JPH0785440B2 - Charged particle device - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle device, and more specifically, to accelerate or store a beam of charged particles such as an electron beam, The present invention relates to a charged particle device that uses radiation light generated from a deflecting unit.

[Conventional technology]

FIG. 3 is a plan view showing an example of a conventional charged particle device. Reference numeral 1 is a storage ring for storing charged particles. Reference numeral 2 is an incident part beam line for guiding charged particles to the storage ring 1. Reference numeral 3 is a deflection electromagnet for deflecting the charged particles to form a flat trajectory 4. Reference numeral 5 is a synchrotron radiation (SOR;
(also called ronorbital radiation)) is a synchrotron radiation beam line used for lithography and the like. A quadrupole electromagnet 6 focuses the charged particles. Reference numeral 7 is a vacuum donut which is a passage for charged particles.
Reference numeral 8 is a high frequency cavity for accelerating to a predetermined energy that does not compensate for the energy loss of the charged particles due to the emission of radiant light. Reference numeral 9 is an incident part for causing charged particles to enter the vacuum donut 7 from the incident part beam line 2.

As shown in FIG. 4, a septum magnet 10 for deflecting the charged particles in a pulsed manner is provided in the entrance portion 9. Further, the incident beam line 2 and the vacuum donut 7 are Kapton films.
It is vacuum shielded by 11 and has different vacuum levels. 12
Is a bump orbit, which is the orbit of the charged particles immediately after entering the vacuum donut 7.

FIG. 5 shows a typical degree of vacuum of each part of the charged particle device. 11 is the incident beam line 2 (10 ^-6 m as described above)
barton and vacuum donuts 7 (10 ^-9 m bar) to block the Kapton membrane, 13 is vacuum donut 7 ultra high vacuum (10 ^-9 m ba)
It is a silicon thin film that blocks r). Reference numeral 14 is a beryllium thin film that shields the atmospheric pressure and the portion of the same pressure as the incident beam line (10 ^-6 m bar).

Next, the operation will be described.

The charged particles made incident from the incident part beam line 2 are deflected in a pulse by the septum magnet 10 and made incident in the vacuum donut 7. After that, the charged particles pass through a bump orbit 12, which is a transient orbit, and then enter a flat orbit 4 determined by the arrangement of the deflection electromagnet 3 and the quadrupole electromagnet 6,
It keeps rotating along this orbit for a long time. Usually, the incident part beam line 2 and the vacuum donut 7 are arranged in the same plane. For example, when charged particles in the incident part beamline 2 travel in the horizontal direction and are incident, the charged particles are deflected in the horizontal direction by the septum magnet 10, and finally, along the horizontal equilibrium orbit 4. Rotate. When the charged particles rotating along the flat orbit 4 are deflected by the magnetic field of the deflection electromagnet 3, the electromagnetic waves are horizontally emitted in the tangential direction of the orbit by bremsstrahlung. This is synchrotron radiation.
Since the emitted light can be obtained from any position on the trajectory of the charged particles in the deflecting electromagnet 3, a large number of emitted light beam lines 5 are usually provided to improve the utilization efficiency of the apparatus as much as possible.

In order to increase the efficiency of the apparatus, it is desirable to generate the radiated light for as long as possible by one injection of the charged particles into the vacuum donut 7. Therefore, vacuum donut 7 is 10 ^-9
It is maintained in an ultra-high vacuum of about m bar, and the energy loss of charged particles due to the deterioration of the degree of vacuum is suppressed as much as possible. Also, when extracting radiated light, vacuum shielding is performed with a thin film so that the energy loss due to the shield is minimized. If the pressure difference between the thin films becomes large, the films may be broken, so that the thin films are formed in multiple stages.

[Problems to be solved by the invention]

Since the conventional charged particle device is configured as described above, there is a synchrotron radiation beam line which is arranged so as to intersect the incident part beam line. At the position where these two kinds of beam lines are expected to intersect, the synchrotron radiation beam line cannot be installed because the incident part beam line blocks the synchrotron radiation. Therefore, there is a problem that the utilization rate of radiated light is significantly reduced.

The present invention has been made to solve the above-mentioned problems, and synchrotron radiation can be used even when the incident part beam line and the synchrotron radiation beam line intersect, and the utilization efficiency of the synchrotron radiation can be dramatically improved. The object is to obtain a charged particle device which can be improved.

[Means for solving problems]

The charged particle device according to the present invention includes a storage ring that stores charged particles, an incident part beam line that guides the charged particles to the storage ring, and radiant light that is generated from the storage ring without intersecting the incident part beam line. First multiple to take out
A plurality of second synchrotron radiation beam lines which intersect with the above-mentioned incident part beam line at the intersection and take out the radiant light generated from the above-mentioned storage ring, and the plurality of second synchrotron radiation beam lines. A first partition provided on the beam upstream side of the intersection of the lines; and a second partition provided on the beam downstream of the intersection of the plurality of second synchrotron radiation beam lines. It was done like this.

[Action]

According to the present invention, even when the incident part beam line and the synchrotron radiation beam line intersect, charged particles enter the storage ring in the same manner as in the case where both beam lines do not intersect as in the conventional example. The emitted light is then emitted with almost no interruption.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 5a is a synchrotron radiation beam line that intersects the incident part beam line 2, and 20 is an intersection part of both beam lines 5a and 2. FIG. 2 shows the degree of vacuum of the representative part of FIG. 1, and the vacuum shielding films 11, 13, 14 in each beam line are shown.
Is the same as that shown in the conventional example.

Next, the operation will be described.

Charged particles move from the incident beam line 2 to the vacuum donut 7
It is incident in a pulsed manner by the septum magnet 9.
When the injection into the vacuum donut 7 is completed, the charged particles do not exist in the incident part beam line 2. While the charged particles that have entered are rotated on the flat orbit 4 many times, radiated light is generated in the deflecting electromagnet 3, and this radiated light is emitted to the beam lines 5, 5a.
Is taken out to the outside. Beam line 2
At the intersection 20 of the synchrotron radiation beam line 5a which intersects with the synchrotron radiation beam, the charged particles that are pulsed are rapidly reduced. It has the same characteristics as the synchrotron radiation.

The vacuum degree of the intersection portion 20 is 10 ^-6 m bar which is the conventional vacuum degree of the incident part beam line 2. Further, the vacuum degree of the synchrotron radiation beam line 5a is completely the same as that of the conventional synchrotron radiation beam line 5, and the pressure is 10 ^-6 mbar at the intermediate portion between the atmospheric pressure and the ultrahigh vacuum of 10 ^-9 mbar. The intersection 20 is provided in the part, and the number of beam lines can be dramatically increased without impairing the conventional function.

〔The invention's effect〕

As described above, according to the charged particle device of the present invention,
A storage ring for accumulating charged particles, an incident beam line for guiding the charged particles to the accumulation ring, and a plurality of first radiations for extracting emitted light emitted from the accumulation ring without intersecting the incident beam line. A plurality of second radiation light beam lines which intersect the light beam line at the intersection with the incidence portion beam line and take out radiation light generated from the storage ring; and a plurality of second radiation light beam lines. A first partition wall provided on the beam upstream side of the intersection, and a second partition wall provided on the beam downstream side of the intersection of the plurality of second synchrotron radiation beam lines. By doing so, even if the incident part beam line and the synchrotron radiation beam line intersect, the radiated light can be taken out, so that the device is complicated by installing a new magnet. It is possible to install a large number of synchrotron radiation beamlines without increasing the volume of the ultra-high vacuum region in the storage ring and increasing the cause of the vacuum degree reduction, thus significantly improving the synchrotron radiation utilization efficiency. There is an effect that can be.

[Brief description of drawings]

FIG. 1 is a plan view showing a charged particle device according to an embodiment of the present invention, FIG. 2 is a vacuum system diagram thereof, FIG. 3 is a plan view showing a conventional charged particle device, and FIG. Plan view,
FIG. 5 is a vacuum system diagram thereof. Reference numeral 2 is an incident beam line, 11 is a Kapton film, 13 is a silicon thin film, 14 is a beryllium thin film, and 20 is an intersection. The same reference numerals in the drawings indicate the same or corresponding parts.

 ─────────────────────────────────────────────────── --Continued from the front page (56) References Experimental physics course 28 "Accelerator" new edition (1982) Kyoritsu Shuppan Co., Ltd. 514 Fig. 12/27

Claims (2)

[Claims] 1. A storage ring for accumulating charged particles, an incident beam line for guiding the charged particles to the accumulation ring, and a plurality of radiation beams emitted from the accumulation ring without intersecting with the incident beam line. And a plurality of second synchrotron radiation beamlines that intersect the incident portion beamlines at intersections to extract the radiated light generated from the storage ring, and the plurality of second synchrotron radiation beamlines. A first partition wall provided on the beam upstream side of the intersection of the synchrotron radiation beam lines, and a second partition wall provided on the beam downstream side of the intersection of the plurality of second radiation beam lines. And a charged particle device. 2. The charged particle device according to claim 1, wherein the first partition wall is made of a silicon thin film and the second partition wall is made of a beryllium thin film.