JPH08191172A - Light-emitting element having minute optical element and minute optical element - Google Patents

Abstract

PURPOSE: To increase the freedom of selection of the material for a minute optical element, by fixing a minute optical element having one or two light- condensing refracting surface on the light emitting end surface of a light- emitting element, to the optical axis in the state of alignment to the optical axis. CONSTITUTION: A light-emitting element 100 is fixed on a heat sink 101 for heat dissipation, by soldering the N-side electrode part of the light emitting element 100. A minute optical element 107 is made to abut against the light- emitting edge 100' of the light emitting-element 100. In this state, the light- emitting element 100 is turned on. The minute optical element 107 is displaced along the light-emitting edge 100'. Optical axis alignment is performed with 'an automatic optical axis adjusting machine'. By simultaneous three-point spot irradiation of laser, the minute optical element 107 is fixed to the light- emitting element 100 with a metallized film 106. The minute optical element 107 is constituted of material excellent in environmental protection, and fixed to the light-emitting element 100 in the state of optical axis alignment. Thereby 'a light-emitting element having a minute optical element' can be realized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting element with a micro optical element, which is formed by integrating a micro optical element having an optical function for effectively converging divergent light emitted from the light emitting element into a light emitting element. It relates to a micro optical element.

[0002]

2. Description of the Related Art Light emitting devices such as LDs and LEDs are used as signal sources in optical signal transmission through optical fibers,
It is also used as a light source in an optical scanning device.

The light emitted from these light emitting elements is generally divergent. For example, in order to couple it to the end face of an optical fiber or to make it a light beam for optical scanning, the divergent light beam is a condensed light beam or a condensed light beam. It is necessary to convert to parallel light flux. This can be basically done by using an optical lens, but an ordinary optical lens is too large as a coupling lens for condensing light on the end face of an optical fiber, for example.

In view of such a problem, a "light emitting element with a micro optical element" in which a micro optical element having a light collecting function is integrally formed with a light emitting element is intended.

As a method of integrating a micro optical element with a light emitting element, "a photoresist film is formed on a light emitting end face portion of the light emitting element, and a pattern corresponding to the micro optical element is formed on the photoresist film by photolithography. Form a pattern and heat the formed pattern to transform it into a convex curved surface, and use this convex curved surface as it is as a refracting surface, or by forming another material layer on the light emitting end face of the light emitting element. ,
A photoresist film is further formed thereon, a convex curved surface is formed on this photoresist film by the same method as described above, and the shape of the convex curved surface is engraved on the layer of another material by etching to form a refracting surface. A method has been proposed.

However, the former of the above two methods is inferior in environmental resistance because the lens (micro-optical element) is composed of the photoresist material itself, and the size (diameter) of the convex curved surface that can be formed by the photoresist and In addition to the problem that the shape is limited, since many resist materials are colored, there is a problem that the usable wavelength of the light emitting element is limited.

Further, in the latter method, it takes time and labor to form another material layer on the light emitting end face portion, and there is a large variation in the alignment between the formed refracting surface and the optical axis of the light emitting element. There is a problem.

Further, conventionally, as a method of coupling the divergent light from the light emitting element to the end face of the optical fiber, the light emitted from the light emitting element is provided with one or two ball lenses or an aspherical glass press lens. However, there are problems that it takes time to align the optical axes of these optical elements, the cost is high, and the space is large.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a novel light emitting device with a micro optical element (claims 1 to 9).

Another object of the present invention is to provide a micro optical element used for the light emitting element with the micro optical element (claim 10).

[0011]

The "light-emitting element with a micro-optical element" of the present invention is constructed by attaching a micro-optical element to the light-emitting end face of the light-emitting element in a state where the optical axis is aligned with the light-emitting element. (Claim 1).

The "light emitting element" is an LD (semiconductor laser)
It is an “edge emitting type light emitting element” such as a light emitting diode (LED) or an LED (light emitting diode), and there is no particular limitation on the wavelength used. The “light emitting end surface portion” is an “end surface including a portion from which light is emitted” in the light emitting element.

The "micro-optical element" applies a positive power to the divergent light beam emitted from the light emitting element (including a case where the divergence is weakened, a case where the light beam is made into a parallel light beam, and a case where the light beam is made into a converging light beam) It has one or two "condensing refraction surfaces".

The micro optical element is attached in a state "aligned with the optical axis of the light emitting element". This is because the optical axis of the micro optical element is the optical axis of the light emitting element, that is, "the light is emitted from the light emitting element. This is a state in which the maximum intensity axis in the intensity distribution of the divergent light flux is matched.

One surface of the micro optical element is an incident surface on which light from the light emitting element is incident, and the other surface is an exit surface. These two surfaces may be “condensing refracting surfaces”, or “one surface is a diverging refracting surface and the other surface is a converging refracting surface” like a meniscus lens shape.
“One surface may be a refracting surface having a light-collecting property and the other surface may be a flat surface”.

In the last case, the surface of the micro optical element on the light emitting element side is a flat surface, and the surface on the emission side is a condensing refracting surface (claim 2).

The shape of the refracting surface is not limited to a spherical surface, and an aspherical surface, a parabolic surface or the like can be used.

The "mounting state" of the micro optical element which is mounted in a state where the optical axis of the light emitting element is aligned with the optical axis of the light emitting element is that "the incident surface of the micro optical element is in direct contact with the light emitting end face of the light emitting element". Alternatively, it may be configured such that “the incident surface of the minute optical element and the light emitting end face portion of the light emitting element are slightly separated from each other” (claim 4).

The state in which the light emitting end face portion and the incident surface are "in direct contact" is a state in which a point on the optical axis of the micro optical element is in contact with a point on the optical axis of the light emitting end face portion of the light emitting element. The "slightly separated" state means that the light emitting end face of the light emitting element and the incident surface of the micro optical element are aligned while aligning the optical axes, and the alignment amount is a physical determination theoretically determined by optical design. And is determined by optical design from several μm to several hundred μm.

The minute optical element has the "outside effective diameter of light beam".
In addition, a "convex portion having a height equal to or higher than the incident surface height" can be provided for determining the optical distance (claim 5). The "incident surface height" in this case is "the position of the plane" when the incident surface is a flat surface, and "the position of the reference plane portion around it" when the incident surface is a concave surface. In the case of a convex surface, it is the “height from the reference plane portion of the peripheral portion to the apex of the refracting surface”, which is the so-called “lens height”. The "optical distance" is the alignment amount in the "slightly separated" state, and is the distance between the incident surface position on the optical axis and the light emitting surface of the light emitting element.

The micro-optical element must be attached at a position (designed position) at a predetermined distance (above alignment amount) from the light emitting end face portion of the light emitting element. You don't have to
It can be attached so as to be "fixed to the light emitting end surface portion or the heat sink holding the light emitting element with reference to the light emitting end surface portion of the light emitting element" (claim 6).

The "heat sink" is a substrate for preventing the light emitting element from being deteriorated by the heat generated by itself, and is generally made of aluminum nitride, diamond, Si or the like. The main body of the light emitting element is "approximately 100 x 300 x 3
It has a “00 μm rectangular parallelepiped” shape and is joined to a heat sink, and heat generated in the light emitting element is dissipated through the heat sink.

Normally, the end face of the heat sink and the end face of the light emitting element are not accurately positioned. Therefore, when positioning the microscopic optical element and the light emitting element, it is necessary to use the "light emitting end surface portion of the light emitting element as a reference" as described above.

In the light-emitting element with a micro-optical element according to the above-mentioned claim 1, 2 or 3 or 4 or 5 or 6, "a metallized film for bonding with the light-emitting element is formed in a portion outside the effective light beam diameter of the micro-optical element. It is possible to "do" (Claim 7).

The "metallized film" is a metal film formed by a physical and / or chemical processing method (metallized processing), and is composed of a vapor deposition film, a sputtered film, a plating layer or the like or a combination thereof.

The thickness of the metallized film can be formed to be "a thickness for adjusting the distance (the optical distance / alignment amount) between the minute optical element and the light emitting element in the optical axis direction". .

In the light emitting element with a micro optical element according to claim 6, "a micro optical element in which a metal layer whose thickness is controlled in advance for determining an optical distance is bonded to a surface on the light emitting element side" can be used. (Claim 9).

Although glass is preferable as a material for the micro-optical element, in this case, "metal layer bonding" can be performed in addition to forming the metallized film as in the inventions described in claims 7 and 8. The joining of the metal layers in this case is adhesion of glass and metal by the so-called "Mallory method".

The Mallory method is a method of adhering glass and metal, and in a state where glass and metal are superposed, at a temperature lower than the softening point of the glass and lower than the melting point of the metal, the contact area between them is relatively high. This is a method of applying a DC voltage for a short time with the metal side being positive.

The material of the metal layer has good surface accuracy at the joint,
It is preferable that the glass material has a coefficient of thermal expansion substantially the same as or close to that of the glass material, but the coefficient of thermal expansion may be slightly different from that of the glass material if the thickness of the metal layer is a thin film or in a foil state.

As described above, in the light emitting element with the micro optical element according to the second to ninth aspects, the micro optical element attached to the light emitting element is characterized in form or structure.

The "micro optical element" described in claim 10 is a micro light emitting element which is attached to the light emitting element in a state where its optical axis is aligned with the light emitting element, and the micro optical element according to claim 2 or 3 or 4 or 5 or 6 or 7 or 8 or 9 It is used for the light emitting element with the micro optical element described.

[0033]

As described above, in the "light emitting element with micro optical element" of the present invention, the micro optical element formed separately from the light emitting element is attached to the light emitting element, so that the degree of freedom in selecting the material of the micro optical element is high. large.

Further, it is possible to process a convex surface, a concave spherical surface, or an aspherical refraction surface shape on the material of the micro optical element, and the refraction surface shape can be processed according to the "near field pattern" of the light emission of the light emitting element. Can be set, and the degree of freedom in refracting surface processing is great.

In general, a light emitting element such as an LD is constructed by joining a light emitting element on a heat sink, but the end surface of the heat sink and the end surface of the light emitting element do not necessarily coincide with each other. There is “variation” of ± 10 μm.

In the present invention, when the micro optical element is attached to the light emitting element, the light emitting element itself is positioned not on the end surface of the heat sink but on the light emitting end surface of the light emitting element itself.

[0037]

EXAMPLES Specific examples will be described below.

FIG. 1 is a diagram for explaining one embodiment of the "light emitting element with a micro optical element" of the present invention.

FIG. 1A shows an "LD light emitting element" which is an example of a light emitting element side to which a micro optical element can be attached. The “light emitting element” indicated by reference numeral 100 is the “LD light emitting element device” in this example.

The light emitting element 100 is fixed on the heat sink 101 by soldering the n-side electrode portion of the light emitting element 100 for heat dissipation. Heat sink 10
1 is composed of aluminum nitride, Si, diamond, or the like.

The light emitting end surface portion 100 'of the light emitting element 100 and the side end surface 101' of the heat sink 101 are "generally the same surface" as shown in FIG. 1 (a). The faces are not aligned with sufficient accuracy to align the optical axes.

FIG. 1B shows the light emitting device 10 in FIG.
The part near 0 is shown in a simplified manner. In this figure, the light emitting end face portion 100 'of the light emitting element 100 and the side end face 101' of the heat sink 101 are drawn on the same plane.
In reality, there is usually a discrepancy between these faces.

In FIG. 1B, reference numeral 103 indicates a light emitting portion which is an end portion on the side of the light emitting end surface portion 100 ′, and light is emitted from this light emitting portion 103 as a divergent light flux 102.
Reference numeral 104 indicates the central axis of the emitted light beam 102, that is, the optical axis of the light emitting element 100.

FIG. 1C shows a state in which the minute optical element 107 is attached to the light emitting end surface portion 100 ′ of the light emitting element 100 so that the optical axis is aligned with the light emitting element 100.

The micro optical element 107 has an entrance surface 107 ′ and an exit surface 107 ″ facing the light emitting element 100 side as “condensing refraction surfaces”, and on the side facing the light emitting element 100, A convex portion is formed to determine the optical distance between the light emitting end surface portion 100 ′ of the light emitting element 100 and the micro optical element 107 (claim 5).

The micro-optical element 107 is also provided with a metallizing film 106 for bonding in a portion other than the effective diameter of the light beam (claim 7). Incident surface 10 of micro optical element 107
The distance (on the optical axis) between 7 ′ and the light emitting end face portion 100 ′ of the light emitting element 100 is determined based on the optical design, and the convex portion (rib) of the micro optical element 107 is configured so that the designed distance can be realized. The height is determined (Claim 5). In this case, the metallized film 106 is formed extremely thin.

Alternatively, the thickness of the metallized film 106 can be adjusted and set so that the designed distance can be realized by the height of the convex portion and the thickness of the metallized film (claim 8).

In FIG. 1C, the light emitting element 100 is turned on with the micro optical element 107 in contact with the light emitting end surface portion 100 'of the light emitting element 100, and the micro optical element 107 is moved along the light emitting end surface portion 100'. Displace and align the optical axis with the "automatic optical axis adjuster", and then laser with the optical axis aligned.
3 shows a state in which the minute optical element 107 is attached to the light emitting element 100 by the metallized film 106 by simultaneous three-point spot irradiation.

If the minute optical element 107 is made of a material having excellent environment resistance and is attached to the light emitting element 100 in a state where the optical axis is aligned as described above, the environment resistance is excellent and the adhesion to the minute optical element is good. It is possible to realize a "light emitting element with a micro optical element" which is excellent in optical axis alignment accuracy.

The "light emitting element with a micro optical element" of the embodiment described with reference to FIG. 1 is a "light source for optical communication (having a coupling function)" as shown in FIG. 1 (c). is there. The laser light emitted from the light emitting element (LD) 100 is condensed by the minute optical element 107, and the core 109 (core diameter: 10 μm) of the single mode optical fiber 108 is collected.
m).

In the embodiment shown in FIG. 1, as shown in FIG. 1 (c), the entrance surface 107 'of the micro optical element 107 and the light emitting end surface portion 100' of the light emitting element 100 are "slightly separated".
As described above, the sum of the height of the convex portion provided outside the effective beam diameter of the micro optical element 107 and the height of the metallized film 106 is the incident surface 107 ′ and the light emitting end surface portion 100. Processing is performed so that it becomes a "distance (alignment amount) based on the optical design" between "and".

As a matter of course, the incident surface of the optical element 107 does not have to be a "spherical surface", and may have an aspherical shape, a flat shape, or a concave shape.

Modifications are shown in FIGS.

FIG. 2 schematically shows an embodiment of the invention described in claim 3. The micro optical element 207 has an incident surface 207 ′,
Although the exit surface 207 ″ is also a refraction surface having a light collecting property, the top of the entrance surface 207 ′ is the light emitting end surface portion 100 ′ of the light emitting element 100.
Is in direct contact with.

In this case, the height of the convex portion 207a provided outside the effective ray diameter of the micro optical element 207 is set to the incident surface 20.
7'and formed to be equal to the height of 7 ', and bonded to the light emitting end surface portion 100' with an extremely thin metallized film (claim 5), or the sum of the height of the convex portion 207a and the thickness of the metallized film is the incident surface. It suffices to perform processing so that the height is the same as that of the top portion of 207 'and then perform the joining (claim 8).

In the example described with reference to FIGS. 1 and 2,
Although the "alignment amount" is set by the convex portion or the convex portion provided outside the effective beam diameter of the micro optical element and the metallized film, in the above example, the metallized film has a "relatively thin" thickness in any case. Is.

Naturally, the convex portion is made of the same material as the micro optical element. Depending on the material of the micro-optical element, there may be a case where the processing of the above-mentioned "projection" is limited by cost, processing time, or the like.

In such a case, as in the embodiment shown in FIG. 3, the thickness of the metallized film 308 formed outside the effective light beam diameter of the micro optical element 307 is positively increased to obtain the required optical distance. (Alignment amount) can be secured (claim 8).

The alignment amount is further increased,
When it is difficult to secure the convex portion or the metallized film, as in the embodiment shown in FIG. 4, the incident surface 407 ′ of the micro optical element 407 and the light emitting end surface portion 100 ′ of the light emitting element 100 are formed.
The distance may be determined by joining the metal layer 408 whose thickness is controlled in advance for determining the optical distance to the micro optical element 407 in accordance with the distance between and.

The metal layer 408 is bonded by the above-mentioned "Mallory method". The Mallory method is simple in the bonding operation and can be hermetically bonded at a low temperature to endure a heat cycle, and the glass is bonded as a solid state. Since it is possible, there are advantages such as no distortion and loss of optical properties. Further, the treatment can be performed in a short time, large pressure is not required, and it is advantageous in cost.

FIG. 5 is a view for explaining one embodiment of the invention described in claim 6.

In the embodiment of FIG. 1, the micro-optical element 107 is attached by directly bonding it to the light emitting end surface portion 100 'of the light emitting element 100. In this embodiment, the bonding itself is the side end surface of the heat sink 101. Done against.

That is, the micro optical element 1107 has a larger area than the light emitting end surface portion 100 ′ of the light emitting element 100.

As shown in FIG. 5B, the micro optical element 1
107, the entrance surface 1107 ′ is a flat surface, and the exit surface 110
Reference numeral 7 ″ is a refracting surface, but outside the effective ray diameter of the entrance surface 1107 ′, it comes into contact with the light emitting end surface portion 100 ′ and the distance (alignment amount) between the light emitting end surface portion 100 ′ and the entrance surface 1107 ′. ) Is formed to secure the light emitting end face portion 1106 of the light emitting element 100 by contacting the light emitting end face portion with the convex portion 1106 (see FIG. 5A).
Positioning is performed with reference to 00 '.

As shown in FIG. 5B, the metallized film 110 for bonding is formed on the planar portion outside the convex portion 1106.
5 is formed, and as shown in FIG. 5A, the metallized film 1105 is attached to the side end surface 101 ′ of the heat sink 101 to attach the micro optical element 1107.

A specific example will be described below.

A micro optical element as shown in FIG. 6A was manufactured.

As shown in the right diagram of FIG. 6A, the micro optical element 707 has a refracting surface 707 ″ formed on the exit surface side.

The incident surface side of the micro optical element 707 is shown in FIG.
It is as shown in the left figure of (a). That is, the incident surface 7
Reference numeral 07 'is a "plane", and outside the effective light diameter of the incident surface 707', a cylindrical convex portion 706 is formed in a portion having a diameter of 0.1 mmφ about the center of the incident surface 707 '(optical axis portion).
However, height: 0.1 mm, outer diameter: 0.2 mmφ (width: 50
μm).

The outside of the convex portion 706 is an incident surface 707 '.
Is a flat surface with a height of 50 μm, and the thickness is about 4
0 μm metallization film for bonding (Au / Ni / Cr film)
705 is applied.

The minute optical element 707 is arranged as shown in FIG. 6B, and the light emitting element 7 which is an LD light emitting element device is arranged.
It was attached to 00. The metallized film 705 described above is attached.
However, as shown in FIG. 6C, it is mainly performed on the side end surface 701 ′ of the heat sink 701 (the hatched portion indicated by the broken line in the figure is the joining portion).

As shown in FIG. 6 (b), a cylindrical positioning projection 706 having a width of 50 μm is provided as a light emitting end face 701 '.
Is used for positioning the light emitting element 700 and the micro optical element 707. As a matter of course, at the time of bonding, the light emitting element 700 is caused to emit light (light up) and the micro optical element 707 is used.
The optical axis is aligned with the optical axis 704 of the light emitting element 700.

Concrete Example 1 The micro optical element 707 in FIG. 6 was manufactured under the following conditions. Element material: SF60 (refractive index at wavelength 1.3 nm:
1.7676), material plate (parallel plate) thickness: 0.5 m
m was used.

[0074] 'While a plan, a refractive surface exit surface 707' incident surface 707 'is well known aspheric expression: Z = (1 / R) h 2 / {1 + √ [1- (K + 1) ( 1 /
R) ² h ² ]} + A · h ⁴ + B · h ⁶ + C · h ⁸ R: radius of curvature on optical axis h: distance from optical axis K: conical constant A, B, C: high-order aspherical constant Z: Distance from lens apex R = −0.252 mm K = −0.6583874 A = −0.7539292 B, C = 0 The NA of the micro-optical element 707 on the light emitting element side is 0.6.

In the mounted state shown in FIG. 6B, the distance from the light emitting end surface portion 700 'to the incident surface 707' is set to 0.
It was set to 1 mm. Also, from the exit surface 707 ″ to the optical axis 704
An end face of a single mode fiber (not shown) was arranged at a position (above the position where the light beam is condensed) separated by 2.2972 mm.

In this way, a small-sized and light-weight "light-emitting element with a small optical element" for a single mode coupler having a total length of about 7 mm could be manufactured.

The light utilization efficiency of this light emitting element (the efficiency with which the light emitted from the light emitting element enters the optical fiber) was about 57% as in the case of the conventional coupler (the efficiency is on the first surface side). Almost determined by NA value).

Concrete Example 2 In the configuration shown in FIG. 6A, the incident surface 707 'of the micro optical element 707 is a flat surface, and the diameter outside the effective diameter of the light beam is:
A cylindrical positioning convex portion 70 is provided on the 0.1 mmφ portion.
6, height: 0.05 mm, outer diameter: 0.2 mmφ (width:
50 μm), and the outside thereof was a flat surface having a height of 10 μm with reference to the incident surface 707 ′, and a metallizing film (Au / Ni / Cr film) for bonding having a thickness of about 5 μm was applied.

In the bonded state to the light emitting device 700 shown in FIG. 6B, a cylindrical convex portion 706 having a width of 50 μm was in contact with the light emitting end face portion 700 ′ and bonded with a metallized film. Of course,
At the time of bonding, the light emitting element is caused to emit light (lighted) to align the optical axes of the optical element and the minute optical element.

The micro optical element 707 was manufactured under the following conditions. Element material: SF60 (refractive index at wavelength 1.3 nm:
1.76767), material plate thickness: 0.3 mm.

The refracting surface 707 ″ has an aspherical shape, and in the above aspherical surface expression, R = −0.177 mm K = −0.7445704 A = −0.3542086 × 10 ¹ B, C = 0 Is. The NA on the light emitting element side is 0.6.

In the attached state shown in FIG. 6B, the distance from the light emitting end face portion 700 'to the incident surface 707' is set to 0.
It was set to 05 mm. Also, from the exit surface 707 ″ to the optical axis 70
An end face of a single mode fiber (not shown) was placed at a position separated by 1.6183 mm (the position where the light beam is condensed) on No. 4 above.

In this way, a small-sized and light-weight "light emitting device with a micro optical element" for a single mode coupler having a total length of about 6 mm could be manufactured.

The light utilization efficiency of this light emitting device (the efficiency with which the light emitted from the light emitting device is incident on the optical fiber) was about 70% as in the case of the conventional coupler.

Concrete Example 3 In the configuration shown in FIG. 6A, the incident surface 707 'of the micro optical element 707 is a flat surface, and the diameter outside the effective diameter of the light beam is:
A cylindrical positioning convex portion 70 is provided on the 0.1 mmφ portion.
6, height: 0.05 mm, outer diameter: 0.2 mmφ (width:
50 μm), and the outside thereof was a flat surface having a height of 10 μm with reference to the incident surface 707 ′, and a metallizing film (Au / Ni / Cr film) for bonding having a thickness of about 5 μm was applied.

In the bonded state to the light emitting device 700 shown in FIG. 6B, a cylindrical convex portion 706 having a width of 50 μm was in contact with the light emitting end face portion 700 ′ and bonded with a metallized film. Of course,
At the time of bonding, the light emitting element is caused to emit light (lighted) to align the optical axes of the optical element and the minute optical element.

The micro optical element 707 was manufactured under the following conditions. Element material: SFS01 (refractive index at wavelength 1.3 nm: 1.87439), material plate thickness: 0.5 mm.

The refracting surface 707 ″ has an aspherical shape, and in the above aspherical surface formula, R = −0.257 mm K = −0.1357071 × 10 ¹ A = −0.5103901 × 10 ¹ B, C = 0 It is the shape. NA on the light emitting element side is 0.4.

In the attached state shown in FIG. 6B, the distance from the light emitting end face portion 700 'to the incident surface 707' is set to 0.
It was set to 05 mm. Also, from the exit surface 707 ″ to the optical axis 70
An end face of a single mode fiber (not shown) was placed at a position separated by 1.4670 mm (the position where the light beam is condensed) on No. 4 above.

In this way, a small-sized and light-weight "light emitting element with a micro optical element" for a single mode coupler having a total length of about 6 mm could be manufactured. Light utilization efficiency of this light emitting element (efficiency of light emitted from the light emitting element entering the optical fiber)
Was about 55% like the conventional coupler.

The refraction surface was prepared by forming a photoresist layer on a parallel plate of the material, patterning a pattern corresponding to the refraction surface on the photoresist layer, and heat-treating the surface to form a convex curved surface. The shape of the convex curved surface was engraved on a parallel plate by anisotropic etching, and the etching conditions were computer-controlled so as to obtain a desired aspherical shape.

[0092]

As described above, according to the present invention, it is possible to provide a novel "light emitting element with a micro optical element" and "micro optical element".

The light emitting element with the micro optical element of the present invention is
Since the light emitting element is formed separately from the light emitting element and attached to the light emitting element, it is possible to accurately select a material according to the wavelength characteristics of the light emitting element from among materials having excellent environmental resistance, so that it can be manufactured accurately. It has excellent environmental resistance, has no limitation on the wavelength used, and can be realized at low cost.

Further, since it is provided very close to the light emitting end face portion of the light emitting element, the micro optical element itself is small, so that the whole can be realized compactly and at low cost.

Further, since the micro optical element is integrated with the light emitting element by aligning the optical axis, it is only necessary to align the end face of the optical fiber and the optical axis of the light emitting element when using, and the optical axis can be easily aligned. Yes Workability is good.

In the fifth and subsequent aspects of the invention, the optical distance between the micro optical element and the light emitting end face portion of the light emitting element can be easily determined (alignment), so that only the optical axes need to be aligned during mounting. It is possible to realize a light emitting element with a micro optical element, which has good yield and good yield.

[Brief description of drawings]

FIG. 1 is a diagram for explaining one embodiment of a light emitting element with a micro optical element according to the present invention.

FIG. 2 is a diagram for explaining another embodiment.

FIG. 3 is a diagram for explaining another embodiment.

FIG. 4 is a diagram for explaining another embodiment.

FIG. 5 is a diagram for explaining still another embodiment.

FIG. 6 is a diagram for explaining a specific example.

[Explanation of symbols]

 100 light emitting element 100 'light emitting end face portion 101 heat sink 107 micro optical element

Claims (10)

[Claims] 1. A microscopic optical element having one or two condensing refracting surfaces attached to the light emitting end surface of the light emitting element in a state in which the optical axis is aligned with the optical axis of the light emitting element. Light emitting element with optical element. 2. The light emitting element with a micro optical element according to claim 1, wherein the surface of the micro optical element on the light emitting element side is a flat surface, and the surface on the emission side is a converging refraction surface. Light emitting device with a device. 3. The light emitting element with a micro optical element according to claim 1 or 2, wherein the micro optical element has an optical axis aligned with an optical axis of the light emitting element, and an incident surface of the micro optical element and a light emitting end surface portion of the light emitting element. A light emitting element with a micro optical element, characterized in that a micro optical element is attached to a light emitting element so as to be in direct contact with. 4. The light emitting element with a micro optical element according to claim 1 or 2, wherein the micro optical element has an optical axis aligned with an optical axis of the light emitting element, and an incident surface of the micro optical element and a light emitting end surface portion of the light emitting element. A light-emitting element with a micro-optical element, characterized in that the micro-optical element is attached to the light-emitting element with a slight separation between and. 5. The light emitting element with a micro optical element according to claim 3 or 4, wherein the micro optical element has a convex portion having a height equal to or higher than an incident surface height for determining an optical distance, outside the effective diameter of the light ray. A light-emitting element with a micro-optical element characterized by having. 6. The light emitting element with a micro optical element according to claim 1, 2 or 3 or 4, wherein the micro optical element is based on a light emitting end face portion of the light emitting element.
A light emitting element with a micro optical element, which is fixed to a light emitting end face portion or a heat sink holding the light emitting element. 7. The light emitting element with a micro optical element according to claim 1, 2 or 3 or 4 or 5 or 6, wherein a metallized film for bonding with the light emitting element is provided at a portion outside the effective light beam diameter of the micro optical element. A light emitting element with a micro optical element, which is characterized by being formed. 8. A light emitting device with a micro optical element according to claim 7, wherein the metallized film is formed to a thickness for adjusting the distance between the micro optical device and the light emitting device in the optical axis direction. Light emitting element with optical element. 9. The light-emitting element with a micro-optical element according to claim 6, wherein the micro-optical element has a metal layer whose thickness is controlled beforehand for determining an optical distance, which is bonded to the surface on the light-emitting element side. A light-emitting element with a micro optical element characterized by. 10. A micro optical element used for the light emitting element with a micro optical element according to claim 2, 3 or 4, 5 or 6 or 7 or 8 or 9.