JPH08110284A - Optical-characteristic measuring device of optical system - Google Patents

Abstract

PURPOSE: To shorten the operating time even if a single one-dimensional light receiving sensor is used, and to provide the optical-characteristic measuring device having the excellent measuring accuracy. CONSTITUTION: The luminous fluxes, which are emitted from the total of four light sources 1a-1d of a light source part 1, become a plurality of slit-shaped luminous fluxes with a mask 2 and advance to a lens under inspection 4. The respective slit-shaped luminous fluxes are condensed for the lens under inspection 4 with a condenser lens 3 and converged to four condensing positions. Each luminous flux after passing the lens under inspection 4 also becomes the slit shape. The inclination angle of the flux is deviated by a specified helix angle. The luminous flux is projected on single one-dimensional light receiving sensor 7 with a projecting lens 6. The optical characteristics of the lens under inspection 4 are operated based on the output signal of the one-dimensional light receiving sensor 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to optical characteristics of an optical system such as a spectacle lens, that is, a spherical refractive power, a cylindrical refractive power and a main radial direction of the optical system, and if necessary, a prism refractive power and its base. A device for measuring direction.

[0002]

2. Description of the Related Art Conventionally, various devices have been provided as an optical characteristic measuring device for an optical system.
The apparatus described in Japanese Patent No. 31986 is provided.

The device disclosed in Japanese Patent Laid-Open No. 5-231986 uses a single one-dimensional light receiving sensor, and approximates the amount of twist of a slit-shaped light beam after passing through a lens having a cylindrical refractive power. However, the calculation process can be performed only for a long time, and the repeated calculation requires time, and a calculation error occurs due to the approximate solution.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and can reduce the calculation time and increase the measurement accuracy in spite of using a single one-dimensional light receiving sensor. It is intended to provide a good optical characteristic measuring device.

[0005]

In order to solve the above-mentioned problems, an optical characteristic measuring apparatus for an optical system according to the present invention comprises an irradiating means having four or more light sources toward an optical system to be tested, and the irradiating means. A light blocking means for making a light beam having a boundary having a different transmittance, a focusing optical system for focusing a light beam having a boundary having a different transmittance with respect to the optical system under test;
One one-dimensional light receiving sensor that outputs an output signal according to a one-dimensional light receiving position; a projection optical system that projects each light beam that has passed through the optical system to be tested onto the one one-dimensional light receiving sensor; Projection position data for obtaining each projection position data corresponding to each projection position on the one one-dimensional light receiving sensor of each light beam based on a light beam having a boundary having different transmittance, based on an output signal of one one-dimensional light receiving sensor. The extraction means and the arithmetic means for obtaining the refractive power of the optical system to be tested based on the respective projection position data are provided. The center line or boundary line (including, of course, extension lines) of the light flux having the boundary with different transmittance by the light shielding means is composed of at least one pair of parallel lines and at least two lines. At least one pair of the at least one pair of parallel lines is substantially perpendicular to the light receiving axis of the one-dimensional light receiving sensor, and at least two of the at least two lines are substantially perpendicular to each other. As described above, the light shielding means is configured. Alternatively, the center line or the boundary line of the light flux having the boundary having the different transmittance by the light shielding means is composed of at least two or more pairs of parallel lines and at least one or more lines, and the at least two pairs or more of parallel lines. At least one of the parallel lines is substantially perpendicular to the light receiving axis of the one-dimensional light receiving sensor, and at least one of the center line or the boundary line of the light flux having the boundary of different transmittance by the light shielding means. The light shielding means is configured such that the center line or the boundary line is substantially perpendicular to at least one pair of parallel lines of the at least two pairs or more. Alternatively, the center line or the boundary line of the light flux having the boundary having the different transmittance by the light shielding means is composed of at least two pairs or more of parallel lines, and one pair of the at least two pairs or more of the parallel lines is the at least two pairs. The light shielding means is configured so as to be substantially perpendicular to the other pair of parallel lines of a pair or more.

The irradiating means sequentially irradiates the four or more light sources, and the projection position data extracting means obtains a discrimination signal for discriminating which of the four or more light sources is radiated. The projection position data may be obtained based on the discrimination signal and the output signal of the one-dimensional one-dimensional light receiving sensor, in addition to the discrimination means.

A calculation means for obtaining the prismatic power of the optical system to be tested based on the respective projection position data may be further provided.

Each of the focusing positions may be set at four positions, and the focusing positions may be set so as to form an angle of 90 ° on a virtual concentric circle.

[0009]

As can be seen from JP-A-5-231986, the slit-shaped light flux after passing through the optical system to be inspected having a cylindrical refracting power has a refracting power of the optical system to be inspected, a cylindrical axis direction, and a center. Twist (the tilt angle changes) depending on the thickness, and a twist amount (a change amount of the tilt angle of the slit-shaped light beam) occurs.

The above-mentioned Japanese Patent Laid-Open No. 5-23 has dealt with this twist amount by a special light beam diaphragm and repeated calculation processing.
It was the device described in the 1986 gazette.

On the other hand, in the present invention, iterative calculation processing is not performed. Nevertheless, the fact that the optical characteristics of the test optical system can be obtained is based on the following findings.

That is, similar to the finding described in Japanese Patent Laid-Open No. 5-231986, the intersection of slit-like light fluxes having two or more kinds of predetermined inclination angles is to be inspected after passing through the optical system to be inspected. It is based on the property of showing the optical characteristics of the optical system. This is optically equivalent to the generally known fact that the spot-like light beam shows the optical characteristics of the test optical system after passing through the test optical system.

Therefore, at the intersection of the slit-shaped light fluxes having two or more kinds of predetermined inclination angles after passing through the optical system to be inspected (the intersection of extension lines thereof when the light fluxes do not actually intersect), By knowing the dimensional position, the optical characteristics of the test optical system can be known.

Then, in the case where there is no diaphragm after the projection light flux passes through the lens to be inspected in the lens to be inspected having the center thickness d and the refractive power D in a certain direction, the following equation is generally known. Is established.

D ′ = D / (1 + dD) (1) tan θ ′ = tan θ / (1 + dD) (2) where θ is the angle of incidence on the lens to be inspected, θ ′ is the angle of emission from the lens to be inspected, D ′ is the height of the image on the light-receiving XY plane, and fφ = 1. Note that f is the focal length of the projection lens, and φ is the height of the object (the distance from the measurement optical axis to the light source). In the present invention, in addition to the above findings, attention is newly paid to the relevance of Expressions (1) and (2), and the optical characteristics of the lens to be inspected are specified.

Therefore, according to the present invention, the optical system to be inspected has a cylindrical refractive power, and the optical system to be inspected can be accurately measured no matter how the slit-shaped light beam is twisted after passing through the optical system to be inspected. The optical characteristics of the system can be obtained.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in the drawings.

FIG. 1 is a block diagram showing an optical system of an optical characteristic measuring apparatus according to an embodiment of the present invention.

In FIG. 1, O is a measurement optical axis, and for convenience of explanation, the direction in the plane of FIG. 1 perpendicular to the measurement optical axis O is the Y axis (the direction of the arrow is the origin of the measurement optical axis O). And a direction perpendicular to the measurement optical axis O and perpendicular to the paper surface is defined by the X-axis (the direction behind the paper surface in FIG. 1 (the direction of the arrow in other drawings)). The positive direction with the measurement optical axis O as the origin is shown). The light source unit 1 is arranged in the XY plane on the measurement optical axis O. FIG. 2 shows the light source unit 1 viewed from the direction of arrow A in FIG. The light source unit 1 includes light sources 1a, 1c, 1b and 1d such as four LEDs.
Are arranged on a virtual concentric circle U1 centered on the measurement optical axis O so as to form an angle of 90 °. The light sources 1a and 1b are arranged on the Y axis, and the light sources 1c and 1d are arranged on the X axis.
The light sources 1a, 1b, 1c and 1d can be regarded as point light sources. The light sources 1a, 1b, 1c and 1d can be turned on and off independently. The diameter of the concentric circle U1 is 2φ, which is a value determined by design.

A mask 2 having slit-shaped openings 2a, 2b, 2c and 2d is arranged at a predetermined distance from the light source section 1 on the measurement optical axis O. FIG. 3 shows the mask 2 viewed from the direction of arrow B in FIG. The slit-shaped opening 2a is arranged so that its center line is perpendicular to the Y axis, and the slit-shaped opening 2b is arranged so that its center line is perpendicular to the Y axis. The center line of 2a and the center line of the slit-shaped opening 2b intersect the Y axis at positions ± H0 '. For convenience of explanation, the slit-shaped opening and the center line thereof are denoted by the same reference numerals. The width of the slit-shaped opening 2a is larger than the width of the slit-shaped opening 2b, so that the two two-dimensional images are simultaneously projected on the one-dimensional light receiving sensor 7 based on the output signal of the one-dimensional light receiving sensor 7 described later. It is possible to determine which of the slit-shaped openings 2a and 2b the pair of light fluxes have passed through. The center lines of the slit-shaped openings 2c and 2d intersect each other at a point O2 on the measurement optical axis O and are inclined at ± 45 °.

In FIG. 1, 4 is a lens to be inspected as an optical system to be inspected, 5 is a lens holder for holding the lens to be inspected 4, and when the lens holder 5 holds the lens to be inspected 4. The rear surface of the lens 4 to be inspected matches the holder surface of the lens holder 5.

In FIG. 1, reference numeral 3 denotes a condenser lens arranged between the mask 2 and the lens 4 to be inspected on the measurement optical axis O. When the lens 4 to be inspected is not installed on the lens holder 5, the light sources 1a, 1b, 1c and 1d and the holder surface of the lens holder 5 are conjugated by the condenser lens 3. Therefore, in the embodiment shown in FIG. 1, the condenser lens 3 constitutes a focusing optical system that focuses the slit-shaped light beam on the lens 4 to be inspected. The front focal plane of the condenser lens 3 coincides with the mask 2. FIG.
In the embodiment shown in (4), there are a total of four focusing positions of the slit-shaped light flux with respect to the lens 4 to be inspected by the condenser lens 3.

Further, in FIG. 1, 7 is a one-dimensional light receiving sensor which outputs an output signal according to a one-dimensional light receiving position, and for example, a one-dimensional CCD can be used. FIG. 4 shows the one-dimensional light receiving sensor 7 viewed from the direction C in FIG. The light receiving center of the linear light receiving surface of one one-dimensional light receiving sensor 7 coincides with the Y axis. For convenience of explanation, the XY plane including the light receiving surface of one one-dimensional light receiving sensor 7 receives the light X
It is called the Y plane. The origin of this light receiving XY plane and the position O7 on the measurement optical axis O in FIG.

Further, in FIG. 1, reference numeral 6 is a projection lens arranged on the measurement optical axis O between the lens 4 to be inspected and the one-dimensional light receiving sensor 7. The front focal plane of the projection lens 6 coincides with the holder surface of the lens holder 5, and the rear focal plane of the projection lens 6 coincides with the light receiving surface of the one-dimensional light receiving sensor 7. Therefore, in the embodiment shown in FIG. 1, the projection lens 6 constitutes a projection optical system for projecting each of the light fluxes having passed through the lens 4 under test on the light receiving surface of the one-dimensional light receiving sensor 7.

Then, as shown in FIG.
Reference characters a, 1b, 1c and 1d are connected to a light source drive circuit 12 for turning them on and off. The light source drive circuit 1
2 is an arithmetic control circuit 1 including a microcomputer and the like.
It is connected to this so as to receive the lighting control signal from 1. The arithmetic control circuit 11 is connected to the sensor drive circuit 13 so as to supply a data capture start signal to the sensor drive circuit 13. The sensor drive circuit 13 is connected to each of the one-dimensional light receiving sensors 7 so as to drive them. The one-dimensional light receiving sensor 7 is connected to a signal processing circuit 14 for A / D converting or binarizing the output signals thereof. The signal processing circuit 14 is connected to the arithmetic control circuit 11 so that its output signal is input to the arithmetic control circuit 11. Then, when the measurement is started, first, the arithmetic control circuit 11 sends a lighting control signal to the light source drive circuit 12 to light only the light source 1a. After that, the arithmetic control circuit 11 sends a data fetching start signal to the sensor drive circuit 13 to drive the one-dimensional light receiving sensors 7, respectively, and obtain output signals corresponding to the light receiving positions from the one-dimensional light receiving sensors 7, respectively, and output these. After the signal is processed by the signal processing circuit 14, it is taken into the internal memory of the arithmetic control circuit 11 as measurement data. That is,
Slit-shaped openings 2a, 2b, 2c emitted from the light source 1a
And the projection position data corresponding to the projection position on the one-dimensional light receiving sensor 7 of each light flux based on the slit-shaped light flux passing through 2d are stored in the internal memory of the arithmetic control circuit 11. The distinction between the projection position data obtained based on the output signal of the same one-dimensional light receiving sensor is performed by determining the light receiving width of the one-dimensional light receiving sensor based on the output signal of the one-dimensional light receiving sensor. When this acquisition is completed, the arithmetic control circuit 11 again sends a lighting control signal to the light source drive circuit 12 to light only the light source 1b this time, and the projection position data is acquired as measurement data in the same manner as described above. Hereinafter, similarly, the light sources 1c and 1d are sequentially turned on, and the projection position data is taken into the internal memory of the arithmetic control circuit 11 as measurement data each time. Then, the arithmetic control circuit 11 performs the later-described arithmetic operation on the basis of the thus-acquired projection position data to calculate the optical characteristics of the lens 4 to be inspected, that is, the spherical refractive power S, the cylindrical refractive power C, the cylindrical axial direction ( One main radial direction) θ, the prism refractive power P and its base direction φ are obtained. The obtained optical characteristics are displayed on the display device 15.

As is clear from the above description, in the present embodiment, the arithmetic control circuit 11 is based on the output signal of the one-dimensional light receiving sensor 7 and is based on the slit-shaped light beam. It has a function as a projection position data extracting means for obtaining the projection position data corresponding to each projection position data. In particular, in the present embodiment, the lighting control signal or the data capture start signal corresponds to a determination signal of which light source of the light flux is emitted, and the determination signal is output. The arithmetic control circuit 11 has a function as a means. The arithmetic control circuit 11 also has a function of discriminating the widths of the slit-shaped luminous fluxes irradiated at the same time. Further, the arithmetic control circuit 11 also has a function as an arithmetic unit that obtains the optical characteristics of the lens 4 to be inspected based on the discrimination signal and the output signal of the one-dimensional light receiving sensor 7.

Next, by the calculation of the calculation control circuit 11, the spherical optical power S, the cylindrical refractive power C, the cylindrical axial direction θ, the prism refractive power P and the base direction φ thereof, which are the optical characteristics of the lens 4 to be measured, are obtained. Explain why you can.

Now, if the lens 4 to be inspected has a central thickness d, a spherical power S, a cylindrical refracting power C, and a cylindrical axis direction θ, it passes through the mask 2, passes through the lens 4 to be inspected, and enters the light receiving plane XY. As shown in FIG. 6, the projected light flux has the XY axes of the mask 2 as X ′, Y ′, and the center lines 2c, 2 of the slit-shaped opening.
d is twisted like 2c 'and 2d'. This is disclosed in JP-A-5-23186 and JP-A-6-58.
This is described in detail in Japanese Patent No. 841.

Here, α1 α2, β1 and β2 are almost equal to each other, and it is practically no problem to approximate α1≈−α2 and β1≈−β2. Therefore, approximation is performed as in the following equations (3) and (4).

M≈tan α1 = −tan α2 = (1 + dΔX) / (1 + dΔY) (3) n≈tan β1 = -tan β2 = dΔ / (1 + dΔY) (4) However, as described later, ΔX is the lens 4 to be detected. Is a refracting power along a meridional surface (meridional surface) including the X axis, ΔY is a refracting power along a meridian surface including the Y axis of the lens 4, and Δ is a spherical surface (sagittal surface) of the lens 4. Power along the.

According to the embodiment shown in FIG. 1, if the lens 4 to be inspected has a center thickness d, a spherical refractive power S, a cylindrical refractive power C and a prism refractive power P, for example, the light source 1a
To emit slit-shaped openings 2a, 2b, 2 of the mask 2
Projected light fluxes 81, 82, 83, 84 on the light receiving XY plane by the slit-shaped light fluxes that have passed through c and 2d, and the slit-shaped opening 2 of the mask 2 that emits the light source 1b.
Projected light fluxes 85, 86, 87 on the light-receiving XY plane by the slit-shaped light fluxes that have passed through a, 2b, 2c, and 2d.
88 is as shown in FIG. In addition, the light source 1c is emitted to open the slit-shaped openings 2a, 2b, 2c, 2d of the mask 2.
Projected light fluxes 89, 90, 91, 92 on the light receiving XY plane by the respective slit-shaped light fluxes that have passed through
d to emit slit-shaped openings 2a, 2b, 2 of the mask 2
Projected light fluxes 93, 94, 95, 96 on the light receiving XY plane by the respective slit-shaped light fluxes that have passed through c and 2d are shown in FIG.
It becomes as shown in. Note that, in FIGS. 7 and 8, each of the projection light beams 81 to 96 only shows the center line thereof. The point A1 in FIG. 7 emits the light source 1a and the measurement optical axis O
The projected position on the light-receiving XY plane of a light ray (hereinafter referred to as a reference light ray by the light source 1a) that has passed the O2 point which is the position of the upper mask 2 is shown, and the A2 point in FIG. 7 emits the light source 1b and passes through the O2 point. 8A and 8B show the projection positions of the reflected light rays (hereinafter, referred to as reference light rays from the light source 1b) on the light receiving XY plane.
Point A3 in FIG. 3 is a light-receiving XY of a light beam emitted from the light source 1c and passing through the O2 point (hereinafter referred to as a reference light beam from the light source 1c).
The projection position on the plane is shown, and the point A4 in FIG. 8 is the light source 1.
The projection position on the light-receiving XY plane of a light beam emitted from d and passing through the O2 point (hereinafter referred to as a reference light beam from the light source 1d) is shown.

In order to clarify the positional relationship between each projected light flux and the light source unit 1, FIG. 7 shows the light source 1a of the light source unit 1.
And 1b are also overlapped and shown as if they were on the light receiving XY plane. In FIG. 8, the light sources 1c and 1d of the light source unit 1 are shown.
Is also superposed as if it were on the light receiving XY plane. As will be apparent from the above, in FIGS. 7 and 8, the Y axis indicates the light receiving center line of the linear light receiving surface of one one-dimensional light receiving sensor 7.

As shown in FIG. 7 and FIG.
The points A1, A2, A3 and A according to the optical characteristics of
Reference numerals 4 are displaced from the origin O7 of the light receiving XY plane.

First, the points A1, A2, A3 and A4.
What information the position of has in relation to the optical characteristics of the lens 4 to be inspected will be described. In addition, each point A
Including the symbols, the XY coordinates of 1, A2, A3 and A4 are (X1, Y1), (X2, Y2), (X3, Y
3) and (X4, Y4). The reason why the sign is included in this way is to determine whether the refractive power is positive or negative, that is, the unevenness of the lens 4 to be inspected.

As described above, the refractive power along the meridional surface (meridional surface) including the X axis of the lens 4 to be tested is ΔX, and the refractive power along the meridian surface of the lens 4 to be tested including the Y axis is ΔY,
Assuming that the refractive power along the spherical surface (sagittal surface) of the lens 4 to be tested is Δ, ΔX, ΔY, and Δ use the spherical refractive power S, the cylindrical refractive power C, and the cylindrical axis direction θ of the lens 4 to be tested. Can be expressed as follows.

ΔX = S + C · sin ² θ (5) ΔY = S + C · cos ² θ (6) Δ = C · sin θ · cos θ (7) Then, the lens 4 to be inspected now has a spherical refractive power S and Assuming that there is a cylindrical power C and no prism power P,
In the present embodiment, the above-mentioned arrangement relationship is provided, and the reference rays by the light sources 1a, 1b, 1b, 1d and the coordinates of the points A1, A2, A3, A4 and the ΔX, ΔY and Δ are also provided.
The following relationship is established between and. It should be noted that f in the following equation indicates the focal length of the projection lens 7. Further, φ in the following equation indicates the radius of the concentric circle U1, as described above. Furthermore, in the following equation, the equation (1) is considered.

| X1 | = | X2 | = | Y3 | = | Y4 | = φ · f · Δ / (1 + dΔ) (8) | Y1 | = | Y2 | = φ · f · ΔY / (1 + dΔY) ... (9) | X3 | = | X4 | = φ · f · ΔX / (1 + dΔX) (10) Here, since φ and f are design constants, the expression is simply expressed for convenience of description. , Φ · f = 1,
Equations (8) to (10) are as follows, respectively. Of course, in the present invention, φ · f ≠ 1 may be satisfied. .

| X1 | = | X2 | = | Y3 | = | Y4 | = Δ / (1 + dΔ) (11) | Y1 | = | Y2 | = ΔY / (1 + dΔY) (12) | X3 | = | X4 | = ΔX / (1 + dΔX) (13) In the above description, it is assumed that the lens 4 to be inspected has the spherical refractive power S and the cylindrical refractive power C, and does not have the prism refractive power P. However, if the lens 4 to be inspected also has the prismatic power P, the points A1, A2, A3 and A4 are set.
The position of is the amount of the vector P ″ (whose X component is X0 and Y component is Y0) by the prism refractive power P with respect to the position where the lens 4 under test does not have the prism refractive power P. It will be translated only.

Therefore, the lens 4 to be inspected has a spherical refractive power S.
And not only the cylindrical refracting power C but also the prism refracting power P, the coordinates (X1, Y1), (X2, Y2), (X3, Y3) of the points A1, A2, A3, A4. ),
(X4, Y4) can be expressed as follows, taking the sign into consideration.

(X1, Y1) = [(Δ + X0) / (1 + dΔ), (ΔY + Y0) / (1 + d ΔY)] (14) (X2, Y2) = [(− Δ + X0) / (1 + dΔ), (−ΔY + Y0) ) / (1 + dΔY)] (15) (X3, Y3) = [(ΔX + X0) / (1 + dΔX), (Δ + Y0) / (1 + dΔ)] (16) (X4, Y4) = [(-ΔX + X0) / (1 + dΔX), (−Δ + Y0) / (1 + dΔ)] (17) As described above, the position of each of the points A1, A2, A3, and A4 has any information in relation to the optical characteristics of the lens 4 to be tested. I explained.

In the present invention, the points A1, A2, A3, A which are the intersections of the light fluxes after passing through the lens 4 to be inspected.
The optical characteristics of the lens 4 to be inspected are obtained by paying attention to the fact that 4 indicates the optical characteristics of the lens 4 to be inspected. This point will be described below with reference to FIGS. 7 and 8.

First, the position of the point A1 will be described.

The points where the center lines of the slit-shaped light beams 2a and 2b of the mask 2 in FIG. 2 intersect the Y axis are A11 and A12 in FIG. From the equations (2) and (4), the coordinates of the points A11 and A12 are A11 [X1-nH
0, Y1 + H0 / (1 + dΔY)], A12 [X1 + n
H0, Y1-H0 / (1 + dΔY)]. However,
H0 is the projection light flux 81, 82 when the lens 4 under test is not present.
Is the interval between.

Further, if the points where the straight lines 81 to 84 intersect the Y axis are H1 to H4, respectively, the following equation holds. For convenience of description, the Y coordinate values of the points H1 to H4 are set to H1 to H4, respectively.

[0045] ^{H1 = nX1-n 2 H0 +} Y1 + H0 / (1 + dΔY) ... (18) H2 = nX1-n 2 H0 + Y1-H0 / (1 + dΔY) ... (19) Equation (18) and (19), the following equation is obtained . Note that n
² H0 is a small value that can be practically ignored.

(H1−H2) / 2 = n ² H0 + H0 / (1 + dΔY) ≈H0 / (1 + dΔY) (20) H3 = −mX1 + Y1 (21) H4 = mX1 + Y1 (22) Formulas (21) and (22) ), The following equation is obtained.

Y1 = (H3 + H4) / 2 (23) From the equations (21) and (22), the following equation is obtained.

MX1 = (H4−H3) / 2 (24) Next, the points A2 (X2, Y2), A3 (X3, Y)
3) and A4 (X4, Y4) are similarly obtained as follows.

H7 = -mX2 + Y2 (25) H8 = mX2 + Y2 (26) H11 = -mX3 + Y3 (27) H12 = mX3 + Y3 (28) H15 = -mX4 + Y4 (29) H16 = mX4 + Y4 (30) Formula (30) 25) and (26), the following equation is obtained.

Y2 = (H7 + H8) / 2 (31) mX2 = (H8-H7) / 2 (32) From the equations (27) and (28), the following equation is obtained.

Y3 = (H11 + H12) / 2 (33) mX3 = (H12−H11) / 2 (34) The following formula is obtained from the formulas (29) and (30).

Y4 = (H15 + H16) / 2 (35) mX4 = (H16−H15) / 2 (36) The following formula is obtained from the formulas (14) and (15).

ΔY = (1 + dΔY) (Y1−Y2) / 2 (37) From the equations (14) and (15), the following equation is obtained.

Y0 = (1 + dΔY) (Y1 + Y3) / 2 (38) From equations (3), (16) and (17), the following equation is obtained.

ΔX = (1 + dΔY) (mX3-mX4) / 2 (39) From the equations (3), (16) and (17), the following equation is obtained.

X0 = (1 + dΔY) (mX3 + mX4) / 2 (40) Δ = (Y3-Y4) / “2-d (Y3-Y4)] (41) As described above, ΔX, ΔY, Δ, X0, Y0 is obtained, and the spherical refractive power S, the cylindrical refractive power C, and the cylindrical axis direction θ of the lens 4 under test
Can be requested.

Further, X0 and Y0 can be obtained from the equations (38) and (40). Then, in the embodiment shown in FIG. 1, assuming that the focal length of the projection lens 7 is f as described above, the X component PX and the Y component PY of the prism refractive power P of the lens 4 under test can be expressed as follows.

PY = Y0 / f (42) PX = X0 / f (43) Further, the following relationship is established.

P = (PX ² + PY ² ) ^1/2 (44) tan φ = PY / PX (45) Therefore, based on X0 and Y0 obtained as described above, equations (42) to (45) are used. ), The prism refractive power P of the lens 4 to be inspected and its base direction φ can be obtained.

In the embodiment shown in FIG. 1, by using the measurement data based on the output signal of the one-dimensional photosensor 7, the arithmetic control circuit 11 performs the arithmetic processing as described above,
It is possible to obtain the spherical refractive power S, the cylindrical refractive power C, the cylindrical axial direction θ, the prism refractive power P and the base direction φ of the lens 4 to be inspected.

The inclination angle of each projection light beam based on each slit-shaped light beam that has passed through the slit-shaped opening changes intricately depending on the thickness d of the lens 4 to be tested, the cylindrical refractive power C, and the like.
In the present embodiment, the optical characteristics of the lens 4 to be inspected can be accurately obtained by focusing on the points A1, A2, A3 and A4 by the one-dimensional light receiving sensor 7 and using each projection light beam.

As described above, in the optical characteristic measuring apparatus for the optical system according to the embodiment shown in FIG. 1, the lens 4 to be inspected has a cylindrical refracting power, and the light beam of the slit-shaped light beam is inspected. No matter how much the lens is twisted after passing through the lens 4, the optical characteristics of the lens to be tested can be accurately obtained without being affected by the amount of the twist.

Further, since only one one-dimensional light receiving sensor 7 is arranged and repeated calculation is not required, the mechanism can be simplified, the measurement accuracy can be improved, and the measurement time can be shortened.

In the above-described embodiment, since the slit-shaped openings of the mask 2 intersect, the detection accuracy of the one-dimensional light receiving sensor 7 may deteriorate near this intersection. Therefore, next, an embodiment in which the slit-shaped openings do not intersect will be described.

The mask 20 shown in FIG. 9 is a slit-shaped opening according to an example of this embodiment. In the mask 20, the center lines of the slit-shaped openings 20a and 20b are parallel to each other, the center line of the slit-shaped opening 20a is on the X-axis, and the plus side and the minus side of the X-axis of the slit-shaped opening 20a are different from each other. The widths are different, and the center line of the slit-shaped opening 20b is parallel to the X axis and intersects the Y axis at -HO '. Slit-shaped opening 20
The center lines of c and 20d are parallel to each other and have an inclination angle of 45 °, and the center lines of the slit openings 20c and 20d intersect the Y axis at H0 'and 3H0', respectively. The center lines of the slit-shaped openings 20c 'and 20d' are parallel to each other and -45.
Has an inclination angle of ° and has a slit-shaped opening 20c ',
The center lines of 20d 'are Y-axis and 2H0', 4H0 ', respectively.
Cross at. The center line of the slit-shaped opening 20e is -4.
It has an inclination angle of 5 °, and the center line of the slit-shaped opening 20e intersects the Y axis at -3HO '. The slit-shaped opening 20e ′ has an inclination angle of 45 °, and the center line of the slit-shaped opening 20e ′ intersects the Y axis at −2H0 ′.

If the mask 20 having the slit-shaped opening configured as described above is installed in the optical system of FIG. 1 which is the same as that of the above-described embodiment, instead of the mask 2, it passes through the same lens 4 to be inspected. The generated light flux is projected on the light receiving XY plane as shown in FIGS.

The slit-shaped openings 20a, 2 of the mask 20
0b, 20c, 20d, 20e, 20c ', 20d',
The center line of 20e ′ is 21a, 21b, 21c, 21d, 21e, 21 depending on the light source 1a on the light receiving XY plane.
22 depending on the light source 1b to c ', 21d', 21e '
a, 22b, 22c, 22d, 22e, 22c ', 22
d ', 22e', 23a, 23 depending on the light source 1c
b, 23c, 23d, 23e, 23c ', 23d', 2
3e ', depending on the light source 1d, 24a, 24b, 24
c, 24d, 24e, 24c ', 24d', 24e '
, Respectively.

Points A1 and A in FIG. 10 and FIG.
2, A3 and A4 are points showing optical characteristics as in the above embodiment, and A1 (X1, Y1), A2 (X2, Y2),
It becomes A3 (X3, Y3) and A4 (X4, Y4).

The points on the Y-axis of the mask 20 are B11, B12, B13, B14, B15, B by the light source 1a.
16 and B17. Light reception XY among these points
B11, B12, B13, B intersect with the Y axis of the plane
14 and B15, B16, and B17 do not intersect. This can be distinguished by the width of the slit-shaped opening 20a.

The intersecting coordinates are B11 [X1 + nH0, Y1-H0 / (1 + dΔ) in the same manner as in the above embodiment.
Y)], B12 [X1-nH0, Y1 + H0 / (1 + d
ΔY)], B13 [X1-3nH0, Y1 + 3H0 /
(1 + dΔY)], B14 [X1 + 3nH0, Y1-3
H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1b are B21 [X2 + nH0, Y2-H0 / (1 + dΔ
Y)], B25 [X2-2nH0, Y2 + 2H0 / (1
+ DΔY)], B26 [X2-4nH0, Y2-4H0
/ (1 + dΔY)], B27 [X2 + 2nH0, Y2-
2H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1c are B31 [X3 + nH0, Y3-H0 / (1 + dΔ
Y)], B35 [X3-2nH0, Y3 + 2H0 / (1
+ DΔY)], B36 [X3-4nH0, Y3-4H0
/ (1 + dΔY)], B37 [X3 + 2nH0, Y3-
2H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1d are B41 [X4 + nH0, Y4-H0 / (1 + dΔ
Y)], B42 [X4-nH0, Y4 + H0 / (1 + d
ΔY)], B43 [X4-3nH0, Y4 + 3H0 /
(1 + dΔY)], B44 [X4 + 3nH0, Y4-3
H0 / (1 + dΔY)].

Therefore, the intersection of the projected center line of the slit-shaped opening and the Y-axis is as follows.

I11 = nX1 + Y (46) I12 = nX1 + Y1-H0 / (1 + dΔY) (47) I13 = -mX1 + mnH0 + Y1 + H0 / (1 + dΔY) (48) I14 = -mX1 + 3mnH0 + Y1 + 3H0 / -3mnH0 + Y1-3H0 / (1 + dΔY) (50) I23 = mX2-2mnH0 + Y2 + 2H0 / (1 + dΔY) (51) I24 = mX2-4mnH0 + Y2 + 4H0 / (1 + dΔY) (52) I25 = -Y + 0 + 2 (2 + 2) + 2m (53) I33 = mX3-2mnH0 + Y3 + 2H0 / (1 + dΔY) (54) I34 = mX3-4mnH0 + Y3 + 4H0 / (1 + dΔY) (55) I35 = -mX3-2mnH0 + Y3- H0 / (1 + dΔY) (56) I43 = -mX4 + mnH0 + Y1 + H0 / (1 + dΔY) (57) I44 = -mX4 + 3mnH0 + Y1 + 3H0 / (1 + dΔY) (58) I45 = mX4-3mnH0 + Y4-3Δ0 / (4 + 3H0) The following equation is obtained from 46) and (47).

H0 / (1 + dΔY) = I11−I12 (60) The following equation is obtained from the equations (49) and (50).

Y1 = (I14 + I15) / 2 (61) The following equation is obtained from equations (48), (49) and (50).

MX1 = (I15-I14) / 2 + 3 (I14-I13) / 2 (62) The following equation is obtained from the equations (60), (51), (52) and (53).

Y2 = (I23 + I25) / 2 + 2 (I11-I12)-(I24-I23) (63) From the equations (60), (51) and (53), the following equation is obtained.

MX2 = (I23-I25) / 2-2 (I11-I12) (64) The following formula is obtained from the formulas (60), (54), (55) and (56).

Y3 = (I33 + I35) / 2 + 2 (I11-I12)-(I34-I33) (65) The following formula is obtained from the formulas (60), (54) and (56).

MX3 = (I33-I35) / 2-2 (I11-I12) (66) The following equation is obtained from the equations (58) and (59).

Y4 = (I44 + I45) / 2 (67) From the equations (57), (58) and (59), the following equation is obtained.

MX3 = (I45-I43) +3 (I44-I43) / 2 (68) Therefore, the optical characteristics of the lens 4 to be tested can be obtained in the same manner as in the above example.

Next, FIG. 17 shows a mask 30 according to another embodiment of the present invention.

The mask 30 has a slit-shaped opening 30a.
And the center line of the slit-shaped opening 30b are parallel to each other. The center line of the slit-shaped opening 30c and the center line of the slit-shaped opening 30d are parallel to each other. The center line of the slit-shaped opening 30a ′ and the slit-shaped opening 30
The center lines of b'are parallel to each other. The center line of the slit-shaped opening 30c 'and the center line of the slit-shaped opening 30d' are parallel to each other. Slit-shaped openings 30a, 30
The center line of b and the center lines of the slit-shaped openings 30c and 30d are substantially perpendicular to each other. Slit-shaped opening 30
center line of a ', 30b' and slit-shaped opening 30c ',
The center line of 30d 'is substantially perpendicular to each other. The center lines of the slit-shaped openings 30a and 30a ′ are H0 ′, the center lines of the slit-shaped openings 30b and 30b ′ are 2H0 ′, and the center lines of the slit-shaped openings 30c and 30c ′ are −H0 ′.
The center line of the slit-shaped openings 30d and 30d 'is -2.
At H0 ', they intersect the Y axis. The slit-shaped opening on the positive side and the slit-shaped opening on the negative side of the X-axis have different widths so that they can be discriminated from each other.

If the mask 30 having the slit-shaped opening thus configured is installed in the optical system of FIG. 1 which is the same as each of the above-described embodiments, instead of the mask 2, the lens 4 to be inspected is the same as that of each of the above-mentioned embodiments. The light flux that has passed through is projected on the light receiving XY plane as shown in FIGS.

The slit-shaped openings 30a, 3 of the mask 30
0b, 30c, 30d, 30a ', 30b', 30
The center lines of c ′ and 30c ′ are the light sources 1 on the light receiving XY plane.
31a, 31b, 31c, 31d, 31 depending on a
a ', 31b', 31c ', 31d', depending on the light source 1b, 32a, 32b, 32c, 32d, 32a ', 3
2b ', 32c', 32d ', 3 depending on the light source 1c
3a, 33b, 33c, 33d, 33a ', 33b',
33c ', 33d', 34a, 3 depending on the light source 1d
4b, 34c, 34d, 34a ', 34b', 34
It is projected on c'and 34d ', respectively.

Points A1 and A in FIGS. 18 and 19
2, A3 and A4 are points showing optical characteristics as in the above embodiment, and A1 (X1, Y1), A2 (X2, Y2),
It becomes A3 (X3, Y3) and A4 (X4, Y4).

Each point on the Y-axis of the mask 30 is projected on C11, C12, C13, C14 by the light source 1a. Which slit-shaped opening the center line intersects with the Y-axis can be distinguished by the width of the slit-shaped opening or the like.

The intersecting coordinates are C11 [X1-nH0, Y1 + H0 / (1 + dΔ) in the same manner as in the above embodiments.
Y)], C12 [X1-2nH0, Y1 + 2H0 / (1
+ DΔY)], C13 [X1 + nH0, Y1-H0 /
(1 + dΔY)], C14 [X1 + 2nH0, Y1-2
H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1b are C21 [X2-nH0, Y2 + H0 / (1 + dΔ
Y)], C22 [X2-2nH0, Y2 + 2H0 / (1
+ DΔY)], C23 [X2 + nH0, Y2-H0 /
(1 + dΔY)], C24 [X2 + 2nH0, Y2-2
H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1c are C31 [X3-nH0, Y3 + H0 / (1 + dΔ
Y)], C32 [X3-2nH0, Y3 + 2H0 / (1
+ DΔY)], C33 [X3 + nH0, Y3-H0 /
(1 + dΔY)], C34 [X3 + 2nH0, Y3-2
H0 / (1 + dΔY)].

Similarly, the intersecting coordinates of the light source 1d are C41 [X4-nH0, Y4 + H0 / (1 + dΔ
Y)], C42 [X4-2nH0, Y4 + 2H0 / (1
+ DΔY)], C43 [X4 + nH0, Y4-H0 /
(1 + dΔY)], C44 [X4 + 2nH0, Y4-2
H0 / (1 + dΔY)].

Therefore, the intersection of the projected center line of the slit-shaped opening and the Y axis is as follows.

K11 = −mX1 + mnH0 + Y1 + H0 / (1 + dΔY) (69) K12 = −mX1 + 2mnH0 + Y1 + 2H0 / (1 + dΔY) (70) K13 = mX1 + mn + 0 + m + 0 + (n + 0) + (n + 0) + (1 + d + Y) + (71) + (1 + d + Y) + (71) + (n + 0) + (1 + d + Y) + (71) + (2 + h) + (1 + d + Y) = (71) + (1 + d + Y) + (71) + (2 + m) + (1 + d + Y) + (71) + (1 + d + Y) (71) + (2 + h) + (1 + d + Y)) (72) K21 = mX2-mnH0 + Y2 + H0 / (1 + dΔY) (73) K22 = mX2-2mnH0 + Y2 + 2H0 / (1 + dΔY) (74) K23 = -mX2-mnH0 + Y2-H0 / (1 + dΔY) ... (75) K24 =- 2mnH0 + Y2-2H0 / (1 + dΔY) (76) K31 = mX3-mnH0 + Y3 + H0 / (1 + dΔY) (77) K32 = mX3-2mnH0 + Y3 + 2H0 / (1 + dΔY) (78) K33 = -mX3-mnH0 + Y3-H0 / (1 + dΔY) (79) K34 = -mX3-2mnH0 + Y3-2H0 / (1 + dΔY) (80) K41 = -mX4 + mnH0 + Y4 + H0 / (1 + dΔY) ... (81) 0 + m2 + m2 + -m2 + m2 + -m2 + -m2 + m2 + -m42 + -42 + 42. 1 + dΔY) (82) K43 = mX4 + mnH0 + Y4-H0 / (1 + dΔY) (85) K44 = mX4 + 2mnH0 + Y4-2H0 / (1 + dΔY) (84) The following formulas are obtained from formulas (69) and (70).

H0 / (1 + dΔY) = [(K13−K14) − (K11−K12)] / 2 (85) Y1 = (K11 + K13) / 2 + [(K13−K14) + (K11−K12)] / 2 (86) nX1 = (K13-K11) / 2 + [(K13-K14)-(K11-K12)] / 2 (87) The following expressions are obtained from the expressions (73) to (76).

Y2 = (K21 + K23) / 2 + [(K23-K24) + (K21-K22)] / 2 (88) mX2 = (K21-K23) / 2 + [(K23-K24)-(K21-K22) )] / 2 (89) The following equation is obtained from the equations (77) to (80).

Y3 = (K31 + K33) / 2 + [(K33−K34) + (K31−K32)] / 2 (90) nX3 = (K31−K33) / 2 + [(K33−K34) − (K31−K32) )] / 2 (91) The following equation is obtained from equations (81) to (84).

Y4 = (K41 + K43) / 2 + [(K43-K44) + (K41-K42)] / 2 (92) mX4 = (K43-K41) / 2 + [(K43-K44)-(K41-K42) )] / 2 (93) Therefore, the optical characteristics of the lens 4 to be inspected can be obtained in the same manner as in each of the examples.

By the way, the shape of the mask of each of the embodiments described above may be, for example, the one like the mask 121 of FIG. 12 as long as there are at least 4 or 5 or more intersections in the Y-axis direction. In addition, since the center lines of the slit-shaped openings may be parallel to each other, the mask 1 of FIG.
The slit-shaped openings like 22 do not have to be parallel and do not have to be straight like the mask 123 of FIG. The inclination angle is not limited to 45 °. FIG.
Is an example of the mask 102 'of the above embodiment.

The mask 121 of FIG. 12 has a slit-shaped opening 121a whose center line is on the X-axis, a slit-shaped opening 121b whose center line is parallel to the X-axis, and an inclination angle of the center line is 4 degrees.
It has a slit-shaped opening 121d of 5 ° and a slit-shaped opening 121e having a centerline inclination angle of −45 °.
The width of the slit-shaped opening 121a and the slit-shaped opening 12
It is different from the width of 1b.

The mask 122 of FIG. 13 has a slit-shaped opening 122a whose center line is on the X axis, slit-shaped openings 122b to 122d whose center line is parallel to the X axis, and an inclination angle of the center line is 45 °. Slit-shaped openings 122e, 122f
And a slit-shaped opening 12 with a centerline inclination angle of -45 °
2g to 122j. Slit-shaped opening 12
2a to 122b are narrower toward the Y axis.

The mask 123 of FIG. 14 has slit-shaped openings 123a and 123b forming a known curve whose center line is slightly curved with respect to the X-axis direction, and a slit-shaped opening 123c whose center line has an inclination angle of 45 °. .About.123e and slit-shaped openings 123f to 122h having a centerline inclination angle of -45.degree.

The mask 102 'shown in FIG. 15 has slit-shaped openings 102a to 102f whose center lines are parallel to the X-axis, slit-shaped openings 102g having a center line inclination angle of 45 °, and center line inclination angles. It has a -45 ° slit-shaped opening 102h.

In each of the masks described above, the center line of each slit-shaped opening is used as the reference line for measurement, and the position where this reference line intersects the Y axis is used as the measurement data.
However, instead of the center line of each slit-shaped opening, the boundary line (edge line) of the slit-shaped opening is used as a reference line for measurement,
The position where this boundary line intersects the Y axis may be used as the measurement data. As described above, when the measurement data is obtained based on the boundary line of the opening, not only the slit opening having the usual meaning but also the shape of the opening itself excluding the boundary line may be arbitrary. For example, the mask 200 shown in FIG. 20 is substantially the same as the mask 24 shown in FIG. 14 and can be used in the present invention. In the mask 200, slit-shaped openings 200e and 200h that are the same as the slit-shaped openings 123e and 123h of the mask 24 and openings that are punched out of the slit-shaped openings 123c, 123d, 123f, and 123g of the mask 24 (also this In the specification, referred to as a slit-shaped opening) 200a and the slit-shaped opening 12 of the mask 24.
It has an opening 200b (also referred to as a slit-shaped opening in the present specification) formed by punching out 3a and 123b. In the present invention, the "slit-shaped light beam" includes not only a light beam that has passed through a slit opening in the ordinary sense, but also a light beam that has passed through an arbitrary-shaped opening having a boundary line of such a predetermined shape.

By the way, if the arithmetic control circuit 11 is made to perform the arithmetic operations described in connection with the above-described respective embodiments, the arithmetic operations will take a long time, and the above-mentioned constants will change depending on the arrangement of the optical system. To do. Therefore, in an actual device, after the device is manufactured, the measurement is performed using a lens whose optical characteristics are known in advance, and the output of the one-dimensional light receiving sensor 7 when each light source is turned on at that time is compared with the known optical characteristics. The above-mentioned inconvenience can be eliminated by storing the corresponding data in the arithmetic control circuit 11. By thus associating the output of the one-dimensional light receiving sensor 7 with the optical characteristics, the arrangement of the optical system can be made relatively free without adding any complicated labor.

Therefore, for example, the front focal plane of the condenser lens 3 does not necessarily have to coincide with the mask 2.
The respective light sources 1a, 1b, 1c, 1d and the holder surface of the lens holder 5 do not have to be conjugated. The front focal plane of the projection lens 7 and the holder surface of the lens holder 5 do not have to match, and the rear focal plane of the projection lens 7 and the light receiving surface of the one-dimensional light receiving sensor 7 do not have to match. The arrangement of the respective light sources 1a, 1b, 1c, 1d can also be arbitrarily determined.

In the present invention, for example, in each of the embodiments described above, the lens 4 to be inspected and the lens holder 5 may be arranged in opposite directions as shown in FIG.
When arranged as shown in FIG. 16, an appropriate diaphragm may be arranged on the lens holder surface.

[0110]

According to the present invention, although a single one-dimensional light receiving sensor is used, it is possible to provide an optical characteristic measuring device capable of shortening the calculation time and having high measurement accuracy. Moreover, the optical characteristics of the optical system to be tested can be accurately obtained with one one-dimensional light receiving sensor, and moreover,
Since no optical path divider is required, the amount of photometric light can be effectively used, the measurement accuracy can be improved, and the mechanism can be simplified.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an optical system of an optical characteristic measuring apparatus according to an embodiment of the present invention.

FIG. 2 is a view taken in the direction of arrow A in FIG.

FIG. 3 is a view on arrow B in FIG.

FIG. 4 is a view on arrow C in FIG.

FIG. 5 is an electric circuit diagram of the optical characteristic measuring apparatus.

FIG. 6 is an explanatory diagram of a twist amount.

7 is a diagram showing a projected light flux on a light-receiving XY plane viewed from the direction of arrow C in FIG.

8 is a diagram showing another projected light flux on the light-receiving XY plane viewed from the direction of arrow C in FIG.

FIG. 9 is a diagram showing a mask used in an optical characteristic measuring apparatus according to another embodiment of the present invention.

10 is a diagram showing a projected light flux on the light-receiving XY plane as seen from the direction of arrow C in FIG.

11 is a diagram showing another projected light flux on the light receiving XY plane viewed from the direction of arrow C in FIG.

FIG. 12 is a view showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

FIG. 13 is a view showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

FIG. 14 is a view showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

FIG. 15 is a diagram showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

16 is a diagram showing a modified example of the optical system shown in FIG.

FIG. 17 is a diagram showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

FIG. 18 is a diagram showing a projected light flux on the light-receiving XY plane viewed from the direction of arrow C in FIG. 1.

19 is a diagram showing another projected light flux on the light-receiving XY plane viewed from the direction of arrow C in FIG.

FIG. 20 is a view showing a mask used in an optical characteristic measuring apparatus according to still another embodiment of the present invention.

[Explanation of symbols]

1a-1d light source 2,20,30,102 ', 121,122,123,
200 Mask 3 Condenser lens 4 Test lens 6 Projection lens 7 One-dimensional photo sensor

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] November 21, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0097

[Correction method] Change

[Correction content]

HO / (1 + dΔY) = [(K13−K14) − (K11−K12)] / 2 (85) Y1 = (K11 + K13) / 2 + [(K13−K14) + (K11−K12)] / 2 (86) m X1 = (K13−K11) / 2 + [(K13−K14) − (K11−K12)] / 2 (87) The following equations are obtained from the equations (73) to (76).

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0099

[Correction method] Change

[Correction content]

Y3 = (K31 + K33) / 2 + [(K33−K34) + (K31−K32)] / 2 (90) m X3 = (K31−K33) / 2 + [(K33−K34) − (K31−K32) )] / 2 (91) The following equation is obtained from equations (81) to (84).

Claims (6)

[Claims] 1. An irradiation unit having four or more light sources directed to an optical system to be inspected, a light shielding unit for converting a light beam from the irradiation unit into a light beam having a boundary having a different transmittance, and a boundary having a different transmittance. A focusing optical system that focuses a light beam that it has on the test optical system, one one-dimensional light receiving sensor that outputs an output signal according to a one-dimensional light receiving position, and the one target one-dimensional light receiving sensor on which the one-dimensional light receiving sensor is provided. Based on the output signal of the projection optical system for projecting each light beam that has passed through the inspection optical system and the one-dimensional light receiving sensor, the one-dimensional light reception of each light beam based on the light beam having the boundary with different transmittance. Projection position data extraction means for obtaining each projection position data corresponding to each projection position on the sensor, and calculation means for obtaining the refracting power of the optical system to be tested based on each projection position data are provided. By means A center line or a boundary line of a light flux having a boundary having different transmittance is composed of at least a pair of parallel lines and at least two lines, and at least a pair of parallel lines of the at least a pair of parallel lines. Is substantially perpendicular to the light receiving axis of the one-dimensional light receiving sensor, and at least two of the at least two or more lines are
An optical characteristic measuring device for an optical system, wherein the books are substantially perpendicular to each other. 2. An illuminating device having four or more light sources directed to the optical system to be tested, a light-shielding device for making a light beam from the illuminating device a light beam having a boundary having a different transmittance, and a boundary having a different transmittance. A focusing optical system that focuses a light beam that it has on the test optical system, one one-dimensional light receiving sensor that outputs an output signal according to a one-dimensional light receiving position, and the one target one-dimensional light receiving sensor on which the one-dimensional light receiving sensor is provided. Based on the output signal of the projection optical system for projecting each light beam that has passed through the inspection optical system and the one-dimensional light receiving sensor, the one-dimensional light reception of each light beam based on the light beam having the boundary with different transmittance. Projection position data extraction means for obtaining each projection position data corresponding to each projection position on the sensor, and calculation means for obtaining the refracting power of the optical system to be tested based on each projection position data are provided. By means The center line or boundary line of the light flux having a boundary having different transmittance is composed of at least two or more pairs of parallel lines and at least one or more lines, and at least one pair of the at least two pairs or more of parallel lines. Parallel lines are substantially perpendicular to the light receiving axis of the one-dimensional light receiving sensor, and at least one center line or boundary of the center lines or boundary lines of the light flux having the boundary of different transmittance by the light shielding means. An optical characteristic measuring apparatus for an optical system, wherein the line is substantially perpendicular to at least one pair of parallel lines among the at least two pairs of parallel lines. 3. An irradiation unit having four or more light sources directed to the optical system to be tested, a light shielding unit for converting a light beam from the irradiation unit into a light beam having a boundary having a different transmittance, and a boundary having a different transmittance. A focusing optical system that focuses a light beam that it has on the test optical system, one one-dimensional light receiving sensor that outputs an output signal according to a one-dimensional light receiving position, and the one target one-dimensional light receiving sensor on which the one-dimensional light receiving sensor is provided. Based on the output signal of the projection optical system for projecting each light beam that has passed through the inspection optical system and the one-dimensional light receiving sensor, the one-dimensional light reception of each light beam based on the light beam having the boundary with different transmittance. Projection position data extraction means for obtaining each projection position data corresponding to each projection position on the sensor, and calculation means for obtaining the refracting power of the optical system to be tested based on each projection position data are provided. By means The center line or boundary line of the light flux having a boundary having different transmittance is composed of at least two or more pairs of parallel lines, and a pair of the at least two or more pairs of parallel lines is the at least two or more pairs of parallel lines. An optical characteristic measuring device for an optical system, which is substantially perpendicular to the other pair. 4. The irradiating means sequentially irradiates the four or more light sources, and the projection position data extracting means discriminates which light flux of the four or more light sources is irradiated. 4. The optical system according to claim 1, further comprising a discriminating unit for obtaining the projection position data, based on the discrimination signal and the output signal of the one one-dimensional light receiving sensor. Optical characteristic measuring device. 5. The optical characteristic of the optical system according to claim 1, further comprising a computing unit that obtains a prismatic power of the optical system to be tested based on each projection position data. measuring device. 6. Each of the focusing positions is set at four positions, and the focusing positions are set so as to form an angle of 90 ° on a virtual concentric circle. An optical characteristic measuring device for an optical system according to any one of the above.