JPH0815172A - Visual inspection method - Google Patents

Visual inspection method

Info

Publication number
JPH0815172A
JPH0815172A JP6145172A JP14517294A JPH0815172A JP H0815172 A JPH0815172 A JP H0815172A JP 6145172 A JP6145172 A JP 6145172A JP 14517294 A JP14517294 A JP 14517294A JP H0815172 A JPH0815172 A JP H0815172A
Authority
JP
Japan
Prior art keywords
area
inspection
candidate
pixels
exclusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6145172A
Other languages
Japanese (ja)
Other versions
JP2831273B2 (en
Inventor
Mitsuru Shirasawa
満 白澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP6145172A priority Critical patent/JP2831273B2/en
Publication of JPH0815172A publication Critical patent/JPH0815172A/en
Application granted granted Critical
Publication of JP2831273B2 publication Critical patent/JP2831273B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To sufficiently delete a region not to become an object to be inspected by automatically and suitably providing a threshold value for binarizing in response to the object to be inspected. CONSTITUTION:An inspection candidate region including at least a region of an object to be inspected is set in a gray level image obtained by imaging a spatial region including the object to be inspected by imaging means (S1). Then, density threshold values WS, BS in which at least one of a high density side and a low density side is deviated by a specified offset value with respect to the mean density of pixels included in the candidate region is set (S2), and the pixels in the candidate region are binarized by using the values WS, BS (S3). A label is applied to each coupled component of the deleted candidate pixel extracted from the candidate region according to the binarizing (S4). The label is compared with the known label of the object to be inspected, the deleted region is decided (S5), and the region in which the deleted region of the candidate regions is deleted is used as the region to be inspected (S6).

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、被検査物を含む空間領
域を撮像手段により撮像して得た濃淡画像に基づいて被
検査物の外観の傷や汚れのような欠陥や被検査物の形状
などを検査する外観検査方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a defect such as a scratch or stain on the appearance of an object to be inspected or an object to be inspected on the basis of a grayscale image obtained by imaging a spatial region including the object to be inspected by an image pickup means. The present invention relates to a visual inspection method for inspecting a shape and the like.

【0002】[0002]

【従来の技術】一般に、この種の外観検査方法では、被
検査物を含む空間領域をITVカメラのような撮像装置
で撮像し、撮像した画像内での各画素の濃度(すなわ
ち、撮像装置での受光光量)に基づいて、被検査物の正
常な部分と被検査物の欠陥や背景とを識別している。す
なわち、画素の濃度についてしきい値を設定し、このし
きい値を用いて2値化することで、被検査物の正常な部
分と他の部分とに分離するのである。また、この分離を
容易にするために、被検査物に対しては適当な方向から
光を照射し、被検査物の正常な部分と他の部分とに照度
差を生じさせることも一般に行なわれている。
2. Description of the Related Art Generally, in this type of appearance inspection method, a spatial region including an object to be inspected is imaged by an image pickup device such as an ITV camera, and the density of each pixel in the picked-up image (that is, by the image pickup device). The normal portion of the inspection object and the defect or background of the inspection object are identified based on the received light amount). That is, a threshold value is set for the pixel density and binarization is performed using this threshold value to separate the normal portion of the inspection object from other portions. In order to facilitate this separation, it is also common to irradiate the object to be inspected with light from an appropriate direction to cause an illuminance difference between a normal part of the object and other parts. ing.

【0003】[0003]

【発明が解決しようとする課題】ところで、従来は2値
化のためのしきい値が固定的に設定されていたものであ
るから、被検査物の反射率が異なっていたり、被検査物
に照射される光の光量が変化したりすると、被検査物の
正常な部分と他の部分とを正しく分離するような2値化
ができなくなるという問題があった。言い換えると、異
なる被検査物の外観を検査したり、被検査物への照射光
量が変化すると、人手によってしきい値を調節しなけれ
ばならないという問題を有していた。とくに、分離すべ
き部分の濃度差(すなわち、コントラスト)が比較的小
さいと、しきい値の設定が難しくなるという問題があっ
た。
By the way, since the threshold value for binarization is fixedly set in the past, the reflectance of the inspected object is different, or the inspected object has a different reflectance. If the light amount of the irradiated light changes, there is a problem that binarization that correctly separates a normal portion of the inspection object from other portions cannot be performed. In other words, there is a problem that the threshold value must be manually adjusted when the appearance of different inspected objects is inspected or when the irradiation light amount to the inspected object changes. In particular, if the density difference (that is, the contrast) of the portions to be separated is relatively small, there is a problem that it becomes difficult to set the threshold value.

【0004】また、被検査物の外観を検査する際に、検
査する必要のない領域を画像内からできるだけ除去する
ほうが処理すべき画素数が少なくなって処理効率が高く
なるから、検査対象となる領域のみを含むマスクを設定
し、マスク内のみで欠陥の有無や形状を認識することが
行なわれている。しかしながら、屈曲部分を含むような
複雑な輪郭線を有する被検査物について被検査物のみを
含むようなマスクを設定したり、被検査物に形成された
孔や溝あるいは突出部分などに対応する部位のみを検査
対象から除去し傷や汚れなどは検査対象として残すよう
なマスクを設定したりするのは困難であって、処理効率
を充分に高めることができないという問題がある。
Further, when inspecting the appearance of an object to be inspected, the number of pixels to be processed is reduced and the processing efficiency is improved by removing the area which does not need to be inspected from the image. A mask including only an area is set and the presence or absence of a defect and the shape are recognized only in the mask. However, for an object to be inspected having a complicated contour line including a bent portion, a mask is set to include only the object to be inspected, or a portion corresponding to a hole, a groove, or a protruding portion formed in the object to be inspected. It is difficult to set a mask that removes only the target from the inspection target and leaves scratches and stains as the inspection target, and there is a problem that the processing efficiency cannot be sufficiently enhanced.

【0005】本発明は上記問題点に鑑みて為されたもの
であり、被検査物に応じて2値化のためのしきい値を自
動的に設定するとともに、被検査物の正常な部分と他の
部分との濃度差が比較的小さい場合でも適切なしきい値
を設定し、しかも検査対象にならない領域を充分に除外
して処理効率を高めた外観検査方法を提供することを目
的とする。
The present invention has been made in view of the above problems, and automatically sets a threshold value for binarization in accordance with an object to be inspected and determines a normal portion of the object to be inspected. An object of the present invention is to provide an appearance inspection method in which an appropriate threshold value is set even when the density difference from other portions is relatively small, and a region which is not an inspection target is sufficiently excluded to improve processing efficiency.

【0006】[0006]

【課題を解決するための手段】請求項1ないし請求項5
の発明は、上記目的の達成のために、被検査物を含む空
間領域を撮像手段により撮像して得た濃淡画像内に被検
査物の少なくとも一部領域を含む検査候補領域を設定
し、検査候補領域内についての被検査物の外観を検査す
る方法において、検査候補領域に含まれる画素の平均濃
度に対して高濃度側と低濃度側との少なくとも一方に規
定のオフセット値だけ偏移させた濃度しきい値を設定す
るとともに、濃度しきい値を用いて検査候補領域内の画
素を2値化することによって検査候補領域内から除外候
補画素を抽出することを共通構成としている。
Claims 1 to 5
In order to achieve the above-mentioned object, the invention sets an inspection candidate area including at least a partial area of the inspection object in a grayscale image obtained by capturing an image of a spatial area including the inspection object by an image capturing unit, and performs inspection. In the method of inspecting the appearance of the object to be inspected in the candidate area, the specified density is shifted to at least one of the high density side and the low density side with respect to the average density of the pixels included in the inspection candidate area. The common configuration is to set the density threshold and binarize the pixels in the inspection candidate area using the density threshold to extract the exclusion candidate pixels from the inspection candidate area.

【0007】請求項1の発明は、除外候補画素のみを連
結した領域の占める部分である連結成分を既知情報と比
較して連結成分ごとに検査対象外になる除外領域か否か
を決定し、次に検査候補領域のうち除外領域を除いた領
域を検査対象領域とし、検査対象領域内についてのみ被
検査物の外観を検査することを特徴とする。請求項2の
発明は、除外候補画素のみを連結した領域の占める部分
である連結成分の面積が規定の面積しきい値よりも大き
い連結成分を検査対象外になる除外領域として決定し、
次に検査候補領域のうち除外領域を除いた領域を検査対
象領域とし、検査対象領域内についてのみ被検査物の外
観を検査することを特徴とする。
According to the first aspect of the present invention, a connected component, which is a portion occupied by a region in which only exclusion candidate pixels are connected, is compared with known information, and it is determined for each connected component whether or not the exclusion region is excluded from inspection. Next, an area other than the exclusion area in the inspection candidate area is set as an inspection target area, and the appearance of the inspection object is inspected only in the inspection target area. According to the invention of claim 2, a connected component in which an area of a connected component that is a portion occupied by a region connected with only exclusion candidate pixels is larger than a prescribed area threshold is determined as an excluded region to be excluded from the inspection target,
Next, an area other than the exclusion area in the inspection candidate area is set as an inspection target area, and the appearance of the inspection object is inspected only in the inspection target area.

【0008】請求項3の発明は、除外候補画素のみを連
結した領域の占める部分である連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素についてその画素
を挟んでその画素の微分方向値が示す方向に直交する方
向に等距離ずつ離れた一対の画素の濃度差が所定値を越
える画素数が規定の画素数しきい値を越える連結成分を
検査対象外になる除外領域として決定し、次に検査候補
領域のうち除外領域を除いた領域を検査対象領域とし、
検査対象領域内についてのみ被検査物の外観を検査する
ことを特徴とする。
According to a third aspect of the present invention, a connected component in which the number of pixels included in a connected component, which is a portion occupied by a region in which only exclusion candidate pixels are connected, is larger than a prescribed area threshold, and the connected component is For each pixel on the edge, the density difference between a pair of pixels equally spaced in the direction orthogonal to the direction indicated by the differential direction value of the pixel across the pixel exceeds the specified value. The connected component that exceeds the value is determined as the exclusion area to be excluded from the inspection target, and then the area excluding the exclusion area of the inspection candidate area is set as the inspection target area,
It is characterized in that the appearance of the object to be inspected is inspected only within the area to be inspected.

【0009】請求項4の発明は、除外候補画素のみを連
結した領域の占める部分である連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素の微分値の総和が
規定の微分しきい値を越える連結成分を検査対象外にな
る除外領域として決定し、次に検査候補領域のうち除外
領域を除いた領域を検査対象領域とし、検査対象領域内
についてのみ被検査物の外観を検査することを特徴とす
る。
According to a fourth aspect of the present invention, a connected component in which the number of pixels included in a connected component, which is a portion occupied by a region in which only exclusion candidate pixels are connected, is larger than a prescribed area threshold, and the connected component is The connected component whose sum of the differential values of each pixel on the edge exceeds the specified differential threshold is determined as the exclusion area to be excluded from the inspection target, and then the area excluding the exclusion area among the inspection candidate areas is the inspection target area. In addition, the appearance of the inspection object is inspected only within the inspection target area.

【0010】請求項5の発明は、除外候補画素のみを連
結した領域の占める部分である連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素の微分値の総和が
規定の微分しきい値を越えるとともに、連結成分のエッ
ジ上の各画素についてその画素を挟んでその画素の微分
方向値が示す方向に直交する方向に等距離ずつ離れた一
対の画素の濃度差が所定値を越える画素数が規定の画素
数しきい値を越える連結成分を検査対象外になる除外領
域として決定し、次に検査候補領域のうち除外領域を除
いた領域を検査対象領域とし、検査対象領域内について
のみ被検査物の外観を検査することを特徴とする。
According to a fifth aspect of the present invention, a connected component in which the number of pixels included in a connected component that is a portion occupied by a region in which only excluded candidate pixels are connected is larger than a specified area threshold, and the connected component is When the sum of the differential values of each pixel on the edge exceeds the specified differential threshold, and for each pixel on the edge of the connected component, the pixel is sandwiched in the direction orthogonal to the direction indicated by the differential direction value of that pixel, etc. A connected component in which the density difference between a pair of pixels separated by a distance exceeds a predetermined value exceeds a specified pixel count threshold is determined as an exclusion area to be excluded from the inspection target, and then the exclusion area of the inspection candidate area is determined. The area except for is used as the inspection target area, and the appearance of the inspection object is inspected only within the inspection target area.

【0011】[0011]

【作用】請求項1ないし請求項5に共通の構成によれ
ば、被検査物の少なくとも一部領域を含む検査候補領域
に含まれる画素の平均濃度に対して高濃度側と低濃度側
との少なくとも一方に規定のオフセット値だけ偏移させ
た濃度しきい値を設定し、濃度しきい値を用いて検査候
補領域内の画素を2値化することにより検査候補領域内
から除外候補画素を抽出するから、2値化に用いる濃度
しきい値が各被検査物に応じて自動的に設定される。し
かも、被検査物の少なくとも一部を含むように検査候補
領域を設定して、この検査候補領域の平均濃度に基づい
て濃度しきい値を設定していることにより、被検査物の
正常な部分と他の部分との濃度差が比較的小さい場合で
も両者を区別できるような適切な値の濃度しきい値を設
定することが可能になる。
According to the structure common to claims 1 to 5, the high-density side and the low-density side of the average density of the pixels included in the inspection candidate area including at least a partial area of the object to be inspected. An exclusion candidate pixel is extracted from the inspection candidate area by setting a density threshold value shifted to at least one by a specified offset value and binarizing the pixel in the inspection candidate area using the density threshold value. Therefore, the density threshold value used for binarization is automatically set according to each inspection object. Moreover, the inspection candidate area is set to include at least a part of the inspection object, and the density threshold value is set based on the average density of the inspection candidate area. It is possible to set a density threshold value having an appropriate value so that the two can be distinguished from each other even when the density difference between the other area and the other area is relatively small.

【0012】請求項1の発明の構成によれば、2値化に
よって得られた除外候補画素の連結成分を既知情報と比
較して連結成分ごとに検査対象外になる除外領域か否か
を決定し、検査候補領域から除外領域を除いた領域を検
査対象領域とするから、被検査物の孔や突起あるいは被
検査物を搬送するコンベアのような検査対象外の領域を
除外候補画素から除去することが可能であり、結果的に
検査対象にならない領域を充分に除外することができて
処理効率の向上につながることになる。
According to the configuration of the first aspect of the present invention, the connected component of the exclusion candidate pixel obtained by binarization is compared with the known information, and it is determined for each connected component whether or not it is an exclusion region to be excluded from the inspection target. However, since the inspection target area is an area excluding the exclusion area from the inspection candidate area, an area other than the inspection object such as a hole or a protrusion of the inspection object or a conveyor that conveys the inspection object is removed from the exclusion candidate pixel. It is possible, and as a result, it is possible to sufficiently exclude the region that is not the inspection target, which leads to improvement in processing efficiency.

【0013】請求項2の発明の構成によれば、2値化に
よって得られた除外候補画素の連結成分の面積が規定の
面積しきい値よりも大きい連結成分を検査対象外になる
除外領域として決定し、検査候補領域から除外領域を除
いた領域を検査対象領域とするのであり、傷や汚れのよ
うな欠陥は、被検査物に形成された孔や突起あるいは被
検査物の背景よりも面積が小さいから、傷や汚れのよう
な欠陥は検査対象領域に残しながらも孔や突起あるいは
背景を除外することができて処理効率の向上につながる
のである。
According to the configuration of the second aspect of the present invention, the connected component in which the area of the connected component of the exclusion candidate pixel obtained by binarization is larger than the specified area threshold is set as the excluded region to be excluded from the inspection target. The inspection target area is determined and the area excluding the excluded area is set as the inspection target area.Defects such as scratches and stains have an area larger than the holes or protrusions formed on the inspection object or the background of the inspection object. Since the defect is small, defects such as scratches and stains can be left in the inspection target area, but holes, protrusions, and the background can be excluded, which leads to improvement in processing efficiency.

【0014】請求項3の発明の構成によれば、2値化に
よって得られた除外候補画素の連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素についてその画素
を挟んでその画素の微分方向値が示す方向に直交する方
向に等距離ずつ離れた一対の画素の濃度差が所定値を越
える画素数が規定の画素数しきい値を越える連結成分を
検査対象外になる除外領域として決定し、検査候補領域
のうち除外領域を除いた領域を検査対象領域としている
から、除外候補画素の連結成分の面積のみではなく、除
外候補画素の連結成分の内外の濃度差に関する情報も合
わせて利用することで、検査対象領域と除外領域とを請
求項2の発明よりも一層確実に分離することができる。
According to the third aspect of the present invention, the number of pixels included in the connected component of the exclusion candidate pixels obtained by binarization is a connected component larger than a specified area threshold, and the connected component is also connected. For each pixel on the edge of the component, the number of pixels where the density difference between a pair of pixels equidistant in the direction orthogonal to the direction indicated by the differential direction value of that pixel exceeds the predetermined value. The connected component that exceeds the threshold value is determined as an exclusion area that is not to be inspected, and since the area excluding the exclusion area in the inspection candidate area is set as the inspection area, not only the area of the connected component of the exclusion candidate pixel, By using the information about the difference in density between the inside and outside of the connected component of the exclusion candidate pixel together, the inspection target area and the exclusion area can be separated more reliably than the invention of claim 2.

【0015】請求項4の発明の構成によれば、2値化に
よって得られた除外候補画素の連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素の微分値の総和が
規定の微分しきい値を越える連結成分を検査対象外にな
る除外領域として決定し、検査候補領域のうち除外領域
を除いた領域を検査対象領域としているから、除外候補
画素の連結成分の面積のみではなく、除外候補画素の連
結成分のエッジ上での微分値に関する情報も合わせて利
用することになり、検査対象領域と除外領域とを請求項
2の発明よりも一層確実に分離することが可能になる。
According to the structure of the invention of claim 4, the number of pixels included in the connected component of the exclusion candidate pixels obtained by binarization is a connected component larger than a specified area threshold, and the connected component is connected. The connected component whose sum of the differential values of each pixel on the edge of the component exceeds the specified differential threshold is determined as the exclusion area to be excluded from the inspection target area, and the area excluding the exclusion area from the inspection candidate area is the inspection target area. Therefore, not only the area of the connected component of the exclusion candidate pixel but also the information on the differential value on the edge of the connected component of the exclusion candidate pixel is used together, and the inspection target area and the exclusion area are claimed. It becomes possible to separate more reliably than the second invention.

【0016】請求項5の発明の構成によれば、2値化に
よって得られた除外候補画素の連結成分に含まれる画素
数が規定の面積しきい値よりも大きい連結成分であっ
て、かつ連結成分のエッジ上の各画素の微分値の総和が
規定の微分しきい値を越えるとともに、連結成分のエッ
ジ上の各画素についてその画素を挟んでその画素の微分
方向値が示す方向に直交する方向に等距離ずつ離れた一
対の画素の濃度差が所定値を越える画素数が規定の画素
数しきい値を越える連結成分を検査対象外になる除外領
域として決定し、検査候補領域のうち除外領域を除いた
領域を検査対象領域としているのであって、請求項3と
請求項4との発明で用いた除外候補画素の連結成分の内
外の濃度差およびエッジ上の微分値をともに採用するこ
とで、検査対象領域と除外領域とをさらに確実に分離す
ることが可能になる。
According to the configuration of the fifth aspect of the present invention, the number of pixels included in the connected component of the exclusion candidate pixels obtained by binarization is a connected component that is larger than a specified area threshold, and the connected component is also connected. The direction in which the sum of the differential values of each pixel on the edge of the component exceeds the specified differential threshold and the direction of each pixel on the edge of the connected component is orthogonal to the direction indicated by the differential direction value of that pixel. Connected components in which the density difference between a pair of pixels that are equidistant from each other exceeds a specified value are determined as excluded regions that are not to be inspected, and are excluded from the inspection candidate regions. The region except for is used as the inspection target region, and by adopting both the density difference inside and outside the connected component of the exclusion candidate pixel and the differential value on the edge used in the inventions of claim 3 and claim 4, , Inspection area It is possible to more reliably separate the exclusion area.

【0017】[0017]

【実施例】【Example】

(実施例1)本実施例は請求項1の発明に対応し、図1
に示すフローチャートのような手順で検査対象領域を決
定する。被検査物の外観を検査する際には、被検査物は
所定の位置に位置決めされ、ITVカメラのような撮像
装置により被検査物を含む空間領域が撮像される。撮像
装置の出力はA/D変換が施され、各画素ごとに受光光
量に応じた濃度値を有する濃淡画像がフレームメモリに
格納される。ここに、撮像装置で被検査物を含む空間領
域を撮像する際に、被検査物に対して所定の角度で光が
照射される。以後の処理は、フレームメモリに格納され
た濃淡画像に対して施される。
(Embodiment 1) This embodiment corresponds to the invention of claim 1, and FIG.
The area to be inspected is determined by the procedure shown in the flowchart in FIG. When inspecting the appearance of the object to be inspected, the object to be inspected is positioned at a predetermined position, and a spatial region including the object to be inspected is imaged by an imaging device such as an ITV camera. The output of the image pickup device is subjected to A / D conversion, and a grayscale image having a density value corresponding to the amount of received light is stored for each pixel in the frame memory. Here, when the imaging device captures an image of a spatial region including the inspection object, the inspection object is irradiated with light at a predetermined angle. The subsequent processing is performed on the grayscale image stored in the frame memory.

【0018】被検査物Q1 には溝部R2 が形成され、被
検査物Q1 のみの画像は図2のようになるものとする。
まず、濃淡画像に対して図3のような検査候補領域D1
が設定される(図1のS1)。検査候補領域D1 は、容
易に設定できる形状とすればよく、ここでは矩形状に設
定してある。また、検査候補領域D1 は被検査物Q1
少なくとも一部を含むように設定すればよく、被検査物
1 の全領域について外観検査を行なう場合を除けば、
必ずしも被検査物Q1 の全体を含む必要はないが、通常
は検査候補領域D1 において被検査物Q1 の占める領域
の割合を他の領域よりも充分に大きくするのが望まし
い。ここに、被検査物Q1 は所定の位置に位置決めさ
れ、撮像装置は定位置に固定されているから、検査候補
領域D1 は被検査物によらず固定的に設定することが可
能であるが、被検査物Q1 に応じて検査候補領域D1
形状を変えるようにしてもよい。画像内には、図3に示
すように、被検査物Q1 の輪郭線に接して背景の一部と
なるコンベアR1 や、被検査物Q1 に形成された溝部R
2 などが含まれる。検査対象となる領域は、検査候補領
域D1 からコンベアR1 や溝部R2 などを除外した領域
を設定したいのであるから、以下の手順によって検査候
補領域D1 からコンベアR1 や溝部R2 などを除外領域
として除外する。ただし、図4に示すように、傷や汚れ
のような欠陥R0が存在するときに、欠陥R0 は除外領
域に含まれないようにしなければならない。
[0018] The object to be inspected Q 1 groove R 2 is formed, an image of only the object to be inspected Q 1 is assumed to be as shown in Figure 2.
First, the inspection candidate area D 1 as shown in FIG.
Is set (S1 in FIG. 1). The inspection candidate area D 1 may have a shape that can be easily set, and is set to a rectangular shape here. Further, the inspection candidate region D 1 may be set to include at least a portion of the object to be inspected Q 1, except when performing a visual inspection for the entire region of the object Q 1,
Although it is not always necessary to include the entire inspection object Q 1 , it is usually desirable to make the ratio of the area occupied by the inspection object Q 1 in the inspection candidate area D 1 sufficiently larger than other areas. Here, since the inspection object Q 1 is positioned at a predetermined position and the imaging device is fixed at a fixed position, the inspection candidate area D 1 can be fixedly set regardless of the inspection object. However, the shape of the inspection candidate area D 1 may be changed according to the inspection object Q 1 . In the image, as shown in FIG. 3, a conveyor R 1 that is in contact with the contour line of the inspection object Q 1 and becomes a part of the background, and a groove R formed in the inspection object Q 1
2 etc. are included. Region to be inspected, the inspection because we want to set the excluded areas such as conveyor R 1 and groove R 2 from the candidate region D 1, from the examination candidate region D 1 by the following procedure conveyor R 1 and groove R 2, etc. Is excluded as an exclusion area. However, as shown in FIG. 4, when there is a defect R 0 such as a scratch or stain, the defect R 0 must be excluded from the exclusion area.

【0019】そこで、まず検査候補領域D1 に含まれる
画素の濃度の平均値AVを求める。この平均値AVは、
被検査物Q1 の正常な領域の濃度と、除外すべき領域の
濃度との間の値になるはずである。たとえば、背景が影
になる場合には背景の領域の濃度は平均値AVよりも低
濃度になり(濃度は撮像装置での受光光量が大きいほど
高濃度であるものとする)、溝部R2 や凹没した欠陥R
0 も平均値AVよりも低濃度になると考えられる。一
方、突出部分などは正反射条件が満たされて平均値AV
よりも高濃度になる部分が生じる可能性があり、また被
検査物Q1 の照明の仕方によっては背景のほうが平均値
AVより高濃度になる場合もある。したがって、平均値
AVを濃度に対するしきい値として2値化すれば、検査
対象とする領域から除外すべき除外候補画素を抽出でき
ると考えられるが、実際には照度むらなどによって検査
対象とすべき領域でも除外候補画素に含まれてしまうこ
とがある。このような不都合が生じないようにするため
に、本発明では、平均値AVに対して高濃度側と低濃度
側とにそれぞれオフセット値WO,BOを設定し、オフ
セット値WO,BOの分だけ平均値AVを偏移させるこ
とによって、明側の濃度しきい値WS(=AV+WO)
と暗側の濃度しきい値BS=(AV−BO)とを設定す
る(図1のS2)。
Therefore, first, the average value AV of the densities of the pixels included in the inspection candidate area D 1 is obtained. This average value AV is
The value should be between the density of the normal area of the inspection object Q 1 and the density of the area to be excluded. For example, when the background becomes a shadow, the density of the background area becomes lower than the average value AV (the density is higher as the amount of light received by the image pickup device is higher), and the groove R 2 or Depressed defect R
It is considered that 0 is also lower than the average value AV. On the other hand, the average value AV
There is a possibility that a portion having a higher density than the average value AV may be generated depending on how the inspection object Q 1 is illuminated. Therefore, if the average value AV is binarized as a threshold value for the density, it is considered that the exclusion candidate pixels that should be excluded from the region to be inspected can be extracted. Even a region may be included in the exclusion candidate pixel. In order to prevent such an inconvenience, in the present invention, the offset values WO and BO are set on the high density side and the low density side of the average value AV, and only the offset values WO and BO are set. By shifting the average value AV, the light side density threshold value WS (= AV + WO)
And the dark side density threshold BS = (AV-BO) are set (S2 in FIG. 1).

【0020】上述したように、検査候補領域D1 のうち
被検査物Q1 が占める割合を充分に大きく設定している
から、被検査物Q1 について検査対象となる領域に含ま
れる画素の濃度は、上記平均値AVに近い値になる。そ
こで、除外候補画素の濃度が比較的大きい場合には明側
の濃度しきい値WSを用いて2値化することにより、濃
度しきい値WSよりも濃度の大きい画素を除外候補画素
とし、除外候補画素の濃度が比較的小さい場合には暗側
の濃度しきい値BSを用いて2値化することにより、濃
度しきい値BSよりも濃度の小さい画素を除外候補画素
とする。あるいはまた、除外候補画素として濃度が比較
的大きい箇所と比較的小さい箇所との両方を含む場合も
あるから、この場合は、図6に示すように、両濃度しき
い値WS,BSの間の濃度ではない画素を除外候補画素
(図6の斜線部)とする(図1のS3)。
As described above, since the ratio of the inspection object Q 1 to the inspection candidate area D 1 is set sufficiently large, the density of the pixels included in the inspection object area of the inspection object Q 1 is set. Becomes a value close to the average value AV. Therefore, when the density of the exclusion candidate pixel is relatively high, the pixel having the density higher than the density threshold value WS is set as the exclusion candidate pixel by binarizing by using the light side density threshold value WS. When the density of the candidate pixel is relatively small, binarization is performed by using the dark side density threshold BS, and the pixel having the density smaller than the density threshold BS is set as the exclusion candidate pixel. Alternatively, the exclusion candidate pixel may include both a portion having a relatively high density and a portion having a relatively low density, and in this case, as shown in FIG. 6, between the density thresholds WS and BS. Pixels that are not density are excluded candidate pixels (hatched portion in FIG. 6) (S3 in FIG. 1).

【0021】上述のようにして濃度しきい値WS,BS
を用いて2値化することによって求めた除外候補画素
は、複数画素が隣接してひとまとまりになるのが普通で
ある。画像処理の分野では、2値画像において同じ画素
値(0または1)のみからなる連結した領域の占める部
分を連結成分と呼んでいる。すなわち、上述した2値化
によって除外候補画素の連結成分D2 が形成され、検査
候補領域D1 の中には図3に示すように複数の連結成分
2 が形成されるから、各連結成分D2 ごとにラベルを
付与する(図1のS4)。このようにして各連結成分D
2 にラベルを付与した段階では、図4に示すように、欠
陥R0 にもラベルが付与されることになる(ラベルが付
与された連結成分を一点鎖線で囲んである)。
As described above, the concentration thresholds WS, BS
The exclusion candidate pixels obtained by binarizing by using are usually a plurality of pixels adjacent to each other to form a group. In the field of image processing, a portion occupied by a connected region consisting of the same pixel value (0 or 1) in a binary image is called a connected component. That is, since the connected component D 2 of the exclusion candidate pixel is formed by the above-described binarization and a plurality of connected components D 2 are formed in the inspection candidate region D 1 as shown in FIG. A label is given to each D 2 (S4 in FIG. 1). In this way, each connected component D
At the stage where the label 2 is attached, the label is attached to the defect R 0 as well, as shown in FIG. 4 (the connected component to which the label is attached is surrounded by an alternate long and short dash line).

【0022】検査対象とする領域には欠陥R0 は含めな
ければならないから、検査対象となる領域を求めるに
は、検査候補領域D1 のうち欠陥R0 を除く各連結成分
2 を除去する必要がある。この処理を実現するため
に、欠陥R0 のない被検査物Q1について予め設定した
ラベルを既知情報とし、既知のラベルに対応しないラベ
ルを有する連結成分D2 があれば位置情報などに基づい
て欠陥R0 とみなすのである。こうして求めた欠陥R0
を除く他の除外候補画素の連結成分D2 を除外領域とし
(図1のS5)、除外領域を検査候補領域D1 から除去
すれば、残された領域が検査対象領域D3 になる(図1
のS6)。すなわち、図5において実線の内側の領域の
うち一点鎖線で囲まれた連結成分D2 が除外領域にな
り、除外領域を除く部分が検査対象領域D3 になる。す
なわち、コンベアR1 ないし背景や溝部R2 は除外領域
として検査対象領域D3 から除外され、欠陥R0 は除外
領域にならずに検査対象領域D3 に含まれる。このよう
にして求めた検査対象領域D3 について検査項目に応じ
た画像処理を行なえば、検査に要する処理量を少なくし
て処理効率を向上させることができるのである。
Since the defect R 0 must be included in the region to be inspected, in order to obtain the region to be inspected, each connected component D 2 except the defect R 0 in the inspection candidate region D 1 is removed. There is a need. In order to realize this processing, a label set in advance for the inspection object Q 1 having no defect R 0 is used as known information, and if there is a connected component D 2 having a label that does not correspond to the known label, based on position information or the like. It is regarded as a defect R 0 . Defect R 0 thus obtained
If the connected component D 2 of the other exclusion candidate pixels except for is set as the exclusion region (S5 in FIG. 1) and the exclusion region is removed from the inspection candidate region D 1 , the remaining region becomes the inspection target region D 3 (FIG. 1
S6). That is, in FIG. 5, the connected component D 2 enclosed by the alternate long and short dash line in the area inside the solid line is the exclusion area, and the portion excluding the exclusion area is the inspection target area D 3 . That is, the conveyor R 1 or the background or the groove R 2 is excluded from the inspection target area D 3 as an exclusion area, and the defect R 0 is not included in the exclusion area and is included in the inspection target area D 3 . If the image processing according to the inspection item is performed on the inspection target area D 3 obtained in this way, the processing amount required for the inspection can be reduced and the processing efficiency can be improved.

【0023】(実施例2)本実施例は請求項2の発明に
対応するものであって、実施例1では、濃度しきい値W
S,BSを用いて2値化することにより得た各連結成分
2 にラベルを付与し、欠陥R0 のない被検査物Q1
ついてのラベルを既知情報とし、検査対象となる被検査
物Q1 について設定したラベルと既知のラベルとの比較
によって、除外候補画素の連結成分D2 の中からコンベ
アR1 や溝部R2 となる除外領域を識別したが、この方
法では、異なる被検査物Q1 ごとに欠陥R0 のない被検
査物Q1 のラベルを設定する作業が必要になる。本実施
例では、この作業が不要となる方法を示す。
(Embodiment 2) This embodiment corresponds to the invention of claim 2, and in Embodiment 1, the density threshold value W
A label is given to each connected component D 2 obtained by binarization using S and BS, and the label of the inspection object Q 1 having no defect R 0 is used as known information, and the inspection object to be inspected By comparing the label set for Q 1 with a known label, the exclusion area to be the conveyor R 1 or the groove R 2 was identified from the connected components D 2 of the exclusion candidate pixels. It is necessary to set the label of the inspection object Q 1 having no defect R 0 for each Q 1 . In this embodiment, a method in which this work is unnecessary will be shown.

【0024】本実施例では、除外候補画素の連結成分D
2 を求めるまでの手順は実施例1と同様であって、連結
成分D2 からコンベアR1 や溝部R2 となる除外領域を
識別する手順のみが異なる。すなわち、図7に示すよう
に、ステップS1〜S4までの手順は図1のステップS
1〜S4と同じ処理である。しかして、連結成分D2
ラベルが付与されると、各連結成分D2 に含まれる画素
数を計数する。たとえば、ラベル画像(各画素の画素値
としてラベルとなる数値を与えた画像)を用いるとすれ
ば、この作業は画素値が同じ数値の画素の個数を計数す
ることで実現される。ここで、画素の濃度が濃度しきい
値WSより大きい連結成分D2 の画素数をMWとし、画
素の濃度が濃度しきい値BSより小さい連結成分D2
画素数をMBとする。各連結成分D2 に含まれる画素数
は、その連結成分D2 の面積にほぼ比例する。一方、コ
ンベアR1 や溝部R2 の面積は一般に欠陥R0 に比較し
て充分に大きいと考えられるから、連結成分D2 の面積
によってコンベアR1 や溝部R2 に対応する連結成分D
2 を識別できると考えられる。そこで、この識別が可能
となるような適宜値で面積しきい値MWS,MBSを設
定しておき、各ラベルを付与した連結成分D2 ごとに、
画素数MW,MBと面積しきい値MWS,MBSとを比
較するのである(図7のS5)。MW>MWSまたはM
B>MBSが成立する連結成分D2 については、欠陥R
0 ではないと判断して除外領域と決定し(図7のS
6)、この除外領域を検査対象領域D3から除外する
(図7のS7)。ここにおいて、除外候補画素の連結成
分D2 を、明側の濃度しきい値WSと暗側の濃度しきい
値BSとの一方のみを用いて抽出したときには、面積し
きい値MWS,MBSについても一方のみを用いればよ
い。他の処理手順は実施例1と同様であって、上述のよ
うにして決定された検査対象領域D3 に対して検査項目
に応じた画像処理が施される。
In this embodiment, the connected component D of the exclusion candidate pixel is
The procedure until obtaining 2 is the same as that of the first embodiment, and only the procedure of identifying the excluded region to be the conveyor R 1 or the groove R 2 from the connected component D 2 is different. That is, as shown in FIG. 7, steps S1 to S4 are performed in step S1 of FIG.
The same process as 1 to S4. When the connected component D 2 is labeled, the number of pixels included in each connected component D 2 is counted. For example, if a label image (an image in which a numerical value serving as a label is given as a pixel value of each pixel) is used, this work is realized by counting the number of pixels having the same numerical value. Here, the pixel density is the number of pixel density thresholds WS larger connected components D 2 and MW, concentration of pixels and MB the number of pixel density thresholds BS smaller connected components D 2. The number of pixels included in each connected component D 2 is approximately proportional to the area of the connected component D 2 . On the other hand, the conveyor R 1 and grooves because the area of R 2 is generally considered sufficiently compared to the defect R 0 large connected component D corresponding to the conveyor R 1 and groove R 2 by the area of the connected component D 2
It is thought that 2 can be identified. Therefore, the area thresholds MWS and MBS are set to appropriate values that enable this identification, and the connected components D 2 to which each label is attached are
The number of pixels MW, MB is compared with the area thresholds MWS, MBS (S5 in FIG. 7). MW> MWS or M
For the connected component D 2 that satisfies B> MBS, the defect R
When it is determined that the area is not 0, it is determined as an exclusion area (S in FIG.
6) Then, this exclusion area is excluded from the inspection area D 3 (S7 in FIG. 7). Here, when the connected component D 2 of the exclusion candidate pixel is extracted using only one of the bright side density threshold value WS and the dark side density threshold value BS, the area threshold values MWS and MBS are also extracted. Only one should be used. The other processing procedure is the same as that of the first embodiment, and the image processing according to the inspection item is performed on the inspection target area D 3 determined as described above.

【0025】以上説明したように、本実施例では、除外
候補画素の各連結成分D2 ごとの面積を用いてコンベア
1 や溝部R2 などの除外領域と欠陥R0 とを識別する
から、面積しきい値MWS,MBSとして適宜値を設定
しておけば、被検査物Q1 についてあらかじめ情報を得
る作業が不要になり、より簡単に領域の設定が可能にな
る。
As described above, in the present embodiment, the area for each connected component D 2 of the exclusion candidate pixel is used to identify the exclusion area such as the conveyor R 1 or the groove R 2 and the defect R 0 . If the area thresholds MWS and MBS are appropriately set, it is not necessary to obtain information about the inspection object Q 1 in advance, and the area can be set more easily.

【0026】(実施例3)本実施例は請求項3の発明に
対応するものであって、実施例2では除外候補画素の連
結成分D2 について面積(画素数)に基づいてコンベア
1 や溝部R2 となる部分を識別していたが、場合によ
ってはコンベアR1 や溝部R2 などと同程度の面積を有
する欠陥R0 もある。そこで、以下の実施例では、除外
候補画素の連結成分D2 の内外の濃度差を識別条件とし
て追加することによって、より確実に除外領域を決定す
る方法について説明する。また、濃度差が比較的小さい
場合でも濃度差を強調することによって除外領域を決定
することができるようにしてある。
(Third Embodiment) This embodiment corresponds to the invention of claim 3, and in the second embodiment, the conveyer R 1 or the like is calculated based on the area (the number of pixels) of the connected component D 2 of the exclusion candidate pixel. Although the portion to be the groove R 2 was identified, in some cases, there is also a defect R 0 having an area similar to that of the conveyor R 1 or the groove R 2 . Therefore, in the following embodiments, a method of more surely determining the exclusion area by adding the density difference between the inside and outside of the connected component D 2 of the exclusion candidate pixel as the identification condition will be described. Further, even when the density difference is relatively small, the exclusion area can be determined by emphasizing the density difference.

【0027】本実施例では、除外候補画素の連結成分D
2 の内外の濃度差を評価するために、除外候補画素の連
結成分D2 のエッジを挟む一対の画素の濃度差を求め
る。以下にこの手順を説明する。図8のステップS1〜
S5に示すように、除外候補画素の連結成分D2 の画素
数MW,MBを面積しきい値MWS,MBSと比較する
までの手順は、実施例2における図7のステップS1〜
S5に示す手順と同じである。次に、画素数MW,MB
が面積しきい値MWS,MBSよりも大きい連結成分D
2 について、エッジ上の各画素の微分方向値を求め、微
分方向値が示す方向に直交する方向においてその画素か
ら等距離ずつ離れた位置の一対の画素の濃度差を求める
(図8のS6)。この濃度差が所定値を越える画素がエ
ッジ上に何個あるかを計数し、各連結成分D2 について
濃度差が所定値を越える画素数Kを規定の画素数しきい
値KSと比較する(図8のS7)。画素数Kが画素数し
きい値KSを越えるときに(すなわちK>KS)、除外
領域とするのである(図8のS8)。微分方向値は、図
9に示すように、注目する画素の近傍(たとえば8近
傍)での濃度差が最大になる方向に対して直交する方向
(図9に白丸で画素を示し、白丸内の矢印がエッジ上の
画素の微分方向値に対応する)を示す値であって、連続
したエッジではエッジに沿う方向に対応する。したがっ
て、微分方向値の代わりにエッジ上の隣接する画素を結
ぶ方向としての方向コードを用いてもよい。この方向に
対して直交する方向においてエッジ上の画素から等距離
に位置する一対の画素x1 ,x2 の濃度差を求め、この
濃度差によって連結成分D2 の内外の濃度差を評価する
ことができるのである。しかも、濃度差が所定値を越え
る画素の個数を用いることで、濃度差が比較的小さい場
合や濃度差に場所によるむらがある場合でも濃度差を強
調することになり、除外領域か否かの判断が可能にな
る。
In this embodiment, the connected component D of the exclusion candidate pixel is
In order to evaluate the density difference between inside and outside of 2 , the density difference between a pair of pixels sandwiching the edge of the connected component D 2 of the exclusion candidate pixel is obtained. This procedure will be described below. Step S1 of FIG.
As shown in S5, the procedure for comparing the number of pixels MW, MB of the connected component D 2 of the exclusion candidate pixel with the area thresholds MWS, MBS is as follows:
This is the same as the procedure shown in S5. Next, the number of pixels MW, MB
Is a connected component D whose is greater than the area thresholds MWS, MBS
For 2 , the differential direction value of each pixel on the edge is obtained, and the density difference between a pair of pixels at equal distances from the pixel in the direction orthogonal to the direction indicated by the differential direction value is obtained (S6 in FIG. 8). . The number of pixels on the edge where the density difference exceeds the predetermined value is counted, and the pixel number K for which the density difference exceeds the predetermined value for each connected component D 2 is compared with a prescribed pixel number threshold KS ( S7 of FIG. 8). When the pixel number K exceeds the pixel number threshold value KS (that is, K> KS), the exclusion area is set (S8 in FIG. 8). As shown in FIG. 9, the differential direction value is a direction orthogonal to the direction in which the density difference in the vicinity of the pixel of interest (for example, in the vicinity of 8) is maximum (pixels are indicated by white circles in FIG. The arrow corresponds to the differential direction value of the pixel on the edge), and the continuous edge corresponds to the direction along the edge. Therefore, a direction code as a direction connecting adjacent pixels on an edge may be used instead of the differential direction value. To obtain the density difference between a pair of pixels x 1 and x 2 located at the same distance from the pixel on the edge in the direction orthogonal to this direction, and evaluate the density difference between the inside and outside of the connected component D 2 by this density difference. Can be done. In addition, by using the number of pixels whose density difference exceeds a predetermined value, the density difference is emphasized even when the density difference is relatively small or the density difference varies depending on the location. Judgment becomes possible.

【0028】上述したように、除外候補画素の各連結成
分D2 について、画素数と濃度差とを用いて除外領域か
否かを評価するから、異なる被検査物Q1 ごとの既知情
報を得る作業が不要であり、しかも実施例2に比較すれ
ば、コンベアR1 や溝部R2などと欠陥R0 とが同じ程
度の大きさでも、濃度差によって両者の識別ができるこ
とになって、より確実に除外領域を決定することができ
る。以後の処理は、実施例1と同様であって、除外領域
を検査候補領域D1 から除外した領域を検査対象領域D
3 として(図8のS9)、所要の画像処理を施せばよ
い。
As described above, since each connected component D 2 of the exclusion candidate pixel is evaluated as to whether or not it is an exclusion region by using the number of pixels and the density difference, known information for each different inspection object Q 1 is obtained. Compared with the second embodiment, no work is required, and even if the conveyor R 1 , the groove R 2 , and the like have the same size as the defect R 0 , the two can be distinguished by the density difference, which is more reliable. The exclusion area can be determined. Subsequent processing is the same as that of the first embodiment, and the area excluding the exclusion area from the inspection candidate area D 1 is the inspection target area D 1.
As 3 (S9 in FIG. 8), the required image processing may be performed.

【0029】(実施例4)本実施例は請求項4の発明に
対応し、実施例3では、除外候補画素の連結成分D2
内外の濃度差の評価として、エッジ上の画素から等距離
に位置する一対の画素の濃度差を利用しているが、本実
施例ではエッジ上の各画素の微分値を用いて濃度差を評
価する例を示す。
(Embodiment 4) This embodiment corresponds to the invention of claim 4, and in the embodiment 3, as the evaluation of the density difference between the inside and outside of the connected component D 2 of the exclusion candidate pixel, it is equidistant from the pixel on the edge. Although the difference in density between a pair of pixels positioned at is used, this embodiment shows an example in which the difference in density is evaluated by using the differential value of each pixel on the edge.

【0030】すなわち、図10におけるステップS1〜
S5は、実施例3の図8におけるステップS1〜S5と
同じ(すなわち、実施例2とも同じ)であり、各連結成
分D 2 ごとの画素数MW,MBを求め、面積しきい値M
WS,MBSと比較する。次に、画素数MW,MBが面
積しきい値MWS,MBSよりも大きい連結成分D2
ついて、連結成分D2 のエッジ上の画素について微分値
を求め、この微分値をエッジ上のすべての画素について
加算する。この加算値Cを規定の微分しきい値CSと比
較し(図10のS6)、加算値Cが微分しきい値CSを
越える場合には(すなわち、C>CS)、その連結成分
2 を除外領域として決定するのである(図10のS
7)。要するに、微分値はエッジ上の各画素の近傍での
濃度の変化の程度を示すから、微分値が大きいほど連結
成分D2 と周囲との濃度差が大きいと判断することがで
きるのであり、微分値を用いることで濃度差の評価が可
能になる。また、微分値をエッジ上のすべての画素につ
いて加算し、加算値Cを微分しきい値CSと比較するか
ら、濃度差を強調することになり、連結成分D2 と周囲
との濃度差が比較的小さい場合でも確実に識別すること
ができるのである。除外領域の決定後には検査候補領域
1 から除外領域を除いて検査対象領域を設定するので
あり(図10のS8)、他の手順および作用は、実施例
3と同様になる。
That is, steps S1 to S1 in FIG.
S5 is the same as steps S1 to S5 in FIG. 8 of the third embodiment.
The same (that is, the same as in the second embodiment), and
Minute D 2The number of pixels MW and MB for each
Compare with WS and MBS. Next, the number of pixels MW and MB are
Connected component D larger than product thresholds MWS, MBS2To
About the connected component D2Differential value for pixels on the edge of
For all pixels on the edge
to add. This added value C is compared with the specified differential threshold CS
(S6 in FIG. 10), the added value C is the differential threshold CS.
If it exceeds (ie, C> CS), its connected component
D2Is determined as an exclusion area (S in FIG. 10).
7). In short, the differential value is
Since the degree of change in concentration is shown, the larger the differential value, the more connected
Ingredient D2It is possible to judge that there is a large difference in density between
The density difference can be evaluated by using the differential value.
Become Noh. Also, the derivative value is applied to all pixels on the edge.
And add and compare the added value C with the differential threshold CS
, The density difference is emphasized, and the connected component D2And around
Be sure to identify even if the difference in concentration with
Can be done. After the exclusion area is determined, the inspection candidate area
D1Since the inspection target area is set excluding the exclusion area from
Yes (S8 in FIG. 10), other procedures and actions are described in the embodiment.
Same as 3.

【0031】(実施例5)本実施例は請求項5の発明に
対応し、濃度差を評価するために、実施例3で用いたエ
ッジから等距離の一対の画素の濃度差が所定値を越える
エッジ上の画素の個数と、実施例4で用いたエッジ上の
画素の微分値の総和との両方を用いて濃度差を評価する
ことで、連結成分D2 のエッジの近傍での濃度変化と、
エッジからやや離れた部位での濃度差との両方を合わせ
て利用し、もって単独で評価する場合よりも一層正確な
判定を可能としたものである。
(Embodiment 5) This embodiment corresponds to the invention of claim 5, and in order to evaluate the density difference, the density difference between a pair of pixels equidistant from the edge used in Embodiment 3 has a predetermined value. By evaluating the density difference using both the number of pixels on the edge that exceeds the threshold and the sum of the differential values of the pixels on the edge used in the fourth embodiment, the density change in the vicinity of the edge of the connected component D 2 is evaluated. When,
By using both the density difference at a portion slightly away from the edge, it is possible to make a more accurate determination than in the case of performing the evaluation alone.

【0032】すなわち、図11に示すように、ステップ
S1〜S5は実施例3の図8におけるステップS1〜S
5と同じ(すなわち、実施例2とも同じ)であって、除
外候補画素の各連結成分D2 ごとの画素数MW,MBを
求め、面積しきい値MWS,MBSと比較する。次に、
画素数MW,MBが面積しきい値MWS,MBSよりも
大きい連結成分D2 について、エッジ上の各画素の微分
方向値を求め、微分方向値が示す方向に直交する方向に
おいてその画素から等距離ずつ離れた位置の一対の画素
の濃度差を求める(図11のS6)。この濃度差が所定
値を越える画素がエッジ上に何個あるかを計数し、各連
結成分D2 について濃度差が所定値を越える画素数Kが
規定の画素数しきい値KSを越えると(すなわちK>K
S)、連結成分D2 のエッジ上の画素について微分値を
求め、この微分値をエッジ上のすべての画素について加
算する。この加算値Cを規定の微分しきい値CSと比較
し(図11のS7)、加算値Cが微分しきい値CSを越
える場合には、その連結成分D2 を除外領域として決定
するのである(図11のS8)。このようにして決定さ
れた除外領域を検査候補領域D1 から除いて検査対象領
域とするのである(図11のS9)。他の手順および作
用は実施例3と同様であり、実施例3および実施例4よ
りも一層確実に除外領域を決定することができる。
That is, as shown in FIG. 11, steps S1 to S5 are steps S1 to S in FIG. 8 of the third embodiment.
5, which is the same as that of Example 5 (that is, the same as in the second embodiment), and the number of pixels MW and MB for each connected component D 2 of the exclusion candidate pixel is obtained and compared with the area thresholds MWS and MBS. next,
For the connected component D 2 in which the number of pixels MW, MB is larger than the area thresholds MWS, MBS, the differential direction value of each pixel on the edge is obtained, and the pixel is equidistant from the pixel in the direction orthogonal to the direction indicated by the differential direction value. The density difference between a pair of pixels at positions separated from each other is obtained (S6 in FIG. 11). The number of pixels on the edge where the density difference exceeds the predetermined value is counted, and when the number K of pixels for which the density difference exceeds the predetermined value for each connected component D 2 exceeds the prescribed pixel number threshold KS ( That is, K> K
S), the differential value is obtained for the pixels on the edge of the connected component D 2 , and this differential value is added for all the pixels on the edge. This added value C is compared with a prescribed differential threshold CS (S7 in FIG. 11), and when the added value C exceeds the differential threshold CS, the connected component D 2 is determined as an exclusion area. (S8 of FIG. 11). The exclusion area determined in this way is excluded from the inspection candidate area D 1 to be the inspection target area (S9 in FIG. 11). Other procedures and operations are similar to those in the third embodiment, and the exclusion area can be determined more reliably than in the third and fourth embodiments.

【0033】なお、実施例4、実施例5においては面積
に関する判定を省略することも可能である。
In the fourth and fifth embodiments, it is possible to omit the determination regarding the area.

【0034】[0034]

【発明の効果】請求項1ないし請求項5の発明は、被検
査物の少なくとも一部領域を含む検査候補領域に含まれ
る画素の平均濃度に対して高濃度側と低濃度側との少な
くとも一方に規定のオフセット値だけ偏移させた濃度し
きい値を設定し、濃度しきい値を用いて検査候補領域内
の画素を2値化することにより検査候補領域内から除外
候補画素を抽出するので、2値化に用いる濃度しきい値
が各被検査物に応じて自動的に設定されるという利点が
あり、しかも、被検査物の少なくとも一部を含むように
検査候補領域を設定して、この検査候補領域の平均濃度
に基づいて濃度しきい値を設定しているので、被検査物
の正常な部分と他の部分との濃度差が比較的小さい場合
でも両者を区別できるような適切な値の濃度しきい値を
設定することが可能になるという利点を有する。
According to the invention of claims 1 to 5, at least one of the high density side and the low density side with respect to the average density of the pixels included in the inspection candidate area including at least a partial area of the inspection object. Since a density threshold value deviated by a specified offset value is set to, and the exclusion candidate pixel is extracted from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value. There is an advantage that the density threshold value used for binarization is automatically set according to each inspection object, and furthermore, the inspection candidate area is set so as to include at least a part of the inspection object, Since the density threshold value is set based on the average density of this inspection candidate area, it is possible to distinguish between the normal portion of the inspection object and the other portion even if the difference in density is relatively small. Value density threshold can be set It has the advantage that become.

【0035】請求項1の発明は、2値化によって得られ
た除外候補画素の連結成分を既知情報と比較して連結成
分ごとに検査対象外になる除外領域か否かを決定し、検
査候補領域から除外領域を除いた領域を検査対象領域と
するから、被検査物の孔や突起あるいは被検査物を搬送
するコンベアのような検査対象外の領域を除外候補画素
から除去することが可能であり、結果的に検査対象にな
らない領域を充分に除外することができて処理効率の向
上につながるという利点を有する。
According to the first aspect of the present invention, the connected components of the exclusion candidate pixels obtained by binarization are compared with known information to determine whether or not each of the connected components is an exclusion region to be excluded from the inspection target, and the inspection candidate Since the area excluding the exclusion area from the area is set as the inspection target area, it is possible to remove from the exclusion candidate pixel an area that is not the inspection target, such as a hole or protrusion of the inspection object or a conveyor that conveys the inspection object. Therefore, there is an advantage that the region that is not the inspection target can be sufficiently excluded as a result, which leads to the improvement of the processing efficiency.

【0036】請求項2の発明は、2値化によって得られ
た除外候補画素の連結成分の面積が規定の面積しきい値
よりも大きい連結成分を検査対象外になる除外領域とし
て決定し、検査候補領域から除外領域を除いた領域を検
査対象領域とするのであり、傷や汚れのような欠陥は、
被検査物に形成された孔や突起あるいは被検査物の背景
よりも面積が小さいから、傷や汚れのような欠陥は検査
対象領域に残しながらも孔や突起あるいは背景を除外す
ることができて処理効率の向上につながるという利点を
有する。また、欠陥のない被検査物についての情報をあ
らかじめ必要としないから、検査対象領域の決定が容易
になるという利点がある。
According to the second aspect of the present invention, a connected component in which the area of the connected component of the exclusion candidate pixel obtained by binarization is larger than a prescribed area threshold value is determined as an exclusion area to be excluded from the inspection, and the inspection is performed. The inspection area is the area excluding the exclusion area from the candidate area, and defects such as scratches and stains are
Since the area is smaller than the hole or protrusion formed on the inspection object or the background of the inspection object, it is possible to exclude the hole, protrusion or background while leaving defects such as scratches and stains in the inspection target area. It has an advantage that it leads to improvement of processing efficiency. Further, there is an advantage that the area to be inspected can be easily determined because information about the inspected object having no defect is not required in advance.

【0037】請求項3の発明は、請求項2の発明での面
積の評価に加えて、連結成分のエッジ上の各画素につい
てその画素を挟んでその画素の微分方向値が示す方向に
直交する方向に等距離ずつ離れた一対の画素の濃度差が
所定値を越える画素数が規定の画素数しきい値を越える
連結成分を検査対象外になる除外領域として決定し、検
査候補領域のうち除外領域を除いた領域を検査対象領域
としているので、除外候補画素の連結成分の面積のみで
はなく、除外候補画素の連結成分の内外の濃度差に関す
る情報も合わせて利用することで、検査対象領域と除外
領域とを請求項2の発明よりも一層確実に分離すること
ができるという利点がある。
According to a third aspect of the invention, in addition to the evaluation of the area according to the second aspect of the invention, each pixel on the edge of the connected component is orthogonal to the direction indicated by the differential direction value of the pixel with the pixel sandwiched therebetween. Connected components in which the density difference between a pair of pixels equidistant from each other in a given direction exceeds a specified value and the number of pixels exceeds a specified pixel number threshold is determined as an exclusion area to be excluded from the inspection target and excluded from the inspection candidate areas. Since the region excluding the region is the inspection target region, by using not only the area of the connected component of the exclusion candidate pixel but also the information about the density difference between the inside and outside of the connected component of the exclusion candidate pixel, the inspection target region There is an advantage that the exclusion area can be separated more reliably than the invention of claim 2.

【0038】請求項4の発明は、請求項2の発明での面
積の評価に加えて、連結成分のエッジ上の各画素の微分
値の総和が規定の微分しきい値を越える連結成分を検査
対象外になる除外領域として決定し、検査候補領域のう
ち除外領域を除いた領域を検査対象領域としているの
で、除外候補画素の連結成分の面積のみではなく、除外
候補画素の連結成分のエッジ上での微分値に関する情報
も合わせて利用することで、検査対象領域と除外領域と
を請求項2の発明よりも一層確実に分離することが可能
になるという利点を有する。
According to a fourth aspect of the present invention, in addition to the evaluation of the area according to the second aspect of the present invention, a connected component in which the sum of the differential values of each pixel on the edge of the connected component exceeds a prescribed differential threshold is inspected. Since it is determined as an exclusion area to be excluded and the inspection candidate area is the area excluding the exclusion area, it is not only the area of the connected component of the exclusion candidate pixel, but also the edge of the connected component of the exclusion candidate pixel. By also using the information on the differential value in 1), there is an advantage that the inspection target area and the exclusion area can be separated more surely than the invention of claim 2.

【0039】請求項5の発明は、除外候補画素の連結成
分について、面積と、エッジから所定距離だけ離れた位
置の濃度差と、エッジの近傍の濃度変化とを評価してい
るから、それぞれを単独で評価する場合よりも、厳しい
条件で除外領域と検査対象領域とを識別することにな
り、検査対象領域と除外領域とをさらに確実に分離する
ことが可能になるという利点がある。
According to the fifth aspect of the present invention, for the connected component of the exclusion candidate pixel, the area, the density difference at a position separated from the edge by a predetermined distance, and the density change near the edge are evaluated. As compared with the case where the evaluation is performed independently, the exclusion area and the inspection area are discriminated under stricter conditions, and there is an advantage that the inspection area and the exclusion area can be more surely separated.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例1の手順を示すフローチャートである。FIG. 1 is a flowchart showing a procedure of a first embodiment.

【図2】実施例の説明に用いる被検査物を示す図であ
る。
FIG. 2 is a diagram showing an object to be inspected used for explaining an example.

【図3】実施例における被検査物、検査候補領域、除外
候補画素の連結成分などの関係を示す図である。
FIG. 3 is a diagram showing a relationship among an object to be inspected, an inspection candidate area, a connected component of exclusion candidate pixels, and the like in an example.

【図4】実施例において除外候補画素の連結成分を含ん
だ状態を示す図である。
FIG. 4 is a diagram showing a state in which a connected component of exclusion candidate pixels is included in the embodiment.

【図5】実施例において除外領域を決定した状態の図で
ある。
FIG. 5 is a diagram showing a state in which exclusion areas are determined in the embodiment.

【図6】実施例の濃度しきい値と除外候補画素との関係
を示す動作説明図である。
FIG. 6 is an operation explanatory diagram illustrating a relationship between a density threshold value and an exclusion candidate pixel according to the embodiment.

【図7】実施例2の手順を示すフローチャートである。FIG. 7 is a flowchart showing the procedure of the second embodiment.

【図8】実施例3の手順を示すフローチャートである。FIG. 8 is a flowchart showing the procedure of the third embodiment.

【図9】実施例3における微分方向値と濃度差を求める
画素との関係を示す図
FIG. 9 is a diagram illustrating a relationship between a differential direction value and a pixel for which a density difference is obtained according to the third embodiment.

【図10】実施例4の手順を示すフローチャートであ
る。
FIG. 10 is a flowchart showing the procedure of the fourth embodiment.

【図11】実施例5の手順を示すフローチャートであ
る。
FIG. 11 is a flowchart showing the procedure of the fifth embodiment.

【符号の説明】[Explanation of symbols]

1 検査候補領域 D2 連結成分 D3 検査対象領域 Q1 被検査物 R1 コンベア R2 溝部 R0 欠陥D 1 Inspection candidate area D 2 Connected component D 3 Inspection area Q 1 Inspected object R 1 Conveyor R 2 Groove R 0 Defect

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 被検査物を含む空間領域を撮像手段によ
り撮像して得た濃淡画像内に被検査物の少なくとも一部
領域を含む検査候補領域を設定し、検査候補領域内につ
いての被検査物の外観を検査する方法において、検査候
補領域に含まれる画素の平均濃度に対して高濃度側と低
濃度側との少なくとも一方に規定のオフセット値だけ偏
移させた濃度しきい値を設定するとともに、濃度しきい
値を用いて検査候補領域内の画素を2値化することによ
って検査候補領域内から除外候補画素を抽出した後、除
外候補画素のみを連結した領域の占める部分である連結
成分を既知情報と比較して連結成分ごとに検査対象外に
なる除外領域か否かを決定し、次に検査候補領域のうち
除外領域を除いた領域を検査対象領域とし、検査対象領
域内についてのみ被検査物の外観を検査することを特徴
とする外観検査方法。
1. An inspection candidate area including at least a partial area of an object to be inspected is set in a grayscale image obtained by imaging a spatial area including the object to be inspected by an image pickup means, and the object to be inspected in the inspection candidate area is set. In a method of inspecting the appearance of an object, a density threshold value deviated by a specified offset value is set on at least one of a high density side and a low density side with respect to an average density of pixels included in an inspection candidate area. In addition, after extracting exclusion candidate pixels from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value, the connected component that is the portion occupied by the area in which only the exclusion candidate pixels are connected Is compared with known information to determine whether each connected component is an exclusion area to be excluded from the inspection target, and then the inspection candidate area excluding the exclusion area is set as the inspection area, and only within the inspection area. Cover An appearance inspection method characterized by inspecting the appearance of an inspection object.
【請求項2】 被検査物を含む空間領域を撮像手段によ
り撮像して得た濃淡画像内に被検査物の少なくとも一部
領域を含む検査候補領域を設定し、検査候補領域内につ
いての被検査物の外観を検査する方法において、検査候
補領域に含まれる画素の平均濃度に対して高濃度側と低
濃度側との少なくとも一方に規定のオフセット値だけ偏
移させた濃度しきい値を設定するとともに、濃度しきい
値を用いて検査候補領域内の画素を2値化することによ
って検査候補領域内から除外候補画素を抽出した後、除
外候補画素のみを連結した領域の占める部分である連結
成分の面積が規定の面積しきい値よりも大きい連結成分
を検査対象外になる除外領域として決定し、次に検査候
補領域のうち除外領域を除いた領域を検査対象領域と
し、検査対象領域内についてのみ被検査物の外観を検査
することを特徴とする外観検査方法。
2. An inspection candidate area including at least a partial area of the inspection object is set in a grayscale image obtained by capturing an image of a spatial area including the inspection object by an image pickup means, and the inspection object in the inspection candidate area is set. In a method of inspecting the appearance of an object, a density threshold value deviated by a specified offset value is set on at least one of a high density side and a low density side with respect to an average density of pixels included in an inspection candidate area. In addition, after extracting exclusion candidate pixels from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value, the connected component that is the portion occupied by the area in which only the exclusion candidate pixels are connected The connected component whose area is greater than the specified area threshold is determined as an exclusion area that is not to be inspected, and then the area excluding the exclusion area in the inspection candidate area is set as the inspection area and An appearance inspection method characterized by inspecting only the appearance of an object to be inspected.
【請求項3】 被検査物を含む空間領域を撮像手段によ
り撮像して得た濃淡画像内に被検査物の少なくとも一部
領域を含む検査候補領域を設定し、検査候補領域内につ
いての被検査物の外観を検査する方法において、検査候
補領域に含まれる画素の平均濃度に対して高濃度側と低
濃度側との少なくとも一方に規定のオフセット値だけ偏
移させた濃度しきい値を設定するとともに、濃度しきい
値を用いて検査候補領域内の画素を2値化することによ
って検査候補領域内から除外候補画素を抽出した後、除
外候補画素のみを連結した領域の占める部分である連結
成分に含まれる画素数が規定の面積しきい値よりも大き
い連結成分であって、かつ連結成分のエッジ上の各画素
についてその画素を挟んでその画素の微分方向値が示す
方向に直交する方向に等距離ずつ離れた一対の画素の濃
度差が所定値を越える画素数が規定の画素数しきい値を
越える連結成分を検査対象外になる除外領域として決定
し、次に検査候補領域のうち除外領域を除いた領域を検
査対象領域とし、検査対象領域内についてのみ被検査物
の外観を検査することを特徴とする外観検査方法。
3. An inspection candidate area including at least a partial area of the inspection object is set in a grayscale image obtained by imaging a spatial area including the inspection object by an image pickup means, and the inspection object in the inspection candidate area is set. In a method of inspecting the appearance of an object, a density threshold value deviated by a specified offset value is set on at least one of a high density side and a low density side with respect to an average density of pixels included in an inspection candidate area. In addition, after extracting exclusion candidate pixels from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value, the connected component that is the portion occupied by the area in which only the exclusion candidate pixels are connected Is a connected component in which the number of pixels included in is larger than a specified area threshold value, and for each pixel on the edge of the connected component, a direction orthogonal to the direction indicated by the differential direction value of the pixel with the pixel sandwiched A connected component in which the density difference between a pair of pixels that are equidistant from each other exceeds a prescribed value exceeds a specified pixel number threshold is determined as an exclusion area that is not to be inspected, and next, among the inspection candidate areas, An appearance inspection method, wherein an area excluding an exclusion area is set as an inspection target area, and the appearance of the inspection object is inspected only in the inspection target area.
【請求項4】 被検査物を含む空間領域を撮像手段によ
り撮像して得た濃淡画像内に被検査物の少なくとも一部
領域を含む検査候補領域を設定し、検査候補領域内につ
いての被検査物の外観を検査する方法において、検査候
補領域に含まれる画素の平均濃度に対して高濃度側と低
濃度側との少なくとも一方に規定のオフセット値だけ偏
移させた濃度しきい値を設定するとともに、濃度しきい
値を用いて検査候補領域内の画素を2値化することによ
って検査候補領域内から除外候補画素を抽出した後、除
外候補画素のみを連結した領域の占める部分である連結
成分に含まれる画素数が規定の面積しきい値よりも大き
い連結成分であって、かつ連結成分のエッジ上の各画素
の微分値の総和が規定の微分しきい値を越える連結成分
を検査対象外になる除外領域として決定し、次に検査候
補領域のうち除外領域を除いた領域を検査対象領域と
し、検査対象領域内についてのみ被検査物の外観を検査
することを特徴とする外観検査方法。
4. An inspection candidate area including at least a partial area of the inspection object is set in a grayscale image obtained by capturing an image of a spatial area including the inspection object by an image pickup device, and the inspection object in the inspection candidate area is set. In a method of inspecting the appearance of an object, a density threshold value deviated by a specified offset value is set on at least one of a high density side and a low density side with respect to an average density of pixels included in an inspection candidate area. In addition, after extracting exclusion candidate pixels from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value, the connected component that is the portion occupied by the area in which only the exclusion candidate pixels are connected The connected component whose number of pixels contained in is larger than the specified area threshold and the sum of the differential values of each pixel on the edge of the connected component exceeds the specified differential threshold is excluded from the inspection target. become An appearance inspection method characterized by determining an area to be excluded as an inspection area, then selecting an area of the inspection candidate area excluding the exclusion area as an inspection area, and inspecting the appearance of the inspection object only in the inspection area.
【請求項5】 被検査物を含む空間領域を撮像手段によ
り撮像して得た濃淡画像内に被検査物の少なくとも一部
領域を含む検査候補領域を設定し、検査候補領域内につ
いての被検査物の外観を検査する方法において、検査候
補領域に含まれる画素の平均濃度に対して高濃度側と低
濃度側との少なくとも一方に規定のオフセット値だけ偏
移させた濃度しきい値を設定するとともに、濃度しきい
値を用いて検査候補領域内の画素を2値化することによ
って検査候補領域内から除外候補画素を抽出した後、除
外候補画素のみを連結した領域の占める部分である連結
成分に含まれる画素数が規定の面積しきい値よりも大き
い連結成分であって、かつ連結成分のエッジ上の各画素
の微分値の総和が規定の微分しきい値を越えるととも
に、連結成分のエッジ上の各画素についてその画素を挟
んでその画素の微分方向値が示す方向に直交する方向に
等距離ずつ離れた一対の画素の濃度差が所定値を越える
画素数が規定の画素数しきい値を越える連結成分を検査
対象外になる除外領域として決定し、次に検査候補領域
のうち除外領域を除いた領域を検査対象領域とし、検査
対象領域内についてのみ被検査物の外観を検査すること
を特徴とする外観検査方法。
5. An inspection candidate area including at least a partial area of the inspection object is set in a grayscale image obtained by imaging a spatial area including the inspection object by an image pickup means, and the inspection object in the inspection candidate area is set. In a method of inspecting the appearance of an object, a density threshold value deviated by a specified offset value is set on at least one of a high density side and a low density side with respect to an average density of pixels included in an inspection candidate area. In addition, after extracting exclusion candidate pixels from the inspection candidate area by binarizing the pixels in the inspection candidate area using the density threshold value, the connected component that is the portion occupied by the area in which only the exclusion candidate pixels are connected Is a connected component in which the number of pixels contained in is larger than the specified area threshold, and the sum of the differential values of each pixel on the edge of the connected component exceeds the specified differential threshold, and the connected component edge For each of the above pixels, the threshold value is the number of pixels for which the density difference between a pair of pixels that are equidistant in the direction orthogonal to the direction indicated by the differential direction value of that pixel exceeds the specified value. Connected components exceeding 10 are determined as exclusion areas that are not to be inspected, and then the inspection candidate area is the inspection area except the exclusion area, and the appearance of the inspected object is inspected only within the inspection area. Appearance inspection method characterized by.
JP6145172A 1994-06-27 1994-06-27 Appearance inspection method Expired - Lifetime JP2831273B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6145172A JP2831273B2 (en) 1994-06-27 1994-06-27 Appearance inspection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6145172A JP2831273B2 (en) 1994-06-27 1994-06-27 Appearance inspection method

Publications (2)

Publication Number Publication Date
JPH0815172A true JPH0815172A (en) 1996-01-19
JP2831273B2 JP2831273B2 (en) 1998-12-02

Family

ID=15379108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6145172A Expired - Lifetime JP2831273B2 (en) 1994-06-27 1994-06-27 Appearance inspection method

Country Status (1)

Country Link
JP (1) JP2831273B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997043623A1 (en) * 1996-05-10 1997-11-20 Komatsu Ltd. Defect detecting apparatus and method
JP2005173845A (en) * 2003-12-10 2005-06-30 Juki Corp Parts recognition device
JP2019132720A (en) * 2018-01-31 2019-08-08 日本特殊陶業株式会社 Visual inspection device and visual inspection method
KR20220129770A (en) * 2021-03-17 2022-09-26 주식회사 스피어테크 Apparatus for checking product

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997043623A1 (en) * 1996-05-10 1997-11-20 Komatsu Ltd. Defect detecting apparatus and method
JP2005173845A (en) * 2003-12-10 2005-06-30 Juki Corp Parts recognition device
JP2019132720A (en) * 2018-01-31 2019-08-08 日本特殊陶業株式会社 Visual inspection device and visual inspection method
KR20220129770A (en) * 2021-03-17 2022-09-26 주식회사 스피어테크 Apparatus for checking product

Also Published As

Publication number Publication date
JP2831273B2 (en) 1998-12-02

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