JPH0813137A - Graphite crucible for aluminum vapor deposition - Google Patents
Graphite crucible for aluminum vapor depositionInfo
- Publication number
- JPH0813137A JPH0813137A JP14420794A JP14420794A JPH0813137A JP H0813137 A JPH0813137 A JP H0813137A JP 14420794 A JP14420794 A JP 14420794A JP 14420794 A JP14420794 A JP 14420794A JP H0813137 A JPH0813137 A JP H0813137A
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- heat generating
- crucible
- graphite
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 46
- 239000010439 graphite Substances 0.000 title claims abstract description 46
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 15
- 229910052782 aluminium Inorganic materials 0.000 title claims description 15
- 230000002093 peripheral effect Effects 0.000 claims abstract description 3
- 230000008020 evaporation Effects 0.000 abstract description 2
- 238000001704 evaporation Methods 0.000 abstract description 2
- 229910021383 artificial graphite Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000007770 graphite material Substances 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はアルミニウム蒸着用黒鉛
るつぼ（以下黒鉛るつぼとする）の改良に関する。FIELD OF THE INVENTION The present invention relates to an improvement of a graphite crucible for vapor deposition of aluminum (hereinafter referred to as a graphite crucible).
【０００２】[0002]
【従来の技術】アルミニウムの蒸着は、アルミニウムの
インゴットを黒鉛るつぼの中に入れ、これを真空蒸着装
置に収納し、１０-2〜１０-5torrに減圧すると共に、誘
導加熱などの方法で加熱してアルミニウムを溶融し、１
４００〜１５００℃に保持して、発生するアルミニウム
の蒸気を装置の上部を走行するポリエステルなどのフィ
ルムに蒸着させる方法が多用されている。2. Description of the Related Art Aluminum vapor deposition is carried out by placing an aluminum ingot in a graphite crucible, storing it in a vacuum vapor deposition apparatus, reducing the pressure to 10 -2 to 10 -5 torr, and heating it by induction heating. To melt aluminum,
A method in which the temperature is kept at 400 to 1500 ° C. and vapor of aluminum generated is vapor-deposited on a film such as polyester running on the upper part of the apparatus is often used.
【０００３】上記のようなものに使用される従来の黒鉛
るつぼは、人造黒鉛材を図３及び図４に示すような形状
に機械加工したものが一般に知られている。なお図３及
び図４において１は黒鉛るつぼ、２は発熱部となる部分
及び３は誘導コイルである。As a conventional graphite crucible used for the above-mentioned one, it is generally known that an artificial graphite material is machined into a shape as shown in FIGS. 3 and 4. In FIGS. 3 and 4, 1 is a graphite crucible, 2 is a portion to be a heat generating portion, and 3 is an induction coil.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら図３に示
す黒鉛るつぼ１は、底部が肉厚のため熱容量が大きくな
り発熱効率が悪く、また図４に示す黒鉛るつぼ１は、有
効発熱部２が短く発熱効率が低下する。このため図３及
び図４に示す黒鉛るつぼ１はいずれも底部の温度が低く
なり、溶融アルミニウムの撹拌が不十分で、表面にカー
バイドからなる膜が発生し易くなる。この膜がアルミニ
ウムの蒸発を妨げ、黒鉛るつぼの寿命低下を招く原因と
なっている。However, in the graphite crucible 1 shown in FIG. 3, the heat capacity is large because the bottom portion is thick and the heat generation efficiency is poor, and in the graphite crucible 1 shown in FIG. 4, the effective heating portion 2 is short. Heat generation efficiency decreases. Therefore, the graphite crucible 1 shown in FIGS. 3 and 4 has a low bottom temperature, the molten aluminum is not sufficiently stirred, and a film made of carbide is easily generated on the surface. This film hinders the evaporation of aluminum and causes the life of the graphite crucible to be shortened.
【０００５】本発明は、上記の問題を解決し、寿命の長
い黒鉛るつぼを提供するものである。The present invention solves the above problems and provides a graphite crucible having a long life.
【０００６】[0006]
【課題を解決するための手段】本発明は、外周部を発熱
部とした黒鉛るつぼにおいて、発熱部が黒鉛るつぼの上
端部から下端部まで位置し、かつ黒鉛るつぼの底部の外
壁で、発熱部の下端部の内側に円形状の溝を形成してな
る黒鉛るつぼに関する。According to the present invention, in a graphite crucible having an outer peripheral portion as a heat generating portion, the heat generating portion is located from an upper end portion to a lower end portion of the graphite crucible, and the heat generating portion is an outer wall of a bottom portion of the graphite crucible. The present invention relates to a graphite crucible in which a circular groove is formed inside the lower end of the graphite crucible.
【０００７】本発明において黒鉛るつぼの底部に形成す
る溝の形状は、黒鉛るつぼの亀裂の発生防止及び強度の
点で隅の丸みが１〜５mmの範囲であることが好ましい。
なお隅の丸みとは、ＪＩＳ Ｂ０７０１に規定する切削
加工によって作る機械部品の隅の丸みの値を示したもの
である。In the present invention, the groove formed at the bottom of the graphite crucible preferably has a rounded corner in the range of 1 to 5 mm from the viewpoint of preventing cracking of the graphite crucible and strength.
The roundness of the corner indicates the value of the roundness of the corner of the machine part produced by the cutting process specified in JIS B0701.
【０００８】本発明になる黒鉛るつぼの発熱部は、該黒
鉛るつぼの上端部から下端部まで位置し、円形状の溝は
黒鉛るつぼの底部の外壁で、発熱部下端部の内側に形成
することが必要とされ、この条件から外れると本発明の
目的を達成することができない。黒鉛るつぼの材質につ
いては公知のものが用いられ特に制限はないが、例えば
人造黒鉛を用いることが好ましい。The heat generating part of the graphite crucible according to the present invention is located from the upper end to the lower end of the graphite crucible, and the circular groove is formed on the outer wall of the bottom of the graphite crucible and inside the lower end of the heat generating part. However, if this condition is not satisfied, the object of the present invention cannot be achieved. A known material is used as the material of the graphite crucible and there is no particular limitation, but for example, artificial graphite is preferably used.
【０００９】[0009]
【実施例】以下本発明の実施例を説明する。 実施例１ 人造黒鉛材（日立化成工業製、商品名ＰＸ−１１ＰＹ）
を図１に示すように肉厚が１０mm、外径が１１０mm、内
径が９０mm、高さが１００mm、内側の底部までの深さが
９０mm及び底部の内側に隅の丸みｒ1が２０mmの寸法に
なるように機械加工した後、底部の外壁で、発熱部２下
端部の内側に隅の丸みｒ2が３mmの円形状の溝４を形成
した黒鉛るつぼ１を得た。なお図２に溝Ａ部の拡大図を
示す。図２においてｔ1の寸法は４mm及びｔ2の寸法は３
０mmとした。EXAMPLES Examples of the present invention will be described below. Example 1 Artificial graphite material (manufactured by Hitachi Chemical Co., Ltd., trade name PX-11PY)
As shown in FIG. 1, the thickness is 10 mm, the outer diameter is 110 mm, the inner diameter is 90 mm, the height is 100 mm, the inner bottom depth is 90 mm, and the inner corner radius r 1 is 20 mm. After machining so as to obtain a graphite crucible 1 having a circular groove 4 having a roundness r 2 of 3 mm in the inside of the lower end of the heat generating portion 2 on the outer wall of the bottom portion. Note that FIG. 2 shows an enlarged view of the groove A portion. In FIG. 2, the dimension of t 1 is 4 mm and the dimension of t 2 is 3 mm.
It was set to 0 mm.
【００１０】比較例１ 実施例１と同様の人造黒鉛材を用い、図３に示すように
肉厚が１０mm、外径が１１０mm、内径が９０mm、高さが
１００mm、内側の底部までの深さが９０mm及び底部の内
側に隅の丸みｒ3が２０mmの寸法に機械加工した黒鉛る
つぼ１を得た。Comparative Example 1 Using the same artificial graphite material as in Example 1, as shown in FIG. 3, the wall thickness is 10 mm, the outer diameter is 110 mm, the inner diameter is 90 mm, the height is 100 mm, and the depth to the inner bottom is A graphite crucible 1 was machined to a size of 90 mm and a roundness r 3 of 20 mm inside the bottom.
【００１１】比較例２ 実施例１と同様の人造黒鉛材を用い、図４に示すように
肉厚が１０mm、外径が１１０mm、内径が９０mm、高さが
１００mm、内側の底部までの深さが９０mm、底部の内側
に隅の丸みｒ4が２０mm及び底部の外側に隅の丸みｒ5が
３０mmの寸法に機械加工した黒鉛るつぼ１を得た。Comparative Example 2 Using the same artificial graphite material as in Example 1, as shown in FIG. 4, the wall thickness is 10 mm, the outer diameter is 110 mm, the inner diameter is 90 mm, the height is 100 mm, and the depth to the inner bottom is Is 90 mm, the corner radius r 4 is 20 mm inside the bottom, and the corner radius r 5 is 30 mm outside the bottom to obtain a graphite crucible 1.
【００１２】次に実施例１、比較例１及び比較例２で得
た黒鉛るつぼにアルミニウムのインゴットを入れ真空蒸
着装置に収納し、１０-3torrに減圧し、高周波誘導で１
４５０℃で２時間加熱してアルミニウムを蒸発させる実
験を繰り返し行い、合計で２４時間（１２回）実験を行
った後外観を観察した。その結果を表１に示す。なお実
験は各々１０個の黒鉛るつぼを用いて行った。Next, the graphite crucibles obtained in Example 1, Comparative Example 1 and Comparative Example 2 were charged with aluminum ingots and housed in a vacuum vapor deposition apparatus, the pressure was reduced to 10 −3 torr, and high frequency induction was applied to 1
The experiment of heating aluminum at 450 ° C. for 2 hours to evaporate aluminum was repeated, and the appearance was observed after performing the experiment for a total of 24 hours (12 times). Table 1 shows the results. The experiment was conducted using 10 graphite crucibles each.
【００１３】[0013]
【表１】 [Table 1]
【００１４】表１に示されるように実施例１の本発明に
なる黒鉛るつぼは、使用電力は１０kWと少なく、アルミ
ニウム蒸着量が多く、カーバイドの膜張りは認められ
ず、また割れもなく、比較例１及び比較例２の従来の黒
鉛るつぼに比較して優れることが示される。As shown in Table 1, the graphite crucible according to the present invention of Example 1 has a low power consumption of 10 kW, a large amount of aluminum vapor deposition, no film formation of carbide, and no cracking. It is shown to be superior to the conventional graphite crucibles of Example 1 and Comparative Example 2.
【００１５】[0015]
【発明の効果】本発明になる黒鉛るつぼは、溶融して用
いるアルミニウムの表面にカーバイドの膜が発生しない
ためアルミニウムを多く蒸着することができ、しかも割
れが生じないため寿命が長いという効果を奏し、工業的
に極めて好適な黒鉛るつぼである。EFFECTS OF THE INVENTION The graphite crucible according to the present invention has the effect that a large amount of aluminum can be vapor-deposited because a carbide film is not formed on the surface of aluminum to be melted, and that cracking does not occur and the life is long. The graphite crucible is industrially very suitable.
【図１】本発明の実施例になる黒鉛るつぼの断面図であ
る。FIG. 1 is a cross-sectional view of a graphite crucible according to an embodiment of the present invention.
【図２】図１のＡ部拡大図である。FIG. 2 is an enlarged view of a portion A in FIG.
【図３】従来の黒鉛るつぼの断面図である。FIG. 3 is a cross-sectional view of a conventional graphite crucible.
【図４】従来の黒鉛るつぼの断面図である。FIG. 4 is a cross-sectional view of a conventional graphite crucible.
１ 黒鉛るつぼ ２ 発熱部 ３ 誘導コイル ４ 溝 1 Graphite crucible 2 Heating part 3 Induction coil 4 Groove
Claims (2)
用黒鉛るつぼ（以下黒鉛るつぼとする）において、発熱
部が黒鉛るつぼの上端部から下端部まで位置し、かつ黒
鉛るつぼの底部の外壁で、発熱部下端部の内側に円形状
の溝を形成してなる黒鉛るつぼ。1. A graphite crucible for vapor deposition of aluminum having an outer peripheral portion as a heat generating portion (hereinafter referred to as a graphite crucible), wherein the heat generating portion is located from an upper end portion to a lower end portion of the graphite crucible, and an outer wall of a bottom portion of the graphite crucible, Graphite crucible with a circular groove formed inside the lower end of the heat generating part.
記載の黒鉛るつぼ。2. The roundness of the corner of the groove is 1 to 5 mm.
Graphite crucible described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14420794A JPH0813137A (en) | 1994-06-27 | 1994-06-27 | Graphite crucible for aluminum vapor deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14420794A JPH0813137A (en) | 1994-06-27 | 1994-06-27 | Graphite crucible for aluminum vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0813137A true JPH0813137A (en) | 1996-01-16 |
Family
ID=15356724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14420794A Pending JPH0813137A (en) | 1994-06-27 | 1994-06-27 | Graphite crucible for aluminum vapor deposition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0813137A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1683886A3 (en) * | 2005-01-21 | 2007-05-02 | Mitsubishi Heavy Industries, Ltd. | Vacuum vapor deposition apparatus |
-
1994
- 1994-06-27 JP JP14420794A patent/JPH0813137A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1683886A3 (en) * | 2005-01-21 | 2007-05-02 | Mitsubishi Heavy Industries, Ltd. | Vacuum vapor deposition apparatus |
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