JPH0782726B2 - Floating head slider support mechanism - Google Patents

Description

The present invention relates to a floating head slider support mechanism for a magnetic disk device.

2. Description of the Related Art A floating head slider for a magnetic disk device uses a dynamic pressure bearing effect due to an air flow accompanying the rotation of the magnetic disk to form a minute air film between the slider and the magnetic disk to form a magnetic disk surface. Emerge from. Sufficiently ensure the following characteristics of such a floating head slider for a magnetic disk,
In order to improve the reliability of the slider levitation mechanism, the floating head slider support mechanism has a sufficiently low supporting rigidity (so-called gimbal property) that does not hinder the movement of the slider, and the load load (pressing load) required for the floating head slider. ,
A mechanism for applying pressing force, load force, or simply load) is required. On the other hand, a magnetic disk device is required to have a high-speed data access function, that is, a high-speed read / write function for predetermined data. Further, when the magnetic disk and the slider come into contact with each other while stopped, water is generated due to capillary aggregation in a minute space between the slider and the magnetic disk, and the slider and the magnetic disk are attracted to each other. It is easy to cause the accident that the slider rotates together with the magnetic disk when the magnetic disk rotates and the magnetic disk does not rotate.) There is a need for a floating head support mechanism that does not contact the disk and slider even when at rest.

Conventionally, as a support mechanism for a floating head slider, a slider is attached to the tip of a load arm whose root is supported via a gimbal spring, and a load is applied to the slider from the load arm to which elastic force is applied. Although generally used, this has a problem in that the followability of the slider to the magnetic disk surface is deteriorated due to the influence of the inertia of the load arm and the natural frequency.

As a known example of a floating head slider support mechanism which has been made in order to avoid such a problem and to meet the above-mentioned demand, Japanese Patent Application Laid-Open No. Sho 62-62 is known.
There is one disclosed in Japanese Patent Publication No. 99967. In this known technique, a slider is attached to a flexible viscoelastic film joined to a support, and the air pressure in the space inside the support on the back side of the viscoelastic film is increased or decreased to obtain a required load load. Displacement for loading and unloading is applied to the slider.

[Problems to be Solved by the Invention] The above viscoelastic film type slider support mechanism has the following problems.

(1) Since the point of action of the acceleration force applied to the slider during data access and the center of gravity of the slider do not match, a moment (rotational force) is generated in the slider due to the acceleration force and the slider swings and vibrates. This may interfere with the reading of the data written on the magnetic disk at a predetermined radial position, and may significantly reduce the reliability of the device. That is, when a high acceleration force is applied for high-speed data access, there is a problem that slider vibration is likely to occur due to the above-described inconsistency between the center of gravity and the action point of the acceleration force.

(2) There is a problem of change and deterioration of tension due to aging of the viscoelastic film, and accompanying dust generation from the viscoelastic film. That is, the viscoelastic film deteriorates with time, and dust may be generated from the viscoelastic film as the viscoelastic film expands and contracts due to the pressure difference between the slider mounting surface and the space on the opposite surface side. When dust adheres to the slider, a minute gap between the slider and the magnetic disk decreases, and the slider and the magnetic disk come into contact with each other, possibly damaging the data written on the surface of the magnetic disk.

(3) Since the surface of the viscoelastic film opposite to the slider mounting surface is pressurized with air to give a negative pressure to the slider,
The viscoelastic membrane must be bonded to the support in a leaktight manner. Generally, the magnetic disk device is 5-10
Since it is required to operate without maintenance for a year, it is necessary to prevent air leakage from the joint surface between the elastic membrane and the support for a maximum of 10 years. difficult. In addition, productivity is not good because it is necessary to check for air leaks.

(4) When a load force is being generated on the sliders, the viscoelastic film is also pressed from the support in the surface direction of the magnetic disk, and the viscoelastic film narrows the flow path between the disks. If it is installed on the surface, the flow path between the magnetic disks will be narrowed, the flutter of the magnetic disk will increase due to the turbulence of the air flow accompanying the rotation of the magnetic disk, and the followability of the slider to the magnetic disk surface will deteriorate and data reading The signal quality may be degraded.

(5) The viscoelastic film itself may be vibrated by the wind accompanying the rotation of the disk, which may deteriorate the positioning accuracy of the slider.

The present invention solves the above problems, does not cause slider vibration or dust during high-speed access, is easy to manufacture, has little turbulence of the air flow due to the rotation of the magnetic disk, and is capable of performing load / unload operations and necessary operations. It is an object of the present invention to provide a floating head slider support mechanism that can easily apply a simple pressing load.

[Means for Solving the Problems] The floating head slider support mechanism according to the present invention has the structure described in each of the claims.

[Operation] Since a pressing load is not applied to the slider from the load arm to which an elastic force is applied, there is no problem that followability is deteriorated by the natural frequency of the load arm, and the slider is not a viscoelastic film but a gimbal spring. Because I support
It is possible to avoid the problems of aging deterioration, dust generation, and the sealing property of the joint between the viscoelastic film and the support.

By supporting the slider with a gimbal spring on a plane passing through the center of gravity of the slider, a moment due to acceleration does not occur at the time of access, and swing vibration does not occur. By adjusting the pressure of the cavity in the support, there will be a pressure differential between the inside and the outside of the window, even if there is some inflow and outflow of air through the window, which will cause the slider to move closer to or further away from the magnetic disk. It can be performed.
Further, by keeping the above pressure difference at an appropriate value during the rotation of the magnetic disk, it is possible to apply a necessary pressing force to the slider.

[Embodiment] Before describing the embodiment, first, a positive pressure type slider and a negative pressure type slider will be described with reference to FIGS. 19 and 20.
The thick arrows in these figures indicate the direction of the air flow accompanying the rotation of the magnetic disk. FIG. 19 is a perspective view of the positive pressure type slider, in which the upper surface side is the surface facing the magnetic disk.
The arrow indicates the moving direction of the magnetic disk surface. 37 is a levitation rail, and when its surface is close to the surface of the rotating magnetic disk, a positive pressure is generated between the levitation rail 37 and the magnetic disk due to the air flow accompanying the rotation of the magnetic disk, and the slider 3 moves to this positive direction. The flying position is set so that the pressure balances with the load force (pressing force) separately applied to the slider 3. Note that 39 is a blow-through groove, and no pressure is generated here.

On the other hand, FIG. 20 is a perspective view of the negative pressure type slider. In the slider 3, the levitation rails 37 on both sides are connected by a bank 37 'on the air flow inlet side, and a negative pressure generating pocket 38 is formed by these. Although the positive air pressure is generated between the flying rail 37 and the magnetic disk due to the air flow accompanying the rotation of the magnetic disk as in the positive pressure type slider, the negative pressure is generated in the pocket 38. Once such a state is reached, the slider 3 takes a floating position such that the positive pressure generated in the rail 37 and the negative pressure generated in the pocket 38 are balanced without applying a pressing force to the slider thereafter. I can continue.

An example of a positive pressure type slider is Japanese Patent Publication No. 57-569, and an example of a negative pressure type slider is U.S. Pat. No. 3,855,625, JP-A-58-64670.
No. 57, No. 57-210479, No. 59-18780, No. 63
-56625, etc.

Now, a first embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4. FIG. 1 is a sectional view showing a floating head slider support mechanism of this embodiment. The floating head slider support mechanism of this embodiment is arranged between two magnetic disks 2 fixed to the rotary shaft 1. The floating head slider support mechanism is provided with a plurality of negative pressure type sliders 3 for the two magnetic disks 2, 2 side by side in the radial direction of the magnetic disk. Each floating head slider 3
The electromagnetic conversion unit 4 is mounted on the. Each slider 3 is a gimbal spring made of an elastic metal plate (hereinafter simply referred to as a gimbal) having a sufficiently low supporting rigidity that does not restrain the movement of the slider 3.
5, the gimbals 5 are joined to the supports 7 having sufficiently high supporting rigidity. The support body 7 forms a rectangular tubular structure having a hollow interior as a whole by fastening two channel-shaped support members 71, 72 having U-shaped cross-sections at their flange portions 711, 721 and 712, 722. is doing. This fastening is performed with bolts 11 or the like.
The support body 7 is provided with a pressure adjusting flow passage 9 for adjusting the pressure of the cavity inside thereof, and a pressure adjusting means 10 such as a bellows pump is connected to the other end of the pressure adjusting flow passage 9. There is. However, the pressure adjusting means 10 may be a combination of a general pressurizing pump and a vacuum pump.

2A is a view of the support member 71 as seen from the magnetic disk surface side (the air bearing surface side of the slider), and FIG. 2B is seen as a surface (back surface of the slider) opposite to the air bearing surface of the slider. It is a figure. As shown in the figure, a plurality of (four in this embodiment) windows 6 are provided in the support member 71 on the same straight line in the radial direction of the magnetic disk.
It is supported by. The gimbal 5 and the slider 3 are joined together with an adhesive or the like, and the gimbal 5 is joined to the support member 71 by spot welding or the like. Flanges 711 and 712 are provided at both ends of the support member 71, and are fastened to the support member 72 by the bolts 11.

The support member 72 has the same structure as the support member 71 except for the pressure adjusting flow path portion.

The support members 71 and 72 are fastened to each other to form a support body 7 that is a hollow structure having a rectangular tubular shape except the window 6 and has a hollow interior. The composite support 7 can be moved only in the radial direction with respect to the magnetic disk by a driving means (not shown).

FIG. 3 (a) is a sectional view of the support and the slider taken along the line I-I of FIG. 2 (a). The slider 3 is held by a gimbal 5, and the gimbal 5 is joined to the support 7. Therefore, when the magnetic disk is stationary, the slider 3 is separated from the magnetic disk 2 as shown in the figure. Further, it is structurally plane-symmetric with respect to the center plane AA. As described above, the slider 3 may be any slider as long as it is a slider generally called a negative pressure type slider that generates a negative pressure between itself and the moving disk by utilizing the principle of a dynamic pressure bearing. US Patent No.
3,855,625, JP-A-58-64670, JP-A-57-210479
The negative pressure type slider disclosed in Japanese Patent Application Laid-Open No. 57-210479 is shown in this embodiment.

FIG. 3 (b) shows a II-II cross section of FIG. 3 (a). The slider 3 is supported in the window 6 by the gimbal 5 so that the edge portion 61 of the window 6 is between the slider air bearing surface 31 and the back surface 32. The gimbal 5 is installed on the same plane as the center of gravity G of the slider 3. Therefore, for the purpose of accessing data, the acceleration force F generated when the support body, and hence the slider, moves in the radial direction acts on the center of gravity G of the slider via the gimbal. Therefore, in principle, the problem that the slider 3 swings and vibrates during data access does not occur. As a result, the slider can be moved accurately to a magnetic disk radial position where there is predetermined data in a short time, and short-time data access, which is one of the most important problems of the magnetic disk, can be achieved. Further, by arranging four sliders 3 in the radial direction on the support, the moving distance until accessing data can be shortened to 1/4 as compared with the case where one slider is provided. Therefore, if the sliders have the same access speed (the speed at which the slider moves in the radial direction), the access time can be shortened to 1/4 as compared with the case of one slider.

Next, the loading and unloading functions of the slider in this embodiment will be described.

First, the loading function of the slider will be described with reference to FIGS. 4 (a) and 4 (b).

Before the loading is started, the gimbal 5 joined to the support 7 causes the slider 3 to have a predetermined distance H _S (several tens or several tens) so as not to generate a negative pressure as a negative pressure type slider between the slider 3 and the rotating magnetic disk 2. It is held in the order of 100 microns. In this state, when the air in the internal cavity 200 of the rectangular tubular structure that constitutes the support 7 is pressurized by the bellows pump 10 shown in FIG. The air flow through the window 6 through the gap 51 between
Flows out as 211, but inside the support cavity 200 and outside 300
, That is, between the air bearing surface 31 and the back surface 32 of the slider 3, a pressure difference ΔP occurs. The area of the back surface of the slider 3 is S
When the loading force represented by _{F L = ΔP · S ...... (} 1) ( pressure) F _L slider 3
Act on. Since the gimbal 5 has a sufficiently low supporting rigidity, the gimbal 5 is deformed by the force F _L, the slider 3 is closer to the surface of the rotating magnetic disk 2. Since the slider 3 is a negative pressure type slider, when it approaches the rotating magnetic disk 2 sufficiently (on the order of microns or less), a negative pressure is generated between the rotating magnetic disk 2 and the slider 3, and this negative pressure is applied to the slider. It becomes the load load L _n for pressing 3 onto the magnetic disk. Once a load due to this negative pressure is generated, even if the air pressure to the inside 200 of the support is stopped, the negative pressure (load) L _n generated between the slider and the magnetic disk and the positive Flying height h that balances pressure L _P
The slider is set and held at (the distance between the slider air bearing surface and the magnetic disk surface). In this way loading is achieved. In this way, when the slider is loaded on the surface of the rotating magnetic disk and the slider itself generates the load load L _n , the slider 3 is moved even if the inside 200 of the support 7 is not pressed by the pump 10. It can be maintained at a predetermined flying height h (generally in the submicron order). FIG. 4 (b) shows the flying state of the slider after loading.

Next, the unloading function will be described with reference to FIGS. 4 (c) and 4 (d). In FIG. 4 (c), the pump 10
When the inside 200 of the support body 7 is decompressed by (see FIG. 1), although there is a slight air inflow 221 from the window 6 to the inside 200 of the support body 7, the pressure is reduced due to the decompression between the air bearing surface and the back surface of the slider. The difference ΔP acts, and this pressure difference ΔP generates an unloading force F _U in the direction of moving the slider away from the surface of the magnetic disk. Generate an unloading force F _U that is larger than the load L _n due to the negative pressure described above, that is, an unloading force F _U that satisfies the following formula | F _U (= ΔP · S) || L _n | By doing so, it is possible to move the slider away from the magnetic disk and move it to a position where neither negative pressure nor positive pressure due to the effect of the dynamic pressure air bearing is generated between the slider air bearing surface and the rotating magnetic disk surface.

In this way unloading is achieved. FIG. 4D shows the positional relationship between the slider and the magnetic disk after uncoding.

In order to perform unloading, the pump 10 must generate a pressure difference ΔP that satisfies the expression (2).
By the way, since the negative pressure L _n exerted on the slider with respect to the rotational speed N of the magnetic disk has a relationship of L _n ∝N ⁿ (3) (n> 0), the disk rotational speed N is determined when the magnetic disk device is operating. If the inside of the support 7 is decompressed after lowering it to be smaller than that of L _n , it is possible to unload with a small pressure difference ΔP from the equation (2). As a result, the pump 10 can be downsized.

As described above, since the magnetic disk is at an unload position apart from the slider magnetic disk when the magnetic disk is stationary, water is generated by capillary aggregation in a minute space formed between the stationary magnetic disk and the slider. There is no so-called sticking accident that occurs and sticks the slider and the magnetic disk. Furthermore, since the slider and the magnetic disk are separated from each other when the magnetic disk is stationary, there is no fear of causing an accident of adsorption due to the lubricant applied to the surface of the magnetic disk.
It becomes possible to apply a large amount of lubricant to the magnetic disk surface. Therefore, even if the magnetic disk comes into contact with the slider for some reason, a large amount of lubricant protects the magnetic disk, and the risk of damaging the data written on the magnetic disk can be reduced.

A second embodiment of the present invention is shown in FIGS. 5 (a)-(e).
In this embodiment, the structure for attaching the slider to the gimbal 5 is the first.
It is the same as the first embodiment except that it is different from the first embodiment.
As shown in FIG. 5A, the slider 3 is divided into a slider back surface member 33 and a slider air bearing surface member 34, and the gimbal 5 is sandwiched between both members. Fifth
FIG. 5B shows a cross section of FIG. 5A viewed from the side surface of the slider. The central member 52 of the gimbal 5 is held by the slider back surface member 33 and the slider air bearing surface member 34. Both end members 53 of the gimbal are joined to the support 7 by spot welding or the like. FIG. 5 (c) is a view of the positional relationship between the slider 3 and the gimbal 5 when mounted on the gimbal 5, as seen from the inflow end face side of the slider, and FIG. 5 (d) is a side view of FIG. 5 (c). FIG. 5 (e) is a view of the state in which the gimbal 5 having the slider 3 attached thereto is joined to the support 7 as seen from the slider back side. The gimbal 5 is the center of gravity G of the slider 3.
Is attached to the surface including.

In this embodiment, the slider can be easily and firmly attached to the gimbal. Further, even when the height (thickness) of the slider is low, it is possible to easily attach the gimbal to the surface parallel to the air bearing surface of the slider and including the center of gravity G. Of course, this embodiment can also achieve the same effects as those of the first embodiment.

A third embodiment is shown in FIG. The present embodiment is the same as the first embodiment except the structure of the gimbal and the mounting structure of the slider on the gimbal. As shown in FIGS. 6A and 6B, a gimbal mounting recess is formed on the side surface of the slider 3.
35 is provided, and the tip of the four-piece gimbal 5 joined to the support 7 (the end not joined to the support 7) is inserted into the recess 35 to move the slider. A convex portion 54 for fitting is provided. The gimbal 5 is attached on a plane including the center of gravity G of the slider and parallel to the air bearing surface of the slider. FIG. 6C is a view of the slider 3, the gimbal 5, and the supporting body 7, which are held by the gimbal joined to the supporting body 7, as viewed from the back side of the slider. In the present embodiment, the slider can be fitted and coupled to the gimbal, so that the slider can be easily attached to the gimbal and the productivity can be remarkably improved. Furthermore, it goes without saying that the same effects as those of the first embodiment can be obtained. As shown in FIG. 6 (d), the slider protrusion 36 is provided,
The same effect can be expected by providing the gimbal 5 with the recess 55.

7 (a), (b) and (c) show a fourth embodiment of the present invention. 7 (a) is a front view of the vicinity of the slider mounting surface as seen from the air bearing surface side of the slider, FIG. 7 (b) is an I-I joint surface view of FIG. 7 (a), and FIG. 7 (c) is Similarly, the II-II joint view is shown. The present embodiment differs from the first embodiment only in the shape of the gimbal 5. In this embodiment, a gimbal 5 having a shape shown in the figure which is widely used for supporting a magnetic head of a floppy disk device is used. In this embodiment, since the supporting rigidity of the gimbal can be made considerably low, it is expected that the deterioration of the flying characteristics of the slider due to the attachment of the gimbal can be further reduced as compared with the first embodiment. Of course, the same effect as described in the first embodiment can be expected. The gimbal may have any shape and structure as long as it does not hinder slider pitching, rolling, and out-of-plane vibration.

A fifth embodiment of the present invention will be described with reference to FIGS. 8, 9 and 10. In the first embodiment, the plurality of sliders provided on the support 7 have the same shape and size. However, the peripheral speed of the magnetic disk with respect to each slider is different due to the different radial distance from the axis of the magnetic disk. However, since the sliders having the same shape and size have the property that the flying height increases as the peripheral speed of the magnetic disk increases, the slider located on the inner peripheral side and the slider located on the outer peripheral side of the magnetic disk in the first embodiment. There is a problem that the flying heights of the sliders are different. On the other hand, the fifth embodiment is intended to solve such a problem, and is different from the first embodiment in the structural features described below. (Other configurations are the same as those in the first embodiment.) Now, for each slider shown in FIG. 1, the slider located on the innermost circumference side of the magnetic disk is represented by a number, and is sequentially positioned on the outer circumference side. The sliders to be operated are represented by numbers and. In the fifth embodiment, assuming that the magnetic disk peripheral velocity is the same for all of these sliders, ..., As shown in FIG. The flying characteristics of each slider (negative pressure type slider in this embodiment) are determined so that the flying height from the disk surface becomes large. To this end, as shown in FIGS. 9 (a) and 9 (b), the width R ₁ of the flying rail (positive pressure generating rail) 37 of the innermost slider is set to be smaller than the width R ₄ of the outermost slider 37 thereof. The width N ₁ of the negative pressure generating pocket 38 is made narrower than that N _{4 of the} outermost peripheral slider. The dimensional relationships of the sliders located between these two sliders are made different in order so as to be in the above range. As a result, the levitation characteristics shown in FIG. 8 can be obtained. Note that the floating characteristics as shown in FIG. 8 may be obtained by means other than the above.

Now, in the fifth embodiment having the above-mentioned configuration, when the magnetic disk is rotating at a predetermined number of revolutions, the actual magnetic disk peripheral speeds of the respective sliders ,. Since they are different from each other in proportion to the distance in the radial direction, the actual flying heights of the sliders can be made the same because of the slider flying characteristics shown in FIG. As a result, the signal read / write performance of each slider is uniform, and even if there is a risk that the flying height of the slider will drop due to some disturbance and the magnetic disk will contact the slider, the flying height of each slider will remain the same. Therefore, the problem that only a specific slider comes into contact with and damages the magnetic disk is eliminated, and the reliability of the entire device can be improved. Since the basic structure is the same as that of the first embodiment, it is needless to say that the same effect as that of the first embodiment can be expected.

A sixth embodiment of the present invention is shown in FIGS. The difference between this embodiment and the first embodiment is that each slider 3 has
Using a positive pressure slider as described in 569. Unlike the negative pressure type slider, the positive pressure type slider is a slider that generates only positive pressure between the air bearing surface of the slider and the surface of the rotating magnetic disk by utilizing the principle of a dynamic pressure air bearing. In this embodiment, while the magnetic disk is stationary,
The slider 3 is supported by a gimbal 5 so as to contact the surface of the magnetic disk. A continuous pressurizing pump 11 capable of continuous pressurization is attached to the pressure adjusting flow path 9 connected to the inside of the support 7 via a filter 400. Next, the operation will be described with reference to FIG. Magnetic disk 2 starts rotating, positive pressure is generated between the reaches a predetermined rotational speed and the slider air bearing surface 31 and the magnetic disk 2, a force L _P such away the slider from the disk surface occurs. In this state, the continuous pressurizing pump 11 is operated, and high pressure air is supplied from the pressure adjusting flow path 9 through the filter 400 to the supporting member 7.
Send to the inner cavity 200 of. As a result, a part of the air flows out from the support 7, but a pressure difference ΔP occurs between the back surface of the slider 3 and the air bearing surface. If the area of the slider back surface 32 is S and the pressure difference between the slider back surface and the air bearing surface is ΔP,
Applied load F _L for pressing the slider to the magnetic disk surface is expressed by the following equation.

F _L = S · ΔP (4) The flying height h of the slider is L _P due to the positive pressure and the pressing force.
F _L and balances that it is (balance point). Therefore, if the pressure is continuously applied from the pump 11 while the disk 2 is rotating, that is, while the magnetic disk is operating, the slider can be held against the magnetic disk surface with a predetermined flying height. Since more F _L can be easily adjusted by adjusting the ΔP from equation (4), to adjust the output of the pressure pump 11, it is also possible to control the flying height h of the slider. Tokusho
Since the positive pressure type slider as shown in 57-569 is easier to form than the negative pressure type slider and is generally widely used, this embodiment has an advantage that it can be easily manufactured at a low cost. There is also.

Further, by providing a heating means in a part of the pressure adjusting flow path, warm air is supplied to each slider, and the magnetic disk
The water between the sliders can be vaporized to release the adsorption and prevent the adsorption accident.

The sixth embodiment is of a non-auto loading type in which the slider is in contact with the magnetic disk when it is stopped and the magnetic disk is started in this contact state.
Therefore, if the heating means for supplying hot air as described above is not provided, water droplets may agglomerate between the slider and the magnetic disk to cause an adsorption accident during the stop. In addition, a modified embodiment in which the sixth embodiment is an auto loading type is also possible. That is, the eleventh
As structurally the same as those shown in Fig. 12 and Fig. 12, while the magnetic disk is stationary, the slider is moved at a predetermined distance from the surface of the magnetic disk (even if the magnetic disk rotates, the air flow accompanying it causes a positive pressure on the slider. It is held at a distance (a distance that does not reach), and after the start of rotation of the magnetic disk, the support 7
Pressurized air is sent from the pump 11 into the internal space 200 of the magnetic disk, and the pressure difference generated between the inner and outer surfaces of the slider causes the slider to move to a distance such that the positive pressure due to the air flow accompanying the rotating magnetic disk acts on the slider. Loading is performed by bringing the surface closer to the surface, and during the subsequent operation, it is sufficient to continue feeding the pressurized air from the pump 11 as in the sixth embodiment. The unloading is performed by stopping the feeding of the pressurized air from the pump 11.

A seventh embodiment of the present invention will be described with reference to FIG. 13 and its sectional view taken along line I-I of FIG.

The same reference numerals as those used in FIG. 1 indicate the same parts as those shown in FIG. 1 or the parts having the same functions. The difference between this embodiment and the first embodiment is that in the first embodiment, the support 7 is a united structure of the support members 71 and 72, and the sliders are held on both sides of the support 7. On the other hand, in the present embodiment, the support body 7 is in the shape of a square tube which is closed except for the window 6 by the combination of the channel-shaped support member 73 having a U-shaped cross section and the flat cover plate 75. Holding the slider. As a result, the slider support mechanism of this embodiment can be used even in a magnetic disk device having only one magnetic disk. In Fig. 13, support member
Spacers 76 are provided between the two support bodies 7 including 73 and the cover plate 75.
It is installed on both sides of the magnetic disk 2 via. Each support and spacer are provided with a pressure adjusting flow path 9,
Pressure adjusting means 10 is provided at the other end. As a result, even in a magnetic disk device having one disk, data written on both surfaces of the disk can be accessed at high speed. The outer end (right end in the figure) of the support 7 is connected to a drive means for moving the entire support in the radial direction. Although the negative pressure type slider is used in this example as in the first example, a positive pressure type slider may be used according to the sixth example.

An eighth embodiment of the present invention is shown in FIGS. 15, 16 and 17. FIG. 15 is a sectional view taken along line I-I of FIG. 16 (b), and FIG.
16 shows a II-II cross section of FIG. The same reference numerals as those in the first embodiment used in this embodiment indicate the same parts as the first embodiment or parts having the same functions.
The difference between this embodiment and the first or seventh embodiment is that the support 7 is a flat plate having no internal cavity and no pressure adjusting means is installed. The support 7 is a flat plate and, as shown in FIG. 16, is provided with the same number of windows 6 as the number of sliders, and the sliders 3 are mounted in the windows 6 by gimbals 5 that cross the center of gravity thereof.

In the present embodiment, the support 7 does not have a closed structure, and it is not possible to apply back pressure to the slider for loading, so that the gimbal 5 is applied to the magnetic disk when the slider is stopped.
The contact start-stop type is used to keep the contact with the elastic force of. In this embodiment, the slider adsorption phenomenon may occur, but since the weight of the entire support mechanism can be reduced, there is an advantage that the drive means for moving the slider support mechanism in the radial direction can be downsized. . Figures 16 and 17
Although a negative pressure type slider is shown in the drawing, a positive pressure type slider may be used.

FIG. 18 shows a ninth embodiment of the present invention. In this embodiment, the pressure adjusting flow path 9 is formed in the support 7 so as to extend to the slider 3 at the innermost peripheral position, and the flow path is provided with nozzles 91 facing the back surface of each slider. There is.
Therefore, the air pressurized by the pump 10 can be directly guided to the back surface of each slider, and the same effect as that of the first embodiment can be expected even if the pressure of the pump 10 is small. Therefore, there is an advantage that the pump 10 can be downsized.

If a pump capable of continuous pressurization as shown in FIG. 11 is used instead of the pump 10, it can be applied to the case where a positive pressure type slider is used.

A super elastic alloy may be used for the gimbal 5 in each of the above embodiments. Superelastic alloys are also generally shape memory alloys, such as Ni-Ti alloys, Cu-Al-Ni alloys or Cu.
-Sn-Al alloy, etc. The superelastic alloy enters the superelastic region soon after passing through the elastic region when the deformation is increased from zero, but it is much smaller in the superelastic region than (increase in stress) / (increase in deformation) in the elastic region. ,
Moreover, when the stress is returned to zero, the deformation also returns to zero. It is more preferable to use this for the gimbal 5 in terms of the effect of the present invention.

[Advantages of the Invention] (1) Since the slider is supported by the gimbal spring on the plane passing through the center of gravity of the slider, no moment is generated by the acceleration force at the time of access, and swing vibration of the slider does not occur.

(2) There is no problem of the influence of the natural frequency of the load arm as in the conventional example in which a load is applied from the load arm to the slider provided at the tip of the load arm. Little.

(3) It is possible to easily load and unload the slider by adjusting the pressure inside the support.
Further, it becomes possible to easily apply a necessary pressing load, and the flying height of the slider can be easily controlled by adjusting the pressure.

(4) Since a gimbal spring is used to support the slider, there is almost no deterioration in quality over time, and there is no fear of dust generation.

(5) The productivity is good because there is no difficulty in manufacturing as in the case of using the viscoelastic film for supporting the slider.

(6) The accessibility can be further improved by arranging a plurality of sliders in the radial direction of the magnetic disk.

[Brief description of drawings]

FIG. 1 is a sectional view of the first embodiment of the present invention, and FIG. 2 (a).
Is its front view seen from the magnetic disk surface side, FIG. 2 (b)
Is an inside view seen from the first I-I plane, and FIG.
FIG. 3A is a sectional view taken along the line I-I of FIG.
II-II sectional view of FIG. 4, (a), (b), (c),
(D) is a functional explanatory view of the embodiment, and FIGS. 5 (a) and 5 (b).
Is an assembly drawing of the slider gimbal of the second embodiment of the present invention, and FIGS. 5 (c), (d), and (e) are front views, side views, top views, and FIGS. 6 (a) and (b). Is a sectional view taken along line II of FIG. 6 (c) of the third embodiment of the present invention, and II-
II sectional view, FIG. 6 (C) is a top view thereof, FIG. 6 (d) is a sectional view of a modification of the third embodiment, FIG. 7 (a),
(B), (c) is a front view of the fourth embodiment of the present invention, I-
I sectional view, II-II sectional view, FIG. 8 is a diagram showing the flying characteristics of the slider in the embodiment of FIG. 5 of the present invention, and FIGS. 9 (a) and 9 (b) are used in the fifth embodiment. The shape of the slider, FIG. 10 is a view showing the function and effect of the fifth embodiment, FIG. 11 is a sectional view of the sixth embodiment of the present invention, FIG. 12 is its functional explanatory view, and FIG. FIG. 14 is a sectional view of a seventh embodiment of the present invention, FIG. 14 is an II sectional view thereof, and FIG. 15 is an II sectional view of FIG. 16 (b) of an eighth embodiment of the present invention. 16 (a) is its front view, FIG. 16 (b) is its rear view, and FIG. 17 is its FIG. 16 (a).
II-II sectional view, FIG. 18 is a sectional view of a ninth embodiment of the present invention, FIG. 19 is a perspective view of a positive pressure type slider, and FIG. 20 is a perspective view of a negative pressure type slider. 1 ... Axis, 2 ... Magnetic disk 3 ... Slider, 4 ... Electromagnetic converter 5 ... Gimbal, 6 ... Window 7 ... Support, 9 ... Pressure adjusting flow path 10 ... Pump, 400 ... …filter

Front page continuation (72) Inventor Kozo Wakatsuki 502 Jinritsu-cho, Tsuchiura-shi, Ibaraki Hiritsu Seisakusho Co., Ltd. (72) Inventor Shoji Suzuki 502 Jinritsu-cho, Tsuchiura-shi, Ibaraki Hiritsu Seisakusho Co., Ltd. In-Laboratory (72) Inventor Yoshinori Takeuchi, 502 Jinritsucho, Tsuchiura-shi, Ibaraki Machinery Research Laboratory, Hiritsu Seisakusho Co., Ltd. (56) Reference JP 62-99967 (JP, A) JP 51-80212 (JP, A) JP-A-56-117369 (JP, A) JP-A-56-124165 (JP, A) JP-A-1-107384 (JP, A) JP-A-63-281283 (JP, A)

Claims (4)

[Claims] 1. A highly rigid structure which is supported at a predetermined distance from the surface of the magnetic disk, has a window on the surface facing the surface of the magnetic disk, and has an airtight cavity inside except for the window. A support; a low-rigidity gimbal spring in the window and coupled to the edge of the window; and an air gap between the window and the edge of the window so as to be displaceable in the out-of-plane direction of the magnetic disk. A slider supported in the window by the gimbal spring so as to have a flow-allowing gap and in which the back surface directly contacts the air in the cavity; pressure adjusting means for adjusting the pressure of the cavity in the support. And a floating head slider support mechanism. 2. The floating head slider support mechanism according to claim 1, wherein the joint portion between the slider and the gimbal spring is on a plane that passes through the center of gravity of the slider and is parallel to the air bearing surface of the slider. 3. A high rigidity, which is supported with a predetermined distance from the magnetic disk surface, has a window on the surface facing the magnetic disk surface, and has an airtight cavity inside except for the window. A support; a low-rigidity gimbal spring in the window and coupled to the edge of the window; and an air gap between the window and the edge of the window so as to be displaceable in the out-of-plane direction of the magnetic disk. A slider supported in the window by the gimbal spring so as to have a flow-allowing gap and in which the back surface directly contacts the air in the cavity; pressure adjusting means for adjusting the pressure of the cavity in the support. A means for heating the gas fed from the pressure adjusting means to the cavity in the support body, the means being provided in the middle of a gas system path connecting the pressure adjusting means and the cavity. Head slider support mechanism. 4. A highly rigid structure which is supported at a predetermined distance from the surface of the magnetic disk, has a window on the surface facing the surface of the magnetic disk, and has an airtight cavity inside except for the window. A support; a low-rigidity gimbal spring in the window and coupled to the edge of the window; and an air gap between the window and the edge of the window so as to be displaceable in the out-of-plane direction of the magnetic disk. A slider supported in the window by the gimbal spring so as to have a flow-allowing gap and in which the back surface directly contacts the air in the cavity; pressure adjusting means for adjusting the pressure of the cavity in the support. The above-mentioned levitation characteristics are imparted to each slider by narrowing the width of the positive pressure generating rail of the slider or increasing the negative pressure generating pocket of the slider closer to the outer peripheral side of the magnetic disk. And floating head Rider support mechanism.