JPH0763607A - Foreign matter detection sensor - Google Patents
Foreign matter detection sensorInfo
- Publication number
- JPH0763607A JPH0763607A JP20975593A JP20975593A JPH0763607A JP H0763607 A JPH0763607 A JP H0763607A JP 20975593 A JP20975593 A JP 20975593A JP 20975593 A JP20975593 A JP 20975593A JP H0763607 A JPH0763607 A JP H0763607A
- Authority
- JP
- Japan
- Prior art keywords
- light
- foreign matter
- light guide
- photo
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Light Guides In General And Applications Therefor (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、光学的な観測手段によ
って物体を検知する異物検知センサに関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a foreign matter detection sensor for detecting an object by an optical observation means.
【0002】[0002]
【従来の技術】一般に、光学的に異物等の物体(被観察
物)を観測する異物検知センサは、複数のレンズを通し
てCCD(Charged Coupled Device)や光電管等の撮像
素子の表面に物体の像を結像させ、この結像された画像
を撮像素子で電気的な信号として取り出す。また、ライ
ンセンサと称されるものは、このような撮像素子を一次
元に並列させたものとして解釈できる。2. Description of the Related Art Generally, a foreign matter detection sensor for optically observing an object (observed object) such as a foreign matter forms an image of the object on the surface of an image pickup device such as a CCD (Charged Coupled Device) or a photoelectric tube through a plurality of lenses. An image is formed, and the formed image is taken out as an electrical signal by the image pickup device. Moreover, what is called a line sensor can be interpreted as a one-dimensional array of such image pickup devices.
【0003】このようなラインセンサを用いて、例え
ば、液体が満たされたパイプの内部を通過する異物を検
出する手段としては、このパイプに透明な窓を設け、こ
の窓の外部から光を照射してパイプ内の異物の存在を検
出する方法が考えられる。ところが、かかる手段では、
ラインセンサのレンズの被写界深度の大小により、パイ
プの中を通る異物にレンズの焦点が合わず、小さな異物
をパイプの全断面積にわたって検出することは実用上困
難であった。このため、レンズに絞りを設け、これを絞
り込むことで、被写界深度を大きく設定していた。Using such a line sensor, for example, as a means for detecting foreign matter passing through the inside of a pipe filled with liquid, a transparent window is provided in this pipe, and light is emitted from the outside of this window. Then, a method of detecting the presence of foreign matter in the pipe can be considered. However, with such means,
Due to the depth of field of the lens of the line sensor, the lens is not focused on the foreign matter passing through the pipe, and it is practically difficult to detect the small foreign matter over the entire cross-sectional area of the pipe. For this reason, the lens is provided with a diaphragm, and by narrowing it down, the depth of field is set large.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、レンズ
の絞りを絞り込んで小さな異物の存在を検出しようとす
る場合にあっては、最も解像度の上がる焦点の前後と、
そこから離れた解像度の下がる部分での検出可能な最小
異物の大きさが変化する問題があった。このため、レン
ズの焦点から離れた部分では、小さな異物を検出するの
が困難であった。そして、異物の大きさを正確に検出す
るためには、前述の理由から、焦点距離を長く設定しな
ければならず、ラインセンサが大型になってしまうとい
う問題があった。However, when trying to detect the presence of a small foreign substance by narrowing down the diaphragm of the lens, before and after the focus with the highest resolution,
There is a problem that the size of the smallest detectable foreign matter changes in the portion where the resolution is lowered away from that. For this reason, it is difficult to detect a small foreign matter in the portion away from the focal point of the lens. Further, in order to accurately detect the size of the foreign matter, the focal length must be set long for the above-mentioned reason, and there is a problem that the line sensor becomes large.
【0005】本発明は前記課題を有効に解決するもの
で、被写界深度を大きく設定でき、かつ、小さな異物に
あっても検出可能な異物検知センサを提供することを目
的とする。The present invention effectively solves the above problems, and an object of the present invention is to provide a foreign matter detection sensor capable of setting a large depth of field and detecting even a small foreign matter.
【0006】[0006]
【課題を解決するための手段】本発明の異物検知センサ
は、先端に光の導入口を有する細長い複数の導光路が形
成された導光部と、この導光部の後端側に設けられて前
記導光路の一本一本を介して入射される光の強弱を検出
する受光部とを具備してなる。前記導光路に、この導光
路の先端から導入した光を前記受光部に結像させるレン
ズを設けてもよい。A foreign matter detection sensor of the present invention is provided with a light guide portion having a plurality of elongated light guide paths each having a light introduction port at its tip and a rear end side of the light guide portion. And a light receiving unit for detecting the intensity of light incident through each of the light guide paths. The light guide path may be provided with a lens for focusing the light introduced from the tip of the light guide path on the light receiving section.
【0007】[0007]
【作用】本発明の異物検知センサは、複数設けられた導
光路毎に光を導入し、各導光路の光を受光部で別個に検
知するので、導光路の大きさに対応した異物を確実に検
知できる。また、異物が移動する場合は、その移動状態
に沿って各導光路を通過する光の強弱が生じるので、こ
の光の強弱をとらえることで異物の移動をとらえること
ができる。また、導光路にレンズを設ければ、導光路の
先端の斜め外方からの光の導入を制限するので、斜め外
方からの光を検出してしまうことがなくなり、検出感度
が向上する。In the foreign matter detection sensor of the present invention, light is introduced into each of the plurality of light guide paths, and the light of each light guide path is detected separately by the light receiving section, so that foreign matter corresponding to the size of the light guide path is reliably detected. Can be detected. Further, when the foreign matter moves, the intensity of light passing through each light guide path is generated along the movement state, and therefore the movement of the foreign matter can be captured by capturing the intensity of this light. Further, when the lens is provided in the light guide path, the introduction of the light from the oblique outer side of the tip of the light guide path is restricted, so that the light from the oblique outer side is not detected and the detection sensitivity is improved.
【0008】[0008]
【実施例】以下、本発明の異物検知センサの第一実施例
について、図1ないし図2を参照しながら説明する。図
1に示すように、符号1は異物検知センサであり、この
異物検知センサ1は、並列状態に束ねられた複数本の筒
状体2Aからなる導光部2と、この導光部2の後端部に
設けられた受光部2と、この受光部2に接続されたアン
プ4と、このアンプ4の結果を記録させる記録計5とを
有し、導光部2の内部空間が導光路2bを形成してい
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the foreign matter detecting sensor of the present invention will be described below with reference to FIGS. As shown in FIG. 1, reference numeral 1 denotes a foreign matter detection sensor. The foreign matter detection sensor 1 includes a light guide section 2 including a plurality of cylindrical bodies 2A bundled in a parallel state, and the light guide section 2. The light receiving unit 2 provided at the rear end portion, the amplifier 4 connected to the light receiving unit 2, and the recorder 5 for recording the result of the amplifier 4 are provided, and the internal space of the light guiding unit 2 is a light guide path. 2b is formed.
【0009】なお、導光部2は、筒状体2Aの集合体を
用いたが、一つの塊状の物体にエッチングや機械加工で
多数の孔をあけて各孔を導光路としたものを用いてもよ
い。導光部2の各筒状体2Aの内周面は、反射の少ない
材料あるいは形状で構成されている。この導光部2に
は、導光路2bに光を導入する導入口2aが先端部に形
成されるとともに、後端部に、各導光部2から出される
光を検知する受光部3が取り付けられている。Although the light guide section 2 is an assembly of cylindrical bodies 2A, one in which a large number of holes are formed by etching or machining to form a light guide path for each hole is used. May be. The inner peripheral surface of each cylindrical body 2A of the light guide section 2 is made of a material or a shape with less reflection. An introduction port 2a for introducing light to the light guide path 2b is formed at the front end portion of the light guide portion 2, and a light receiving portion 3 for detecting the light emitted from each light guide portion 2 is attached at the rear end portion thereof. Has been.
【0010】受光部3は、CCD等の撮像素子からな
り、導光部2の各導光路2bの一本一本を介して入射さ
れる光の強弱を検知し、この光を電気信号に変換し、こ
の電気信号をアンプ4に送信する。このアンプ4は、受
光部3で得られた電気信号を増幅させ、この増幅した電
気信号を記録計5に送信する。この記録計5は、受光部
3で得られた電気信号を記録する。The light receiving section 3 is composed of an image pickup device such as a CCD, detects the intensity of light incident through each light guide path 2b of the light guide section 2, and converts this light into an electric signal. Then, the electric signal is transmitted to the amplifier 4. The amplifier 4 amplifies the electric signal obtained by the light receiving unit 3 and transmits the amplified electric signal to the recorder 5. The recorder 5 records the electric signal obtained by the light receiving unit 3.
【0011】このような異物検知センサ1の各導光部2
の検知原理について、図2を用いて説明する。図2に示
すように、光源Aからの光は、筒状体2Aの中心軸延長
線上に配置されているため、導光路2bを通って受光部
3で検知されるが、光源Bからの光は、筒状体2Aの中
心軸の延長線上に配置されていないため、導光路2bを
通らず、受光部3で検知されない。このような筒状体2
Aを複数並列状態に束ねることで、各筒状体2A毎に通
過する光を受光部3で検出する異物検知センサ1が構成
される。Each light guide portion 2 of such a foreign matter detection sensor 1
The detection principle of will be described with reference to FIG. As shown in FIG. 2, since the light from the light source A is disposed on the extension line of the central axis of the cylindrical body 2A, the light from the light source B passes through the light guide path 2b and is detected. Is not arranged on the extension line of the central axis of the cylindrical body 2A, it does not pass through the light guide path 2b and is not detected by the light receiving section 3. Such a tubular body 2
By bundling a plurality of A's in a parallel state, the foreign matter detection sensor 1 for detecting the light passing through each of the tubular bodies 2A by the light receiving unit 3 is configured.
【0012】次に、この異物検知センサ1を用いて図1
に示すような水槽10内の異物Dを検出する場合につい
て説明する。図1に示すように、導光部2の導入口2a
の前方に水槽10を設置し、この水槽10内に異物Dが
存在するときは、異物検知センサ1の設置位置に対して
反対側から光を照射し、この光の散乱光を検知する。す
なわち、異物Dによって光が遮られた状態の領域と異物
Dによって光が遮られていない状態で水槽10を通過す
る光とを各筒状体2A毎に検知する。Next, using this foreign matter detection sensor 1, as shown in FIG.
The case of detecting the foreign matter D in the water tank 10 as shown in FIG. As shown in FIG. 1, the introduction port 2 a of the light guide unit 2
When the foreign matter D exists in the water tank 10 in front of the water tank 10, light is emitted from the opposite side to the installation position of the foreign matter detection sensor 1 and the scattered light of this light is detected. That is, the region where the light is blocked by the foreign matter D and the light passing through the water tank 10 in the state where the light is not blocked by the foreign matter D are detected for each tubular body 2A.
【0013】ここで、筒状体2Aの長さに対して径が十
分小さく形成されているので、筒状体2Aの導入口2a
から異物Dが離れた位置に設置されている場合にあって
も、各筒状体2Aの中心軸の延長線上に存在する異物D
が確実に検出される。したがって、複数並列状態に束ね
られた各筒状体2A毎に光を通過させることで、異物D
を二次元的に検知する。この検知結果を画像処理し、異
物Dの大きさや数を計数する。Here, since the diameter is formed sufficiently smaller than the length of the tubular body 2A, the inlet 2a of the tubular body 2A is formed.
Even if the foreign matter D is installed at a position away from the foreign matter D, the foreign matter D existing on the extension line of the central axis of each tubular body 2A
Is reliably detected. Therefore, by passing light through each of the cylindrical bodies 2A that are bundled in a plurality of parallel states, the foreign matter D
Is detected two-dimensionally. Image processing is performed on the detection result, and the size and number of the foreign matter D are counted.
【0014】このときに、導光部2から離れた部分の解
像力は劣るので、導光路2bを十分に長く形成するのが
好ましい。導光路2bを十分長く形成すれば、高分解能
を有する異物検知センサ1が得られる。また、パイプ中
の流路から異物を検知するときは、このパイプの流路に
対して導光部2を直角方向に設置し、パイプの断面中を
通過する異物の数を連続的に観察してもよい。そして、
パイプ内の流路に対して異物検知センサ1を平行に設置
し、この異物検知センサ1の受光部3をパイプの軸を中
心に回転させて異物を検知してもよい。At this time, since the resolving power of the portion away from the light guide portion 2 is poor, it is preferable to form the light guide path 2b sufficiently long. If the light guide path 2b is formed sufficiently long, the foreign matter detection sensor 1 having high resolution can be obtained. When detecting a foreign substance from the flow passage in the pipe, the light guide unit 2 is installed at a right angle to the flow passage of the pipe, and the number of foreign substances passing through the cross section of the pipe is continuously observed. May be. And
The foreign matter detection sensor 1 may be installed parallel to the flow path in the pipe, and the light receiving unit 3 of the foreign matter detection sensor 1 may be rotated about the axis of the pipe to detect the foreign matter.
【0015】このような異物検知センサ1によれば、先
端に光の導入口2aを有する細長い複数の導光路2bが
形成された導光部2と、この導光部2の後端側に設けら
れて前記導光路2bの一本一本を介して入射される光の
強弱を検出する受光部3とを具備するので、各導光路2
b毎に光を導入口2aから通過させて受光部3で検出で
きる。このため、導光路2bの中心軸の延長線上にない
領域の光は受光部3に結像されず、導光路2bの中心軸
の延長線上の領域だけを受光部3に結像でき、被写界深
度に影響されずに、物体を検知することができる。した
がって、レンズの絞り等を不要にでき、受光部の解像度
を維持でき、レンズの絞りを不要にできるから、受光部
3の解像度を維持でき、また、焦点距離を長く設定する
必要性をなくすことができ、異物検知センサの大型化を
防止することができる。According to such a foreign matter detection sensor 1, a light guide section 2 having a plurality of elongated light guide paths 2b each having a light introduction port 2a at its tip and a rear end side of the light guide section 2 are provided. Each of the light guide paths 2b is provided with a light receiving section 3 for detecting the intensity of light incident through each of the light guide paths 2b.
Light can be passed through the inlet 2a for each b and detected by the light receiving unit 3. Therefore, light in a region that is not on the extension line of the central axis of the light guide path 2b is not imaged on the light receiving section 3, and only the region on the extension line of the center axis of the light guide path 2b can be imaged on the light receiving section 3, and Objects can be detected without being affected by the depth of field. Therefore, the aperture of the lens and the like can be eliminated, the resolution of the light receiving portion can be maintained, and the aperture of the lens can be eliminated, so that the resolution of the light receiving portion 3 can be maintained and the need to set a long focal length is eliminated. Therefore, it is possible to prevent the foreign matter detection sensor from increasing in size.
【0016】〈第二実施例〉本発明の異物検知センサの
第二実施例について、図3を参照しながら説明する。図
3に示すように、第二実施例の異物検知センサは、導光
部2の導入口2aにレンズ7が設置され、他の構成は第
一実施例の異物検知センサと同様に構成されている。レ
ンズ7は、導光部2の全体の長さlに対して、受光部3
に結像させる焦点距離に設置されている。<Second Embodiment> A second embodiment of the foreign matter detecting sensor of the present invention will be described with reference to FIG. As shown in FIG. 3, in the foreign matter detection sensor of the second embodiment, a lens 7 is installed in the introduction port 2a of the light guide unit 2, and other configurations are the same as those of the foreign matter detection sensor of the first embodiment. There is. The lens 7 corresponds to the entire length 1 of the light guide section 2 with respect to the light receiving section 3
It is installed at the focal length for imaging.
【0017】このように導光部2の導光路2b内に、こ
の導光路2bの先端から導入した光を受光部3に結像さ
せるレンズ7を設けることで、このレンズ7の中心軸に
延長線上にない領域は受光部3に結像されず、各レンズ
7の中心軸の延長線上から導入される光を受光部3に結
像できる。このため、レンズ7で受光部3に到達する光
を分解するから、異物検知センサの分解能を向上させる
ことができる。そして、導光部2の導入口2aにレンズ
7を設け、このレンズ7で受光部3に光を結像させるの
で、筒状体2Aの中心軸に対して斜め方向からの光を検
出しなくなる。As described above, by providing the lens 7 in the light guide 2b of the light guide 2 for focusing the light introduced from the tip of the light guide 2b on the light receiver 3, the lens 7 is extended to the central axis of the lens 7. Areas that are not on the line are not imaged on the light receiving unit 3, and light introduced from the extension line of the central axis of each lens 7 can be imaged on the light receiving unit 3. Therefore, the light reaching the light receiving unit 3 is decomposed by the lens 7, so that the resolution of the foreign matter detection sensor can be improved. Then, a lens 7 is provided at the inlet 2a of the light guide portion 2 and light is imaged on the light receiving portion 3 by this lens 7, so that light from an oblique direction with respect to the central axis of the tubular body 2A is not detected. .
【0018】このような異物検知センサによれば、導光
路2bに、この導光路2bの先端から導入した光を受光
部3に結像させるレンズ9を設けたので、導光路2bの
中心軸に対して斜め方向からの光が結像されず、導光路
2bの中心軸の延長線上の光を受光部3に結像させる。
このため、レンズ9で受光部3に到達する光を分解で
き、異物検知センサの分解能を向上させることができ
る。According to such a foreign matter detection sensor, since the light guide path 2b is provided with the lens 9 for focusing the light introduced from the tip of the light guide path 2b on the light receiving portion 3, the center axis of the light guide path 2b is located. On the other hand, the light from the oblique direction is not imaged, and the light on the extension line of the central axis of the light guide path 2b is imaged on the light receiving unit 3.
Therefore, the light reaching the light receiving unit 3 can be decomposed by the lens 9, and the resolution of the foreign matter detection sensor can be improved.
【0019】〈第三実施例〉本発明の異物検知センサの
第三実施例について、図4を参照しながら説明する。図
4に示すように、第三実施例の異物検知センサは、導光
部2の途中にレンズ9が取り付けられ、他の構成は第一
実施例の異物検知センサと同様に構成されている。レン
ズ9は、導光部2におけるレンズ9と受光部3との長さ
lに対して、受光部3に光を結像させる焦点距離に設定
されている。<Third Embodiment> A third embodiment of the foreign matter detecting sensor of the present invention will be described with reference to FIG. As shown in FIG. 4, in the foreign matter detection sensor of the third embodiment, a lens 9 is attached in the middle of the light guide portion 2, and the other configurations are similar to those of the foreign matter detection sensor of the first embodiment. The lens 9 is set to a focal length for forming an image of light on the light receiving unit 3 with respect to the length 1 of the lens 9 and the light receiving unit 3 in the light guide unit 2.
【0020】このように導光部2の導光路2bの途中に
レンズ9を設けたので、導光部2を通る光がレンズ9を
通り、このレンズ9で光が受光部3に結像される。この
ため、導光路2bの中心軸の延長線上にない領域は結像
されず、さらに、レンズ9の中心軸に対して斜め方向か
らの光は受光部3に結像されない。したがって、異物検
知センサの分解能を向上させることができる。なお、図
では、レンズ9を導光部2の中央部付近に設置したが、
受光部3付近にレンズ9を設置してもよい。Since the lens 9 is provided in the light guide path 2b of the light guide section 2 in this way, the light passing through the light guide section 2 passes through the lens 9 and the light is imaged on the light receiving section 3 by the lens 9. It Therefore, an area that is not on the extension line of the central axis of the light guide path 2b is not imaged, and further, light from an oblique direction with respect to the central axis of the lens 9 is not imaged on the light receiving section 3. Therefore, the resolution of the foreign matter detection sensor can be improved. Although the lens 9 is installed near the center of the light guide 2 in the figure,
The lens 9 may be installed near the light receiving unit 3.
【0021】[0021]
【発明の効果】以上説明したように、本発明の異物検知
センサによれば、以下の効果を奏することができる。請
求項1記載の異物検知センサによれば、先端に光の導入
口を有する細長い複数の導光路が形成された導光部と、
この導光部の後端側に設けられて前記導光路の一本一本
を介して入射される光の強弱を検出する受光部とを具備
するので、各導光路毎に光を通過させて受光部で検出で
きる。このため、導光路の中心軸の延長線上にない領域
の光は受光部に結像されず、導光路の中心軸の延長線上
の領域だけを受光部に結像でき、被写界深度に影響され
ずに、物体を検知することができる。したがって、レン
ズの絞り等を不要にでき、受光部の解像度を維持でき、
長い焦点距離を不要にでき、異物検知センサの大型化を
防止できる。As described above, according to the foreign matter detection sensor of the present invention, the following effects can be obtained. According to the foreign matter detection sensor of claim 1, a light guide portion having a plurality of elongated light guide paths each having a light introduction port at its tip,
Since the light guide section is provided at the rear end side of the light guide section and detects the intensity of the light incident through each of the light guide paths, the light is passed through each light guide path. It can be detected by the light receiving part. Therefore, the light in the area that is not on the extension line of the central axis of the light guide path is not imaged on the light receiving section, and only the area on the extension line of the central axis of the light guide path can be imaged on the light receiving section, which affects the depth of field. The object can be detected without being detected. Therefore, it is possible to eliminate the need for a lens diaphragm, etc., and to maintain the resolution of the light receiving unit,
It is possible to eliminate the need for a long focal length and prevent the foreign matter detection sensor from becoming large.
【0022】請求項2記載の異物検知センサによれば、
前記導光路には、この導光路の先端から導入した光を前
記受光部に結像させるレンズを設けたので、このレンズ
の中心軸の延長線上の領域だけが受光部に結像され、レ
ンズの中心軸の延長線上にない領域は受光部に結像され
ない。このため、導光路とともにレンズで光を分解する
ので、異物検知センサの分解能を向上させることができ
る。According to the foreign matter detection sensor of claim 2,
Since the light guide path is provided with a lens for focusing the light introduced from the tip of the light guide path on the light receiving section, only the region on the extension line of the central axis of the lens is imaged on the light receiving section, and An area that is not on the extension line of the central axis is not imaged on the light receiving portion. For this reason, since the light is decomposed by the lens together with the light guide path, the resolution of the foreign matter detection sensor can be improved.
【図1】本発明の異物検知センサの第一実施例を示す構
成図である。FIG. 1 is a configuration diagram showing a first embodiment of a foreign matter detection sensor of the present invention.
【図2】図1の導光部を説明するための構成図である。FIG. 2 is a configuration diagram for explaining a light guide unit in FIG.
【図3】本発明の異物検知センサの第二実施例の導光部
を示す構成図である。FIG. 3 is a configuration diagram showing a light guide section of a second embodiment of the foreign matter detection sensor of the present invention.
【図4】本発明の異物検知センサの第三実施例の導光部
を示す構成図である。FIG. 4 is a configuration diagram showing a light guide section of a third embodiment of the foreign matter detection sensor of the present invention.
1 異物検知センサ 2 導光部 2a 導入口 2b 導光路 3 受光部 1 foreign matter detection sensor 2 light guide 2a inlet 2b light guide 3 light receiver
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 G02B 6/00 // G01N 21/47 Z 9118−2J ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location G02B 6/00 // G01N 21/47 Z 9118-2J
Claims (2)
導光路が形成された導光部と、この導光部の後端側に設
けられて前記導光路の一本一本を介して入射される光の
強弱を検出する受光部とを具備してなることを特徴とす
る異物検知センサ。1. A light guide section having a plurality of elongated light guide paths each having a light introduction port at its tip, and one light guide section provided at the rear end side of the light guide section. A foreign matter detection sensor, comprising: a light receiving section for detecting the intensity of incident light.
導入した光を前記受光部に結像させるレンズが設けられ
ていることを特徴とする請求項1記載の異物検知セン
サ。2. The foreign matter detection sensor according to claim 1, wherein the light guide path is provided with a lens that images the light introduced from the tip of the light guide path onto the light receiving section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20975593A JPH0763607A (en) | 1993-08-24 | 1993-08-24 | Foreign matter detection sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20975593A JPH0763607A (en) | 1993-08-24 | 1993-08-24 | Foreign matter detection sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0763607A true JPH0763607A (en) | 1995-03-10 |
Family
ID=16578101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20975593A Pending JPH0763607A (en) | 1993-08-24 | 1993-08-24 | Foreign matter detection sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0763607A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5645093A (en) * | 1994-11-25 | 1997-07-08 | Yazaki Corp. | Product collecting device for use in apparatus coating seed with gel |
WO2019009209A1 (en) * | 2017-07-04 | 2019-01-10 | 国立大学法人九州大学 | Optical measuring device, light guide member, and optical measuring method |
JP2019015708A (en) * | 2017-07-04 | 2019-01-31 | 国立大学法人九州大学 | Light measuring device, light guide member, and method for measuring light |
-
1993
- 1993-08-24 JP JP20975593A patent/JPH0763607A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5645093A (en) * | 1994-11-25 | 1997-07-08 | Yazaki Corp. | Product collecting device for use in apparatus coating seed with gel |
WO2019009209A1 (en) * | 2017-07-04 | 2019-01-10 | 国立大学法人九州大学 | Optical measuring device, light guide member, and optical measuring method |
JP2019015708A (en) * | 2017-07-04 | 2019-01-31 | 国立大学法人九州大学 | Light measuring device, light guide member, and method for measuring light |
CN110892249A (en) * | 2017-07-04 | 2020-03-17 | 国立大学法人九州大学 | Light measurement device, light guide member, and light measurement method |
US11313798B2 (en) | 2017-07-04 | 2022-04-26 | Kyushu University, National University Corporation | Optical measuring device, light guide member, and optical measuring method |
CN110892249B (en) * | 2017-07-04 | 2024-01-02 | 国立大学法人九州大学 | Light measuring device, light guide member, and light measuring method |
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