JPH08139479A - Heat sink - Google Patents

Heat sink

Info

Publication number
JPH08139479A
JPH08139479A JP27357094A JP27357094A JPH08139479A JP H08139479 A JPH08139479 A JP H08139479A JP 27357094 A JP27357094 A JP 27357094A JP 27357094 A JP27357094 A JP 27357094A JP H08139479 A JPH08139479 A JP H08139479A
Authority
JP
Japan
Prior art keywords
cooling
water
heat sink
water channel
radiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27357094A
Other languages
Japanese (ja)
Other versions
JP3512249B2 (en
Inventor
Sadao Nakai
貞雄 中井
Masanori Yamanaka
正宣 山中
Hirobumi Miyajima
博文 宮島
Takeshi Kanzaki
武司 神崎
Hirobumi Suga
博文 菅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP27357094A priority Critical patent/JP3512249B2/en
Publication of JPH08139479A publication Critical patent/JPH08139479A/en
Application granted granted Critical
Publication of JP3512249B2 publication Critical patent/JP3512249B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To provide a high-durability heat sink, which can absorb efficiently heat from a radiator and can be easily manufactured. CONSTITUTION: A beam emitted from an LD bar 12 placed on a radiator 11 is emitted via a microlens 13. A water channel formed in the interior of the radiator 11 is constituted of a pressing water channel 14, a cooling part 15 and a discharge water channel 16. A puddle part 14a is formed in the end part of the water channel 14. A plurality of small holes 17 are formed in this puddle part 14a along the arrangement direction of the LD bar 12. A roughened surface 15a is formed in an on the cooling part 15 in the vicinity of the LD bar 12. The remaining cavity part of the radiator 11 constitutes the discharge water channel 15. Cooling water jetted through the small holes 17 is sprayed on the part 15 at a high pressure and heat transferred from the LD bar 12 to the cooling part 15 is effectively absorbed in this cooling water.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は水冷構造を有するヒート
シンクに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat sink having a water cooling structure.

【0002】[0002]

【従来の技術】従来、この種のヒートシンクとしては、
例えば、図3に示す高出力LD(レーザーダイオード)
アレイ用のヒートシンクがある。ここで、同図(a)は
このヒートシンクの断面図、同図(b)は平面図を示し
ている。このLDアレイ用ヒートシンクには、LD発振
波長の動的な変動を抑えることはもちろんのこと、出射
されたレーザビームの空間的なばらつきを最小限に抑制
する機能を果たすことが必要とされる。このため、この
ヒートシンクではLDアレイの放熱を円滑に行うために
水冷構造が備えられている。つまり、放熱体1には上面
水路2aと下面水路2bとの2層構造をした水路2が設
けられている。この水路2の注入口3から取り込まれた
冷却水は上面水路2aにおいて広げられる。広げられた
冷却水はLDアレイ4を一様に冷却し、冷却後、下面水
路2bを通って排出口5に戻される。放熱体1はシリコ
ン結晶からなり、上面水路2aおよび下面水路2bはこ
のシリコン(Si)結晶が微細加工されて形成されてい
る。
2. Description of the Related Art Conventionally, as this type of heat sink,
For example, the high power LD (laser diode) shown in FIG.
There is a heat sink for the array. Here, FIG. 10A shows a cross-sectional view of this heat sink, and FIG. This heat sink for LD array is required to not only suppress the dynamic fluctuation of the LD oscillation wavelength but also fulfill the function of suppressing the spatial variation of the emitted laser beam to the minimum. Therefore, this heat sink is provided with a water cooling structure in order to smoothly dissipate heat from the LD array. That is, the radiator 1 is provided with the water channel 2 having a two-layer structure of the upper water channel 2a and the lower water channel 2b. The cooling water taken from the inlet 3 of the water channel 2 is spread in the upper surface water channel 2a. The spread cooling water uniformly cools the LD array 4, and after cooling, is returned to the discharge port 5 through the lower surface water passage 2b. The radiator 1 is made of silicon crystal, and the upper surface water channel 2a and the lower surface water channel 2b are formed by finely processing the silicon (Si) crystal.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上記従
来のヒートシンクにおいては、上記のように微細加工技
術を用いて上面水路2aおよび下面水路2bを形成して
いるため、ヒートシンクの作製工程が複雑になるという
問題があった。また、Siは機械的に脆いため、ヒート
シンクの耐久性にも問題があった。
However, in the above conventional heat sink, since the upper surface water passage 2a and the lower surface water passage 2b are formed by using the fine processing technique as described above, the manufacturing process of the heat sink becomes complicated. There was a problem. Further, since Si is mechanically brittle, there is a problem in durability of the heat sink.

【0004】[0004]

【課題を解決するための手段】本発明はこのような課題
を解消するためになされたもので、発熱体に接触させら
れる放熱体と、この放熱体に形成された水路とを備え、
この水路に冷却水を流して発熱体を冷却するヒートシン
クにおいて、上記水路は、小孔が形成され加圧水が供給
される加圧水路と、小孔から噴射された冷却水が当てら
れる発熱体の近傍に設けられた冷却部と、この冷却部で
用いられた冷却水を排出する排出水路とから構成されて
いることを特徴とするものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and includes a radiator for contacting a heating element and a water channel formed in the radiator.
In a heat sink that cools a heating element by flowing cooling water in the channel, the channel is formed in the vicinity of a pressure channel where a small hole is formed and pressurized water is supplied, and a heating element to which the cooling water sprayed from the hole is applied It is characterized by comprising a cooling unit provided and an exhaust water channel for discharging the cooling water used in this cooling unit.

【0005】また、上記冷却部に凹凸が形成されている
ことを特徴とするものである。
Further, it is characterized in that the cooling portion is provided with irregularities.

【0006】また、上記加圧水路に水溜部が形成され、
この水溜部に小孔が複数形成されていることを特徴とす
るものである。
A water reservoir is formed in the pressurized water channel,
A plurality of small holes are formed in the water reservoir.

【0007】[0007]

【作用】小孔から噴射された冷却水は冷却部に高圧で噴
きつけられ、発熱体から冷却部に伝わった熱はこの冷却
水によって効果的に奪われる。一方、本構造は脆いシリ
コン結晶を用いなくても構成される。
The cooling water sprayed from the small holes is sprayed at high pressure to the cooling section, and the heat transferred from the heat generating element to the cooling section is effectively taken away by this cooling water. On the other hand, this structure is formed without using a brittle silicon crystal.

【0008】また、冷却部に凹凸が形成されていると、
冷却部の表面積は増大し、冷却水との接触面積は増大す
る。
If unevenness is formed in the cooling portion,
The surface area of the cooling part increases and the contact area with the cooling water increases.

【0009】また、加圧水路に水溜部が形成され、この
水溜部に複数の小孔が形成されていると、各小孔から噴
射される高圧の冷却水は冷却部に同時に噴きつけられ
る。
If a water reservoir is formed in the pressurized water passage and a plurality of small holes are formed in this water reservoir, high-pressure cooling water injected from each small hole is simultaneously sprayed onto the cooling unit.

【0010】[0010]

【実施例】図1は本発明の一実施例によるヒートシンク
を示す側面図であり、図2はこのヒートシンクの上面図
である。
1 is a side view showing a heat sink according to an embodiment of the present invention, and FIG. 2 is a top view of the heat sink.

【0011】放熱体11の上面端部には発熱体であるL
Dバー12が載置されている。このLDバー12はLD
が棒状に形成されたものであり、放熱体11の端部にお
いて図1の紙面に垂直な方向に延びている。LDバー1
2から出射されたレーザービームはマイクロレンズ13
によって集束されて出射される。放熱体11の内部には
LDバー12を冷却するための水路が形成されている。
水路は、加圧水路14と冷却部15と排出水路16とか
ら構成されている。加圧水路14は円筒状の銅製パイプ
からなり、この加圧水路14の端部には直角に太めの銅
製パイプが溶接され、水溜部14aが形成されている。
この水溜部14aには、LDバー12の配設方向に沿っ
て複数の小孔17が形成されている。これら加圧水路1
4および水溜部14aは放熱体11の内部に形成された
空洞部に挿入、固定されて構成されている。この空洞部
は、厚さ1mmの銅板からなる放熱体11の内部が切削
されて形成されている。LDバー12の下方にある空洞
部は冷却部15を構成しており、LDバー12の近傍の
冷却部15には凹凸面15aが形成されている。この凹
凸面15aは、各小孔17から噴射される冷却水が噴き
つけられる位置に形成されている。放熱体11の残余の
空洞部は排出水路16を構成している。
At the end of the upper surface of the radiator 11, a heating element L
The D bar 12 is placed. This LD bar 12 is an LD
Is formed in a rod shape, and extends in the direction perpendicular to the paper surface of FIG. 1 at the end of the radiator 11. LD bar 1
The laser beam emitted from 2 is a microlens 13
It is focused and emitted by. A water channel for cooling the LD bar 12 is formed inside the radiator 11.
The water channel is composed of a pressurized water channel 14, a cooling unit 15, and a discharge water channel 16. The pressurized water passage 14 is made of a cylindrical copper pipe, and a thick copper pipe is welded to the end portion of the pressurized water passage 14 at a right angle to form a water reservoir 14a.
A plurality of small holes 17 are formed in the water reservoir 14a along the arrangement direction of the LD bar 12. These pressurized waterways 1
4 and the water reservoir 14a are inserted and fixed in a cavity formed inside the radiator 11. The hollow portion is formed by cutting the inside of the radiator 11 made of a copper plate having a thickness of 1 mm. The cavity below the LD bar 12 constitutes a cooling unit 15, and the cooling unit 15 near the LD bar 12 is provided with an uneven surface 15a. The uneven surface 15a is formed at a position where the cooling water sprayed from each small hole 17 is sprayed. The remaining cavity of the radiator 11 constitutes the discharge water channel 16.

【0012】このような構成において、加圧水路14に
注入された冷却水は高圧力になり、加圧された冷却水は
各小孔17から噴射する。噴射した冷却水は凹凸面15
aに噴きつけられ、排出水路16に集められて排出され
る。
In such a structure, the cooling water injected into the pressurized water passage 14 has a high pressure, and the pressurized cooling water is jetted from each small hole 17. The sprayed cooling water has uneven surface 15
It is sprayed on a, collected in the discharge water channel 16, and discharged.

【0013】本実施例によるヒートシンクにおいては、
小孔17から噴射された冷却水は冷却部15の内壁に高
圧で噴きつけられ、LDバー12から冷却部15に伝わ
った熱はこの冷却水によって効果的に奪われる。一方、
本実施例によるヒートシンクは、耐久性の高い銅板およ
び銅製パイプによって形成され、従来のように脆いシリ
コン結晶を用いなくても構成できる。このため、ヒート
シンクの作製工程に微細で複雑な従来の加工工程が必要
とされなくなり、比較的容易に耐久性の高いヒートシン
クを製造することが可能となる。
In the heat sink according to this embodiment,
The cooling water sprayed from the small holes 17 is sprayed at a high pressure on the inner wall of the cooling part 15, and the heat transferred from the LD bar 12 to the cooling part 15 is effectively taken away by this cooling water. on the other hand,
The heat sink according to this embodiment is formed of a highly durable copper plate and a copper pipe, and can be configured without using a brittle silicon crystal as in the conventional case. For this reason, a fine and complicated conventional processing step is not required in the manufacturing process of the heat sink, and it becomes possible to manufacture the heat sink having high durability relatively easily.

【0014】また、冷却水が噴きつけられる冷却部15
の内壁に凹凸面15aが形成されているため、冷却部1
5の表面積は増大する。よって、冷却部15と冷却水と
の接触面積が増大するため、LDバー12から冷却部1
5に伝えられた熱はより効率的に冷却水に奪われ、ヒー
トシンクの熱交換の効率は向上する。
Further, the cooling unit 15 to which cooling water is sprayed
Since the uneven surface 15a is formed on the inner wall of the cooling unit 1,
The surface area of 5 increases. Therefore, the contact area between the cooling unit 15 and the cooling water increases, so that the LD bar 12 moves to the cooling unit 1.
The heat transferred to 5 is more efficiently taken by the cooling water, and the heat exchange efficiency of the heat sink is improved.

【0015】また、加圧水路14に水溜部14aが形成
され、この水溜部14aに複数の小孔17が形成されて
いるため、各小孔17から噴射される高圧の冷却水は冷
却部15に同時に噴きつけられる。このため、棒状に長
く形成されたLDバー12であっても、多量の冷却水に
よって全体的に効率良く冷却される。
Further, since the water reservoir 14a is formed in the pressurized water passage 14 and the plurality of small holes 17 are formed in the water reservoir 14a, the high-pressure cooling water injected from each small hole 17 is supplied to the cooling unit 15. It is sprayed at the same time. Therefore, even the LD bar 12 formed in a long rod shape can be efficiently cooled as a whole by a large amount of cooling water.

【0016】[0016]

【発明の効果】以上説明したように本発明によれば、小
孔から噴射された冷却水は冷却部に高圧で噴きつけら
れ、発熱体から冷却部に伝わった熱はこの冷却水によっ
て効果的に奪われる。一方、本構造は脆いシリコン結晶
を用いなくても構成できる。このため、ヒートシンクの
作製工程に微細で複雑な加工工程が必要とされなくな
り、比較的容易に耐久性の高いヒートシンクを製造する
ことが可能となる。
As described above, according to the present invention, the cooling water sprayed from the small holes is sprayed at a high pressure on the cooling part, and the heat transmitted from the heating element to the cooling part is effectively supplied by this cooling water. Be robbed by. On the other hand, this structure can be constructed without using a brittle silicon crystal. Therefore, a fine and complicated processing step is not required in the heat sink manufacturing process, and it becomes possible to relatively easily manufacture the heat sink having high durability.

【0017】また、冷却部に凹凸が形成されていると、
冷却部の表面積は増大し、冷却水との接触面積は増大す
る。このため、発熱体から冷却部に伝えられた熱はより
効率的に冷却水に奪われ、ヒートシンクの熱交換の効率
は向上する。
Further, if the cooling portion has irregularities,
The surface area of the cooling part increases and the contact area with the cooling water increases. Therefore, the heat transferred from the heating element to the cooling unit is more efficiently taken by the cooling water, and the heat exchange efficiency of the heat sink is improved.

【0018】また、加圧水路に水溜部が形成され、この
水溜部に複数の小孔が形成されていると、各小孔から噴
射される高圧の冷却水は冷却部に同時に噴きつけられ
る。このため、発熱体は全体的に効率良く冷却される。
When a water reservoir is formed in the pressurized water passage and a plurality of small holes are formed in the water reservoir, high-pressure cooling water sprayed from each small hole is simultaneously sprayed onto the cooling unit. Therefore, the heating element is cooled efficiently as a whole.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例によるヒートシンクを示す側
面図である。
FIG. 1 is a side view showing a heat sink according to an exemplary embodiment of the present invention.

【図2】本実施例によるヒートシンクを示す上面図であ
る。
FIG. 2 is a top view showing a heat sink according to this embodiment.

【図3】従来のヒートシンクを示す図である。FIG. 3 is a diagram showing a conventional heat sink.

【符号の説明】[Explanation of symbols]

11…放熱体、12…LDバー、13…マイクロレン
ズ、14…加圧水路、14a…水溜部、15…冷却部、
15a…凹凸面、16…排出水路、17…小孔。
11 ... Radiator, 12 ... LD bar, 13 ... Microlens, 14 ... Pressurized water channel, 14a ... Water reservoir, 15 ... Cooling section,
15a ... uneven surface, 16 ... discharge water channel, 17 ... small hole.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 宮島 博文 静岡県浜松市市野町1126番地の1 浜松ホ トニクス株式会社内 (72)発明者 神崎 武司 静岡県浜松市市野町1126番地の1 浜松ホ トニクス株式会社内 (72)発明者 菅 博文 静岡県浜松市市野町1126番地の1 浜松ホ トニクス株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hirofumi Miyajima 1126, Nomachi, Hamamatsu City, Shizuoka Prefecture 1126 Hamamatsu Photonics Co., Ltd. (72) Inventor Takeshi Kanzaki 1126, 1126 Ichinomachi, Hamamatsu City, Shizuoka Prefecture Hamamatsu Photonics Co., Ltd. (72) Inventor Hirofumi Suga 1126-1 Nomachi, Hamamatsu-shi, Shizuoka Prefecture 1 Hamamatsu Photonics Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 発熱体に接触させられる放熱体と、この
放熱体に形成された水路とを備え、この水路に冷却水を
流して前記発熱体を冷却するヒートシンクにおいて、 前記水路は、小孔が形成され加圧水が供給される加圧水
路と、前記小孔から噴射された冷却水が当てられる前記
発熱体の近傍に設けられた冷却部と、この冷却部で用い
られた冷却水を排出する排出水路とから構成されている
ことを特徴とするヒートシンク。
1. A heat sink, comprising: a heat radiator which is brought into contact with a heat generating body; and a water channel formed in the heat radiator, wherein cooling water is flowed through the water channel to cool the heat generating element, wherein the water channel has a small hole. And a cooling section provided in the vicinity of the heating element to which the cooling water sprayed from the small holes is applied, and a discharge for discharging the cooling water used in the cooling section. A heat sink characterized by being composed of a water channel.
【請求項2】 前記冷却部に凹凸が形成されていること
を特徴とする請求項1記載のヒートシンク。
2. The heat sink according to claim 1, wherein the cooling portion has irregularities.
【請求項3】 前記加圧水路に水溜部が形成され、この
水溜部に前記小孔が複数形成されていることを特徴とす
る請求項1または請求項2記載のヒートシンク。
3. The heat sink according to claim 1, wherein a water reservoir is formed in the pressurized water passage, and a plurality of the small holes are formed in the water reservoir.
JP27357094A 1994-11-08 1994-11-08 heatsink Expired - Lifetime JP3512249B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27357094A JP3512249B2 (en) 1994-11-08 1994-11-08 heatsink

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27357094A JP3512249B2 (en) 1994-11-08 1994-11-08 heatsink

Publications (2)

Publication Number Publication Date
JPH08139479A true JPH08139479A (en) 1996-05-31
JP3512249B2 JP3512249B2 (en) 2004-03-29

Family

ID=17529652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27357094A Expired - Lifetime JP3512249B2 (en) 1994-11-08 1994-11-08 heatsink

Country Status (1)

Country Link
JP (1) JP3512249B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143779A1 (en) * 1998-08-18 2001-10-10 Hamamatsu Photonics K.K. Heat sink, and semiconductor laser and semiconductor laser stacker using the same
US6804275B2 (en) 1998-08-18 2004-10-12 Hamamatsu Photonics K.K. Heat sink and semiconductor laser apparatus and semiconductor laser stack apparatus using the same
WO2005038935A1 (en) 2003-10-15 2005-04-28 Nichia Corporation Light-emitting device
US7466023B2 (en) 2002-03-06 2008-12-16 Hamamatsu Photonics K.K. Semiconductor light emitting device and plant cultivating system
US7567598B2 (en) 2004-03-17 2009-07-28 Hamamatsu Photonics K.K. Semiconductor laser equipment
US7885299B2 (en) 2004-03-17 2011-02-08 Hamamatsu Photonics K.K. Semiconductor laser equipment

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1143779A1 (en) * 1998-08-18 2001-10-10 Hamamatsu Photonics K.K. Heat sink, and semiconductor laser and semiconductor laser stacker using the same
EP1143779A4 (en) * 1998-08-18 2003-02-05 Hamamatsu Photonics Kk Heat sink, and semiconductor laser and semiconductor laser stacker using the same
US6804275B2 (en) 1998-08-18 2004-10-12 Hamamatsu Photonics K.K. Heat sink and semiconductor laser apparatus and semiconductor laser stack apparatus using the same
US6895026B2 (en) 1998-08-18 2005-05-17 Hamamatsu Photonics K.K. Heat sink and semiconductor laser apparatus and semiconductor laser stack apparatus using the same
JP4224217B2 (en) * 1998-08-18 2009-02-12 浜松ホトニクス株式会社 Semiconductor laser stack equipment
US7466023B2 (en) 2002-03-06 2008-12-16 Hamamatsu Photonics K.K. Semiconductor light emitting device and plant cultivating system
WO2005038935A1 (en) 2003-10-15 2005-04-28 Nichia Corporation Light-emitting device
US7482636B2 (en) 2003-10-15 2009-01-27 Nichia Corporation Light emitting device
US7812365B2 (en) 2003-10-15 2010-10-12 Nichia Corporation Heat dissipation member, semiconductor apparatus and semiconductor light emitting apparatus
US7567598B2 (en) 2004-03-17 2009-07-28 Hamamatsu Photonics K.K. Semiconductor laser equipment
US7885299B2 (en) 2004-03-17 2011-02-08 Hamamatsu Photonics K.K. Semiconductor laser equipment

Also Published As

Publication number Publication date
JP3512249B2 (en) 2004-03-29

Similar Documents

Publication Publication Date Title
US10109978B2 (en) Low size and weight, high power fiber laser pump
US6895026B2 (en) Heat sink and semiconductor laser apparatus and semiconductor laser stack apparatus using the same
US7305016B2 (en) Laser diode package with an internal fluid cooling channel
KR100609939B1 (en) Heatsink, and semiconductor laser device and semiconductor laser stack using heatsink
US20060175041A1 (en) Foil slot impingement cooler with effective light-trap cavities
US20080030538A1 (en) Array printhead having micro heat pipes
US5901167A (en) Air cooled gas laser
JP2004186527A (en) Laser diode cooling apparatus
US20070023168A1 (en) Apparatus for cooling electronic components
JPH08139479A (en) Heat sink
US20060215715A1 (en) Heat sink, laser module, laser device, and laser-processing device
EP1111739A2 (en) Laser oscillator apparatus
JP3920977B2 (en) Heat sink and manufacturing method thereof
JP4598422B2 (en) Laser array module and cooling manifold
US6877869B2 (en) Mirror for laser applications and method for manufacture of said mirror
TWI729421B (en) Diode laser configuration and method for manufacturing diode laser configuration
CN103050869A (en) Micro-pore cooling mirror with mirror surface of non-equal thickness
KR20010045305A (en) Thermal-compress type ink jetting apparatus
CN112490828A (en) Laser crystal integrated module
JP7382498B2 (en) Packages for high power laser devices
JP2001308423A (en) Cooling block, ld device mounted with it and solid-state laser device using it as excitation light source
JPH0417992A (en) Power damper
JPH05335663A (en) Laser diode-excited solid-state laser device
JP2006086192A (en) Light-emitting element
JP2005203560A (en) Radiator

Legal Events

Date Code Title Description
A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040106

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313532

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090116

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090116

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100116

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110116

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110116

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120116

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120116

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130116

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130116

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140116

Year of fee payment: 10

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term