JPH0778695A - Power supply device for lighting ac arc discharge lamp and lighting method for lamp - Google Patents

Power supply device for lighting ac arc discharge lamp and lighting method for lamp

Info

Publication number
JPH0778695A
JPH0778695A JP5248643A JP24864393A JPH0778695A JP H0778695 A JPH0778695 A JP H0778695A JP 5248643 A JP5248643 A JP 5248643A JP 24864393 A JP24864393 A JP 24864393A JP H0778695 A JPH0778695 A JP H0778695A
Authority
JP
Japan
Prior art keywords
inverter
discharge lamp
lighting
power supply
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5248643A
Other languages
Japanese (ja)
Other versions
JP2821844B2 (en
Inventor
Kunio Kano
国男 狩野
Haruo Moriguchi
晴雄 森口
Kenzo Danjo
謙三 檀上
Takashi Tsujii
高志 辻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sansha Electric Manufacturing Co Ltd
Original Assignee
Sansha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sansha Electric Manufacturing Co Ltd filed Critical Sansha Electric Manufacturing Co Ltd
Priority to JP5248643A priority Critical patent/JP2821844B2/en
Publication of JPH0778695A publication Critical patent/JPH0778695A/en
Application granted granted Critical
Publication of JP2821844B2 publication Critical patent/JP2821844B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B20/00Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Inverter Devices (AREA)

Abstract

PURPOSE:To provide a power supply device which clan easily start a metal halide lamp and AC mercury lamp, with which provision of a high frequency generating device is omitted. CONSTITUTION:This device comprises a DC producing means 2 through rectification of AC power supplied, a reactor 12 to smooth the output of the DC producing means, an inverter 14 having at least one set of serially connected switching elements 15, 16 or ones 17, 18 and converting the DC into AC which is to be supplied to a discharge lamp 25, and a boosting capacitor 23 laid in parallel with the inverter 14. The capacitor 23 charges the energy accumulated in the reactor when the two switching elements 15, 16 or the ones 17, 18 are shortcircuited and a high voltage when they 15, 36 or 17, 18 are off so that high voltage is impressed on the inverter to facilitate start lighting.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、起動時の改善を行った
メタルハライドランプ及び交流水銀灯等の交流アーク放
電灯の電源装置とその点灯方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power supply device for an AC arc discharge lamp such as a metal halide lamp and an AC mercury lamp, which has been improved in starting, and a lighting method thereof.

【0002】[0002]

【従来の技術】従来のメタルハライドランプ及び水銀灯
の点灯用電源装置には、図2に示すようなものがある。
この電源装置は、商用交流電源に接続される入力端子1
を有し、ダイオード3〜6で構成される整流器2により
交流電源を整流し、コンデンサ7により平滑する。平滑
された直流をIGBT等のスイッチング素子により構成
されるチョッパ11により15ないし20kHzの周波
数でオンオフを繰り返し、その出力をリアクトル12、
フライホイルダイオード13及び平滑コンデンサ33に
より平滑する。平滑された直流電源をIGBT等のスイ
ッチング素子15〜18により構成されるインバータ1
4により50ないし250Hzの周波数の矩形波交流に
変換し、矩形波交流が負荷25のメタルハライドランプ
又は水銀灯等の交流アーク放電灯に供給される。なお、
27はインバータ14のスイッチング素子に駆動信号を
供給するインバータ制御装置であり、28は起動信号が
入力する起動信号端子であり、31はチョッパ11に駆
動信号を供給するチョッパ制御回路である。
2. Description of the Related Art A conventional power source device for lighting a metal halide lamp and a mercury lamp is shown in FIG.
This power supply device has an input terminal 1 connected to a commercial AC power supply.
The AC power source is rectified by the rectifier 2 having the diodes 3 to 6 and smoothed by the capacitor 7. The smoothed direct current is repeatedly turned on and off at a frequency of 15 to 20 kHz by a chopper 11 composed of a switching element such as an IGBT, and its output is output to the reactor 12,
Smoothing is performed by the flywheel diode 13 and the smoothing capacitor 33. Inverter 1 in which a smoothed DC power supply is composed of switching elements 15 to 18 such as IGBTs
4 converts into a rectangular wave alternating current having a frequency of 50 to 250 Hz, and the rectangular wave alternating current is supplied to an AC arc discharge lamp such as a metal halide lamp or a mercury lamp of the load 25. In addition,
Reference numeral 27 is an inverter control device that supplies a drive signal to the switching element of the inverter 14, 28 is a start signal terminal to which a start signal is input, and 31 is a chopper control circuit that supplies a drive signal to the chopper 11.

【0003】一般に、メタルハライドランプ及び水銀灯
の交流アーク放電灯は起動時に高電圧を印加しなければ
起動できない。31はインバータ14と負荷25との間
に設けられた高周波発生装置であり、放電灯25の起動
時に高周波で高電圧を放電灯25に印加して放電灯25
の起動を容易にしている。
Generally, an AC arc discharge lamp such as a metal halide lamp and a mercury lamp cannot be started unless a high voltage is applied at the time of starting. Reference numeral 31 is a high frequency generator provided between the inverter 14 and the load 25, and applies a high voltage to the discharge lamp 25 at high frequency when the discharge lamp 25 is started.
Makes it easier to start.

【0004】[0004]

【発明が解決しようとする課題】ところが、高周波発生
装置31は高周波高電圧を発生するために、電源装置自
身及び電源装置近傍にある電子機器にノイズとなってこ
れらの機器を誤動作させていた。
However, since the high-frequency generator 31 generates a high-frequency high voltage, the power supply device itself and electronic devices near the power supply device become noise, causing these devices to malfunction.

【0005】本発明は、高周波発生装置を除き、メタル
ハライドランプ及び水銀灯の交流アーク放電灯を容易に
起動させるように改善したものである。
The present invention has been improved so as to easily start an AC arc discharge lamp such as a metal halide lamp and a mercury lamp, except for a high frequency generator.

【0006】[0006]

【課題を解決するための手段】本発明は、交流電源を整
流する直流生成手段と、上記生成手段の出力を平滑する
リアクトルと、少なくとも1組の直列接続される2個の
スイッチング素子を有し、直流を交流に変換し、放電灯
に交流を供給するインバータと、インバータと並列に昇
圧用コンデンサを設ける。この昇圧用コンデンサは、直
列接続される2個のスイッチング素子の短絡時に発生す
るリアクトルのエネルギを上記スイッチング素子の開放
時に放出させて充電し昇圧するコンデンサである。
The present invention has a direct current generating means for rectifying an alternating current power source, a reactor for smoothing the output of the generating means, and at least one set of two switching elements connected in series. An inverter that converts direct current into alternating current and supplies alternating current to the discharge lamp, and a boosting capacitor in parallel with the inverter are provided. The boosting capacitor is a capacitor that releases the energy of the reactor generated when two switching elements connected in series are short-circuited and charges the boosted voltage when the switching element is opened.

【0007】また、交流電源を整流する直流生成手段
と、上記直流生成手段の出力を平滑するリアクトルと、
少なくとも1組の直列接続される2個のスイッチング素
子を有し直流を交流に変換し交流アーク放電灯に交流を
供給するインバータと、インバータと並列に昇圧用コン
デンサを設ける。そして、点灯起動時上記直列接続され
る2個の上記スイッチング素子を短絡させて上記リアク
トルにエネルギーを蓄積し、上記スイッチング素子の開
放により上記インバータの入力に並列に設けられたコン
デンサに上記エネルギを放出し、上記インバータ入力を
昇圧させて上記放電灯を点灯させるものである。
Further, a direct current generating means for rectifying the alternating current power source, a reactor for smoothing the output of the direct current generating means,
An inverter having at least one set of two switching elements connected in series and converting direct current into alternating current to supply alternating current to an alternating current arc discharge lamp, and a boosting capacitor are provided in parallel with the inverter. When the lighting is started, the two switching elements connected in series are short-circuited to store energy in the reactor, and by opening the switching element, the energy is released to a capacitor provided in parallel with the input of the inverter. Then, the voltage of the inverter input is increased to light the discharge lamp.

【0008】[0008]

【作用】直流生成手段により交流電源を整流し、リアク
トルにより平滑する。平滑された直流を直列に接続され
たスイッチング素子のインバータにより矩形波交流に変
換し、放電灯に交流を供給する。インバータと並列にコ
ンデンサを設け、起動時直列接続されたスイッチング素
子を短時間短絡させた後、開放してこのコンデンサに印
加する電圧を昇圧させる。昇圧されたコンデンサの電圧
をインバータに印加し、インバータにより変換された高
電圧を放電灯に印加し、放電灯の起動を行う。
The AC power supply is rectified by the DC generator and smoothed by the reactor. The smoothed direct current is converted into a rectangular wave alternating current by the switching element inverter connected in series, and the alternating current is supplied to the discharge lamp. A capacitor is provided in parallel with the inverter, and the switching elements connected in series at the time of start-up are short-circuited for a short time and then opened to boost the voltage applied to this capacitor. The boosted capacitor voltage is applied to the inverter, the high voltage converted by the inverter is applied to the discharge lamp, and the discharge lamp is started.

【0009】[0009]

【実施例】この発明による電源装置の1実施例を図1に
示す。図2に示した従来のものと同等部分には同一符号
を付している。この電源装置が従来のものと異なる点
は、インバータ14の入力に、並列にダイオード21と
限流抵抗22との並列回路とコンデンサ23の直列回路
とが設けられている点、高周波発生装置31を除いた
点、従来のインバータ制御回路32の駆動信号と異なる
起動時の駆動信号を出力するインバータ制御回路を設け
た点にある。そして、コンデンサ23は小さい容量のも
のが選択される。
FIG. 1 shows an embodiment of a power supply device according to the present invention. The same parts as those of the conventional one shown in FIG. 2 are designated by the same reference numerals. This power supply device is different from the conventional power supply device in that a parallel circuit of a diode 21 and a current limiting resistor 22 and a series circuit of a capacitor 23 are provided in parallel at the input of the inverter 14, and a high frequency generator 31 is used. Except for this, an inverter control circuit that outputs a drive signal at the time of startup different from the drive signal of the conventional inverter control circuit 32 is provided. The capacitor 23 having a small capacity is selected.

【0010】今、起動信号入力端子28に起動信号が入
力すると、チョッパ制御回路26に信号が入り、チョッ
パ11がオンし、リアクトル12及びフライホイルダイ
オード13により平滑して、インバータ14に直流電圧
を印加する。又、チョッパ11がオンすると、ダイオー
ド21を介してコンデンサ23を充電する。このときの
電圧の最大値は、チョッパ11の出力電圧に等しい。
When a start signal is input to the start signal input terminal 28, a signal is input to the chopper control circuit 26, the chopper 11 is turned on, smoothed by the reactor 12 and the flywheel diode 13, and a DC voltage is supplied to the inverter 14. Apply. When the chopper 11 is turned on, the capacitor 23 is charged via the diode 21. The maximum value of the voltage at this time is equal to the output voltage of the chopper 11.

【0011】一方、起動信号がインバータ制御回路27
に入力し、まず、インバータを構成するスイッチング素
子のうち、直列回路を構成するスイッチング素子15,
16又はスイッチング素子17,18のいずれかに駆動
信号を入力する。例えば、スイッチング素子15,16
に駆動信号が入力すると、スイッチング素子15,16
がオンする。これにより、チョッパ11,リアクトル1
2,スイッチング素子15,スイッチング素子16を介
して整流器に電流が流れ、リアクトル12にエネルギー
が蓄積される。そして、スイッチング素子15,16の
駆動信号を短時間Tsでオフする。スイッチング素子1
5,16のオフにより、リアクトル12には矢印の方向
に電圧が誘起し、リアクトル12,ダイオード21,コ
ンデンサ23,フライホイルダイオード13を介してリ
アクトル21に電流が流れる。
On the other hand, the start signal is the inverter control circuit 27.
First, among the switching elements forming the inverter, the switching elements 15 forming the series circuit,
The drive signal is input to either 16 or the switching elements 17 and 18. For example, the switching elements 15 and 16
When a drive signal is input to the switching elements 15 and 16
Turns on. As a result, the chopper 11 and the reactor 1
2, a current flows through the rectifier via the switching element 15 and the switching element 16, and energy is accumulated in the reactor 12. Then, the drive signals of the switching elements 15 and 16 are turned off in a short time Ts. Switching element 1
By turning off 5 and 16, a voltage is induced in the reactor 12 in the direction of the arrow, and a current flows in the reactor 21 via the reactor 12, the diode 21, the capacitor 23, and the flywheel diode 13.

【0012】今、スイッチング素子15,16がオンす
る短絡時間をTs、リアクトル12のインダクタンスを
L、チョッパ11の入力電圧をE、短絡電流をIとする
と、IはE/LとTsに比例する。また、コンデンサ2
3の容量をC、コンデンサ23の両端電圧をVcとする
と、VcはL/Cの1/2乗と短絡電流Iに比例する。
すなわち、コンデンサ23の両端電圧Vcは短絡時間T
sに比例し、スイッチング素子の短絡時間を長くしてリ
アクトル12に蓄えるエネルギーを高め、コンデンサ2
3に充電電圧を高める。
Assuming that the short-circuit time when the switching elements 15 and 16 are turned on is Ts, the inductance of the reactor 12 is L, the input voltage of the chopper 11 is E, and the short-circuit current is I, I is proportional to E / L and Ts. . Also, the capacitor 2
3 is C and the voltage across the capacitor 23 is Vc, Vc is proportional to L / C 1/2 power and the short circuit current I.
That is, the voltage Vc across the capacitor 23 is the short circuit time T
In proportion to s, the short-circuit time of the switching element is lengthened to increase the energy stored in the reactor 12,
Increase the charging voltage to 3.

【0013】これにより、コンデンサ23の両端電圧を
高電圧にすることができ、限流抵抗22を介してインバ
ータ14に高い無負荷電圧を印加することができる。次
にインバータ14を構成するスイッチング素子15と1
8、又は16と17にインバータ制御回路27から駆動
信号を入力し、スイッチング素子15と18、又は16
と17をオンさせ、放電灯25に電圧を印加する。この
起動時、放電灯25にはインバータ14の入力の高い電
圧が印加するので、放電灯25は起動点灯することがで
きる。放電灯25の起動後、インバータ14から50な
いし250Hzの周波数の交流を出力し、放電灯を継続
点灯させる。
As a result, the voltage across the capacitor 23 can be made high, and a high no-load voltage can be applied to the inverter 14 via the current limiting resistor 22. Next, switching elements 15 and 1 which constitute the inverter 14
8 or 16 and 17 inputs a drive signal from the inverter control circuit 27, and the switching elements 15 and 18 or 16
And 17 are turned on, and a voltage is applied to the discharge lamp 25. At the time of this start-up, a high voltage input to the inverter 14 is applied to the discharge lamp 25, so that the discharge lamp 25 can be turned on. After starting the discharge lamp 25, the inverter 14 outputs an alternating current having a frequency of 50 to 250 Hz to continuously light the discharge lamp.

【0014】上記実施例では、整流器2の直流生成手段
の出力に、リアクトル12を小型化するために高周波ス
イッチングするチョッパを設けていたが、コンデンサ2
3の充電圧を高くするのには不要で除くこともできる。
また、上記実施例では、インバータ14にはスイッチン
グ素子15〜18のフルブリッジ型インバータを用いて
いたが、2個直列接続したコンデンサと2個直列接続し
たスイッチング素子で構成されるハーフブリッジ型イン
バータにも適用することができる。また、上記実施例
は、整流器2により交流を整流しているが、昇圧コンバ
ータを設け、整流後昇圧させる直流生成手段を用いても
よい。また、スイッチング素子15〜18は、IGBT
だけでなくMOSFET,バイポーラ,トランジスタに
も適用できる。
In the above embodiment, the output of the direct current generating means of the rectifier 2 is provided with the chopper for high frequency switching in order to downsize the reactor 12, but the capacitor 2
It is unnecessary to increase the charging pressure of No. 3 and can be removed.
Further, in the above-described embodiment, the full bridge type inverter of the switching elements 15 to 18 is used for the inverter 14, but a half bridge type inverter composed of two capacitors connected in series and two switching elements connected in series is used. Can also be applied. Further, in the above embodiment, the rectifier 2 is used to rectify the alternating current, but a boost converter may be provided and a direct current generating means for boosting after the rectification may be used. The switching elements 15 to 18 are IGBTs.
Not only can it be applied to MOSFET, bipolar, and transistor.

【0015】[0015]

【発明の効果】以上のように本発明によれば、スイッチ
ング素子の短絡によるリアクトルのエネルギーにより昇
圧するコンデンサを設けているので、起動時に高い電圧
を放電灯に印加でき、確実に放電灯を起動させることが
できる。また、この起動において、従来必要であった高
周波発生回路が不要となり、電源装置及び近傍の電子機
器を誤動作させることもない。また、昇圧用コンデンサ
は従来の平滑用コンデンサに使用される電解コンデンサ
よりも充分小さいものでよい。
As described above, according to the present invention, since the capacitor for boosting the energy of the reactor due to the short circuit of the switching element is provided, a high voltage can be applied to the discharge lamp at the time of starting, and the discharge lamp can be reliably started. Can be made. Further, in this start-up, the high-frequency generation circuit, which has been necessary in the past, is no longer necessary, and the power supply device and the electronic equipment in the vicinity do not malfunction. Further, the boosting capacitor may be sufficiently smaller than the electrolytic capacitor used in the conventional smoothing capacitor.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の交流アーク放電灯点灯用電源装置の一
実施例を示す概略ブロック図である。
FIG. 1 is a schematic block diagram showing an embodiment of a power supply device for lighting an AC arc discharge lamp according to the present invention.

【図2】従来の交流アーク放電灯点灯用電源装置の概略
ブロック図である。
FIG. 2 is a schematic block diagram of a conventional power supply device for lighting an AC arc discharge lamp.

【符号の説明】[Explanation of symbols]

2 直流生成手段 11 チョッパ 12 リアクトル 13 フライホイールダイオード 14 インバータ 15,16,17,18 スイッチング素子 21 ダイオード 22 限流素子(抵抗) 23 昇圧用コンデンサ 25 負荷(放電灯) 26 チョッパ制御回路 27 インバータ制御回路 28 起動信号入力端子 2 DC generating means 11 Chopper 12 Reactor 13 Flywheel diode 14 Inverter 15, 16, 17, 18 Switching element 21 Diode 22 Current limiting element (resistor) 23 Boosting capacitor 25 Load (discharge lamp) 26 Chopper control circuit 27 Inverter control circuit 28 Start signal input terminal

───────────────────────────────────────────────────── フロントページの続き (72)発明者 辻井 高志 大阪府大阪市東淀川区淡路2丁目14番3号 株式会社三社電機製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takashi Tsujii 2-14-3 Awaji, Higashiyodogawa-ku, Osaka City, Osaka Prefecture Sansha Electric Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 交流電源を整流する直流生成手段と、上
記直流生成手段の出力を平滑するリアクトルと、少なく
とも1組の直列接続される2個のスイッチング素子を有
し直流を交流に変換し交流アーク放電灯に交流を供給す
るインバータとを有する交流アーク放電灯点灯用電源装
置において、上記インバータと並列に設けられ、起動時
上記直列接続される2個の上記スイッチング素子の短絡
時に発生する上記リアクトルのエネルギを上記スイッチ
ング素子の開放時に放出させて充電し昇圧するコンデン
サを設けたことを特徴とする交流アーク放電灯点灯用電
源装置。
1. A direct current generating means for rectifying an alternating current power source, a reactor for smoothing the output of the direct current generating means, and at least one set of two switching elements connected in series, which convert direct current into alternating current and convert it into alternating current. In an AC arc discharge lamp lighting power supply device having an inverter that supplies AC to the arc discharge lamp, the reactor that is provided in parallel with the inverter and that is generated when the two switching elements connected in series at startup are short-circuited. A power supply device for lighting an AC arc discharge lamp, which is provided with a capacitor that releases the energy of the above-mentioned energy when the switching element is opened to charge and boost the voltage.
【請求項2】 交流電源を整流する直流生成手段と、上
記直流生成手段の出力を平滑するリアクトルと、少なく
とも1組の直列接続される2個のスイッチング素子を有
し直流を交流に変換し交流アーク放電灯に交流を供給す
るインバータとを有する交流アーク放電灯点灯用電源装
置の点灯方法において、点灯起動時上記直列接続される
2個の上記スイッチング素子を短絡させて上記リアクト
ルにエネルギを蓄積し、上記スイッチング素子の開放に
より上記インバータの入力に並列に設けられたコンデン
サに上記エネルギを放出し、上記インバータ入力を昇圧
させて上記放電灯を起動点灯させることを特徴とする交
流アーク放電灯点灯用電源装置の点灯方法。
2. A direct current generating means for rectifying an alternating current power source, a reactor for smoothing an output of the direct current generating means, and at least one set of two switching elements connected in series, the direct current being converted into an alternating current and the alternating current being exchanged. In a lighting method of a power supply device for lighting an AC arc discharge lamp, which comprises an inverter for supplying AC to the arc discharge lamp, at the time of lighting start, the two switching elements connected in series are short-circuited to store energy in the reactor. For discharging an AC arc discharge lamp by releasing the switching element to release the energy to a capacitor provided in parallel with the input of the inverter to boost the inverter input to start the discharge lamp. How to turn on the power supply.
JP5248643A 1993-09-09 1993-09-09 AC arc discharge lamp lighting power supply device and lighting method Expired - Fee Related JP2821844B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5248643A JP2821844B2 (en) 1993-09-09 1993-09-09 AC arc discharge lamp lighting power supply device and lighting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5248643A JP2821844B2 (en) 1993-09-09 1993-09-09 AC arc discharge lamp lighting power supply device and lighting method

Publications (2)

Publication Number Publication Date
JPH0778695A true JPH0778695A (en) 1995-03-20
JP2821844B2 JP2821844B2 (en) 1998-11-05

Family

ID=17181173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5248643A Expired - Fee Related JP2821844B2 (en) 1993-09-09 1993-09-09 AC arc discharge lamp lighting power supply device and lighting method

Country Status (1)

Country Link
JP (1) JP2821844B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010114460A (en) * 2010-01-07 2010-05-20 Dainippon Screen Mfg Co Ltd Heat treatment method, and heat treatment apparatus
US8447177B2 (en) 2007-09-12 2013-05-21 Dainippon Screen Mfg. Co., Ltd. Heat treatment apparatus heating substrate by irradiation with light

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8447177B2 (en) 2007-09-12 2013-05-21 Dainippon Screen Mfg. Co., Ltd. Heat treatment apparatus heating substrate by irradiation with light
US8781309B2 (en) 2007-09-12 2014-07-15 Dainippon Screen Mfg. Co., Ltd. Heat treatment apparatus heating substrate by irradiation with light
US9295107B2 (en) 2007-09-12 2016-03-22 SCREEN Holdings Co., Ltd. Heat treatment apparatus heating substrate by irradiation with light
JP2010114460A (en) * 2010-01-07 2010-05-20 Dainippon Screen Mfg Co Ltd Heat treatment method, and heat treatment apparatus

Also Published As

Publication number Publication date
JP2821844B2 (en) 1998-11-05

Similar Documents

Publication Publication Date Title
JP3382012B2 (en) Self-excited inverter device
JP3294343B2 (en) Power supply
JP2909867B2 (en) Lighting circuit for vehicle discharge lamps
US6744222B2 (en) Discharge lamp lighting apparatus and lamp apparatus
KR960010828B1 (en) High power factor power supply
JP2821844B2 (en) AC arc discharge lamp lighting power supply device and lighting method
JP3850052B2 (en) Discharge lamp lighting device
JP3096211B2 (en) Switching regulator
JP4211022B2 (en) Discharge lamp lighting device
JP2916741B2 (en) Power supply for lighting high-intensity discharge lamps
JP2000243584A (en) Discharge lamp lighting device
JP4151107B2 (en) High pressure discharge lamp lighting device
JP4323136B2 (en) Power supply unit for arc welding machine
JP3483128B2 (en) Power supply circuit for lamp
JP3211380B2 (en) Power converter
JP2728682B2 (en) Uninterruptible power supply for computer
JP2964839B2 (en) Power converter
JPH0341891Y2 (en)
JP3125334B2 (en) Discharge lamp lighting device
JP2637646B2 (en) DC power supply circuit
JP2802529B2 (en) Discharge lamp lighting device
JPH07288190A (en) Inverter high-voltage generator for x-ray
JP3134958B2 (en) Power supply device, discharge lamp lighting device and lighting device
JPH05159893A (en) Inverter controlled x-ray high voltage generator
JPS6313680Y2 (en)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080904

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080904

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090904

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090904

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100904

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100904

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110904

Year of fee payment: 13

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120904

Year of fee payment: 14

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130904

Year of fee payment: 15

LAPS Cancellation because of no payment of annual fees