JPH0812462A - Electroconductive ceramic, its production and use - Google Patents
Electroconductive ceramic, its production and useInfo
- Publication number
- JPH0812462A JPH0812462A JP6140285A JP14028594A JPH0812462A JP H0812462 A JPH0812462 A JP H0812462A JP 6140285 A JP6140285 A JP 6140285A JP 14028594 A JP14028594 A JP 14028594A JP H0812462 A JPH0812462 A JP H0812462A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- silicon carbide
- nitrogen
- porosity
- electroconductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、導電性セラミック特に
ディーゼルエンジン等から排出される可燃性微粒子（パ
ティキュレート）を捕集し焼却を行うフィルタとして好
適な導電性セラミックとその製造方法及び用途に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive ceramic, particularly a conductive ceramic suitable as a filter for collecting and incinerating combustible fine particles (particulates) discharged from a diesel engine or the like, a method for producing the same and a use thereof. .
【０００２】[0002]
【従来の技術】従来、パティキュレートを補集するフィ
ルタとしては、一般にコーディエライト等の低熱膨張性
セラミックが使用されている。このようなフィルタは、
一定量の濾過を行うと圧力損失が増大し捕集効率が低下
するので補集したパティキュレートを定期的に焼却しフ
ィルタを再生している。2. Description of the Related Art Conventionally, a low thermal expansion ceramic such as cordierite is generally used as a filter for collecting particulates. Such filters are
Since a certain amount of filtration increases the pressure loss and reduces the collection efficiency, the collected particulates are incinerated periodically to regenerate the filter.
【０００３】フィルタの再生方法としては、バーナの燃
焼ガスをフィルタに噴射しその燃焼熱でパティキュレー
トを焼却する方法、フィルタにニクロム線ヒータあるい
は発熱金属層を組み合わせて通電加熱しパティキュレー
トを焼却する方法がある。しかしながら、これらの方法
はいずれも外部からフィルタを直接加熱するものである
ため、捕集されたパティキュレートの燃焼に伴って局所
的な発熱と大きな温度勾配を生じ、フィルタが熱応力割
れや溶損割れを起こした。また、外部加熱装置等の特殊
な装置を取り付ける必要があったのでコンパクト化が困
難であった。As a method of regenerating the filter, a combustion gas of a burner is injected into the filter and the particulate heat is incinerated, or a nichrome wire heater or a heat-generating metal layer is combined with the filter to electrically heat the particulate to incinerate the particulate. There is a way. However, since all of these methods directly heat the filter from the outside, local heat generation and a large temperature gradient are generated due to the combustion of the collected particulates, and the filter is subject to thermal stress cracking and melting loss. It caused a crack. Further, it is difficult to make the device compact because it is necessary to attach a special device such as an external heating device.
【０００４】そこで、近年、コンパクトで現存の装置を
大きく変更することなく捕集されたパティキュレートを
効率的に焼却する方法として、フィルタそのものを発熱
体とする方法が検討されている。この方法で使用される
フィルタ材質は、炭化珪素、珪化モリブデン、炭化チタ
ニウムあるいはランタンクロマイトを主成分とした導電
性セラミックである（特開昭５８−１１９３１７号公
報、特開平２−４２１１２号公報等）。Therefore, in recent years, as a method for efficiently incinerating the collected particulates without largely changing the existing equipment, a method using a filter itself as a heating element has been studied. The filter material used in this method is a conductive ceramic containing silicon carbide, molybdenum silicide, titanium carbide or lanthanum chromite as a main component (Japanese Patent Laid-Open No. 58-119317, Japanese Patent Laid-Open No. 42112/1990, etc.). .
【０００５】しかしながら、これらの導電性セラミック
であってもその耐熱性が小さいので熱応力割れが発生す
る。しかも、非酸化物系のセラミックでは気孔率を高く
してパティキュレートの補集効率を高めようとすると耐
酸化性が低下し容易に導電性が失われる問題があった。However, even these conductive ceramics have low heat resistance, so that thermal stress cracking occurs. Moreover, in non-oxide ceramics, there is a problem that if the porosity is increased to increase the particulate collection efficiency, the oxidation resistance is lowered and the conductivity is easily lost.
【０００６】[0006]
【発明が解決しようとする課題】本発明の目的は、以上
の問題を解消し、耐熱性と耐酸化性を向上させ、セラミ
ックフィルタ材質として好適な導電性セラミックとその
製造方法及びその導電性セラミックで構成されたセラミ
ックフィルタを提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to solve the above problems, improve heat resistance and oxidation resistance, and use a conductive ceramic suitable as a ceramic filter material, a method for producing the same, and the conductive ceramic. It is to provide a ceramic filter composed of.
【０００７】[0007]
【課題を解決するための手段】すなわち、本発明は、窒
素及び／又は窒化物の合計を窒素分として１〜５重量％
含み、室温比抵抗１０Ωｃｍ以下である多孔質β型炭化
珪素焼結体からなることを特徴とする導電性セラミッ
ク、炭化珪素粉末、水、解膠剤、有機バインダー及び有
機系発泡剤を混合して発泡スラリーを調製し、それを吸
水性のある型で流し込み成形してから乾燥・脱脂し、窒
素ガス圧５ｋｇ／ｃｍ2 以上、温度２０００℃以上で焼
成することを特徴とする導電性セラミックの製造方法、
及び気孔径５〜３００μｍ、気孔率３０〜９０％である
上記導電性セラミックで構成されてなることを特徴とす
るセラミックフィルタである。That is, according to the present invention, the total of nitrogen and / or nitride is 1 to 5% by weight as a nitrogen content.
A conductive ceramic comprising a porous β-type silicon carbide sintered body having a room temperature specific resistance of 10 Ωcm or less, silicon carbide powder, water, a deflocculant, an organic binder and an organic foaming agent. Production of a conductive ceramic characterized in that a foamed slurry is prepared, poured into a water absorbing mold, molded, dried and degreased, and fired at a nitrogen gas pressure of 5 kg / cm 2 or more and a temperature of 2000 ° C. or more. Method,
And a ceramic filter composed of the conductive ceramic having a pore diameter of 5 to 300 μm and a porosity of 30 to 90%.
【０００８】以下、更に詳しく本発明について説明す
る。The present invention will be described in more detail below.
【０００９】炭化珪素焼結体は、一般にα型又はβ型の
炭化珪素粉末をＢ−Ｃ系焼結助剤を用い常圧焼結又はホ
ットプレス焼結によって製造されている。この場合、β
型炭化珪素粉末を２０００℃以上の高温で焼成して炭化
珪素焼結体を製造すると高温安定型のα型炭化珪素とな
るので、従来より研削材、耐火材、セラミックフイルタ
等の用途に供されているのは主としてα型炭化珪素焼結
体であり、β型炭化珪素焼結体については殆どこれらの
用途に供されることはなかった。The silicon carbide sintered body is generally produced by pressureless sintering or hot press sintering of α-type or β-type silicon carbide powder using a BC sintering aid. In this case β
When a silicon carbide powder is fired at a high temperature of 2000 ° C or higher to produce a silicon carbide sintered body, it becomes a high-temperature stable α-type silicon carbide. Therefore, it has been conventionally used for abrasives, refractory materials, ceramic filters, etc. This is mainly the α-type silicon carbide sintered body, and the β-type silicon carbide sintered body has hardly been used for these applications.
【００１０】しかしながら、β型炭化珪素焼結体にはα
型炭化珪素焼結体にはみられない導電性に優れるという
特性がある。この特性は、特にセラミックフイルタにと
って好都合なものであるが、添加された焼結助剤の影響
を強く受けてその導電性が打ち消されてしまい室温比抵
抗１０Ωｃｍ以下の導電性を示さなくなる。However, the β-type silicon carbide sintered body has α
It has a characteristic that it is excellent in conductivity, which is not found in the type silicon carbide sintered body. This characteristic is particularly advantageous for a ceramic filter, but its conductivity is canceled by being strongly influenced by the added sintering aid, and the room temperature resistivity does not exhibit conductivity of 10 Ωcm or less.
【００１１】このような現象をなくするには、Ｂ−Ｃ系
焼結助剤等の導電性を低下させる物質を添加しないで炭
化珪素粉末を焼成すればよいが、炭化珪素粉末は非常に
難焼結物質であるので得られた焼結体は著しく多孔質と
なる。この多孔質もセラミックフイルタにとって好都合
な条件であるが耐酸化性が著しく低下し、セラミックフ
イルタ等の用途には不適当となる。In order to eliminate such a phenomenon, the silicon carbide powder may be fired without adding a substance that lowers the conductivity such as a B—C type sintering aid, but the silicon carbide powder is very difficult. Since it is a sintered substance, the obtained sintered body becomes remarkably porous. This porosity is also a favorable condition for a ceramic filter, but its oxidation resistance is markedly reduced, making it unsuitable for applications such as a ceramic filter.
【００１２】本発明の導電性セラミックは、多孔質β型
炭化珪素焼結体が有する導電性を著しく損なわせること
なく室温比抵抗１０Ωｃｍ以下を維持し、窒素及び／又
は窒化物の合計を窒素分として１〜５重量％含ませるこ
とによって耐酸化性を改善させたものである。The conductive ceramic of the present invention maintains a room temperature specific resistance of 10 Ωcm or less without significantly impairing the conductivity of the porous β-type silicon carbide sintered body, and makes the total nitrogen content and / or nitride content be nitrogen content. The content of 1 to 5% by weight improves the oxidation resistance.
【００１３】本発明において、β型炭化珪素焼結体のβ
型結晶相の割合は１００％である必要はなく６０％もあ
れば十分である。残りはα型結晶相の多形２Ｈ、４Ｈ、
６Ｈ等である。In the present invention, the β of the β-type silicon carbide sintered body is
The proportion of the type crystal phase does not have to be 100%, and 60% is sufficient. The rest are polymorphs of α type crystal phase 2H, 4H,
6H or the like.
【００１４】本発明において、窒素及び／又は窒化物の
合計を窒素分として１〜５重量％の範囲に限定したの
は、１重量％未満では耐酸化性の改善効果が十分でなく
なり、また５重量％をこえると窒化珪素等の絶縁相とな
る化合物が多くなって導電性が低下することによる。こ
のような窒素及び／又は窒化物は、粒界相又は粒内に固
溶あるいは単独、更には窒化珪素、炭窒化珪素化物等の
化合物として存在する。In the present invention, the total amount of nitrogen and / or nitride is limited to the range of 1 to 5% by weight as the nitrogen content. If the amount is less than 1% by weight, the effect of improving the oxidation resistance is not sufficient, and 5 This is because if the content exceeds 50% by weight, the amount of the compound that becomes an insulating phase such as silicon nitride increases and the conductivity decreases. Such nitrogen and / or nitride exists as a solid solution or alone in the grain boundary phase or in the grains, or as a compound such as silicon nitride or silicon carbonitride.
【００１５】本発明の導電性セラミックの導電性の程度
としては、室温比抵抗１０Ωｃｍ以下であり、これをこ
えると例えばセラミックフイルタ等の発熱体としての機
能が低下する。また、多孔質の程度については、気孔率
３０〜９０％程度であることが望ましい。The conductive ceramic of the present invention has a room temperature specific resistance of 10 Ωcm or less, and beyond this, the function as a heating element such as a ceramic filter deteriorates. The degree of porosity is preferably about 30 to 90%.
【００１６】本発明の導電性セラミックの用途として
は、セラミックフィルタ、ダクトヒータ、大型ドライヤ
ーの熱源に使用される熱風発生機用ヒータ等種々ある。
これらの用途の中で、多孔質の程度をセラミックフィル
タ機能として最適な気孔径５〜３００μｍ、気孔率３０
〜９０％にしたのが請求項３の発明である。The conductive ceramic of the present invention has various uses such as a ceramic filter, a duct heater, and a heater for a hot air generator used as a heat source for a large dryer.
Among these applications, the degree of porosity is optimal as a ceramic filter function, with a pore size of 5 to 300 μm and a porosity of 30.
According to the invention of claim 3, the content is set to 90%.
【００１７】すなわち、セラミックフィルタの気孔径が
５μｍ未満では目詰まりが顕著になり短時間で圧力損失
が大きくなる。一方、気孔径が３００μｍをこえるとパ
ティキュレートの捕集効率が低下しフィルター機能を果
たさなくなる。また、気孔率が３０％よりも小さいと圧
力損失が大きくなり、９０％をこえると機械的強度が低
下する。That is, when the pore diameter of the ceramic filter is less than 5 μm, clogging becomes remarkable and pressure loss increases in a short time. On the other hand, if the pore diameter exceeds 300 μm, the particulate collection efficiency decreases and the filter function is not fulfilled. If the porosity is less than 30%, the pressure loss increases, and if it exceeds 90%, the mechanical strength decreases.
【００１８】次に、本発明の導電性セラミックの製造方
法について説明すると、炭化珪素粉末原料としては、α
型、β型のいずれをも使用することができ、純度９０％
以上、比表面積５ｍ2 ／ｇ以上であることが好ましい。Next, the method for producing the conductive ceramic of the present invention will be described. As the silicon carbide powder raw material, α
Both type and β type can be used with a purity of 90%
As described above, the specific surface area is preferably 5 m 2 / g or more.
【００１９】スラリー調合の一例を示せば、炭化珪素粉
末１００部（部は重量部。以下同じ）に対し、水１５〜
３０部、解膠剤０．１〜５部、有機バインダー１〜５部
及び有機系発泡剤０．１〜３部である。As an example of the slurry preparation, 15 parts of water to 100 parts of silicon carbide powder (parts are parts by weight; the same applies hereinafter).
30 parts, peptizer 0.1 to 5 parts, organic binder 1 to 5 parts, and organic foaming agent 0.1 to 3 parts.
【００２０】解膠剤としては、ポリカルボン酸アンモニ
ウム、ポリアクリル酸アンモニウム、アクリル酸エステ
ル共重合体、トリメチルアミン等、有機バインダーとし
ては、アクリル系ポリマー、メチルセルロース、ポリビ
ニルアルコール、ポリオレフィン等のポリマー又はオリ
ゴマー等、また有機系発泡剤としては、ラウリル酸塩、
ステアリン酸塩、カプリン酸塩、パルミチン酸塩等のア
ルキル酸塩系発泡剤が使用される。As the deflocculant, ammonium polycarboxylate, ammonium polyacrylate, acrylic acid ester copolymer, trimethylamine, etc., and as the organic binder, acrylic polymer, methyl cellulose, polyvinyl alcohol, polyolefin or other polymer or oligomer, etc. As the organic foaming agent, lauryl acid salt,
Alkylate-based foaming agents such as stearate, caprate and palmitate are used.
【００２１】得られたスラリーは石膏型等の吸水性のあ
る型材に流し込み成形した後それを乾燥・脱脂し焼成す
ることによって本発明の導電性セラミックを製造するこ
とができる。The obtained slurry can be cast into a water-absorptive mold material such as a gypsum mold, and then molded, dried, degreased and fired to produce the conductive ceramic of the present invention.
【００２２】乾燥は、温度１００℃以下の温風乾燥、遠
赤外線乾燥等で行われ、また脱脂は空気等の雰囲気下、
温度４００〜５００℃程度で３０分以上で行われる。Drying is performed by warm air drying at a temperature of 100 ° C. or lower, far infrared ray drying, etc. Degreasing is performed in an atmosphere such as air.
It is carried out at a temperature of about 400 to 500 ° C. for 30 minutes or more.
【００２３】焼成は、成形体を５ｋｇ／ｃｍ2 以上の窒
素加圧下、温度２０００℃以上で行われる。窒素加圧が
５ｋｇ／ｃｍ2 未満ではβ型炭化珪素の安定化と窒素分
を１％以上含ませることが困難となる。窒素加圧の上限
については特に制限はないが耐圧容器等の設備の面から
３０ｋｇ／ｃｍ2 が望ましい。また、焼成温度が２００
０℃未満では炭化珪素粉末原料がα型炭化珪素である場
合、β型炭化珪素に転移させることが難しくなり室温比
抵抗１０Ωｃｍ以下の焼結体を製造することが困難とな
る。焼成温度の上限については特に制限はないが耐熱容
器等の設備の面から２３００℃が望ましい。The firing is carried out at a temperature of 2000 ° C. or higher under a nitrogen pressure of 5 kg / cm 2 or higher for the molded body. If the nitrogen pressure is less than 5 kg / cm 2 , it becomes difficult to stabilize the β-type silicon carbide and to contain a nitrogen content of 1% or more. The upper limit of nitrogen pressurization is not particularly limited, but is preferably 30 kg / cm 2 from the viewpoint of equipment such as a pressure vessel. Also, the firing temperature is 200
When the temperature is lower than 0 ° C., when the silicon carbide powder raw material is α-type silicon carbide, it is difficult to transfer to β-type silicon carbide, and it becomes difficult to manufacture a sintered body having a room temperature specific resistance of 10 Ωcm or less. Although the upper limit of the firing temperature is not particularly limited, it is preferably 2300 ° C. from the viewpoint of equipment such as a heat resistant container.
【００２４】[0024]
【実施例】次に実施例と比較例を挙げてさらに具体的に
本発明を説明する。EXAMPLES Next, the present invention will be described more specifically by way of Examples and Comparative Examples.
【００２５】実施例１〜５ 比較例１〜４ 出発原料として平均粒径０．８μｍ、純度９６％のα型
又はβ型炭化珪素粉末１００部、水２０部、解膠剤とし
てトリメチルアミン２部、有機バインダーとしてメチル
セルロースを２部を配合し、ボールミルで３時間の湿式
混合を行った。得られたスラリーに有機系発泡剤として
ラウリル硫酸アンモニウム１部を添加し、発泡機で撹拌
して泥漿の体積を３倍に泡立てた。この発泡スラリーを
吸水性石膏型に流し込み、温度１００℃の温風乾燥機で
乾燥後、大気中、温度４５０℃×３時間の脱脂を行って
連通気孔を有する多孔質成形体を成形し、表１に示す窒
素加圧下と温度条件で焼成した。Examples 1 to 5 Comparative Examples 1 to 4 100 parts of α-type or β-type silicon carbide powder having an average particle size of 0.8 μm and a purity of 96% as a starting material, 20 parts of water, 2 parts of trimethylamine as a deflocculant, 2 parts of methyl cellulose was blended as an organic binder, and wet mixing was performed for 3 hours with a ball mill. To the obtained slurry, 1 part of ammonium lauryl sulfate as an organic foaming agent was added, and the mixture was stirred by a foaming machine to foam the volume of the slurry 3 times. The foamed slurry was poured into a water-absorbent gypsum mold, dried with a warm air dryer at a temperature of 100 ° C., and then degreased in the air at a temperature of 450 ° C. for 3 hours to form a porous molded body having continuous ventilation holes. Firing was performed under nitrogen pressure and temperature conditions shown in 1.
【００２６】得られたセラミックについて、以下の特性
を測定し表１〜２に示した。 （１）気孔率：アルキメデス法。 （２）連通気孔径：走査型電子顕微鏡観察により計測し
た。 （３）β型炭化珪素の割合（β化率）：Ｘ線回折を行い
以下により算出した。 β化率（％）＝１００／（１＋ａ＋ｂ） 但し、ａ＝４．５７Ｉａ／（１００−２．７２Ｉａ−
０．６６５Ｉｂ） ｂ＝２．５３Ｉｂ／（１００−２．７２Ｉａ−０．６６
５Ｉｂ） ここで、ＩａはＣｕＫα２θが３４．３°におけるピー
ク強度、Ｉｂは３４．９°におけるピーク強度であり、
ＣｕＫα２θ＝３６．５°におけるピーク強度を１００
とした場合の相対値である。The following characteristics of the obtained ceramic were measured and shown in Tables 1-2. (1) Porosity: Archimedes method. (2) Continuous vent hole diameter: Measured by scanning electron microscope observation. (3) Ratio of β-type silicon carbide (β conversion ratio): X-ray diffraction was performed and calculated as follows. β conversion rate (%) = 100 / (1 + a + b) where a = 4.57 Ia / (100-2.72 Ia−
0.665Ib) b = 2.53Ib / (100-2.72Ia-0.66
5Ib) Here, Ia is the peak intensity at 34.3 ° for CuKα2θ, and Ib is the peak intensity at 34.9 °,
The peak intensity at CuKα2θ = 36.5 ° is 100.
Is the relative value when.
【００２７】（４）窒素含有量：ＬＥＣＯ社製Ｏ／Ｎ同
時分析計で測定した。 （５）室温比抵抗：４端子法。 （６）耐酸化性：大気中、温度１０００℃×１００時間
処理後の比抵抗を測定した。 （７）発熱特性：５０ｍｍ×５０ｍｍ×厚み３０ｍｍの
試験片の両端に銀ペーストで電極を形成し、試料中央部
の温度が室温から６００℃までに昇温するのに必要な印
加電圧とその時の昇温時間を測定した。(4) Nitrogen content: Measured with an O / N simultaneous analyzer manufactured by LECO. (5) Room temperature resistivity: 4-terminal method. (6) Oxidation resistance: The specific resistance after the treatment at a temperature of 1000 ° C. for 100 hours in the atmosphere was measured. (7) Heat generation characteristics: An applied voltage required to form electrodes with silver paste on both ends of a test piece of 50 mm × 50 mm × thickness of 30 mm and raise the temperature in the center of the sample from room temperature to 600 ° C. The temperature rising time was measured.
【００２８】[0028]
【表１】 [Table 1]
【００２９】[0029]
【表２】 [Table 2]
【００３０】表１〜２から明らかなように、本発明の範
囲内にある導電性セラミックは、室温比抵抗１０Ωｃｍ
以下でしかも気孔率の高い状態で優れた耐酸化性を示
し、短時間、低電圧で昇温することが可能であり、セラ
ミックフィルタとして優れた特性を有する。As is apparent from Tables 1 and 2, the conductive ceramics within the scope of the present invention have a room temperature resistivity of 10 Ωcm.
It exhibits excellent oxidation resistance in the state below and has a high porosity, can raise the temperature at a low voltage for a short time, and has excellent characteristics as a ceramic filter.
【００３１】[0031]
【発明の効果】本発明の導電性セラミックとその製造方
法によれば、室温比抵抗１０Ωｃｍ以下でしかも耐酸化
性に優れた多孔質β型炭化珪素焼結体が提供される。本
発明の導電性セラミックは、暖房機器、乾燥機、焼成炉
等のセラミックヒータとして使用することができる。According to the conductive ceramic and the method for producing the same of the present invention, a porous β-type silicon carbide sintered body having a room temperature specific resistance of 10 Ωcm or less and excellent in oxidation resistance is provided. The conductive ceramic of the present invention can be used as a ceramic heater for heating equipment, dryers, firing furnaces, and the like.
【００３２】また、本発明のセラミックフイルタによれ
ば、捕集されたパティキュレートの燃焼に伴う破損が少
なくなり、外部加熱装置等の特殊な装置を取り付ける必
要もないのでコンパクト化が可能となる。Further, according to the ceramic filter of the present invention, the damage caused by the burning of the collected particulates is reduced, and it is not necessary to attach a special device such as an external heating device, so that it can be made compact.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 磯崎 啓 福岡県大牟田市新開町１ 電気化学工業株 式会社大牟田工場内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Kei Isozaki 1 Shinkai-cho, Omuta-shi, Fukuoka Electric Chemical Industry Co., Ltd. Omuta Factory
Claims (3)
して１〜５重量％含み、室温比抵抗１０Ωｃｍ以下であ
る多孔質β型炭化珪素焼結体からなることを特徴とする
導電性セラミック。1. A conductive ceramic comprising a porous β-type silicon carbide sintered body containing a total of nitrogen and / or nitride as a nitrogen content of 1 to 5% by weight and having a room temperature specific resistance of 10 Ωcm or less. .
ダー及び有機系発泡剤を混合して発泡スラリーを調製
し、それを吸水性のある型で流し込み成形してから乾燥
・脱脂し、窒素ガス圧５ｋｇ／ｃｍ2 以上、温度２００
０℃以上で焼成することを特徴とする導電性セラミック
の製造方法。2. A silicon carbide powder, water, a peptizer, an organic binder and an organic foaming agent are mixed to prepare a foaming slurry, which is cast in a water-absorptive mold, dried and degreased, Nitrogen gas pressure 5kg / cm 2 or more, temperature 200
A method for producing a conductive ceramic, which comprises firing at 0 ° C. or higher.
０％である請求項１記載の導電性セラミックで構成され
てなることを特徴とするセラミックフィルタ。3. Porosity 5 to 300 μm, porosity 30 to 9
It is 0% and it is comprised with the electroconductive ceramic of Claim 1, The ceramic filter characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6140285A JPH0812462A (en) | 1994-06-22 | 1994-06-22 | Electroconductive ceramic, its production and use |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6140285A JPH0812462A (en) | 1994-06-22 | 1994-06-22 | Electroconductive ceramic, its production and use |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0812462A true JPH0812462A (en) | 1996-01-16 |
Family
ID=15265232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6140285A Pending JPH0812462A (en) | 1994-06-22 | 1994-06-22 | Electroconductive ceramic, its production and use |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0812462A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1364930A1 (en) | 2001-02-02 | 2003-11-26 | Ngk Insulators, Ltd. | Honeycomb structure and method for preparation thereof |
| WO2005063652A1 (en) * | 2003-12-26 | 2005-07-14 | Bridgestone Corporation | Method for producing silicon carbide sintered body for heater |
| US7347966B2 (en) | 2002-02-27 | 2008-03-25 | Ngk Spark Plug Co., Ltd. | Method for manufacturing ceramic heater |
| JP2010105862A (en) * | 2008-10-30 | 2010-05-13 | Ngk Insulators Ltd | Silicon carbide-based porous article and method for producing the same |
| JP2016183081A (en) * | 2015-03-26 | 2016-10-20 | 東京窯業株式会社 | Manufacturing method of conductive silicon carbide sintered body and conductive silicon carbide sintered body |
| JP2019172495A (en) * | 2018-03-28 | 2019-10-10 | 東京窯業株式会社 | Manufacturing method of conductive carbonized silicon sintered body and conductive carbonized silicon sintered body |
-
1994
- 1994-06-22 JP JP6140285A patent/JPH0812462A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1364930A1 (en) | 2001-02-02 | 2003-11-26 | Ngk Insulators, Ltd. | Honeycomb structure and method for preparation thereof |
| US7347966B2 (en) | 2002-02-27 | 2008-03-25 | Ngk Spark Plug Co., Ltd. | Method for manufacturing ceramic heater |
| WO2005063652A1 (en) * | 2003-12-26 | 2005-07-14 | Bridgestone Corporation | Method for producing silicon carbide sintered body for heater |
| JP2005206449A (en) * | 2003-12-26 | 2005-08-04 | Bridgestone Corp | Method for producing silicon carbide sintered compact for heater |
| JP2010105862A (en) * | 2008-10-30 | 2010-05-13 | Ngk Insulators Ltd | Silicon carbide-based porous article and method for producing the same |
| JP2016183081A (en) * | 2015-03-26 | 2016-10-20 | 東京窯業株式会社 | Manufacturing method of conductive silicon carbide sintered body and conductive silicon carbide sintered body |
| JP2019172495A (en) * | 2018-03-28 | 2019-10-10 | 東京窯業株式会社 | Manufacturing method of conductive carbonized silicon sintered body and conductive carbonized silicon sintered body |
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