom.
【0040】以上の下準備の後、銀ろう接合を実行す
る。本実施例では、銀ろうとしてBAg−8(JIS規
格品)を用いる。これは、Ag72%、Cu28%、そ
の他の成分0.15%以下という組成を有するものであ
る。After the above preparation, silver brazing is carried out. In this embodiment, BAg-8 (JIS standard product) is used as the silver solder. This has a composition of Ag 72%, Cu 28%, and other components of 0.15% or less.
【0041】図7に示されるように、補強部材40、銀
ろうシート91、Be窓30の順でこれらを管壁11の
凹部15に設置した後、真空中で加熱して銀ろうシート
91を熔融する。銀ろうシート91は、補強部材40の
枠部41とほぼ同一の形状を有する銀ろうの薄膜であ
る。加熱温度は、約600〜900℃の間で設定する
が、本実施例では、銀ろうシート91を約780℃に加
熱したまま1分間維持した。こうして熔融された銀ろう
は、図5に示されるようにBe窓30と管壁11及び補
強部材40との間に介在するようになる。この後、徐冷
を行うと、銀ろうが固化して、Be窓30及び補強部材
40が管壁11に接合される。As shown in FIG. 7, the reinforcing member 40, the silver brazing sheet 91, and the Be window 30 are installed in this order in the recess 15 of the tube wall 11 and then heated in a vacuum to form the silver brazing sheet 91. Melt. The silver brazing sheet 91 is a thin film of silver brazing material having substantially the same shape as the frame portion 41 of the reinforcing member 40. The heating temperature is set between about 600 and 900 ° C., but in this embodiment, the silver brazing sheet 91 was kept at about 780 ° C. and kept for 1 minute. The thus-melted silver solder comes to be interposed between the Be window 30 and the tube wall 11 and the reinforcing member 40 as shown in FIG. After that, when gradually cooled, the silver brazing solidifies, and the Be window 30 and the reinforcing member 40 are joined to the tube wall 11.
【0042】なお、実施例1の比例計数管の場合は、管
壁11に凹部15が存在しないので、管壁11の平坦面
上に補強部材40、銀ろうシート91、Be窓30を順
次載置してから加熱処理を施すことになる。In the case of the proportional counter of Example 1, since the recess 15 is not present in the tube wall 11, the reinforcing member 40, the silver brazing sheet 91, and the Be window 30 are sequentially mounted on the flat surface of the tube wall 11. After placing, heat treatment will be performed.
【0043】本発明は上記実施例に限定されるものでは
なく、様々な変形が可能である。例えば、本発明の比例
計数管は、本実施例のような横置型のみならず、縦置型
(ヘッドオン型)であっても良い。The present invention is not limited to the above embodiment, but various modifications can be made. For example, the proportional counter of the present invention may be a vertical type (head-on type) as well as the horizontal type as in the present embodiment.
【0044】[0044]
【発明の効果】以上、詳細に説明した通り、本発明によ
れば、銀ろう接合の際に軟化したベリリウム膜が外囲管
排気時に補強部材によって支持されるので、銀ろうによ
り外囲管に接合された変形の少ないベリリウム窓を備え
る比例計数管が実現される。従って、本発明の比例計数
管は、良好な気密性と高い信頼性を有するとともに、ベ
リリウム窓が陰極として機能する場合にも良好に動作す
る。As described above in detail, according to the present invention, the beryllium film softened during the silver brazing is supported by the reinforcing member when the envelope is evacuated. A proportional counter with a bonded low deformation beryllium window is realized. Therefore, the proportional counter of the present invention has good hermeticity and high reliability, and also works well when the beryllium window functions as a cathode.
【0045】本発明の比例計数管のうち補強部材の周縁
部が管壁の凹部に埋設されているものでは、補強部材の
表面と管壁の外面とが形成する平坦面上に銀ろうを介し
てベリリウム膜が接合されているため、接合の状態が極
めて良好であり、従って、このタイプの比例計数管は一
層良好な気密性と高い信頼性を有する。In the proportional counter of the present invention in which the peripheral portion of the reinforcing member is embedded in the recess of the pipe wall, silver brazing is provided on the flat surface formed by the surface of the reinforcing member and the outer surface of the pipe wall. Since the beryllium film is bonded to the beryllium film, the condition of the bonding is very good, and therefore, this type of proportional counter has better airtightness and higher reliability.
【0046】本発明の比例計数管のうちベリリウム膜が
補強部材を覆っているものでは、ベリリウム膜の周縁部
が銀ろうを介して管壁に接合されているので、ベリリウ
ム膜と管壁との接合が強固である。従って、このタイプ
の比例計数管は、一層高い信頼性を有する。In the proportional counter of the present invention in which the beryllium film covers the reinforcing member, since the peripheral portion of the beryllium film is joined to the pipe wall via silver brazing, the beryllium film and the pipe wall are joined together. The joint is strong. Therefore, this type of proportional counter is more reliable.
【図1】実施例1の比例計数管の側断面図である。FIG. 1 is a side sectional view of a proportional counter according to a first embodiment.
【図2】補強部材を示す平面図である。FIG. 2 is a plan view showing a reinforcing member.
【図3】実施例1の比例計数管のうちBe窓及び補強部
材と管壁との接合部分を示す拡大断面図である。FIG. 3 is an enlarged cross-sectional view showing a Be window and a joining portion of a reinforcing member and a tube wall in the proportional counter of Example 1.
【図4】実施例2の比例計数管の側断面図である。FIG. 4 is a side sectional view of a proportional counter according to a second embodiment.
【図5】実施例2の比例計数管のうちBe窓及び補強部
材と管壁との接合部分を示す拡大断面図である。FIG. 5 is an enlarged cross-sectional view showing a Be window and a joining portion of a reinforcing member and a tube wall in the proportional counter of Example 2;
【図6】Be窓へのTi層及びCu層の蒸着を示す図で
ある。FIG. 6 is a diagram showing vapor deposition of a Ti layer and a Cu layer on a Be window.
【図7】Be窓及び補強部材の外囲管への取り付け方法
を示す図である。FIG. 7 is a diagram showing a method of attaching a Be window and a reinforcing member to an outer envelope.
【図8】従来の比例計数管を示す部分断面図である。FIG. 8 is a partial sectional view showing a conventional proportional counter.
【図9】従来の比例計数管のうちBe窓と管壁との接合
部分を示す拡大断面図である。FIG. 9 is an enlarged cross-sectional view showing a joint portion of a Be window and a tube wall in a conventional proportional counter.
10…外囲管、11…管壁、12…フランジ、20…放
射線入射口、30…ベリリウム窓、40…補強部材、5
0…陽極。DESCRIPTION OF SYMBOLS 10 ... Surrounding tube, 11 ... Tube wall, 12 ... Flange, 20 ... Radiation entrance, 30 ... Beryllium window, 40 ... Reinforcing member, 5
0 ... Anode.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 池田 和彦 静岡県浜松市市野町1126番地の1 浜松ホ トニクス株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuhiko Ikeda 1126 No. 1126 Nomachi, Hamamatsu City, Shizuoka Prefecture Hamamatsu Photonics Co., Ltd.
Claims (4)
に形成された外囲管と、 前記外囲管の開口を覆い、銀ろうによって前記外囲管に
接合されているベリリウム膜と、 前記ベリリウム膜と前記開口との間に配置され、銀ろう
によって前記外囲管及び前記ベリリウム膜に接合されて
いる補強部材と、 前記外囲管を貫通する電極と、 を備える比例計数管。1. An outer envelope having an opening formed on a wall of a tube to which radiation to be detected is incident, and a beryllium film that covers the opening of the outer envelope and is joined to the outer envelope by silver solder. A proportional counter comprising: a reinforcing member that is disposed between the beryllium film and the opening and is joined to the envelope and the beryllium film by silver brazing; and an electrode that penetrates the envelope.
ち前記開口の周囲に位置し前記管壁の外面を含む部分に
設けられた凹部に埋設されており、 前記補強部材の表面は前記管壁の外面と略平坦な面を形
成していることを特徴とする請求項1記載の比例計数
管。2. A peripheral portion of the reinforcing member is embedded in a recess provided in a portion of the pipe wall around the opening and including an outer surface of the pipe wall, and the surface of the reinforcing member is The proportional counter according to claim 1, wherein a surface that is substantially flat with the outer surface of the tube wall is formed.
っていることを特徴とする請求項1又は2記載の比例計
数管。3. The proportional counter according to claim 1, wherein the beryllium film covers the reinforcing member.
する部分は、格子状であることを特徴とする請求項1〜
3記載のいずれか記載の比例計数管。4. The portion of the reinforcing member located above the opening has a lattice shape.
3. The proportional counter according to any one of 3 above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7004977A JPH08194065A (en) | 1995-01-17 | 1995-01-17 | Proportional counter tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7004977A JPH08194065A (en) | 1995-01-17 | 1995-01-17 | Proportional counter tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08194065A true JPH08194065A (en) | 1996-07-30 |
Family
ID=11598663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7004977A Pending JPH08194065A (en) | 1995-01-17 | 1995-01-17 | Proportional counter tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08194065A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002542587A (en) * | 1999-04-20 | 2002-12-10 | コミツサリア タ レネルジー アトミーク | Ionization chamber, sequence for measuring activity of β-ray emitting gas and method of using the same |
JP2014055817A (en) * | 2012-09-12 | 2014-03-27 | Nippon Dempa Kogyo Co Ltd | Geiger-muller counter and radiation detector |
-
1995
- 1995-01-17 JP JP7004977A patent/JPH08194065A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002542587A (en) * | 1999-04-20 | 2002-12-10 | コミツサリア タ レネルジー アトミーク | Ionization chamber, sequence for measuring activity of β-ray emitting gas and method of using the same |
JP2014055817A (en) * | 2012-09-12 | 2014-03-27 | Nippon Dempa Kogyo Co Ltd | Geiger-muller counter and radiation detector |
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