JPH08105847A - Fluorescent x-ray analyzer - Google Patents

Fluorescent x-ray analyzer

Info

Publication number
JPH08105847A
JPH08105847A JP26449094A JP26449094A JPH08105847A JP H08105847 A JPH08105847 A JP H08105847A JP 26449094 A JP26449094 A JP 26449094A JP 26449094 A JP26449094 A JP 26449094A JP H08105847 A JPH08105847 A JP H08105847A
Authority
JP
Japan
Prior art keywords
crystal
mounting block
ray
holding frame
fluorescent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26449094A
Other languages
Japanese (ja)
Other versions
JP3003525B2 (en
Inventor
Shoji Kuwabara
章二 桑原
Tatemasa Ootsuka
楯征 大塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP6264490A priority Critical patent/JP3003525B2/en
Publication of JPH08105847A publication Critical patent/JPH08105847A/en
Application granted granted Critical
Publication of JP3003525B2 publication Critical patent/JP3003525B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE: To provide a fluorescent X-ray analyzer which can be downsized, which can stably attach a frame for fixing and holding a crystal even with an impact due to intermittent motion and which is easy to attach/remove. CONSTITUTION: A fluorescent X-ray analyzer includes a crystal exchanging device comprising a crystal holding frame 5 made of a magnetic material for fixing and holding a crystal to be analyzed and a crystal attaching block 1 which rotates by a certain angle by a driving mechanism and includes a plurality of magnets 2 with the crystal holding frame 5 freely mountable and demountable. The crystal holding frame 5 and the crystal attaching block 1 are attached/ removed by fitting two positioning pins.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、試料中の元素を定性
分析或いは定量分析する場合に用いられる蛍光X線分析
装置、特に全体的に小型化し感度もより向上させた蛍光
X線分析装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent X-ray analyzer used for qualitative or quantitative analysis of elements in a sample, and more particularly to a fluorescent X-ray analyzer which is generally compact and has improved sensitivity. .

【0002】[0002]

【従来の技術】試料にX線管からのX線を照射すると、
試料に含まれる原子から新たなX線が発生し、試料外面
に放射される。このX線は蛍光X線と呼ばれ、各元素特
有の波長をもっているためこの蛍光X線の波長を分析調
査すれば試料の定性分析が可能となる。また蛍光X線の
強度は元素濃度に比例するため元素特有の波長ごとにX
線量を測定すれば試料の定量分析を行うことが出来る。
図9はこのような蛍光X線分析装置の構成概要を示す図
である。即ち、回転可能な試料設置テ−ブル40に載せ
た試料Mを上下移動台41で上方に移動させ、該試料M
に一次X線フィルタ42を通してX線管43よりX線を
照射し、該試料Mより外へ放射された二次X線をソ−ラ
スリット44を通して分析用の結晶Wに当てて各波長毎
に取り出し、波長分析及び線量測定により定性及び定量
分析を行うようになっている。このような蛍光X線分析
装置の1コンポ−ネントである分析結晶交換装置45は
元素に適合した結晶選定のため多数個の分析結晶Wが取
付けられ任意に選定使用出来るようになっている。
2. Description of the Related Art When a sample is irradiated with X-rays from an X-ray tube,
New X-rays are generated from the atoms contained in the sample and radiated to the outer surface of the sample. This X-ray is called a fluorescent X-ray and has a wavelength peculiar to each element. Therefore, if the wavelength of this fluorescent X-ray is analyzed and investigated, a qualitative analysis of the sample becomes possible. In addition, since the intensity of fluorescent X-rays is proportional to the element concentration, X
Quantitative analysis of the sample can be performed by measuring the dose.
FIG. 9 is a diagram showing an outline of the configuration of such an X-ray fluorescence analyzer. That is, the sample M placed on the rotatable sample setting table 40 is moved upward by the vertical moving table 41, and the sample M is moved upward.
X-rays are radiated from the X-ray tube 43 through the primary X-ray filter 42, and the secondary X-rays emitted from the sample M are applied to the crystal W for analysis through the solar slit 44 and extracted for each wavelength. Qualitative and quantitative analysis is performed by wavelength analysis and dosimetry. The analytical crystal exchange device 45, which is one component of such a fluorescent X-ray analysis device, is equipped with a large number of analytical crystals W for the purpose of selecting a crystal suitable for the element, and can be arbitrarily selected and used.

【0003】図7は従来から使用されている蛍光X線分
析装置の結晶交換装置45の具体例の平面図であり、図
8は正面図である。この結晶交換装置は次のようにして
間欠的に回転して結晶を選定するようになっている。即
ち、回転軸21に取付けられた傘歯車23より中間軸2
2を回転させ、更に該中間軸22に取付けた歯車24に
よりゼネバストップ機構の原動車となる歯車25回転駆
動させる。該歯車25にはピン26が固定されており従
動車28に一定角度間隔に設けられた溝28aに入り該
従動車28を一定角度回転させる。このときア−ム27
に取付けたロック(ストッパ)用円板29は前記従動車
28の外形面をすべり、前方の溝28aに嵌まり込んで
ロックする。そして該ゼネバストップ機構の従動車28
の回転軸30に固定された結晶取付ブロック20はこの
従動車28と共に間欠的に回転する。尚、31は前記原
動車となる歯車25と共に回転するカムであってア−ム
27に回動自在に取り付けられたホィ−ル33と共にカ
ム機構を構成し、該ア−ム27を一定角度範囲揺動させ
る。32は常時該ア−ム27に付勢力を作用させるばね
である。
FIG. 7 is a plan view of a concrete example of a crystal exchange device 45 of a conventional fluorescent X-ray analysis device, and FIG. 8 is a front view thereof. This crystal exchanging device is adapted to intermittently rotate to select a crystal as follows. That is, from the bevel gear 23 attached to the rotary shaft 21, the intermediate shaft 2
2 is rotated, and further, a gear 24 attached to the intermediate shaft 22 drives a gear 25, which serves as a prime mover of the Genebus top mechanism, to rotate. A pin 26 is fixed to the gear 25 and enters a groove 28a provided at a constant angular interval in a driven wheel 28 to rotate the driven wheel 28 at a fixed angle. Arm 27 at this time
The lock (stopper) disk 29 attached to the slippery slides the outer surface of the driven wheel 28 and fits into the front groove 28a to lock. And the driven vehicle 28 of the Gene Bus Top mechanism
The crystal mounting block 20 fixed to the rotating shaft 30 of the above rotates intermittently with the driven wheel 28. Reference numeral 31 is a cam that rotates together with the gear 25 serving as the driving wheel, and constitutes a cam mechanism together with a wheel 33 that is rotatably attached to an arm 27. Rock. Reference numeral 32 is a spring that constantly applies a biasing force to the arm 27.

【0004】上記結晶交換装置の結晶取付ブロック20
は等角度間隔の多角形に形成され、その表面にはそれぞ
れ溝20aが形成され、これらの溝20aには結晶Wを
固定保持させたフレ−ム34を嵌め入れるようになって
いる。そして結晶取付ブロック20の溝20aの底部に
穿設された穴20bにばね35が嵌め込んであって該フ
レ−ム34を付勢すると共に上からは固定板36で押さ
えてある。
Crystal mounting block 20 of the above crystal exchanging device
Are formed into polygons at equal angular intervals, and grooves 20a are formed on the surfaces thereof, and a frame 34 in which a crystal W is fixedly held is fitted in these grooves 20a. A spring 35 is fitted in a hole 20b formed in the bottom of the groove 20a of the crystal mounting block 20 to urge the frame 34 and press it with a fixing plate 36 from above.

【0005】[0005]

【発明が解決しようとする課題】上記する従来の結晶交
換装置の結晶取付ブロック20は、結晶Wを固定保持し
たフレ−ム34を嵌め入れるための溝20a及びばね3
5を設置するための穴20b等を設けなければならず加
工数が多く、この加工も複雑である。また溝20aと溝
20aとの間には、2つの固定板36、36を設置し且
つこれらの固定板36を固定するためのボルト37用の
孔を設ける突起部20cが必要である。このため該結晶
取付ブロック20は比較的大きくなる。また、該結晶取
付ブロック20が大きくなると回転駆動装置や回転支持
部も大きくなり、更に分光室等も大きくなり、結局結晶
交換装置全体が大きくなる。このように結晶交換装置全
体が大きくなると、感度に影響を与える光路も長くなり
好ましくない。
The crystal mounting block 20 of the above-described conventional crystal exchanging device has the groove 20a for inserting the frame 34 holding the crystal W and the spring 3 therein.
Since holes 20b for installing 5 must be provided, the number of processes is large, and this process is also complicated. Further, between the groove 20a and the groove 20a, it is necessary to install the two fixing plates 36, 36 and to provide a protrusion 20c having a hole for a bolt 37 for fixing these fixing plates 36. Therefore, the crystal mounting block 20 becomes relatively large. Further, when the crystal mounting block 20 becomes large, the rotation driving device and the rotation supporting portion also become large, and further the spectroscopic chamber and the like become large, so that the entire crystal exchanging device becomes large. If the entire crystal exchanging device becomes large as described above, the optical path that affects the sensitivity becomes long, which is not preferable.

【0006】この発明は上記する課題に着目してなされ
たものであり、結晶取付ブロックの加工も簡単であって
大きさも小形化することが可能で、また間欠運動に伴う
衝撃があっても結晶を固定保持する結晶保持フレ−ムに
安定的に取り付け且つ着脱も簡単な蛍光X線分析装置を
提供することを目的とする。
The present invention has been made by paying attention to the above-mentioned problems. The crystal mounting block can be easily processed and the size thereof can be reduced, and the crystal can be formed even if there is an impact due to intermittent motion. It is an object of the present invention to provide a fluorescent X-ray analyzer which is easily attached to and detached from a crystal holding frame that holds and holds the crystal.

【0007】[0007]

【課題を解決するための手段】即ち、この発明は上記す
る課題を解決するために、試料に一次X線を照射し該試
料より外部へ放射された二次X線を結晶に当て定性或い
は定量分析を行う蛍光X線分析装置において、前記結
晶を固定保持し且つ磁性材で製作されたフレ−ムと、駆
動機構により一定角度づつ回転し複数個の磁石を装着し
前記フレ−ムを着脱自在とした結晶取付ブロックと、よ
り成る結晶交換装置を備えたことを特徴とする。また、
前記結晶を固定保持し且つ磁性材で製作されたフレ−
ムと結晶取付ブロックとは2つの位置決めピンを嵌めて
着脱するようにしたことを特徴とする。
In order to solve the above-mentioned problems, the present invention irradiates a sample with a primary X-ray and applies a secondary X-ray radiated from the sample to the crystal to qualitatively or quantitatively. In a fluorescent X-ray analyzer for analysis, the frame is fixed and held, and the frame is made of a magnetic material, and a plurality of magnets are attached by rotating the frame at a constant angle by a driving mechanism, and the frame is detachable. And a crystal exchanging device including the crystal mounting block. Also,
A frame made of a magnetic material that holds the crystal fixedly.
It is characterized in that the crystal and the crystal mounting block are attached and detached by fitting two positioning pins.

【0008】[0008]

【作用】蛍光X線分析装置を上記手段とした時の作用に
ついて添付図とその符号を用いて説明する。結晶取付ブ
ロック1には結晶保持フレ−ム5を嵌め込むための溝や
該結晶保持フレ−ム1を固定するためのを固定するため
のスペ−ス等を設ける必要がないので結晶取付ブロック
1自身の全体の大きさも小さくすることが出来る。従っ
て、該結晶取付ブロック1の回転駆動装置や回転支持部
も小さくなり、更に分光室等も小さくなり、結局結晶交
換装置全体をコンパクトにすることが出来る。また、結
晶Wを保持した結晶保持フレ−ム5は結晶取付ブロック
1にピン3により位置決めした状態で簡単に装着するこ
とが可能となり、取り外す場合も簡単に外すことが出来
る。
The operation when the X-ray fluorescence analyzer is used as the above means will be described with reference to the accompanying drawings and the reference numerals. Since it is not necessary to provide the crystal mounting block 1 with a groove for fitting the crystal holding frame 5 or a space for fixing the crystal holding frame 1, the crystal mounting block 1 You can also reduce your overall size. Therefore, the rotation driving device and the rotation supporting portion of the crystal mounting block 1 are also reduced, and the spectroscopic chamber and the like are also reduced, so that the crystal exchanging device as a whole can be made compact. Further, the crystal holding frame 5 holding the crystal W can be easily mounted on the crystal mounting block 1 in a state of being positioned by the pins 3, and can be easily detached even when detached.

【0009】[0009]

【実施例】以下、この発明の具体的実施例について図面
を参照しながら説明する。図1はこの発明の蛍光X線分
析装置で用いる結晶交換装置を構成する結晶取付ブロッ
ク1の平面図、図2は正面図、図3は図2のA−A矢視
断面図である。この結晶取付ブロック1は実施例では1
0角形に形成され、その表面に結晶Wを固定保持した結
晶保持フレ−ム5(後述)を10個取付けることが出来
るようにしてある。この場合、該結晶取付ブロック1の
角度数は六角形でも12角形でも良く増減可能である。
即ち、フレ−ム5の取付個数は増減可能である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view of a crystal mounting block 1 which constitutes a crystal exchanging device used in a fluorescent X-ray analyzer of the present invention, FIG. 2 is a front view, and FIG. 3 is a sectional view taken along the line AA of FIG. This crystal mounting block 1 is 1 in the embodiment.
It is configured so that ten crystal holding frames 5 (described later), which are formed in a 0-gon shape and have the crystal W fixedly held, can be attached to the surface thereof. In this case, the number of angles of the crystal mounting block 1 may be hexagonal or dodecagonal and can be increased or decreased.
That is, the number of frames 5 attached can be increased or decreased.

【0010】前記結晶取付ブロック1は、そのボス部1
aに穿設した穴1bに上記したゼネバストッパ機構の従
動車28を嵌着した回転軸30(図8参照)に嵌着さ
れ、該従動車28と共に間欠回転運動する。該結晶取付
けブロック1の各表面1c、1cには中央部に円形の浅
い穴1dが穿設され、ここに磁石2が嵌め込まれ固定さ
れている。
The crystal mounting block 1 has a boss portion 1
The driven wheel 28 of the Geneva stopper mechanism described above is fitted into the hole 1b formed in a and is fitted into the rotary shaft 30 (see FIG. 8), and intermittently rotates together with the driven wheel 28. A circular shallow hole 1d is formed in the center of each surface 1c, 1c of the crystal mounting block 1, and a magnet 2 is fitted and fixed therein.

【0011】また、前記結晶取付ブロック1の各表面1
c、1cの両端近傍にはピン孔1e、1eが穿設され、
該孔1eにはピン3を圧入して嵌め込んである。該結晶
取付ブロック1の各表面1cに嵌め込まれたピン3は、
後述するように、結晶保持フレ−ム5を位置決めして取
り付けるためのピンである。
Each surface 1 of the crystal mounting block 1
pin holes 1e and 1e are formed near both ends of c and 1c,
The pin 3 is press-fitted and fitted into the hole 1e. The pins 3 fitted on each surface 1c of the crystal mounting block 1 are
As will be described later, this is a pin for positioning and mounting the crystal holding frame 5.

【0012】次に、図4(A)は結晶保持フレ−ム5の
平面図であり、図4(B)は図5(A)のB−B矢視断
面図である。該結晶保持フレ−ム5は、底板5aと側板
5b、5bとでU字形に形成され、該底板5aの中央部
には前記結晶取付ブロック1の各表面1c、1cの両端
近傍穿設したピン孔1eに圧入したピン3を嵌め入れる
ための孔5cと孔5dが穿設されている。この場合、一
方の孔5dは長孔として両側に圧入したピン3とピン3
との中心間距離の誤差を吸収するようにしてある。
Next, FIG. 4 (A) is a plan view of the crystal holding frame 5, and FIG. 4 (B) is a sectional view taken along the line BB of FIG. 5 (A). The crystal holding frame 5 is formed in a U shape by a bottom plate 5a and side plates 5b, 5b, and pins formed in the central portion of the bottom plate 5a near both ends of each surface 1c, 1c of the crystal mounting block 1. Holes 5c and 5d for inserting the pin 3 press-fitted into the hole 1e are provided. In this case, the one hole 5d is a long hole, and the pin 3 and the pin 3 are press-fitted on both sides.
The error of the distance between the centers of and is absorbed.

【0013】更に、前記結晶保持フレ−ム5の底板5a
には両端部に二個づつ孔5e、5eが穿設してあるが、
この孔5eは後述するように結晶Wを固定する接着剤注
入用の孔である。該結晶保持フレ−ム5の材質は鉄、コ
バルト、ニッケル等の磁性材料で製作する。
Further, the bottom plate 5a of the crystal holding frame 5 is used.
There are two holes 5e and 5e at both ends,
This hole 5e is a hole for injecting an adhesive that fixes the crystal W as described later. The crystal holding frame 5 is made of a magnetic material such as iron, cobalt and nickel.

【0014】図5は前記結晶保持フレ−ム5の結晶Wを
固定保持した状態の断面図(図4(B)と同様の断面
図)である。上記するように、該結晶保持フレ−ム5に
は結晶Wを保持させるが、この場合、結晶Wと結晶保持
フレ−ム5の底板5a及び側板5b、5bのどことも接
触しない状態で保持させなければならない。具体的には
結晶保持フレ−ム5を倒立させ、結晶Wは側板5bと側
板5bとの間に下から取付治具(図示せず)を用いて入
れ、孔5e、5eが上面となる状態として接着剤Pを流
し込んで固定する。
FIG. 5 is a sectional view (a sectional view similar to FIG. 4B) in a state in which the crystal W of the crystal holding frame 5 is fixedly held. As described above, the crystal W is held in the crystal holding frame 5. In this case, the crystal W is held in a state where it does not come into contact with any of the bottom plate 5a and the side plates 5b, 5b of the crystal holding frame 5. There must be. Specifically, the crystal holding frame 5 is inverted, and the crystal W is put between the side plates 5b and 5b from below by using a mounting jig (not shown), and the holes 5e and 5e are the upper surfaces. Then, the adhesive P is poured and fixed.

【0015】この蛍光X線分析装置で用いる結晶交換装
置を以上のように構成すると、結晶取付ブロック1には
結晶保持フレ−ム5を嵌め込むための溝20a(図8参
照)や該結晶保持フレ−ム5を固定するための固定板3
6(図8参照)を固定するための突起部20c(図8参
照)等を設ける必要がないので結晶取付ブロック1自身
の全体の大きさも小さくすることが出来る。
When the crystal exchanging device used in this X-ray fluorescence analyzer is constructed as described above, the groove 20a (see FIG. 8) for fitting the crystal holding frame 5 in the crystal mounting block 1 and the crystal holding block. Fixing plate 3 for fixing frame 5
Since it is not necessary to provide a protrusion 20c (see FIG. 8) for fixing 6 (see FIG. 8), the entire size of the crystal mounting block 1 itself can be reduced.

【0016】図6は今回の発明の蛍光X線分析装置で用
いる結晶取付ブロック1と従来の蛍光X線分析装置で用
いる結晶取付ブロック20とをいずれも八角形として同
じ大きさの結晶保持フレ−ム5を装着する場合の大きさ
を比較した図である。この図からも明らかに判るよう
に、結晶取付ブロック1を小さくすることが出来るの
で、回転駆動装置や回転支持部は小形になり、更に分光
室等も小さくなり、結局結晶交換装置全体をコンパクト
にすることが出来る。また、結晶Wを保持した結晶保持
フレ−ム5は結晶取付ブロック1にピン3により位置決
めした状態で簡単に装着することが可能となり、取り外
す場合も簡単に外すことが出来る。
FIG. 6 shows that the crystal mounting block 1 used in the X-ray fluorescence analyzer of the present invention and the crystal mounting block 20 used in the conventional X-ray fluorescence analyzer are both octagonal and have the same size. It is a figure which compared the magnitude | size when mounting | wearing with the lens 5. As can be clearly seen from this figure, since the crystal mounting block 1 can be made small, the rotary drive unit and the rotary support unit can be made small, and the spectroscopic chamber and the like can also be made small, resulting in a compact crystal exchanging device as a whole. You can do it. Further, the crystal holding frame 5 holding the crystal W can be easily mounted on the crystal mounting block 1 in a state of being positioned by the pins 3, and can be easily removed even when detached.

【0017】[0017]

【発明の効果】以上詳述したようにこの発明の蛍光X線
分析装置によれば、結晶取付ブロックの加工を簡単に且
つ小さくすることが出来るので、結晶交換装置全体を小
形化することが可能となり、ひいては分光室も小さくし
て感度を向上させることが出来る。更に、結晶を固定保
持した結晶保持フレ−ムの着脱は極めて簡単となり、該
結晶保持フレ−ムを装着した状態でも圧入したピンで位
置決めして固定するので間欠運動時多少の衝撃があって
も安定的に結晶取付ブロックに固定することが出来る。
As described in detail above, according to the fluorescent X-ray analysis apparatus of the present invention, the processing of the crystal mounting block can be easily and small-sized, so that the entire crystal exchange apparatus can be downsized. Therefore, the spectroscopic chamber can be made smaller to improve the sensitivity. Further, the attachment / detachment of the crystal holding frame that holds the crystal fixed becomes extremely easy, and even if the crystal holding frame is attached, the pin is positioned and fixed with the press-fitted pin, so that even if there is some impact during the intermittent movement. It can be stably fixed to the crystal mounting block.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の蛍光X線分析装置で用いる結晶交換
装置を構成する結晶取付ブロックの平面図である。
FIG. 1 is a plan view of a crystal mounting block that constitutes a crystal exchanging device used in a fluorescent X-ray analyzer according to the present invention.

【図2】この発明の蛍光X線分析装置で用いる結晶交換
装置を構成する結晶取付ブロックの正面図である。
FIG. 2 is a front view of a crystal mounting block that constitutes a crystal exchanging device used in the fluorescent X-ray analyzer of the present invention.

【図3】図2のA−A矢視断面図である。FIG. 3 is a sectional view taken on line AA of FIG. 2;

【図4】図4(A)は結晶保持フレ−ムの平面図であ
り、図4(B)は図4(A)のB−B矢視断面図であ
る。
4 (A) is a plan view of a crystal holding frame, and FIG. 4 (B) is a sectional view taken along the line BB of FIG. 4 (A).

【図5】結晶を保持した状態の結晶保持フレ−ムの断面
図(図4(A)のB−B矢視断面図と同じ方向)であ
る。
5 is a cross-sectional view of the crystal-holding frame in a state of holding crystals (same direction as the cross-sectional view taken along the line BB of FIG. 4A).

【図6】今回の発明の蛍光X線分析装置で用いる結晶取
付ブロックと従来の蛍光X線分析装置で用いる結晶取付
ブロックとをいずれも六角形として同じ大きさの結晶保
持フレ−ムを装着する場合の大きさを比較した図であ
る。
FIG. 6 is a hexagonal crystal mounting block used in the X-ray fluorescence analyzer of the present invention and a crystal mounting block used in the conventional X-ray fluorescence analyzer, each of which is equipped with a crystal holding frame of the same size. It is the figure which compared the size in the case.

【図7】従来から使用されている蛍光X線分析装置の結
晶交換装置の平面図である。
FIG. 7 is a plan view of a crystal exchange device of a conventional fluorescent X-ray analysis device.

【図8】従来から使用されている蛍光X線分析装置の結
晶交換装置の正面図である。
FIG. 8 is a front view of a crystal exchange device of a conventional fluorescent X-ray analysis device.

【図9】蛍光X線分析装置の概要を示す図である。FIG. 9 is a diagram showing an outline of an X-ray fluorescence analyzer.

【符号の説明】[Explanation of symbols]

1 結晶取付ブロック 2 磁石 3 ピン 5 結晶保持フレ−ム 5a 底板 5b 側板 1 crystal mounting block 2 magnet 3 pin 5 crystal holding frame 5a bottom plate 5b side plate

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 試料に一次X線を照射し該試料より外部
へ放射された二次X線を結晶に当て定性或いは定量分析
を行う蛍光X線分析装置において、 前記結晶を固定保持し且つ磁性材で製作された結晶保持
フレ−ムと、駆動機構により一定角度づつ回転し表面に
複数個の磁石を装着し前記結晶保持フレ−ムを着脱自在
とした結晶取付ブロックと、より成る結晶交換装置を備
えたことを特徴とする蛍光X線分析装置。
1. A fluorescent X-ray analyzer for irradiating a sample with a primary X-ray and applying a secondary X-ray radiated from the sample to a crystal for qualitative or quantitative analysis. A crystal exchanging device comprising a crystal holding frame made of a material, and a crystal mounting block which is rotated by a drive mechanism at a constant angle and a plurality of magnets are mounted on the surface to detachably attach the crystal holding frame. An X-ray fluorescence analyzer provided with:
【請求項2】 結晶を固定保持し且つ磁性材で製作され
た結晶保持フレ−ムと結晶取付ブロックとは2つの位置
決めピンを嵌めて着脱するようにした請求項第1項記載
の蛍光X線分析装置。
2. The fluorescent X-ray according to claim 1, wherein the crystal holding frame which holds the crystal fixedly, and the crystal mounting block made of a magnetic material and the crystal mounting block are attached and detached by fitting two positioning pins. Analysis equipment.
JP6264490A 1994-10-03 1994-10-03 X-ray fluorescence analyzer Expired - Fee Related JP3003525B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6264490A JP3003525B2 (en) 1994-10-03 1994-10-03 X-ray fluorescence analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6264490A JP3003525B2 (en) 1994-10-03 1994-10-03 X-ray fluorescence analyzer

Publications (2)

Publication Number Publication Date
JPH08105847A true JPH08105847A (en) 1996-04-23
JP3003525B2 JP3003525B2 (en) 2000-01-31

Family

ID=17403970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6264490A Expired - Fee Related JP3003525B2 (en) 1994-10-03 1994-10-03 X-ray fluorescence analyzer

Country Status (1)

Country Link
JP (1) JP3003525B2 (en)

Also Published As

Publication number Publication date
JP3003525B2 (en) 2000-01-31

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