JPH076776U - LSI tester - Google Patents

Abstract

(57) [Abstract] [Purpose] It is intended to realize a test head in which wiring of a circuit provided on a performance board is easy and maintenance of a printed circuit board such as a mounted pin electronics card is easy. [Constitution] The present invention is an LS in which a pin electronics card mounted on a test head is connected to a contact pin, the contact pin is connected to a performance board, and a test target is tested through the performance board.
It is an improved version of the I tester. This device includes a plurality of contact portions for fixing a plurality of contact pins for exchanging test signals with the performance board, and a plurality of intermediate brackets for fixing at least one of the contact portions and detachably fixing to the test head. And a device having:

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an LSI tester equipped with a test head that allows easy maintenance of a pin electronics card.

[0002]

[Prior art]

 FIG. 3 is a diagram showing the configuration of a conventional LSI tester. In the figure, reference numeral 10 denotes a test head, which has a peep hole 11 for positioning an object to be tested (hereinafter abbreviated as DUT) on a wafer. A plurality of pin electronics cards 12 are provided along the outer periphery of the peep hole 11. It is provided in a radial pattern. A guide portion 13 is provided so that the pin electronics card 12 can be easily inserted. Reference numeral 21 is a contact pin, which comes into contact with a land provided on the performance board 30 side. Reference numeral 22 denotes a contact portion, which fixes a plurality of contact pins for exchanging test signals with the performance board 30 by a mold housing. A cable 23 connects the contact pin 21 and the pin electronics card 12. Reference numeral 24 denotes a mounting board, which fixes the contact portion 22 and is attached to the rotary holder 14. The rotary holder 14 is rotatably attached to the test head 10. The performance board 30 is provided with a circuit 31 such as a relay for switching a load applied to the DUT and a test signal. The circuit 31 is provided outside the position where the contact pin 21 is connected to the performance board. Reference numeral 40 denotes a prober for connecting the DUT of the wafer, which pushes the opposite side of the portion of the performance board 30 to which the contact pin 21 is connected to connect the contact pin 21 to the performance board 30.

FIG. 4 is a perspective view of an essential part of the apparatus shown in FIG. Hereinafter, the same parts as those in FIG. 3 are designated by the same reference numerals. The mounting board 24 is provided such that the center thereof is located at the center of the test head 10. The mounting board 24 has a peep hole 24a for positioning the DUT on the center side and the contact portion 22 on the outer peripheral side. A slit groove 24b for inserting is provided. The slit groove 24b can be connected to other modules in addition to the pin electronics card 12 which can be arranged in the test head 10. Reference numeral 24c is a retaining metal fitting that is movable in the vertical direction and fixes the contact portion 22 inserted in the slit groove 24a to the mounting board 24. The contact portion 22 has an I-shaped cross-sectional shape, and has a first surface 22 a on which the contact pin 21 is provided and a second surface 22 b from which the cable 23 is drawn out, and between the contact portion 22 and the mounting board 24. A guide portion 22c fitted in the slit groove 24b is provided. Reference numeral 22d denotes a locking hole provided on the first surface 22a side. After the contact portion 22 is inserted into the slit groove 24a, the retaining metal fitting 24c is inserted so that the contact portion 22 is locked onto the mounting board 24. To be done.

The assembly of such a device will be described below with reference to FIGS. First, the pin electronics card 12 is inserted from the upper surface along the guide portion 13 provided in the test head 10. After that, the contact portion 22 connected to the pin electronics card 12 via the cable 23 is inserted from the outer peripheral portion of the mounting board 24 along the slit groove 24b toward the center in the direction of the arrow. The contact portion 22 is inserted after the retaining metal member 24c is pulled up in the direction of the arrow. Then, with the contact portion 22 completely inserted into the slit groove 24b, the retaining metal fitting 24c is returned to its original state and is engaged with the locking hole 22d provided in the contact portion 22. When removing the pin electronics card 12, the reverse operation of the above may be performed.

[0005]

FIG. 5 is a schematic view of a main part of the apparatus shown in FIG. (I) is the case where the circuit 31 is outside the connection part of the performance board 30 of the contact part 22, and (ii) is the case where the circuit 31 is inside the connection part of the performance board 30 of the contact part 22. In (i), the contact portion 22 is connected to the circuit 31 by a jumper through the through hole of the performance board 30. Then, the circuit 31 is connected to the DUT. The connection line from this circuit 31 to the DUT is divided into a, b, and c parts. I and Ha are jumpers, and B is a pattern. The pattern b is formed by connecting the contact pins of the contact portion 22 to the performance board 30, so that the prober or the like pushes the pattern portion. This is because there is no gap on the upper surface of the performance board 30. Further, since the lower surface of the performance board 30 has the contact pins 21, it is difficult to pass the jumper between them. In the case of the above configuration, extra work for the jumper connected to the pattern is required.

Therefore, in (ii), the contact portion 22 is connected to the circuit 31 by a jumper through the through hole of the performance board 30. Then, the circuit 31 is connected to the DUT by a jumper. In this case, in FIG. 3, the mounting board 24 for mounting the contact portion 22 has to be enlarged as shown by the broken line, and even when only one of the pin electronics cards 12 is to be removed, the mounting board There was a problem that the 24 had to be removed.

An object of the present invention is to realize a test head in which wiring of a circuit provided on a performance board is easy and maintenance of a printed circuit board such as a mounted pin electronics card is easy.

[0008]

[Means for Solving the Problems] According to the present invention, a pin electronics card mounted on a test head is connected to a contact pin, the contact pin is connected to a performance board, and an object to be tested is connected via the performance board. In the LSI tester for performing the test, a plurality of contact portions for fixing a plurality of contact pins for exchanging a test signal with the performance board, and at least one of the contact portions are fixed and can be freely removed from the test head. It is characterized by having a plurality of intermediate brackets that can be fixed.

[0009]

[Action]

 In this invention, the intermediate bracket is removed from the test head. Then, the pin electronics card can be removed from the test head within the range of the number of contacts to which the intermediate bracket is attached.

[0010]

【Example】

 The present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention. In the drawing, reference numeral 1 denotes an intermediate bracket, which can be fixed to the test head 10 by freely fixing the three contact parts 22. Reference numeral 2 is a flexible printed circuit board (hereinafter abbreviated as FPC), which has a contact pin 22 connected to one end and a connector 12a provided on the pin electronics card 12 connected to the connector 2a at the other end. Then, the screw 3 fixes the contact portion 22 to the intermediate bracket 1. In the intermediate bracket 1, reference numeral 1a is a protrusion, which is inserted into a groove 14a provided in the rotary holder 14 for alignment. Then, the intermediate bracket 1 is fixed to the rotary holder 14 with the screw 4.

FIG. 2 is a perspective view of a main part of the apparatus shown in FIG. The same parts as those in FIG. 1 are designated by the same reference numerals. In the intermediate bracket 1, 1b is a slit groove into which the contact portion 22 is inserted.

The assembly of such a device will be described below with reference to FIGS. First, the pin electronics card 12 is mounted on the test head 10 with the connector 2a of the FPC 2 coupled to the connector 12a. After that, the protrusion 1a is inserted into the groove 14a of the rotary holder 14 and the intermediate bracket 1 is fixed by the screw 4. Then, the contact portion 22 connected to the pin electronics card 12 via the FPC 2 is inserted from the outer peripheral portion of the intermediate bracket 1 toward the center along the slit groove 1b. The contact portion 22 is completely inserted into the slit groove 1b and fixed by the screw 3.

Further, it may be assembled as follows. The pin electronics card 12 is mounted on the test head 10 with the connector 2a of the FPC 2 removed from the connector 12a of the pin electronics card 12. The contact portion 22 is fixed to the intermediate bracket 1. Then, the intermediate bracket 1 is fixed to the rotary holder 14 with the screw 4, and finally, the connector 2a and the connector 12a are coupled. When removing the pin electronics card 12, the reverse operation of the above may be performed.

As described above, the pin electronics card 12 can be removed from the test head 10 within the range of the number of the contact portions 22 to which the intermediate bracket 1 is attached. Therefore, even if the position where the contact pin 21 is attached to the performance board 30 is set to the outer periphery so that the wiring of the circuit 31 can be easily performed, the maintenance can be easily performed. Further, the digital signal has less signal loss when it is closer to the DUT from the contact pin 21. However, since it is desired to connect the analog signal to the DUT by connecting a load circuit or the like, it is easier to connect the load circuit if the contact pin 21 is farther from the test object. In the present invention, since the length of the comb-shaped portion of the intermediate bracket 1 can be individually changed, the distance from the DUT to the contact pin 21 is changed for each unit of the number of the contact portions 22 fixed to the intermediate bracket 1. The contact pin 21 can be provided at a position suitable for the purpose.

It should be noted that the present invention is not limited to this, and the configuration in which the intermediate bracket 1 attaches the three contact portions 22 has been shown, but the number may be one or more.

[0016]

[Effect of device]

 The present invention has the following effects. The split middle bracket allows the pin electronics card to be removed from the test head within the range of the number of contacts to which one middle bracket is attached. Therefore, even if the contact pins are mounted on the performance board on the outer periphery to facilitate the circuit wiring, the maintenance can be easily performed. Since the size of the intermediate bracket can be changed individually, the distance from the test object to the contact pin can be changed for each unit of the number of contact parts fixed to the intermediate bracket, and it can be adjusted to the purpose. Contact pins can be provided at different positions.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention.

FIG. 2 is an exploded view of a main part of the apparatus shown in FIG.

FIG. 3 is a configuration diagram of a conventional LSI tester.

FIG. 4 is an exploded view of a main part of the apparatus shown in FIG.

5 is a schematic view of a main part of the apparatus of FIG.

[Explanation of symbols]

 1 Intermediate bracket 10 Test head 12 Pin electronics card 21 Contact pin 22 Contact section 30 Performance board

Claims (1)

[Scope of utility model registration request] 1. An LSI tester in which a pin electronics card mounted on a test head is connected to a contact pin, the contact pin is connected to a performance board, and a test target is tested through the performance board. And a plurality of contact portions for fixing a plurality of contact pins for transmitting and receiving a test signal to each other, and a plurality of intermediate brackets for fixing at least one of the contact portions and detachably fixed to the test head. LSI tester characterized by.