JPH0747889Y2 - Mirror fixing device for laser oscillator - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mirror fixing device for a laser oscillator, which has improved tilt adjusting and fixing means for a resonant mirror of the laser oscillator.

_2. Description of the Related Art In a conventionally known CO ₂ laser oscillator, for example, an oscillator bends an optical path by a total reflection mirror and radiates a laser beam inside a resonator by a partial reflection mirror. These reflection mirrors form an optical path for resonating while maintaining a predetermined positional relationship with each other, and the reflection mirror 1 is provided in the middle of one side of the L-shaped mirror mounter 2 as shown in FIG. It is attached to the oscillator body 3 at three locations on both ends.

The problem to be solved by the invention is to mount the screws 4a, 4b, 4c fixedly implanted in the oscillator body 3.
Insert the holes in the mirror mounter 2 into each of the
It is fixed by sandwiching it between 7,8. To adjust the tilt of the reflection mirror, loosen the nuts 7 and 8 of the screw 4b to adjust the horizontal tilt, and loosen the nuts 7 and 8 of the screw 4c to adjust the vertical angle.

In order to displace the end of the mirror mounter 2 in this way, a screw
4a, 4b, 4c are formed in a shape and shape that facilitates bending. While the laser oscillator is operating, the blower is driven while the mixed gas for laser oscillation is circulated in the oscillator, so that vibration is generated. When this vibration is transmitted from the easily bendable screw to the reflection mirror 1, the inclination of the reflection mirror is slightly displaced, which causes fluctuations in the laser output, resulting in deterioration of the roughness of the cut surface during cutting.

The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to provide a mirror fixing device for a laser oscillator that can be adjusted easily and reliably.

Means for Solving the Problems In order to achieve the above-mentioned object, the present invention is characterized in that the arm end of an L-shaped mirror mounter in which a bending portion is fixed to an oscillator body and a mirror of a resonator is attached in the middle of one side is displaced. In a laser oscillator for adjusting the tilt of a mirror, a threaded rod that is implanted in the main body and protrudes through the arm end of the mirror mounter with a gap, and the threaded rod is inserted with a gap in the protruding portion. At least one set of spherical washer made of a pair of concave and convex washers, a holding pressure adjusting nut screwed through the screw rod end of the mirror mounter, and a holding pressure adjusting nut for pressing the spherical washer. A compression spring inserted between
The mirror mounter is screwed in parallel with the threaded rod, and the tip of the mirror mounter is brought into contact with the main body, and a bolt for adjusting the distance between the main body and the mirror mounter is included. To fix the mirror mounter.

In addition, a recess provided to clamp the arm end of the mirror mounter
A spherical washer and a spring member made of a pair of convex washers, a holding pressure adjusting member made of a bolt and a nut having a gap between the mirror mounter and a spherical hole through the spherical washer and the spring member, and a main body, and the main body. And a motor member that is fixed to and is screwed into a bolt of the adjusting member to be displaced in the axial direction.

In the mirror fixing device for a laser oscillator according to claim 1, first, the spring force between the spherical washers is adjusted to a force for holding the mirror mounter by adjusting in the horizontal direction, and then the distance from the oscillator body of the mirror mounter is changed by the bolt. At the end of adjustment, attach the spring between the spherical washers with the nut and fix the mirror mounter.

In the mirror fixing device for a laser oscillator according to claim 2, the nut is adjusted to assemble the spring pressure as a compression amount for supporting the weight of the mirror mounter, and the motor is rotated to change the distance of the adjusting member from the oscillator body. Determine the tilt of the mounter.

In the mirror fixing device of the laser oscillator according to the third aspect, the double nut is adjusted to the spring pressure for supporting the mirror mounter and fixed, and then the bolt is rotated to determine the distance between the oscillator body and the mirror mounter.

First Embodiment Referring to FIG. 1 showing mirror tilt adjusting means at both ends of an L-shaped mirror mounter 13 according to a first embodiment of the present invention, a screw rod 12 fixedly attached to an oscillator main body 11 and a hole 13a of the mirror mounter 13 are formed. It penetrates with a large gap. Two sets of spherical washer 14 and 15 consisting of a pair of concave and convex washers are inserted into the screw rod 12 with a gap, and a spring 16 is interposed between the spherical washers 14 and 15. And the nut 17 that adjusts the compression amount of the spring is screw rod 12
It is screwed to. A screw hole 13b is formed near the hole 13a of the mirror mounter 13, a bolt 18 is screwed into the screw hole 13b, and abuts on a screw receiver 11a on the end face of the oscillator body 11. It is also possible to omit one of the spherical washers 14 and 15.

In such a structure, in order to adjust the tilt of the mirror, first, the nut 17 is adjusted to adjust the tilt in the horizontal direction, and the spring is compressed so as to obtain a sufficient pressing force to support the weight of the mirror mounter 13. Determine the amount. Then bolt 18
The distance between the mirror mounter 13 and the oscillator body 11 is adjusted so that the inclination has a desired value. When the adjustment is completed, tighten the nut 17 to bring the spring 16 into close contact with the mirror mounter 13
The movement in the direction of the optical axis is sealed and fixed. This adjustment causes the mirror mounter 13 to move at an angle (usually
0.5 ° to 3 °), but it is sufficiently absorbed by the gap of the hole 13a and the spherical washer. Further, similarly, the inclination in the vertical direction is adjusted.

The second embodiment will be described with reference to FIG. In the hole 22a of the mirror mounter 22, a spherical washer 23 consisting of a pair of concave and convex washers is brought into contact with the counterbore part that is cut on the side opposite to the oscillator body. A bolt 24 having a considerable clearance is inserted into the hole 22a. Then, the disc spring 25 is inserted through the bolt and brought into contact with the oscillator body side of the mirror mounter 22. Further, a stepped washer 26 corresponding to the end face of the disc spring 25 is inserted into the bolt, and the nut 27 is screwed onto the bolt 24 to elastically hold the mirror mounter 22. A motor 28 is fixed to the oscillator body 21 at a position concentric with the bolt 24, and a screw 29 integral with the output shaft of the motor 28 is screwed into a screw hole of the bolt 24.

In such a configuration, the tilt is adjusted by adjusting the compression amount of the disc spring 25 with the nut 27 so as to support the weight of the mirror mounter 22 at the time of assembling and not to be displaced by the vibration force of the blower or the like before the adjustment. To adjust the horizontal tilt, give a command to the motor 28 and rotate the screw 29 to
That is, the distance from the oscillator body 21 of the mirror mounter 22 is changed. The motor 28 is preferably controlled so that the output of a laser output sensor (not shown) is maximized. Similarly, the tilt in the vertical direction is adjusted.

A third embodiment will be described with reference to FIG. The hole 32a of the mirror mounter 32 has a recess on the side opposite the oscillator body 31.
A spherical washer 33 consisting of a pair of convex washers is brought into contact, and a bolt 34 is inserted with a gap between the spherical washer 33 and the hole of the mirror mounter.
The flat washer 35 is inserted into the bolt 34 and brought into contact with the mirror mounter, the disc spring 36 is inserted thereover, and the stepped nut 37 is screwed. Further, the lock nut 38 is screwed onto the bolt and locked. The bolt 34 is screwed into the screw hole of the oscillator body 31.

In such a configuration, the stepped nut 37 is adjusted to a spring pressure that supports the weight of the mirror mounter 32 and is not displaced by the vibration of the blower. Then, the stop nut 38 is locked so that the stepped nut 37 is not loosened. Next, the bolt 34 is rotated to adjust the tilt of the mirror mounter 32 in the horizontal direction. During this adjustment, the step nut 37 is locked by the rotation of the bolt 34, so that the sliding spring pressure does not fluctuate with the disc spring 36. Similarly, the inclination in the vertical direction is adjusted.

Effects Since the present invention is configured as described above, the present invention has the following effects.

According to the mirror fixing device of the laser oscillator of claim 1, since the mirror mounter is elastically held and the spherical washer is interposed, the adjustment is easy without twisting, and after adjustment, it is securely fixed by the tight contact of the spring and the oscillation output due to vibration is generated. It is possible to obtain a stable oscillator without fluctuation.

According to the mirror fixing device of the laser oscillator of the second aspect, the rotation of the motor can be performed by remote control, and the position can be adjusted without exposing the inside of the oscillator to the atmosphere.

The mirror fixing device of the laser oscillator according to claim 3 is securely fixed without twisting.

[Brief description of drawings]

FIG. 1 is an explanatory view of a mirror tilt adjusting section of the first embodiment of the present invention, FIG. 2 is an explanatory view of a mirror tilt adjusting section of the same second embodiment, and FIG. 3 is a mirror tilt of the third embodiment. FIG. 4 is an explanatory view of the adjusting part, FIG. 4 is a view showing a mounting state of the mirror mounter, and FIG. 5 is a view showing a conventional supporting state of the mirror mounter. 13,22,32 …… Mirror mounter 12 …… Screw rod 11,21,31 …… Oscillator body 14,15,23,33 …… Spherical washer 16 …… Spring, 17,27 …… Nut 18,24,34 ...... Bolt 25,36 ...... Disc spring, 37 ...... Step nut 38 ...... Stop nut

Claims (2)

[Scope of utility model registration request] 1. A laser oscillator in which a bent portion is fixed to an oscillator body and an arm end of an L-shaped mirror mounter in which a mirror of a resonator is attached midway on one side is displaced to adjust the tilt of the mirror. ) And a screw rod (12) projecting through the arm end of the mirror mounter (13) with a gap, and a recess inserted through the protrusion of the screw rod (12) with a gap. -At least one set of spherical washers (14) consisting of a pair of convex washers, a nut (17) for adjusting the holding pressure of the mirror mounter (13) that is threaded through the end of the screw rod (12), and the spherical washer ( 14) A compression spring (16) inserted between the holding pressure adjusting nut and the holding pressure adjusting nut, and the mirror mounter (13) is screwed in parallel with the screw rod (12) so that the tip of the body is the same. A bolt for adjusting the distance between the main body and the mirror mounter by abutting against (11) 18) and comprises a mirror fixing device of the laser oscillator, characterized in that after the tilt adjustment of the mirror to fix the mirror mounter by contact springs. 2. A laser oscillator in which a bent portion is fixed to an oscillator body and an arm end of an L-shaped mirror mounter in which a mirror of a resonator is attached midway on one side is displaced to adjust the tilt of the mirror. The spherical washer (23) and the spring member (25), which are a pair of concave and convex washers provided so as to sandwich the arm end of (22), and the mirror mounter (22), have a gap between the spherical washer and the spring member. Holding pressure adjusting member (24,2) consisting of a bolt and nut that penetrates through and has a screw hole in the center
7) and the member (24,
27) A mirror fixing device for a laser oscillator, comprising a motor member (28, 29) screwed onto the bolt of 27) to be displaced in the axial direction.