JPH0794811A - Semiconductor laser exciting solid-state laser apparatus - Google Patents

Semiconductor laser exciting solid-state laser apparatus

Info

Publication number
JPH0794811A
JPH0794811A JP23636593A JP23636593A JPH0794811A JP H0794811 A JPH0794811 A JP H0794811A JP 23636593 A JP23636593 A JP 23636593A JP 23636593 A JP23636593 A JP 23636593A JP H0794811 A JPH0794811 A JP H0794811A
Authority
JP
Japan
Prior art keywords
solid
state laser
rod
output
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP23636593A
Other languages
Japanese (ja)
Inventor
Masahiro Kuroda
雅博 黒田
Shohei Noda
松平 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP23636593A priority Critical patent/JPH0794811A/en
Publication of JPH0794811A publication Critical patent/JPH0794811A/en
Withdrawn legal-status Critical Current

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  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To enable an increase in the number of semiconductor lasers and also enable an improvement in output of LD exciting solid-state laser apparatus. CONSTITUTION:Since laser resonators are formed in such a number corresponding to the number of microspherical surfaces 15 by forming a plurality of recessed microspherical surfaces 15 at the surface, opposed to the other end surface 8a of a rod 7, of an output mirror 14 arranged in the side of the other end surface 8a of a solid-state laser rod 7 for inputting the LD beam 4 for excitation to the one end surface 8, the oscillation region 9 in the solid-state laser rod 7 can be spread. Therefore, the number of LD beams 4 for excitation can be increased and a remarkable improvement of output of the LD exciting solid-state laser apparatus can also be realized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体レーザ励起固体
レーザ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser pumped solid state laser device.

【0002】[0002]

【従来の技術】従来の半導体レーザ(Laser-Diode ;以
下LDと略す)励起固体レーザ装置の光学配置を図2に
示す。図2に示す光学配置は、ファイババンドル端面励
起方式と呼ばれている配置である。図2に示す従来の装
置の動作について説明すると、1の励起用LDより出射
されたレーザ光は、光ファイバ2を経由して外部に放射
される。
2. Description of the Related Art An optical arrangement of a conventional semiconductor laser (Laser-Diode; hereinafter abbreviated as LD) pumped solid-state laser device is shown in FIG. The optical arrangement shown in FIG. 2 is an arrangement called a fiber bundle end face excitation system. The operation of the conventional device shown in FIG. 2 will be described. The laser light emitted from one pumping LD is radiated to the outside via the optical fiber 2.

【0003】光ファイバ2はその先端をバンドルファイ
バ3化されており、それより放射されるLD光4はコリ
メートレンズ5により平行光化され集光レンズ6により
集光された後、レーザ媒質である固体レーザロッド7の
端面8より固体レーザ発振領域9内に入射される。
The end of the optical fiber 2 is formed into a bundle fiber 3, and the LD light 4 emitted from the optical fiber 2 is collimated by a collimator lens 5 and condensed by a condenser lens 6 to form a laser medium. The light is incident on the solid-state laser oscillation region 9 from the end face 8 of the solid-state laser rod 7.

【0004】レーザロッド7の端面8には、LD光4を
良く透過し、固体レーザ発振光10を反射するコーティ
ングが施してある。一方、凹面鏡11の凹面12側には
固体レーザ発振光10を殆ど(90〜99%)反射し、
わずかに(1〜10%)透過するようなコーティングが
施してある。
The end face 8 of the laser rod 7 is provided with a coating that transmits the LD light 4 well and reflects the solid-state laser oscillation light 10. On the other hand, most (90 to 99%) of the solid-state laser oscillation light 10 is reflected on the concave surface 12 side of the concave mirror 11,
The coating is slightly (1-10%) transparent.

【0005】レーザロッド7の端面8と凹面鏡11の凹
面12はその中心軸が一致しており、レーザ共振器を構
成している。LD光4によって励起された固体レーザ発
振光10は上記共振器にて増幅され、その一部が出力光
13となって凹面積11より出射される。
The central axes of the end surface 8 of the laser rod 7 and the concave surface 12 of the concave mirror 11 coincide with each other and constitute a laser resonator. The solid-state laser oscillation light 10 excited by the LD light 4 is amplified by the resonator, and a part thereof becomes the output light 13 and is emitted from the concave area 11.

【0006】一般に、LD励起固体レーザ装置は、従来
の希ガス放電ランプ励起固体レーザ装置に比べて、高発
振効率(出力パワー/励起光パワー)という特長を持っ
ているが、これについては2つの理由がある。1つはL
Dの発振波長が単一であるため、それをレーザロッドの
吸収波長帯に一致させることにより、吸収率が良好とな
ることから来ている。
Generally, the LD pumped solid-state laser device has a characteristic of high oscillation efficiency (output power / pumping light power) as compared with the conventional rare gas discharge lamp pumped solid-state laser device. There is a reason. One is L
This is because the oscillation wavelength of D is single, and by making it coincide with the absorption wavelength band of the laser rod, the absorption rate is improved.

【0007】他の1つは、LDの光源の大きさが従来の
希ガス放電ランプに比べて小さいこと(1mm2 以下)及
び拡がり角が小さいことにより、それをレンズ等で集光
し、固体レーザの発振領域に集中して注入することがで
き、励起光と固体レーザの発振領域との空間的整合が非
常に良好だからである。この高い空間的整合は高品質出
力ビーム(シングルモールド)が得られるという別の特
長ももたらす。
The other one is that the size of the light source of the LD is smaller than that of the conventional rare gas discharge lamp (1 mm 2 or less) and the divergence angle is small. This is because the light can be concentrated and injected into the oscillation region of the laser, and the spatial matching between the excitation light and the oscillation region of the solid-state laser is very good. This high spatial alignment has the additional benefit of providing a high quality output beam (single mold).

【0008】このように、LD励起固体レーザ装置は優
れたものであるが、出力が従来の固体レーザに比べて小
さいという欠点を持っていた。それは励起用LDの出力
が単体で数ワット程度と小さいため、高効率で発振して
も、絶対出力では従来のランプ励起に遠く及ばないこと
による。ちなみに、ランプ出力は、最大級では数キロワ
ット以上であり、発振効率は半導体レーザ励起の1/1
0以下と低いが絶対出力ははるかに大きい。
As described above, the LD-pumped solid-state laser device is excellent, but has a drawback that the output is smaller than that of the conventional solid-state laser. This is because the output of the pumping LD is as small as about several watts, and even if it oscillates with high efficiency, the absolute output is far short of the conventional lamp pumping. By the way, the lamp output is several kilowatts or more at the maximum level, and the oscillation efficiency is 1/1 of that of semiconductor laser excitation.
It is as low as 0 or less, but the absolute output is much larger.

【0009】このため、複数のLDによる励起が必要と
なり、図2に示すように複数の励起用LD1にそれぞれ
光ファイバ2を接続し、それぞれの光ファイバ2の先端
よりレンズ5,6を介してLD光4を固体レーザロッド
7の端面8に照射していた。
Therefore, pumping by a plurality of LDs is required. As shown in FIG. 2, the optical fibers 2 are connected to the pumping LDs 1, respectively, and the tips of the optical fibers 2 are connected via lenses 5 and 6. The end face 8 of the solid-state laser rod 7 was irradiated with the LD light 4.

【0010】[0010]

【発明が解決しようとする課題】従来のファイババンド
ル端面励起方式のLD励起固体レーザ装置においては、
複数のLDによる励起が可能となり、出力を向上させる
ことができたが、なお、次の課題があった。
In the conventional LD pumped solid state laser device of the end face pumping type of fiber bundle,
Although it was possible to excite with a plurality of LDs and the output could be improved, there were still the following problems.

【0011】即ち、固体レーザの出力を増加するには、
LDの数を多くしなければならない。しかし、LDの数
が増すとバンドル端面の面積が大きくなるため、集光レ
ンズ6によって絞られた励起レーザビーム径が太くな
る。このビーム径が太くなると、固体レーザの発振ビー
ム径より大きくなるため、固体レーザの発振領域との空
間的整合が悪くなり、発振効率が低下する。
That is, in order to increase the output of the solid-state laser,
The number of LDs should be increased. However, as the number of LDs increases, the area of the end face of the bundle increases, so the diameter of the excitation laser beam narrowed down by the condenser lens 6 increases. When the beam diameter becomes thicker, the beam diameter becomes larger than the oscillation beam diameter of the solid-state laser, so that the spatial matching with the oscillation region of the solid-state laser deteriorates and the oscillation efficiency decreases.

【0012】通常、固体レーザの発振ビーム径は500
μm以下であり、光ファイバの径も同程度であるため、
従来の装置の場合、LDの数は10個程度が限度であっ
た。このため、固体レーザの出力はこれ以上向上できな
かった。本発明は上記の課題を解決しようとするもので
ある。
Usually, the oscillation beam diameter of a solid-state laser is 500
Since it is less than μm and the diameter of the optical fiber is similar,
In the case of the conventional device, the number of LDs was limited to about 10. Therefore, the output of the solid-state laser could not be improved any further. The present invention is intended to solve the above problems.

【0013】[0013]

【課題を解決するための手段】本発明のLD励起固体レ
ーザ装置は、LD光を固体レーザロッドに入射すること
により同ロッドを励起し、レーザ発振を行うLD励起固
体レーザ装置において、出力ミラーとして上記ロッドに
対向する複数の凹面の微小球面を並べて一体に形成した
出力ミラーを用いてなることを特徴としている。
The LD-pumped solid-state laser device of the present invention serves as an output mirror in an LD-pumped solid-state laser device that oscillates a laser by exciting the solid-state laser rod by injecting LD light into the solid-state laser rod. It is characterized by using an output mirror integrally formed by arranging a plurality of concave minute spherical surfaces facing the rod.

【0014】[0014]

【作用】上記においては、出力ミラーの微小球面の数に
対応する数のレーザ共振器が形成されるため、固体レー
ザロッド内発振領域は広がり、同ロッド内にLD光を入
射すると、上記微小球面の数に対応する数の固体レーザ
発振光を発生させることができる。
In the above, since the number of laser resonators corresponding to the number of microspheres of the output mirror is formed, the oscillation region in the solid-state laser rod expands, and when LD light enters the rod, the microspheres are formed. It is possible to generate the number of solid-state laser oscillation lights corresponding to the number.

【0015】本発明においては、上記のように、従来の
装置に比べて固体レーザロッド内の発振領域が広がるた
め、励起用のLD光の数を増加させることができ、LD
励起固体レーザ装置の大幅な出力向上が可能となる。
In the present invention, as described above, since the oscillation region in the solid-state laser rod is expanded as compared with the conventional device, it is possible to increase the number of LD light for excitation.
It is possible to significantly improve the output of the pumped solid-state laser device.

【0016】[0016]

【実施例】本発明の一実施例のLD励起固体レーザ装置
を図1(a),(b)に示す。図1(a),(b)に示
す本実施例は、LD光4を出射する複数の励起用LD
1、同それぞれの励起用LD1に一端が接続され同励起
用LD1より入射したLD光4を出射する他端にバンド
ルファイバ3が形成された光ファイバ2、および同光フ
ァイバ2より出射されたLD光4をコリメートレンズ5
及び集光レンズ6を介してその一端面8より入射する固
体レーザロッド7を備えたLD励起固体レーザ装置にお
いて、上記固体レーザロッド7の反集合レンズ6側に設
けられ同固体レーザロッド7の他端面8aと対向する面
に複数の凹面の微小球面15が設けられた出力ミラー1
4を備えている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An LD pumped solid state laser device according to an embodiment of the present invention is shown in FIGS. This embodiment shown in FIGS. 1A and 1B is a plurality of pumping LDs that emit LD light 4.
1, an optical fiber 2 having one end connected to each of the pumping LDs 1 and an LD light 4 emitted from the pumping LD 1 having a bundle fiber 3 formed at the other end, and an LD emitted from the optical fiber 2 Collimating lens 5 with light 4
And an LD pumped solid-state laser device provided with a solid-state laser rod 7 which is incident from one end face 8 thereof via a condenser lens 6, in addition to the solid-state laser rod 7 provided on the anti-collection lens 6 side of the solid-state laser rod 7. Output mirror 1 having a plurality of concave minute spherical surfaces 15 provided on the surface facing the end surface 8a
It is equipped with 4.

【0017】上記において、出力ミラー14の面に設け
られたそれぞれの微小球面15は、その中心軸が固体レ
ーザロッド7のLD光4の入射側端面8に垂直であり、
それぞれレーザ共振器を形成しているため、固体レーザ
発振光10の数は微小球面と同じ数だけあり、固体レー
ザロッド7内の全額域がほとんど発振領域9となる。
In the above description, each of the minute spherical surfaces 15 provided on the surface of the output mirror 14 has its central axis perpendicular to the incident side end surface 8 of the LD light 4 of the solid-state laser rod 7.
Since the respective laser resonators are formed, the number of the solid-state laser oscillation lights 10 is the same as the number of microspheres, and the entire forehead region in the solid-state laser rod 7 is almost the oscillation region 9.

【0018】そのため、従来の装置と同様に励起用LD
1より出射されたLD光4が光ファイバ2を経由して端
面8より固体レーザロッド7内に入射すると、複数の固
体レーザ発振光10が発振し、その一部が出力光13と
なって出力ミラー14より出射される。
Therefore, as in the conventional device, the exciting LD is used.
When the LD light 4 emitted from No. 1 enters the solid-state laser rod 7 from the end face 8 via the optical fiber 2, a plurality of solid-state laser oscillation lights 10 oscillate, and a part thereof becomes the output light 13 and is output. It is emitted from the mirror 14.

【0019】上記のように、固体レーザロッド内のほぼ
全領域が発振領域となり、従来の装置に比べてその断面
積が増加し、励起可能なLDの数を増大させることがで
きるため、レーザ出力がそれに比例して向上する。例え
ば、ロッド径を5mm程度とすると、微小球面の径は1mm
あれば十分であり、10数本の発振ビームが形成可能と
なるため、出力も10数倍となる。
As described above, almost the entire region within the solid-state laser rod becomes the oscillation region, its cross-sectional area is increased and the number of pumpable LDs can be increased as compared with the conventional device, so that the laser output is increased. Is proportionally improved. For example, if the rod diameter is about 5 mm, the diameter of the microsphere is 1 mm.
This is sufficient, and more than 10 oscillating beams can be formed, so that the output is increased by 10 times.

【0020】[0020]

【発明の効果】本発明のLD励起固体レーザ装置は、一
端面に励起用LD光を入射する固体レーザロッドの他端
面側に配設された出力ミラーの、上記ロッドの他端面と
対向する面に複数の凹面の微小球面を形成したことによ
って、上記微小球面数に対応する数のレーザ共振器が形
成されるため、固体レーザロッド内の発振領域が広が
り、励起用のLD光の数を増加させることができ、LD
励起固体レーザ装置の大幅な出力向上が可能となる。
According to the LD pumped solid-state laser device of the present invention, the surface of the output mirror disposed on the other end surface side of the solid-state laser rod which enters the LD light for pumping into one end surface, faces the other end surface of the rod. By forming a plurality of concave microspheres in the laser cavity, the number of laser resonators corresponding to the number of microspheres is formed, so that the oscillation region in the solid-state laser rod is expanded and the number of LD light for excitation is increased. Can be LD
It is possible to significantly improve the output of the pumped solid-state laser device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係るLD励起固体レーザ装
置の説明図で、(a)は平面図、(b)は(a)のA−
A矢視図である。
FIG. 1 is an explanatory view of an LD-pumped solid-state laser device according to an embodiment of the present invention, in which (a) is a plan view and (b) is A- in (a).
FIG.

【図2】従来の半導体レーザ励起固体レーザ装置の説明
図で、(a)は平面図、(b)は(a)のB−B矢視図
である。
2A and 2B are explanatory views of a conventional semiconductor laser pumped solid-state laser device, FIG. 2A is a plan view, and FIG. 2B is a view taken along the line BB of FIG.

【符号の説明】[Explanation of symbols]

1 LD 2 光ファイバ 3 バンドルファイバ 5 コリメートレンズ 6 集光レンズ 7 固体レーザロッド 8,8a 端面 14 出力ミラー 15 微小球面 1 LD 2 Optical fiber 3 Bundle fiber 5 Collimating lens 6 Condensing lens 7 Solid-state laser rod 8, 8a End surface 14 Output mirror 15 Micro spherical surface

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 半導体レーザ光を固体レーザロッドに入
射することにより同ロッドを励起し、レーザ発振を行う
半導体レーザ励起固体レーザ装置において、出力ミラー
として上記ロッドに対向する複数の凹面の微小球面を並
べて一体に形成した出力ミラーを用いてなることを特徴
とする半導体レーザ励起固体レーザ装置。
1. In a semiconductor laser pumped solid-state laser device that excites a solid-state laser rod by injecting the semiconductor laser light into the rod to oscillate the solid-state laser rod, a plurality of concave microspheres facing the rod are used as output mirrors. A semiconductor laser pumped solid-state laser device comprising an output mirror integrally formed side by side.
JP23636593A 1993-09-22 1993-09-22 Semiconductor laser exciting solid-state laser apparatus Withdrawn JPH0794811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23636593A JPH0794811A (en) 1993-09-22 1993-09-22 Semiconductor laser exciting solid-state laser apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23636593A JPH0794811A (en) 1993-09-22 1993-09-22 Semiconductor laser exciting solid-state laser apparatus

Publications (1)

Publication Number Publication Date
JPH0794811A true JPH0794811A (en) 1995-04-07

Family

ID=16999721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23636593A Withdrawn JPH0794811A (en) 1993-09-22 1993-09-22 Semiconductor laser exciting solid-state laser apparatus

Country Status (1)

Country Link
JP (1) JPH0794811A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000012933A (en) * 1998-06-23 2000-01-14 Mitsubishi Electric Corp Laser apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000012933A (en) * 1998-06-23 2000-01-14 Mitsubishi Electric Corp Laser apparatus

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