JPH0765707A - Photocathode and electron gun using this and accelerator - Google Patents
Photocathode and electron gun using this and acceleratorInfo
- Publication number
- JPH0765707A JPH0765707A JP5209400A JP20940093A JPH0765707A JP H0765707 A JPH0765707 A JP H0765707A JP 5209400 A JP5209400 A JP 5209400A JP 20940093 A JP20940093 A JP 20940093A JP H0765707 A JPH0765707 A JP H0765707A
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- JP
- Japan
- Prior art keywords
- photocathode
- substance
- activating substance
- activating
- diffusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Electron Sources, Ion Sources (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
Description
【発明の詳細な説明】Detailed Description of the Invention
【０００１】[0001]
【産業上の利用分野】本発明は光電効果を用いた光陰極
に係り、特に、長時間連続的に使用するのに好適な光陰
極とこれを用いた電子銃並びに加速器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photocathode using the photoelectric effect, and more particularly to a photocathode suitable for continuous use for a long time, an electron gun and an accelerator using the photocathode.
【０００２】[0002]
【従来の技術】高エネルギの電子を得る場合、電子銃か
ら電子を出射させ、これを粒子加速器内に導入して加速
する。ＣＲＴなどの表示装置では、電子銃から出射させ
た電子を蛍光面に当てて発光させ、様々な映像を表現す
る。電子顕微鏡では、電子銃から出射させた電子を静電
レンズ等で集束させ、被検査体に照射する。このよう
に、電子銃は様々な装置に利用されており、その電子銃
の構造は、従来から種々のものがあるが、光陰極を利用
しようとするものはなかった。2. Description of the Related Art When obtaining high-energy electrons, electrons are emitted from an electron gun and introduced into a particle accelerator for acceleration. In a display device such as a CRT, electrons emitted from an electron gun are applied to a fluorescent screen to emit light and various images are displayed. In the electron microscope, the electrons emitted from the electron gun are focused by an electrostatic lens or the like and irradiated onto the object to be inspected. As described above, the electron gun has been used in various devices, and there are various structures of the electron gun in the related art, but none has tried to use the photocathode.
【０００３】光陰極は、光電効果の原理により電子を発
生させる陰極であり、光電子を放出する物質を備え、光
を照射することで電子を発生させるものである。この性
質を示す物質としては、銅，イットリウム，銀などの金
属、砒化ガリウムなどの半導体、またはアンチモンとア
ルカリまたは銀とビスマスとアルカリと酸素などの化合
物などの種々のものがある。金属型光陰極は、寿命は長
いが、光子１個あたりに発生する電子数を表す量である
量子効率が０．０００１％から０．００１％と低く、ま
た有感波長領域が紫外線領域にあるため、大強度の照射
光源が要求される。これに対し、半導体や化合物の光陰
極では、量子効率は１％から１０数％と高く、有感波長
領域が可視光領域であるため、照射光に対する要求は緩
和される。A photocathode is a cathode that generates electrons by the principle of photoelectric effect, has a substance that emits photoelectrons, and generates electrons by irradiating light. Examples of substances exhibiting this property include metals such as copper, yttrium, and silver, semiconductors such as gallium arsenide, and compounds such as antimony and alkali, silver, bismuth, alkali, and oxygen. The metal photocathode has a long life, but its quantum efficiency, which is the quantity representing the number of electrons generated per photon, is as low as 0.0001% to 0.001%, and the sensitive wavelength region is in the ultraviolet region. Therefore, a high intensity irradiation light source is required. On the other hand, in a semiconductor or compound photocathode, the quantum efficiency is as high as 1% to 10% and the sensitive wavelength region is in the visible light region, so the requirement for irradiation light is relaxed.
【０００４】しかしながら、真空中に電子を引き出す型
の光陰極では、短時間で特性が悪化してしまうという問
題があるので、電子銃には向いておらず、この種の光陰
極は、例えば特開昭５２ー１１２２７１号公報等に見ら
れる様に、光電管に使用されるにすぎなかった。However, the photocathode of the type that draws out electrons in a vacuum has a problem that the characteristics are deteriorated in a short time, and therefore it is not suitable for an electron gun. As seen in Japanese Laid-Open Patent Publication No. 52-121271, it was only used for a photoelectric tube.
【０００５】このように光陰極は電子銃に不向きであ
る。しかし、大電流がとれるという利点、クリアなパル
ス的電子ビームが取り出せるという利点、レーザーパル
ス波形に忠実に応じた電子ビームが取り出せるという利
点があり、電子銃に利用する試みがある。例えば、１９
９１年埼玉で開催された第８回加速器科学研究会（The8
th Symp. on Accelerator Science and Technology, 19
91. Saitama, Japan）の第６７頁「ＲＦガン・ユージン
グ・レーザ・トリガード・フォトカソード」（"RF gun
using laser-triggered photocathode"）秋山等では、
加速器用の電子銃が提案されている。As described above, the photocathode is not suitable for an electron gun. However, it has an advantage that a large current can be taken, an advantage that a clear pulsed electron beam can be taken out, and an advantage that an electron beam faithfully corresponding to the laser pulse waveform can be taken out, and there is an attempt to use it for an electron gun. For example, 19
The 8th Accelerator Science Workshop (The8) held in Saitama in 1991
th Symp. on Accelerator Science and Technology, 19
91. Saitama, Japan), page 67, "RF gun using laser triggered photocathode"("RF gun
using laser-triggered photocathode ") In Akiyama,
Electron guns for accelerators have been proposed.
【０００６】図８は、半導体や化合物の光陰極を電子銃
に用いたときの従来技術を示す図である。電子銃部とな
る真空容器２と、光陰極を作成する真空容器１３とを、
ゲートバルブ１９で区切る構成となっており、真空容器
１３内で光陰極を作成し、これを真空容器２に持ち込
み、ここで発生させた電子を真空中に引き出す構成とし
ている。まず、真空容器１３中に設置した金属棒２０の
先端表面を基板３０に対向させ、基板３０を加熱するこ
とで、この基板３０中に含浸させてある物質３１を蒸発
させて、金属棒２０の先端表面に蒸着させる。このと
き、光陰極構成物質を蒸着し光陰極活性化物質を付着さ
せるか、又は光陰極構成物と光陰極活性化物質を交互に
蒸着することにより、金属棒２０の先端表面に光陰極を
作成する。そして、その後に基板３０を下降させ、ゲー
トバルブ１９を開放して、金属棒２０を真空容器２にま
で挿入し、ここで光陰極に光を照射して、光電子を放出
させ、これを電界で真空中に引き出す様にしている。FIG. 8 is a diagram showing a prior art when a semiconductor or compound photocathode is used in an electron gun. A vacuum container 2 that serves as an electron gun and a vacuum container 13 that creates a photocathode are
The gate valve 19 separates the photocathode in the vacuum container 13, brings the photocathode into the vacuum container 2, and draws out the electrons generated therein into a vacuum. First, the front end surface of the metal rod 20 placed in the vacuum container 13 is made to face the substrate 30 and the substrate 30 is heated to evaporate the substance 31 impregnated in the substrate 30 and thereby the metal rod 20 Evaporate on the tip surface. At this time, a photocathode is formed on the tip surface of the metal rod 20 by depositing a photocathode constituent substance and adhering the photocathode activating substance or alternately depositing the photocathode constituent substance and the photocathode activating substance. To do. Then, after that, the substrate 30 is lowered, the gate valve 19 is opened, the metal rod 20 is inserted into the vacuum container 2, and the photocathode is irradiated with light there to emit photoelectrons. I try to pull it out in a vacuum.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上記従
来技術は、作成した光陰極面が真空中に露出する構成の
ため、光陰極面から光陰極活性化物質が真空中に離脱
し、また、真空中の残留ガスの影響によって、光陰極の
寿命を短くするという問題がある。また、光陰極表面よ
り光陰極活性化物質が離脱し光陰極の特性が悪化した場
合には、光陰極の使用を中断し、新たに光陰極活性化物
質を付着させ再活性化せざるを得ないという問題もあ
る。つまり、従来の光陰極を用いた電子銃は、長時間安
定に連続使用することができないという問題がある。However, in the above-mentioned prior art, since the prepared photocathode surface is exposed in vacuum, the photocathode activating substance is released from the photocathode surface into the vacuum, and There is a problem that the life of the photocathode is shortened due to the influence of the residual gas inside. Further, when the photocathode activating substance is separated from the photocathode surface and the characteristics of the photocathode are deteriorated, the use of the photocathode is interrupted, and the photocathode activating substance is newly attached to reactivate the photocathode. There is also the problem of not having it. That is, the conventional electron gun using the photocathode has a problem that it cannot be continuously used stably for a long time.
【０００８】本発明の目的は、上記問題を解決し、長時
間安定に連続使用することができる光陰極とこれを用い
た電子銃並びに加速器を提供することにある。An object of the present invention is to solve the above problems and provide a photocathode which can be continuously used stably for a long time, an electron gun and an accelerator using the photocathode.
【０００９】[0009]
【課題を解決するための手段】上記目的は、開口面が光
陰極活性化物質を拡散させる拡散物質で閉塞され、内部
に光陰極活性化物質を封入し、前記拡散物質の外側表面
に光陰極面を有する容器を設けることで、達成される。SUMMARY OF THE INVENTION The above object is to provide a photocathode on the outer surface of which the opening surface is closed by a diffusing substance for diffusing the photocathode activating substance, and the photocathode activating substance is enclosed inside. This is achieved by providing a container with a face.
【００１０】また、開口面が光陰極活性化物質を拡散さ
せる拡散物質で閉塞され、内部に光陰極活性化物質を封
入し、前記拡散物質の外側に光陰極構成物質でなる薄膜
を備え、該薄膜と前記拡散物質との境界面に光陰極面が
形成される構成の容器を備えることで、達成される。Further, the opening surface is closed by a diffusing substance for diffusing the photocathode activating substance, the photocathode activating substance is enclosed inside, and a thin film made of the photocathode constituting substance is provided outside the diffusing substance. This is achieved by providing a container having a structure in which a photocathode surface is formed on the boundary surface between the thin film and the diffusing substance.
【００１１】また、好ましくは、前記拡散物質は前記光
陰極活性化物質を含浸し、該拡散物質を加熱する加熱手
段を備える。Further, preferably, the diffusing substance is provided with a heating means for impregnating the photocathode activating substance and heating the diffusing substance.
【００１２】また、開口面が多孔質板で閉塞され内部に
光陰極活性化物質を封入し、前記多孔質板の外側に接し
該多孔質板との境界面に光陰極面を有すると共に、光を
透過する光陰極構成物質とを有する容器を設けること
で、達成される。In addition, the opening surface is closed by a porous plate, a photocathode activating substance is enclosed inside, and the photocathode surface is in contact with the outside of the porous plate and has a photocathode surface at the interface with the porous plate. It is achieved by providing a container having a photocathode constituent substance that transmits light.
【００１３】また、好ましくは、外部から前記容器内に
光陰極活性化物質を供給する手段を備える。Further, preferably, it is provided with means for supplying a photocathode activating substance into the container from the outside.
【００１４】また、好ましくは、前記容器内に光陰極活
性化物質供給源を備える。Further, preferably, a photocathode activating substance supply source is provided in the container.
【００１５】また、光陰極面の一側に光陰極活性化物質
を含浸した拡散物質と、該光陰極面の他側に光を透過す
る光陰極構成物質と、前記拡散物質を加熱する加熱手段
とを備えた構成とすることで、達成される。A diffusing substance having a photocathode activating substance impregnated on one side of the photocathode face, a photocathode constituting substance which transmits light to the other side of the photocathode face, and a heating means for heating the diffusing substance. This is achieved by adopting a configuration including and.
【００１６】また、光陰極面の一側に光陰極活性化物質
との合金で構成される拡散物質を備え、該光陰極面の他
側に光を透過する光陰極構成物質を備えると共に、前記
拡散物質を加熱する加熱手段を備えた構成とすること
で、達成される。In addition, a diffusion material composed of an alloy with a photocathode activating substance is provided on one side of the photocathode surface, and a photocathode constituent substance that transmits light is provided on the other side of the photocathode surface. This can be achieved by providing a heating means for heating the diffusing substance.
【００１７】[0017]
【作用】本発明では、開口面が光陰極活性化物質を拡散
させる拡散物質で閉塞され内部に光陰極活性化物質を封
入し、前記拡散物質の外側表面に光陰極面を備えた容器
を設けることにより、光陰極面から失われる光陰極活性
化物質を拡散物質を通して光陰極面に常時供給すること
ができるので、光陰極を長時間安定に連続して使用する
ことができる。According to the present invention, the opening surface is closed with the diffusion material for diffusing the photocathode activating substance, the photocathode activating substance is enclosed inside, and the container having the photocathode surface on the outer surface of the diffusion substance is provided. As a result, the photocathode activating substance lost from the photocathode surface can be constantly supplied to the photocathode surface through the diffusing substance, so that the photocathode can be stably used continuously for a long time.
【００１８】また、開口面が光陰極活性化物質を拡散さ
せる拡散物質で閉塞され内部に光陰極活性化物質を封入
し、前記拡散物質の外側に光陰極構成物質でなる薄膜を
備え、該薄膜と前記拡散物質との境界面に光陰極面が形
成される構成の容器を設けたので、更に、上記の作用に
加え、真空中の残留ガスの付着を防ぐことができ、光陰
極の連続使用時間を更に延ばすことができる。Further, the opening surface is closed with a diffusing substance for diffusing the photocathode activating substance, the photocathode activating substance is enclosed inside, and a thin film made of a photocathode constituent substance is provided outside the diffusing substance. Since a container having a structure in which a photocathode surface is formed on the interface between the diffusion substance and the diffusion substance is provided, in addition to the above-mentioned action, adhesion of residual gas in a vacuum can be prevented, and the photocathode can be continuously used. You can extend the time further.
【００１９】また、好ましくは、前記拡散物質は前記光
陰極活性化物質を含浸し、該拡散物質を加熱する加熱手
段を備えたことにより、拡散物質に含浸された光陰極活
性化物質も光陰極面に供給することができ、光陰極を長
時間安定に連続して使用することができる。Further, preferably, the diffusing substance is impregnated with the photocathode activating substance, and a heating means for heating the diffusing substance is provided, so that the photocathode activating substance impregnated in the diffusing substance is also the photocathode. Can be supplied to the surface, and the photocathode can be used continuously and stably for a long time.
【００２０】また、好ましくは、外部から前記容器内に
光陰極活性化物質を供給する手段を備えたことにより、
光陰極面に供給する光陰極活性化物質の容量が増えるの
で、光陰極の連続使用時間を更に延ばすことができる。Further, preferably, by providing means for supplying a photocathode activating substance into the container from the outside,
Since the capacity of the photocathode activating substance supplied to the photocathode surface is increased, the continuous use time of the photocathode can be further extended.
【００２１】また、好ましくは、前記容器内に光陰極活
性化物質供給源を備えたことにより、光陰極面に供給す
る光陰極活性化物質の容量が増えるので、光陰極の連続
使用時間を更に延ばすことができる。Further, preferably, since the photocathode activating substance supply source is provided in the container, the capacity of the photocathode activating substance supplied to the photocathode surface is increased, so that the continuous use time of the photocathode is further increased. It can be postponed.
【００２２】また、光陰極面の一側に光陰極活性化物質
を含浸した拡散物質を備え、該光陰極面の他側に光を透
過する光陰極構成物質を備えると共に、前記拡散物質を
加熱する加熱手段を備えたことにより、拡散物質を加熱
してこれに含浸された光陰極活性化物質を光陰極面に供
給できるので、光陰極を長時間安定に連続して使用する
ことができる。Further, a diffusion material impregnated with a photocathode activating substance is provided on one side of the photocathode surface, and a photocathode constituent substance that transmits light is provided on the other side of the photocathode surface, and the diffusion material is heated. Since the diffusing substance can be heated and the photocathode activating substance impregnated in the diffusing substance can be supplied to the photocathode surface by providing the heating means, the photocathode can be stably used continuously for a long time.
【００２３】また、光陰極面の一側に光陰極活性化物質
との合金で構成される拡散物質を備え、該光陰極面の他
側に光を透過する光陰極構成物質を備えると共に、前記
拡散物質を加熱する加熱手段を備えたことにより、拡散
物質を加熱してこれに含まれる光陰極活性化物質を光陰
極面に供給できるので、光陰極を長時間安定に連続して
使用することができる。Further, a diffusing substance composed of an alloy with a photocathode activating substance is provided on one side of the photocathode face, and a photocathode constituent substance that transmits light is provided on the other side of the photocathode face. Since the heating means for heating the diffusing substance is provided, the diffusing substance can be heated and the photocathode activating substance contained therein can be supplied to the photocathode surface, so that the photocathode can be used stably and continuously for a long time. You can
【００２４】[0024]
【実施例】以下、本発明の実施例を図面を参照して説明
する。図１は、本発明の第１実施例に係る光陰極を用い
た電子銃の構成図である。図１において、容器１の開口
端面は多孔質板４により閉塞されている。この容器１内
には光陰極活性化物質３が封入されており、且つ、この
容器１内に外部の光陰極活性化物質源１０から光陰極活
性化物質３を供給するパイプ９が接続されており、容器
１内の光陰極活性物質３が多孔質板４を通して外部に拡
散するようになっている。多孔質板４の外側表面には光
陰極構成物質の薄膜が蒸着されており、多孔質板４中を
拡散してきた光陰極活性化物質３と光陰極構成物質（薄
膜）とが反応して光陰極面６が形成される。容器１内に
は常に光陰極活性物質３が補給されるので、光陰極活性
化物質３が光陰極面６から離脱しても、その特性は劣化
しない。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of an electron gun using a photocathode according to a first embodiment of the present invention. In FIG. 1, the open end surface of the container 1 is closed by a porous plate 4. A photocathode activating substance 3 is enclosed in the container 1, and a pipe 9 for supplying the photocathode activating substance 3 from an external photocathode activating substance source 10 is connected to the container 1. The photocathode active substance 3 in the container 1 is diffused to the outside through the porous plate 4. A thin film of a photocathode constituent substance is deposited on the outer surface of the porous plate 4, and the photocathode activating substance 3 and the photocathode constituent substance (thin film) diffused in the porous plate 4 react with each other to emit light. The cathode surface 6 is formed. Since the photocathode active substance 3 is constantly replenished in the container 1, even if the photocathode activating substance 3 is detached from the photocathode surface 6, its characteristics are not deteriorated.
【００２５】照射光源３３から出射した照射光７を、真
空窓３５，反射鏡３４を介して光陰極面６に照射する
と、光陰極面６から電子８が発生される。この電子８
を、絶縁体１１と電源１２によって与えられた電場によ
って加速し、図示しない加速器に入射する。When the irradiation light 7 emitted from the irradiation light source 33 is applied to the photocathode surface 6 through the vacuum window 35 and the reflecting mirror 34, electrons 8 are generated from the photocathode surface 6. This electron 8
Is accelerated by an electric field provided by the insulator 11 and the power source 12 and is incident on an accelerator (not shown).
【００２６】斯かる構成の光陰極では、電子８を加速す
る電場は、光陰極面６より発生した電子８を真空容器２
中に引き出し、かつ管３２内に導入して加速することが
できる。また、容器１内の光陰極活性化物質３が減少し
た場合、容器１に取り付けたパイプ９を通して外部の光
陰極活性化物質源１０より光陰極活性化物質３を供給す
ることができる。そのため、光陰極の使用を中断するこ
となく連続的に安定して使用することができる。In the photocathode having such a structure, the electric field for accelerating the electrons 8 causes the electrons 8 generated from the photocathode surface 6 to move to the vacuum container 2.
It can be withdrawn and introduced into tube 32 for acceleration. When the photocathode activating substance 3 in the container 1 is reduced, the photocathode activating substance 3 can be supplied from the external photocathode activating substance source 10 through the pipe 9 attached to the container 1. Therefore, the photocathode can be continuously and stably used without interruption.
【００２７】光陰極活性化物質３としては、セシウム，
カリウム，ナトリウム，、ルビンシウム，リチウムなど
のアルカリ金属を、単独または複数組み合わせて使用す
る。多孔質板４の表面に設ける光陰極構成物質の薄膜と
しては、アンチモンを使用する。As the photocathode activating substance 3, cesium,
Alkali metals such as potassium, sodium, rubincium and lithium are used alone or in combination. Antimony is used as the thin film of the photocathode constituent substance provided on the surface of the porous plate 4.
【００２８】多孔質板４としては、光陰極活性化物質３
を光陰極構成物質の薄膜まで透過することが可能な空隙
を持つタングステン，モリブデン，タンタルあるいはセ
ラミックスを用いる。As the porous plate 4, the photocathode activating substance 3 is used.
Tungsten, molybdenum, tantalum, or ceramics having a void that can penetrate to the thin film of the photocathode constituent material is used.
【００２９】光陰極活性化物質３としては、セシウム，
カリウム、ナトリウム、ルビンシウム、リチウムなどの
アルカリ金属及び酸素を単独または複数組み合わせて使
用し、光陰極構成物質としては、銀、または、銀及びビ
スマスを使用する場合も考えられる。また、光陰極活性
化物質３としてセシウムおよび酸素を使用し、光陰極構
成物質として砒化ガリウムを使用する場合もある。As the photocathode activating substance 3, cesium,
It is also considered that alkali metals such as potassium, sodium, rubinsium and lithium and oxygen are used singly or in combination and silver or silver and bismuth is used as the photocathode constituent substance. In addition, cesium and oxygen may be used as the photocathode activating substance 3 and gallium arsenide may be used as the photocathode constituent substance.
【００３０】図２は、本発明の第２実施例に係る光陰極
を用いた電子銃の構成図である。本実施例と第１実施例
とが異なる点は、多孔質板４の外側表面に設けた光陰極
構成物質の薄膜５と、多孔質板４との間に、光陰極面６
が形成されるようにしたところである。この様に、光陰
極面６を真空中に露出しない構成とすることで、真空容
器２内の残留ガスの影響は受けないようにすることがで
きる。FIG. 2 is a block diagram of an electron gun using a photocathode according to the second embodiment of the present invention. The difference between this embodiment and the first embodiment is that the photocathode surface 6 is provided between the porous plate 4 and the thin film 5 of the photocathode constituent substance provided on the outer surface of the porous plate 4.
Has just been formed. In this way, by making the photocathode surface 6 not exposed to the vacuum, it is possible to prevent the residual gas in the vacuum container 2 from being affected.
【００３１】照射光源３３から出射した照射光７を、真
空窓３５，反射鏡３４を用い、薄膜５を通して光陰極面
６に照射すると、光陰極面６から電子８が発生される。
この電子８を、絶縁体１１と電源１２によって与えられ
た電場によって加速し、図示しない加速器に入射する。When the irradiation light 7 emitted from the irradiation light source 33 is applied to the photocathode surface 6 through the thin film 5 using the vacuum window 35 and the reflecting mirror 34, electrons 8 are generated from the photocathode surface 6.
The electrons 8 are accelerated by an electric field provided by the insulator 11 and the power source 12 and are incident on an accelerator (not shown).
【００３２】かかる構成の光陰極では、電子８を加速す
る電場は、薄膜５を通して光陰極面６に達し、照射光７
によって発生した電子８を真空中に引き出し管３２内に
導入して加速することができる。密閉容器１内の光陰極
活性化物質３が減少した場合、密閉容器１に取り付けた
パイプ９を通して外部の光陰極活性化物質源１０より光
陰極活性化物質３を供給することで、光陰極の使用を中
断することなく連続的に安定して使用することができる
ことは第１実施例と同様である。In the photocathode having such a structure, the electric field for accelerating the electrons 8 reaches the photocathode surface 6 through the thin film 5, and the irradiation light 7
The electrons 8 generated by can be introduced into the extraction tube 32 in a vacuum and accelerated. When the photocathode activating substance 3 in the closed container 1 is reduced, the photocathode activating substance 3 is supplied from an external photocathode activating substance source 10 through a pipe 9 attached to the closed container 1, so that the photocathode It is similar to the first embodiment that it can be continuously and stably used without interruption.
【００３３】図３は、本発明の第３実施例に係る光陰極
を用いた電子銃の構成図である。本実施例の光陰極で
は、光陰極活性化物質供給源１０を密閉容器１内部に配
設し、光陰極活性化物質３が常に多孔質板４に供給さ
れ、光陰極面の連続使用を可能にしたものである。FIG. 3 is a block diagram of an electron gun using a photocathode according to a third embodiment of the present invention. In the photocathode of this embodiment, the photocathode activating substance supply source 10 is disposed inside the closed container 1, and the photocathode activating substance 3 is constantly supplied to the porous plate 4 so that the photocathode surface can be continuously used. It is the one.
【００３４】この第３実施例においては、光陰極活性化
物質３を発生させる光陰極活性化物質供給源１０とし
て、セシウム，カリウム，ナトリウム，ルビンシウム，
リチウムなどのアルカリ金属を単独または複数組み合わ
せて封じ込めた金属容器とそれを加熱するヒータを使用
する。光陰極活性化物質３を拡散させる多孔質板４とし
ては、光陰極活性化物質３を薄膜５まで透過することが
可能な空隙を持つタングステンを用いる。In the third embodiment, as the photocathode activating substance supply source 10 for generating the photocathode activating substance 3, cesium, potassium, sodium, rubincium,
A metal container in which alkali metals such as lithium are contained alone or in combination and a heater for heating the metal container is used. As the porous plate 4 for diffusing the photocathode activating substance 3, tungsten having a void that allows the photocathode activating substance 3 to penetrate to the thin film 5 is used.
【００３５】また、光陰極活性化物質３を発生させる光
陰極活性化物質供給源１０として、セシウム，カリウ
ム，ナトリウム，ルビンシウム，リチウムなどのアルカ
リ金属の重クロム酸化合物を単独または複数組み合わせ
たものとチタンなどの還元剤を封じ込めた金属容器およ
びそれを加熱するヒータで構成することもできる。この
とき、薄膜５を形成する光陰極構成物質としてはアンチ
モンを使用する。Further, as the photocathode activating substance supply source 10 for generating the photocathode activating substance 3, an alkali metal dichromate compound such as cesium, potassium, sodium, rubincium, lithium or the like is used alone or in combination. It can also be composed of a metal container containing a reducing agent such as titanium and a heater for heating it. At this time, antimony is used as a photocathode constituent material for forming the thin film 5.
【００３６】図４は、本発明の第４実施例に係る光陰極
の構成図である。本実施例の光陰極では、光陰極活性化
物質を含浸させた拡散物質３６と、それを加熱するヒ−
タ３７を備え、ヒ−タ３７により拡散物質３６を加熱
し、この拡散物質３６に含浸させてある光陰極活性化物
質を拡散させ光陰極を形成させる。かかる構成により第
１実施例と同様の効果を実現できる。FIG. 4 is a block diagram of a photocathode according to the fourth embodiment of the present invention. In the photocathode of this embodiment, the diffusing substance 36 impregnated with the photocathode activating substance and the heater for heating it are used.
The diffusion material 36 is heated by the heater 37, and the photocathode activating substance impregnated in the diffusion material 36 is diffused to form a photocathode. With this configuration, the same effect as that of the first embodiment can be realized.
【００３７】この第４実施例においては、拡散物質３６
として、タングステン，タンタル，モリブデン，セラミ
ックスなどの多孔質板を用いる。In the fourth embodiment, the diffusion material 36
As the material, a porous plate made of tungsten, tantalum, molybdenum, ceramics or the like is used.
【００３８】また、含浸させる光陰極活性化物質とし
て、セシウム，カリウム，ナトリウム，ルビンシウム，
リチウムなどのアルカリ金属を単独または複数組み合わ
せて使用する。このとき、光陰極構成物質５としてはア
ンチモンを使用する。As the photocathode activating substance to be impregnated, cesium, potassium, sodium, rubincium,
An alkali metal such as lithium is used alone or in combination. At this time, antimony is used as the photocathode constituent substance 5.
【００３９】また、含浸させる光陰極活性化物質とし
て、セシウム，カリウム，ナトリウム，ルビンシウム，
リチウムなどのアルカリ金属を単独または複数組み合わ
せて使用する。このとき、光陰極構成物質５としては
銀、または、銀とビスマスを使用する。As the photocathode activating substance to be impregnated, cesium, potassium, sodium, rubincium,
An alkali metal such as lithium is used alone or in combination. At this time, silver or silver and bismuth is used as the photocathode constituent substance 5.
【００４０】また、含浸させる光陰極活性化物質とし
て、セシウム，カリウム，ナトリウム，ルビンシウム，
リチウムなどのアルカリ金属の重クロム酸化合物を単独
または複数組み合わせたものを用いることもできる。こ
のとき、光陰極構成物質５としてはアンチモンを使用す
る。As the photocathode activating substance to be impregnated, cesium, potassium, sodium, rubincium,
An alkali metal dichromate compound such as lithium may be used alone or in combination. At this time, antimony is used as the photocathode constituent substance 5.
【００４１】また、含浸させる光陰極活性化物質とし
て、セシウム，カリウム，ナトリウム，ルビンシウム，
リチウムなどのアルカリ金属の重クロム酸化合物を単独
または複数組み合わせたものを用いることもできる。こ
のとき、光陰極構成物質５としては銀、または、銀とビ
スマスを使用する。As the photocathode activating substance to be impregnated, cesium, potassium, sodium, rubincium,
An alkali metal dichromate compound such as lithium may be used alone or in combination. At this time, silver or silver and bismuth is used as the photocathode constituent substance 5.
【００４２】また、第４実施例において、拡散物質３６
としてアルミニウム・リチウム合金などの合金を用いる
こともできる。この場合、拡散物質３６をヒータ３７で
加熱することにより、光陰極活性化物質であるリチウム
を拡散物質３６と光陰極面６との境界に析出させ、光陰
極活性化物質を補給することができる。Further, in the fourth embodiment, the diffusion material 36
Alternatively, an alloy such as an aluminum / lithium alloy can be used. In this case, by heating the diffusion material 36 with the heater 37, lithium, which is the photocathode activating substance, can be deposited on the boundary between the diffusion substance 36 and the photocathode surface 6 to replenish the photocathode activating substance. .
【００４３】図５は、本発明の第５実施例に係る光陰極
を用いた高周波電子銃の構成図である。図５おいて、照
射光源３３から出射した照射光７により発生した電子８
は、高周波電場により加速され、図５の右側に出射され
る。この加速用の高周波電場は、導波管１５から加速空
胴１４に供給された高周波電力により発生される。FIG. 5 is a block diagram of a high frequency electron gun using a photocathode according to a fifth embodiment of the present invention. In FIG. 5, electrons 8 generated by the irradiation light 7 emitted from the irradiation light source 33.
Are accelerated by the high frequency electric field and emitted to the right side of FIG. The high frequency electric field for acceleration is generated by the high frequency power supplied from the waveguide 15 to the acceleration cavity 14.
【００４４】図６は、本発明の第６実施例に係る光陰極
を用いた線形加速器の構成図である。図６において、光
陰極を用いた電子銃１６より発生した電子は、加速管１
７によって高エネルギに加速され、加速管１７から出射
される。FIG. 6 is a block diagram of a linear accelerator using a photocathode according to a sixth embodiment of the present invention. In FIG. 6, the electrons generated from the electron gun 16 using the photocathode are shown in FIG.
It is accelerated to high energy by 7 and emitted from the accelerating tube 17.
【００４５】図７は、本発明の第７実施例にかかる光陰
極を用いた電子銃の構成図である。図７において、密閉
容器１の端面には細孔４０が複数個穿設されている。容
器１内には光陰極活性化物質３が封入されており、且
つ、この容器１内に外部の光陰極活性化物質源１０から
光陰極活性化物質３を供給するパイプ９が接続されてい
る。密閉容器１の端面には光陰極面が形成される。密閉
容器１の端面には開けられた細孔４０より光陰極活性化
物質３が光陰極面６に連続的に供給されるため、光陰極
は劣化しない。FIG. 7 is a block diagram of an electron gun using a photocathode according to the seventh embodiment of the present invention. In FIG. 7, a plurality of pores 40 are formed on the end surface of the closed container 1. A photocathode activating substance 3 is enclosed in the container 1, and a pipe 9 for supplying the photocathode activating substance 3 from an external photocathode activating substance source 10 is connected to the container 1. . A photocathode surface is formed on the end surface of the closed container 1. Since the photocathode activating substance 3 is continuously supplied to the photocathode surface 6 through the pores 40 opened at the end face of the closed container 1, the photocathode is not deteriorated.
【００４６】この第７実施例においては、光陰極活性化
物質３として、セシウム，カリウム，ナトリウム，ルビ
ンシウム，リチウムなどのアルカリ金属を単独または複
数組み合わせて使用する。また、光陰極面６を形成する
物質としては、アンチモンを用いる。In the seventh embodiment, as the photocathode activating substance 3, alkali metals such as cesium, potassium, sodium, rubinsium and lithium are used alone or in combination. In addition, antimony is used as the material forming the photocathode surface 6.
【００４７】また、光陰極活性化物質３として、セシウ
ム及び酸素を使用し、光陰極面６を形成する物質として
砒化ガリウムを用いる。Further, cesium and oxygen are used as the photocathode activating substance 3, and gallium arsenide is used as the substance forming the photocathode surface 6.
【００４８】また、光陰極活性化物質３としては、セシ
ウム，カリウム，ナトリウム，ルビンシウム，リチウム
などのアルカリ金属及び酸素を単独または複数組み合わ
せて使用し、光陰極面６を形成する物質としては銀、ま
たは、銀及びビスマスを使用する場合も考えられる。As the photocathode activating substance 3, alkali metal such as cesium, potassium, sodium, rubincium, lithium and oxygen are used singly or in combination, and as the substance forming the photocathode surface 6, silver is used. Alternatively, silver and bismuth may be used.
【００４９】尚、本発明による光陰極を用いた電子銃
は、加速器に使用できるだけでなく、ＣＲＴ等の表示装
置や電子顕微鏡等、電子銃を使用する機器一般に使用で
きることはいうまでもない。Needless to say, the electron gun using the photocathode according to the present invention can be used not only as an accelerator but also as a general display device such as a CRT or an electron microscope, or any other device using an electron gun.
【００５０】[0050]
【発明の効果】本発明によれば、光陰極面から失われる
光陰極活性化物質を補給することにより光陰極の寿命を
延ばすことができるので、光陰極の長時間の連続使用を
可能にする効果がある。According to the present invention, the life of the photocathode can be extended by replenishing the photocathode activating substance lost from the photocathode surface, so that the photocathode can be continuously used for a long time. effective.
【図１】本発明の第１実施例に係る光陰極を用いた電子
銃の構成図である。FIG. 1 is a configuration diagram of an electron gun using a photocathode according to a first embodiment of the present invention.
【図２】本発明の第２実施例に係る光陰極を用いた電子
銃の構成図である。FIG. 2 is a configuration diagram of an electron gun using a photocathode according to a second embodiment of the present invention.
【図３】本発明の第３実施例に係る光陰極を用いた電子
銃の構成図である。FIG. 3 is a configuration diagram of an electron gun using a photocathode according to a third embodiment of the present invention.
【図４】本発明の第４実施例に係る光陰極を用いた電子
銃の構成図である。FIG. 4 is a configuration diagram of an electron gun using a photocathode according to a fourth embodiment of the present invention.
【図５】本発明の第５実施例に係る光陰極を用いた高周
波電子銃の構成図である。FIG. 5 is a configuration diagram of a high frequency electron gun using a photocathode according to a fifth embodiment of the present invention.
【図６】本発明の第６実施例に係る光陰極を用いた線形
加速器の構成図である。FIG. 6 is a configuration diagram of a linear accelerator using a photocathode according to a sixth embodiment of the present invention.
【図７】本発明の第７実施例に係る光陰極を用いた電子
銃の構成図である。FIG. 7 is a configuration diagram of an electron gun using a photocathode according to a seventh embodiment of the present invention.
【図８】従来の技術による光陰極の説明図である。FIG. 8 is an illustration of a conventional photocathode.
１…密閉容器、２…電子銃部真空容器、３…光陰極活性
化物質、４…多孔質板、５…光陰極構成物質の薄膜、６
…光陰極面、７…照射光、８…電子、９…パイプ、１０
…光陰極活性化物質源、１１…絶縁体、１２…電源、１
３…真空容器、１４…加速空胴、１５…導波管、１６…
光陰極を用いた電子銃、１７…加速管又は加速空胴、１
９…ゲートバルブ、２０…金属基板または金属棒、３０
…基板、３１…含浸させた物質の蒸気、３２…管、３３
…照射光源、３４…反射鏡、３５…真空窓、３６…光陰
極活性化物質を含浸させた物質、３７…ヒ−タ、４０…
細孔。DESCRIPTION OF SYMBOLS 1 ... Airtight container, 2 ... Electron gun part vacuum container, 3 ... Photocathode activating substance, 4 ... Porous plate, 5 ... Thin film of photocathode constituent substance, 6
... Photocathode surface, 7 ... Irradiation light, 8 ... Electron, 9 ... Pipe, 10
... Source of photocathode activating substance, 11 ... Insulator, 12 ... Power source, 1
3 ... Vacuum container, 14 ... Accelerating cavity, 15 ... Waveguide, 16 ...
Electron gun using photocathode, 17 ... Accelerating tube or cavity, 1
9 ... Gate valve, 20 ... Metal substrate or metal rod, 30
... Substrate, 31 ... Vapor of impregnated substance, 32 ... Tube, 33
... Irradiation light source, 34 ... Reflecting mirror, 35 ... Vacuum window, 36 ... Substance impregnated with photocathode activating substance, 37 ... Heater, 40 ...
pore.
Claims (12)
拡散物質で閉塞され、内部に光陰極活性化物質が封入さ
れ、前記拡散物質の外側表面に光陰極面が設けられる容
器を備えることを特徴とする光陰極。1. A container is provided, the opening surface of which is closed by a diffusing substance that diffuses the photocathode activating substance, the photocathode activating substance is enclosed inside, and the photocathode face is provided on the outer surface of the diffusing substance. A photocathode characterized by.
拡散物質で閉塞され、内部に光陰極活性化物質が封入さ
れ、前記拡散物質の外側に光陰極構成物質でなる薄膜を
備え、該薄膜と前記拡散物質との境界面に光陰極面が形
成される構成の容器を備えることを特徴とする光陰極。2. A thin film comprising a photocathode activating substance, the opening surface of which is closed by a diffusing substance for diffusing the photocathode activating substance, the photocathode activating substance being encapsulated inside the photocathode activating substance, A photocathode comprising a container having a structure in which a photocathode surface is formed on an interface between a thin film and the diffusion material.
拡散物質は前記光陰極活性化物質を含浸すると共に、該
拡散物質を加熱する加熱手段を備えたことを特徴とする
光陰極。3. The photocathode according to claim 1 or 2, wherein the diffusing substance is impregnated with the photocathode activating substance, and a heating means for heating the diffusing substance is provided.
極活性化物質を封入した容器と、 前記多孔質板の外側に接し、該多孔質板との境界面に光
陰極面を有すると共に、光を透過する光陰極構成物質と
を備えたことを特徴とする光陰極。4. A container in which an opening surface is closed by a porous plate and a photocathode activating substance is enclosed inside, and a photocathode surface is in contact with the outside of the porous plate and is a boundary surface with the porous plate. And a photocathode constituent substance that transmits light.
て、前記光陰極構成物質は膜形状であることを特徴とす
る光陰極。5. The photocathode according to claim 2, wherein the photocathode constituent substance has a film shape.
て、外部から前記容器内に光陰極活性化物質を供給する
手段を備えたことを特徴とする光陰極。6. The photocathode according to claim 1, further comprising means for supplying a photocathode activating substance into the container from the outside.
て、前記容器内に光陰極活性化物質供給源を備えたこと
を特徴とする光陰極。7. The photocathode according to claim 1, wherein a photocathode activating substance supply source is provided in the container.
浸した拡散物質を備え、該光陰極面の他側に光を透過す
る光陰極構成物質を備えると共に、前記拡散物質を加熱
する加熱手段を備えたことを特徴とする光陰極。8. A diffusion material impregnated with a photocathode activating substance is provided on one side of the photocathode surface, and a photocathode constituent substance that transmits light is provided on the other side of the photocathode surface, and the diffusion material is heated. A photocathode comprising a heating means for controlling the photocathode.
合金で構成される拡散物質を備え、該光陰極面の他側に
光を透過する光陰極構成物質を備えると共に、前記拡散
物質を加熱する加熱手段を備えたことを特徴とする光陰
極。9. A photocathode surface is provided with a diffusing substance composed of an alloy with a photocathode activating substance on one side, and a photocathode constituent substance that transmits light is provided on the other side of the photocathode face. A photocathode comprising a heating means for heating a diffusion material.
拡散物質は、前記加熱手段で加熱されることにより前記
光陰極活性化物質を前記光陰極面に拡散させることを特
徴とする光陰極。10. The photocathode according to claim 8 or 9, wherein the diffusion substance is heated by the heating means to diffuse the photocathode activating substance onto the photocathode surface.
記載の光陰極と、前記光陰極面に光を照射する光照射手
段と、該光照射により前記光陰極面から放出される電子
を加速する電場を印加する手段とを備えたことを特徴と
する電子銃。11. A photocathode according to any one of claims 1 to 10, a light irradiation means for irradiating the photocathode surface with light, and an electron emitted from the photocathode surface by the light irradiation. An electron gun comprising means for applying an accelerating electric field.
出射された電子を所要エネルギまで加速する加速管とを
備えたことを特徴とする加速器。12. An accelerator comprising: the electron gun according to claim 11; and an accelerating tube for accelerating electrons emitted from the electron gun to required energy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05209400A JP3119285B2 (en) | 1993-08-24 | 1993-08-24 | Photocathode, electron gun and accelerator using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05209400A JP3119285B2 (en) | 1993-08-24 | 1993-08-24 | Photocathode, electron gun and accelerator using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0765707A true JPH0765707A (en) | 1995-03-10 |
| JP3119285B2 JP3119285B2 (en) | 2000-12-18 |
Family
ID=16572271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05209400A Expired - Fee Related JP3119285B2 (en) | 1993-08-24 | 1993-08-24 | Photocathode, electron gun and accelerator using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3119285B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007080697A (en) * | 2005-09-14 | 2007-03-29 | Japan Synchrotron Radiation Research Inst | Photoelectric transfer element and electron beam generator using it |
| CN102187422A (en) * | 2009-08-21 | 2011-09-14 | 浦项工科大学校产学协力团 | Electron beam generating apparatus |
| KR101364104B1 (en) * | 2012-08-21 | 2014-02-20 | 포항공과대학교 산학협력단 | Apparatus and method for genarating electron beam |
| US9224571B2 (en) | 2010-09-27 | 2015-12-29 | Inter-University Research Institute Corporation | Photocathode high-frequency electron-gun cavity apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5808021B2 (en) * | 2013-07-16 | 2015-11-10 | 国立大学法人名古屋大学 | Activation container and kit used for electron affinity reduction processing apparatus, electron affinity reduction processing apparatus including the kit, photocathode electron beam source, electron gun including photocathode electron beam source, free electron laser accelerator, transmission Electron microscope, scanning electron microscope, electron holography microscope, electron beam drawing apparatus, electron beam diffractometer and electron beam inspection apparatus |
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1993
- 1993-08-24 JP JP05209400A patent/JP3119285B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007080697A (en) * | 2005-09-14 | 2007-03-29 | Japan Synchrotron Radiation Research Inst | Photoelectric transfer element and electron beam generator using it |
| CN102187422A (en) * | 2009-08-21 | 2011-09-14 | 浦项工科大学校产学协力团 | Electron beam generating apparatus |
| JP2012506122A (en) * | 2009-08-21 | 2012-03-08 | ポステック アカデミー−インダストリー ファウンデーション | Electron beam generator |
| US8736169B2 (en) | 2009-08-21 | 2014-05-27 | Postech Academy-Industry Foundation | Electron beam generating apparatus |
| US9224571B2 (en) | 2010-09-27 | 2015-12-29 | Inter-University Research Institute Corporation | Photocathode high-frequency electron-gun cavity apparatus |
| KR101364104B1 (en) * | 2012-08-21 | 2014-02-20 | 포항공과대학교 산학협력단 | Apparatus and method for genarating electron beam |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3119285B2 (en) | 2000-12-18 |
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