JPH08138214A - Magneto-resistance effect head - Google Patents
Magneto-resistance effect headInfo
- Publication number
- JPH08138214A JPH08138214A JP27382194A JP27382194A JPH08138214A JP H08138214 A JPH08138214 A JP H08138214A JP 27382194 A JP27382194 A JP 27382194A JP 27382194 A JP27382194 A JP 27382194A JP H08138214 A JPH08138214 A JP H08138214A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- head
- soft magnetic
- soft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気ヘッド、特に磁気
抵抗効果を利用した磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head, and more particularly to a magnetic head utilizing the magnetoresistive effect.
【０００２】[0002]
【従来の技術】磁気記録機器の小型大容量化に伴って高
密度化が進展し、磁気ヘッドに対して高出力化が要求さ
れていることから、磁気抵抗効果（ＭＲ効果）を利用し
たＭＲヘッドが磁気ディスク装置に使用されている。2. Description of the Related Art As a magnetic recording device has become smaller and has a higher capacity, higher density has been developed, and a higher output is required for a magnetic head. Therefore, an MR utilizing a magnetoresistive effect (MR effect) is required. The head is used in a magnetic disk device.
【０００３】ＭＲ効果を利用したヘッドの中でもさらに
高出力が得られるものとして、スピン・バルブ効果を利
用したＭＲヘッドも開発研究されている（例えば、特開
平４−３５８３１０号公報）。図４は、この感磁部を用
いたシールド型ＭＲヘッドを示したものである。このＭ
Ｒヘッドの感磁部１０は、ＦｅＭｎ層５（反強磁性層）
／ＮｉＦｅ層６（第１軟磁性層）／Ｃｕ層７（非磁性
層）／ＮｉＦｅ層８（第２軟磁性層）なる構成よりな
る。An MR head utilizing the spin valve effect has also been developed and studied as a head capable of obtaining a higher output among the heads utilizing the MR effect (for example, Japanese Patent Laid-Open No. 4-358310). FIG. 4 shows a shield type MR head using this magnetically sensitive portion. This M
The magnetic sensitive portion 10 of the R head is composed of the FeMn layer 5 (antiferromagnetic layer).
/ NiFe layer 6 (first soft magnetic layer) / Cu layer 7 (nonmagnetic layer) / NiFe layer 8 (second soft magnetic layer).
【０００４】一方、図４のシールド型ＭＲヘッドとは別
に、ヨーク層からなるリング構造の磁気ヘッドが開発さ
れている。On the other hand, in addition to the shield type MR head shown in FIG. 4, a magnetic head having a ring structure composed of a yoke layer has been developed.
【０００５】[0005]
【発明が解決しようとする課題】ここで図３に、ヨーク
層からなるリング構造の磁気ヘッドに前記特開平４−３
５８３１０号公報に開示された感磁部を適用した例を示
す。この図において、感磁部１０はＦｅＭｎ層５（反強
磁性層）、ＮｉＦｅ層６（第１軟磁性層）、Ｃｕ層７
（非磁性層）、ＮｉＦｅ層８（第２軟磁性層）からな
り、絶縁層２をギャップとし、非磁性層９を介して軟磁
性体１上に形成されている。感磁部１０と、絶縁層２を
ギャップとした軟磁性体１上には、軟磁性膜４、軟磁性
膜４と同じ材料よりなるヨーク層３が形成されている。FIG. 3 shows a magnetic head having a ring structure composed of a yoke layer as disclosed in the above-mentioned Japanese Patent Laid-Open No. 4-3.
An example in which the magnetic sensing unit disclosed in Japanese Patent No. 58310 is applied is shown. In this figure, the magnetic sensitive section 10 includes a FeMn layer 5 (antiferromagnetic layer), a NiFe layer 6 (first soft magnetic layer), and a Cu layer 7.
(Non-magnetic layer) and NiFe layer 8 (second soft magnetic layer), which are formed on the soft magnetic body 1 via the non-magnetic layer 9 with the insulating layer 2 as a gap. A soft magnetic film 4 and a yoke layer 3 made of the same material as the soft magnetic film 4 are formed on the magnetic sensitive portion 10 and the soft magnetic body 1 having the insulating layer 2 as a gap.
【０００６】しかし、この構造においては、感磁部１０
の第１及び第２軟磁性層は、高出力を得るためにはなる
べく薄いものが望まれるが、一方でこの感磁部１０のＮ
ｉＦｅ層６，８が薄く、磁気回路的に磁気抵抗が大きく
なるため感磁部１０を通過する磁束が減少し、大きな磁
気抵抗変化を発生させにくいという問題があった。However, in this structure, the magnetic sensing section 10
The first and second soft magnetic layers are preferably as thin as possible in order to obtain a high output.
Since the iFe layers 6 and 8 are thin and the magnetic resistance is large in the magnetic circuit, the magnetic flux passing through the magnetically sensitive portion 10 is reduced, which causes a problem that a large magnetic resistance change is hard to occur.
【０００７】本発明の目的は、前記問題を解決してヘッ
ド出力を増大した磁気抵抗効果ヘッドを提供することで
ある。An object of the present invention is to solve the above problems and provide a magnetoresistive head having an increased head output.
【０００８】[0008]
【課題を解決するための手段】本発明による磁気抵抗効
果ヘッドは、磁気回路の一部となる感磁部が反強磁性層
／第１軟磁性層／非磁性層／第２軟磁性層の構造よりな
り、記録媒体に対抗する側にギャップを有するリング型
磁気ヘッドにおいて、少なくとも前記感磁部上に前記の
第２軟磁性層と磁気的に結合している磁気交換結合層を
有し、さらに前記磁気交換結合層上に軟強磁性層を有す
ることを特徴としている。ここで、交換結合層は感磁部
の上のみならず、図１に示したように絶縁層２の上部及
び感磁部の側壁部に形成されていてもかまわない。In the magnetoresistive effect head according to the present invention, the magnetic sensitive portion forming a part of the magnetic circuit is composed of an antiferromagnetic layer / first soft magnetic layer / nonmagnetic layer / second soft magnetic layer. In a ring-type magnetic head having a structure and having a gap on a side facing a recording medium, a magnetic exchange coupling layer magnetically coupled to the second soft magnetic layer is provided at least on the magnetic sensing part, Further, a soft ferromagnetic layer is provided on the magnetic exchange coupling layer. Here, the exchange coupling layer may be formed not only on the magnetic sensing portion but also on the upper portion of the insulating layer 2 and the sidewall portion of the magnetic sensing portion as shown in FIG.
【０００９】なお、交換結合層は、比抵抗が磁気感部の
比抵抗より大きいものの方が、軟磁性層１５へ電流が流
れないようにして効率を上げることが可能となるので好
適である。このようなものとしてはＭｎＺｎフェライ
ト、ＮｉＺｎフェライト等が挙げられる。It is preferable that the exchange-coupling layer has a specific resistance larger than that of the magnetic sensing portion, because the current can be prevented from flowing to the soft magnetic layer 15 and the efficiency can be improved. Examples of such a material include MnZn ferrite and NiZn ferrite.
【００１０】[0010]
【作用】本発明の磁気抵抗効果ヘッドを図１に示す。The magnetoresistive head of the present invention is shown in FIG.
【００１１】図１は図３と同様な、絶縁層２をギャップ
としたリング型の磁気ヘッドである。磁気コアは、軟磁
性体１と感磁部１０の上層に交換結合層２０を形成し、
しかる後にヨークとなる軟磁性層１５が形成される。軟
磁性層１５の付加によりリングヘッドの磁気抵抗が低下
し、ヨークの効果がより大きくなる。交換結合層２０
は、第２軟磁性層８及び軟磁性層１５の磁化を交換結合
させ同一方向に磁化を向ける。これにより、軟磁性層１
５の磁化方向に交換結合層膜２０を通すことによって軟
磁性層８の磁化も変化するため、軟磁性層８だけの場合
よりも出力が大きくなる。また、交換結合層２０は、第
１軟磁性層６及び第２軟磁性層８より比抵抗を大きくす
ることにより、感磁部１０に流すセンス電流が軟磁性層
１５に流れることを抑制し、感磁部１０の出力の低下を
防止する。FIG. 1 shows a ring-type magnetic head similar to that shown in FIG. 3 with the insulating layer 2 as a gap. In the magnetic core, the exchange coupling layer 20 is formed on the soft magnetic body 1 and the magnetic sensitive section 10, and
After that, the soft magnetic layer 15 serving as a yoke is formed. The addition of the soft magnetic layer 15 lowers the magnetic resistance of the ring head and makes the yoke more effective. Exchange coupling layer 20
Causes the magnetizations of the second soft magnetic layer 8 and the soft magnetic layer 15 to be exchange-coupled and oriented in the same direction. Thereby, the soft magnetic layer 1
Since the magnetization of the soft magnetic layer 8 is changed by passing the exchange coupling layer film 20 in the magnetization direction of No. 5, the output becomes larger than that of the soft magnetic layer 8 alone. Further, the exchange coupling layer 20 has a larger specific resistance than the first soft magnetic layer 6 and the second soft magnetic layer 8 to suppress a sense current flowing in the magnetic sensitive section 10 from flowing in the soft magnetic layer 15. It is possible to prevent the output of the magnetic sensing unit 10 from decreasing.
【００１２】[0012]
（実施例１）図１の断面図を用いて本発明の実施例を説
明する。(Embodiment 1) An embodiment of the present invention will be described with reference to the sectional view of FIG.
【００１３】Ｍｎ−Ｚｎフェライト上に溝加工を施しガ
ラスを溶着後鏡面研磨を行い、ガラス溝の非磁性体部９
を形成する。ガラス溝加工したフェライト基板１上にア
ルミナを０．１５μm スパッタリングで形成する。その
後、ＮｉＦｅ膜１００オングストローム（以後、Ａと略
す）をした時とした反強磁性層５としてＦｅＭｎ層を１
００Ａ形成し、順次軟磁性層６としてＮｉＦｅ層を１５
０Ａ、非磁性層７としてＣｕ層を２５Ａ、軟磁性層８と
してＮｉＦｅ層を１５０Ａ形成した。これらを形成後感
磁部としてパターンニングを行い、センス電流を流す電
極を形成した。その後、交換結合層２０としてＮｉＺｎ
フェライト層を２００Ａ形成し、さらに軟磁性層１５と
してＮｉＦｅ層を３μm 形成し、パターンニングを行っ
た。A groove is formed on the Mn-Zn ferrite and the glass is welded and then mirror-polished to obtain a non-magnetic portion 9 of the glass groove.
To form. Alumina is formed on the glass-grooved ferrite substrate 1 by 0.15 μm sputtering. After that, the FeMn layer is formed as the antiferromagnetic layer 5 when the NiFe film is 100 angstrom (hereinafter abbreviated as A).
00A, and a NiFe layer 15 is formed as the soft magnetic layer 15 in sequence.
0 A, a Cu layer of 25 A was formed as the non-magnetic layer 7, and a NiFe layer of 150 A was formed as the soft magnetic layer 8. After forming these, patterning was performed as a magnetically sensitive portion to form an electrode for passing a sense current. Then, NiZn is used as the exchange coupling layer 20.
A ferrite layer of 200 A was formed, and a NiFe layer of 3 μm was formed as the soft magnetic layer 15, and patterning was performed.
【００１４】本発明において、反強磁性層５としてはＮ
ｉＯ層、ＮｉＯ／ＣｉＯ層などの反強磁性層でも良い。
交換結合層２０は、ＮｉＦｅ層などの金属層より高い比
抵抗を有したもので、ＭｎＺｎフェライトでも良い。In the present invention, N is used as the antiferromagnetic layer 5.
An antiferromagnetic layer such as an iO layer or a NiO / CiO layer may be used.
The exchange coupling layer 20 has a higher specific resistance than a metal layer such as a NiFe layer, and may be MnZn ferrite.
【００１５】このようにして作製したヘッドを、媒体と
してＣｏＣｒＴａ垂直磁化膜／ＮｉＦｅ膜の垂直２層媒
体を用い、主磁極型の垂直時期ヘッドで記録を行い、ト
ラック幅１μm あたりの再生特性を出力（μＶ／μm ）
及びＤ５０密度（出力が孤立出力の１／２となる密度）
の両点から評価した。評価結果を表１に示す。The head thus manufactured was used as a medium for a perpendicular two-layered medium of CoCrTa perpendicular magnetization film / NiFe film and recording was performed by a main magnetic pole type perpendicular timing head to output reproduction characteristics per track width of 1 μm. (ΜV / μm)
And D50 density (density at which the output is 1/2 of the isolated output)
It was evaluated from both points. Table 1 shows the evaluation results.
【００１６】（実施例２）図２の断面図を用いて第２番
目の実施例について説明する。(Second Embodiment) A second embodiment will be described with reference to the sectional view of FIG.
【００１７】アルミナチタン酸カーバイド（ＡｌＴｉ
Ｃ）基板上に軟磁性層１としてＣｏＺｒＭｏ層を３μm
形成し、非磁性体層９としてアルミナ層を形成してパタ
ーンニングを行った。その後、ギャップ層２をアルミナ
で０．１５μm 形成し、その上に感磁部１０を形成し
た。これらを形成後感磁部としてパターンニングを行
い、センス電流を流す電極を形成した。さらに感磁部上
には交換結合層２０としてＦｅＮ層を１００Ａ、ＮｉＦ
ｅ層を３μm 形成し、パターンニングを行った。Alumina titanic acid carbide (AlTi
C) CoZrMo layer of 3 μm as the soft magnetic layer 1 on the substrate
Then, an alumina layer was formed as the nonmagnetic layer 9 and patterned. After that, the gap layer 2 was formed of alumina to a thickness of 0.15 μm, and the magnetic sensitive portion 10 was formed thereon. After forming these, patterning was performed as a magnetically sensitive portion to form an electrode for passing a sense current. Further, an FeN layer of 100 A and NiF is formed as an exchange coupling layer 20 on the magnetic sensing portion.
An e layer having a thickness of 3 μm was formed and patterned.
【００１８】このようにして作製したヘッドを、実施例
１と同様の媒体を用いて再生特性を調べた。結果を表１
に示す。The reproducing characteristics of the head thus manufactured were examined using the same medium as in Example 1. The results are shown in Table 1.
Shown in
【００１９】（比較例１）実施例１と同様のリング型ヘ
ッドにおいて、ヨーク層が図３で示したように軟磁性層
４とヨーク３とに分離した従来ヘッドを試作した。ヨー
ク構造以外は、感磁部の層構成及び諸元は同じとした。(Comparative Example 1) In the ring type head similar to that of Example 1, a conventional head in which the yoke layer was separated into the soft magnetic layer 4 and the yoke 3 as shown in FIG. Except for the yoke structure, the layer structure and specifications of the magnetic sensing section were the same.
【００２０】このようにして作製したヘッドを、実施例
１と同様の媒体を用いて再生特性を調べた。結果を表１
に示す。The reproducing characteristics of the head thus manufactured were examined using the same medium as in Example 1. The results are shown in Table 1.
Shown in
【００２１】[0021]
【表１】 [Table 1]
【００２２】以上より、トラック幅１μm あたりの再生
特性は、出力及びＤ５０密度とも、本発明の方が優れて
いることが認められた。From the above, it was confirmed that the present invention is superior in reproducing characteristics per 1 μm of track width in both output and D50 density.
【００２３】[0023]
【発明の効果】本発明の磁気抵抗効果ヘッドの構造によ
り、リング型ヘッドのヨーク部に適用された感磁部の磁
気抵抗による効率を低下させず、ヘッド出力を増大させ
ることが可能となった。According to the structure of the magnetoresistive head of the present invention, it is possible to increase the head output without lowering the efficiency due to the magnetic resistance of the magnetically sensitive portion applied to the yoke portion of the ring type head. .
【図１】本発明の実施例１に示したリング型の磁気ヘッ
ド断面図である。FIG. 1 is a sectional view of a ring type magnetic head shown in a first embodiment of the present invention.
【図２】本発明の実施例２に示したリング型の磁気ヘッ
ド断面図である。FIG. 2 is a sectional view of a ring-type magnetic head shown in a second embodiment of the present invention.
【図３】比較例１に示した従来のリング型の磁気ヘッド
の断面図である。FIG. 3 is a cross-sectional view of a conventional ring-type magnetic head shown in Comparative Example 1.
【図４】スピンバルブ効果を利用した従来のシールド型
磁気ヘッドの模式図である。FIG. 4 is a schematic diagram of a conventional shield type magnetic head utilizing the spin valve effect.
１ 軟磁性体 ２ 絶縁層 ３ ヨーク ４ 軟磁性層 ５ 反強磁性層 ６ 第１軟磁性層 ７ 非磁性層 ８ 第２軟磁性層 ９ 非磁性層 １０ 感磁部 １５ ヨークとなる軟磁性層 ２０ 交換結合層 ３０ シールド DESCRIPTION OF SYMBOLS 1 Soft magnetic material 2 Insulating layer 3 Yoke 4 Soft magnetic layer 5 Antiferromagnetic layer 6 1st soft magnetic layer 7 Nonmagnetic layer 8 2nd soft magnetic layer 9 Nonmagnetic layer 10 Magnetically sensitive part 15 Soft magnetic layer used as a yoke 20 Exchange coupling layer 30 Shield
Claims (2)
／第１軟磁性層／非磁性層／第２軟磁性層の構造よりな
り、記録媒体に対抗する側にギャップを有するリング型
磁気ヘッドにおいて、少なくとも前記感磁部上に磁気交
換結合層を有し、さらに前記磁気交換結合層上に軟強磁
性層を有することを特徴とする磁気抵抗効果ヘッド。1. A magnetic sensing part which is a part of a magnetic circuit has an antiferromagnetic layer / first soft magnetic layer / nonmagnetic layer / second soft magnetic layer structure, and a gap is provided on the side facing a recording medium. A magnetoresistive head having a ring-type magnetic head having a magnetic exchange coupling layer at least on the magnetic sensing portion, and further having a soft ferromagnetic layer on the magnetic exchange coupling layer.
抗が磁気感部の比抵抗より大きいことを特徴とする請求
項１記載の磁気抵抗効果ヘッド。2. The magnetoresistive head according to claim 1, wherein the specific resistance of the magnetic exchange coupling layer in contact with the magnetic sensitive section is larger than the specific resistance of the magnetic sensitive section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27382194A JP2755186B2 (en) | 1994-11-08 | 1994-11-08 | Magnetoresistive head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27382194A JP2755186B2 (en) | 1994-11-08 | 1994-11-08 | Magnetoresistive head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08138214A true JPH08138214A (en) | 1996-05-31 |
| JP2755186B2 JP2755186B2 (en) | 1998-05-20 |
Family
ID=17533034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27382194A Expired - Fee Related JP2755186B2 (en) | 1994-11-08 | 1994-11-08 | Magnetoresistive head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2755186B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100378554B1 (en) * | 1999-11-09 | 2003-03-31 | 마쯔시다덴기산교 가부시키가이샤 | Magnetic head |
-
1994
- 1994-11-08 JP JP27382194A patent/JP2755186B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100378554B1 (en) * | 1999-11-09 | 2003-03-31 | 마쯔시다덴기산교 가부시키가이샤 | Magnetic head |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2755186B2 (en) | 1998-05-20 |
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