JPH0765759A - Horizontal type x-ray generating device for selectively taking out line/point focus - Google Patents

Abstract

PURPOSE:To install a horizontal type X-ray generating device by approaching its X-ray tube as close as possible even if a point focus utilizing device is located at any of both sides, right or left, of the X-ray tube in installing the point focus utilizing device at one of both sides, right or left, of the X-ray tube. CONSTITUTION:An electron gun 31 having a filament and a disk-like target 30 are positioned by facing each other in X-ray tube walls 3a-3d. The electron gun 31 faces the target 30 each other in the horizontal direction to constitute the horizontal type X-ray generating device. In the X-ray generating device, a direct motor for rotating and driving the target 30 is housed in a target body part 32. Round holes 38 are provided in three places, a tube wall 3a at the left side face, a tube wall 3b at the right side face, and a tube wall 3d at the upper face. Any one hole 38 is selected; the target body part 32 is secured to the selected hole 38. The two remained holes are sealed with a cover 39 each.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray generator which causes electrons emitted from a filament to collide with a target and emit X-rays from the target. In particular, the present invention relates to an X-ray generator capable of selectively extracting both line focus and point focus by changing the arrangement positions of a filament and a target.

[0002]

2. Description of the Related Art An X-ray apparatus using an X-ray generator as an X-ray source includes various kinds of equipment such as a wide-angle goniometer, a small-angle scatterer, a micro X-ray diffractometer, and an X-ray camera according to the purpose. Be done. A wide-angle goniometer is a device that irradiates a sample with X-rays and measures the intensity of the diffracted X-rays diffracted by the sample with respect to a wide range of diffraction angles (2θ). A small-angle scattering device is a device that irradiates a sample with X-rays to obtain a diffraction angle (2θ).
This is an apparatus for observing the state of scattered X-rays generated in the small-angle region of. The minute portion X-ray diffractometer is a device that irradiates a minute sample or a minute region of the sample with an X-ray beam having a minute cross section to collect diffracted X-ray information on the minute sample and the like.
And an X-ray camera irradiates a sample with X-rays,
It is an apparatus that exposes a diffracted X-ray reflected or transmitted by the sample onto an X-ray film to form a diffraction image on the X-ray film.

Generally, in a wide-angle goniometer and a small-angle scattering device, line-focus X-rays are used as an X-ray source. On the other hand, point-focused X-rays are used in a microscopic X-ray diffractometer and an X-ray camera.

Regarding the X-ray generator, a so-called horizontal X-ray generator in which the filament and the target face each other in the horizontal direction, or a so-called vertical type in which the filament and the target face each other in the vertical direction. Several types are conceivable, such as a type X-ray generator. In any of these types of X-ray generators, by changing the relative arrangement position of the filament and the target, two types of point focus and line focus can be obtained.
X-rays of different types of focus can be selectively extracted.

In particular, in a horizontal X-ray generator, holes for mounting a target are provided at two positions, that is, a top surface position of an X-ray tube wall that hermetically surrounds a filament and a target and a left side surface position when viewed from the front, and a line focus is provided. When it is desired to take out the X-rays, the target is mounted on the upper tube wall of the X-ray tube, and at the same time, the vertically arranged filaments are arranged to face the target. On the other hand, X of point focus
When it is desired to take out the wire, the target is attached to the tube wall on the left side of the X-ray tube, and at the same time, the horizontally arranged filament is arranged so as to face the target.

By the way, regarding the target, in particular, the rotary target, a rotary drive device for rotationally driving the target, a water passage device for passing cooling water into the target, and the like are attached to the target to form a single unit. Configure a target assembly as a unit. X as above to get the point focus
When mounted on the left side wall of the X-ray tube, the target main body part that houses the rotation drive device and the water passage device largely protrudes to the left of the X-ray tube, and therefore the point focus utilizing device is located on the left side of the X-ray tube. For example, in the case of installing a micro X-ray diffractometer, the point focus utilizing device must be installed far away from the X-ray tube in order to avoid the target main body. Since the X-ray intensity decreases in inverse proportion to the square of the distance, when a micro-part X-ray diffractometer that requires particularly high intensity is installed on the left side of the X-ray tube, the micro-part X-ray diffractometer is used. By installing it far away from the X-ray tube,
The X-ray intensity may be weakened and the reliability of the measurement result may be reduced.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and in the horizontal X-ray generator, when the X-ray apparatus is installed on both left and right sides of the X-ray tube, In particular, when at least one of the X-ray apparatuses is a point-focusing X-ray apparatus, the point-focusing X-ray apparatus may be located as close to the X-ray tube as possible on either the left or right side of the X-ray tube. The purpose is to be able to install.

[0008]

In order to achieve the above object, an X-ray generator according to the present invention has a filament and a target arranged in the wall of an X-ray tube, and the arrangement positions of the filament and the target are set. By changing it, both line focus and point focus can be taken out, and in the horizontal X-ray generator in which the filament and the target oppose each other in the horizontal direction, the rotary drive device for rotationally driving the target is It is integrated with the target, and is characterized in that mounting holes for fixing the target are provided at three positions on the left and right of the X-ray tube wall and one of the upper and lower positions with respect to the filament.

[0009]

The target is mounted in any one of the above three mounting holes, and the remaining two are hermetically closed by the lid. When the X-ray of the line focus is taken out, the target is mounted in one of the upper and lower mounting holes of the X-ray tube wall. On the other hand, when extracting point-focused X-rays, the target is mounted in either one of the left and right mounting holes of the X-ray tube wall. When X-ray apparatuses that require point-focused X-rays are installed on both the left and right sides of the X-ray tube, the targets are attached to the X-ray apparatus that does not cause a space problem even if the target projects. For example, when an X-ray device with a sufficient space is installed on the left side of the X-ray tube, the X-ray device side, that is, X
Mount the target in the mounting hole on the left side of the wire tube wall. As a result, the target does not pop out on the X-ray device side on the right side of the X-ray tube, and therefore the right X-ray device can be installed as close to the X-ray tube as possible. Therefore, it is possible to guide the X-ray having the strongest intensity to the right X-ray apparatus.

[0010]

FIG. 3 shows an embodiment of the X-ray generator according to the present invention, particularly a horizontal X-ray generator of the type in which the target and the filament face each other in the horizontal direction. This X-ray generator has a housing 2 provided with a table 1 and an X-ray tube 3 protruding from the inside of the housing 2 to above the table 1. Inside the housing 2, a power source and other devices for supplying electric power to a filament, a target, a Wehnelt, and the like arranged inside the X-ray tube 3 are stored.

Windows 4 for extracting X-rays made of beryllium or the like are provided on both left and right walls 3a, 3b of the X-ray tube 3 so that X-rays generated inside the X-ray tube 3 can pass through the windows 4. It is taken out. Tables 1 on both the left and right sides of the X-ray tube 3.
X-ray devices 5a and 5b indicated by chain lines are installed on the
The X-rays RL and RW extracted from the X-ray extraction window 4 act as X-ray sources for the X-ray devices 5a and 5b. In the present embodiment, a so-called wide-angle goniometer is considered as the X-ray device 5b installed on the right side of the X-ray tube 3, and a so-called micro X-ray diffraction device is considered as the X-ray device 5a installed on the left side thereof. To do.

The wide-angle goniometer is, for example, as shown in FIG.
As shown in FIG. 3, a rectangular parallelepiped-shaped goniometer base 6, a θ rotary table 7 disposed on the goniometer base 6, a 2θ rotary table 8 coaxial with the θ rotary table 7, and a slit stand 9 are provided.
And a divergence slit 10 which is detachably fixed. A rectangular sample holder 11 in which a sample, particularly a powder sample 12, is packed is detachably mounted on the θ-rotating table 7. A detector holder 13 extending in the radial direction is fixed to the 2θ rotary table 8, and a light receiving slit 14 and an X-ray counter 15 are fixedly installed on the detector holder 13.

In this wide-angle goniometer, the divergence slit 10 limits the divergence angle of the X-ray RW (usually the line-focus X-ray) emitted from the X-ray tube 3 (FIG. 3). The X-rays enter the sample 12. The sample 12 rotates together with the θ rotation table 7 at a constant angle about the sample axis ω, that is, θ rotation, and at the time of this θ rotation, the well-known Bragg condition is satisfied between the crystal lattice plane of the sample 12 and the incident X-ray. X-ray diffraction occurs when exposed. The detector arm 13 rotates together with the 2θ rotary table 8 in the same direction about the sample axis ω at an angular velocity twice as fast as θ rotation, that is, 2 °.
Rotate θ. The above-mentioned diffracted X-rays diffracted by the sample 12 are concentrated on the light-receiving slit 14 which rotates by 2θ together with the detector arm 13, pass there through, and are further captured by the X-ray counter 15 and counted. By the above operation, a well-known diffracted X-ray figure can be obtained on the coordinate axis with the vertical axis representing the diffraction X-ray intensity and the horizontal axis representing the diffraction angle 2θ.

A micro-part X-ray diffraction device 5a installed on the left side of the X-ray tube 3 in FIG. 3 is, for example, as shown in FIG.
PSPC (Position Sensi) fixed on the base 16
tiveproportional counter: Position sensitive X-ray detector) 1
7 and a rotary drive system 19 supported by a stand 18.
It has a collimator 20, and a microscope 21. The PSPC 17 has an elongated window 2 for capturing X-rays.
9 is equipped.

The rotary drive system 19 is a ω-axis arm 2 rotatably supported by a stand 18 about the ω-axis.
2, a χ-axis arm 23 supported by the tip of the ω-axis arm 22 and rotatable about the χ (chi) axis,
A φ-axis arm 24 supported by the tip of the axis arm 23 and rotatable about the φ-axis is provided. ω axis,
The χ-axis line and the φ-axis line are orthogonal to each other at one point, and the sample 25 to be measured is placed at the intersection of the three axes. The ω-axis arm 22, the χ-axis arm 23, and the φ-axis arm 24 are driven by the ω-axis motor 26, the χ-axis motor 27, and the φ-axis motor 28, respectively, and rotate about each axis. The rotation of each of these arms causes the sample 25 to freely rotate around the intersections of the axes ω, χ, and φ, and as a result, the collimator 20 is rotated.
An arbitrary minute region of the sample 25 can be carried to the irradiation position of the X-ray beam having a minute cross-sectional diameter emitted from the.

In this minute portion X-ray diffractometer 5a,
The X-ray RL (usually a point-focused X-ray) emitted from the X-ray tube 3 (FIG. 3) is shaped into a parallel beam having a minute cross-sectional diameter by the collimator 20 and is then incident on a minute region of the sample 25. When the Bragg condition is satisfied between the incident X-ray and the crystal lattice plane of the sample 25, X-ray diffraction occurs and the diffracted X-ray is taken into the inside of the PSPC 17 through the window 29. The PSPC 17 simultaneously measures the intensity of the captured X-ray and the diffraction angle 2θ.

The X-ray tube 3 shown in FIG. 3 is hermetically sealed inside, and as shown in FIG. 1, the inside of the X-ray tube 3 is a cylindrical target 30 and electrons that horizontally oppose the target 30. It has a gun 31. The target 30 is rotatably supported at the lower end of a main body portion 32. Inside the main body portion 32, a rotation drive device for rotationally driving the target 30, for example, a direct motor and cooling water inside the target 30 are provided. It has a built-in water flow device.

As shown in FIG. 4, the electron gun 31 includes a filament 34 arranged in a rectangular parallelepiped case 33,
And a Wehnelt 35 surrounding the filament 34. Both ends of the filament 34 are connected to electrode terminals 36 protruding outside the case 33. When the filament 34 extends horizontally as shown in FIG. 4,
Two types are prepared in the case of extending in the vertical direction as shown in FIG. In FIG. 1, a high voltage introducing terminal 37 is fixed to a lower portion of the back tube wall 3c of the X-ray tube 3, and a high voltage tube voltage is applied to the target 30 and the filament 34 via the terminal 37.
(FIG. 4), a high current is applied between the filament 34 and
And a bias voltage is applied between the Wehnelt 35 (FIG. 4) and the filament 34.

Each of the left side wall 3a, the upper side wall 3d and the right side wall 3b constituting the X-ray tube 3 is provided with one round hole 38 for mounting the target, respectively. The target assembly consisting of the target 30 and the body portion 32 is mounted in one of these holes 38 and the remaining two holes 38 are hermetically closed by a lid 39.
A turbo molecular pump 40 is fixed to the bottom wall of the X-ray tube 3, and the inside of the X-ray tube 3 is evacuated to a vacuum by the turbo molecular pump 40 and a rotary pump (not shown) separately provided.

The operation of the X-ray generator having the above structure will be described below.

(When extracting line-focused X-rays) In FIG. 3, the microscopic X-ray diffractometer 5a installed on the left side of the X-ray tube 3 is deactivated, and the wide-angle goniometer 5b installed on the right side is activated. In the case of performing, the X-ray of the line focus is extracted from the X-ray tube 3. In this case,
As shown in FIG. 5, the target main body 32 is fixed in the mounting hole 38 of the upper tube wall 3d constituting the X-ray tube 3, and the electron gun having the filament 34 vertically arranged as shown in FIG. 5 is used. .

In this configuration, the filament 34 is energized to emit electrons, and the Wehnelt 3
Target 30 while controlling the traveling direction of electrons by the bias voltage applied between the filament 5 and the filament 34.
Collide with the outer peripheral surface of. At this time, the electrons colliding with the target 30 form a long focal point f1 in the vertical direction. The X-rays generated from this focus f1 are extracted from the X-ray extraction window 4 to the outside of the right side of the X-ray tube 3 as X-rays RW of the line focus, and are used as the X-ray source for the wide-angle goniometer (FIG. 6). .

That is, as shown in FIG. 8, the extracted line-focused X-ray RW is irradiated onto the sample 12 through the divergence slit 10, and the X-ray diffracted by the sample 12 is passed through the light-receiving slit 14 by the X-ray counter 15. Diffraction X-ray information regarding the diffraction angle 2θ is detected.

(Point-focused X-ray extraction
3 ) In FIG. 3, when the wide-angle goniometer 5b installed on the right side of the X-ray tube 3 is deactivated and the microscopic X-ray diffractometer 5a installed on the left side is operated, the point from the X-ray tube 3 Take out the X-ray of the focus. In this case, as shown in FIG. 2, the target main body 32 is fixed in the mounting hole 38 of the right side tube wall 3b forming the X-ray tube 3, and the filament as shown in FIG. 34 is horizontally arranged.

In this case, the electrons striking the target 30 form a focal point f2 which is long in the horizontal direction, and the X-rays generated from this focal point f2 are emitted from the X-ray extraction window 4 as point-focused X-rays RL. 3 to the outside of the left side and used as an X-ray source for the micro-part X-ray diffractometer (FIG. 7).

At the time of this measurement, as shown in FIG.
The divergence slit 10 of the wide-angle goniometer 5b is removed from the slit stand 9. This makes target 3
0 and the main body 32 is a target assembly which is an X-ray tube 3.
Even when the target main body 32 and the divergence slit 10 are fixed to the right side tube wall 3b, it is possible to prevent the target main body 32 and the divergence slit 10 from colliding with each other. Prior to use, the wide-angle goniometer 5b requires initial adjustment such as optical axis adjustment, and it is not preferable to move the entire device once the adjustment is completed. In the present embodiment, when the target assembly is replaced from the upper surface wall 3d of the X-ray tube 3 to the right side wall 3b, the wide-angle goniometer 5b is left as it is and only the divergence slit 10 is removed from the goniometer. Since it is configured, when the measurement by the wide-angle goniometer is restarted, the divergence slit 10 only needs to be attached again, and it is not necessary to repeat the initial adjustment.

Since the target assemblies 30 and 32 are fixed to the right side tube wall 3b, there is no protruding portion on the left side of the X-ray tube 3. Therefore, the micro-part X-ray diffractometer 5a installed on the left side of the X-ray tube 3 can be brought as close to the X-ray tube 3 as possible, so that the point-focused X-ray beam having high intensity can be transmitted to the micro-part X-ray diffractometer. It can lead to 5a. Therefore, it is possible to perform highly reliable X-ray diffraction measurement with a high S / N ratio.

On the other hand, in the conventional horizontal X-ray generator, the mounting hole for fixing the target assembly is X.
Since it was provided only at two places, the upper surface and the left side surface of the ray tube wall, it is an area where the minute portion X-ray diffracting device 5a is installed when the point focus X-ray is to be taken out. The target assembly projects to the left of the X-ray tube 3. Therefore, the minute portion X-ray diffractometer 5a could not be installed near the X-ray tube 3. Therefore, the minute portion X
Only a weak point focus could be guided to the line diffractometer.

In the conventional horizontal X-ray generator having only two mounting holes for mounting the target, when the point-focus X-ray is taken out, that is, when the target assembly is mounted on the side wall of the X-ray tube, it is very small. It is considered that there is no problem if a point-focus utilizing device such as a partial X-ray diffraction device is installed on the side opposite to the surface on which the target is mounted. However, in the case of this conventional apparatus, the arrangement position of the point focus utilizing device is limited to either the left or right side of the X-ray tube, particularly the side where the target assembly does not project, and thus the usability is poor. According to the present embodiment, the position where the target assembly is fixed is X.
By appropriately selecting between the left and right walls of the X-ray tube, the point focus utilizing device can be installed at any of the left and right positions of the X-ray tube as required.

Although the present invention has been described with reference to one embodiment, the present invention is not limited to the embodiment but can be variously modified within the technical scope described in the claims.

For example, in the above-mentioned embodiment, the minute portion X-ray diffractometer is considered as the point focus utilizing device, but it is also possible to apply an X-ray camera or any other X-ray device. Further, as the device for utilizing line focus, any X-ray device other than the wide-angle goniometer can be applied.

[0032]

According to the present invention, any one of the target mounting holes provided on both the left and right walls of the X-ray tube constituting the horizontal X-ray generator is selected and the target is mounted therein. , Install the point focus utilizing device on the opposite side of the X-ray tube so that the point focus utilizing device is installed as close as possible to the X-ray tube regardless of whether it is on the left or right side of the X-ray tube. it can. This makes it possible to guide strong point-focus X-rays to the point-focus utilizing device.

[0033]

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a horizontal X-ray generator according to the present invention, particularly showing a state when X-rays of line focus are taken out.

FIG. 2 is a perspective view showing an embodiment of a horizontal X-ray generator according to the present invention, and particularly showing a state at the time of extracting point-focused X-rays.

FIG. 3 is a perspective view showing the overall appearance of the X-ray generator shown in FIGS. 1 and 2.

FIG. 4 is a perspective view showing an example of an electron gun used at the time of X-ray extraction of a point focus.

FIG. 5 is a perspective view showing an example of an electron gun used for line-focus X-ray extraction.

FIG. 6 is a perspective view showing an example of an X-ray utilizing apparatus, particularly a wide-angle goniometer using an X-ray of line focus as an X-ray source.

FIG. 7 is a perspective view showing an example of an X-ray utilizing apparatus, and in particular, a minute portion X-ray diffraction apparatus using point-focused X-rays as an X-ray source.

8 is a plan view showing a case where a wide-angle goniometer is operated in the X-ray apparatus shown in FIG.

FIG. 9 is a plan view showing a case where a micro X-ray diffractometer is operated in the X-ray apparatus shown in FIG.

[Explanation of symbols]

 1 table 3 X-ray tube 3a left side tube wall 3b right side tube wall 3c rear tube wall 3d upper tube wall 4 X-ray extraction window 30 target 31 electron gun (filament) 32 target main body 37 high-voltage terminal 38 Target mounting hole 39 Lid

Claims (1)

[Claims] 1. A line focus and a point focus can be taken out by changing a position where the filament and the target are arranged, the filament and the target having the filament and the target arranged in the wall of the X-ray tube. In a horizontal X-ray generator that faces each other in the horizontal direction, a rotary drive device for rotationally driving the target is integrated with the target. An X-ray generator characterized in that mounting holes for fixing a target are provided at three positions on one side.