JPH08117709A - Cleaning device - Google Patents

Cleaning device

Info

Publication number
JPH08117709A
JPH08117709A JP28418594A JP28418594A JPH08117709A JP H08117709 A JPH08117709 A JP H08117709A JP 28418594 A JP28418594 A JP 28418594A JP 28418594 A JP28418594 A JP 28418594A JP H08117709 A JPH08117709 A JP H08117709A
Authority
JP
Japan
Prior art keywords
liquid
organic solvent
cleaning tank
chamber
sending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28418594A
Other languages
Japanese (ja)
Other versions
JP3288543B2 (en
Inventor
Takeaki Saida
武彰 斉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTSUKA GIKEN KOGYO KK
Original Assignee
OTSUKA GIKEN KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTSUKA GIKEN KOGYO KK filed Critical OTSUKA GIKEN KOGYO KK
Priority to JP28418594A priority Critical patent/JP3288543B2/en
Publication of JPH08117709A publication Critical patent/JPH08117709A/en
Application granted granted Critical
Publication of JP3288543B2 publication Critical patent/JP3288543B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE: To increase cleaning efficiency by respectively forming the submerged opposite faces of perforated plates having prescribed pores and filtrating a liquid of an organic solvent in a cleaning tank thoroughly, uniformly and rapidly. CONSTITUTION: Submerged opposite faces of a cleaning tank 2 storing an organic solvent A are respectively formed of perforated plates 5, 6. A liquid suction chamber 7 is formed liquid-tightly in the outside of the perforated plate 6 at the liquid suction side. A liquid feed chamber 8 is formed liquid-tightly in the outside of the perforated plate 5 at the liquid feed side. The interval between the chamber 7 and the chamber 8 is connected by a liquid feed route 13 in which a liquid-pressurizing feed pump 11 and a filter 12 are interposed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、例えば、ミニチュア
ベアリングやコンピュータ部品などのワークを有機溶剤
(メチレンクロライド、ハイドロクロロフロロカーボン
等)で洗浄するような洗浄装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning device for cleaning works such as miniature bearings and computer parts with an organic solvent (methylene chloride, hydrochlorofluorocarbon, etc.).

【0002】[0002]

【従来の技術】従来、上述例の洗浄装置としては、例え
ば図3に示す如き構成のものがある。すなわち、洗浄槽
31を設けて、この洗浄槽31内にメチレクロライド
(塩化メチレンのことで、化学式はCH2 Cl2 )やハ
イドロクロロフロロカーボン(Hydro Chloro Fluoro Ca
rbons いわゆるHCFC)などの有機溶剤Aを貯溜する
一方、上述の洗浄槽31の一側と他側とにインレットポ
ート32およびアウトレットポート33を開口し、これ
ら両ポート33,32間を、ポンプ34およびフィルタ
35が介設された送液経路36で接続し、さらに上述の
洗浄槽31の底部に超音波振動子37および予熱ヒータ
38を取付けた洗浄装置である。
2. Description of the Related Art Conventionally, as a cleaning apparatus of the above-mentioned example, there is one having a structure as shown in FIG. That is, a cleaning tank 31 is provided, and methyl chloride (methylene chloride; a chemical formula is CH 2 Cl 2 ) or hydrochlorofluorocarbon (Hydro Chloro Fluoro Ca) is provided in the cleaning tank 31.
While the organic solvent A such as rbons (so-called HCFC) is stored, the inlet port 32 and the outlet port 33 are opened at one side and the other side of the cleaning tank 31, and the pump 34 and the outlet port 33 are provided between these ports 33, 32. This is a cleaning device in which a filter 35 is connected by a liquid-sending path 36, and an ultrasonic vibrator 37 and a preheater 38 are attached to the bottom of the cleaning tank 31.

【0003】この従来構造の洗浄装置によれば、上述の
洗浄槽31の上端開口に形成されたワーク出入口39か
らミニチュアベアリングやコンピュータ部品などのワー
クを有機溶剤Aの液中に浸漬すると、この有機溶剤Aの
作用および超音波振動子37の超音波振動効果でワーク
を良好に洗浄することができる利点がある反面、上述の
洗浄槽31に対する有機溶剤Aの流入および流出は一部
(インレットポート32参照)から入って、一部(アウ
トレットポート33参照)から出る構成であるから、切
粉やゴミ等を含有する汚液の除去ができない問題点があ
った。
According to this conventional cleaning apparatus, when a work such as a miniature bearing or a computer part is immersed in the liquid of the organic solvent A from the work inlet / outlet 39 formed at the upper opening of the cleaning tank 31, the organic solvent A While there is an advantage that the work can be satisfactorily cleaned by the action of the solvent A and the ultrasonic vibration effect of the ultrasonic oscillator 37, the inflow and outflow of the organic solvent A to and from the cleaning tank 31 are partially (inlet port 32). However, since it is configured to enter through a portion of the outlet port 33 (see the outlet port 33), there is a problem that the waste liquid containing chips, dust, and the like cannot be removed.

【0004】[0004]

【発明が解決しようとする課題】この発明の請求項1記
載の発明は、液中対向面をそれぞれ所定細孔の多孔板で
形成することにより、洗浄槽内の有機溶剤の液を万遍な
く均一に急速濾過して、洗浄効率の向上を図ることがで
きる洗浄装置の提供を目的とする。
The invention according to claim 1 of the present invention forms the liquid of the organic solvent in the cleaning tank evenly by forming the facing surfaces in the liquid by perforated plates having predetermined pores. An object of the present invention is to provide a cleaning device capable of improving the cleaning efficiency by uniformly and rapidly filtering.

【0005】この発明の請求項2記載の発明は、上記請
求項1記載の発明の目的と併せて、吸液側多孔板の孔径
を送液側多孔板の孔径に対して若干大径に設定すること
で、吸気液側における流量確保を図って、キャビテーシ
ョン(cavitation)を防止することができる洗浄装置の
提供を目的とする。
In the invention according to claim 2 of the present invention, in addition to the object of the invention according to claim 1, the pore size of the liquid absorption side porous plate is set to be slightly larger than the pore size of the liquid transmission side porous plate. By doing so, it is an object of the present invention to provide a cleaning device capable of ensuring a flow rate on the intake liquid side and preventing cavitation.

【0006】この発明の請求項3記載の発明は、上記請
求項1もしくは2記載の発明の目的と併せて、上述の多
孔板における孔部を液中の全域にわたって均一に配設す
ることで、より一層良好な急速濾過を達成することがで
きる洗浄装置の提供を目的とする。
According to the invention of claim 3 of the present invention, in addition to the object of the invention of claim 1 or 2, by arranging the holes in the perforated plate uniformly throughout the liquid, It is an object of the present invention to provide a cleaning device capable of achieving better rapid filtration.

【0007】[0007]

【課題を解決するための手段】この発明の請求項1記載
の発明は、有機溶剤を貯溜した洗浄槽の液中対向面をそ
れぞれ多孔板で形成すると共に、吸液側多孔板外部に液
密状に形成された吸液室と、送液側多孔板外部に液密状
に形成された送液室との間を、加圧送液ポンプおよびフ
ィルタが介設された送液経路で接続してなる洗浄装置で
あることを特徴とする。
According to a first aspect of the present invention, the facing surfaces in liquid of a cleaning tank in which an organic solvent is stored are formed by perforated plates, respectively, and liquid-tight on the outside of the perforated plate on the liquid absorption side. The liquid-sending chamber formed in the shape of a ring and the liquid-sending chamber formed in the liquid-tight state outside the liquid-sending side porous plate are connected by a liquid-sending path provided with a pressure-sending pump and a filter. It is a cleaning device.

【0008】この発明の請求項2記載の発明は、上記請
求項1記載の発明の構成と併せて、吸液側多孔板の孔径
を送液側多孔板の孔径に対して若干大径に設定した洗浄
装置であることを特徴とする。
In the invention according to claim 2 of the present invention, in combination with the structure of the invention according to claim 1, the pore size of the liquid-absorption side porous plate is set to be slightly larger than the pore size of the liquid-sending side porous plate. It is a cleaning device.

【0009】この発明の請求項3記載の発明は、上記請
求項1もしくは2記載の発明の構成と併せて、上記各多
孔板における孔部は上記洗浄槽の底部対応位置から液面
対応位置までの全域にわたって均一に配設された洗浄装
置であることを特徴とする。
In the invention according to claim 3 of the present invention, in addition to the structure of the invention according to claim 1 or 2, the holes in each of the perforated plates are from the position corresponding to the bottom of the cleaning tank to the position corresponding to the liquid surface. The cleaning device is evenly arranged over the entire area.

【0010】[0010]

【発明の作用および効果】この発明の請求項1記載の発
明によれば、加圧送液ポンプを駆動すると、洗浄槽の送
液側多孔板外部に形成された送液室から該多孔板を介し
て有機溶剤が洗浄槽内へ加圧吐出される。つまり加圧さ
れた有機溶剤が多数箇所から洗浄槽の液中に吐出され、
洗浄槽内の有機溶剤は吸気側多孔板および同側外部の吸
液室を介して加圧送液ポンプのサクション側に吸引さ
れ、切粉およびゴミ等は送液経路に介設したフィルタに
より除去される。
According to the invention described in claim 1 of the present invention, when the pressurized liquid feed pump is driven, the liquid feed chamber formed outside the liquid feed side porous plate of the cleaning tank passes through the porous plate. The organic solvent is pressurized and discharged into the cleaning tank. In other words, the pressurized organic solvent is discharged from a number of locations into the liquid in the cleaning tank,
The organic solvent in the cleaning tank is sucked into the suction side of the pressurized liquid feed pump through the suction side porous plate and the liquid suction chamber outside the suction side, and chips and dust are removed by the filter provided in the liquid feed path. It

【0011】このように、液中対向面をそれぞれ所定細
孔の多孔板で形成したので、送液側の多数箇所から吐出
された有機溶剤が、吸液側の多数箇所から吸液されて、
洗浄槽内の有機溶剤の液を万遍なく均一に急速濾過する
ことができて、洗浄効率の向上を図ることができる効果
がある。
As described above, since the facing surfaces in the liquid are formed by the perforated plates having the predetermined pores, the organic solvent discharged from the many positions on the liquid sending side is sucked from the many positions on the liquid sucking side,
There is an effect that the liquid of the organic solvent in the washing tank can be uniformly and rapidly filtered, and the washing efficiency can be improved.

【0012】この発明の請求項2記載の発明によれば、
上記請求項1記載の発明の目的と併せて、吸液側多孔板
の孔径を送液側多孔板の孔径に対して若干大径に設定し
たので、吸液側すなわち加圧送液ポンプのサクション側
における流量確保を図って、キャビテーションを防止す
ることができる効果がある。因に、吸液側多孔板の孔径
が過少な場合には流量確保が困難となるが、この発明で
は斯る点を解消することができる。
According to the invention of claim 2 of the present invention,
In addition to the object of the invention described in claim 1, since the pore size of the liquid absorption side perforated plate is set to be slightly larger than the hole diameter of the liquid transmission side perforated plate, the liquid absorption side, that is, the suction side of the pressurized liquid supply pump. There is an effect that cavitation can be prevented by securing the flow rate in the. Incidentally, when the pore size of the liquid-absorption side porous plate is too small, it becomes difficult to secure the flow rate, but the present invention can solve this problem.

【0013】この発明の請求項3記載の発明によれば、
上記請求項1もしくは2記載の発明の効果と併せて、上
述の各多孔板における孔部を、洗浄槽の底部対応位置か
ら液面対応位置までの全域にわたって均一に配設したの
で、送液側多孔板の各多孔から洗浄槽の液中に吐出され
る有機溶剤の吐出液が洗浄槽液中において該液中の全域
にわたって均一に吐出され、かつ吸液側多孔板の各多孔
から略均等に吸液される。この結果、より一層良好な急
速濾過を達成することができる効果がある。
According to the invention of claim 3 of the present invention,
In addition to the effect of the invention described in claim 1 or 2, the pores in each of the perforated plates are evenly arranged over the entire area from the position corresponding to the bottom of the cleaning tank to the position corresponding to the liquid surface. The discharge liquid of the organic solvent discharged from each of the perforated plates into the liquid of the cleaning tank is uniformly discharged in the liquid of the cleaning tank over the entire area of the liquid, and is evenly distributed from the respective pores of the liquid-absorption side porous plate. It is absorbed. As a result, there is an effect that more favorable rapid filtration can be achieved.

【0014】[0014]

【実施例】この発明の一実施例を以下図面に基づいて詳
述する。図面は洗浄装置を示し、図1、図2において、
この洗浄装置は上端を広く開口してワーク出入口1が形
成された有底箱形の洗浄タンク2を設け、この洗浄タン
ク2内にはメチレンクロライド(塩化メチレン)やHC
FCなどの有機溶剤Aを貯溜している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawing shows a cleaning device, and in FIG. 1 and FIG.
This cleaning apparatus is provided with a bottomed box-shaped cleaning tank 2 in which a work inlet / outlet 1 is formed with a wide opening at the upper end, and in the cleaning tank 2, methylene chloride (methylene chloride) or HC
The organic solvent A such as FC is stored.

【0015】また上述の洗浄タンク2の底部bには超音
波振動子3および予熱ヒータ4を設けて、上述の予熱ヒ
ータ4で有機溶剤Aを30〜50℃(但し、有機溶剤と
して例えばメチレンクロライドを用いる場合)に加熱す
べく構成している。この加熱温度は超音波振動子3によ
る超音波振動効果が最適となる温度である。
An ultrasonic transducer 3 and a preheater 4 are provided at the bottom b of the cleaning tank 2, and the organic solvent A is heated at 30 to 50 ° C. (however, as the organic solvent, for example, methylene chloride). (When using) is configured to be heated. This heating temperature is a temperature at which the ultrasonic vibration effect of the ultrasonic vibrator 3 is optimum.

【0016】しかも、上述の洗浄タンク2の液中と対向
する面をそれぞれ多孔板5,6で形成し、吸液側(図面
上、右側)の多孔板6の外部には吸液室7を液密状に形
成すると共に、送液側(図面上、左側)の多孔板5の外
部には送液室8を液密状に形成している。
Moreover, the surfaces of the cleaning tank 2 facing the liquid are formed by perforated plates 5 and 6, respectively, and a liquid absorption chamber 7 is provided outside the perforated plate 6 on the liquid absorption side (the right side in the drawing). In addition to being formed in a liquid-tight manner, a liquid-sending chamber 8 is formed in a liquid-tight manner outside the perforated plate 5 on the liquid-sending side (the left side in the drawing).

【0017】而して上述の吸液室7の底部に開口したア
ウトレットポート9と、上述の送液室8に開口したイン
レットポート10との間には、加圧送液ポンプ11およ
びフィルタ12が介設された送液経路13を連続接続し
ている。ここで上述の各多孔板5,6におけるそれぞれ
の孔部5a,6aは上述の洗浄タンク2の底部b対応位
置から液面a対応位置までの全域にわたって図2に示す
如く均一に配設している。なお上述の孔部5a,5bは
図示の便宜上実際の寸法に対して誇大表示している。
A pressure feed pump 11 and a filter 12 are interposed between the outlet port 9 opened at the bottom of the liquid suction chamber 7 and the inlet port 10 opened at the liquid feed chamber 8. The provided liquid sending path 13 is continuously connected. Here, the respective holes 5a, 6a in the perforated plates 5, 6 are uniformly arranged over the entire area from the position corresponding to the bottom b of the cleaning tank 2 to the position corresponding to the liquid level a as shown in FIG. There is. The holes 5a and 5b described above are exaggerated with respect to actual dimensions for convenience of illustration.

【0018】また上述の送液側多孔板5における各孔部
5aの孔径は例えば4〜5mmφに設定すると共に、これ
ら各孔部5aの開口面積の総和を、送液経路13の一部
を構成する配管14の管路断面積に相当する値に設定し
ている。さらに上述の吸液側多孔板6における各孔部6
aの孔径は、送液側多孔板5における各孔部5aの孔径
(例えば4〜5mmφ)に対して若干大径の例えば5〜7
mmφに設定している。加えて、上述の送液側多孔板5か
らの有機溶剤Aの吐出圧力が例えば1〜3kg/cm2 にな
るように上述の加圧送液ポンプ11の吐出圧力が設定さ
れている。
[0018] with a pore size of each pore portion 5a of the feeding-side perforated plate 5 described above is set to, for example, 4 to 5 mm phi, the total sum of the opening areas of the respective holes 5a, a portion of the liquid supply path 13 The value is set to a value corresponding to the cross-sectional area of the pipeline of the constituent pipe 14. Further, each hole 6 in the liquid-absorption side porous plate 6 described above
The pore size of a can, feeding-side perforated plate diameter of the holes 5a in 5 (e.g. 4 to 5 mm phi) for example some of the large diameter relative 5-7
mm φ is set. In addition, the discharge pressure of the pressure-feeding liquid pump 11 is set so that the discharge pressure of the organic solvent A from the liquid-feeding side porous plate 5 is, for example, 1 to 3 kg / cm 2 .

【0019】因に有機溶剤Aの一例として用いるメチレ
ンクロライド(塩化メチレン)の物性を列記すると次の
通りである。
The physical properties of methylene chloride (methylene chloride) used as an example of the organic solvent A are listed below.

【0020】化学式………CH2 Cl2 分子量………84.94 沸 点………39.8℃ 比 重………1.325 表面張力……28.2dyne/cm 図示実施例は上記の如く構成するものにして、以下作用
を説明する。
Chemical formula: CH 2 Cl 2 molecular weight: 84.94 Boiling point: 39.8 ° C. Specific gravity: 1.325 Surface tension: 28.2 dyne / cm With such a configuration, the operation will be described below.

【0021】ミニチュアベアリングやコンピュータ部品
その他のワークを洗浄する場合、上述の予熱ヒータ4で
洗浄タンク2内の有機溶剤Aを30〜50℃に加熱する
と共に、超音波振動子3を駆動させ、この状態の有機溶
剤Aの液中に上述のワークをワーク出入口1から降下浸
漬すると、このワークは有機溶剤Aの作用および超音波
振動効果により洗浄処理される。
When cleaning the miniature bearings, computer parts and other workpieces, the organic solvent A in the cleaning tank 2 is heated to 30 to 50 ° C. by the preheating heater 4 and the ultrasonic vibrator 3 is driven. When the above-mentioned work is dipped into the liquid of the organic solvent A in the state from the work inlet / outlet port 1, the work is washed by the action of the organic solvent A and the ultrasonic vibration effect.

【0022】ところで、上述の洗浄によりワークから洗
浄除去された切粉やゴミ等を含有する汚液を急速濾過す
るには、加圧送液ポンプ11を駆動して、配管14の先
端からインレットポート10、送液室8に有機溶剤Aを
送液し、送液側多孔板5のそれぞれの孔部5a…から約
1〜3kg/cm2 の圧力で有機溶剤Aを洗浄タンク1の液
中に吐出し、かつ吸液側多孔板6のそれぞれの孔部6a
…から吸液した有機溶剤Aを、吸液室7およびアウトレ
ットポート9を介して加圧送液ポンプ11のサクション
側に吸引すると、切粉およびゴミ等は送液経路13に介
設したフィルタ12により除去されるので、ワーク洗浄
により形成された洗浄タンク2内の汚液の急速濾過を実
行することができる効果がある。
By the way, in order to rapidly filter the contaminated liquid containing chips, dust and the like washed and removed from the work by the above-mentioned washing, the pressurized liquid feed pump 11 is driven to drive the inlet port 10 from the tip of the pipe 14. , The organic solvent A is fed to the liquid feed chamber 8, and the organic solvent A is discharged into the liquid of the cleaning tank 1 from the respective holes 5a of the liquid feed side porous plate 5 at a pressure of about 1 to 3 kg / cm 2. And each hole 6a of the perforated plate 6 on the liquid absorption side
When the organic solvent A absorbed from ... Is sucked to the suction side of the pressurized liquid feed pump 11 via the liquid absorption chamber 7 and the outlet port 9, chips and dust are removed by the filter 12 provided in the liquid feed path 13. Since it is removed, there is an effect that it is possible to execute the rapid filtration of the dirty liquid in the cleaning tank 2 formed by the work cleaning.

【0023】以上要するに、加圧送液ポンプ11を駆動
すると、洗浄タンク2の送液側多孔板5外部に形成され
た送液室8から該多孔板5を介して有機溶剤Aが洗浄タ
ンク2内へ加圧吐出され、洗浄タンク2内の有機溶剤A
は吸気側多孔板6および同側外部の吸液室7を介して加
圧送液ポンプ11のサクション側に吸引され、切粉およ
びゴミ等は送液経路13に介設したフィルタ12により
除去される。
In short, when the pressurized liquid-sending pump 11 is driven, the organic solvent A in the cleaning tank 2 is supplied from the liquid-sending chamber 8 formed outside the liquid-sending side porous plate 5 of the cleaning tank 2 through the porous plate 5. Is discharged under pressure to the organic solvent A in the cleaning tank 2.
Is sucked to the suction side of the pressurized liquid feed pump 11 through the suction side porous plate 6 and the liquid suction chamber 7 on the outside of the suction side, and chips and dust are removed by the filter 12 provided in the liquid feed path 13. .

【0024】このように、液中対向面をそれぞれ所定細
孔の多孔板5,6で形成したので、洗浄タンク2内の有
機溶剤Aの液を万遍なく均一に急速濾過することができ
て、洗浄効率の向上を図ることができる効果がある。
As described above, since the facing surfaces in the liquid are formed by the perforated plates 5 and 6 having predetermined pores respectively, the liquid of the organic solvent A in the cleaning tank 2 can be uniformly and rapidly filtered. There is an effect that the cleaning efficiency can be improved.

【0025】また、吸液側多孔板6の孔径を送液側多孔
板5の孔径に対して若干大径に設定したので、吸液側す
なわち加圧送液ポンプ11のサクション側における流量
確保を図って、キャビテーションを防止することができ
る効果がある。
Further, since the pore size of the liquid-suction side porous plate 6 is set to be slightly larger than the pore size of the liquid-sending side porous plate 5, the flow rate is secured on the liquid-sucking side, that is, on the suction side of the pressurized liquid-sending pump 11. Therefore, there is an effect that cavitation can be prevented.

【0026】加えて、上述の各多孔板5,6における孔
部5a,6aを、洗浄タンク2の底部b対応位置から液
面a対応位置までの全域にわたって均一に配設したの
で、送液側多孔板5の各多孔から洗浄タンク2の液中に
吐出される有機溶剤Aの吐出液が洗浄タンク2液中にお
いて該液中の全域にわたって均一に吐出され、かつ吸液
側多孔板6の各多孔から略均等に吸液される。この結
果、より一層良好な急速濾過を達成することができる効
果がある。
In addition, since the holes 5a and 6a in the perforated plates 5 and 6 described above are arranged uniformly over the entire area from the position corresponding to the bottom b of the cleaning tank 2 to the position corresponding to the liquid level a, the liquid feeding side. The discharged liquid of the organic solvent A discharged from each pore of the porous plate 5 into the liquid of the cleaning tank 2 is uniformly discharged in the liquid of the cleaning tank 2 over the entire area of the liquid, and Liquid is almost evenly absorbed from the pores. As a result, there is an effect that more favorable rapid filtration can be achieved.

【0027】この発明の構成と、上述の実施例との対応
において、この発明の洗浄槽は、実施例の洗浄タンク2
に対応し、以下同様に、有機溶剤は、メチレンクロライ
ドやHCFC(塩化フッ化炭化水素類としてのハイドロ
クロロフロロカーボン)に対応するも、この発明は、上
述の実施例の構成のみに限定されるものではない。
In the correspondence between the configuration of the present invention and the above-described embodiment, the cleaning tank of the present invention is the cleaning tank 2 of the embodiment.
Similarly, the organic solvent corresponds to methylene chloride and HCFC (hydrochlorofluorocarbon as chlorofluorohydrocarbons), but the present invention is limited to the configuration of the above-mentioned embodiment. is not.

【0028】例えば、上記実施例においては液状の有機
溶剤Aに超音波振動を付加して、ワークを洗浄すべく構
成したが、有機溶剤Aの一部を気化してワークの洗浄に
供するように構成した洗浄装置に適用してもよい。
For example, in the above embodiment, ultrasonic vibration is applied to the liquid organic solvent A to wash the work, but a part of the organic solvent A is vaporized to be used for washing the work. It may be applied to the configured cleaning device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の洗浄装置を示す系統図。FIG. 1 is a system diagram showing a cleaning device of the present invention.

【図2】図1の要部の一部切欠き斜視図。FIG. 2 is a partially cutaway perspective view of a main part of FIG.

【図3】従来の洗浄装置を示す系統図。FIG. 3 is a system diagram showing a conventional cleaning device.

【符号の説明】[Explanation of symbols]

2…洗浄タンク 5…送液側多孔板 6…吸液側多孔板 5a,6a…孔部 7…吸液室 8…送液室 11…加圧送液ポンプ 12…フィルタ 13…送液経路 2 ... Washing tank 5 ... Liquid sending side porous plate 6 ... Liquid absorbing side porous plate 5a, 6a ... Hole 7 ... Liquid absorbing chamber 8 ... Liquid feeding chamber 11 ... Pressurized liquid feeding pump 12 ... Filter 13 ... Liquid feeding path

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】有機溶剤を貯溜した洗浄槽の液中対向面を
それぞれ多孔板で形成すると共に、吸液側多孔板外部に
液密状に形成された吸液室と、送液側多孔板外部に液密
状に形成された送液室との間を、加圧送液ポンプおよび
フィルタが介設された送液経路で接続してなる洗浄装
置。
1. A liquid-sealing liquid-absorbing chamber and a liquid-sending-side porous plate, wherein the liquid-opposing surfaces of a cleaning tank storing an organic solvent are formed of perforated plates, respectively. A cleaning device, which is connected to a liquid-sending chamber formed in a liquid-tight state outside by a liquid-sending path provided with a pressure-sending liquid pump and a filter.
【請求項2】吸液側多孔板の孔径を送液側多孔板の孔径
に対して若干大径に設定した請求項1記載の洗浄装置。
2. The cleaning apparatus according to claim 1, wherein the pore size of the liquid absorption side porous plate is set to be slightly larger than the pore size of the liquid feeding side porous plate.
【請求項3】上記各多孔板における孔部は上記洗浄槽の
底部対応位置から液面対応位置までの全域にわたって均
一に配設された請求項1もしくは2記載の洗浄装置。
3. The cleaning apparatus according to claim 1, wherein the holes in each of the perforated plates are uniformly arranged over the entire area from the position corresponding to the bottom of the cleaning tank to the position corresponding to the liquid surface.
JP28418594A 1994-10-24 1994-10-24 Cleaning equipment Expired - Lifetime JP3288543B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28418594A JP3288543B2 (en) 1994-10-24 1994-10-24 Cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28418594A JP3288543B2 (en) 1994-10-24 1994-10-24 Cleaning equipment

Publications (2)

Publication Number Publication Date
JPH08117709A true JPH08117709A (en) 1996-05-14
JP3288543B2 JP3288543B2 (en) 2002-06-04

Family

ID=17675281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28418594A Expired - Lifetime JP3288543B2 (en) 1994-10-24 1994-10-24 Cleaning equipment

Country Status (1)

Country Link
JP (1) JP3288543B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100474386B1 (en) * 2002-03-15 2005-03-09 엘지.필립스 엘시디 주식회사 An apparatus for cleaning liquid crystal dispensing device
JP2007275723A (en) * 2006-04-04 2007-10-25 Hitachi Global Storage Technologies Netherlands Bv Washing apparatus and washing method
CN105537184A (en) * 2016-01-29 2016-05-04 芜湖市海联机械设备有限公司 Novel kerosene cleaning reservoir

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100474386B1 (en) * 2002-03-15 2005-03-09 엘지.필립스 엘시디 주식회사 An apparatus for cleaning liquid crystal dispensing device
JP2007275723A (en) * 2006-04-04 2007-10-25 Hitachi Global Storage Technologies Netherlands Bv Washing apparatus and washing method
CN105537184A (en) * 2016-01-29 2016-05-04 芜湖市海联机械设备有限公司 Novel kerosene cleaning reservoir

Also Published As

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JP3288543B2 (en) 2002-06-04

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