JPH0758578A - Oscillator and its manufacture - Google Patents

Abstract

PURPOSE:To attain stable oscillation and efficient oscillation by preventing that an inner diaphragm plate is in contact with an inner side of a case to make vibration unstable in the oscillator used for various electric appliances. CONSTITUTION:An upper plate case 14, a lower plate case 6 and a diaphragm 13 inserted and held between the upper and lower cases 14, 6 are provided and a tongue shaped vibration section 17 is formed by forming a cut groove 18 in the inside of an insertion part of the upper and lower cases 14, 6 at the outer circumference of the diaphragm 18 and an electrode 19 is formed to the front and rear sides of the vibration part 17. Furthermore, an etching processing face is formed to at either the outer circumferential end face or the front rear side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oscillator used in various electric products and a method of manufacturing the oscillator.

[0002]

2. Description of the Related Art In FIG. 6, reference numeral 1 denotes a lower case, and a diaphragm 2 is provided inside the lower case 1. As shown in FIG. 7, the vibrating plate 2 has a plate shape and electrodes 3 are provided on the front and back surfaces thereof. Next, reference numeral 4 denotes an upper case, which is shaped so as to cover the upper opening of the lower case 1 and seal it.

[0003]

In the above structure, the diaphragm 2 is fixed in the lower case 1 by the front and back electrodes 3 and the conductive pattern (not shown) provided on the inner surface of the lower case 1. It is obtained by the adhesive force of the conductive adhesive 5 to be connected.

A problem with such a conventional example is that it is extremely difficult to stabilize the vibration of the diaphragm 2. That is, since this type of resonator is extremely small, the lower case 1 and the diaphragm 2 are naturally small, and it is extremely difficult to correctly install the diaphragm 2 at a fixed position in the lower case 1. . As a result, if a part of the diaphragm 2 approaches or contacts the inner surface of the lower case 1 abnormally, the vibration becomes unstable.

Therefore, the present invention has an object to stabilize the vibration of the diaphragm and to efficiently perform the vibration.

[0006]

In order to achieve this object, the present invention comprises a plate-shaped upper case and a lower case, and a diaphragm sandwiched between these upper and lower cases. The vibrating plate forms a tongue-shaped vibrating section by forming a kerf inside the upper and lower case clamping sections on its outer periphery, and etching at least one of the outer peripheral end surface and the front and back surfaces of this vibrating section. Electrodes are formed on the front and back surfaces of the vibrating portion as well as the treated surface.

[0007]

With the above structure, since the tongue-shaped vibrating portion of the vibrating plate has a reliable gap formed by the kerf, it does not come close to or come into contact with the upper and lower cases as in the conventional case. Since the vibration is not hindered by the vibration, the vibration can be stabilized.

Further, since at least one of the outer peripheral end surface and the front and back surfaces of the vibrating portion is an etching treated surface to remove the deteriorated layer formed during processing, the vibration load due to the deteriorated layer is reduced, and as a result, As a result, efficient vibration is performed.

[0009]

1 and 2, reference numeral 6 denotes a plate-shaped lower case made of crystal, which has a rectangular shape and a recess 7 is formed inside the upper surface. A conductive pattern 8 is formed in the recess 7, a conductive adhesive 9 is provided at one end, and a through hole 10 is provided at the other end. A conductive layer 11 is formed on the inner surface of the through hole 10 by electroless plating as shown in FIG. 1, and the electrode 12 on the outer bottom surface of the lower case 6 and the conductive pattern 8 are connected via the conductive layer 11. There is.

Next, 13 is a vibrating plate made of quartz, and the outer circumference of this vibrating plate is as shown in FIG.
The frame body portion 15 is sandwiched between the outer peripheral portions of 4 and 6.

Inside the vibrating plate 13, the frame body 1
A tongue-shaped vibrating portion 17 which is cantilevered from one end portion side of 5 through a narrow holding portion 16 is provided. That is, the cut groove 18 formed by sandblasting is formed between the vibrating portion 17 and the frame body portion 15.

Since the sand blasting is performed in an inclined state with one of the long sides of the vibrating plate 13 facing up and the other of the vibrating plate 13 facing down, as a result, both long sides of the outer peripheral end of the vibrating portion 17 having a tongue shape. Has an inclined shape as shown in FIG.

Of course, the short side of the outer peripheral end of the vibrating portion 17 may also be inclined. Further, the vibrating portion 17 has a shape in which a corner portion of a rectangular portion is curved when the cut groove 18 is formed, and electrodes 19 and 20 are provided on the front and back surfaces thereof. The inner electrode 19 corresponds to the conductive pattern 2 on the holding portion 16.
1 and the conductive layer 9 in the through hole 22 is connected to the conductive adhesive 9. The electrode 20 is connected to the electrode 26 on the outer bottom surface via the conductive adhesive 23 and the conductive layer 25 in the through hole 24 of the lower case 6.

The upper case 14 is made of a crystal plate and has a recess 27 on its inner surface as shown in FIG. 1, whereby a sufficient vibration space is secured in the vertical direction of the vibrating part 17. ing.

In the above structure, the manufacturing method is as follows. First, as shown in FIG. 4, the surface roughness of the vibration plate 13 is 10 to 30 Å by a fine abrasive.
Mirror finish so that. Next, the front and back surfaces other than the kerf 18 are masked with a resist film, and then the kerf 18 is formed by sandblasting in this state.

Next, the resist film is removed, and then the upper and lower frames 15 are masked with wax, metal, liquid resist or the like, and in this state, the vibrating plate 13 is removed.
Is placed in ammonium bifluoride and heated at 50 ° C. for 30 minutes for etching.

By stirring the etching solution at this time, the etching solution is sufficiently circulated not only on the front and back surfaces of the vibration plate 13 but also in the cut groove 18.

As a result, the vibrating portion 17 of the vibrating plate 13
Altered layers formed at the time of mirror finishing of the front and back of
The deteriorated layer on the outer peripheral surface of the vibrating portion 17 formed during the sandblasting for forming 8 is etched and most of it is removed.

The thickness of the deteriorated layer on the outer peripheral surface is thicker than the thickness of the deteriorated layer on the front and rear surfaces of the vibrating portion 17. However, since the outer peripheral surface has a large unevenness due to sandblasting, the front and rear surfaces are The thing can be removed sufficiently in the time to remove it.

In practice, it is preferable to finish the etching process while leaving the two modified layers slightly, since the influence of the increase in the surface roughness due to excessive etching is small.

In this state, pits are formed by etching on the front and back surfaces and the outer peripheral surface of the vibrating portion 17, but the pits do not affect the vibration characteristics.

Then, after removing the mask of the frame body portion 15, electrodes 19 and 20 are formed on the front and back surfaces of the vibrating portion 17.

Next, the frame portion 1 of the diaphragm 13 is placed on the lower case 6.
When 5 is placed and pressure is applied while heating in this state, the two are in a mirror surface state, so that interatomic bonding is performed. Further, at this time, the gaseous substance generated by heating will escape upward through the groove 18 and the like. Since a glass stopper is press-fitted into the through holes 10 and 24 of the lower case 6, it is important to discharge the gas upward from the cut groove 18 in this manner.

Next, a signal is applied between the electrodes 12 and 26,
After measuring the oscillation frequency of the vibrating section 17 and performing frequency adjustment (for example, trimming) based on it, the upper case 1
4 is placed on the frame portion 15, pressure is also applied while heating, and interatomic bonding between mirror surfaces is performed, and sealing and integration are performed.

In the above description, the manufacture of one vibrator is explained, but in reality, the upper case 14,
The vibration plate 13 and the lower case 6 are respectively arranged on a large plate in a plurality, and are stacked and integrated as described above, and then cut into individual pieces by the outer peripheral shape of the frame body portion 15. The vibrator shown in FIG. 1 is obtained. The electrodes 12 and 26 are formed after this cutting. Note that FIG. 5 is for removing only the deteriorated layer on the outer peripheral surface of the vibrating portion 17. At this time, the electrodes 19 and 20 are formed after the mask is removed after the formation of the cut groove 18 by sandblasting, and then only the frame body portion 15 is formed. A mask is used and etching is performed. That is, at this time, the electrodes 19 and 20 serve as a mask.

[0026]

As described above, the present invention is provided with the plate-shaped upper and lower cases and the diaphragm sandwiched between these upper and lower cases, and the diaphragm is the upper and lower cases of the outer periphery thereof. A tongue-shaped vibrating portion is formed by forming a kerf inside the sandwiching portion, and electrodes are formed on the front and back surfaces of the vibrating portion. With the above configuration, the tongue-shaped vibrating part of the diaphragm has a certain clearance created by the kerf, so that the upper and lower cases are abnormally approached or come into contact with each other, causing vibration. Will not be hindered.

Further, since at least one of the outer peripheral end surface and the front and back surfaces of the vibrating portion is an etching treated surface, the deteriorated layer formed at the time of processing is removed, so that the vibration load due to the deteriorated layer is reduced. As a result, efficient vibration is performed.

Further, when the crystal impedance (hereinafter referred to as CI value), which is an important characteristic value of the crystal unit, was evaluated, it was confirmed that the CI value was reduced to 1/2 to 1/3 by etching.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of an oscillator of the invention.

FIG. 2 is an exploded perspective view of the same.

3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a block diagram showing the same manufacturing process.

FIG. 5 is a block diagram showing another manufacturing process.

FIG. 6 is a sectional view of a conventional example.

FIG. 7 is an exploded perspective view thereof.

[Explanation of symbols]

 6 Lower case 13 Vibration plate 14 Upper case 17 Vibrating part 18 Notch

Claims (2)

[Claims] 1. A plate-shaped upper case and a lower case, and a diaphragm sandwiched between these upper and lower cases, wherein the diaphragm is located inside the upper and lower case's sandwiching portion on the outer periphery thereof. A tongue-shaped vibrating part is formed by forming a kerf,
An oscillator in which at least one of the outer peripheral end surface and the front and back surfaces of the vibrating portion is used as an etching surface and electrodes are formed on the front and back surfaces of the vibrating portion. 2. A plate-shaped upper case and a lower case, and a diaphragm sandwiched between these upper and lower cases, and a kerf is formed inside a portion sandwiched between the upper and lower cases of the diaphragm. Then, the outer peripheral end surface and the front and back surfaces of this diaphragm are etched, then electrodes are formed on the upper and lower surfaces of this diaphragm, and then this diaphragm is sandwiched between the upper and lower cases. Method of manufacturing oscillator.