JPH0753013A - Load transferring device in clean room - Google Patents

Abstract

PURPOSE:To enhance cleanness degree with both frictional sections and dust generating sources lessened by employing a linear servo mechanism to move a support means up and down for loads to be transferred, and also employing a direct motor for rotation. CONSTITUTION:The drive of a linear servo mechanism where a permanent magnet 46 is installed while being faced to an electromagnetic coil 46, moves a rod 43 up to a specified height, thereby moves up a rotor 31 supported at the upper end of the rod 43 from below, and thereby moves up its support arms 13. The support arms 13 are driven by a chuck motor 33 in such a way as to be freely approaching/separated. The drive of a direct motor composed of a yoke 51 and a permanent magnet 54 rotates a cylindrical body 52, a rotor 12 is then rotated by meshing the spline teeth of the cylindrical body 52 with the inner wall groove of the rotor 12, and the rotor 31 is simultaneously rotated by meshing the inner wall grooves of the rotor 12 with the spline teeth of the rotor 31, so that the support arms 13 are thereby rotated. When loads are transferred, a door 14 is simultaneously rotated, dust is simultaneously prevented from intruding.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load transfer device used in a clean room which is used for transporting and storing loads (articles) such as semiconductors that are extremely dustproof.

[0002]

2. Description of the Related Art As a conventional load transfer device in a clean room, for example, Japanese Patent Laid-Open No. 3-147606 discloses a load transfer device that transfers a load between a load storage device in a clean room and a self-propelled carriage. Is disclosed.

That is, as shown in FIGS. 2 and 3,
In the clean room 1, there is provided a load storage device 2 in which a shelf (not shown) having a plurality of compartment storage spaces is installed, and the load storage device 2 has a load handling section 3 formed in the center thereof.
Further, an opening 4 is formed on the front surface so as to face the handling section 3. A transport path 6 along which the self-propelled carriage 5 travels is laid outside the opening 4, and the load 7 is transferred between the self-propelled carriage 5 and the handling section 3 through the opening 4 in the opening 4. A load transfer device 8 for carrying out is arranged.

The load transfer device 8 includes a cylindrical base 11
A rotating body 12 rotatably arranged on the base 11 about a vertical axis, and a pair of left and right bodies projecting at symmetrical positions of the rotating body 12 so as to be vertically movable and movable toward and away from each other. Pair of supporting arms
13 and a pair of left and right door bodies 14 projecting in a direction orthogonal to the support arms 13 and capable of closing the opening 4. Although not shown, the load 7 has front and rear ridges formed on the upper portions of the left and right side surfaces, and the ridges can be supported by the support arms 13 of the transfer device 8 from below.

The internal mechanism of the load transfer device 8 will be described in detail with reference to FIG. A horizontal support member 21 is provided near the center of the base 11, and the horizontal support member 21 has a swing motor 22 and a lifting motor.
23 is fixed, and a cylindrical body 24A with a groove for vertically sliding a vertical shaft 24 provided with spline teeth is fixed to the center thereof. In addition, at the lower part of the cylindrical body 24A, the turning motor is provided.
A cylindrical body 27 is provided, which is connected to a pulley 25 fixed to a rotating shaft of 22 by an endless rotating body (belt or the like) 26 and provided with a groove that meshes with spline teeth of the vertical shaft 24. Also,
A rack 28 that moves up and down by driving a pinion connected to the drive shaft of the lifting motor 23 is provided, and a bearing 29 that rotatably supports the vertical shaft 24 from below is provided at the lower end of the rack 28. It is fixed by 29A. Also,
On the cylindrical body 24A, there is provided a cylindrical body 30 which is connected to the lower portion of the rotating body 12 and which is provided with a groove that meshes with the spline teeth of the vertical shaft 24. A rotating body 31 provided with a support arm 13 is rotatably provided on the upper end of the vertical shaft 24, and a sliding rail 32 is laid on the rotating body 31.
A chuck motor 33 that drives the support arm 13 so as to move toward and away from the support arm 13 is provided along the line 32. Further, spline teeth are provided on one side surface of the rotating body 31, and the rotating body 12 is provided with a wall body 34 in which a groove that meshes with the spline teeth is provided in the vertical direction.

With the above structure, the rack 28 is moved up and down by the drive of the up-and-down motor 23, so that the bearing 29 connected to the lower end of the rack 28 is simultaneously moved up and down, and thus the vertical shaft 24 is moved up and down, so that the rotating body 31 is moved. Support arm on the rotating body 31
13 moves up and down. In addition, the support arm 13 is a chuck motor 33.
Is driven so that the sliding rail 32 can be freely moved toward and away from the sliding rail 32. Further, by driving the turning motor 22, the cylindrical body 27 rotates via the pulley 25 and the endless rotating body 26, and the vertical shaft 24 rotates due to the engagement of the groove of this cylindrical body 27 and the spline teeth of the vertical shaft 24.
The rotating body 12 rotates due to the engagement between the spline teeth of the vertical shaft 24 and the groove of the cylindrical body 30, and the groove of the wall body 34 of the rotating body 12 and the rotating body.
The rotating body 31 is rotated by the engagement of the spline teeth of 31. At the same time, the door body 14 rotates. The support arm 13 is normally supported at the highest position.

Due to such an action, when the load 7 is loaded into the load storage device 2, when the load 7 is transported by the self-propelled carriage 5 before the opening 4, the supporting arm 13 on the transport path 6 side is separated. Then, the support arm 13 is lowered and brought close to the load 7,
, The support arm 13 is lifted to scoop the load 7, and in this state, the rotating body 12 is reversed to convey the load 7 onto the material handling section 3 and lower the support arm 13 to separate the load. By letting
The load 7 is unloaded on the handling section 13. After that, the support arm 13 is raised to complete the warehousing. When the load 7 is unloaded from the load storage device 2, the support arm 13 on the side of the load handling unit 3 is similarly driven to transfer the load 7 to the self-propelled carriage 5. Also, the door body
Reference numeral 14 reverses together with the rotating body 12 and closes the opening 4 except when this is reversed to prevent dust from entering the load storage device 2.

[0008]

However, according to the configuration of the conventional load transfer device 8 described above, there are many worn parts such as the use of the three motors 22, 23, 33, that is, the dust source is Since the amount of dust is large, the surface is unsuitable for use in the clean room 1. In addition, the mechanism is complicated and lacks reliability.

The present invention solves the above problems,
It is an object of the present invention to provide a load transfer device in a clean room with reduced dust generation sources and improved reliability.

[0010]

In order to solve the above-mentioned problems, a load transfer device in a clean room according to the present invention uses a linear servo mechanism as a means for moving up and down a supporting means for supporting a load to be transferred. A direct motor is used as a means for rotating the supporting means around the vertical axis.

[0011]

With the structure of the above invention, the supporting means for supporting the load to be transferred performs the scooping operation and the unloading operation of the load by the elevation of the load by the drive of the linear servo mechanism, and the rotation of the load by the drive of the direct motor. Rotate and transport.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The same components as those shown in FIGS. 2 to 4 of the conventional example are designated by the same reference numerals and the description thereof will be omitted.

FIG. 1 is a cross-sectional side view of essential parts of a load transfer device according to an embodiment of the present invention. Load transfer device 8'of the present invention
Is a modification of the internal actuator of the conventional load transfer device 8.

As shown in FIG. 1, a cylinder 41 is provided at the bottom of the base 11.
A vertical shaft 42 provided with spline teeth at the center of the vertical shaft 42, and a cylindrical rod 43 provided with a groove that meshes with the spline teeth of the vertical shaft 42 is inserted from above the vertical shaft 42. 43 is configured to be vertically slidable with respect to the vertical shaft 42. The rotating body 31 is rotatably supported on the center of the upper end of the rod 43.

A plurality of winding-shaped electromagnetic coils 45 are vertically provided on the inner wall of the upper portion of the cylindrical body 41 as the primary side stator of the linear servo mechanism, and the electromagnetic coils 45 are provided on the outer wall of the rod 43. A permanent magnet 46 is attached in the up-down direction so as to face the rod 43, and a current is controlled by a position detection signal of an encoder (not shown) that detects the up-and-down position of the rod 43 to energize the electromagnetic coil 45. Is configured to rise to a predetermined position above. Also, the rod 43
A cushion material 47 is attached to the lower end circumferential portion of the.

A yoke 51, around which a coil is wound, which corresponds to the stator of the direct motor, is fixed to the central portion of the rod 43, and the upper end of the rod 43 has a circumferential portion. A bearing 53 that supports a tubular body 52 corresponding to the rotor of the direct motor is provided, and a permanent magnet 54 is attached to the inner wall of the tubular body 52 so as to face the yoke 51. By energizing, the tubular body 52 is configured to rotate along the inner wall of the base 11.

Further, spline teeth are provided on the upper portion of the cylindrical body 52, and a groove that meshes with the spline teeth is provided on the inner wall of the rotating body 12 in the vertical direction. Therefore, the rotation of the cylindrical body 52 causes the rotation body 12 to rotate.

With the above construction, the rod 43 is moved up and down to a predetermined height by the driving of the linear servo mechanism, so that the rotating body 31 supported by the upper end of the rod 43 from below is moved up and down, and the supporting arm 13 is moved up and down. . The support arm 13 is driven by the chuck motor 33 so that the support arm 13 can approach and separate freely. Further, the direct motor is driven to rotate the cylindrical body 52, and the spline teeth of the cylindrical body 52 and the groove of the inner wall of the rotating body 12 mesh with each other to rotate the rotating body 12 to rotate with the groove of the wall body 34 of the rotating body 12. The rotating body 31 is simultaneously rotated by the engagement of the spline teeth of the moving body 31, and the support arm 13 is rotated. At the same time, the door body 14 rotates. The support arm 13 is normally supported at a predetermined upper height.

With the above operation, the load 7 can be transferred between the load handling unit 3 of the load storage device 2 and the self-propelled carriage 5 as in the conventional example. In this way, the support arm 13 of the load transfer device 8 '
By moving up and down by the linear servo mechanism and rotating by the direct motor, the wear portion is reduced, the dust source is reduced, the cleanliness can be improved, and higher response and reliability can be obtained. In addition, the mechanism is simplified, reliability can be obtained, and the size can be reduced.

In this embodiment, the chuck motor 33 is used for the approaching / separating operation of the support arm 13, but a linear servo mechanism may be used. As a result, the dust source is further reduced, and the cleanliness can be improved.

[0021]

As described above, according to the present invention, the wear portion is reduced by using the linear servo mechanism for raising and lowering the supporting means for supporting the load to be transferred and using the direct motor for rotation. Therefore, the number of dust generating sources is reduced, the cleanliness can be improved, and higher response and high reliability can be obtained. In addition, the mechanism is simplified, reliability can be obtained, and the size can be reduced.

[Brief description of drawings]

FIG. 1 is a cross-sectional side view of essential parts of a load transfer device according to an embodiment of the present invention.

FIG. 2 is a partially cutaway perspective view of a load storage facility including a conventional load transfer device.

FIG. 3 is a partial plan view of a load storage facility equipped with a conventional load transfer device.

FIG. 4 is a cross-sectional side view of essential parts of a conventional load transfer device.

[Explanation of symbols]

 1 Clean room 2 Load storage device 3 Handling section 4 Opening 5 Self-propelled carriage 6 Transport route 7 Load 8'Load transfer device 11 Base 12 Rotating body 13 Support arm 14 Door body 31 Rotating body 33 Chuck motor 41 Cylindrical body 42 Vertical Axis 43 Rod 45 Electromagnetic coil 46, 54 Permanent magnet 51 Yoke 52 Cylindrical body (rotor) 53 Bearing

Claims (1)

[Claims] 1. A clean room characterized in that a linear servo mechanism is used as means for moving up and down a supporting means for supporting a load to be transferred, and a direct motor is used as means for rotating the supporting means around a vertical axis. Transfer device inside.