JPH0757875A - Element of organic film - Google Patents

Element of organic film

Info

Publication number
JPH0757875A
JPH0757875A JP5203129A JP20312993A JPH0757875A JP H0757875 A JPH0757875 A JP H0757875A JP 5203129 A JP5203129 A JP 5203129A JP 20312993 A JP20312993 A JP 20312993A JP H0757875 A JPH0757875 A JP H0757875A
Authority
JP
Japan
Prior art keywords
layer
organic
cathode
island
organic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5203129A
Other languages
Japanese (ja)
Other versions
JP3229081B2 (en
Inventor
Takeshi Shoji
剛 庄司
Yoshihiko Mori
吉彦 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP20312993A priority Critical patent/JP3229081B2/en
Publication of JPH0757875A publication Critical patent/JPH0757875A/en
Application granted granted Critical
Publication of JP3229081B2 publication Critical patent/JP3229081B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes

Abstract

PURPOSE:To improve the operating performance, operating stability and reliability of an organic film by providing a land metal layer between at least one of opposed electrodes and one or more layers provided between the electrodes. CONSTITUTION:An organic layer is formed on an insulating support body-like positive electrode, a land silver distributed layer is formed so as not to form a continuous film, and a negative electrode is further formed. Thus, the metal distributed layer is provided between the negative electrode which is one of the opposed electrodes and the organic layer provided between the electrodes. Implantation of electrons is carried out in the critical surface between the negative electrode and the organic layer, and influenced by the critical surface state as well as work function. When the land metal distributed layer is provided on the critical surface, a cavity part free from metal is formed, and the critical surface can be observed by a scanning type electron microscope. Further, smooth carrier movement can be performed, and an electronic device having excellent operating performance and operating stability can be provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、有機EL素子などの発
光素子や太陽電池や受光素子などの有機膜の素子全般に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting device such as an organic EL device and an organic film device such as a solar cell and a light receiving device.

【0002】[0002]

【従来の技術】近年、エレクトロニクス技術の目覚まし
い発展にともない、多種多様の新たな機能をもった有機
膜の素子が開発されている。たとえば、受光素子とし
て、太陽電池、ホトダイオードなどがあり、発光素子と
してエレクトロルミネッセンス(EL)素子、LED、
半導体レーザなどがある。これらの素子の構造は一般に
陽極と陰極の間に一以上の層(以下、機能層と呼ぶ。)
を有しており、その動作過程において電極と機能層の界
面でキャリアの移動をともなう。
2. Description of the Related Art In recent years, along with the remarkable development of electronics technology, various organic film elements having new functions have been developed. For example, there are solar cells, photodiodes, etc. as light receiving elements, and electroluminescence (EL) elements, LEDs, as light emitting elements.
There are semiconductor lasers and the like. The structure of these devices is generally one or more layers (hereinafter referred to as functional layers) between the anode and the cathode.
And the movement of carriers is accompanied at the interface between the electrode and the functional layer in the operation process.

【0003】その一例として有機のEL素子について説
明する。有機のEL素子は、有機蛍光体を対向電極では
さんで構成されており、陰極から注入された電子と陽極
から注入された正孔が、発光層内で再結合するときに発
光するものである。このような素子には、発光体として
は例えばアントラセンのような有機蛍光体の単結晶や蒸
着法により形成された薄膜の利用が試みられたがキャリ
アーである正孔あるいは電子の密度が非常に小さく、キ
ャリアーの移動や再結合などによる機能分子の励起確率
が低いため、効率のよい発光が得られず、消費電力や輝
度の点で満足できるものとなっていない。
An organic EL element will be described as an example. The organic EL element is composed of an organic phosphor sandwiched between counter electrodes, and emits light when electrons injected from the cathode and holes injected from the anode recombine in the light emitting layer. . For such a device, it has been attempted to use a single crystal of an organic phosphor such as anthracene or a thin film formed by a vapor deposition method as a light emitter, but the density of holes or electrons as carriers is very small. However, since the probability of excitation of functional molecules due to carrier migration or recombination is low, efficient light emission cannot be obtained, and power consumption and brightness are not satisfactory.

【0004】さらに、陽極と発光層の間に正孔注入層を
設けキャリアーである正孔の密度をあげることにより、
各層で機能分離した構造を有する積層型の有機EL素子
で、高い発光効率が得られることを特開昭57−517
81号公報、特開昭59−194393号公報、特開昭
63−295695号公報で提案している。さらに、特
開昭63−264692号公報においては正孔注入輸送
層と陰極の間に設ける発光層をホール及び電子の両方の
注入を持続することができる単一の有機質ホスト物質と
少量の蛍光物質により構成することにより、広い範囲で
発光波長を制御でき、高い発光効率が得られることが知
られている。
Further, by providing a hole injection layer between the anode and the light emitting layer to increase the density of holes as carriers,
It is disclosed that high luminous efficiency can be obtained in a laminated organic EL device having a structure in which the functions are separated in each layer.
81, JP-A-59-194393, and JP-A-63-295695. Further, in JP-A-63-264692, a light emitting layer provided between a hole injecting and transporting layer and a cathode is provided with a single organic host material capable of sustaining injection of both holes and electrons and a small amount of fluorescent material. It is known that the light emitting wavelength can be controlled in a wide range and a high light emitting efficiency can be obtained by the above structure.

【0005】一方、本発明者らは、上述した発光層、正
孔注入層などの各層を機能分離した構造をもつ積層型の
有機のEL素子に対し、特開平4―212286号公報
で蛍光物質、陽極から注入される正孔を移動し該蛍光物
質に正孔を与える化合物(正孔移動供与剤)および陰極
から注入される電子を移動し該蛍光物質に電子を与える
化合物(電子移動供与剤)などの機能材料を混合させた
有機物からなる層(有機層)を陽極と陰極の間に設けた
分散型電界発光素子において、高効率な発光特性を有
し、安価でかつ製造容易な有機のEL素子を提案してい
る。
On the other hand, the inventors of the present invention have disclosed a fluorescent substance disclosed in Japanese Patent Laid-Open No. 4-212286 in relation to a laminated organic EL device having a structure in which the respective layers such as the light emitting layer and the hole injection layer are functionally separated. , A compound that moves holes injected from the anode to give holes to the fluorescent substance (hole transfer donor) and a compound that transfers electrons injected from the cathode to give electrons to the fluorescent substance (electron transfer donor) In a dispersion type electroluminescent device in which a layer (organic layer) made of an organic material mixed with a functional material such as) is provided between an anode and a cathode, the organic electroluminescent device has highly efficient emission characteristics and is inexpensive and easy to manufacture. We are proposing EL devices.

【0006】しかしながら、これらの有機のEL素子に
おいては、一般に陰極と有機層の中で最も陰極側の層
(陰極と接する層)との密着力が乏しいため、外力や陰
極そのものの内部応力などにより剥離しやすく、その結
果、発光面内の所々に未発光部分ができる、電子の注入
が阻害されやすく安定して高い発光効率が得られないな
どの問題があった。
However, in these organic EL elements, the adhesion between the cathode and the most cathode-side layer (the layer in contact with the cathode) of the organic layers is generally poor, so that external forces or internal stress of the cathode itself cause It is easy to peel off, and as a result, there are problems such as non-luminous portions being formed in places on the light emitting surface, electron injection being easily obstructed, and stable high emission efficiency cannot be obtained.

【0007】また別の例として、太陽の光エネルギーを
電気エネルギーに変換する太陽電池においても、電極と
機能層の界面でのキャリアの移動過程が素子の特性を左
右し、変換効率はまだまだ低いのが現状である。その他
の光電変換素子においても、電極と機能層の間のキャリ
ア移動過程が円滑でなく、素子の特性を低下させてい
る。
As another example, in a solar cell that converts light energy of the sun into electric energy, the process of carrier movement at the interface between the electrode and the functional layer affects the characteristics of the device, and the conversion efficiency is still low. Is the current situation. Also in other photoelectric conversion elements, the carrier transfer process between the electrode and the functional layer is not smooth, and the characteristics of the element are degraded.

【0008】[0008]

【発明が解決しようとする課題】以上のように有機膜の
素子が種々提案されているが、これまで提案されている
素子では、特に、電極と機能層間のキャリアの移動が円
滑でないなどの問題があり、動作性能や動作安定性、信
頼性に改良の余地が残されている。本発明は、素子が動
作する際に電極と機能層の界面でキャリア移動過程をと
もなう素子、特に有機EL素子、太陽電池およびホトダ
イオードにおいて、円滑なキャリア移動を可能とし、そ
の結果として、優れた動作性能、動作安定性、信頼性を
有する有機膜の素子を提供する。たとえば、有機のEL
素子においては、発光時の未発光部分が少なく、発光の
均一性に優れ、しかも高効率な有機のEL素子を提供す
るものである。
As described above, various organic film elements have been proposed. However, in the elements proposed so far, there is a problem that the movement of carriers between electrodes and functional layers is not smooth. However, there is room for improvement in operational performance, operational stability, and reliability. INDUSTRIAL APPLICABILITY The present invention enables smooth carrier movement in an element that accompanies a carrier movement process at an interface between an electrode and a functional layer when the element operates, particularly an organic EL element, a solar cell and a photodiode, and as a result, excellent operation. An organic film element having performance, operational stability, and reliability is provided. For example, organic EL
In the device, an organic EL device having a small number of non-light emitting portions, excellent emission uniformity, and high efficiency is provided.

【0009】[0009]

【課題を解決するための手段】本発明者らは、有機膜の
素子の動作性能や動作安定性、信頼性を向上させるため
に鋭意研究を重ねた結果、少なくとも一方の電極と機能
層の界面に走査型電子顕微鏡あるいは透過型電子顕微鏡
の観察で島状に見える金属分布層を設けることにより、
円滑なキャリア移動を可能とし、その結果として、従来
より優れた動作性能、動作安定性、信頼性を有する電子
デバイスが得られることを見い出し、本発明を完成し
た。
Means for Solving the Problems As a result of intensive studies conducted by the present inventors to improve the operation performance, operation stability, and reliability of an organic film element, the interface between at least one electrode and a functional layer By providing a metal distribution layer that looks like an island when observed with a scanning electron microscope or a transmission electron microscope,
It has been found that an electronic device that enables smooth carrier movement and, as a result, has better operating performance, operational stability, and reliability than before can be obtained, and completed the present invention.

【0010】即ち、本発明は以下のとおりである。 1.相対する電極間に一以上の層を有する有機膜の素子
において、上記相対する電極の少なくとも一方と上記電
極間に有する一以上の層との間に島状の金属分布層を設
けたことを特徴とする有機膜の素子。 2.陽極と陰極からなる電極間に有機層を有する有機の
EL素子において、該有機層が有機物からなる蛍光物質
を含み、該有機層と上記陰極との間に島状の金属分布層
を設けたことを特徴とする有機のEL素子。 3.陽極と陰極からなる電極間に一以上の接合面を有す
る光受光素子において、上記陰極と該陰極に接する層の
間に島状の金属分布層を設けたことを特徴とする受光素
子。 4.陽極と陰極からなる電極間に、正孔輸送層と電子輸
送層を積層した構造の光起電力装置において、上記陰極
と上記電子輸送層の間に島状の金属分布層を設けたこと
を特徴とする光起電力装置。
That is, the present invention is as follows. 1. In an organic film element having one or more layers between opposing electrodes, an island-shaped metal distribution layer is provided between at least one of the opposing electrodes and one or more layers between the electrodes. And an organic film element. 2. In an organic EL element having an organic layer between an electrode composed of an anode and a cathode, the organic layer contains a fluorescent substance composed of an organic substance, and an island-shaped metal distribution layer is provided between the organic layer and the cathode. An organic EL device characterized by: 3. A light-receiving element having one or more bonding surfaces between electrodes composed of an anode and a cathode, characterized in that an island-shaped metal distribution layer is provided between the cathode and a layer in contact with the cathode. 4. In a photovoltaic device having a structure in which a hole transport layer and an electron transport layer are laminated between electrodes composed of an anode and a cathode, an island-shaped metal distribution layer is provided between the cathode and the electron transport layer. And photovoltaic device.

【0011】本発明は、素子が動作する際に電極と機能
層の界面でキャリア移動過程をともなう有機素子に適用
することができ、特に効果の大きな有機膜素子として有
機EL素子、太陽電池およびホトダイオードを挙げるこ
とができる。本発明の有機膜素子は、陽極および陰極の
少なくとも一方の電極と機能層の界面に走査型電子顕微
鏡あるいは透過型電子顕微鏡の観察で島状に見える金属
分布層を設けることが必要である。好ましくは陽極と陰
極の間に設ける機能層の最も陰極側の層(機能層が複数
の場合は陰極と接する層)と陰極との界面に走査型電子
顕微鏡あるいは透過型電子顕微鏡の観察で島状に見える
金属分布層を設ける。その結果、著しく動作性能に優
れ、さらに動作安定性および信頼性に優れた有機膜の素
子が得られる。
INDUSTRIAL APPLICABILITY The present invention can be applied to an organic element having a carrier transfer process at an interface between an electrode and a functional layer when the element operates, and an organic EL element, a solar cell and a photodiode are particularly effective organic film elements. Can be mentioned. In the organic film element of the present invention, it is necessary to provide a metal distribution layer that looks like an island when observed with a scanning electron microscope or a transmission electron microscope, at the interface between at least one of the anode and the cathode and the functional layer. Preferably, the interface between the cathode and the most cathode-side layer of the functional layer provided between the anode and the cathode (the layer that is in contact with the cathode in the case of multiple functional layers) and the cathode is island-shaped by observation with a scanning electron microscope or a transmission electron microscope. Provide a metal distribution layer that looks like. As a result, it is possible to obtain an element having an organic film that is remarkably excellent in operation performance and further excellent in operation stability and reliability.

【0012】その中で、代表例として有機のEL素子に
ついて言えば、陽極と陰極の間に設ける有機層の最も陰
極側の層(有機層が複数層の場合は有機層の中で陰極と
接する層)と陰極との間に、走査型電子顕微鏡あるいは
透過型電子顕微鏡の観察で島状に見える金属分布層を設
ければ、発光面内の未発光部分の割合を低減することが
でき、さらに使用する陰極材料に関わらず高い発光効率
を呈する有機のEL素子が得られる。この原因は明かで
はないが有機層と陰極との間に島状の金属分布層を設け
ることにより有機層と陰極との密着力が向上すると同時
に、界面に新しい準位が形成されるためと考えられる。
[0012] Among them, regarding an organic EL element as a typical example, the most cathode side layer of the organic layer provided between the anode and the cathode (in the case of a plurality of organic layers, the organic layer is in contact with the cathode). If a metal distribution layer that looks like an island under observation with a scanning electron microscope or a transmission electron microscope is provided between the (layer) and the cathode, the ratio of the non-light emitting portion in the light emitting surface can be reduced. An organic EL device exhibiting high luminous efficiency can be obtained regardless of the cathode material used. The reason for this is not clear, but it is thought that by providing an island-shaped metal distribution layer between the organic layer and the cathode, the adhesion between the organic layer and the cathode is improved, and at the same time, a new level is formed at the interface. To be

【0013】以下、本発明について有機EL素子を中心
に詳細に説明する。有機のEL素子は、陽極から注入さ
れた正孔と陰極から注入された電子が発光層内で再結合
するときに発光するものであり、電流注入型の発光素子
と呼ばれる。この時、電子の注入は陰極と有機層の界面
で行われ、これまでは、陰極からの電子の注入効率は陰
極材料の仕事関数が小さいほど大きく、結果的に素子の
発光効率が高くなると考えられてきた。しかし、電子の
注入は、陰極と有機層との界面で行われるので、仕事関
数以外にも陰極と有機層との界面状態、たとえば、陰極
と有機層との密着力、有機層表面の形状、陰極と有機層
との界面の不純物の影響などにより左右されると考える
ことができる。
The present invention will be described in detail below, focusing on the organic EL device. The organic EL element emits light when holes injected from the anode and electrons injected from the cathode are recombined in the light emitting layer, and is called a current injection type light emitting element. At this time, electron injection is performed at the interface between the cathode and the organic layer, and until now, the electron injection efficiency from the cathode is considered to increase as the work function of the cathode material decreases, resulting in higher emission efficiency of the device. Has been. However, since the injection of electrons is performed at the interface between the cathode and the organic layer, in addition to the work function, the interface state between the cathode and the organic layer, for example, the adhesion between the cathode and the organic layer, the shape of the organic layer surface, It can be considered that it depends on the influence of impurities at the interface between the cathode and the organic layer.

【0014】本発明は、有機層と陰極との界面に島状の
金属分布層を設けることにより陰極と有機層の界面状態
を向上させることができ、その結果、従来までに数多く
みられた発光面内の未発光部分の割合を低減することが
できる。さらに同時に、陰極と有機層との界面に島状の
金属分布層を設ければ使用する陰極材料に関わらず高い
発光効率を呈する有機のEL素子を得ることができる。
本発明における有機のEL素子は、絶縁性支持体上の陽
極に有機層を形成し、ついで連続膜状にならないように
島状の銀分布層を形成し、さらに陰極を形成すればよ
く、あるいはその逆の順序でもよい。
The present invention can improve the state of the interface between the cathode and the organic layer by providing an island-shaped metal distribution layer at the interface between the organic layer and the cathode. It is possible to reduce the ratio of the non-luminous portion in the plane. At the same time, if an island-shaped metal distribution layer is provided at the interface between the cathode and the organic layer, an organic EL element exhibiting high luminous efficiency can be obtained regardless of the cathode material used.
In the organic EL element of the present invention, an organic layer may be formed on an anode on an insulating support, then an island-shaped silver distribution layer may be formed so as not to form a continuous film, and then a cathode may be formed. The reverse order is also acceptable.

【0015】島状の金属分布層については、後述するさ
まざまな構造の有機層に対して使用することができ、有
機層の中で最も陰極側の層と陰極の間に設けるのが好ま
しい。たとえば、順次、陽極、正孔注入層、発光層、陰
極の構成である有機層二層型の有機のEL素子の場合は
該発光層と陰極の間に島状の金属分布層を設けることが
好ましい。また、順次、陽極、発光層、電子注入層、陰
極の構成である有機層二層型の有機のEL素子の場合は
該電子注入層と陰極の間に島状の金属分布層を設けるこ
とが好ましい。さらに、順次、陽極、正孔注入層、発光
層、電子注入層、陰極の構成である有機層三層型素子の
場合は電子注入層と陰極の間に島状の金属分布層を設け
るのが好ましい。
The island-shaped metal distribution layer can be used for organic layers having various structures which will be described later, and it is preferable to provide it between the most cathode side layer and the cathode among the organic layers. For example, in the case of an organic EL device of a two-layer type organic layer having a structure of an anode, a hole injection layer, a light emitting layer, and a cathode, an island-shaped metal distribution layer may be provided between the light emitting layer and the cathode. preferable. Further, in the case of an organic EL device of a two-layer type organic layer having a structure of an anode, a light emitting layer, an electron injection layer, and a cathode, an island-shaped metal distribution layer may be provided between the electron injection layer and the cathode. preferable. Furthermore, in the case of an organic layer three-layer type device having a structure of an anode, a hole injection layer, a light emitting layer, an electron injection layer, and a cathode, an island-shaped metal distribution layer is provided between the electron injection layer and the cathode. preferable.

【0016】分布層に用いる金属としては有機層上に島
状に分布する金属であればよいが、有機層に対する付着
力が強く、島状に分布しやすいものが好ましい。たとえ
ば、Sc,Ti,V,Cr,Mn,Fe,Co,Ni,
Cu,Zn,Y,Zr,Nb,Tc,Ru,Rh,P
d,Cd,La,Hf,Ta,W,Re,Os,Ir,
Pt,Au,Al,Si,Ga,Ge,In,Sn,T
l,Pbなどの金属、Ce,Pr,Nd,Pm,Sm,
Eu,Gd,Tb,Dy,Ho,Er,Tm,Yb,L
uなどの希土類、さらにCa,Srなどのアルカリ土類
金属、Li,K,Rbなどのアルカリ金属が挙げられ
る。
The metal used for the distribution layer may be a metal distributed in an island shape on the organic layer, but a metal having a strong adhesive force to the organic layer and easily distributed in an island shape is preferable. For example, Sc, Ti, V, Cr, Mn, Fe, Co, Ni,
Cu, Zn, Y, Zr, Nb, Tc, Ru, Rh, P
d, Cd, La, Hf, Ta, W, Re, Os, Ir,
Pt, Au, Al, Si, Ga, Ge, In, Sn, T
Metals such as 1, Pb, Ce, Pr, Nd, Pm, Sm,
Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, L
Examples thereof include rare earths such as u, alkaline earth metals such as Ca and Sr, and alkaline metals such as Li, K, and Rb.

【0017】さらにこれらのうち安定性の点から仕事関
数が4eV以上のTi,V,Cr,Mn,Fe,Co,
Ni,Cu,Zn,Zr,Nb,Tc,Cd,Ta,
W,Re,Si,Ga,Geが好ましく、貴金属元素で
あるAu,Pt,Pd,Ru,Rh,Os,Irが特に
好ましい。有機層と陰極の間に設ける島状の金属分布層
の形成方法は蒸着でもスパッタでもよく、たとえば、蒸
着の場合は水晶振動子で膜厚をモニタ−しながら形成す
る。
Further, among these, Ti, V, Cr, Mn, Fe, Co, whose work functions are 4 eV or more, from the viewpoint of stability,
Ni, Cu, Zn, Zr, Nb, Tc, Cd, Ta,
W, Re, Si, Ga and Ge are preferable, and Au, Pt, Pd, Ru, Rh, Os and Ir which are noble metal elements are particularly preferable. The island-shaped metal distribution layer provided between the organic layer and the cathode may be formed by vapor deposition or sputtering. For example, in the case of vapor deposition, the film thickness is monitored with a crystal oscillator.

【0018】本発明おける島状の金属分布層とは、金属
が連続膜でない状態、すなわち0.25μm2 (500
nm×500nm)の面積に対する金属が存在しない空
隙部分の面積の割合が1%以上99.95%以下の状態
をいう。このような状態は容易に走査型電子顕微鏡ある
いは透過型電子顕微鏡で観察することができる。ただ
し、0.25μm2 (500nm×500nm)の面積
に対する金属が存在しない空隙部分の面積の割合が同じ
でも、島状粒子の形成のし易すさは金属の種類によって
差があり一律に膜厚規定はできないが、それぞれの金属
で平均空隙率と平均膜厚の対応を取れば、容易に平均膜
厚で各金属の島状状態を規定することは可能である。
The island-shaped metal distribution layer in the present invention means a state in which the metal is not a continuous film, that is, 0.25 μm 2 (500
(nm × 500 nm) is a state in which the ratio of the area of the void portion in which the metal does not exist is 1% or more and 99.95% or less. Such a state can be easily observed with a scanning electron microscope or a transmission electron microscope. However, even if the ratio of the area of the void portion where the metal does not exist to the area of 0.25 μm 2 (500 nm × 500 nm) is the same, the ease of forming island-shaped particles varies depending on the type of metal, and the film thickness is uniformly defined. However, if the correspondence between the average porosity and the average film thickness of each metal, it is possible to easily define the island-like state of each metal by the average film thickness.

【0019】また、有機層と陰極の間に島状の金属分布
層を設けることにより陰極材料の種類に関わらず、発光
面内の未発光部分の割合を低減する効果および発光効率
の向上効果を得ることができる。したがって、有機のE
L素子の安定性や半田付け性などさまざまな要求に応じ
て任意に陰極材料を選択することができる。陰極材料と
しては、導電性を有するものであればどんな金属でもよ
く、単体でも複合体でもよい。また、陰極構造も単層で
も2層以上の積層構造でもよい。たとえば、Sc,T
i,V,Cr,Mn,Fe,Co,Ni,Cu,Zn,
Y,Zr,Nb,Tc,Ru,Rh,Pd,Ag,C
d,La,Hf,Ta,W,Re,Os,Ir,Pt,
Au,Al,Si,Ga,Ge,In,Sn,Tl,P
b等が挙げられる。また、Ce,Pr,Nd,Pm,S
m,Eu,Gd,Tb,Dy,Ho,Er,Tm,Y
b,Luなどの希土類単体、さらにMg,Ca,Srな
どのアルカリ土類金属、Li,K,Rbなどのアルカリ
金属あるいは上述した元素を複合した半透明または不透
明電極が挙げられる。特に、仕事関数の比較的小さいM
gなどのアルカリ土類金属やSmなどの希土類金属など
を用いる場合には仕事関数の比較的大きな金属たとえば
金、銅、アルミニウム、白金、銀、などの金属と複合体
を形成して陰極としてもよい。さらに、これら陰極の上
に保護層として化学的に安定な金属たとえば金、銀、
銅、アルミニウム、白金などを保護層として1層以上積
層してもよい。
Further, by providing an island-shaped metal distribution layer between the organic layer and the cathode, the effect of reducing the ratio of the non-light emitting portion in the light emitting surface and the effect of improving the light emitting efficiency are obtained regardless of the kind of the cathode material. Obtainable. Therefore, the organic E
The cathode material can be arbitrarily selected according to various requirements such as stability of the L element and solderability. The cathode material may be any metal as long as it has conductivity, and may be a simple substance or a composite. Further, the cathode structure may be a single layer or a laminated structure of two or more layers. For example, Sc, T
i, V, Cr, Mn, Fe, Co, Ni, Cu, Zn,
Y, Zr, Nb, Tc, Ru, Rh, Pd, Ag, C
d, La, Hf, Ta, W, Re, Os, Ir, Pt,
Au, Al, Si, Ga, Ge, In, Sn, Tl, P
b etc. are mentioned. Also, Ce, Pr, Nd, Pm, S
m, Eu, Gd, Tb, Dy, Ho, Er, Tm, Y
Examples thereof include rare earth simple substances such as b and Lu, alkaline earth metals such as Mg, Ca, and Sr, alkali metals such as Li, K, and Rb, or semitransparent or opaque electrodes in which the above-mentioned elements are combined. Especially, M, which has a relatively small work function
When an alkaline earth metal such as g or a rare earth metal such as Sm is used, it may be used as a cathode by forming a complex with a metal having a relatively large work function, for example, a metal such as gold, copper, aluminum, platinum or silver. Good. In addition, a chemically stable metal such as gold, silver
One or more layers of copper, aluminum, platinum or the like may be laminated as a protective layer.

【0020】本発明における有機層(有機物からなる
層)は、陽極と陰極の間に有機物からなる蛍光物質を含
んでいればよい。蛍光物質としては、色素レ−ザ−用の
色素、蛍光増白剤または紫外線照射により蛍光を示す化
合物の中から任意に用いることができるが、希薄溶液中
での蛍光量子収率が10%以上のものが好ましい。10
%以下ではEL素子としたときに高い発光効率が得られ
ない。また、有機層は一層構造でも二層構造でも三層構
造でもよく、必要に応じて四層以上の構造でもよい。ま
た、有機層の形成方法も塗布でも蒸着でもよい。
The organic layer (layer made of an organic substance) in the present invention may contain a fluorescent substance made of an organic substance between the anode and the cathode. As the fluorescent substance, any of dyes for dye lasers, fluorescent brighteners, and compounds that exhibit fluorescence upon irradiation with ultraviolet rays can be used, but the fluorescent quantum yield in a dilute solution is 10% or more. Are preferred. 10
% Or less, high luminous efficiency cannot be obtained when used as an EL device. The organic layer may have a single-layer structure, a double-layer structure or a three-layer structure, and may have a structure of four or more layers if necessary. The organic layer may be formed by coating or vapor deposition.

【0021】有機層が一層構造の場合は、たとえば蒸着
や塗布により蛍光物質単体で有機層を形成してもよい
し、必要に応じて蛍光物質を含有する複合体として有機
層を形成してもよい。たとえば蛍光物質を例示すれば本
発明者らが特開平2−195683号公報で発光層とし
て挙げている以下のような化合物を使用してもよい。ナ
フタレン誘導体、アントラセン誘導体、ポリメチン系、
オキサゾール誘導体、オキサジアゾール誘導体、チアゾ
ール誘導体、8−ヒドロキシキノリノンおよびその誘導
体の金属錯体、ルテニウム錯体、希土類錯体およびこれ
らの誘導体などである。また、本発明者らが特開平4−
212286号公報で提案している塗布による分散型電
界発光素子に用いる有機層(蛍光物質、正孔移動供与
剤、電子移動供与剤からなる有機層)を使用してもよ
い。あるいは、本発明者らが特願平4−6759号にお
いて提案している有機発光素子に使用している発光層
(正孔移動供与剤と電子移動供与剤と蛍光物質からなる
層)と一重項酸素クエンチャ−を含有する層からなる有
機層を使用してもよい。
When the organic layer has a single-layer structure, the organic layer may be formed of the fluorescent substance alone by vapor deposition or coating, or may be formed as a complex containing the fluorescent substance, if necessary. Good. For example, if a fluorescent substance is given as an example, the following compounds that the present inventors have listed as the light emitting layer in JP-A-2-195683 may be used. Naphthalene derivative, anthracene derivative, polymethine derivative,
Examples thereof include oxazole derivatives, oxadiazole derivatives, thiazole derivatives, metal complexes of 8-hydroxyquinolinone and its derivatives, ruthenium complexes, rare earth complexes and their derivatives. In addition, the present inventors
You may use the organic layer (organic layer which consists of a fluorescent substance, a hole transfer donor, and an electron transfer donor) used for the dispersion-type electroluminescent element by the coating proposed by 212286 gazette. Alternatively, a singlet with a light emitting layer (a layer composed of a hole transfer donor, an electron transfer donor and a fluorescent substance) used in the organic light emitting device proposed by the present inventors in Japanese Patent Application No. 4-6759. An organic layer consisting of a layer containing an oxygen quencher may be used.

【0022】さらに、ポリパラフェニレンビニレン(P
PV)、ポリ(2、5−ジアルコキシ−P−フェニレン
ビニレン)(HOPPV)、ポリチェニレンビニレンな
どの導電性高分子を用いてもよい。有機層が二層構造の
場合は、たとえば、上述した蛍光物質単体や蛍光物質を
含有する複合物質を発光層とし、該発光層と陽極の間に
正孔注入層(正孔移動性化合を含む層)あるいは該発光
層と陰極の間に電子注入層(電子移動性化合物を含む
層)を設けて有機層としてもよい。より好ましくは、本
発明者らが特開平1−74988号公報に提案している
発光層と正孔輸送層からなる有機層を用いてもよいし、
特開昭63−264692号公報に提案されているホー
ル注入輸送帯と発光帯からなる有機層や特開昭59−1
94393号公報に提案されている正孔インジェクショ
ン帯域と有機発光帯域からなる有機層や特開昭57−5
1781号公報に提案されている正孔注入帯域と発光帯
域からなる有機層を用いてもよい。
Furthermore, polyparaphenylene vinylene (P
A conductive polymer such as PV), poly (2,5-dialkoxy-P-phenylene vinylene) (HOPPV), or polyphenylene vinylene may be used. When the organic layer has a two-layer structure, for example, the above-mentioned fluorescent substance alone or a composite substance containing the fluorescent substance is used as a light emitting layer, and a hole injection layer (including a hole mobility compound is included between the light emitting layer and the anode. Layer) or an electron injection layer (a layer containing an electron transfer compound) may be provided between the light emitting layer and the cathode to form an organic layer. More preferably, an organic layer composed of a light emitting layer and a hole transport layer proposed by the present inventors in JP-A-1-74988 may be used,
An organic layer composed of a hole injection transport zone and a light emission zone proposed in JP-A-63-264692, and JP-A-59-1
An organic layer composed of a hole injection zone and an organic emission zone proposed in Japanese Patent No. 94393 and JP-A-57-5.
An organic layer composed of a hole injection zone and an emission zone proposed in 1781 may be used.

【0023】正孔注入層として用いられる好ましい正孔
移動性化合物としては、イオン化ポテンシャルが8eV
より小さく、1×105 V/cmの電界強度における正
孔移動度が1×10-10 cm2 /V・sec以上の化合
物が用いられ、具体的な例として特開平4−21228
6号公報に示されている様な化合物を挙げることができ
る。より好ましくは、N,N′−ジフェニル−N,N′
−ジ(3−メチルフェニル)−1,1′−ビフェニル−
4,4′−ジアミンなどのトリフェニルアミン類、N−
イソプロピルカルバゾール、N−フェニルカルバゾール
などの3級アミン類、ピラゾリン誘導体、スチルベン系
化合物、オキサジアゾール類、ヒドラゾン系化合物、フ
タロシアニン類、縮合多環芳香族化合物など正孔移動能
を有することが知られた化合物が用いられ、正孔移動性
化合物と高分子結着剤の機能を兼ね備えたものとして、
ポリ(N−ビニルカルバゾール)、ポリ(4−ジフェニ
ルアミノフェニルメチルメタクリレート)、ポリ(4−
ジフェニルアミノフェニルメタクリレート)などのポリ
マー、ポリ(フェニルメチルシリレン)などのポリシリ
レン、などを挙げることができる。これらの正孔移動性
化合物は一種だけでもよいし、二種以上を組み合わせて
用いてもよい。さらに、正孔注入層は2層以上でもよ
い。
A preferable hole-transporting compound used as the hole-injecting layer has an ionization potential of 8 eV.
A smaller compound having a hole mobility of 1 × 10 −10 cm 2 / V · sec or more at an electric field intensity of 1 × 10 5 V / cm is used. As a specific example, JP-A-4-21228 is used.
Compounds such as those disclosed in JP-A-6 can be mentioned. More preferably, N, N'-diphenyl-N, N '
-Di (3-methylphenyl) -1,1'-biphenyl-
Triphenylamines such as 4,4′-diamine, N-
It is known to have hole transfer ability such as tertiary amines such as isopropylcarbazole and N-phenylcarbazole, pyrazoline derivatives, stilbene compounds, oxadiazoles, hydrazone compounds, phthalocyanines, and condensed polycyclic aromatic compounds. The compound having the function of a hole-transporting compound and a polymer binder is used.
Poly (N-vinylcarbazole), poly (4-diphenylaminophenylmethylmethacrylate), poly (4-
Examples thereof include polymers such as diphenylaminophenylmethacrylate) and polysilylenes such as poly (phenylmethylsilylene). These hole-transporting compounds may be used alone or in combination of two or more. Further, the hole injection layer may be two or more layers.

【0024】電子注入層に用いることのできる電子移動
性化合物としては、電子親和力が0.1eVより大きい
化合物が好ましく、具体的な例として特願平4−675
9号に示されているような化合物を挙げることができ
る。より好ましくは、2−(4′−tert−Bブチル
フェニル)−5−(4″−ビフェニル)−1,3,4−
オキサジアゾール、2,5−ビス(1−ナフチル)オキ
サジアゾールなどのオキサジアゾール誘導体、2−(1
−ナフチル)−5−フェニルオキサゾールなどのオキサ
ゾール誘導体、2−スチリルナフト〔1,2−d〕オキ
サゾールなどのスチリル化合物、ビニレン化合物、1,
1,4,4−テトラフェニルブタジエンなどのジアリー
ルブタジエン類、スチルベンなどのスチルベン化合物な
どであり、電子移動性化合物と高分子結着剤の機能を兼
ね備えたものとして、1,3,4−オキサジアゾール骨
格を主鎖あるいは側鎖に含む重合体などを挙げることが
できる。
As the electron transfer compound which can be used in the electron injection layer, compounds having an electron affinity of more than 0.1 eV are preferable, and as a concrete example, Japanese Patent Application No. 4-675.
The compounds as shown in No. 9 can be mentioned. More preferably, 2- (4'-tert-B butylphenyl) -5- (4 "-biphenyl) -1,3,4-
Oxadiazole derivatives such as oxadiazole and 2,5-bis (1-naphthyl) oxadiazole, 2- (1
-Naphthyl) -5-phenyloxazole and other oxazole derivatives, 2-styrylnaphtho [1,2-d] oxazole and other styryl compounds, vinylene compounds, 1,
Diaryl butadienes such as 1,4,4-tetraphenyl butadiene, stilbene compounds such as stilbene, and the like, which have both the functions of an electron transfer compound and a polymer binder, 1,3,4-oxadiene Examples thereof include polymers having an azole skeleton in the main chain or side chain.

【0025】さらに、ピレン、ペリレン、ペンタセン、
ルブレンなどの縮合多環芳香族化合物およびこれらのC
1〜C20アルキル置換体などが挙げられる。これらの
電子移動性化合物は一種だけでもよいし、二種以上を組
み合わせて用いてもよい。さらに、電子注入層は二層以
上でもよい。有機層三層構造の場合は、上述した有機層
一層の陰極側に電子注入層を設け、陽極側に正孔注入層
を設けて両方で挟み込み、有機層を三層構造にしてもよ
い。この場合の有機層としては本発明者らが特開平2−
255788号公報で提案している正孔注入輸送層、発
光層、正孔阻止層を陽極側から順次積層した構造の有機
層を用いることができる。このとき、正孔注入輸送層は
正孔注入層として、また正孔阻止層は電子注入層として
使用することができる。
Further, pyrene, perylene, pentacene,
Fused polycyclic aromatic compounds such as rubrene and their C
1-C20 alkyl substitution products and the like can be mentioned. These electron transfer compounds may be used alone or in combination of two or more. Furthermore, the electron injection layer may be two or more layers. In the case of a three-layer structure of an organic layer, an electron injection layer may be provided on the cathode side of one layer of the organic layer and a hole injection layer may be provided on the anode side and sandwiched between the two layers so that the organic layer has a three-layer structure. As the organic layer in this case, the inventors of the present invention have described in JP-A-2-
It is possible to use an organic layer having a structure in which a hole injecting and transporting layer, a light emitting layer, and a hole blocking layer, which are proposed in JP-A-255788, are sequentially stacked from the anode side. At this time, the hole injecting and transporting layer can be used as the hole injecting layer, and the hole blocking layer can be used as the electron injecting layer.

【0026】絶縁性支持体としては、特に限定はなく、
ポリエチレンテレフタレート、セルロースアセテート、
ポリカーボネート、ポリ塩化ビニル、などの可とう性の
支持体でもガラスでもよい。陽極としては絶縁性支持体
上に形成された透明あるいは不透明な導電性物質が用い
られるが、陰極が不透明な場合には陽極および支持体は
透明である必要がある。特に好ましい例としては、酸化
錫、酸化インジウム、酸化錫インジウム(ITO)など
の導電性酸化物あるいは金、銀、クロム、などの金属、
よう化銅、硫化銅などの無機導電性物質、ポリチオフェ
ン、ポリピロール、ポリアニリンなどの導電性ポリマー
などを挙げることができる。
The insulating support is not particularly limited,
Polyethylene terephthalate, cellulose acetate,
It may be a flexible support such as polycarbonate or polyvinyl chloride, or glass. A transparent or opaque conductive material formed on an insulating support is used as the anode, but when the cathode is opaque, the anode and the support need to be transparent. Particularly preferable examples are conductive oxides such as tin oxide, indium oxide, and indium tin oxide (ITO), or metals such as gold, silver, and chromium.
Examples thereof include inorganic conductive substances such as copper iodide and copper sulfide, and conductive polymers such as polythiophene, polypyrrole and polyaniline.

【0027】本発明の有機のEL素子は、カラーディス
プレイやフラットパネルディスプレイ、液晶ディスプレ
イのバックライト、複写機用の除電光源やプリンター用
光源のようなOA機器用として、車載用ディスプレイや
ストップランプ等の自動車用部品として、あるいは方向
指示機やテールランプのような自動車用部品として、さ
らには玩具用発光素子や道路工事用夜間表示など通常の
発光素子が用いられているような多くの用途に用いるこ
とができる。さらに、蛍光物質の選択によって種々の発
光色が得られることからフルカラーディスプレーにも使
用することができる。
The organic EL element of the present invention is used for OA equipment such as a color display, a flat panel display, a backlight of a liquid crystal display, a static elimination light source for a copying machine or a light source for a printer, an on-vehicle display, a stop lamp, etc. , Or as an automobile part such as a turn signal lamp or a tail lamp, and for many applications where ordinary light emitting elements such as light emitting elements for toys and night displays for road construction are used. You can Further, since various luminescent colors can be obtained by selecting a fluorescent substance, it can be used for a full color display.

【0028】以上、本発明の代表例として有機のEL素
子について詳細に説明したが、これは本発明における一
例に過ぎず、本発明をなんら制限するものではない。た
とえば、電子輸送層と正孔輸送層を積層した構造の光起
電力装置において、陰極と電子輸送層の界面に島状の金
属分布層を形成すれば、良好なダイオード特性あるいは
変換効率を有する光起電力装置として使用することがで
きる。さらに、ホトダイオードにも本発明を適用すれば
従来より優れた受光性能が得られる。
The organic EL element has been described in detail as a representative example of the present invention, but this is merely an example of the present invention and does not limit the present invention at all. For example, in a photovoltaic device having a structure in which an electron transporting layer and a hole transporting layer are stacked, if an island-shaped metal distribution layer is formed at the interface between the cathode and the electron transporting layer, a light emitting diode having good diode characteristics or conversion efficiency is obtained. It can be used as an electromotive force device. Further, if the present invention is applied to a photodiode, a light receiving performance superior to that of the conventional one can be obtained.

【0029】それ以外にも本発明は素子の動作過程にお
いて電極と機能層の間でキャリアの移動が存在する有機
膜の素子全般に適用でき、機能層としても多種多様なも
のを用いることが可能である。
In addition to the above, the present invention can be applied to general organic film elements in which carriers move between the electrode and the functional layer during the operation of the element, and various functional layers can be used. Is.

【0030】[0030]

【実施例】以下実施例により本発明をさらに詳しく説明
する。
The present invention will be described in more detail with reference to the following examples.

【0031】[0031]

【実施例1〜5および比較例1】ITOガラス〔HOY
A(株)製〕を、アセトン中で超音波洗浄し風乾したの
ち、紫外線洗浄装置〔センエンジニアリング(株)製
PL−10−110〕で5分間洗浄した。このITOガ
ラス上に、正孔移動供与剤としてポリ(N−ビニルカル
バゾール)〔BASF社製、Luvican M17
0〕1重量部、電子移動供与剤としてペリレン0. 12
重量部、蛍光物質として3−(2′−ベンゾチアゾリ
ル)−7−ジエチルアミノクマリン(クマリン6)0.
02重量部を含む1, 2−ジクロルエタン溶液からの浸
漬塗工により1000Aの厚さに発光層を形成した。つ
いでその有機層の上に、膜厚を水晶振動子(MAXTE
K社 P/N103200 QTY−5)でモニターし
ながら、平均膜厚約3ÅになるようにAu、Pt、C
u、Pd、Niの金属分布層を蒸着する(実施例1〜
5)。このとき、金属分布層を走査型電子顕微鏡で観察
したところ各金属は島状に分布しており、0.25μm
2 (500nm×500nm)当たり金属が存在しない
空隙部分の面積の割合(平均空隙率)は98%前後であ
った。さらにその上に陰極としてアルミニウムを150
0Å蒸着により積層する。この際、素子の発光面積はシ
ャドーマスクを介して0. 1cm2 の面積に規定した。
このようにして作製した素子にITOガラスを陽極とし
て、窒素気流下で直流電圧を印加すると全ての素子で緑
色の発光が観られた。この時の各金属分布層の発光効率
(素子に10(mA/cm2)の電流を流した時の発光輝度)
を金属分布層を設けなかった場合の例(比較例1)と合
わせて表1に示した。この表より、金属分布層を設ける
ことにより発光特性が著しく向上することがわかる。
Examples 1 to 5 and Comparative Example 1 ITO glass [HOY
A manufactured by Sen Engineering Co., Ltd., after ultrasonic cleaning in acetone and air drying.
PL-10-110] for 5 minutes. On this ITO glass, poly (N-vinylcarbazole) [manufactured by BASF, Luvican M17 as a hole transfer donor]
0] 1 part by weight, perylene 0.12 as an electron transfer agent
Parts by weight, 3- (2'-benzothiazolyl) -7-diethylaminocoumarin (coumarin 6) as a fluorescent substance.
A light emitting layer was formed in a thickness of 1000 A by dip coating from a 1,2-dichloroethane solution containing 02 parts by weight. Then, a crystal oscillator (MAXTE
K, P / N 103200 QTY-5) while monitoring Au, Pt, C so that the average film thickness is about 3Å
A metal distribution layer of u, Pd, and Ni is deposited (Examples 1 to 1).
5). At this time, when observing the metal distribution layer with a scanning electron microscope, each metal was distributed in an island shape, and it was 0.25 μm.
The ratio of the area of the void portion where no metal was present per 2 (500 nm × 500 nm) (average porosity) was about 98%. On top of that, 150 aluminum is used as a cathode.
Laminate by 0Å vapor deposition. At this time, the light emitting area of the device was regulated to an area of 0.1 cm 2 through a shadow mask.
When ITO glass was used as an anode for the devices thus produced and a direct current voltage was applied under a nitrogen stream, green light emission was observed in all the devices. Luminous efficiency of each metal distribution layer at this time (luminous luminance when a current of 10 (mA / cm 2 ) is passed through the device)
Is shown in Table 1 together with an example (Comparative Example 1) in which the metal distribution layer is not provided. From this table, it is understood that the emission characteristics are remarkably improved by providing the metal distribution layer.

【0032】[0032]

【実施例6】ITOガラス〔HOYA(株)製〕を、ア
セトン中で超音波洗浄し風乾したのち、紫外線洗浄装置
〔センエンジニアリング(株)製 PL−10−11
0〕で5分間洗浄した。この陽極となるITOガラス上
に、正孔移動供与剤としてポリ(N−ビニルカルバゾー
ル)〔BASF社製、Luvican M170〕1重
量部、電子移動供与剤としてペリレン0. 12重量部、
蛍光物質として3−(2′−ベンゾチアゾリル)−7−
ジエチルアミノクマリン(クマリン6)0. 02重量部
を含む1, 2−ジクロルエタン溶液からの浸漬塗工によ
り1000Åの厚さに有機層1を形成した。ついでその
有機層1の上に、膜厚を水晶振動子(MAXTEK社
P/N103200 QTY−5)でモニターしなが
ら、平均膜厚3ÅになるようにAu分布層1を蒸着す
る。このとき、Au分布層1を走査型電子顕微鏡で観察
したところAuは島状に分布しており、0.25μm2
(500nm×500nm)当たりAuが存在しない空
隙部分の面積の割合は97.5%であった[部位1と呼
ぶ]。
Example 6 ITO glass [manufactured by HOYA Co., Ltd.] was ultrasonically cleaned in acetone and air-dried, and then an ultraviolet cleaning device [PL-10-11 manufactured by Sen Engineering Co., Ltd.] was used.
0] for 5 minutes. On the ITO glass serving as this anode, 1 part by weight of poly (N-vinylcarbazole) [manufactured by BASF, Luvican M170] as a hole transfer donor, and 0.12 parts by weight of perylene as an electron transfer donor,
3- (2'-benzothiazolyl) -7- as a fluorescent substance
An organic layer 1 was formed to a thickness of 1000Å by dip coating from a 1,2-dichloroethane solution containing 0.02 parts by weight of diethylaminocoumarin (coumarin 6). Then, a crystal oscillator (MAXTEK
The Au distribution layer 1 is vapor-deposited so as to have an average film thickness of 3Å while monitoring with P / N 103200 QTY-5). At this time, when the Au distribution layer 1 was observed with a scanning electron microscope, Au was distributed in an island shape and 0.25 μm 2
The ratio of the area of the void portion where Au did not exist per (500 nm × 500 nm) was 97.5% [referred to as site 1].

【0033】一方、、両面ITOガラス(ガラスの表裏
の両面にITOを有する)をアセトン中で超音波洗浄し
風乾したのち、紫外線洗浄装置〔センエンジニアリング
(株)製 PL−10−110〕で5分間洗浄した。こ
の両面ITOガラス上の甲面に、正孔移動供与剤として
ポリ(N−ビニルカルバゾール)1重量部、電子移動供
与剤として2, 5−ビス(1−ナフチル)−1, 3, 4
−オキサジアゾール0. 9重量部、蛍光物質であるルブ
レン0. 02重量部を含む1, 2−ジクロルエタン溶液
からの浸漬塗工により1200Åの厚さに有機層2を形
成した。ついでその有機層2の上に膜厚を水晶振動子で
モニターしながら平均膜厚80ÅになるようにAu分布
層2を蒸着する。このとき、Au分布層2を走査型電子
顕微鏡で観察したところAuは島状に分布しており、
0.25μm2 (500nm×500nm)当たりAu
が存在しない空隙部分の面積の割合は約42%であっ
た。さらにその表面に陰極として片面ITOガラスのI
TO側をAu分布層2と接触させる向きで載せる[部位
2と呼ぶ]。
On the other hand, double-sided ITO glass (having ITO on both front and back surfaces of the glass) is ultrasonically cleaned in acetone and air-dried, and then 5 with an ultraviolet cleaning device [PL-10-110 manufactured by Sen Engineering Co., Ltd.]. Washed for minutes. On the upper surface of this double-sided ITO glass, 1 part by weight of poly (N-vinylcarbazole) as a hole transfer donor and 2,5-bis (1-naphthyl) -1,3,4 as an electron transfer donor.
An organic layer 2 having a thickness of 1200 Å was formed by dip coating from a 1,2-dichloroethane solution containing 0.9 part by weight of oxadiazole and 0.02 part by weight of rubrene as a fluorescent substance. Then, the Au distribution layer 2 is vapor-deposited on the organic layer 2 while monitoring the film thickness with a crystal oscillator so that the average film thickness becomes 80 Å. At this time, when the Au distribution layer 2 was observed with a scanning electron microscope, Au was distributed in an island shape,
Au per 0.25 μm 2 (500 nm × 500 nm)
The ratio of the area of the void portion in which there was no was about 42%. Furthermore, I of ITO glass on one surface is used as a cathode on the surface.
The TO side is placed so as to contact the Au distribution layer 2 [referred to as site 2].

【0034】そして、最後に部位1のAu分布層1と部
位2の両面ITOガラスの乙面を接触させ素子を完成す
る。この多層型素子の中心に位置する両面ITOガラス
を基準電圧(0V)に設定し、部位1のITOにプラス
の直流電圧を、部位2のITOにマイナスの直流電圧を
印加したところ、部位1からの緑色発光(C−6発光)
と部位2からの黄色(ルブレン発光)が重畳した発光が
得られた。このように、多層型の素子を作製することに
より様々な発光色を得ることができ、フルカラーも可能
である(図1参照)。
Finally, the Au distribution layer 1 in the region 1 and the second side of the double-sided ITO glass in the region 2 are brought into contact with each other to complete the device. The double-sided ITO glass located at the center of this multilayer element was set to a reference voltage (0 V), and a positive DC voltage was applied to the ITO of the part 1 and a negative DC voltage was applied to the ITO of the part 2, Green emission (C-6 emission)
Light emission was obtained by superimposing yellow (rubrene emission) from the region 2. As described above, various emission colors can be obtained by producing a multi-layer element, and full color is also possible (see FIG. 1).

【0035】[0035]

【実施例7】よく洗浄したITOガラス(松崎真空製、
30Ω/□)上に、真空蒸着法で電子受容性物質である
銅フタロシアニン(CuPc)を約300Åの厚さで、
次いで電子供与性物質であるN,N′−ジメチル−3,
4,9,10−ペリレンテトラカルボン酸ジイミドを約
500Åの厚さで設け、ついでその上に膜厚を水晶振動
子(MAXTEK社 P/N103200 QTY−
5)でモニターしながら、平均膜厚10Åになるように
Pt分布層を蒸着する。このとき、Pt分布層を走査型
電子顕微鏡で観察したところPtは島状に分布してお
り、0.25μm2(500nm×500nm)当たり
Ptが存在しない空隙部分の面積の割合は93%であっ
た。さらにその上に金を真空蒸着した。ITOと金がな
す面積は0.25cm2 とした。2つの電極に銀ペース
トにてリード線を取り付けた。この素子のITO側に、
75mW/cm2 の白色光を照射しながら、6mV/s
で掃引される電圧を印加して変換効率を測定したところ
Voc=0.43V、Jsc=0.91mA/cm2
ff=0.51となり変換効率が0.25%と島状のP
tを設けることにより光起電緑装置の性能を向上させる
ことができた。
[Example 7] Well-cleaned ITO glass (Matsuzaki Vacuum,
Copper phthalocyanine (CuPc), which is an electron-accepting substance, is deposited on 30 Ω / □ by a vacuum deposition method to a thickness of about 300Å.
Next, N, N'-dimethyl-3, which is an electron-donating substance,
4,9,10-perylene tetracarboxylic acid diimide was provided with a thickness of about 500 Å, and then a crystal oscillator (MAXTEK P / N 103200 QTY-
While monitoring in 5), a Pt distribution layer is vapor-deposited so as to have an average film thickness of 10Å. At this time, when the Pt distribution layer was observed with a scanning electron microscope, Pt was distributed in an island shape, and the ratio of the area of the void portion where Pt did not exist per 0.25 μm 2 (500 nm × 500 nm) was 93%. It was Further, gold was vacuum-deposited on it. The area formed by ITO and gold was 0.25 cm 2 . Lead wires were attached to the two electrodes with silver paste. On the ITO side of this element,
6 mV / s while irradiating with white light of 75 MW / cm 2.
The conversion efficiency was measured by applying a voltage swept by Voc = 0.43 V, Jsc = 0.91 mA / cm 2 ,
ff = 0.51 and conversion efficiency is 0.25% and island-shaped P
By providing t, the performance of the photovoltaic green device could be improved.

【0036】[0036]

【比較例2】実施例7において、島状のPt分布層を設
けないこと以外は、実施例3と同様にして素子を作製し
た。この素子のITO側に、75mW/cm2 の白色光
を照射しながら、6mV/sで掃引される電圧を印加し
て変換効率を測定したところVoc=0.31V、Js
c=0.19mA/cm2 、ff=0.33となり変換
効率が0.026%と明らかに実施例3より性能が悪か
った。
Comparative Example 2 A device was prepared in the same manner as in Example 3 except that the island-shaped Pt distribution layer was not provided. The conversion efficiency was measured by applying a voltage swept at 6 mV / s to the ITO side of this device while irradiating it with white light of 75 mW / cm 2 , and found that Voc = 0.31 V, Js
Since c = 0.19 mA / cm 2 and ff = 0.33, the conversion efficiency was 0.026%, which was clearly worse than that in Example 3.

【0037】[0037]

【表1】 [Table 1]

【0038】[0038]

【発明の効果】本発明は、従来より優れた動作性能、動
作安定性、信頼性を有する有機膜の素子を提供するもの
である。機能層としては多種多様なものを用いることが
可能であるが、特に効果の大きい有機膜の素子として有
機EL素子や太陽電池やホトダイオードを挙げることが
でき、たとえば、有機のEL素子においては、発光時の
未発光部分が少なく、発光の均一性に優れ、しかも高効
率な有機のEL素子を提供することができる。
Industrial Applicability The present invention provides an element of an organic film which has superior operating performance, operational stability and reliability than ever before. Although a wide variety of functional layers can be used, organic EL elements, solar cells, and photodiodes can be cited as particularly effective organic film elements. For example, in organic EL elements, It is possible to provide an organic EL device that has a small number of unlighted parts, is excellent in the uniformity of light emission, and is highly efficient.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例6の多層型素子の断面図説明図を示す。FIG. 1 shows a cross-sectional view explanatory diagram of a multi-layer element of Example 6.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 相対する電極間に一以上の層を有する有
機膜の素子において、上記相対する電極の少なくとも一
方と上記電極間に有する一以上の層との間に島状の金属
分布層を設けたことを特徴とする有機膜の素子。
1. An organic film element having one or more layers between opposing electrodes, wherein an island-shaped metal distribution layer is provided between at least one of the opposing electrodes and one or more layers between the electrodes. An organic film element characterized by being provided.
【請求項2】 陽極と陰極からなる電極間に有機層を有
する有機のEL素子において、該有機層が有機物からな
る蛍光物質を含み、該有機層と上記陰極との間に島状の
金属分布層を設けたことを特徴とする有機のEL素子。
2. An organic EL device having an organic layer between an electrode composed of an anode and a cathode, wherein the organic layer contains a fluorescent substance composed of an organic material, and an island-shaped metal distribution is provided between the organic layer and the cathode. An organic EL device having a layer.
【請求項3】 陽極と陰極からなる電極間に一以上の接
合面を有する光受光素子において、上記陰極と該陰極に
接する層の間に島状の金属分布層を設けたことを特徴と
する受光素子。
3. A light receiving element having one or more bonding surfaces between electrodes composed of an anode and a cathode, wherein an island-shaped metal distribution layer is provided between the cathode and a layer in contact with the cathode. Light receiving element.
【請求項4】 陽極と陰極からなる電極間に、正孔輸送
層と電子輸送層を積層した構造の光起電力装置におい
て、上記陰極と上記電子輸送層の間に島状の金属分布層
を設けたことを特徴とする光起電力装置。
4. In a photovoltaic device having a structure in which a hole transport layer and an electron transport layer are laminated between an electrode composed of an anode and a cathode, an island-shaped metal distribution layer is provided between the cathode and the electron transport layer. A photovoltaic device characterized by being provided.
JP20312993A 1993-08-17 1993-08-17 Organic film element Expired - Fee Related JP3229081B2 (en)

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Publication Number Publication Date
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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998030071A1 (en) * 1996-12-28 1998-07-09 Tdk Corporation Organic electroluminescent elements

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998030071A1 (en) * 1996-12-28 1998-07-09 Tdk Corporation Organic electroluminescent elements
US6344283B1 (en) 1996-12-28 2002-02-05 Tdk Corporation Organic electroluminescent elements
US6623872B2 (en) 1996-12-28 2003-09-23 Tdk Corporation Organic EL device
JP3654909B2 (en) * 1996-12-28 2005-06-02 Tdk株式会社 Organic EL device
US7097918B2 (en) 1996-12-28 2006-08-29 Tdk Corporation Organic EL device

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