JPH0769180B2 - Biaxial vibration gyro - Google Patents

Description

The present invention relates to a vibrating gyroscope for detecting a Coriolis force for the purpose of detecting an angular velocity, and in particular, a single device having orthogonal three-dimensional coordinates. The present invention relates to a biaxial vibrating gyro that enables detection of respective angular velocities around the biaxial of the system.

[Conventional technology]

Conventionally known vibration gyros include, for example, one shown in FIG.

This is two arm members that extend parallel to each other in the Z-axis direction of the three-dimensional coordinate system and are positioned at a predetermined interval in the Y-axis direction.
A drive vibrator 7 formed by integrally connecting the lower ends of 4,5 with a base portion 6 extending in the Y-axis direction is fixed to a base 9 via a support member 8, and the drive vibrator 7 is also provided. The base portion 6 is provided with a detecting means 10 protruding in the X-axis direction.

In such a vibration gyro, for example, each arm member 4,
An AC voltage is applied to the driving means 11 and 12 provided in 5 to cause the arm members 4 and 5 to vibrate symmetrically in the Y-axis direction by a piezoelectric method, an electromagnetic method, or the like, while the driving vibrator 7 is moved to the Z direction. When the arm members 4 and 5 that are moving around the axis at the angular velocity ωz move at the velocity V at a certain moment, Coriolis forces Fcx in the X-axis direction and in opposite directions are generated.

Here, since the speed V of the arm members 4 and 5 changes alternately,
The Coriolis force Fcx is generated in a form modulated by the frequency of the arm members 4 and 5, and the drive vibrator 7 is torsionally vibrated about the Z axis with respect to the base 9, and the torsion angle is , Coriolis force Fcx, and thus proportional to angular velocity ωz.

Therefore, in this conventional device, the magnitude of the torsional vibration is
The detection means 10 protruding in the X-axis direction is used to detect by a piezoelectric method, an electromagnetic method, or the like. For example, in a piezoelectric method using a bimorph element or the like, torsional vibration is converted into flexural vibration of the detection means 10. However, the charges generated by the bimorph element are extracted as a voltage and detected according to the amount of deflection.

However, in such a conventional technique, the vibration of the arm members 4 and 5 in the Y-axis direction of the base member 6 is caused by the unbalance of the mass and the length of the arm members 4 and 5. Detection means due to causing unwanted vibration
Since 10 also outputs the signal generated by the unnecessary vibration, even if the angular velocity ωz is zero, the state as if the Coriolis force is detected, that is, the offset is generated. , S / N ratio, and eventually, the detection sensitivity was lowered.

Therefore, in order to solve the problem of the conventional technology, the applicant first proposed as a highly sensitive vibration gyro with an excellent S / N ratio.
As illustrated in FIG. 12, on one side surface of the support member 8 provided so as to project from the base portion 6 of the drive vibrator 7 in the Z-axis direction,
Of the piezoelectric material polarized in the Z-axis direction and the piezoelectric material,
A vibrating gyroscope in which a detecting means 13 including electrodes provided on each of the opposing surfaces orthogonal to the Y axis is fixed while being biased in the X axis direction with one of the electrodes being in contact with the supporting member 8. Was proposed (Japanese Patent Application No. 1-270366).

In this vibrating gyro, even if the arm members 4 and 5 have an imbalance in mass, length, etc., the detecting means 13
Does not generate electric charge between the electrodes due to the vibration generated due to their unbalance, and only the electric charge according to the magnitude of the torsional vibration generated around the Z axis by the Coriolis force Fcx. Since this occurs, the influence of the imbalance of the arm member can be effectively removed, and the detection sensitivity can be sufficiently improved.

[Problems to be Solved by the Invention]

However, in the technique proposed by the applicant prior to the present application, only the angular velocity ωz around the Z axis can be detected, and the angular velocities around the other axes cannot be detected. When it is necessary to prevent the camera from swinging up and down and to the left and right when shooting, and to control the motion of the flying object around two axes, use two vibrating gyros. This is necessary, and there is a problem that the volume occupied by the vibration gyro in the controller becomes excessive. Therefore, miniaturization of the vibration gyro and appearance of the vibration gyro capable of detecting the angular velocity around the two axes have been strongly desired.

The present invention has been made to meet such requirements, and provides a biaxial vibration gyro that can detect an angular velocity around two axes without increasing the size of the vibration gyro.

[Means for Solving the Problems]

The biaxial vibrating gyroscope of the present invention is provided with a support member projecting in the Z-axis direction at the base portion of the drive vibrator, which is composed of two arm members and the base portion, preferably at the center portion thereof. When at least two detecting means composed of a piezoelectric material and an electrode are attached to one side surface or the opposite side surface orthogonal to the Y axis while being biased in the X axis direction, the detecting means in the attached state. Of the piezoelectric material in the plane parallel to the YZ plane and the angle θ with the Y axis.
Is polarized in the direction of nπ <θ <nπ + π / 2 (n is an integer), and the piezoelectric material
An electrode is provided on each of the opposing surfaces orthogonal to the Y axis, or instead of the detection means, the piezoelectric material is in a plane parallel to the YZ plane, and the angle θ with the Y axis is nπ <θ < nπ + π / 2 (n is an integer) is polarized, and electrodes are provided on each of the opposing surfaces of the piezoelectric material orthogonal to the Y axis, and at least one of these electrodes is divided into two in the X axis direction. The detection means is constituted by this, and such detection means is attached to at least one side surface of the support member orthogonal to the Y-axis, for example, over the entire width thereof, or consists of two arm members and a base member. A support member protruding in the X-axis direction is provided on the base portion of the drive vibrator, preferably in the central portion thereof, and a piezoelectric material and an electrode are provided on one side surface or an opposing side surface of the support member orthogonal to the Y-axis. Inspection consisting of When at least two of the knowing means are attached while being biased in the Z-axis direction, the angle θ formed by the Y-axis in the plane parallel to the YZ plane of the piezoelectric material of the detecting means in the attached state. Is polarized in the direction of nπ <θ <nπ + π / 2 (n is an integer), and the piezoelectric material
An electrode is provided on each of the opposing surfaces orthogonal to the Y axis, or instead of the detection means, the piezoelectric material is in a plane parallel to the YZ plane, and the angle θ with the Y axis is nπ <θ. Polarization is performed in the direction of <nπ + π / 2 (n is an integer), electrodes are provided on each of the opposing surfaces of the piezoelectric material orthogonal to the Y axis, and at least one of these electrodes is divided into two in the Z axis direction. Thus, the detection means is configured, and such detection means is attached to at least one side surface of the support member orthogonal to the Y axis, for example, over the entire width thereof.

[Work]

First, as shown in FIG. 13, two arm members 4 and 5 that extend in parallel with each other in the Z-axis direction of the three-dimensional coordinate system and are located at a predetermined interval in the Y-axis direction are provided. In the drive vibrator 7 in which the lower end portion is integrally connected by the base portion 6 extending in the Y-axis direction, the Coriolis force generated by the rotational movement of the drive vibrator 7 and the Coriolis force Consider the moment acting on the drive vibrator 7.

When the drive vibrator 7 is rotated around the Z axis at an angular velocity ωz while the arm members 4 and 5 are vibrated symmetrically in the Y axis direction, the respective arm members 4 and 5 are moved in the X axis direction as described above. , The mutually opposite Coriolis forces Fcx are generated. In addition to this,
When the arm members 4 and 5 are rotated around the X axis at the angular velocity ωx, Coriolis forces Fcz in the Z axis directions and in the opposite directions are also generated. Therefore, in terms of the drive oscillator as a whole, there is a moment Mtz about the Z axis caused by the Coriolis force Fcx based on the drive motion about the Z axis and the X axis. X due to Coriolis force Fcz
A moment Mtx about the axis acts.

Therefore, as illustrated in FIG. 14, a support member 8a protruding in the Z-axis direction is provided at the base portion 6 of the drive vibrator 7, preferably at the center thereof, and the support member 8a is fixed to a base not shown. In this case, the support member 8a undergoes torsional deformation about the Z axis due to the moment Mtz and flexural deformation in the Y axis direction due to the moment Mtx. On the other hand, when the support member 8b protruding in the X-axis direction is provided at the center portion of the base portion 6, which is also preferably at the center portion, and its tip is fixed to a base not shown, , Its supporting member 8b is
Bending deformation in the axial direction and torsional deformation around the X axis due to the moment Mtx will occur. Therefore, the driving vibrator 7 is provided with a support member protruding in the Z-axis direction or the X-axis direction, and a detection means capable of detecting both torsional deformation and flexural deformation occurring in the support member is provided therein. A biaxial vibration gyro that can detect both angular velocities ωz and ωx around two axes can be configured.

Next, the operating principle of the detection means capable of detecting each of the torsional deformation and the flexural deformation will be described.

When the electric displacement generated when the stress T and the electric field are applied to the piezoelectric material is expressed by an equation, If lead zirconate titanate is used as an example of the piezoelectric material, the electric displacement when only the stress T is applied is It is represented by.

Here, the applied stresses T _{1 to} T ₆ are assumed to act in the directions shown in FIGS. 15 and 16, and the piezoelectric material is polarized in the third axis direction as shown by the white arrow. I shall.

Here, as shown in FIG. 17, the first axis and the third axis are
Consider a case where stress is applied to the piezoelectric material 17 arranged in the unw coordinate system which is displaced by the angle θ around the second axis.

As shown in FIG. 18, when tensile or compressive stress σu acts on the surface orthogonal to the u axis, the surface 18 orthogonal to the first axis is expressed by σθ ₁ = σu cos ² θ (3) A tensile stress or a compressive stress acts, and a shear stress represented by τθ ₁ =-(σu sin 2θ) / 2 (4) also acts.

Further, as shown in FIG. 19, when a shear stress τv acts on the v-axis (second axis), σθ ₂ = τv sin 2θ (5) is expressed on the surface 18 orthogonal to the first axis. In addition to the tensile or compressive stress, the shear stress represented by τθ ₂ = τv cos 2θ (6) acts.

Similarly, on the surface orthogonal to the third axis, due to tensile or compressive stress σu, σθ ₁ ′ = σu cos ² (θ + π / 2) = σu sin ² θ (7) τθ ₁ ′ = {− σu sin 2 (θ + π / 2) / 2 = (σu sin 2θ) / 2 (8) The tensile or compressive stress represented by (8) and the shear stress act, and the shear stress τv causes σθ ₂ ′ = τv sin2 (θ + π / 2) = − τv sin2θ…
(9) τθ ₂ ′ = τv cos2 (θ + π / 2) = − τv cos2θ (1
The tensile or compressive stress and the shear stress represented by 0) act.

Therefore, the piezoelectric material 17 as shown in FIG. 17 is formed so that _{one of} the surfaces w ₁ and w ₂ orthogonal to the w axis is in contact with the side surface of the columnar member, for example, as shown in FIG. When the surface w ₁ is brought into contact with and bonded to the columnar member 20 fixed to the base 19, when the columnar member 20 undergoes bending deformation in the w-axis direction and twisting deformation around the u-axis, the piezoelectric material 17 is The compressive or tensile stress in the u-axis direction is generated due to the flexural deformation, and the shear stress around the v-axis and the w-axis is generated due to the torsional deformation.

For reference, shear stress around the v-axis and around the w-axis due to torsional deformation is generated according to the following principle.

As shown in FIG. 21, it projects from the base 19 in the u-axis direction,
When the columnar member 20 having a rectangular parallelepiped shape is fixed to the base 19,
Considering the case where the columnar member 20 is twisted by receiving Mt, when the cross-sectional dimension of the columnar member 20 is 2b × 2h, the cross-sectional force at an arbitrary point P (v, w) as shown in FIG. , The shear stress τw around the w axis and the shear stress τv around the v axis are respectively Given in.

Therefore, when the respective stresses σu and τv act on the piezoelectric material in the uvw coordinate system, a small unit of the piezoelectric material surrounded by the planes orthogonal to the first axis and the third axis of the 123 coordinate system. , T ₁ = σθ ₁ + σθ ₂ = σu cos ² θ + τv sin2θ …… (1
3) T ₃ = σθ ₁ ′ + σθ ₂ ′ = σu sin ² θ−τv sin 2θ.
(14) T ₅ = τθ ₁ + τθ ₂ = τv cos2θ- (σu sin2θ) / 2 ...
When the piezoelectric material 17 is bonded to the columnar member 20 as shown in FIG. 20, when electrodes are provided on the surfaces w ₁ and w ₂ of the piezoelectric material 17, The electrical displacement is Becomes

Here, considering that the w axis is displaced by the angle θ with respect to the third axis, the electrical displacement Dw in the w axis direction is Dw = D ₁ sin θ + D ₃ cos θ (17), and therefore Dw _{= d 15 {τv cos2θ- (σu} sin2θ) / 2} to become _{sinθ + {d 31 (σu cos} 2 θ + τv sin2θ) + d 33 (σu sin 2 θ-τv sin2θ)} cosθ ... (18).

By the way, as is clear from the equations (11), (12) and (18), in the vw coordinate system of FIG. 22, the first quadrant 21 and the third quadrant 23, the second quadrant 22 and the second quadrant 22 and the Since the polarities of the shear stresses τw and τv are different between the four quadrants 24, the shear stress τv is generated even if the piezoelectric material is bonded to the entire surface orthogonal to the w axis in FIG. However, the electric displacement due to this is zero as a whole, and no charge is generated at the electrodes.

In addition, when the angle θ is nπ (n is an integer), (18)
As is clear from the equation, the shear stress τv due to the torsional deformation
Even if the stress is generated, the electric displacement due to the shear stress τv becomes zero, and when the angle θ is nπ + π / 2 (n is an integer), the tensile or compressive stress σu is generated by the flexural deformation. However, since the electric displacement due to this is zero, when the angle θ is nπ, nπ + π / 2, there is no sensitivity to either torsional deformation or flexural deformation.

Therefore, in the present invention, basically, two detection means mainly composed of a piezoelectric material polarized in a direction in which an angle θ formed with the w axis is nπ <θ <nπ + π / 2 (n is an integer), The columnar member is joined to the side surface orthogonal to the w-axis while being biased in the v-axis direction, whereby a simple structure and a small vibration gyro capable of biaxial detection are obtained.

Here, in order to output the electric displacement more effectively, it is preferable that the central portion in the width direction of the surface orthogonal to the w-axis be a mirror and the detection means be joined to each half thereof.

〔Example〕

 Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the present invention. In the figure, the same parts as those described in the prior art and the above-mentioned technology previously proposed by the applicant are designated by the same reference numerals. Indicate.

That is, reference numerals 4 and 5 denote arm members that extend in parallel to each other in the Z-axis direction and are positioned at a predetermined interval in the Y-axis direction, and 6 indicates those arm members 4 and 5. Shows the base parts integrally connected at the lower end. Also, 7
Indicates a drive vibrator including the arm members 4 and 5 and the base portion 6, and the drive vibrator 7 is supported by a support member 8 protruding from the base portion 6, preferably the central portion thereof in the Z-axis direction. It is fixed to the table 9.

Here, in this example, as is apparent from the enlarged view of the main part in FIG. 2, one detection means 30 is offset in the X-axis direction on one side surface of the support member 8 orthogonal to the Y-axis. And the other detecting means 30 is also attached to the other side surface orthogonal to the Y-axis while being biased in the X-axis direction so that both detecting means 30 face each other with the support member 8 interposed therebetween. A biaxial vibrating gyro is constituted by.

Here, the XYZ coordinate system and the aforementioned uvw coordinate system become a common coordinate system by associating the X axis with the v axis, the Y axis with the w axis, and the Z axis with the u axis.

By the way, each detecting means 30 in the illustrated example is a piezoelectric material.
When 31 is polarized in a direction parallel to the YZ plane in a direction in which the angle θ with the Y axis is nπ <θ <nπ + π / 2 (n is an integer), the Y axis of the piezoelectric material 31 An electrode 32 having the same width as that of the piezoelectric material 31 is provided on each of the opposing surfaces that are orthogonal to, and one electrode 32 of each detecting means 30 makes surface contact with the support member 8.

According to this, when the support member 8 undergoes bending deformation in the w-axis direction and twisting deformation around the u-axis, respectively, one detecting means 30, the detecting means 30 on the front side in FIG.
And the electrical displacement Dw ₁ is Dw ₁ = d ₁₅ {τv cos 2θ− (σu sin2θ) / 2} sinθ + {d ₃₁ (σu cos ² θ + τv sin2θ) + d ₃₃ (σu sin ² θ−τv sin2θ)} cosθ …… When it occurs with the magnitude of (18-1), the electric displacement Dw ₂ of the other detecting means 30 located on the rear side of the figure is that the acting direction of the shear stress τv is the same direction and the acting direction of the tensile or compressive stress τu. Is opposite, Dw ₂ = d ₁₅ {τv cos 2θ + (σu sin2θ) / 2} sinθ + {d ₃₁ (−σu cos ² θ + τv sin2θ) + d ₃₃ (−σu sin ² θ−τv sin2θ)} cosθ… … (18-2). Therefore, if the sum of equations (18-1) and (18-2) is taken, Dw ₁ + Dw ₂ = 2τv (d ₁₅ cos2θ sinθ + d ₃₁ sin2θ cosθ −d ₃₃ sin2θ cosθ) (19) (18-1 ) And Eq. (18-2), Dw ₁ −Dw ₂ = 2σu {(− d ₁₅ (sin2θ sinθ) / 2 + d ₃₁ cos ³ θ ＋ d ₃₃ sin ² θ cos θ} (20) , It is possible to detect the torsional deformation and the flexural deformation separately from each other by taking the sum and the difference. If only one of the addition and the subtraction is performed, the single axis detection is performed. Of course, only one of these deformations can be detected.

FIG. 3A shows an example in which the piezoelectric material 31 of the detection means 30 on the front side is polarized in the direction of the angle θ, and the piezoelectric material 31 of the detection means 30 on the rear side is polarized in the direction of the angle θ + π. , Where the electrical displacement Dw ₁ generated in the detection means 30 on the front side is Dw ₁ = d ₁₅ {τv cos2θ− (σu sin2θ) / 2} sinθ + {d ₃₁ (σu cos ² θ + τv sin2θ) + d ₃₃ (σu sin ² θ−τ v sin ² θ)} cos θ (18-3), the electric displacement Dw ₂ of the detection means 30 on the rear side is Dw ₂ = −d ₁₅ {τ v cos 2 θ + (σu sin 2 θ) / 2} sin θ − {D ₃₁ (−σ u cos ² θ + τ v sin ² θ) + d ₃₃ (−σ u sin ² θ−τ v sin ² θ)} cos θ (18-4). Therefore, the sum of equations (18-3) and (18-4) Dw ₁ −Dw ₂ = 2σu {−d ₁₅ (sin2θ sinθ) / 2 + d ₃₁ cos ³ θ + d ₃₃ sin ² θ cos θ) (21 ), The tensile or compressive stress σu can be obtained,
Difference between Eqs. (18-3) and (18-4) Dw ₁ + Dw ₂ = 2τv {(d ₁₅ (cos2θ sinθ + d ₃₁ sin2θ cosθ −d ₃₃ sin2θ cosθ) …… (22) Obtain the shear stress τv You can

As shown in FIG. 3 (b), this means that two detection means 30 are provided on one side surface of the support member 8 orthogonal to the Y axis.
The same applies to the case where the piezoelectric materials 31 of the one detecting means 30 are polarized in the directions opposite to the X-axis direction, and the piezoelectric material 31 of one of the detecting means 30 is polarized in the directions of the angles θ and θ + π with respect to the Y-axis.

By applying the pair of two detecting means 30 as described above to the supporting member 8 as shown in FIG. 1, the supporting member based on the Coriolis force Fcx generated by the angular velocity ωz around the Z axis. The torsional deformation of 8 is detected as shear stress, and the flexural deformation of the support member 8 based on the Coriolis force Fcz generated by the angular velocity ωx about the X axis is
It will be sensed as a tensile or compressive stress.

Here, the projecting direction of the supporting member can be the positive direction of the Z axis, which is opposite to that shown in FIG. 1, and this also can bring about the same effect as the illustrated example. .

FIG. 4 is a perspective view showing another embodiment, in which the support member 8 is made of a plate-shaped material and is attached to each surface of the support member 8 orthogonal to the Y axis. The means 30 is configured as shown in FIG. 5, and the angle θ between the piezoelectric material 31 having a width substantially equal to that of the plate-like support member 8 and the Y axis in a plane parallel to the YZ plane is nπ. Polarization processing is performed in the direction of <θ <nπ + π / 2 (n is an integer), and an electrode 32 having the same width as the piezoelectric material 31 is formed on each of the opposing surfaces of the piezoelectric material 31 that are orthogonal to the Y axis.
Where one of the electrodes is divided into two in the X-axis direction, and is preferably divided into two small electrodes 32a, 32
By setting b, the detection means 30 is provided.

The illustrated applied state in which the detection means 30 is attached to each surface of the support member 8 orthogonal to the Y axis has an appearance similar to that of a bimorph in which an elastic plate is sandwiched between general thickness vibrators.

In this embodiment, the same functions as those shown in FIG. 1 can be exhibited for each of the Coriolis forces Fcx, Fcz.

By the way, as shown in FIG. 5, the detecting means 30 can divide only the electrode positioned on the side of the supporting member, or can divide both electrodes together, and the Y-axis of the supporting member 8 can be divided. It can also be used by mounting it on only one side that is orthogonal to the.

FIG. 6 is a perspective view showing a modified example of the support member. This is a state in which a support member 38 protruding from the central portion of the base portion 6, preferably in the X-axis direction, is fixed to a base not shown, The detection means 30 is attached to each of the opposing surfaces of the support member 38 that are orthogonal to the Y axis, with the detection means 30 biased to one side in the Z axis direction.

In this example, the XYZ coordinate system and the uvw coordinate system described above become a common coordinate system by associating the X axis with the −u axis, the Y axis with the w axis, and the Z axis with the v axis.

As is apparent from FIG. 7, the detecting means 30 in this case has an angle θ with the Y axis of the piezoelectric material 31 in a plane parallel to the XY plane as nπ <θ <nπ + π / 2 (n Is an integer) and the piezoelectric material 31
Can be configured by providing the electrodes 32 on each of the facing surfaces orthogonal to the Y axis.

According to the biaxial vibration gyro of this example, the flexural deformation of the support member 38 based on the Coriolis force Fcx generated by the angular velocity ωz about the Z axis is detected as a tensile or extruding stress, and also about the X axis. The torsional deformation of the support member 38 based on the Coriolis force Fcz generated by the angular velocity ωx will be detected as shear stress.

In addition, the tensile or compressive stress σu due to the flexural deformation,
The separation from the shear stress τv due to the torsional deformation and the electric displacement can be performed in the same manner as described with reference to FIG.

FIG. 8 is a perspective view showing another example of the detecting means, in which the detecting means 30 having substantially the same width as the supporting member 38 is attached to each of the facing surfaces of the supporting member 38 which are orthogonal to the Y axis. is there.

As shown in FIG. 9, the detecting means 30 in this example has a piezoelectric material 31 having substantially the same width as that of the plate-shaped supporting member 38 in a plane parallel to the XY plane and an angle θ with the Y axis of nπ. Polarization is performed in the direction of <θ <nπ + π / 2 (n is an integer), and electrodes 32 are provided on each of the opposing surfaces of the piezoelectric material orthogonal to the Y axis, and one of these electrodes is placed in the Z axis direction. Is divided into two, preferably into two small electrodes 32a and 32b.

The vibrating gyro to which the detecting means 30 is attached can exhibit the same function as that shown in FIG. 6 against the Coriolis forces Fcx and Fcz.

FIG. 10 is a perspective view showing still another embodiment of the present invention, in which each of the two arm members 4 and 5 is attached to the base portion 6 at their longitudinal central positions. Of the driving members 7 having a substantially H-shaped front shape by integrally connecting them to each other, and detecting from the base portion 6 to each of the supporting members 8 protruding in both the positive and negative directions of the Z axis. The means 30 is attached in the same manner as the embodiment shown in FIG.

Also in this example, it goes without saying that the type of the detecting means can be changed appropriately.

〔The invention's effect〕

As is apparent from the above description, according to the present invention, the angular velocity around the Z axis and the angular velocity around the X axis can be detected by a single device, and two conventional devices can be used. It becomes possible to exert the minute function with one device.

[Brief description of drawings]

FIGS. 1, 4, 6, 8, and 10 are perspective views showing an embodiment of the present invention, FIG. 2, FIG. 3, FIG. 5, FIG. 7, FIG. Each of the drawings is a perspective view showing a configuration example of the detection means, FIG. 11 is a conventional technology, FIG. 12 is a perspective view showing a technology previously proposed by the applicant prior to the present application, and FIGS. FIG. 22 is an explanatory diagram of the operating principle of the present invention. 4, 5 ... Arm member, 6 ... Base part, 7 ... Drive vibrator, 8,38 ... Support member, 9 ... Base, 30 ... Detection means, 31 ... Piezoelectric material, 32 ... Electrodes, 32a, 32b ... Small electrodes.

Claims (4)

[Claims] 1. Two arm members extending parallel to each other in the Z-axis direction of a three-dimensional coordinate system and positioned at intervals in the Y-axis direction, and these arm members are integrally connected. A drive oscillator is configured with the base portion, a support member protruding in the second axis direction is provided on the base portion of the drive oscillator, and a piezoelectric material and an electrode are formed on a side surface of the support member orthogonal to the Y axis. A vibrating gyroscope in which at least two of the detecting means are attached so as to be offset in the X-axis direction, and the piezoelectric material of the detecting means in the attached state is connected to the Y-axis in a plane parallel to the YZ plane. Angle θ Polarization of the piezoelectric material,
A biaxial vibrating gyroscope in which electrodes are provided on opposite surfaces orthogonal to the Y axis. 2. Two arm members extending parallel to each other in the Z-axis direction of the three-dimensional coordinate system and spaced apart in the Y-axis direction, and these arm members are integrally connected. A drive oscillator is configured with the base portion, a support member protruding in the Z-axis direction is provided on the base portion of the drive oscillator, and the piezoelectric material and the electrode are provided on at least one side surface of the support member orthogonal to the Y-axis. A vibration gyro to which a detecting means consisting of is attached, wherein the angle θ formed by the detecting means in the attached state with the Y axis in a plane parallel to the YZ plane is A biaxial vibrating gyroscope which is polarized in a direction such that an electrode is provided on each of the opposing surfaces of the piezoelectric material orthogonal to the Y axis, and at least one of the electrodes is divided into two in the X axis direction. 3. Two arm members extending in parallel to each other in the Z-axis direction of the three-dimensional coordinate system and positioned at intervals in the Y-axis direction, and these arm members are integrally connected. A drive oscillator is configured with the base portion, a support member projecting in the X-axis direction is provided on the base portion of the drive oscillator, and a piezoelectric material and an electrode are formed on a side surface of the support member orthogonal to the Y-axis. A vibrating gyroscope in which at least two of the detecting means are attached so as to be offset in the Z-axis direction, and the piezoelectric material of the detecting means in the attached state is formed in a plane parallel to the XY plane with the Y-axis. Angle θ is Polarization of the piezoelectric material,
A biaxial vibrating gyroscope in which electrodes are provided on opposite surfaces orthogonal to the Y axis. 4. Two arm members extending parallel to each other in the Z-axis direction of the three-dimensional coordinate system and spaced apart in the Y-axis direction, and these arm members are integrally connected. A drive oscillator is configured with the base portion, a support member protruding in the X-axis direction is provided on the base portion of the drive oscillator, and the piezoelectric material and the electrode are provided on at least one side surface of the support member orthogonal to the Y-axis. A vibration gyro to which a detecting means consisting of is attached, wherein the angle θ formed by the detecting means in the attached state with the Y axis in a plane parallel to the XY plane is A biaxial vibrating gyroscope which is polarized in a direction such that an electrode is provided on each of the opposing surfaces of the piezoelectric material orthogonal to the Y axis, and at least one of the electrodes is divided into two in the Z axis direction.