JPH0815161A - Chemiluminescence analyzer - Google Patents

Chemiluminescence analyzer

Info

Publication number
JPH0815161A
JPH0815161A JP17003294A JP17003294A JPH0815161A JP H0815161 A JPH0815161 A JP H0815161A JP 17003294 A JP17003294 A JP 17003294A JP 17003294 A JP17003294 A JP 17003294A JP H0815161 A JPH0815161 A JP H0815161A
Authority
JP
Japan
Prior art keywords
optical window
gas
photodiode
potential
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17003294A
Other languages
Japanese (ja)
Other versions
JP3559998B2 (en
Inventor
Akifumi Kagawa
明文 香川
Aritoshi Yoneda
有利 米田
Toshikazu Onishi
敏和 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP17003294A priority Critical patent/JP3559998B2/en
Priority to DE1995121349 priority patent/DE19521349C2/en
Publication of JPH0815161A publication Critical patent/JPH0815161A/en
Application granted granted Critical
Publication of JP3559998B2 publication Critical patent/JP3559998B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/76Chemiluminescence; Bioluminescence

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Optical Measuring Cells (AREA)

Abstract

PURPOSE:To obtain a chemiluminescence analyzer which can perform highly accurate measurement while suppressing the effect of wet gas by stabilizing the potential in the vicinity of a photodiode to a constant level. CONSTITUTION:An optical window 8 is provided on one side of a reaction tank 9 fed with a sample gas and a reaction gas and a photodiode 11 detecting chemiluminescence, produced through reaction of both gases, is disposed oppositely to the optical window 8. In such a chemiluminescence analyzer, the optical window 8 is provided with conductivity and the potential thereof is dropped down to the earth potential.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、試料ガスを反応ガス
と反応させたときに生じる化学発光の光量を検出し、そ
の検出信号に基づいて試料ガスの濃度を測定する化学発
光分析計に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemiluminescence analyzer for detecting the amount of chemiluminescence generated when a sample gas is reacted with a reaction gas and measuring the concentration of the sample gas based on the detection signal.

【0002】[0002]

【従来の技術】図4は、従来の化学発光分析計の要部を
示すもので、この図において、41はケーシングで、そ
の内部には、試料ガスと反応ガスとが供給され、その一
側に両ガスの反応によって生ずる化学発光を透過させる
光学窓42を有する反応槽43が設けられるとともに、
前記光学窓42に対向させるようにして、光検出素子と
してのフォトダイオード44が設けられている。45は
フォトダイオード44を冷却するための電子冷却器であ
る。
2. Description of the Related Art FIG. 4 shows a main part of a conventional chemiluminescence analyzer. In this figure, 41 is a casing, into which a sample gas and a reaction gas are supplied, and one side of which is provided. Is provided with a reaction tank 43 having an optical window 42 for transmitting chemiluminescence generated by the reaction of both gases,
A photodiode 44 as a photodetector is provided so as to face the optical window 42. Reference numeral 45 is an electronic cooler for cooling the photodiode 44.

【0003】前記化学発光分析計においては、例えば試
料ガスとしてNOガスを、反応ガスとしてオゾンをそれ
ぞれ導入すると、これらのガスは反応槽43内において
反応して化学発光が生じ、これがフォトダイオード44
によって検出され、前記発光強度に基づいてNOガスの
濃度を検出できる。
In the above chemiluminescence analyzer, for example, when NO gas is introduced as a sample gas and ozone is introduced as a reaction gas, these gases react in the reaction tank 43 to generate chemiluminescence, which is the photodiode 44.
The NO gas concentration can be detected based on the emission intensity.

【0004】[0004]

【発明が解決しようとする課題】ところで、前記化学発
光分析計の反応槽43に導入される試料ガスは、必ずし
も乾燥したガスばかりではなく、例えばウェットゼロガ
スのように湿ったガスも導入されることがある。このよ
うにウェットなガスが反応槽43に導入されると、光学
窓42の反応槽内部側の表面にウェットガス中に含まれ
る水分により電荷(OH基)が発生し、これによって、
光学窓42の電位が変動し、この電位変動に伴って、フ
ォトダイオード44が設けられている室内46の電位が
変動し、半導体を使用しているフォトダイオード44に
悪影響が及ぼされることになる。結果として、化学発光
分析計の出力にウェットガスによる水分干渉影響に相当
する信号が発生していた。
The sample gas introduced into the reaction chamber 43 of the chemiluminescence analyzer is not necessarily a dry gas, but a wet gas such as wet zero gas is also introduced. There is. When such a wet gas is introduced into the reaction tank 43, an electric charge (OH group) is generated on the surface of the optical window 42 on the inner side of the reaction tank due to water contained in the wet gas.
The potential of the optical window 42 fluctuates, and with this fluctuation of the potential, the potential of the room 46 in which the photodiode 44 is provided fluctuates, and the photodiode 44 using a semiconductor is adversely affected. As a result, a signal corresponding to the influence of moisture interference by the wet gas was generated in the output of the chemiluminescence analyzer.

【0005】この発明は、上述の事柄に留意してなされ
たもので、フォトダイオード近傍の電位を一定の電位に
安定化させることにより、ウェットガスの影響を低減
し、精度の高い測定を行うことができる化学発光分析計
を提供することを目的としている。
The present invention has been made in consideration of the above matters, and stabilizes the potential in the vicinity of the photodiode to a constant potential, thereby reducing the influence of the wet gas and performing highly accurate measurement. It is an object of the present invention to provide a chemiluminescence analyzer capable of performing the above.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するた
め、この発明は、試料ガスと反応ガスとが供給される反
応槽の一側に光学窓を設け、この光学窓に対向する位置
に、前記両ガスの反応によって生ずる化学発光を検出す
るフォトダイオードを配置した化学発光分析計におい
て、前記光学窓に導電性を持たせるとともに、この光学
窓をアース電位に落とすようにしている。
In order to achieve the above object, the present invention provides an optical window on one side of a reaction tank to which a sample gas and a reaction gas are supplied, and at a position facing the optical window, In a chemiluminescence analyzer in which a photodiode for detecting chemiluminescence generated by the reaction of the two gases is arranged, the optical window is made conductive, and the optical window is dropped to the ground potential.

【0007】[0007]

【作用】前記構成の化学発光分析計においては、反応槽
の光学窓の電位をアース電位に落としているので、光学
窓の電位が安定化され、この光学窓に臨むフォトダイオ
ードの周囲の電位が安定化され、ウェットガスによる水
分干渉影響が大幅に低減されるようになった。
In the chemiluminescence analyzer having the above structure, since the potential of the optical window of the reaction tank is lowered to the ground potential, the potential of the optical window is stabilized and the potential around the photodiode facing this optical window is reduced. It has been stabilized and the influence of moisture interference due to wet gas has been greatly reduced.

【0008】[0008]

【実施例】図1および図2は、この発明の化学発光分析
計の一例を示す図で、図1において、1は上方が開口し
たケーシングで、例えばアルミニウムなどからなる。2
はこのケーシング1の上部空間に設けられる例えばフッ
素樹脂からなる例えば平面視円形のブロック状の器体
で、その下部平面側に渦巻き状凹溝3が形成され、その
表面は反射面に形成されている。4は渦巻き状凹溝3の
中心側端部に連通させて、その底面側に有底の孔状に設
けられた合流部である。5,6は合流部4の相対した側
面に連通させて互いに独立した状態で器体2の上部平面
側に延設されたガス導入路、7は渦巻き状凹溝3の外周
側端部に連通させて器体2の上部平面側に延設されたガ
ス導出路である。
1 and 2 are views showing an example of a chemiluminescence analyzer according to the present invention. In FIG. 1, reference numeral 1 denotes a casing having an upper opening, which is made of aluminum or the like. Two
Is a block-shaped container made of, for example, a fluororesin provided in the upper space of the casing 1 and having a circular shape in plan view. There is. Reference numeral 4 denotes a confluence portion which is communicated with the end portion of the spiral concave groove 3 on the center side and is provided on the bottom surface side in the shape of a bottomed hole. Reference numerals 5 and 6 communicate with opposite side surfaces of the confluence portion 4 and extend independently of each other on the upper flat surface side of the body 2, and 7 communicates with the outer peripheral side end portion of the spiral groove 3. This is the gas outlet path that is extended to the upper flat surface side of the container body 2.

【0009】8は器体2の渦巻き状凹溝3を設けた側面
に密接する光学フィルタを兼ねた光学窓で、渦巻き状凹
溝3の開口部を全長に亘って密閉して渦巻き状の反応槽
9を形成する。この光学窓8の器体2への密接は、これ
らを互いに圧接または接着剤で接着するなど任意であ
る。なお、10は光学窓8をケーシング1の内面に接着
するための接着剤である。
Reference numeral 8 denotes an optical window which also serves as an optical filter and is in close contact with the side surface of the body 2 in which the spiral concave groove 3 is provided. The bath 9 is formed. The optical window 8 may be brought into close contact with the body 2 by pressing them or adhering them with an adhesive. In addition, 10 is an adhesive for bonding the optical window 8 to the inner surface of the casing 1.

【0010】11は光学窓8を透過した光線を受光する
ために、器体2の下方空間12内に光学窓8に対応する
ようにして配置されるフォトダイオード、13はこのフ
ォトダイオード11の温度上昇を防ぐために、その下部
に配置された例えばペルチェ素子よりなる電子冷却器で
ある。そして、この電子冷却器13はケーシング1の底
部内面に固着されている。
Reference numeral 11 denotes a photodiode which is arranged in the lower space 12 of the body 2 so as to correspond to the optical window 8 in order to receive a light beam transmitted through the optical window 8. Reference numeral 13 denotes the temperature of the photodiode 11. In order to prevent the rise, it is an electronic cooler which is arranged at the lower part of the Peltier element, for example. The electronic cooler 13 is fixed to the inner surface of the bottom of the casing 1.

【0011】14は器体2の上部に設けられる流路盤を
兼ねた蓋体で、例えばステンレス鋼よりなり、その下面
側には前記ガス導入路5,6およびガス導出路7にそれ
ぞれ連なる流路15,16および17が開設され、これ
らの流路15,16および17の上端側はそれぞれガス
導入口18,19およびガス導出口20に形成されてい
る。なお、21,22,23,24は器体2と蓋体14
との間に介装されるOリングなどのシール部材である。
Reference numeral 14 designates a lid provided also on the upper portion of the body 2 and also serving as a flow passage board, and is made of, for example, stainless steel, and the lower surface of the lid is connected to the gas introduction passages 5 and 6 and the gas discharge passage 7, respectively. 15, 16 and 17 are opened, and the upper ends of these flow paths 15, 16 and 17 are formed to gas inlets 18 and 19 and gas outlet 20, respectively. In addition, 21, 22, 23, and 24 are the container 2 and the lid 14.
It is a sealing member such as an O-ring that is interposed between and.

【0012】そして、この実施例においては、図2に拡
大して示すように、光学窓8の下面側には適宜の導電性
塗料〔例えば透明導電性膜(ITO)〕がコーティング
25されて、光学窓8に導電性を持たせてあるととも
に、金属製のばね26をケーシング1に開設した孔27
内を挿通させて、皿ビスなどの固定部材28でばね26
を光学窓8の前記コーティング層25に圧接させること
により、光学窓8をケーシング1と同電位になるように
して、光学窓8をアース電位に落としている。なお、2
9はばね26が曲がらないようにばね26を外套する例
えばフッ素樹脂からなる円筒状のガイド部材である。
In this embodiment, as shown in an enlarged view in FIG. 2, the lower surface of the optical window 8 is coated with an appropriate conductive paint [eg, transparent conductive film (ITO)] 25. A hole 27 in which the optical window 8 is made conductive and a metal spring 26 is opened in the casing 1
The inside of the spring 26 is inserted through the fixing member 28 such as a countersunk screw.
Is brought into pressure contact with the coating layer 25 of the optical window 8 so that the optical window 8 has the same potential as the casing 1 and the optical window 8 is dropped to the ground potential. In addition, 2
Reference numeral 9 is a cylindrical guide member made of, for example, a fluororesin that covers the spring 26 so that the spring 26 does not bend.

【0013】上記構成の化学発光分析計において、ガス
導入口18を介して試料ガスとして例えばNOガスを、
また、ガス導入口19を介して反応ガスとしてオゾンを
それぞれ器体2内に導入する。器体2内に導入されたN
Oガスとオゾンは、合流部4に流入混合してから渦巻状
の反応槽9を流通しガス導出口20から器体2外に流出
する。そして、NOガスとオゾンとが合流部4で互いに
混合し反応しながら反応槽9を流通する間に生ずる化学
発光が光学窓8を透過してフォトダイオード11に入射
されるから、その光線をフォトダイオード11が検出し
て信号を出力する。
In the chemiluminescence analyzer having the above structure, for example, NO gas is supplied as a sample gas through the gas inlet 18.
In addition, ozone is introduced into the container 2 as a reaction gas through the gas introduction port 19. N introduced into the body 2
The O gas and ozone flow into the confluence portion 4, are mixed, and then flow through the spiral reaction tank 9 and flow out of the vessel body 2 through the gas outlet 20. Then, since the NO gas and ozone are mixed with each other in the confluence portion 4 and react with each other, the chemiluminescence generated while flowing through the reaction tank 9 is transmitted through the optical window 8 and is incident on the photodiode 11. The diode 11 detects and outputs a signal.

【0014】そして、前記構成の化学発光分析計におい
ては、反応槽9の光学窓8をアース電位に落としている
ので、光学窓8の電位が安定化される。また、フォトダ
イオード11は、ケーシング1に固定された電子冷却器
13に保持されているので、ケーシング1と光学窓8と
で囲まれた空間12の電位が安定化し、したがって、反
応槽9にウェットガスが導入されても、光学窓8やフォ
トダイオード11の電位がふらつくことなく安定化され
る。つまり、フォトダイオード11の周囲の電位の揺ら
ぎがなくなるので、ウェットガスによる水分干渉影響が
大幅(約30%)に低減される。
In the chemiluminescence analyzer having the above structure, the optical window 8 of the reaction tank 9 is lowered to the ground potential, so that the potential of the optical window 8 is stabilized. Further, since the photodiode 11 is held by the electronic cooler 13 fixed to the casing 1, the potential of the space 12 surrounded by the casing 1 and the optical window 8 is stabilized, so that the reaction tank 9 is wet. Even if gas is introduced, the potentials of the optical window 8 and the photodiode 11 are stabilized without fluctuation. That is, since the fluctuation of the potential around the photodiode 11 is eliminated, the influence of moisture interference by the wet gas is significantly reduced (about 30%).

【0015】また、上述の実施例においては、光学窓8
をアース電位に落とすために、ばね26と皿ビス28と
を用いているだけであるので、化学発光分析計の組立を
容易に行なえるといった利点がある。
Further, in the above embodiment, the optical window 8
Since only the spring 26 and the countersunk screw 28 are used to reduce the voltage to the ground potential, there is an advantage that the chemiluminescence analyzer can be easily assembled.

【0016】上述の実施例では、光学窓8をアース電位
に落とすために、ばね26と皿ビス28とを用いていた
が、これに代えて、図3に示すように、光学窓8のケー
シング1への固定に際し、導電性接着剤30を用いるよ
うにしてもよい。
In the above embodiment, the spring 26 and the countersunk screw 28 are used to drop the optical window 8 to the ground potential, but instead of this, as shown in FIG. 3, the casing of the optical window 8 is used. The conductive adhesive 30 may be used for fixing to 1.

【0017】また、上述の実施例においてはいずれも、
光学窓8に導電性を持たせるため、導電性塗料からなる
コーティング層25を光学窓8の一方の面に形成してい
たが、これに代えて、光学窓8そのものを導電性ガラス
で形成してもよい。
Further, in any of the above embodiments,
In order to make the optical window 8 conductive, a coating layer 25 made of a conductive paint was formed on one surface of the optical window 8. Instead of this, the optical window 8 itself is made of conductive glass. May be.

【0018】[0018]

【発明の効果】以上説明したように、この発明において
は、光学窓に導電性を持たせるとともに、この光学窓を
アース電位に落とすようにして、光学窓の電位を安定化
したので、この光学窓に臨むフォトダイオードの周囲の
電位が安定化され、ウェットガスによる水分干渉影響を
大幅に低減することができ、化学発光分析計の精度を向
上させることができるようになった。
As described above, according to the present invention, the optical window is made conductive, and the optical window is grounded to stabilize the potential of the optical window. The potential around the photodiode facing the window is stabilized, the influence of water interference by the wet gas can be significantly reduced, and the accuracy of the chemiluminescence analyzer can be improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の化学発光分析計の一例を示す縦断面
図である。
FIG. 1 is a longitudinal sectional view showing an example of a chemiluminescence analyzer of the present invention.

【図2】図1の部分拡大断面図である。FIG. 2 is a partially enlarged sectional view of FIG.

【図3】他の実施例の部分拡大断面図である。FIG. 3 is a partially enlarged cross-sectional view of another embodiment.

【図4】従来例を説明するための図である。FIG. 4 is a diagram for explaining a conventional example.

【符号の説明】[Explanation of symbols]

8…光学窓、9…反応槽、11…フォトダイオード。 8 ... Optical window, 9 ... Reaction tank, 11 ... Photodiode.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 試料ガスと反応ガスとが供給される反応
槽の一側に光学窓を設け、この光学窓に対向する位置
に、前記両ガスの反応によって生ずる化学発光を検出す
るフォトダイオードを配置した化学発光分析計におい
て、前記光学窓に導電性を持たせるとともに、この光学
窓をアース電位に落とすようにしたことを特徴とする化
学発光分析計。
1. An optical window is provided on one side of a reaction tank to which a sample gas and a reaction gas are supplied, and a photodiode for detecting chemiluminescence generated by the reaction of the both gases is provided at a position facing the optical window. The arranged chemiluminescence analyzer is characterized in that the optical window is made conductive and the optical window is dropped to the ground potential.
JP17003294A 1994-06-28 1994-06-28 Chemiluminescence analyzer Expired - Fee Related JP3559998B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17003294A JP3559998B2 (en) 1994-06-28 1994-06-28 Chemiluminescence analyzer
DE1995121349 DE19521349C2 (en) 1994-06-28 1995-06-12 Chemiluminescence analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17003294A JP3559998B2 (en) 1994-06-28 1994-06-28 Chemiluminescence analyzer

Publications (2)

Publication Number Publication Date
JPH0815161A true JPH0815161A (en) 1996-01-19
JP3559998B2 JP3559998B2 (en) 2004-09-02

Family

ID=15897349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17003294A Expired - Fee Related JP3559998B2 (en) 1994-06-28 1994-06-28 Chemiluminescence analyzer

Country Status (2)

Country Link
JP (1) JP3559998B2 (en)
DE (1) DE19521349C2 (en)

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US10670532B2 (en) 2017-08-10 2020-06-02 Ricoh Company, Ltd. Measuring apparatus comprising a line enclosure disposed around an electrical connection line electrically connected to the conductive part of an optical window and a housing

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