JPH0797681B2 - Continuously pumped Q-switched solid-state laser - Google Patents
Continuously pumped Q-switched solid-state laserInfo
- Publication number
- JPH0797681B2 JPH0797681B2 JP63149942A JP14994288A JPH0797681B2 JP H0797681 B2 JPH0797681 B2 JP H0797681B2 JP 63149942 A JP63149942 A JP 63149942A JP 14994288 A JP14994288 A JP 14994288A JP H0797681 B2 JPH0797681 B2 JP H0797681B2
- Authority
- JP
- Japan
- Prior art keywords
- switch
- oscillation
- laser
- state laser
- alarm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/1312—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/0915—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
- H01S3/092—Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は連続励起Ｑスイッチ発振固体レーザに関するも
のである。TECHNICAL FIELD The present invention relates to a continuously pumped Q-switched solid-state laser.
連続励起Ｑスイッチ発振固体レーザは，出力反射鏡と全
反射鏡の間に固体レーザ材料に直列にＱスイッチ素子を
設けたレーザ発振装置であって,Qスイッチパルスの尖頭
値が高く，またレーザのオン・オフ制御を高速で行える
ことから，レーザトリマ等の精密加工分野へ広く実用化
されている。A continuously pumped Q-switch oscillation solid-state laser is a laser oscillator in which a Q-switch element is provided in series between the output reflection mirror and the total reflection mirror in the solid-state laser material. Since it can perform on / off control at high speed, it is widely used in the field of precision machining such as laser trimmer.
上述した従来の連続励起Ｑスイッチレーザにおいては,Q
スイッチ素子およびこれを駆動するＱスイッチドライバ
ーの一方又は両方が動作不良となり,Qスイッチパルスの
出力が低下しても，これを検出する手段がないため,Qス
イッチ動作不良のまま使われていた。そのため加工に必
要なレーザ出力が得られず，加工不良が生じてはじめて
Ｑスイッチ動作不良であることが判明するという状態で
あった。In the conventional continuous pump Q-switched laser described above, Q
Even if one or both of the switch element and the Q switch driver that drives the switch malfunctions and the output of the Q switch pulse drops, there is no means to detect this, so the Q switch was used as it was. Therefore, the laser output required for processing cannot be obtained, and it is only after the processing failure occurs that the Q switch operation becomes defective.
したがって本発明はＱスイッチの動作の不良を検出でき
る連続励起Ｑスイッチ発振固体レーザ装置を提供しよう
とするものである。Therefore, the present invention is intended to provide a continuous pumped Q-switch oscillation solid-state laser device capable of detecting a malfunction of the Q-switch.
本発明はＱスイッチ素子またはＱスイッチドライバーの
不良によってＱスイッチOFF時のレーザ発振抑止能力が
低下した時に生ずる微弱レーザ光（もれ光という）を検
出し,Qスイッチ動作不良の警報を出すとともに，レーザ
発振を停止させるようにしたものである。The present invention detects a weak laser beam (referred to as stray light) generated when the laser oscillation suppressing ability when the Q switch is turned off is deteriorated due to a defect in the Q switch element or the Q switch driver, and issues an alarm of Q switch operation failure. The laser oscillation is stopped.
すなわち本発明の連続励起Ｑスイッチ発振固体レーザ装
置は、出力反射鏡と全反射鏡の間に固体レーザ材料及び
Ｑスイッチ素子が同軸に配置された連続励起Ｑスイッチ
発振レーザ装置において、前記全反射鏡の外側に同軸に
配置され、該全反射鏡を通しての漏洩レーザ光を検出す
るディテクタと、このディテクタの出力信号が所定の値
より大きくなると該レーザ装置の発振を停止させると共
に警報を発するアラーム手段と、前記Ｑスイッチ素子を
駆動するＱスイッチパルス発振時、前記アラーム手段の
機能を禁止させる禁止信号を出力するタイミング手段と
を有するＱスイッチ動作不良検出機構を付加し、該Ｑス
イッチ動作不良検出機構はＱスイッチパルス発振時には
Ｑスイッチ動作不良検出を行わないことを特徴とするも
のである。That is, the continuous pump Q-switch oscillation solid-state laser device of the present invention is a continuous-pump Q-switch oscillation laser device in which a solid-state laser material and a Q switch element are coaxially arranged between an output reflecting mirror and a total reflecting mirror. A detector arranged coaxially on the outside of the detector for detecting leaked laser light passing through the total reflection mirror; and an alarm means for stopping the oscillation of the laser device and issuing an alarm when the output signal of the detector exceeds a predetermined value. , A Q switch operation failure detection mechanism having timing means for outputting a prohibition signal for prohibiting the function of the alarm means at the time of Q switch pulse oscillation for driving the Q switch element. It is characterized in that the Q switch operation failure is not detected during Q switch pulse oscillation.
次に本発明について図面を参照して説明する。 Next, the present invention will be described with reference to the drawings.
第１図は本発明の一実施例の概略図であり，第２図は本
発明の装置の動作タイミングを示す図である。FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIG. 2 is a diagram showing operation timing of the apparatus of the present invention.
励起ランプ25で励起される固体レーザ材料12は，全反射
鏡11及び出力反射鏡14で構成されるレーザ共振器中にお
かれている。またＱスイッチ素子13も共振器中におか
れ，レーザ出力をパルス発振化している。全反射鏡11の
後方には光学アッテネータ26を置き，全反射鏡11からも
れがあったときこれを減衰させ，ディテクタ21に入射さ
せる。ディテクタ21の出力信号はオペアンプ22で増幅
し，ゲート回路24に入力する。A solid-state laser material 12 excited by an excitation lamp 25 is placed in a laser resonator composed of a total reflection mirror 11 and an output reflection mirror 14. The Q switch element 13 is also placed in the resonator to pulse the laser output. An optical attenuator 26 is placed in the rear of the total reflection mirror 11, and when there is leakage from the total reflection mirror 11, this is attenuated and made incident on the detector 21. The output signal of the detector 21 is amplified by the operational amplifier 22 and input to the gate circuit 24.
一方タイミング回路18にはＱスイッチドライバ15からの
パルス繰り返し信号ａが入力され，コンパレータ検出禁
止信号ｂを出力する。このコンパレータ検出禁止信号ｂ
はゲート回路24とコンパレータ20に入力し,Qスイッチパ
ルス発振時にはＱスイッチ動作不良検出を行わないよう
制御している。On the other hand, the timing circuit 18 receives the pulse repetition signal a from the Q switch driver 15 and outputs the comparator detection inhibition signal b. This comparator detection prohibition signal b
Is input to the gate circuit 24 and the comparator 20, and is controlled so that the Q switch operation failure detection is not performed during the Q switch pulse oscillation.
コンパレータ20はレベル調整器23でセットされたレベル
Ｅ以上の信号が入力した時にのみアラーム回路19に信号
ｄを出力する。アラーム回路19はコンパレータ回路20か
らの信号ｄをホールドし，出力信号ｅにより警報ブザー
17を鳴らし励起ランプ電源16を停止させる。The comparator 20 outputs the signal d to the alarm circuit 19 only when the signal of the level E or more set by the level adjuster 23 is input. The alarm circuit 19 holds the signal d from the comparator circuit 20 and outputs an alarm buzzer according to the output signal e.
Sound 17 and turn off the excitation lamp power supply 16.
第２図の横軸は時間を，縦軸は信号強度を相対的に表わ
したものである。Ｑスイッチ繰り返し信号ａは通常はハ
イレベルであって,Qスイッチパルス発生時間だけローレ
ベルになってパルスを発生させる。このＱスイッチ繰り
返し信号ａはパルス幅数μs,周期数百μｓ〜数msで使用
するのが適当である。The horizontal axis of FIG. 2 represents time, and the vertical axis represents signal intensity. The Q switch repetition signal a is normally at a high level, and becomes a low level for the Q switch pulse generation time to generate a pulse. It is appropriate to use the Q switch repetitive signal a with a pulse width of several μs and a period of several hundred μs to several ms.
検出禁止信号ｂはコンパレータ20のコンパレート動作を
行なわすか行なわせないかを制御する信号で,Qスイッチ
パルスｃが出力する時はローレベルとなってコンパレー
タ20を禁止する。したがってコンパレータレベル202よ
りもレベルの高いＱスイッチパルスでもコンパレータ回
路20は検出を行わない。Ｑスイッチ発振が終り，反転分
布のエネルギーがレーザ共振器の損失を越えもれ光が発
生するまでには数十μ秒の時間おくれがあるので，この
時間内にコンパレータを検出可能状態にする。The detection prohibition signal b is a signal for controlling whether the comparator 20 performs the comparator operation or not. When the Q switch pulse c is output, it becomes a low level to prohibit the comparator 20. Therefore, the comparator circuit 20 does not detect even a Q switch pulse whose level is higher than the comparator level 202. There is a delay of several tens of microseconds before the Q-switch oscillation ends and the energy of the population inversion exceeds the loss of the laser resonator and light is generated. Therefore, the comparator can be detected within this time.
コンパレータ20は，検出信号信号ｂがハイレベルとなる
コンパレート開始時間203から検出をはじめ，コンパレ
ートレベル202よりも出力の高いもれ光201があるとこれ
を検出し，出力ｄをハイレベルにする。アラーム出力ｅ
はコンパレート回路の出力ｄをホールドし出力する。The comparator 20 starts detection from the comparison start time 203 when the detection signal signal b becomes high level, detects the leak light 201 having an output higher than the comparison level 202, and sets the output d to the high level. To do. Alarm output e
Holds and outputs the output d of the comparator circuit.
以上説明したように本発明は,Qスイッチパルスの検出は
行うことなく,QスイッチOFF時にＱスイッチ動作不良に
より生じたもれ光だけを検出して警報を出すことができ
る。したがってこれを加工用レーザ装置に応用した場
合,Qスイッチ動作不良による加工不良を未然にふせぐこ
とができる効果がある。As described above, according to the present invention, the Q switch pulse is not detected, and only the leakage light generated by the Q switch operation failure when the Q switch is OFF can be detected and an alarm can be issued. Therefore, when this is applied to a laser device for processing, there is an effect that processing defects due to defective Q switch operation can be prevented.
第１図は本発明の構成を示すブロック図，第２図は第１
図の装置の動作のタイミングをあらわす図である。 記号の説明:11は全反射鏡,12は固体レーザ材料,13はＱ
スイッチ素子,14は出力反射鏡,15はＱスイッチドライ
バ,16は励起ランプ電源,17は警報ブザー,18はタイミン
グ回路,19はアラーム回路,20はコンパレータ,21はディ
テクタ,22はオペアンプ,23はレベル調整器,24はゲート
回路,25は励起ランプ,26は光学アッテネータ,27はＱス
イッチ動作不良検出器,201はもれ光をそれぞれあらわし
ている。FIG. 1 is a block diagram showing the structure of the present invention, and FIG.
It is a figure showing the timing of operation | movement of the apparatus of the figure. Explanation of symbols: 11 is a total reflection mirror, 12 is a solid-state laser material, 13 is Q
Switch element, 14 output reflector, 15 Q switch driver, 16 excitation lamp power supply, 17 alarm buzzer, 18 timing circuit, 19 alarm circuit, 20 alarm circuit, 20 comparator, 21 detector, 22 operational amplifier, 23 is A level adjuster, 24 is a gate circuit, 25 is an excitation lamp, 26 is an optical attenuator, 27 is a Q switch malfunction detector, and 201 is a leak light.
Claims (1)
料及びＱスイッチ素子が同軸に配置された連続励起Ｑス
イッチ発振レーザ装置において、前記全反射鏡の外側に
同軸に配置され、該全反射鏡を通しての漏洩レーザ光を
検出するディテクタと、このディテクタの出力信号が所
定の値より大きくなると該レーザ装置の発振を停止させ
ると共に警報を発するアラーム手段と、前記Ｑスイッチ
素子を駆動するＱスイッチパルス発振時、前記アラーム
手段の機能を禁止させる禁止信号を出力するタイミング
手段とを有するＱスイッチ動作不良検出機構を付加し、
該Ｑスイッチ動作不良検出機構はＱスイッチパルス発振
時にはＱスイッチ動作不良検出を行わないことを特徴と
する連続励起Ｑスイッチ発振固体レーザ。1. A continuously pumped Q-switch oscillation laser device in which a solid-state laser material and a Q switch element are coaxially arranged between an output reflecting mirror and total reflection, and the continuous pumping Q-switch oscillation laser device is coaxially arranged outside the total reflecting mirror. A detector for detecting a laser beam leaked through the total reflection mirror, an alarm means for stopping the oscillation of the laser device and issuing an alarm when the output signal of the detector exceeds a predetermined value, and a Q for driving the Q switch element. A Q switch operation failure detection mechanism having a timing means for outputting a prohibition signal for prohibiting the function of the alarm means during switch pulse oscillation is added,
The continuous pumped Q-switch oscillation solid-state laser characterized in that the Q-switch malfunction detection mechanism does not detect Q-switch malfunction during Q-switch pulse oscillation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149942A JPH0797681B2 (en) | 1988-06-20 | 1988-06-20 | Continuously pumped Q-switched solid-state laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63149942A JPH0797681B2 (en) | 1988-06-20 | 1988-06-20 | Continuously pumped Q-switched solid-state laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH023295A JPH023295A (en) | 1990-01-08 |
| JPH0797681B2 true JPH0797681B2 (en) | 1995-10-18 |
Family
ID=15485941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63149942A Expired - Lifetime JPH0797681B2 (en) | 1988-06-20 | 1988-06-20 | Continuously pumped Q-switched solid-state laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0797681B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9327347B2 (en) | 2008-03-05 | 2016-05-03 | Southwire Company, Llc | Niobium as a protective barrier in molten metals |
| US9528167B2 (en) | 2013-11-18 | 2016-12-27 | Southwire Company, Llc | Ultrasonic probes with gas outlets for degassing of molten metals |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49149681U (en) * | 1973-04-25 | 1974-12-25 |
-
1988
- 1988-06-20 JP JP63149942A patent/JPH0797681B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9327347B2 (en) | 2008-03-05 | 2016-05-03 | Southwire Company, Llc | Niobium as a protective barrier in molten metals |
| US9528167B2 (en) | 2013-11-18 | 2016-12-27 | Southwire Company, Llc | Ultrasonic probes with gas outlets for degassing of molten metals |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH023295A (en) | 1990-01-08 |
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