JPH0763535A - Axis regulating reflecting mirror and axis regulating optical system - Google Patents

Abstract

PURPOSE:To provide an axis regulating optical system in which the inclination of the reflected optical axis of an axis regulating optical system to a standard optical axis can be detected, and the slippage of its parallel shift can be detected. CONSTITUTION:In an axis regulating optical system has a lighting means for lighting a projecting reticule 2 having a prescribed pattern and a collimating optical system 4 for projecting the lighting light through the projecting reticule 2 toward a reflecting means 5 as a parallel luminous flux, the reflecting means has an optical element having a flat surface 5a and a surface 5b having a curvature in order from the axis regulating optical system side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an axis adjusting optical system used for adjusting an optical axis or a mechanical rotation axis of an optical system.

[0002]

2. Description of the Related Art As a conventional axis adjusting optical system, for example, one shown in FIG. 6 is known. In FIG. 6, the illumination light from the light source unit 101 illuminates the projection reticle 102 provided with a pattern (index) such as a crosshair. Then, the illumination light that has passed through the projection reticle 102 is reflected by the half prism 103, becomes a parallel light flux by the collimator lens 104, and travels toward a collimator mirror CM provided on an object to be measured (not shown). Here, the collimator mirror CM is composed of a plane mirror. The reflected light reflected by the collimator mirror CM passes through the half prism 103 again via the collimator lens 104.
On the transmission side of the half prism 103, a reticle 107 provided with an index such as a crosshair is arranged. Here, the collimator lens 104 causes the projection reticle 1
02 and the reticle 107 are arranged in a conjugate manner.
An eyepiece lens EP is provided on the transmission side of the reticle 107, and this eyepiece lens EP enables enlarged observation of the deviation between the image of the index of the projection reticle 102 and the index provided on the reticle 107. . Thereby, the tilt of the reflected light on the collimator mirror CM can be measured.

[0003]

However, in the axis adjusting optical system shown in FIG. 6, the collimating mirror CM is used.
Angle of the reflected light flux at, that is, the optical axis of the collimating mirror CM (reflected optical axis) with respect to the reference optical axis of the axis adjusting optical system
Although it is possible to measure the inclination of, the deviation of the parallel shift component of the reflected optical axis from the reference optical axis could not be detected.

Therefore, the present invention provides an axis adjusting optical system capable of detecting the tilt of the reflection optical axis with respect to the reference optical axis of the axis adjusting optical system and detecting the deviation of the parallel shift. To aim.

[0005]

In order to achieve the above object, the axis adjusting optical system according to the present invention has the following constitution. For example, as shown in FIG. 1, an illumination means for illuminating a projection reticle (2) provided with a predetermined pattern and a collimator for projecting illumination light through the projection reticle toward a reflecting means (5) as a parallel light beam. In the axis adjusting optical system having the optical system (4), the reflecting means has an optical element having a plane (5a) and a surface (5b) having a curvature in order from the axis adjusting optical system side. To be done.

[0006]

With the above-described structure, when the optical axis of the reflecting means (5) is inclined with respect to the reference axis of the axis adjusting optical system, the light reflected by the plane (5a) of the reflecting means is used. The tilt angle (deviation of the tilt component) can be detected. When the reference axis of the axis adjusting optical system and the optical axis of the reflecting means (5) have a deviation of the parallel shift component, the light reflected by the surface (5b) having the curvature of the reflecting means causes The shift of the parallel shift component can be detected.

The principle will be described below with reference to FIG. FIG. 2 is a perspective view for explaining the measurement principle of the axis adjusting optical system. In FIG. 2A, the illumination light from a light source (not shown) illuminates a projection reticle (not shown) having a predetermined pattern (index). Then, the light from the projection reticle becomes a parallel light flux through the collimator lens 4 and reaches the reflecting means 5. In FIG. 2, the light flux reflected by the plane 5a of the reflection means 5 is represented by a solid line, and the light flux reflected by the surface 5b having the curvature of the reflection means 5 is represented by a broken line.
Here, the central axis (optical axis) of the axis adjusting optical system is set to the reference axis Ax _S.
And the central axis (optical axis) of the reflecting means 5 is Ax ₅ .

Now, the light is reflected by the flat surface 5a of the reflecting means 5.
The luminous flux that passes through the collimator lens 4
It is focused on the clou 7. Central axis Ax of the reflection means 5_FiveIs the standard
Axis Ax _SIs tilted with respect to and the shift of the parallel shift component
, The index image I, which is the image of the projection reticle.
_tIs the reference axis Ax on the tilt reticle 7._SWhere it intersects
Index P provided in_tAn image is formed at a different position from. here
Then, as shown in FIG. 2 (b), the index image I_tAnd index P_tDeviation from
Δt is the central axis Ax of the reflection means 5_FiveAnd the reference axis Ax_SInclination with
Corresponds to the angle (deviation of the tilt component). Therefore, the amount of deviation
If Δt is measured, the central axis Ax_FiveAnd the reference axis Ax_STilt angle with
I understand.

The light beam reflected by the curved surface 5b of the reflecting means 5 is focused on the shift reticle 6 via the collimator lens 4. At this time, the index image I _s, which is the image of the projection reticle, is the reference axis on the shift reticle 6.
The image is formed at a position different from the index P _s provided at the position intersecting with Ax _S. Here, as shown in FIG. 2 (c), the deviation amount Δs between the index image I _s and the index P _s is the deviation of the tilt component between the central axis Ax ₅ of the reflecting means ₅ and the reference axis Ax _S and the parallel shift component. It corresponds to both the deviation.

When adjusting the deviation of the reflecting means with respect to the reference axis Ax _S of the axis adjusting optical system using the above-mentioned axis adjusting optical system, first, the central axis Ax _{5 of the} reflecting means 5 is adjusted.
It is desirable to adjust the inclination between the reference axis and the reference axis Ax _S. As a result, the deviation amount Δs on the first reticle 6 becomes smaller than the central axis Ax ₅
And the reference axis Ax _S only corresponds to the shift amount of the parallel shift component.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of an axis adjusting optical system according to a first embodiment of the present invention. In FIG. 1, a light source unit 1 having a light source and a collimator lens illuminates a light projection reticle 2. Here, as the light source unit 1, a white continuous light source or a laser light source can be applied. For the projection reticle 2,
For example, an index (pattern) such as a cross line is provided on the surface, and the center of this cross line index coincides with the reference axis of the axis adjusting optical system. The light from the projection reticle 2 is reflected by the half prism 3 and then becomes a parallel light flux via a collimator lens 4 provided so that the front focus is located on the pattern surface of the projection reticle 2. In this embodiment, the optical axis of the collimator lens 4 is the reference axis of the axis adjusting optical system.

Now, for the object to be measured,
A reflecting member 5 as a reflecting means is attached. Here, the object to be inspected may be a mechanical rotating shaft, a bearing, or the like. The reflecting member 5 has a plano-convex shape as a whole, and the first surface 5a is composed of a half mirror having a flat surface, and the second surface 5b is formed.
Is a reflective surface having a concave surface facing the first surface 5a side. In addition, in this embodiment, the reflective film is provided on the first and second surfaces. However, for example, the surface reflection on the first and second surfaces may be used. At this time,
It is good that no surface treatment is performed on the first surface and the second surface.
Here, the reflecting member 5 is arranged so that the first surface 5a faces the collimator lens 4 side, that is, the first surface 5a faces the light incident side.

The light reflected by the first surface 5a of the reflecting member 5 is condensed again through the collimator lens 4 as shown by the solid line in the figure, passes through the half prism 3, and then is projected onto the tilt reticle 7. forming an index image I _t of the light reticle 2. Further, the light reflected by the second surface 5b of the reflecting member 5 is
As indicated by the broken line in the figure, the light is focused again through the collimator lens 4 to form the index image I _s of the projection reticle 2 on the shift reticle 6.

Here, the tilt reticle 7 and the shift reticle 6 are provided with, for example, cross-shaped indices (patterns). The center points of these crosshair indices coincide with the reference axis (optical axis of the collimator lens 4) of the axis adjusting optical system. The indexes provided on the shift reticle 6 and the tilt reticle 7 are not limited to the cross-shaped indexes, and indexes provided with scales may be used.

The shift reticle 6 is provided so as to be movable along the optical axis direction. Accordingly, even if the distance between the reflecting member 5 and the axis adjusting optical system changes, if the shift reticle is moved to the image forming position of the light projecting reticle 2 by the light passing through the second surface 5b of the reflecting member 5. good. As a result, the image of the projection reticle 2 is formed on the shift reticle 6. Regarding the tilt reticle 7, since the image of the projection reticle 2 formed on the tilt reticle 7 uses the light reflected by the first surface 5a (flat surface) of the reflection member, the reflection member 5 and the axis adjustment are performed. The image of the projection reticle 2 is always formed at a fixed position even when the distance from the use optical system changes. Therefore, the tilt reticle 7 does not have to be movable along the optical axis direction.

A relay lens 8 and a relay lens 11 are provided on the transmission side of the tilt reticle 7 along the reference axis. Here, the relay lens 8 and the relay lens 1
A half prism 9 for dividing the optical path is provided in the optical path between the optical path 1 and the optical path 1. As shown by the solid line in the figure, the light from the tilt reticle 7 forms an image of the tilt reticle 7 on the image pickup element 12 through the relay lens 8, the half prism 9 and the relay lens 11 in this order. Also,
As indicated by the broken line in the figure, the light from the shift reticle 6 is
An image of the shift reticle is formed on the image sensor 10 through the half prism 3, the tilt reticle 7, the relay lens 8, and the half prism 9 in this order. These image pickup devices 1
The image signals from 0 and 12 are displayed on a TV monitor (not shown). Thereby, the deviation between the reference axis of the axis adjusting optical system and the central axis of the reflecting member 5 can be observed. As the image pickup elements 10 and 12, for example, a CCD, an image pickup tube or the like can be applied. In addition, the image pickup device 10, 1
Instead of 2, an eyepiece lens for observing an intermediate image formed at the positions of the image pickup devices 10 and 12 may be applied.

In this embodiment, the first surface 5a of the reflecting member 5 is provided on the shift reticle 6 in addition to the index image I _s of the projection reticle 2 through the second surface 5b of the reflecting member 5. Through the light arrives. Since the index image I _t of the projection reticle 2 by the light passing through the first surface 5a becomes a defocus image on the shift reticle 6, the index image I of the projection reticle 2 by the light passing through the second surface 5b is obtained. _There is no substantial effect on observing _S. Further, on the tilt reticle 7, in addition to the index image I _t of the projection reticle 2 via the first surface 5 a of the reflecting member 5, light via the second surface 5 b of the reflecting member arrives. Here, since the index image I _s of the projection reticle 2 due to the light passing through the second surface 5b becomes a defocus image on the tilt reticle 7, the index image I _s of the projection reticle 2 due to the light passing through the first surface 5a. No substantial influence occurs when observing the index image I _t .

Next, an axis adjusting method using the above-described axis adjusting optical system will be described. First, the reflecting member 5 is attached to the object to be measured. At this time, the first surface 5a (flat surface) is attached so as to be located on the axis adjusting optical system side (light incident side). Then, the axis adjusting optical system is roughly positioned so that the reflecting member 5 is located on the optical axis (on the reference axis) of the axis adjusting optical system.

Then, the light source of the axis adjusting optical system is turned on, and the light transmitted through the projection reticle 2 is projected toward the reflecting member 5. After that, the shift reticle 6 by the image sensor 10
While observing the upper image, the shift reticle 6 is moved along the optical axis so that the image of the projection reticle 2 is shifted.
To be formed on top. Next, while observing the image of the tilt reticle 7 by the image pickup device 12, the reflecting member 5 is adjusted so that the deviation amount Δt between the index P _t on the tilt reticle 7 and the index image I _t of the light projection reticle 2 becomes zero. Adjust the tilt of the object to which is attached. As a result, the deviation of the tilt component between the reflecting member 5 and the axis adjusting optical system is adjusted.

Then, while observing the image of the shift reticle 6 by the image pickup device 10, the index P on the shift reticle 6 is observed.
_The shift of the parallel shift component of the test object to which the reflecting member 5 is attached is adjusted so that the shift amount Δs between _s and the index image I _s of the projection reticle 2 becomes zero. In this way, since the deviation of the parallel shift component is adjusted after adjusting the inclination between the reflecting member 5 and the axis adjusting optical system, the positional deviation between the index P _s and the index image I _s on the shift reticle 6 is performed. Corresponds to only the shift amount of the parallel shift component between the central axis of the reflecting member 5 and the reference axis of the axis adjusting optical system. Therefore, when adjusting the deviation between the reflection member 5 (inspection object) and the axis adjusting optical system, the deviation of the tilt component and the deviation of the parallel shift component can be adjusted independently. Therefore, there is an advantage that the adjustment of the reflection member 5 (inspection object) and the axis adjusting optical system becomes easier.

Next, a second embodiment according to the present invention will be described with reference to FIG. FIG. 3 is a diagram showing an embodiment in which the image rotator is adjusted by the axis adjusting optical system according to the present invention. For simplification of description, members having the same functions as those of the first embodiment shown in FIG. 1 are designated by the same reference numerals. In FIG. 3, a portion indicated by a broken line in the drawing shows an axis adjusting optical system. The optical axis adjusting optical system shown in FIG. 3 differs from the first embodiment shown in FIG. 1 in that shift reticles 6A and 6B are provided. The shift reticle 6A and the shift reticle 6B are arranged so that their positions on the optical axis (reference axis) are different. Here, when the image rotator IM is inserted in the optical path between the axis adjusting optical system and the reflecting member 5, the optical path length between the axis adjusting optical system and the reflecting member 5 changes. The index image of the projection reticle 2 is formed on the shift reticles 6A and 6B regardless of the length change. still,
The shift reticle 6A is movably provided in the reference axis direction as in the first embodiment shown in FIG.

Further, in the second embodiment shown in FIG.
Based on the signal processing unit 13 that processes the image signals from the image pickup devices 10 and 12, and the image information from the signal processing unit 13,
Shown are displays 14, 15 for displaying images. Here, the display unit 14 displays the images of the shift reticles 6A and 6B by the image pickup device 10, and the display unit 15 displays the image of the tilt reticle 7 by the image pickup device 12.

Here, the image rotator I to be adjusted
M is three plane mirrors M ₁ and M as surrounded by broken lines in the figure.
₂ and M ₃ , and these three plane mirrors M _{1 to} M ₃ are
Each is supported by a support member (not shown) so that fine adjustment is possible. First, the reflection member 5 is adjusted prior to the adjustment of the image rotator IM. At this time, similarly to the embodiment shown in FIG. 1, the central axis of the reflecting member 5 and the reference axis of the axis adjusting optical system are aligned. In this adjustment, when adjusting the deviation of the parallel shift component between the reflecting member 5 and the axis adjusting optical system, the shift reticle 6A of the axis adjusting optical system is used.

After the adjustment of the reflecting member 5 and the axis adjusting optical system is completed, adjustment is made in the optical path between the axis adjusting optical system and the reflecting member 5 (between the collimator lens 4 and the reflecting member 5). Insert the image rotator IM to be used. After that, an image of the tilt reticle 7 via the image sensor 12 is displayed on the display unit 15.
While observing, the index P _t on the tilt reticle 7
The three plane mirrors M _{1 to} M ₃ are finely adjusted so that the amount of deviation ΔT between the index image I _t of the projection reticle 2 and 0 is zero. As a result, the deviation of the tilt component between the optical axis on the plane mirror M ₁ side and the optical axis on the plane mirror M ₃ side in the image rotator IM is adjusted.

Next, the deviation of the parallel shift component between the optical axis on the plane mirror M ₁ side and the optical axis on the plane mirror M ₃ side in the image rotator IM is adjusted. At this time, the image of the index of the projection reticle 2 via the plane mirrors M _{1 to} M _{3 of} the image rotator IM, the reflecting member 5, and the collimator lens 4 is formed at a position different from the shift reticle 6A. In this embodiment, the shift reticle 6B is provided at this image forming position.
The shift reticle 6B is provided so as to be movable along the reference axis direction so that the index image of the projection reticle 2 can always be favorably formed even if the optical path length changes due to the fine adjustment of the image rotator IM. ing.

Further, the shift reticle 6B and the image pickup device 10
The relay lens 8 is provided so as to be movable along the reference axis direction in order to make and the conjugate relationship. For example, when the shift reticle 6B is arranged closer to the collimator lens 4 side than the shift reticle 6A, the relay lens 8 may be moved away from the collimator lens 4 side when switching from the shift reticle 6A to the shift reticle 6B. As a result, the index image of the projection reticle 2 can always be observed on the image sensor 10 regardless of which of the shift reticles 6A and 6B is used.

Here, since the inclination of the optical axis in the image rotator IM is adjusted, the shift reticle 6B.
Indicator of the shift reticle 6B of the above P _s and the projected reticle 2
Of the index image I _s of the image rotator I
Only the parallel shift deviation between the optical axis of the plane mirror M ₁ side of M and the optical axis of the plane mirror M ₃ side is shown. Therefore, while observing the image of the shift reticle 6B by the image sensor 10 on the display unit 14,
The three plane mirrors M _{1 to} M ₃ forming the image rotator IM are adjusted so that the above-mentioned shift amount Δs becomes zero.

This makes it possible to make adjustments so that the optical axes of the plane mirror M ₁ side and the plane mirror M ₃ side of the image rotator IM coincide with each other. As described above, according to the present embodiment, since the optical axis shift of the image rotator IM can be detected separately for the tilt component and the parallel shift component, the tilt component adjustment and the parallel shift component adjustment are separated. Therefore, the image rotator IM can be adjusted. Therefore, more simple and rational adjustment can be performed. Thereby, for example, when the image rotator IM is frequently inserted and removed from the optical path, there is an advantage that the optical axis can be adjusted easily when the image rotator IM is inserted into the optical path.

In this embodiment, the two shift reticles 6A and 6B are used. Instead of this, one shift reticle 6 is provided movably in the optical axis direction as in the embodiment shown in FIG. Is also good. At this time, when the image rotator IM is adjusted, the position of the shift reticle 6 in the optical axis direction is moved so that the image of the projection reticle 2 is transferred onto the shift reticle 6 via the _three plane mirrors M _{1 to} M _3. It may be formed in.

In the first and second embodiments described above, the shift reticle 6 (6A, 6B) and the tilt reticle 7 are arranged coaxially, but the optical path is divided by a half prism or the like. A shift reticle and a tilt reticle can be arranged in each of the divided optical paths. Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a diagram showing the configuration of the axis adjusting optical system according to the third embodiment. In FIG. 4, members having the same functions as those of the embodiment shown in FIGS. 1 and 3 are designated by the same reference numerals.

In FIG. 4, the illumination light from the light source unit 1 is
For example, the projection reticle 2 provided with a cross-shaped index is illuminated. The light from the projection reticle 2 becomes a parallel light flux as shown by the solid line in the figure via the collimator lens 24A arranged so that the front focal point is located on the index forming surface of the projection reticle 2. The parallel light flux from the collimator lens 24A is reflected by the half prism 23 and reaches the reflecting member 25. The reflecting member 25 is an optical element having a plano-concave shape as a whole and including a flat first surface 25a and a second surface 25b having a convex surface facing the first surface 25a. Here, the first surface 25a is composed of a half mirror, and the second surface 25b is composed of a reflecting surface. In addition,
Similar to the first embodiment of FIG. 1, the first and second surfaces may use the surface reflection on the first and second surfaces instead of the structure in which the reflective film is provided. This reflecting member 25 is
The side of the first surface 25a is the side of the axis adjusting optical system (half prism 2
3 side).

The light reflected by the first surface 25a (flat surface) of the reflecting member 25 passes through the half prism 23 in a parallel light flux state as shown by the solid line in the figure, and is arranged in the transmitting direction. Reaching the collimator lens 24B. In this embodiment, the collimator lens 24A and the collimator lens 24B are the same lens, but the collimator lenses 24A and 24B may be different lenses. The light from the reflecting member 25 via the collimator lens 24B is emitted from the collimator lens 2
4B receives the light condensing effect, reflects it by the half prism 29, and reaches the tilt reticle 7 arranged at the rear focal point of the collimator lens 24B. At this time, an index image on the projection reticle 2 is formed on the tilt reticle 7 by the light passing through the half prism 23, the collimator lenses 24A and 24B, and the reflecting member 25.

In this embodiment, the reference axis of the axis adjusting optical system is the optical axis of the collimator lens 24B. Here, the index of the shift reticle 6 is provided on this reference axis. A cross-shaped index is provided at the center position on the tilt reticle 7, and the center position is on the reference axis deflected by the half prism 29. The index of the projection reticle 2 is provided on the optical axis of the collimator lens 24A, and this optical axis and the reference axis intersect at the half prism 23.

Also in this embodiment, the tilt reticle 7 is used.
The positional deviation between the index above and the index image of the projection reticle 2 formed on the tilt reticle 7 corresponds to the inclination of the reference axis (optical axis) of the reflecting member 25 with respect to the reference axis of the axis adjusting optical system. is doing. Therefore, if the object to be inspected to which the reflecting member 25 is attached is adjusted while observing the tilt reticle 7, the inclination of the object to be inspected with respect to the axis adjusting optical system can be adjusted.

On the other hand, the light from the axis adjusting optical system reflected by the second surface 25B (convex surface) of the reflecting member 25 becomes a divergent light beam, passes through the half prism 23, and reaches the collimator lens 24B. The divergent light flux from the reflecting member 25 is condensed by the collimator lens 24B, passes through the half prism 29, and then reaches the shift reticle 6.
Here, on the shift reticle 6, the half prism 2
3, collimator lenses 24A, 24B and reflecting member 25
The index image of the light projection reticle 2 is formed by the light passing through. Here, a cross-shaped index is formed on the shift reticle 6, and this index is provided on the reference axis of the axis adjusting optical system.

The positional deviation between the index on the shift reticle 6 and the index image on the projection reticle 2 is due to the parallel shift and the inclination between the reference axis of the reflecting member 25 and the reference axis of the axis adjusting optical system. It will be compatible. In this embodiment, since the tilt reticle 7 is used to adjust the inclination of the reference axis between the reflecting member 25 and the axis adjusting optical system, the shift reticle 6 is adjusted.
The positional deviation between the index and the index image corresponds only to the parallel shift deviation between the reference axes. Therefore, by observing the shift reticle 7 and adjusting the test object to which the reflecting member 25 is attached, the parallel displacement of the test object with respect to the axis adjusting optical system can be adjusted.

Incidentally, in FIG. 4, the shift reticle 6
The eyepiece for observing the tilt reticle 7 is not shown. Further, instead of this eyepiece, the shift reticle 6 and the tilt reticle 7 may be directly visually observed, and an image through the relay optical system as in the first embodiment of FIG. 1 is observed on the display unit. May be. As described above, also in the present embodiment, since the deviation of the inclination and the deviation of the parallel shift between the reflecting member 25 (inspection object) and the axis adjusting optical system can be adjusted independently, the reflecting member 25 (inspection object). There is an advantage that the adjustment with the axis adjusting optical system becomes easier.

Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a diagram showing the configuration of the fourth exemplary embodiment of the present invention. For simplification of explanation, in FIG. 5, members having the same functions as those of the embodiment shown in FIGS. 1 to 4 are designated by the same reference numerals. In FIG.
The light projection reticle 2 is illuminated by the light source 1. The light from the light projection reticle 2 passes through the half prism 3, is reflected by the half prism 29, and reaches the collimator lens 4. The collimator lens 4 is arranged so that the pattern surface of the projection reticle and the front focus position coincide with each other, as in the above-described embodiments. Therefore, the light from the projection reticle 2 via the collimator lens 4 becomes a parallel light flux and travels toward the reflecting member 25. The reflecting member 25 is the same as that of the third embodiment shown in FIG.

The light reflected by the first surface (the plane on the collimator lens 4 side) of the reflecting member 25 passes through the collimator lens 4 again, and then is sequentially reflected by the half prism 29 and the half prism 3 to be projected. Reach the tilt reticle 7 which is arranged conjugate with the reticle 2. An image of the projection reticle 2 is formed on the tilt reticle 7 by the light reflected by the first surface (flat surface) of the reflecting member 25.

The light reflected by the second surface of the reflecting member 25 (the surface having the convex surface facing the collimator lens 4 side) passes through the collimator lens 4 again, and then passes through the half prism 29 to form the half prism. The shift reticle 6 arranged in the transmission direction of 29 is reached. Here, an image of the projection reticle 2 formed by the light reflected by the second surface (convex surface) of the reflecting member 25 is formed on the shift reticle 6.

Also in this embodiment, the tilt reticle 7
And the image of the projection reticle 2 correspond to the inclination of the reflection member 25 with respect to the axis adjusting optical system, and the position deviation between the shift reticle 6 and the image of the projection reticle 2 corresponds to the axis adjusting optical system. It corresponds to the inclination of the reflecting member 25 with respect to the system and the shift of the parallel shift component. Therefore, as in the above-described embodiments, the projection reticle 2 formed on the tilt reticle 7 is used.
While observing the image of, the tilt of the reflecting member 25 with respect to the axis adjusting optical system is adjusted. After the tilt adjustment, the positional deviation between the shift reticle 6 and the image of the projection reticle 2 corresponds only to the deviation of the parallel shift component of the reflecting member 25 with respect to the axis adjusting optical system. Therefore, while observing the shift reticle 7. ,
By adjusting the reflecting member 25, the shift of the parallel shift component of the reflecting member 25 with respect to the axis adjusting optical system can be adjusted.

From each of the above-described embodiments, it can be seen that the surface having the curvature of the optical element forming the reflecting member (reflecting means) may be concave or convex. In each of the above embodiments, the index image on the shift reticle 6 or the tilt reticle 7 and the index image on the projection reticle 2 are compared, but instead of the shift reticle 6 and the tilt reticle 7, an image of a CCD or the like is picked up. A configuration in which elements are arranged and the index image of the projection reticle 2 is directly detected may be used. At this time, the optical paths of the image pickup device for detecting the shift of the tilt component and the image pickup device for detecting the shift of the parallel shift component may be divided by a half prism or the like.

[0043]

As described above, according to the present invention, the tilt component and the parallel shift component can be detected separately when adjusting the optical axis or the mechanical rotation axis of the optical system. Adjustment work can be performed separately for adjustment and parallel shift adjustment.
Therefore, there is an advantage that the adjustment work becomes easier.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a first exemplary embodiment of the present invention.

FIG. 2 is a perspective view for explaining the principle of the present invention.

FIG. 3 is a diagram showing a configuration of a second exemplary embodiment of the present invention.

FIG. 4 is a diagram showing a configuration of a third exemplary embodiment of the present invention.

FIG. 5 is a diagram showing a configuration of a fourth exemplary embodiment of the present invention.

FIG. 6 is a diagram showing a configuration of a conventional axis adjusting optical system.

[Explanation of symbols]

 1 ... Light source part, 2 ... Projection reticle, 4 ... Collimator lens, 5 ... Reflecting member, 6 ... Shift reticle, 7 ... Til reticle,

Claims (4)

[Claims] 1. An axis adjusting optical system comprising: an illuminating means for illuminating a reticle provided with a predetermined pattern; and a collimating optical system for projecting an illumination light passing through the reticle to a reflecting means as a parallel light beam. The axis adjusting optical system is characterized in that the reflecting means has an optical element having a plane and a surface having a curvature in order from the side of the axis adjusting optical system. 2. A first reticle provided at an image forming position of the reticle by light reflected by the plane, and a first reticle provided at an image forming position of the reticle by light reflected by the surface having the curvature. The axis adjusting optical system according to claim 1, further comprising a second reticle. 3. The axis adjusting optical system according to claim 1, wherein the flat surface is a semi-reflective surface, and the surface having the curvature is a reflective surface. 4. An axis-adjusting reflecting mirror for reflecting a parallel light beam from an axis-adjusting optical system and detecting a deviation from a reference axis of the axis-adjusting optical system by the reflection. An axis-adjusting reflecting mirror having a plane and a surface having a curvature in order from the optical system side.