JPH08165572A - Water passing device in vacuum treating chamber - Google Patents

Abstract

PURPOSE: To provide a water passing device for passing water to a part through which water is passed arranged in a vacuum chamber to conduct the desired treatment in a specified vacuum from the outside of the chamber, having the part capable of being detached without depositing the water in the device in the chamber. CONSTITUTION: An detachable intermediate connector 2 is inserted into the through hole 13 of a flange 12 (wall part of a vacuum treating chamber) fixed to the wall main body 11 of the vacuum treating chamber 1 to cover the opening 111 from the inside of the chamber and fixed by a disassemblable fixing means 3, and a part 10 in the chamber 1 through which water is passed is connected to the end of a water passage 20 piercing the connector 2 inside the chamber and a cooling water feed means to the end outside the chamber to constitute the water passing device A. When the part 10 is detached, the water passage 20 in the connector 2 is closed outside the chamber, the fixing means 3 is disassembled, and the connector 2 is drawn out inside the chamber.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water-passing device for passing water from the outside to a water-passing portion arranged in a vacuum processing chamber for performing a desired treatment under a predetermined vacuum.

[0002]

2. Description of the Related Art A vacuum processing chamber forms a predetermined film on a substrate for manufacturing a thin film device by a plasma CVD method or a film forming method by a combination of vacuum deposition and an ion beam, and an etching target is a plasma. It is used for etching and processing by ion beam milling, etc., for example, for smooth and accurate processing in film forming processing, plasma etching processing, ion beam milling processing, etc. The substrate on which the film is to be formed or the object to be etched may be cooled due to a low temperature. Such cooling is usually performed by passing cooling water through a holder that supports the object to be processed.

The parts to be processed such as the object holders arranged in the vacuum processing chamber and the parts to be passed through which the cooling water should pass are conventionally represented by the water passing device shown in FIG. Cooling water is supplied by the device. In the water passage device shown in FIG. 8, the water passage flange 9 is applied to the outer surface of the wall 81 of the vacuum processing chamber 8 so as to cover the through hole 811 provided in the wall 81 from the outside, and is fixed to the wall 81 with a bolt 91 or the like. In addition, the gap between the flange 9 and the wall 81 is airtightly filled with an airtight sealing ring 92 such as an O-ring, and the indoor side end of the water pipe 93 that is fixed in advance to the water passage flange 9 is connected. The end of the water passage flange 9 on the outdoor side of the water passage pipe 93 is connected to the water-passing portion 10 in the room by a piping means including a pipe such as a flexible stainless steel tube 95 via a separable connector 94. Is connected to a cooling water supply means (not shown) through a suitable connector 95.

In FIG. 8, two sets of the water-passing device described above are provided for the water-passing part 10, which supplies cooling water to the water-passing part 10 by one water-passing device. This is because water is discharged from the water-passing part 10 by the other water-passing device, and thereby cooling water is supplied and circulated to the water-passing part 10.

[0005]

However, according to such a conventional water-passing device, when the water-permeable portion 10 is to be removed for inspection, cleaning or the like of the vacuum processing chamber, the water-passing flange 9 and the water passage flange 9 are removed. The outdoor wall or the like connected to the water pipe 93 cannot be drawn into the outdoor room as it is because the room wall 81 is an obstacle.

Therefore, it must be detached by separating it at the connectable / separable connector 94 in the chamber 8. At this time, no matter how much care is taken, residual water in the pipe often spills into the chamber 8 from the water pipe 93 or the pipe 95 on the side of the water-passing portion 10. Room 8 in this way
The moisture adhering to the inside evaporates when the inside of the chamber 8 is made to have a predetermined vacuum pressure at the time of the next vacuum treatment, so that the predetermined degree of vacuum cannot be achieved quickly, or the target treatment is adversely affected. There is.

Therefore, the present invention is a water-passing device for passing water from the outside to a water-passing portion arranged in a vacuum treatment chamber for carrying out a desired treatment under a predetermined vacuum. An object of the present invention is to provide a water passage device capable of removing a water passage portion without fear of adhering water in the water device.

[0008]

A water-passing device of the present invention which solves the above-mentioned problems, is to pass water from the outside to a water-passing portion arranged in a vacuum processing chamber for carrying out a desired treatment under a predetermined vacuum. A water passage device for carrying out, an intermediate connecting body having a through water passage, a vacuum processing chamber wall portion having a through hole for fitting the intermediate connecting body, and the intermediate connecting body to the vacuum processing chamber wall. A disassemblable fixing means for fixing it in the through hole of the part and a gap between the intermediate connecting body and the chamber wall part while being fitted and fixed in the through hole of the vacuum processing chamber wall part. And means for hermetically closing the.

The through hole in the wall portion of the vacuum processing chamber and the intermediate connecting member fitted into the through hole are formed so that the intermediate connecting member can be pulled out from the through hole to the inside of the chamber. The water-passing part may be connected to the end of the through-passage in the body facing the vacuum processing chamber. Further, in one water passage device according to the present invention, an outdoor water supply means is communicatively connected to an end portion of the intermediate connection body facing the outside of the vacuum processing chamber of the through water passage, or is connected to the end portion. In this state, it is possible to connect the plug means that can pass through the through hole of the wall of the vacuum processing chamber as the intermediate connector moves.

In another water passage device according to the present invention, a connector with a shutoff valve for connecting and connecting an outdoor water supply means is connected to an end portion of the through water passage of the intermediate connector facing the outside of the vacuum processing chamber. As the connector, a connector that can pass through the through hole in the wall portion of the vacuum processing chamber along with the movement of the intermediate connector is adopted. In any of the above cases, the vacuum processing chamber wall portion provided with the through hole into which the intermediate connecting body is fitted may be a part of the wall body of the vacuum processing chamber, or the opening portion provided in the wall body may be provided. A flange or the like that is fixed to the wall body so as to cover it and becomes a wall portion of the vacuum processing chamber may be used.

Whatever the wall of the vacuum processing chamber is,
The through hole of the wall portion and the intermediate connecting body fitted therein are
It suffices if the intermediate connecting body is formed so as to be able to be pulled out to the room side from the through hole. As a typical example of a simple structure in that case, the through hole has two or more hole portions having different inner diameters. From the inner diameter to the outer side, the intermediate connection body is connected from the inner side to the outer side in order from the inner side to the outer side, and the intermediate connecting body has two or more portions having different outer diameters corresponding to the inner diameters of the through holes from the large outer diameter. Small ones may be connected in order and can be fitted into and removed from the inside of the through hole, but it cannot be fitted and removed from the outside of the room, and the through water passage may be formed as a whole. it can.

It is also conceivable that the intermediate connector has a flange having a larger diameter than the other portion at the end on the indoor side, and the through hole of the wall portion has an inner diameter capable of fitting only the other portion. . In any of the above cases, the decomposable fixing means for fixing the intermediate connector to the position of the through hole of the vacuum processing chamber wall portion, which is disassembled, is usually a complicated labor in a narrow vacuum processing chamber. In order to avoid
It is desirable to have a structure that can be fixed and disassembled from outside the vacuum processing chamber.

As such fixing means that can be easily and surely fixed, when the intermediate connector is fitted in the through hole of the wall portion of the vacuum processing chamber, the intermediate connector is exposed to the outside from the outer surface of the wall portion. Includes a threaded portion integrally formed with the intermediate connecting body so as to project and provided with an external thread on the outer periphery thereof, and a ring-shaped nut that can be engaged with and disengaged from the threaded portion, and engage the nut with the threaded portion. The intermediate connector can be fixed to the wall of the vacuum processing chamber by tightening it toward the wall of the vacuum processing chamber. However, when this fixing means is adopted, the intermediate connecting body and the through hole are formed so that the intermediate connecting body can be pulled out to the indoor side through the through hole, but cannot be pulled out to the outdoor side. Keep it. A spacer ring may be interposed between the ring-shaped nut and the wall of the vacuum processing chamber.

Further, when the fixing means including the male screw and the nut engaged with the male screw is adopted, at least a part of the through hole of the vacuum processing chamber wall part and the intermediate connecting body part corresponding thereto are provided. It is desirable that they be formed so as to be relatively prevented from rotating by fitting them together.
By adopting such a structure, the fixing operation of the intermediate connecting body by the fixing means including the male screw and the nut engaged with the male screw becomes easy.

As means for hermetically closing the gap between the intermediate connector and the chamber wall portion in a state where the intermediate connector is fitted and fixed in the through hole of the vacuum chamber wall portion, the structure is simple.
The groove may be formed on at least one of the outer peripheral surface of the intermediate connector and the inner peripheral surface of the through hole of the wall portion, and an airtight sealing ring such as an O-ring fitted in the groove. . In addition, a groove formed on at least one of the surface on the vacuum processing chamber wall portion side of the flange integrally formed at the indoor side end of the intermediate connector and the vacuum processing chamber wall portion inner surface facing the flange, and It is also conceivable to have a hermetically sealing ring, such as an O-ring, which can be fitted. In any case, when the intermediate connecting body is removed from the wall portion through hole, the airtight sealing ring should be provided in the intermediate connecting body in order to facilitate cleaning of adhering dust and the like. desirable.

The above-mentioned connector with a shut-off valve is a type in which the valve is automatically opened when the connector connected to the water supply means is connected, and the valve is automatically closed when the connector is disconnected. It can be opened and closed with.

[0017]

According to the water passage device of the present invention, the intermediate connecting body is fitted into the through hole formed in the wall portion of the vacuum processing chamber for carrying out the intended treatment, and is fixed at that position by the fixing means. . The gap between the intermediate connector fixed in this way and the through hole is airtightly closed by means of airtightly closing it. The indoor-side end of the through-water passage in the thus fixed intermediate connector is connected to the water receiving portion in the vacuum processing chamber.

In one water passage device according to the present invention, the outdoor end of the water passage is connected to an outdoor water supply means.
Thus, water can be supplied to the water-passing portion. When the water-passing part is removed for inspection, cleaning, etc. in the vacuum processing chamber, the water supply means is separated from the intermediate connector outside the room, and then the vacuum processing chamber wall portion is moved along with the movement of the intermediate connector. The plug means that can pass through the through hole is connected. Next, the fixing means is disassembled, and the intermediate connecting body is withdrawn into the room from the through hole in the wall of the vacuum processing chamber while the water passage part and the plug means are connected. Thus, the water passage part is removed from the proper position. Since the plug means is preliminarily connected outdoors before taking out the intermediate connector from the wall portion, it is possible to prevent water from flowing out and adhering from the water-flowing device into the vacuum processing chamber when removing the water-permeable portion in this way. It

Further, in another water flow apparatus according to the present invention, the outdoor water supply means is connected in communication with the connector with the shut-off valve connected to the outdoor end of the through water passage of the intermediate connector. As a result, water can be supplied to the water passage portion.
When the water passage part is removed for inspection, cleaning, etc. in the vacuum processing chamber, the water supply means is separated from the connector outside the chamber and the stop valve of the connector is closed. Next, the fixing means is disassembled, and the intermediate connecting body is withdrawn to the room from the through hole of the wall part of the vacuum processing chamber while the water passage part and the connector with the shutoff valve are connected. Thus, the water passage part is removed from the proper position. Since the shut-off valve of the connector is closed in advance outside the room before taking out the intermediate connector from the wall portion, it is possible to prevent water from flowing out from the water passage device and adhering to the vacuum processing chamber when removing the water passage portion in this way. To be done.

[0020]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing a state in which a water passage device A according to an embodiment of the present invention is mounted in a vacuum processing chamber 1. In FIG. 1, two water-passing devices A are provided for a water-passing portion 10 arranged in a vacuum processing chamber 1 for performing a desired treatment under a predetermined vacuum. One is for introducing cooling water into the water-passing portion 10, and the other is for discharging cooling water from the water-passing portion 10. Both water flow devices have the same structure.

Each water passage device A includes an intermediate connector 2. The intermediate connector 2 is fitted into the through hole 13 of the flange 12, and the flange covers the opening 111 provided in the wall body 11 of the vacuum processing chamber 1 so that the bolt 1 is attached to the outer surface of the wall body 11.
It is fixed at 4 and forms the wall portion of the processing chamber 1. An O-ring 15 is provided between the flange 12 and the processing chamber wall body 11 to hermetically close this gap.

The through hole 13 of the flange 12 integrally connects two hole portions 131 and 132 having different inner diameters by arranging the large inner diameter portion 131 on the indoor side and the small inner diameter portion 132 on the outdoor side. It is a thing. The intermediate connecting body 2 is formed by sequentially connecting three parts 21, 22, and 23 having different outer diameters integrally, and the outer diameter gradually increases from the part 21 on the indoor side to the central part 22 and further to the part 23 on the outdoor side. It is getting smaller. The outdoor-side portion 23 is a male screw portion provided with a male screw 231 on the outer circumference.

Further, the intermediate connector 2 is provided with a through water passage 20 in the central portion, a male connector 20a is fixed to the indoor end of the water passage, and a male connector 20b is attached to the outdoor end. Is stuck. Thus, the intermediate connector 2 is fitted into the flange through hole 13 from the inside of the vacuum processing chamber 1, and the innermost portion 21 having the largest diameter is the large diameter hole portion 131 of the through hole.
In addition, the central portion 22 having a smaller diameter than that is just fitted into the small diameter hole portion 132 of the through hole, and is in a state in which it cannot move to the outside of the room. In this state, a part of the central portion 22 and the outdoor portion 23 having the smallest diameter with the external thread are projected from the flange 12 to the outside.

The through hole 13 and the intermediate connector 2 are formed in a circular cross section, but a part of the small diameter hole portion 132 of the through hole is formed in a pair of parallel flat surfaces 132a as shown in FIG. The central portion 22 of the intermediate connector so that it fits into this
Also, a pair of parallel flat surfaces 22a is formed. Thus, the intermediate connector 2 is not rotatable relative to the through hole 13.

Further, a groove is formed on the outer periphery of the indoor side portion 21 of the intermediate connecting body 2, and an O-ring 24 for airtight sealing is fitted therein and is in airtight contact with the inner surface of the through hole. A spacer ring 31 is externally fitted to a portion of the central portion 22 of the intermediate connector 2 protruding from the flange 12, and the male screw 231 is engaged with the ring-shaped nut 32 from the outer side of the spacer ring 31 and tightened. The connection body 2 is fitted in the flange through hole 13 and is fixed at that position. Here, the male screw 231, the spacer ring 31 and the nut 32 constitute the fixing means 3 of the intermediate connector 2. Although the nut 32 is a hexagonal nut here, it may be provided with a non-slip unevenness by knurling or the like on the outer peripheral surface so that it can be manually turned.

The same piping device 4 is liquid-tightly connected to the cooling water inlet 101 and the cooling water outlet 102 of the water passage portion 10, and the female connector 41 at the end of one piping device 4 is Indoor connector 20 of intermediate connector 2
a, the female connector 41 at the end of the other piping device 4 is liquid-tightly connected to the indoor male connector 20a of the other intermediate connector 2.

Male connector 2 on the outdoor side of each intermediate connector 2
0b is liquid-tightly connected to a female connector 51 at the end of the piping device 5 extending from a cooling water supply means (not shown). According to the water flow apparatus A described above, the cooling water can be supplied and circulated through the water-passing portion 10 by operating the cooling water supply means (not shown). When the water-permeable portion 10 is removed for inspection, cleaning, etc. in the vacuum processing chamber 1, first, as can be seen from FIG. 3, first, from the male connector 20b of the intermediate connector 2 to the female connector of the outdoor piping device 5 outside the chamber 1. After removing 51, the stopper nut 6 having one end closed is connected in a liquid-tight manner. Then, the ring-shaped nut 32 is attached to the intermediate connector 2.
Then, the spacer ring 31 is pulled out from the intermediate connector 2. After that, the water-passing portion 10, the piping device 4 connected thereto, the intermediate connecting body 2 and the above-mentioned closing nut 6 are moved to the inner side of the chamber 1 together in a state where these are connected, The connection body 2 is extracted from the through hole 13 of the flange 12 to the indoor side, and the plug nut 6 is passed through the through hole 13 and extracted to the indoor side. Thus, the water passage portion 10 is removed from the regular position.

As described above, since the plug nut 6 is preliminarily connected to the outside of the room before the intermediate connector 2 is taken out from the flange 12, when the water-permeable portion 10 is removed, the inside of the vacuum processing chamber 1 is removed. Water is prevented from flowing out and adhering from the water passing device A. To install the water-passing part 10 in the regular position and assemble the water-passing device A, the reverse operation to the above may be performed.

As described above, the water passage device A has a simple structure and a small size, and can be easily disassembled and assembled. FIG. 4 shows another water passage device B according to the present invention. This water passage device B is the same as the water passage device A shown in FIG. 1, in which the indoor end of the through water passage 20 of the intermediate connector 2 is directly fixedly connected to the pipe 42 that communicates with the water passage portion 10. . The other points are the same as those of the water passing device A, and the same parts are denoted by the same reference numerals. Also in this water passage device B, when removing the water-transmitted portion 10 from the regular position, the intermediate connector 2 can be pulled out to the indoor side in the same manner as in the case of the water passage device A.
It can also be assembled in reverse. This water passage device B also has a simple structure, is easy to disassemble and assemble, and prevents water from flowing out of and adhering to the vacuum treatment chamber 1 from the water passage device B, while keeping the water-passing part 10 from the normal position. It can be removed.

FIG. 5 shows still another water passage device C according to the present invention.
Is shown. This water passage device C is a device in which the two sets of water passage devices A shown in FIG. 1 are integrated into one and the structure is simplified. Two water passages 20 are formed in one intermediate connector 2C. The water to-be-passed part 10 and the outdoor cooling water supply means (not shown) can be connected thereto. Except for the size, the parts of the same structure as the water passing device A of FIG.
The same reference numerals as in are attached. This water passing device C
Also, in removing the water-passing portion 10 from the regular position, the intermediate connector 2C can be pulled out to the indoor side as in the case of the water passage device A, and vice versa. This water passing device C also has a simple structure, disassembly,
It is easy to assemble and the water passage device C into the vacuum processing chamber 1
It is possible to remove the water passage portion 10 from the regular position while preventing the water from flowing out and adhering to the water passage portion 10.

FIG. 6 shows still another water passing device D according to the present invention.
Is shown. This water passing device adopts an intermediate connecting body 2D having a flange 25 in place of the intermediate connecting body 2 in the water passing device A of FIG. 1, and a through hole of the flange 12 is formed in a portion outside the flange of the intermediate connecting body 2D. A straight hole 13D that can be fitted is formed, and the intermediate connecting body 2D is fitted into the through hole 13D at a portion outside the flange and the flange 25
Is brought into contact with the inner surface of the flange 12.
A groove is provided in the flange 25, and an O-ring 26 for airtight sealing is fitted therein, and the O-ring 26 is in airtight contact with the inner surface of the flange 12. The O-ring 24 in the device A of FIG. 1 is omitted. In other respects, the structure is the same as that of the device A, and the same parts as those of the device A are designated by the same reference numerals. In this water passage device D as well, when removing the water passage portion 10 from the regular position, the intermediate connection body 2 can be pulled out to the indoor side in the same manner as in the water passage device A, whereby the inside of the vacuum processing chamber 1 can be removed. It is possible to remove the water-passing portion 10 from the regular position while preventing the water from flowing out and adhering to the water passage D from the water passage device D. It can also be assembled in reverse.

In this device D, since the flange 25 is provided on the intermediate connecting body 2, the intermediate connecting body 2 is increased in size, and when the intermediate connecting body 2 is manufactured by cutting with the flange 25, a cutting margin is required. Will increase. Therefore, from the viewpoints of downsizing of the device and cost reduction, the water passage device shown in FIGS. 1, 4, and 5 is more advantageous. Figure 7
Shows a further water passing device E according to the present invention. This water passing device is the same as the water passing device A shown in FIG.
Instead of connecting the male connector 20b to the outdoor end of the through water passage 20 in FIG.
c is liquid-tightly connected. The connector 20c is
When a connector 52 connected to a cooling water supply means (not shown) is connected, the valve automatically opens, and the connector 5
When the two are separated, the valve is automatically closed. In other respects, the structure is the same as that of the device A, and the same parts as those of the device A are designated by the same reference numerals.

In this water passage device E, the outdoor cooling water supply means is connected to the connector 20c with a shutoff valve, which is connected to the outdoor end of the through-water passage 20 of the intermediate connection body 2, thereby connecting the outside cooling water supply means. Water can be supplied to the water flow section. When the water-permeable portion 10 is to be removed for inspection, cleaning, etc. inside the vacuum processing chamber 1, the above-mentioned shut-off valve-equipped connector 2 is used outdoors.
The cooling water supply means is separated from 0c, and the stop valve of the connector is closed. Next, the fixing means 3 is disassembled, and the intermediate connecting body 2 keeps connecting the water passage portion 10 and the connector 20c with the shutoff valve, and the through hole 13 of the flange 12 is formed.
Is extracted into the chamber 1. Thus, the water passage portion 10 is removed from the regular position. Since the shutoff valve of the connector 20c is closed in advance outside the chamber 1 before taking out the intermediate connector 2 from the flange 12, the water-passing portion 10 is
Upon removing, the water is prevented from flowing out and adhering from the water passage device E into the vacuum processing chamber 1.

This water passage device E also has a simple structure, is easy to disassemble and assemble, and can be manufactured in a small size.

[0035]

As described above, according to the present invention,
A water-passing device for passing water from outside to a water-passing portion arranged in a vacuum processing chamber that performs a desired treatment under a predetermined vacuum, and water in the water-passing device is adhered to the room. It is possible to provide a water passage device capable of removing the water passage portion without fear.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a state in which an embodiment of the present invention is installed with respect to a water passage portion in a vacuum processing chamber.

FIG. 2 is a diagram showing a detent structure for an intermediate connector in the water passage device shown in FIG.

FIG. 3 is a diagram showing a state in which the water passage device shown in FIG. 1 is disassembled and a water passage portion is removed from a regular position.

FIG. 4 is a sectional view showing a state in which another embodiment of the present invention is installed in a vacuum processing chamber.

FIG. 5 is a sectional view showing a state where another embodiment of the present invention is installed in a vacuum processing chamber.

FIG. 6 is a cross-sectional view showing a state where another embodiment of the present invention is installed in a vacuum processing chamber.

FIG. 7 is a sectional view showing a state where another embodiment of the present invention is installed in a vacuum processing chamber.

FIG. 8 is a cross-sectional view showing a state where a conventional example is installed in a vacuum processing chamber.

[Explanation of symbols]

A, B, C, D, E Water flow device 1 Vacuum processing chamber 11 Wall body of vacuum processing chamber 12 Flange (vacuum processing chamber wall portion) 13, 13D Through hole 131 Large diameter hole portion of through hole 132 Through hole Small-diameter hole portion 132a 13a Flat surface for rotation prevention in the small-diameter hole portion 132 14 Bolt 15 O-ring 2, 2C, 2D Intermediate connector 20 Through water passage 20a, 20b Male connector 20c Connector with stop valve 21, 22, 23 Intermediate A portion 22a of the connecting body 2 (2C) having a different outer diameter 22a A flat surface for preventing rotation in the portion 22 24 O-ring 25 Flange 26 O-ring 3 Fixing means 31 Spacer ring 32 Ring nut 4 Piping device 41 Female connector 5 Piping device 51 Female connector 52 Female connector 10 Water receiving part

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H01L 21/3065

Claims (2)

[Claims] 1. A water-passing device for passing water from outside to a water-passing portion arranged in a vacuum treatment chamber for performing a desired treatment under a predetermined vacuum, and an intermediate connector having a through-water passage. A vacuum processing chamber wall portion having a through hole for fitting the intermediate connector, and a disassembleable member for fixing the intermediate connector in the through hole of the vacuum processing chamber wall portion in that position. Fixing means, and means for hermetically closing a gap between the intermediate connection body and the chamber wall portion in a state of being fitted and fixed in the through hole of the vacuum treatment chamber wall portion, the through hole of the vacuum treatment chamber wall portion And the intermediate connecting body fitted therein is formed so that the intermediate connecting body can be pulled out to the room side from the through hole, and faces the vacuum processing chamber of the through water passage in the intermediate connecting body. The water-passing part is connected to the end. The external water supply means is connected to the end of the through water passage that faces the outside of the vacuum processing chamber, or the vacuum processing chamber is connected to the end and moves along with the movement of the intermediate connector. A water passage device in a vacuum processing chamber, which can be connected with a plug means capable of passing through a through hole of a wall portion. 2. A water-passing device for passing water from outside to a water-passing portion arranged in a vacuum processing chamber for performing a desired treatment under a predetermined vacuum, and an intermediate connector having a through-water passage. A vacuum processing chamber wall portion having a through hole for fitting the intermediate connector, and a disassembleable member for fixing the intermediate connector in the through hole of the vacuum processing chamber wall portion in that position. Fixing means, and means for hermetically closing a gap between the intermediate connection body and the chamber wall portion in a state where the intermediate connector is fitted in the through hole of the vacuum treatment chamber wall portion, the through hole of the vacuum treatment chamber wall portion, and The intermediate connecting body fitted therein is formed so that the intermediate connecting body can be pulled out to the room side from the through hole, and the end of the through water passage of the intermediate connecting body facing the vacuum processing chamber. The above-mentioned water-passing part can be connected and connected to the part A connector with a shut-off valve for communicating and connecting an outdoor water supply means is connected to an end of the through water passage that faces the outside of the vacuum processing chamber, and the connector performs the vacuum processing as the intermediate connector moves. A water passage device in a vacuum processing chamber, characterized in that it can pass through a through hole in a chamber wall portion.