JPH0765854B2 - Hot isostatic press - Google Patents

Description

TECHNICAL FIELD The present invention relates to a material containing a substance that generates a vaporized component when heated, such as a structural member and a partition plate of a fuel cell.
The present invention relates to a hot isostatic pressing apparatus for firing a carbon material, which is used as a susceptor for diffusion heat treatment of semiconductors, under high temperature and high pressure.

(Prior Art) Hot isostatic devices (hereinafter simply referred to as HIP devices) are diversifying target materials due to their superiority.

Some of the target materials generate vaporized components and decomposed gas components when heated, and these have the problem of contaminating or reacting with the structural material of the furnace of the HIP device. For example, a carbon material is a typical material.

Carbon materials have advantages such as excellent heat resistance in an inert atmosphere, chemical stability against chemicals, and light weight that are not found in other materials, so their fields of use have expanded in recent years. ing.

In particular, there is a strong demand for high strength and high density, and therefore when generally producing a block-shaped carbon material, coke, graphite, or carbon fiber is mixed with tar pitch, resin, etc., and molded. A method is used in which the molded body is fired to carbonize the tar pitch and the resin to carbonize the whole.

This carbonization process utilizes the fact that tar pitch is decomposed and part of it is fixed as carbon in the product. However, in the case of high density, it is preferable that the remaining amount of this fixed carbon is large. When this carbonization is carried out in an atmosphere, the yield as this fixed carbon is greatly improved as shown in FIG.

On the other hand, in this carbonization step, gases such as propane and methane and vaporized components of tar pitch are mixed in the high-pressure gas (usually argon) due to decomposition of tar pitch, resin, and the like.

For this reason, in an internally heated HIP device in which a resistance wire heating type heater is housed inside a high-pressure container, carbon deposits at the insulation insulator for holding the heater and the connection with the lead wire (part) May not be possible.

As a conventional technique for solving the above-mentioned problems, for example, a press device disclosed in JP-A-62-84291 (conventional example 1) and further disclosed in JP-A-60-116701. There are other press devices (conventional example 2), and the outline of these press devices will be described below.

That is, in the conventional example 1, as shown in FIG. 4, an upper lid 2'and a lower lid 3'are provided above and below a high-pressure cylinder 1 ', and a heat insulating layer 4'and a heater 5'are provided in the cylinder 1'. In addition, a gas-impermeable cylinder partition 6'is provided inside the heater 5'on the ring outer lid 3 "of the lower lid 3'as an airtight chamber to define an airtight chamber. The processing body 7'is detachable, and a check valve 8'for allowing the pressure medium gas to flow from the outside to the inside of the airtight chamber and blocking the outflow from the inside to the outside is further provided. Introduction of pressure medium gas,
A pressure gauge 10 'is provided in the discharge pipeline 9', and a pressure gauge 11 'is provided in the pipeline 9'for the pressure medium gas which is inserted from the airtight chamber to the outside of the high pressure vessel.
Furthermore, a detector 12 'is provided, and the on / off valve is activated by the signal from the detector 12'.
It is a technique in which the drain reservoir 14 'is formed on the lower lid 3', while controlling the 13 '.

Further, in the conventional example 2, as shown in FIG. 5, the upper lid 2'of the high-pressure cylinder 1'is detachably provided to form the pressure medium gas supply port 2 ", and inside the heat insulating layer 4 '. A heater 5'and a partition wall 6'are provided, and an object 7'to be processed is placed through an upper lid 6 "of the partition wall 6 '.
In this technique, the pressure medium gas is supplied from the lower portion through the check valve 8'to the object 7'in the partition wall 6'and discharged through the check valve 8 '. is there.

By the way, although the usefulness of both the conventional example 1 and the conventional example 2 is recognized to some extent, there are the following problems.

That is, in the conventional example 1, since the cylindrical partition wall 6'is airtightly fixed to the ring outer lid 3 ", the ring outer lid 3 together with the heater 5'is repaired when the partition wall 6'is damaged. ″ Has to be removed, which is a lot of work,
Moreover, it is a difficult task.

Further, since the drain reservoir 14 'is so-called directly formed by forming a concave portion on the upper surface of the lower lid, it takes time to remove the drain.

In the conventional example 2, since the pair to be processed 7'is inserted and taken out on the upper side of the partition wall 6 ', that is, in the high temperature region, it is difficult to hermetically seal it.

Further, since it has no drain pool, the check valve 8 ″ is likely to be clogged when a high-viscosity liquid component is generated,
It may become inoperable.

Therefore, in order to solve the problems 1 and 2 of the above-mentioned conventional example,
The figure (3 of the conventional example, but not a known technique) has been developed.

That is, in the conventional example 3, an opening for inserting and removing the object to be processed is formed on the lower end side of the cylindrical partition wall 13, and the opening is detachable from the lower lid and airtight via the seal ring 15. The drain reservoir 26 is fitted and is further detachably arranged on the upper surface side of the lower lid corresponding to the opening.

With the above configuration, even if the partition wall 13 is damaged, it can be easily replaced with a new one, and the drain reservoir 26 can be attached and detached, so that the drain can be easily removed.

(Problems to be Solved by the Invention) However, it was found that the conventional example 3 has the following problems although the intended function is exhibited.

That is, the drain reservoir 26 has an upper portion with the lower inner lid 3B and the cylindrical partition wall.
(I) When the cylindrical partition wall 13 is damaged, the lower inner lid 3B
Is likely to be damaged. Alternatively, since the drain reservoir is buried in the lower lid, for example, as shown in FIG.
The pipe line 17 for this must be provided in the lower lid, which complicates the structure of the lower lid.

(Ii) The latent heat released when the components in the exhaust gas are liquefied in the drain reservoir 26 is less likely to be dissipated, the temperature in the drain reservoir rises, and the trapping ability is lowered.

(Iii) As a problem common to the conventional examples 1 to 3, as is clear from FIGS. 4 to 6, in each case, vaporization from the airtight chamber for processing the object to be processed to the outside of the high pressure container through the on-off valve. The point is that the pipeline that discharges the components remains in only one system. Although the conventional example 3 is provided with a drain reservoir in the middle to prevent clogging of the pipeline, the drain reservoir does not always have a perfect function, and the high-pressure pipeline system is pressure resistant. Because of the small diameter, clogging is likely to occur, and if clogging occurs and it becomes difficult to discharge vaporized components,
Not only is the pressure in the airtight chamber increased to cause damage to the partition walls that make up the airtight chamber, but there is also the risk of damage to the heater and the heat insulation layer associated with damage to that part, which is still a concern in terms of safety. is there.

(Means for Solving the Problem) In order to solve each of the problems described above, the present invention airtightly connects the lower end opening of a cylindrical partition forming an airtight chamber to the upper end of the opening of the drain reservoir, and Is detachably disposed on the lower lid side so that at least the upper half thereof projects above the lower lid. Specifically, it is disposed in a high-pressure container having an upper lid and a lower lid. The heating furnace is provided with a cylindrical partition wall for accommodating the object to be processed, and a check valve for allowing gas inflow from the partition wall to the inside and for preventing gas outflow from the partition wall to the outside is provided, A first conduit that communicates with the outside of the partition wall and a second conduit that communicates with the interior of the partition wall, and an on-off valve that opens and closes the second conduit,
In a hot isostatic pressing apparatus comprising valve control means for opening and closing the on-off valve by a gas pressure difference between the outside and the inside of the partition wall, an opening for inserting and removing an object to be processed is provided at a lower end side of a cylindrical partition wall. A drainage container is detachably formed on the upper surface side of the lower lid corresponding to the opening, and the upper portion thereof is projected from the upper surface of the lower lid, and the opening is an upper portion of the drainage container. Is detachable and is airtightly fitted through a seal ring. In addition to the second conduit, a third conduit for communicating the inside of the partition wall and the outside of the high pressure container is provided, and the third conduit is provided. The pipe line is provided with a normally-closed sealing valve for releasing the pressure to the outside of the high-pressure container.

(Operation) According to the above-mentioned technical means of the present invention, as shown in FIG. 1, it is arranged in the high-pressure cylinder 1 which is a cylindrical high-pressure container having the upper lid 2 and the lower lid 3. Inside the heating furnace, there is a cylindrical partition wall 13 for accommodating the object 12 to be processed, and the gas can flow from the outside of the partition wall 13 to the inside and the outflow of gas from the inside of the partition wall 13 to the outside can be prevented. A first pipe line 10 provided with a valve 16 and communicating with the outside of the partition wall 13 and a second conduit communicating with the inside of the partition wall 13
A valve control means 22, 23, 24 for opening and closing the second pipe 18 is provided with a pipe 18 and an on-off valve 20 for opening and closing the second pipe 18. In the hot isostatic pressing apparatus provided, an opening for inserting and removing the object to be processed 12 is formed on the lower end side of the cylindrical partition wall 13, and the lower part of the lower lid 3 corresponding to the opening is formed. The drain container 26 is detachably attached to the upper surface side of the inner lid 3B, and the upper part of the container is arranged in a protruding shape, and the flange portion which is the upper end of the container 26 is provided.
By attaching the opening of the cylindrical partition wall 13 to 26a airtightly via the sealing material and the connecting ring 30 and detachably attached, isotropic high-pressure pressurization of high-temperature and high-pressure for the object 12 to be processed In addition to being able to reliably collect components such as cresol, phenol, water, tar, etc. that may block the pipeline in the exhaust gas component in the drain reservoir, the upper end of the drain reservoir and the cylindrical partition wall The structure in which the lower end opening of 13 is airtightly fitted allows the lower lid 3 to be separated from the conventional one in which the lower lid 3 and the cylindrical partition wall 13 are joined together. 3 can be simplified and the lower lid structure can be simplified, and as shown in FIG. 1, the upper portion of the container 26 projects above the lower lid 3 so that On the inside and / or outside of the container 7 and the outer fins 28 can be provided, and when liquefying or solidifying the volatile components in the exhaust gas, a reliable heat exchange action is performed, and the collection thereof can be made more effective and reliable. As shown in FIG. 2, inside the drain container 26, the outer circumference is airtightly connected to the inner surface of the container, and the ring 31 is inclined downward with a gap 33 between the inner circumference and the cylinder 29, and the upper and lower inner ends are the inner surface of the container. Similarly, by providing an exhaust circuit for the vaporized component, which is connected to the high pressure chamber 5 through the through hole 26D in an airtight manner, and in which a plurality of circumferentially arranged pipes 32 are alternately arranged in the vertical direction, In order to obtain a good collection, it is possible to freely provide an additional structure having an effective function by utilizing the exposed upper part of the container.

In addition, as is clear from FIGS. 1 and 2, in the conventional apparatus of this type including the above-mentioned 1 to 3 of the conventional example, the opening and closing of the airtight chamber 14 for processing the object 12 is performed. Pipe line for discharging vaporized components to the outside of the high-pressure cylinder 1 through the valve 20.
In the present invention, on the other hand, in addition to the one system by the conduits 18 and 10, as shown in FIG. 7, the safety is secured to the lower inner lid 3B in the lower lid 3. Since the pipe 34 is provided, a normally closed sealing valve 35 is provided at one end communicating from the lower inner lid 3B of the pipe 34 to the outside, and a pipe is provided at the other end of the pipe communicating with the inside of the airtight chamber 14. 36 is connected and the opening of the same pipe 36
By providing 37 so as to project to a relatively high temperature portion in the airtight chamber 14, even if a clogging due to liquefaction of vaporized components should occur in the pipelines 10 and 18 for discharging vaporized components, the sealing valve 35 The pressure can be released by the opening operation.
It is also possible to deal with the risk of blockage due to liquefaction retention in the lower part, and it is possible to improve safety.

(Embodiment) A suitable embodiment of the present invention will be described with reference to Figs.

In FIG. 1, the high-pressure container is defined by a high-pressure cylinder 1 and an upper lid 2 and a lower lid 3 that close the upper and lower openings thereof.
Each fitting portion is hermetically held by the sealing materials 4 and 4A and has a high-pressure chamber 5 inside.

The lower lid 3 is a ring-shaped lower outer lid fitted with a sealing material 4A.
A so-called combination lid structure is formed by 3A and a lower inner lid 3B that is removably fitted in the lower outer lid 3A via a sealing material 4B.

The gas pressure acting on the lid is supported by a press frame (not shown), and a cylindrical heating element 6 made of an electric heating resistance wire for heating and heating the object 12 to be processed is provided inside the high-pressure container, High pressure cylinder 1 due to heat from 7 and these heating elements 6, 7
A heat insulating layer 8 that suppresses heat dissipation to the upper lid 2 and the lower lid 3 is incorporated.

An airtight chamber 14 partitioned by a gas-impermeable partition 13 and a drain reservoir 26 is formed inside the heating elements 6 and 7.

The cylindrical partition wall 13 has an inverted cup shape having an opening portion on the lower side thereof, and is hermetically sealed via the concentric drain reservoir container 26 upper portion and the sealing material 15 and the connecting ring 30 corresponding to the opening portion. It is connected.

It is generally preferable to use a metal material such as stainless steel, inconel, molybdenum, or tungsten for the partition wall 13 in order to secure gas impermeability, but an inorganic material such as impermeable graphite is used depending on temperature conditions. It is also possible to do so.

A concentric bottomed concave portion 25 is formed on the upper surface side of the lower lid 3 so as to correspond to the opening of the cylindrical partition wall 13, and at the center of the concave portion 25, a pillar portion 25A for the second pipeline 18 is formed. Further, the bottomed concave portion 25 has an upper flange 26A, and the cylindrical column portion 26B is formed at the center.
A drain pool container 26 having a flange is attached to the lower lid 3 in a detachable manner, and the drain pool container 26 has a flange 26C between its bottom and top.
Fins 27 and 2 on the inner and outer surfaces between 26C and the top
Have eight.

The object 12 to be treated can be inserted into and removed from the airtight chamber 14 in the cylindrical partition wall 13 via the hearth 11, and the airtight chamber 14 can be further inserted in the drain reservoir 26.
A check valve 16 is provided which communicates the inside and the outside of the device, allows the gas to flow from the outside to the inside, and prevents the gas from flowing from the inside to the outside.

Regarding the check valve 16, in order to ensure the valve function,
A sealing material such as an O-ring may be used for the valve portion, and it is desirable to dispose the sealing material below the airtight chamber 14, which is a relatively low temperature portion, from the viewpoint of heat resistance of the check spring.

From the airtight chamber 14 to the outside of the high-pressure vessel, a pipeline system 18
Is provided in the lower inner lid 3B in this example, an opening / closing valve 20 is provided in the connecting pipeline 19 of the pipeline system 18, and a pressure gauge 22 is provided in the connecting pipeline 21 in the pipeline 10 of the upper lid 2. But the conduit of the lower lid 3
A pressure gauge 23 is provided at 19 where the internal pressure and the external pressure of the airtight chamber 14 can be measured outside the container, and the differential pressure is detected by a detector 24, and an on-off valve 20 is provided by an electrical signal. Constitutes a valve control means for opening and closing.

The heating layer 8 is erected on the lower outer lid 3A by legs 8A having through holes 8B. Further, the hearth 11 is erected on the upper part of the drain container 26 by a cylindrical support wall having a through hole 9A, a cylinder 29 is airtightly connected to the bottom of the hearth 11 and the outside of the through hole 9A through the cylinder 29. And flows downward between the drain reservoir 26 and
A channel is formed which is inverted from the bottom of the container 26 and flows upward between the cylinder 29 and the columnar bottom 26B, and is inverted again to reach the conduit 18.

In this embodiment, the cylindrical partition wall 13 and the drain reservoir 26 are used as a unit. By preparing a plurality of sets of this unit, when one unit is performing processing, other units are treated outside the container. By setting and removing the body, the cycle time can be effectively utilized.

Next, the processing method and the function of each member related to the processing will be described.

The processing chamber 5 of the high-pressure container is evacuated from the first conduit 10 of the upper lid 2 by a vacuum pump, and then gas replacement with an inert gas such as argon is also carried out through the conduit 10.

In this case, although the outside of the airtight chamber 14 can be evacuated, the inside of the airtight chamber 14 cannot be evacuated because of the check valve 16. 2 Use the line 18.

Further, also in the gas replacement operation, the gas is supplied from the conduit 10 of the upper lid 2 and exhausted using the second conduit 18 of the lower inner lid 3B to completely replace the gas in the hermetic chamber 14. It is advantageous to do.

By the above vacuum evacuation and gas replacement operation, harmful water or oxygen is removed by the device constituent members or the object 12 to be processed, and then the argon gas is supplied to the predetermined pressure through the first conduit 10.

After filling the pressure medium gas, power is applied to the heating elements 6 and 7 to start the heating operation of the object to be processed 12, but the pressure increase due to the temperature increase is larger in the airtight chamber 14 than in the outside, In this case, the excessive increase in the internal pressure is released to the outside of the high pressure container by opening the opening / closing valve 20.

The operation of the on-off valve 20 is to measure the external pressure and the internal pressure of the airtight chamber 14 by separate pressure gauges 22 and 23, and the differential pressure between them is electrically detected by the detector 24, and when it reaches a predetermined value. The on-off valve 20 is opened by the electric signal of the detector 24.

The on-off valve 20 is preferably closed when the internal pressure and the external pressure of the airtight chamber 14 are just balanced.
When the cylindrical partition wall 13 that defines the airtight chamber 14 has pressure resistance, it can be opened in a state where the internal pressure is higher than the external pressure.

Further, even if the internal pressure when the valve is closed is lower than the external pressure due to the characteristics of the opening / closing valve 20, in this case, the check valve 16 immediately restores the balance between the internal pressure and the external pressure. There is no.

By the above operation, the heating and pressurizing process of the object 12 to be processed, that is, the isotropic pressurization accompanying the temperature rise and pressurization of the pressure medium gas,
It will be done while maintaining the balance of internal and external pressure.

During the pressure treatment during this period, it is generated from the object 12 to be treated.
Gas components such as H ₂ and CH _{4, which} are harmful to the device members, do not flow out into the space inside the high-pressure container outside the airtight chamber 14, so that the treatment is extremely stable and safe.

Further, due to the generation of harmful gas components, the internal pressure of the hermetic chamber 14 may excessively rise with respect to the external pressure.This is due to the operation of the opening / closing valve 20 similar to that described above, in the hermetic chamber 14 containing the generated gas. The gas is discharged to the outside of the high-pressure container, and the balance between the internal pressure and the external pressure is maintained.

Further, when the generated harmful gas from the object to be treated 12 is discharged through the gas discharge pipeline, components that are easily liquefied in a low temperature range, such as cresol, phenol, water, tar, etc., are contained in the exhaust gas components, which are Since there is a possibility that the valve portion will be clogged, it is necessary to collect these in the drain reservoir 26, but this is efficiently done in the drain reservoir wall above the upper surface of the lower inner lid 3B.

That is, the gas temperature in the vicinity of the through hole 8B is essentially low enough to liquefy or solidify the above components, and contacting this gas between the flange 28 of the outer wall of the drain reservoir and the upper portion of the high pressure gas Since the heat transfer coefficient is extremely large, it serves the purpose of liquefying or solidifying the components inside the drain reservoir corresponding to this space. At this time, if the fins 27 and the fins 28 are provided on the inner and outer surfaces of the drain reservoir as shown in the figure, the heat dissipation is further improved, and the exhaust gas contains a large amount of the above components, and the amount of latent heat released by liquefaction or solidification is reduced. Even if there are many, it can be reliably collected.
Further, there is only a small gap between the inner tip of the inner fin 27 and the outer surface of the cylinder 29 attached to the bottom of the hearth 11, and the through hole is formed.
By ensuring that the flow of exhaust gas coming through 9A contacts the inner fin 27, the collection becomes more reliable.

In this embodiment, the cylindrical partition wall 13 and the drain reservoir 26 are unitized, and this unit is configured to be detachable from the lower lid. By preparing a plurality of sets of this unit, a set of objects to be treated can be set. Since it can be performed outside the HIP device, it is possible to improve the decrease in the operating time of the HIP device due to the time-consuming setting of the object to be processed. In addition, downtime of the HIP device due to breakage or failure of the cylinder bulkhead, drain pool, check valve, etc. can be reduced.

Although not shown, the outer surface of the low temperature portion of the cylindrical partition wall, or
An electric strain gauge is attached to the outer surface of the drain container, the differential pressure inside and outside the cylinder partition is detected from the amount of these strains, and the on-off valve 20 is operated to control the pressure inside the cylinder partition due to clogging of the discharge piping system. Can be directly controlled, and the error in pressure measurement due to the resistance to the gas flow in the piping system can be eliminated.

Next, a modified embodiment of the present invention will be described. First
In the embodiment shown in the drawings, the inner and outer peripheral surfaces of the drain reservoir 26 protruding from the upper surface of the lower inner lid 3B are used, and the inner fins 27 and the outer fins 28 are formed on the inner and / or outer surfaces thereof. However, in the embodiment shown in FIG. 2, a fin 31 is replaced by a ring 31 and a pipe 32 for discharging a vaporized component, that is, a portion of the container 26 projecting above the lower lid 3 is shown. On the inner surface, the outer periphery of the ring 31, which is a donut-shaped disc, is airtightly fixed, and a small gap 33 is placed between the inner periphery and the cylinder 29, and these rings 31 are slanted vertically in appropriate intervals. In a row, at the intermediate position of each wheel 31, 31,
Both upper and lower ends are airtightly connected to the inner surface of the container and the through hole
The substantially U-shaped pipes 32 communicating with the high-pressure chamber 5 side via 26D are arranged in a row in the vertical direction and in the circumferential direction.

According to this exhaust circuit structure, the exhaust gas flowing downward through the through hole 9A expands adiabatically when passing through the gap 33 to liquefy or solidify the volatile components in the exhaust gas, and serve as a fin. After being cooled by 32 groups, the gap again
By repeating the adiabatic expansion after passing through 33, efficient collection can be performed. The liquefied component is retained along the inclination of each wheel 31 from the gap 33 in the recess 25 which is the bottom of the drain reservoir 26, and the solidified component is attached to the surface of the wheel 31. Of course, the shapes of the fins 27 and 28 shown in FIG. 1 and the structure of the discharge conduit formed by the ring 31 and the pipe 32 shown in FIG. 2 are not limited to the examples shown in the drawings.

Next, the embodiment shown in FIG. 7 will be explained. In this kind of hot isostatic pressing apparatus, as is apparent from the conventional examples 1 to 3, the pipeline for discharging the vaporized component from the airtight chamber 1 to the outside of the high-pressure container via the on-off valve 20 includes the upper lid 2 and It is one system of only the pipelines 10 and 18 provided on the lower lid 3 side. In the present invention, by providing the drain reservoir 26 as described above, it is possible to prevent clogging of the pipeline.
The function of the drain reservoir 26 is not always perfect, and since such a high-pressure piping system has a small diameter for pressure resistance, there is a possibility that clogging will occur easily. Should it become difficult to discharge the vaporized components due to clogging, the pressure in the airtight chamber will rise and not only will the cylinder partition 13 be damaged, but also a heating element (heater) associated with the damage of the same part. It may cause damage to the heat insulation layer, and from a safety point of view, it cannot be said that all measures have been taken. Therefore, in the present invention, in the molding apparatus having the drain reservoir 26, at least two independent lines for vaporizing components communicating from the airtight chamber 14 to the outside of the high-pressure cylinder 1 are provided, and one line is provided in one line. An opening / closing valve for constantly adjusting the pressure in the airtight chamber is provided, and a normally closed sealing valve for the purpose of releasing the pressure to the outside of the high pressure cylinder is added to the other pipeline. That is, the first and second
In the lower lid 3, as illustrated in FIG. 7 (only the newly installed pipe line portion is shown) separately from the pipe line 18 provided with the on-off valve 20 for discharging vaporized components shown in the drawing. At a position where it does not interfere with the conduit 18 on the lower inner lid 3B side, one end is opened to the peripheral side surface of the lower inner lid 3B, and the other end is provided with a third conduit 34 that is opened to the upper surface of the lower lid 3B. A normally closed sealing valve 35 is provided at one end of the passage 34, and a pipe 36 having an opening 37 projecting into the airtight chamber 14, preferably at a relatively high temperature portion, is airtightly connected to the other end. By independently providing a pipeline of another system by the pipeline 34 and the pipeline 36 as described above, even if the pipelines 10 and 18 for discharging vaporized components are clogged, the sealing valve 35 is provided. By opening, it is possible to release the pressure in the airtight chamber 14, damage to the cylindrical partition wall 13 constituting the airtight chamber 14,
Or the heating element (heat) induced by this,
7. Furthermore, it is possible to prevent damage to the heat insulating layer 8 and the like, prevent the risk of internal pressure rise due to incomplete function of the drain reservoir 26 side, trouble, etc., and improve and secure the safety of the entire device. Will be obtained. In this case, it is preferable to install the pressure gauge 22 for detecting the internal pressure of the airtight chamber 14 on the side of the pipeline 34 instead of providing it on the side of the pipeline 18 in order to further ensure the pressure detection.

Needless to say, each of the above-described embodiments is limited to one example, and various modifications can be adopted without departing from the intended scope of the present invention.

(Effects of the Invention) As described above in detail, according to the present invention, in the high temperature and high pressure processing, the processing of the object to be processed which generates a gas component harmful to the apparatus constituent members such as hydrogen and methane and the parts is performed by the apparatus structure. It can be carried out stably and safely without damaging members and parts.

Therefore, it is possible to process the carbon material and thus to develop a new material.

In particular, according to the present invention, in addition to the effect of the drain reservoir 26 shown in the conventional example 3, the exhaust gas component
Cresol, phenol, which may block the pipeline,
Components such as water and tar are reliably collected in the drain reservoir 26, and at the same time, the upper end of the drain reservoir is not attached to the lower lid 3 side and the opening of the cylindrical partition 13 in a sandwiched manner, but at least Since the upper half side is located above the upper surface of the lower lid 3 and is attached to the opening of the cylindrical partition wall 13, even if the cylindrical partition wall 13 is damaged, the lower lid 3 will not be accumulated. Further, various collecting function enhancing structures can be freely provided in a portion projecting from the lower lid 3 of the container 26.
It is also possible to easily attach and detach to and from the cylindrical partition wall 13, and to eliminate the need for a structure for embedding the entire container 26 on the lower lid 3 side, which is useful for simplifying the structure of the lower lid 3 and strengthening the rigidity, and also for the lower lid 3 side. By providing a pipeline 34 in a system different from the pipelines 10 and 18, it is possible to improve the safety of the entire apparatus, which has great advantages and practical benefits.

[Brief description of drawings]

FIG. 1 is a longitudinal front view of an embodiment of the device of the present invention, FIG. 2 is a front view of the same modified embodiment, FIG. 3 is a graph showing the relationship between gas pressure and carbon yield, and FIG. FIG. 5 is a vertical front view of Conventional Example 1, FIG. 5 is a front view of Conventional Example 2, FIG. 6 is a front view of Conventional Example 3, and FIG. 7 is a diagram showing only the pipeline of a modified embodiment of the present invention. FIG.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshihiko Sakashita 2-3-1, Noyamacho, Shinohara, Nada-ku, Kobe-shi, Hyogo Prefecture (72) Inventor Yasuhiko Inoue 2-3-1, Shinohara, Nonomachi, Nada-ku, Kobe-shi, Hyogo Prefecture 1 (72) Inventor Go Kanda 14-15-507 Oimatsu-cho, Nishinomiya-shi, Hyogo

Claims (2)

[Claims] 1. A heating furnace provided in a high-pressure vessel having an upper lid and a lower lid, has a cylindrical partition for accommodating an object to be processed, and allows gas to flow from the outside of the partition to the inside. A check valve for preventing gas from flowing out of the partition wall to the outside is provided, a first pipeline communicating with the exterior of the partition and a second pipeline communicating with the interior of the partition, and the second pipeline. In a hot hydrostatic pressure forming device having an on-off valve for opening and closing, and a valve control means for opening and closing the on-off valve by a gas differential pressure between the outside and the inside of the partition wall, a treatment target is provided on the lower end side of the cylindrical partition wall. An opening for insertion and removal of the body is formed, and a drain reservoir is detachably disposed on the upper surface side of the lower lid corresponding to the opening and the upper portion thereof is projected from the upper surface of the lower lid.
The hot isostatic pressing device is characterized in that the opening is detachably attached to an upper portion of the drain reservoir and airtightly fitted through a seal ring. 2. A heating furnace arranged in a high-pressure container having an upper lid and a lower lid, and having a cylindrical partition for accommodating an object to be treated, and allowing gas to flow from the outside of the partition to the inside. Further, a check valve for preventing the gas from flowing out from the inside of the partition wall is provided, and a second pipe line communicating with the outside of the partition wall is provided.
A hot isostatic pressing apparatus comprising: an opening / closing valve for opening / closing the second pipe line; and valve control means for opening / closing the opening / closing valve by a gas pressure difference between the outside and inside of the partition wall. On the side, an opening for inserting and removing the object to be processed is formed, and the drain reservoir is detachably attached to the upper surface side of the lower lid corresponding to the opening, and the upper portion of the drain reservoir projects from the upper surface of the lower lid. The opening is detachably attached to the upper part of the drain reservoir and airtightly fitted through a seal ring, and communicates with the inside of the partition wall and the outside of the high pressure container separately from the second conduit. 3 pipes are provided,
A hot isostatic molding device characterized in that a normally closed sealing valve for releasing the pressure to the outside of the high-pressure container is provided in the pipe line.