JPH0794796A - Multilayered electrostrictive/piezoelectric device - Google Patents
Multilayered electrostrictive/piezoelectric deviceInfo
- Publication number
- JPH0794796A JPH0794796A JP5261594A JP26159493A JPH0794796A JP H0794796 A JPH0794796 A JP H0794796A JP 5261594 A JP5261594 A JP 5261594A JP 26159493 A JP26159493 A JP 26159493A JP H0794796 A JPH0794796 A JP H0794796A
- Authority
- JP
- Japan
- Prior art keywords
- via connection
- electrodes
- electrostrictive
- external terminal
- inner electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000694 effects Effects 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 10
- 230000001747 exhibiting effect Effects 0.000 claims description 8
- 230000002950 deficient Effects 0.000 abstract description 7
- 238000003475 lamination Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、ビア接続構造を有する
積層型電歪/圧電素子に関し、更に詳しく述べると、同
極の内部電極をビア接続する毎にビア接続部の位置を変
えて、内部電極を経由して導通を図ると共に、積層方向
両端に設けた外部端子電極に接続することにより、ビア
接続の良否を電気的な導通で検査可能とした積層型電歪
/圧電素子に関するものである。この素子は、例えばド
ットプリンタの印字用、精密機器の位置決め用などのア
クチュエータとして有用である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated electrostrictive / piezoelectric element having a via connection structure. More specifically, the position of the via connection portion is changed every time an internal electrode of the same polarity is connected to the via. The present invention relates to a laminated electrostrictive / piezoelectric element capable of inspecting the quality of via connection by electrical continuity by connecting to external terminal electrodes provided at both ends in the stacking direction while achieving electrical continuity via internal electrodes. is there. This element is useful as an actuator for, for example, printing of a dot printer and positioning of precision equipment.
【0002】[0002]
【従来の技術】積層型の電歪/圧電素子は従来公知であ
る。これは、多数の電歪/圧電効果を示す材料層が内部
電極を介して積層されており、多数の内部電極を一層お
きに交互に接続し、それによる2種類の内部電極群をそ
れぞれ対応する外部端子電極に接続する構造である。従
って外部端子電極は2箇所形成されたコンデンサと同様
の構成である。従来、内部電極同士を電気的に接続する
ための様々な技術が開発されているが、その一つにビア
接続構造がある。ビア接続構造は、内部電極を印刷した
セラミックスのグリーンシート(未焼結シート)を積層
する際に、該グリーンシートにビア穴と呼ばれる貫通穴
を設け、その貫通穴内部に金属粉(実際には銀粒子等の
金属粉と有機バインダを混ぜ合わせた導電ペースト)を
充填しておき、積層一体化した後に焼結することによ
り、ビア穴内の金属材によって層間の電気的接続を図る
技術である。2. Description of the Related Art Laminated electrostrictive / piezoelectric elements have been publicly known. This is because a large number of material layers exhibiting an electrostrictive / piezoelectric effect are stacked via internal electrodes, and a large number of internal electrodes are alternately connected to each other, and two types of internal electrode groups corresponding thereto are respectively corresponded. This structure is connected to an external terminal electrode. Therefore, the external terminal electrode has the same structure as the capacitor formed at two locations. Conventionally, various techniques for electrically connecting internal electrodes have been developed, and one of them is a via connection structure. In the via connection structure, when ceramic green sheets (unsintered sheets) on which internal electrodes are printed are laminated, through holes called via holes are provided in the green sheets, and metal powder (actually This is a technique in which a conductive paste obtained by mixing metal powder such as silver particles and an organic binder is filled, laminated and integrated, and then sintered to achieve electrical connection between layers by the metal material in the via hole.
【0003】通常、ビア接続部は1枚のグリーンシート
の2箇所に設けられ、その一方は内部電極に接続し、他
方は逃げによって内部電極に接続しないようになってい
て、それを交互に配置して2本のビア接続部がそれぞれ
積層方向に連続するような構造にする。図4及び図5に
その一例を示す。図4は積層体の横断面(図5のY1−
Y2 位置での断面)を表し、図5は積層体の縦断面を表
している。素子本体部分10では、電歪/圧電効果を示
す材料層12が内部電極14を介して多数積層されてお
り、2箇所のビア接続部16によって各内部電極14の
間を1層おきに電気的に接続すると共に、このようにし
て1層おきに接続して同極となる内部電極群を対応する
外部端子電極18に接続した構成である。なお素子本体
部分10の上下両端に位置するのはダミー部(内部電極
を挾んでいない積層体)20であり、ここでは下端のダ
ミー部の側面に1対の外部端子電極18を設けている。
なお図4において、符号15で示すリング状の部分が逃
げ(ビア接続部と内部電極とが接続しないように電極材
が無い部分)である。また図4の左側のビア接続部を点
線で描いているのは、表面の内部電極と接続されて一体
になっているためである。Usually, via connection portions are provided at two locations on a single green sheet, one of which is connected to an internal electrode and the other of which is not connected to the internal electrode due to escape, and they are arranged alternately. Then, the structure is such that the two via connection portions are continuous in the stacking direction. An example thereof is shown in FIGS. 4 and 5. FIG. 4 shows a cross section of the laminated body (Y 1-
The cross section at the Y 2 position) is shown in FIG. 5, and FIG. In the element body portion 10, a large number of material layers 12 exhibiting an electrostrictive / piezoelectric effect are stacked via the internal electrodes 14, and two via connection portions 16 electrically connect the internal electrodes 14 to each other every other layer. In addition, the internal electrode groups having the same polarity by connecting every other layer in this manner are connected to the corresponding external terminal electrodes 18. At the upper and lower ends of the element body portion 10 are dummy portions (a laminated body in which the internal electrodes are not sandwiched) 20. Here, a pair of external terminal electrodes 18 are provided on the side surfaces of the dummy portion at the lower end.
In FIG. 4, a ring-shaped portion indicated by reference numeral 15 is a relief (a portion without an electrode material so that the via connection portion and the internal electrode are not connected). The via connection portion on the left side of FIG. 4 is drawn with a dotted line because it is connected to the internal electrode on the surface and is integrated.
【0004】この構造の積層型電歪/圧電素子は、一体
焼結されており、一対の外部端子電極18の間に電圧を
印加することにより、内部電極で挾まれた内部の固体
(電歪/圧電効果を示す材料)の部分に急激な変位が生
じ、アクチュエータとして機能することになる。The laminated electrostrictive / piezoelectric element of this structure is integrally sintered, and when a voltage is applied between the pair of external terminal electrodes 18, an internal solid (electrostrictive element sandwiched by the internal electrodes is formed). / Material exhibiting piezoelectric effect) causes abrupt displacement, and functions as an actuator.
【0005】また上記のようにビア接続部を積層方向に
沿って一直線状に配設するのではなく、積層方向から見
て全体として均一に分布するように異なる位置に形成す
ることにより、不活性領域(逃げの部分及びビア接続
部、即ち電歪/圧電効果を生じない領域)を均一に分散
させて応力を緩和させる技術も提案されている(特開平
2−79482号公報参照)。In addition, the via connection portions are not arranged in a straight line along the stacking direction as described above, but are formed at different positions so as to be uniformly distributed as a whole when viewed from the stacking direction. A technique has also been proposed in which regions (relief portions and via connection portions, that is, regions where electrostriction / piezoelectric effect is not generated) are uniformly dispersed to relax stress (see Japanese Patent Laid-Open No. 2-79482).
【0006】[0006]
【発明が解決しようとする課題】このような一体焼結構
造の積層型電歪/圧電素子は、電歪/圧電効果を示す材
料層12を非常に薄くできるため、低電圧駆動が可能と
なり、小型化しうる利点がある。しかし、ビア接続によ
る内部電極間の電気的接続の確実性の点に関しては問題
がある。通常、焼結時におけるビア接続部と電歪/圧電
効果を示す材料との収縮率は異なり、ビア接続部の収縮
率の方が小さいため、ビア接続部はビア穴径よりも細く
なるからである。この結果、ビア接続部と内部電極との
間で接続不良が生じることがある。その様子を模式的に
図6に示す。断面Z1 −Z2 の部分では、内部電極とビ
ア接続部との電気的導通がとれていない。また甚だしい
場合には、ビア接続部が局所的に細って、破断する状態
も起こり得る。In such a laminated type electrostrictive / piezoelectric element having an integral sintered structure, the material layer 12 exhibiting the electrostrictive / piezoelectric effect can be made very thin, so that low voltage driving becomes possible, There is an advantage that it can be miniaturized. However, there is a problem in terms of reliability of electrical connection between internal electrodes by via connection. Usually, the contraction rate of the via connection part and the material exhibiting the electrostrictive / piezoelectric effect during sintering is different, and the contraction rate of the via connection part is smaller, so the via connection part becomes thinner than the via hole diameter. is there. As a result, poor connection may occur between the via connection portion and the internal electrode. This is schematically shown in FIG. In the portion of the cross section Z 1 -Z 2 , the internal electrodes are not electrically connected to the via connection portion. Further, in extreme cases, the via connection portion may be locally thinned and broken.
【0007】ところが従来構造では、ビア接続部の破断
が生じたり、またビア接続部と内部電極との導通が無い
場合、外部からこれを明確に検知できなかった。このよ
うな接続不良箇所の検査方法として、外部端子電極間の
静電容量を計測する方法があるが、接続不良箇所の位置
や数によっては、完全に接続されているか否かを正確に
は検出できない。そして、そのような接続不良箇所があ
ると、装置に組み込んだときに所望の電歪/圧電効果が
得られないことになる。However, in the conventional structure, when the via connecting portion is broken or there is no conduction between the via connecting portion and the internal electrode, this cannot be clearly detected from the outside. There is a method of measuring the capacitance between external terminal electrodes as a method of inspecting such a connection failure point, but depending on the position and number of connection failure points, it is possible to accurately detect whether or not they are completely connected. Can not. Then, if there is such a defective connection portion, a desired electrostrictive / piezoelectric effect cannot be obtained when it is incorporated into the device.
【0008】本発明の目的は、ビア接続部の破断の有
無、ビア接続部と内部電極との間の接続不良の有無を完
全に且つ簡単に検出できるような構造の積層型電歪/圧
電素子を提供することである。An object of the present invention is to provide a laminated electrostrictive / piezoelectric element having a structure capable of completely and easily detecting the presence or absence of breakage of the via connection portion and the presence or absence of connection failure between the via connection portion and the internal electrode. Is to provide.
【0009】[0009]
【課題を解決するための手段】本発明は、多数の電歪/
圧電効果を示す材料層が内部電極を介して積層され、そ
の各内部電極を1層おきにビア接続部により電気的に接
続すると共に、1層おきに接続した同極となる内部電極
群を対応する外部端子電極に接続した構造の積層型電歪
/圧電素子である。ここで本発明では、内部電極間をビ
ア接続する毎にビア接続部の位置をずらして必ず内部電
極を経由して接続されるようにし、且つ積層方向の両端
部にそれぞれ1対の外部端子電極を配置して、同極とな
る内部電極群を積層方向の両端部にそれぞれ位置し対応
する外部端子電極に接続するように構成されている。The present invention provides a number of electrostrictive /
Material layers exhibiting a piezoelectric effect are laminated via internal electrodes, and each internal electrode is electrically connected to every other layer by a via connection part, and also corresponds to internal electrode groups of the same polarity connected to every other layer. Is a laminated electrostrictive / piezoelectric element having a structure connected to an external terminal electrode. Here, in the present invention, every time the internal electrodes are via-connected, the position of the via connecting portion is shifted so that the via electrodes are always connected via the internal electrodes, and a pair of external terminal electrodes is provided at both ends in the stacking direction. Are arranged to connect the internal electrode groups having the same polarity to the corresponding external terminal electrodes located at both ends in the stacking direction.
【0010】[0010]
【作用】積層型電歪/圧電素子の各内部電極は、外部端
子電極からビア接続部を通して1層おきに接続されてい
るが、内部電極間を接続する毎にビア接続部の位置がず
れていて、各ビア接続部は必ず内部電極を経由するよう
に導通をとっている。そして同極となる内部電極群は、
積層方向の両端部の外部端子電極に接続されているの
で、良品であれば、対応する両外部端子電極間で必ず導
通がある。従って、同極の一対の外部端子電極間の導通
チェックを行うことのみにより、ビア接続部の破断の有
無、及びビア接続部と内部電極との間の電気的接続の良
否を即座に且つ確実に検知することができる。The internal electrodes of the laminated electrostrictive / piezoelectric element are connected from the external terminal electrodes through the via connecting portions every other layer, but the positions of the via connecting portions are displaced each time the internal electrodes are connected. Therefore, each via connection portion is electrically connected so as to always pass through the internal electrode. And the internal electrode group that has the same polarity is
Since they are connected to the external terminal electrodes at both ends in the stacking direction, if they are non-defective, there is always continuity between the corresponding external terminal electrodes. Therefore, only by conducting a continuity check between a pair of external terminal electrodes of the same polarity, the presence or absence of breakage of the via connection part and the quality of the electrical connection between the via connection part and the internal electrode can be immediately and surely confirmed. Can be detected.
【0011】[0011]
【実施例】図1は本発明に係る積層型電歪/圧電素子の
一実施例を示す素子本体部分の分解斜視図であり、図2
は横断面(図3のX1 −X2 位置)図、図3はそのA−
F位置での縦断面の展開図である。基本的な構成は、前
記の従来のものと類似している。素子本体部30では、
電歪/圧電効果を示す材料層32が内部電極34を介し
て多数積層されており、ビア接続部36により各内部電
極間を1層おきに電気的に接続すると共に、各内部電極
34を1層おきに共通の外部端子電極38に接続した構
成である。なお上下両端部にはダミー部(内部電極を挾
んでいない部分)40を設けている。なお、符号35は
内部電極とビア接続部とが接続されないようにするため
の逃げである。1 is an exploded perspective view of an element body showing an embodiment of a laminated electrostrictive / piezoelectric element according to the present invention.
Is a cross-sectional view (position X 1 -X 2 in FIG. 3), and FIG.
It is a development view of a vertical section in the F position. The basic structure is similar to the above-mentioned conventional one. In the element body 30,
A large number of material layers 32 exhibiting an electrostrictive / piezoelectric effect are laminated via internal electrodes 34, and the internal electrodes are electrically connected every other layer by the via connection portion 36, and each internal electrode 34 is electrically connected. The structure is such that every other layer is connected to a common external terminal electrode 38. Dummy portions (portions not sandwiching the internal electrodes) 40 are provided at both upper and lower ends. Reference numeral 35 is a relief for preventing the internal electrode and the via connecting portion from being connected.
【0012】さて本発明では、積層方向に見て、4箇所
にビア接続部が形成されている。そのうち2箇所ずつが
同極となる。各内部電極34は、電歪/圧電効果を有す
る材料の層32の1層おきに異極接続されるのである
が、層間接続毎にビア接続部の位置がずれるように(ジ
グザグ配置)し、各ビア接続部36は必ず内部電極34
を通して接続をとるように構成している。そして、積層
方向の上下両端部にそれぞれ一対の外部端子電極38を
設ける。この構成が、従来と顕著に相違する点である。In the present invention, the via connection portions are formed at four places as seen in the stacking direction. Two of them have the same polarity. Each internal electrode 34 is heteropolarly connected to every other layer 32 of the material having an electrostrictive / piezoelectric effect, but the positions of the via connection parts are displaced (zigzag arrangement) for each interlayer connection. Each via connection part 36 must be an internal electrode 34
It is configured to be connected through. Then, a pair of external terminal electrodes 38 is provided at both upper and lower ends in the stacking direction. This configuration is significantly different from the conventional one.
【0013】従って、図1から明らかなように、同極と
なる外部端子電極間の導通チェックを行い、もし導通が
無ければ、その時点で製品の不良と直ちに判定できる。
ビア接続部が破断していても導通が生じないし、ビア接
続部と内部電極との接続不良箇所が1箇所でもあれば導
通が生じないからである。Therefore, as is apparent from FIG. 1, a continuity check between the external terminal electrodes having the same polarity is performed, and if there is no continuity, it can be immediately determined that the product is defective.
This is because conduction does not occur even if the via connection portion is broken, and conduction does not occur if there is even one defective connection point between the via connection portion and the internal electrode.
【0014】このような積層型電歪/圧電素子の製造
は、基本的には従来同様に行える。例えばチタン酸ジル
コン酸鉛のような圧電性を示す系列のセラミックス材料
からなる薄い(例えば80μm程度)のグリーンシート
に、内部電極材をスクリーン印刷により形成し、また所
定のビア接続箇所にはビア穴を設けて銀粒子を含むペー
ストを充填する。このようなグリーンシートを所定の順
序で位置合わせして積層し、また両端にはダミー層を配
して加圧一体化した後、脱脂・焼成工程を経て、焼結一
体化する。通常、このような素子は、多数個取りできる
ようにして、生産効率を高める。その後、両端のダミー
部にそれぞれ1対ずつの外部端子電極を設ける。Manufacture of such a laminated electrostrictive / piezoelectric element can be basically performed in the same manner as in the prior art. For example, the internal electrode material is formed by screen printing on a thin (for example, about 80 μm) green sheet made of a ceramic material having a piezoelectricity such as lead zirconate titanate, and a via hole is formed at a predetermined via connection point. Is provided to fill the paste containing silver particles. Such green sheets are aligned and laminated in a predetermined order, and dummy layers are arranged on both ends to integrate under pressure, and then a degreasing / firing step is performed to integrate the green sheets. Usually, such an element can be produced in large numbers to improve the production efficiency. Thereafter, a pair of external terminal electrodes is provided on each of the dummy portions on both ends.
【0015】上記の実施例では、同極について2箇所に
ビア接続部を設ける構成としているが、3箇所以上に分
散配置してもかまわない。但し、同極となる内部電極を
ビア接続する毎にビア接続部の位置を異にして必ず内部
電極を経由して接続されるようにする必要があることは
同様である。In the above embodiment, the via connection portions are provided at two locations on the same pole, but they may be arranged at three or more locations. However, it is the same that it is necessary to change the position of the via connecting portion each time the via connection is made to the internal electrodes having the same polarity so that the via electrodes are always connected via the internal electrodes.
【0016】[0016]
【発明の効果】本発明は上記のように、同極となる内部
電極をビア接続する毎にビア接続部の位置を異にして必
ず内部電極を経由して接続されるようにし、積層方向の
両端部にそれぞれ1対の外部端子電極を配置して接続す
るように構成したことにより、同極の外部端子電極間で
の導通チェックを行うことのみで、ビア接続部の破断が
無いこと及びビア接続部と内部電極との間の電気的接続
の無いことの確認が可能となり、不良品を確実に検出で
きることになる。これによって、品質保証が向上する
し、仕上がり前に不良品を発見できるため、無駄な工数
の増加を防ぐことができる。更に、積層方向の両端にそ
れぞれ外部端子電極が位置するので、機器への組み込み
の自由度が増し、またそれを利用して並列に引出し端子
を接続することで、信頼性の向上を図ることもできる。As described above, according to the present invention, each time an internal electrode having the same polarity is connected to a via, the position of the via connection portion is changed so that the via electrode is always connected via the internal electrode. By arranging a pair of external terminal electrodes at both ends and connecting them, it is only necessary to check the continuity between the external terminal electrodes of the same polarity, and there is no breakage of the via connection portion and the via connection. It is possible to confirm that there is no electrical connection between the connection portion and the internal electrode, and the defective product can be reliably detected. As a result, quality assurance is improved and a defective product can be found before finishing, so that it is possible to prevent an unnecessary increase in man-hours. Furthermore, since the external terminal electrodes are located at both ends in the stacking direction, the degree of freedom in assembling into the device is increased, and by utilizing them, the lead terminals can be connected in parallel to improve the reliability. it can.
【図1】本発明に係る積層型電歪/圧電素子の一実施例
を示す素子本体部分の分解斜視図。FIG. 1 is an exploded perspective view of an element body showing an embodiment of a laminated electrostrictive / piezoelectric element according to the present invention.
【図2】本発明に係る積層型電歪/圧電素子の横断面
図。FIG. 2 is a cross-sectional view of a laminated electrostrictive / piezoelectric element according to the present invention.
【図3】そのA−F位置での縦断面を示す展開図。FIG. 3 is a development view showing a vertical cross section at the A-F position.
【図4】従来技術の一例を示す横断面図。FIG. 4 is a cross-sectional view showing an example of a conventional technique.
【図5】その縦断面図。FIG. 5 is a vertical sectional view thereof.
【図6】従来のビア接続構造の拡大説明図。FIG. 6 is an enlarged explanatory view of a conventional via connection structure.
30 素子本体部分 32 電歪/圧電効果を示す層 34 内部電極 35 逃げ 36 ビア接続部 38 外部端子電極 30 Element Main Body Part 32 Electrostrictive / Piezoelectric Effect Layer 34 Internal Electrode 35 Escape 36 Via Connection Part 38 External Terminal Electrode
Claims (1)
部電極を介して積層され、その各内部電極を1層おきに
ビア接続部により電気的に接続すると共に、1層おきに
接続した同極となる内部電極群を対応する外部端子電極
に接続した構造の素子において、内部電極間をビア接続
する毎にビア接続部の位置をずしせて必ず内部電極を経
由して接続されるようにし、且つ積層方向の両端部にそ
れぞれ1対の外部端子電極を配置して、同極となる内部
電極群を積層方向の両端部にそれぞれ位置し対応する外
部端子電極に接続することを特徴とする積層型電歪/圧
電素子。1. A large number of material layers exhibiting an electrostrictive / piezoelectric effect are laminated via internal electrodes, and each internal electrode is electrically connected by a via connection portion every other layer and connected every other layer. In an element with a structure in which a group of internal electrodes that have the same polarity are connected to the corresponding external terminal electrodes, each time the internal electrodes are connected to each other vias, the position of the via connection part is shifted so that the internal electrodes are always connected. In addition, a pair of external terminal electrodes are arranged at both ends in the stacking direction, and internal electrode groups having the same polarity are located at both ends in the stacking direction and connected to the corresponding external terminal electrodes. Characteristic multilayer electrostrictive / piezoelectric element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5261594A JPH0794796A (en) | 1993-09-24 | 1993-09-24 | Multilayered electrostrictive/piezoelectric device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5261594A JPH0794796A (en) | 1993-09-24 | 1993-09-24 | Multilayered electrostrictive/piezoelectric device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0794796A true JPH0794796A (en) | 1995-04-07 |
Family
ID=17364089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5261594A Pending JPH0794796A (en) | 1993-09-24 | 1993-09-24 | Multilayered electrostrictive/piezoelectric device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0794796A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001089002A1 (en) * | 2000-05-18 | 2001-11-22 | Robert Bosch Gmbh | Piezo actuator |
JP2005191450A (en) * | 2003-12-26 | 2005-07-14 | Tdk Corp | Multilayer piezoelectric element |
WO2005069393A1 (en) * | 2004-01-15 | 2005-07-28 | Robert Bosch Gmbh | Piezo actuator and method for the production thereof |
JP2007059697A (en) * | 2005-08-25 | 2007-03-08 | Tdk Corp | Laminated piezoelectric element |
EP1764843A1 (en) * | 2005-09-14 | 2007-03-21 | Ariose Electronics Co., ltd. | Piezoelectric ceramic element and piezoelectric components using the same |
US7378776B2 (en) * | 2005-09-06 | 2008-05-27 | Ariose Electronics Co. Ltd. | Piezoelectric ceramic composition and piezoelectric elements using the same |
JP2012121146A (en) * | 2010-12-06 | 2012-06-28 | Brother Industries Ltd | Method of manufacturing piezoelectric actuator |
JP2012124195A (en) * | 2010-12-06 | 2012-06-28 | Brother Ind Ltd | Piezoelectric actuator |
-
1993
- 1993-09-24 JP JP5261594A patent/JPH0794796A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001089002A1 (en) * | 2000-05-18 | 2001-11-22 | Robert Bosch Gmbh | Piezo actuator |
JP2005191450A (en) * | 2003-12-26 | 2005-07-14 | Tdk Corp | Multilayer piezoelectric element |
JP4506172B2 (en) * | 2003-12-26 | 2010-07-21 | Tdk株式会社 | Multilayer piezoelectric element |
WO2005069393A1 (en) * | 2004-01-15 | 2005-07-28 | Robert Bosch Gmbh | Piezo actuator and method for the production thereof |
JP2007059697A (en) * | 2005-08-25 | 2007-03-08 | Tdk Corp | Laminated piezoelectric element |
US7378776B2 (en) * | 2005-09-06 | 2008-05-27 | Ariose Electronics Co. Ltd. | Piezoelectric ceramic composition and piezoelectric elements using the same |
EP1764843A1 (en) * | 2005-09-14 | 2007-03-21 | Ariose Electronics Co., ltd. | Piezoelectric ceramic element and piezoelectric components using the same |
JP2012121146A (en) * | 2010-12-06 | 2012-06-28 | Brother Industries Ltd | Method of manufacturing piezoelectric actuator |
JP2012124195A (en) * | 2010-12-06 | 2012-06-28 | Brother Ind Ltd | Piezoelectric actuator |
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