JPH0793033A - Actuator device - Google Patents

Abstract

PURPOSE:To provide a highly precise actuator device which can obtain a stable high voltage of optical frequency having optional waveform and has small variance in output voltage characteristics. CONSTITUTION:In converter blocks 14 and 17, resistance in resistance groups of R-2R ladder resistance blocks 13 and 16 to which a DC high voltage is impressed, are switched in order at extremely short intervals of time with the digital signal from a digital signal generator 11 so as to obtain the AC high voltage of specific frequency. And, an actuator is driven and controlled with high-voltage alternating currents from the converter blocks 14 and 17, so the high voltage of optional frequency among frequencies of 0-several kHz can stably be obtained at the voltage boosting ratio and the actuator can be used as a common article as every type of actuator of optional frequency ranging from 0-several kHz. The device does not have conventional variance in output voltage characteristics due to the temperature drift of an amplifier and variance of component characteristics and the highly precise driving control over the actuator 19 can be performed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an actuator device driven and controlled by a high voltage, such as an electrostatic motor by electrostatic force, an electrostatic linear actuator and an electrostatic actuator such as a laminated electrostatic actuator.

[0002]

2. Description of the Related Art Conventionally, for driving and controlling various actuators driven by a high voltage of 1000 V or more, a primary side of a transformer 2 is connected to an output terminal of a signal generator 1 as shown in FIG. An actuator 3 as a load is connected to the next side, the AC voltage from the signal generator 1 is boosted to a high voltage by a transformer 2 and supplied to the actuator 3.
The actuator 3 is drive-controlled. This signal generator 1
Can output various voltage waveforms such as a sine wave, a rectangular wave, and a triangular wave, and output such as voltage amplitude and frequency is variable.

Another method for obtaining a high voltage of 1000 V or higher is to use an amplifier composed of a transistor as a high breakdown voltage semiconductor element.

[0004]

DISCLOSURE OF THE INVENTION The above-mentioned conventional transformer 2
In boosting by, the output of the signal generator 1 having a voltage output of several V to several tens of V is boosted to a high voltage via the transformer 2, but an arbitrary signal waveform having a frequency ranging from 0 to several kHz by the single transformer 2. It is difficult to stably boost the voltage with the same boost ratio. For example, when changing the frequency to a low value, it is necessary to make the winding ratio of the transformer larger than the normally calculated value, and the actuator drive circuit cannot be designed until the load is determined. Therefore, in order to obtain a stable high voltage, there is a problem that it cannot be used as a common actuator drive circuit for arbitrary frequencies, waveforms, and loads.

Further, when an amplifier is designed with a semiconductor device such as a transistor to obtain a high voltage of 1000 V or more, there is no suitable element for obtaining a positive and negative even output centering on a voltage of 0 V. Have difficulty. In the case of a transistor, a PNP-type element is required for the NPN type, but a PNP-type element or a P-channel element having a withstand voltage of 400 V or more is difficult to obtain, and a circuit is difficult. The structure is also complicated and the cost is high. Also, in the case of a transistor, the product position, especially the output voltage characteristic, may vary due to the temperature drift of the elements and variations in component characteristics that are associated with analog circuits, and the actuator position control may not work well.
There is a problem that it is not possible to control the drive of the actuator with high voltage and high accuracy.

The present invention solves the above-mentioned conventional problems, and provides a highly accurate actuator device which can obtain a stable high voltage even at an arbitrary frequency and waveform and has little variation in output voltage characteristics. The purpose is to

[0007]

In the actuator driving apparatus of the present invention, a high DC voltage is applied by a digital signal generating section for generating a digital signal which switches with time and a digital signal from the digital signal generating section. The resistance of the resistance group is sequentially switched for each time to obtain a high voltage having an arbitrary frequency and a waveform, and an actuator which is driven and controlled by the high voltage from the converter, and thereby the above The purpose is achieved.

[0008]

With the above-described structure, the converter section sequentially switches the resistances of the resistance group to which the DC high voltage is applied with time so that the high voltage of arbitrary frequency and waveform is obtained by the digital signal from the digital signal generating section. As a result, a high voltage is obtained from the converter section, and the actuator is driven and controlled by this high voltage. Therefore, for example, a high voltage having an arbitrary frequency and a waveform among frequencies ranging from 0 to several kHz can be stably obtained at the same boosting ratio. As described above, there is no case where the design cannot be performed until the frequency and the load are determined, and it can be commonly used for high-voltage actuator drive control of all types. Further, there is no variation in the output voltage characteristic due to the temperature drift of the amplifier and variation in the characteristic of the component as in the conventional case, and it becomes possible to control the drive of the actuator with high voltage and high accuracy.

[0009]

EXAMPLES Examples of the present invention will be described below.

In FIG. 1, 8 is switched every minute time.
A digital signal generator 11 for generating a bit digital signal is connected to the control terminals of eight high voltage semiconductor relays 12. The digital signal generator 11 is composed of a computer, a microcomputer, a look-up table using a memory, etc., and one or more of the eight high breakdown voltage semiconductor relays 12 are selected by an 8-bit digital signal. One of the input terminals of the eight high voltage semiconductor relays 12 has a voltage of 400V.
Above, in particular, it is connected to a DC high voltage power supply of about 1000V to 2000V, and the other input terminals are grounded. The output terminals of these high withstand voltage semiconductor relays 12 are sequentially connected to the resistance input terminals of the R-2R ladder resistance block 13, and a digital signal from the digital signal generator 11 causes a DC high voltage to be applied to the resistance group. The resistance is sequentially switched at every minute time, and a high voltage having an arbitrary frequency is obtained. This high voltage is the R-2R ladder resistance block 13 as a digital voltage for every minute time obtained by dividing the positive half wave of the sine wave AC into 256 ways in the time axis direction.
Are sequentially output from the output terminal of. The eight high voltage semiconductor relays 12 and the R-2R ladder resistance block 13 constitute a converter block 14 that outputs a positive half AC wave.

Similarly, the eight high voltage semiconductor relays 15 and the R-2R ladder resistance block 16 constitute a converter block 17 which outputs a negative half-wave AC. The output terminals of these converter blocks 14 and 17 are connected to a switch means 18 composed of a high voltage semiconductor relay, and the control terminal of this switch means 18 is a digital signal generator 1.
1 and is switched and controlled so that the positive side AC half-wave from the converter block 14 and the negative side AC half-wave from the converter block 17 are combined to form a sine wave AC. The output terminal of the switch means 18 is connected to a high voltage driving actuator 19 as a control load.

Also, the high voltage semiconductor relay 12 and the R-2R
Explaining in more detail a part of the ladder resistance block 13, as shown in FIG.
Is applied, and a voltage of + 5V or 0V is applied to the control terminal 22. The control terminal 21 is connected to the control terminal 22 via the photodiode 23, the control terminal 21 is connected to the output terminal of the inverter 25 via the photodiode 24, and the input terminal of the inverter 25 is connected to the control terminal 22. Has been done. The DC high-voltage power supply is turned on / off by the photodiode 23.
Contact part 26 composed of phototransistor such as ET
Is connected to one end of the resistor 27 of the R-2R ladder resistance block 13 via the, and one contact of the contact portion 28, which is turned on / off by the photodiode 24 and is constituted by a phototransistor, is grounded. The other contact is R
It is connected to one end of the resistor 29 of the -2R ladder resistor block 13. This R-2R ladder resistance block 13
The other end of the resistor 27 having a resistance value of 2R and the resistor 29 having a resistance value of 2R
A resistor 30 having a resistance value R is interposed between the other end of the
Similarly, this is repeated and connected. The photodiode 23 and the contact portion 26 constitute a high breakdown voltage photomos relay 31, and the photodiode 24 and the contact portion 28 constitute a high breakdown voltage photomos relay 32. The high breakdown voltage photo-MOS relays 31 and 32 constitute the high breakdown voltage semiconductor relay 12.

With the above configuration, the operation will be described below. First, the digital signal generator 11 outputs an 8-bit digital signal which is switched at every minute time to divide the positive half wave of the sine wave alternating current into 256 ways in the time axis direction. This 8-bit digital signal, for example, "0111
1111 "is the first high voltage semiconductor relay 12
Is turned on, the DC high voltage power supply is connected to the R-2R ladder resistance block 13, and the output voltage is regulated and output by the resistance value of the resistance group at that time. The state at this time will be described in more detail with respect to the high breakdown voltage semiconductor relay 12, and as shown in FIG. 2, when a 0 V pulse signal is input from the digital signal generator 11 through the control terminal 22, the high breakdown voltage photomos relay is shown. The phototransistor 23 of 31 is turned on, but the phototransistor 24 of the high breakdown voltage photomos relay 32 is turned off because the signal is inverted and supplied by the inverter 25. Phototransistor 2
When the switch 3 is turned on, the contact part 26 is closed and the high DC voltage is applied to the resistor 27.
And the contact portion 28 remains open when the phototransistor 24 is turned off. Conversely, a + 5V pulse signal from the digital signal generator 11 is applied to the control terminal 22.
, The phototransistor 23 of the high breakdown voltage photoMOS relay 31 is turned off, but the phototransistor 24 is turned on by the inverter 25 inverting the signal. Therefore, when the phototransistor 23 is turned off, the contact portion 26 is opened and the high DC voltage is not applied to the resistor 27, and when the phototransistor 24 is turned on, the contact portion 2 is opened.
8 is closed, and one end of the resistor 29 is grounded via the contact portion 28.

In this way, the high voltage semiconductor relay 12
Is selected by the digital signal from the digital signal generator 11 and connected to the high voltage semiconductor relay 12 R
The high voltage value output by the combination of the resistance groups of the -2R ladder resistance block 13 is set. Then, the selection of the high breakdown voltage semiconductor relay 12 is switched at every minute time when the positive half wave of the sine wave AC is divided into 256 ways in the time axis direction, the combination of the resistance groups is switched, and the output high voltage value is sequentially output. The half wave on the positive side of the sine wave alternating current is output after being changed.

At this time, the switch means 18 causes the actuator 1 to operate by the signal from the digital signal generator 11.
The input end of 9 is switched from the output end of the R-2R ladder resistance block 13 to the output end of the R-2R ladder resistance block 16. Similarly, the high-voltage semiconductor relay 15 is appropriately selected by the digital signal from the digital signal generator 11 every minute time, and the combination of the resistance values of the resistance group of the R-2R ladder resistance block 16 is combined every minute time. The high voltage value to be output is sequentially set, and the negative half AC wave is output to the actuator 19 via the switch means 18. As a result, the positive side AC half-wave from the converter block 14 and the negative side AC half-wave from the converter block 17 are combined to apply the high-voltage sine wave AC to the actuator 19.

Therefore, the converter blocks 14, 1
Reference numeral 7 denotes an R-2R ladder resistor block 13, 1 to which a high DC voltage is applied so as to obtain an AC high voltage of a predetermined frequency by a digital signal from the digital signal generator 11.
The resistance value of the resistance group of 6 is sequentially switched every minute time,
Since the actuator is driven and controlled by the high voltage AC from the converter blocks 14 and 17, only by changing the digital signal, the high voltage having the same predetermined arbitrary frequency, arbitrary waveform and arbitrary amplitude among frequencies ranging from 0 to several kHz is boosted. It can be obtained in a stable ratio, and unlike the conventional case, it can be designed only after determining the frequency and load etc. It is used as a common product for all types of actuators of any frequency from 0 to several kHz. It becomes possible. Further, there is no variation in the output voltage characteristic due to the temperature drift of the amplifier and variation in component characteristics as in the related art, and a stable high voltage can be obtained and highly accurate drive control of the actuator 19 can be performed. Therefore, by using a D / A converter configuration using a photo-mos relay for the high-voltage section, it is easier to control with time due to heat, etc., and easier to control than a circuit having the same function is configured with analog technology. An actuator drive circuit can be configured.

In this embodiment, an AC high voltage having a predetermined frequency among arbitrary frequencies ranging from 0 to several kHz was obtained.
It is also possible to set the digital signal generator 11 so as to change at an arbitrary frequency ranging from to several kHz, and by switching the combination of resistance values of the resistor group by selecting the high voltage semiconductor relay 12 by the digital signal, the range from 0 to several kHz is selected. A high voltage can be output by changing the frequency at an arbitrary frequency. Further, the digital signal generator 11 can be set to have not only a sine wave AC but also an arbitrary DC or AC waveform such as a rectangular wave or a triangular wave, and a combination of an arbitrary frequency and an arbitrary waveform is also possible. . Further, the actuator 19 has a supply voltage of 1000 in this embodiment.
Although a high voltage of about V to 2000 V is used, any driving voltage of 400 V or higher may be used. Electric field responsive urethane, which is considered to be applicable to artificial muscles, is also considered as this actuator. Further, in the present embodiment, the positive half-wave of the sine wave AC is divided into 256 minute times in the time axis direction, but the minute time is not limited to 256.

[0018]

As described above, according to the present invention, the resistance of the resistance group to which the DC high voltage is applied is sequentially switched by the digital signal from the digital signal generator to increase the frequency and the waveform. Since the voltage is obtained by the converter unit and the actuator is driven and controlled, it is possible to obtain a stable high voltage even in an arbitrary signal waveform with a frequency ranging from 0 to several kHz. Also, variations in product characteristics due to temperature drift and variations in component characteristics are possible. Therefore, it is possible to provide a highly accurate actuator device that can obtain a stable high voltage with less power consumption.

[Brief description of drawings]

FIG. 1 is a block diagram of an actuator device showing an embodiment of the present invention.

2 is a circuit diagram showing a part of a high breakdown voltage semiconductor relay 12 and an R-2R ladder resistance block 13 in the actuator device of FIG.

FIG. 3 is a block diagram of a conventional actuator device.

[Explanation of symbols]

 11 Digital Signal Generator 12,15 High Voltage Semiconductor Relay 13,16 R-2R Ladder Resistance Block 14,17 Converter Block 18 Switch Means 19 Actuator 31,32 High Voltage Photomos Relay 27,28,30 Resistance

Claims (1)

[Claims] 1. A digital signal generator that generates a digital signal that switches over time, and a digital signal from the digital signal generator that sequentially switches the resistance of a resistor group to which a high DC voltage is applied. An actuator device comprising: a converter unit that obtains a high voltage having an arbitrary frequency and a waveform; and an actuator that is drive-controlled by the high voltage from the converter unit.