JPH0775264B2 - Method for manufacturing piezoelectric element displacement amplification mechanism - Google Patents

Description

The present invention relates to a method for manufacturing a piezoelectric element displacement amplification mechanism.

[Conventional technology]

FIG. 3 is a perspective view showing an example of the piezoelectric element displacement giving mechanism. This piezoelectric element displacement amplification mechanism includes a mounting substrate 22, two lever arms 23, a hinge 24 connecting the lever arm 23 and the mounting substrate 22, and a lever 28 bonded to each end surface of the piezoelectric element 25 with an adhesive 28. Displacement transmitting means 26 for transmitting displacement of the piezoelectric element 25 to the arm 23, and a beam 29 as displacement expanding means connected to the tip ends of both lever arms 23 in a bridge shape.

FIG. 5 is a process drawing showing a manufacturing process of the piezoelectric element displacement amplification mechanism. In the figure, reference numeral 21 is a displacement-increasing metal fitting made of a metal plate by a punching method or the like, and has a mounting hole 22a.
Mounting board 22 having two, lever arms 23, a hinge 24 connecting the lever arm 23 and the mounting board 22, a lever arm
The displacement transmission means 26 for transmitting the displacement of the piezoelectric element 25 is integrated with the 23. First, the displacement magnifying member 21 and the piezoelectric element 25 are prepared, and both ends of the piezoelectric element 25 are bonded to the displacement transmitting means 26 with an adhesive 28 such as an epoxy resin. Next, a thin metal plate is punched by a press punching method, etc., and a beam 29 and a rivet 30 whose both ends are shaped into a U shape according to the plate thickness of the displacement enlarging metal fitting 21 are prepared. After combining with the tip of the rivet 23, the rivet 30 is penetrated through the rivet holes 23a and 29a provided in the tip of the lever arm 23 and the U-shaped portion of the beam 29, and the rivet 30 is molded to a predetermined size by a hydraulic press machine or the like. . As a result, the piezoelectric element displacement amplification mechanism shown in FIG. 3 is obtained.

[Problems to be Solved by the Invention]

The above-described conventional method for manufacturing a piezoelectric element displacement amplification mechanism uses a displacement enlarging metal fitting having a mounting substrate, a lever arm, a hinge, and a displacement transmitting means as an integrated structure. The hinge efficiently amplifies the displacement of the piezoelectric element. Therefore, its cross section is designed to be as thin as possible.Therefore, there is a drawback that external force that acts during handling of the displacement-increasing metal fittings, plating work for rust prevention, and transportation causes deformation easily, and the dimensional accuracy is high. This is an obstacle to manufacturing a piezoelectric element displacement amplification mechanism that is high in output displacement and stable.

[Means for Solving the Problems]

A first piezoelectric element amplifying mechanism of the present invention includes a piezoelectric element that expands and contracts according to an applied voltage, and a first piezoelectric element at one end of the piezoelectric element.
A first lever arm whose one end is connected via a displacement transmitting means, and a second lever arm whose one end is connected to the other end of the piezoelectric element via a second displacement transmitting means, A second lever arm is provided between the first and second lever arms, is connected to one end of the first lever arm via a first hinge, and is further connected to one end of the second lever arm. And a displacement detection means for detecting displacement, which is provided between the other end of the first lever arm and the other end of the second lever arm. Displacement of the element is transmitted to the first and second lever arms via the first and second displacement transmitting means, and the displacement is amplified to the displacement detecting means with the first and second hinges as fulcrums. Piezoelectric element displacement amplification mechanism In the manufacturing method, a tie bar for fixedly connecting the first and second lever arms so as to prevent the first and second hinges from moving is further provided, and the piezoelectric element is provided between the first and second displacement transmitting means. A second piezoelectric element amplifying mechanism is characterized in that a step of removing the tie bar is provided after connecting the elements, and the second piezoelectric element amplifying mechanism has a piezoelectric element that expands and contracts according to an applied voltage, and a displacement transmitting means at one end of the piezoelectric element. A lever arm having one end connected to the other end of the piezoelectric element, and a mounting substrate connected to the other end of the piezoelectric element and a hinge provided in the vicinity of the displacement transmission means of the lever arm. In the method for manufacturing a piezoelectric element displacement amplification mechanism that amplifies the lever arm with the lever arm, the lever arm and the mounting substrate are fixed so that the hinge does not move. Further provided tie bars to be connected, and removing the tie bars after connecting the piezoelectric element between the displacement transmission means and said mounting substrate.

[Work]

The present invention improves the strength of the displacement enlarging metal fitting against external force by providing tie bars that connect and connect the lever arms and the lever arm and the mounting substrate.

Therefore, when the displacement magnifying metal is handled, it is not easily deformed by an external force that acts during rust prevention plating, transportation, or the like.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a process drawing of the first embodiment of the present invention. In the figure, reference numeral 1 is a displacement magnifying metal member manufactured by a press punching method or the like, and includes a mounting board 2 having a mounting hole 2a, two lever arms 3 having a rivet hole 3a at the tip, and a lever arm 3 A displacement transmitting means 6 for transmitting the displacement of the piezoelectric element 5 to the hinge 4 and the lever arm 3 for connecting the mounting board 2 with the mounting substrate 2.
Further, a tie bar 7 connecting and connecting the two lever arms 3 is provided as an integral structure. First, the displacement magnifying bracket 1
Then, the piezoelectric element 5 is prepared, and the piezoelectric element 5 is arranged between the displacement transmitting means 6 of the displacement enlarging metal fitting 1 with an adhesive 8 such as an epoxy resin so that both ends of the piezoelectric element 5 are bonded to the displacement transmitting means 6. Next, the tie bar 7 connecting and connecting the two lever arms 3 of the displacement enlarging metal fitting 1 is cut and removed using a press cutting die or the like. Next, a thin metal plate is punched by a press punching method or the like, and both ends of the punch are matched with the plate thickness of the displacement enlarging metal fitting 1 to prepare a beam 9 and a rivet 10. The beam 9 is shaped like a U and the tip of the lever arm 3 is prepared. Lever arm 3
Rivet hole 3 provided at the tip of the and the U-shaped part of the beam 9
The rivet 10 is penetrated through a and 9a, and the rivet 10 is molded into a predetermined size by a hydraulic press machine or the like to complete the manufacture of the piezoelectric element displacement amplification mechanism.

The table below shows the results of 100 prototypes of a piezoelectric element enlarging mechanism with a displacement of 10 μm and a generated force of 21 kgf and a displacement of 320 μm and a generated force of 150 gf. The hinge deformation occurs during transportation and handling. I didn't.

FIG. 4 shows an example of a piezoelectric element displacement amplification mechanism constituted by a lever arm that transmits and expands the displacement of the piezoelectric element.

FIG. 2 is a process drawing of the second embodiment of the present invention. Reference numeral 11 in the drawing is a displacement magnifying metal plate manufactured by a wire cut discharge method or the like, and has an L-shaped mounting substrate 12 having a mounting hole 12a, a lever arm 13, a lever arm 13 and an L-shaped mounting substrate. Displacement transmitting means for transmitting the displacement of the piezoelectric element 15 to the hinge 14 and the lever arm 13 that connect the 12 with the tip end thereof.
A tie bar 17 for connecting and connecting the 16 and the lever arm 13 to the mounting substrate 12 has an integrated structure. First, the displacement magnifying metal 11 and the piezoelectric element 15 are prepared, and the piezoelectric element 15 is arranged between the bottom of the L-shaped mounting substrate 12 and the displacement transmitting means 16 with the adhesive 18 such as epoxy resin. One end is bonded to the bottom of the mounting substrate 12 and the other end is bonded to the displacement transmitting means 16. Next, the tie bar 17 connecting and connecting the lever arm 13 of the displacement magnifying bracket 11 and the mounting substrate 12 is cut and removed by using a press cutting die or the like to obtain the piezoelectric element displacement amplification mechanism shown in FIG. .

Uses a piezoelectric element with a displacement of 10 μm and a generated force of 21 kgf, and uses a piezoelectric element displacement magnifying mechanism with a displacement of 100 μm and a generated force of 1200 gf.
The results of trial production are shown in the table below, and no hinge deformation occurred during transportation or handling.

[Effects of the Invention] As described above, the present invention provides a displacement provided with the lever arm of the displacement enlarging metal fitting and the tie bar that connects and connects the lever arm and the lever arm or the lever and the mounting substrate as an integral structure. After connecting the piezoelectric element to the displacement magnifying metal by using the magnifying metal, connecting and disconnecting the tie bar, the external force that acts on the displacement magnifying metal during plating, plating work for rust prevention, and transportation. As a result, it is possible to manufacture a piezoelectric element displacement amplification mechanism which has high dimensional accuracy and stable output displacement because it is not easily deformed.

[Brief description of drawings]

FIG. 1 is a process drawing of a first embodiment of a method for manufacturing a piezoelectric element displacement magnifying mechanism of the present invention, and FIG. 2 is a process drawing of a second embodiment of a method of manufacturing a piezoelectric element displacement magnifying mechanism of the present invention. 3 and 4 are perspective views showing an example of a piezoelectric element displacement magnifying mechanism,
FIG. 5 is a process diagram of a conventional method for manufacturing a piezoelectric element displacement magnifying mechanism. 1,11 …… Displacement magnifying bracket, 2,12 …… Mounting board, 2a, 12a …… Mounting hole, 3,13 …… Lever arm 3a, 13a …… Rivet hole, 4,14 …… Hinge, 5,15 ...... Piezoelectric element, 6,16 …… Displacement transmission means 7,17 …… Tie bar, 8,18 …… Adhesive, 9 …… Beam, 9a …… Rivet hole, 10 …… Rivet.

Claims (2)

[Claims] 1. A piezoelectric element which expands and contracts according to an applied voltage, a first lever arm whose one end is connected to one end of the piezoelectric element via a first displacement transmission means, and a piezoelectric element of the piezoelectric element. A second lever arm, one end of which is connected to the other end via a second displacement transmitting means, is provided between the first and second lever arms, and one end of the first lever arm is provided. A substrate connected to the vicinity of the second lever arm via a first hinge, and further connected to the vicinity of one end of the second lever arm via a second hinge, the other end of the first lever arm and the second substrate. A displacement detecting means for detecting a displacement provided between the lever arm and the other end of the lever arm, and the displacement of the piezoelectric element is transmitted through the first and second displacement transmitting means to the first and second displacement transmitting means. The first and second hinges transmitted to a lever arm In a method of manufacturing a piezoelectric element displacement amplification mechanism that amplifies and transmits the displacement to the displacement detection means as a fulcrum, the first and second lever arms are fixedly connected so that the first and second hinges do not move. And a step of removing the tie bar after connecting the piezoelectric element between the first and second displacement transmitting means, the method for manufacturing a piezoelectric element displacement amplifying mechanism. 2. A piezoelectric element which expands and contracts according to an applied voltage, a lever arm whose one end is connected to one end of the piezoelectric element via a displacement transmission means, the other end of the piezoelectric element and the lever arm. And a mounting substrate connected by a hinge provided in the vicinity of the displacement transmitting means, wherein the hinge does not move in a method of manufacturing a piezoelectric element displacement amplification mechanism that amplifies the displacement of the piezoelectric element by the lever arm. A piezoelectric element displacement, further comprising a tie bar for fixedly connecting the lever arm and the mounting substrate, and removing the tie bar after connecting the piezoelectric element between the mounting substrate and the displacement transmitting means. Amplification mechanism manufacturing method.