JPH0745887A - Solid-state laser device, laser machining apparatus and coating method for optical fiber - Google Patents

Abstract

PURPOSE:To transmit a laser beam to an optical fiber by a simple constitution while the incident loss is suppressed extremely small. CONSTITUTION:A condenser lens 80 which is used to reduce a beam diameter is installed inside a laser resonator R, the incident edge of an optical fiber 9 for laser-beam propagation constitutes a part or the whole of an output mirror for the laser resonator R, and a laser beam 7 is guided directly into the optical fiber 9.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state laser device that emits laser light having a high directivity, a laser processing device that performs laser processing using the laser light, and a coating method for an optical fiber that guides the laser light. is there.

[0002]

2. Description of the Related Art FIG. 25 is, for example, edited by Laser Society, "Laser Handbook", Ohmsha, p. It is sectional drawing which shows the solid-state laser apparatus which applied the conventional laser apparatus shown by 222, 1 is a total reflection mirror, 2 is an output mirror by which the partial reflection coating was given in the figure.

Further, 3 is a solid-state element containing an active solid medium, and in the case of a YAG laser, Nd is used as the active solid medium.
Doped Nd: YAG (Yttrium Al
A minimum light source 4 is a light source, and is formed of, for example, an arc lamp.

Reference numeral 5 is a power source for turning on the light source 4, and 6 is a condenser of the light source 4. For example, the cross-sectional shape is elliptical and the inner surface is composed of a light reflecting surface. 7 is a total reflection mirror 1 and an output 2
Laser light generated in the laser resonator composed of
Is a laser beam extracted to the outside.

Further, 8 is a coupling lens for guiding laser light to an optical fiber, 9 is an optical fiber for transmitting laser light, 100 is a base, 101 is a lens holder, 1
Reference numeral 02 is an optical fiber holder.

Next, the operation will be described. The conventional solid-state laser device is configured as described above, the light source 4 and the solid-state element 3 are arranged in the condenser 6, and the light projected from the light source 4 is condensed and incident into the solid-state element 3. . As a result, the active solid medium is excited to become a laser medium.

The spontaneous emission light generated from the laser medium is
The laser light 7 is amplified while reciprocating between the laser resonators composed of the mirrors 1 and 2, and when the laser light reaches a size equal to or larger than a predetermined value, the laser light 70 having good directivity is output to the outside of the laser resonator R. Is released.

The laser light 70 extracted to the outside is condensed and irradiated onto the incident end surface of the optical fiber 9 by the coupling lens 8 and guided into the optical fiber 9.

[0009]

Since the conventional solid-state laser device is constructed as described above, the coupling lens 8 is indispensable for introducing the laser light into the optical fiber 9, and therefore the device is required. In addition to being complicated, there is a problem that the position of the optical fiber needs to be adjusted, and the loss due to the reflection of the laser light 70 on the lens and the end face of the optical fiber cannot be avoided.

The inventions of claims 1 to 7 have been made to solve the above-mentioned problems, and have a simple device configuration, and the incident loss due to reflection on the optical fiber can be suppressed to a very small level. The object is to obtain a solid-state laser device capable of

Further, in the inventions of claims 8 to 10, the laser light can be guided to a plurality of optical fibers at the same time, the structure of the device is simple, and the incident loss due to reflection on the optical fibers can be extremely reduced. The object is to obtain a solid-state laser device capable of

It is another object of the present invention to provide a laser processing apparatus capable of efficiently performing laser processing.

It is another object of the present invention to provide a solid-state laser device capable of introducing light for wavelength stabilization from outside the laser resonator with a simple device configuration.

Further, the invention of claims 15 and 16 aims at obtaining a solid-state laser device capable of monitoring output light with a simple device configuration or easily finding a resonator condition for obtaining a maximum output. And

The invention of claim 17 is a coating of an optical fiber used in a solid-state laser device according to any one of claims 1 to 9 and claims 13 to 15 and a laser processing device according to any one of claims 10 to 12. It is an object of the present invention to obtain an optical fiber coating method that can be carried out inexpensively and easily.

[0016]

According to another aspect of the present invention, there is provided a solid-state laser device in which a lens for reducing a beam diameter is installed inside a resonator, and an incident end face of an optical fiber for propagating a laser beam is a laser output. It is configured to be a part or all of the mirror.

The solid-state laser device according to the invention of claim 2 is
The output mirror is configured so as to serve as a means for introducing a beam into the optical fiber.

A solid-state laser device according to the invention of claim 3 is
A cylindrical output mirror is used, the diameter of which is approximately equal to the diameter of the optical fiber, and the output mirror is placed in close contact with or close to the optical fiber.

A solid-state laser device according to the invention of claim 4 is
An output mirror having a truncated cone is used, the diameter of its tip is made substantially equal to the diameter of the optical fiber, and the output mirror is placed in close contact with or close to the optical fiber.

The solid-state laser device according to the invention of claim 5 is
A graded index lens is used as an output mirror, and this is placed in close contact with or close to an optical fiber.

The solid-state laser device according to the invention of claim 6 is
A total reflection coating is applied to the end face of the laser medium on the laser light emission side, and the incident end face of the transmission optical fiber is brought into close contact with the laser light emission end face of the laser medium.

A solid-state laser device according to the invention of claim 7 is
The optical fiber and the laser light are coupled in the laser resonator, and the laser resonator is constituted by the emitting end face of the optical fiber and the total reflection mirror.

A solid-state laser device according to the invention of claim 8 is
An optical fiber bundle is used in the solid-state laser device according to any one of claims 1 to 7.

The solid-state laser device according to the invention of claim 9 is
The laser resonator is an unstable resonator, and the optical fiber bundle is installed at the position of the laser output portion of the output mirror of the unstable resonator.

According to a tenth aspect of the present invention, in a solid-state laser device, an incident end surface of an optical fiber bundle for propagating laser light is a concave surface and a partial reflection coating is applied, and each is an output mirror of an independent laser resonator. It is configured to be a part or a whole.

A laser processing apparatus according to an eleventh aspect of the present invention collects laser light generated from the solid-state laser apparatus according to any one of the first to tenth aspects and propagated through an optical fiber. The optical system collects the light and laser processing is performed.

According to a twelfth aspect of the present invention, there is provided a laser processing device, wherein the laser light generated from the solid-state laser device according to any one of the eighth to tenth aspects and propagated through a plurality of optical fibers is provided. Condensing with multiple condensing optics,
A plurality of laser processings are simultaneously performed.

According to a thirteenth aspect of the present invention, there is provided a laser processing apparatus including the solid-state laser device according to any one of the eighth to tenth aspects, wherein a plurality of focusing optical systems are provided in each of the solid-state laser devices. A plurality of laser beams propagated by different optical fibers are collectively focused and a plurality of laser processes are simultaneously performed.

In the solid-state laser device according to the fourteenth aspect of the present invention, a part or all of the total reflection mirror of the laser resonator is constituted by the end face of the optical fiber, and the end face on the opposite side of the optical fiber by the oscillation wavelength stabilizing means. The light for stabilizing the oscillation wavelength is made to enter.

In the solid-state laser device according to the fifteenth aspect of the present invention, a part or all of the total reflection mirror of the laser resonator is constituted by an end face of the optical fiber, and an optical monitor is installed on the opposite end face of the optical fiber. It is a thing.

According to a sixteenth aspect of the present invention, in addition to the solid-state laser device according to the fifteenth aspect, a solid-state laser device is provided with means for automatically adjusting the angle of the output mirror.

In the optical fiber coating method according to the seventeenth aspect of the present invention, a large number of optical fibers are placed in a cylindrical jig made of metal, glass or resin having smooth side surfaces with an adhesive or the like. Fix with no gaps, polish the end faces of the optical fibers together with the jig, and use the side faces of the jigs to introduce the end faces of the optical fibers into the vacuum chamber and coat the end faces of the optical fibers at the same time. It is the one.

[0033]

In the solid-state laser device according to the first aspect of the invention, the optical fiber is directly coupled to the laser resonator as an output mirror, and all the laser light is directly extracted into the optical fiber.

In the solid-state laser device according to the second aspect of the present invention, the laser output from the output mirror is directly coupled to the end face of the optical fiber by the output mirror itself, and the laser light is efficiently extracted into the optical fiber.

In the solid-state laser device according to the third aspect of the present invention, the laser light propagates through the cylindrical output mirror to the end face of the optical fiber while repeating total internal reflection, and the laser light is efficiently extracted into the optical fiber.

In the solid-state laser device according to the invention of claim 4, the laser light propagates to the end face of the optical fiber while reducing the beam diameter by repeating total internal reflection in the conical output mirror, and the laser light is efficiently emitted from the optical fiber. Taken out inside.

In the solid-state laser device according to the fifth aspect of the invention, the laser light is focused on the end face of the optical fiber by the output mirror which is a graded index lens, and the laser light is efficiently extracted into the optical fiber.

In the solid-state laser device according to the sixth aspect of the present invention, the laser light is directly extracted into the optical fiber without loss only from the portion where the optical fiber is in close contact with the laser medium.

In the solid-state laser device according to the invention of claim 7, the optical fiber itself is incorporated in the laser resonator, and all the generated laser light is directly extracted from the optical fiber without loss.

The solid-state laser device according to the invention of claim 8 efficiently transmits light to each of the optical fibers of the optical fiber bundle with a simple structure.

In the solid-state laser device according to the ninth aspect of the present invention, since a plane wave is generated at the position of the end face of the optical fiber due to the unstable resonator, the light is uniformly transmitted to each optical fiber of the optical fiber bundle without loss.

In the solid-state laser device of the tenth aspect of the present invention, since the laser resonator is formed independently for each optical fiber of the optical fiber bundle, the light is uniformly transmitted to all the optical fibers without loss.

According to the eleventh aspect of the present invention, in the laser processing apparatus, the laser light generated from the solid-state laser device is transmitted to the vicinity of the workpiece, and the focusing optical system focuses the laser light on the surface of the workpiece, thereby improving efficiency. Process well.

According to the twelfth aspect of the present invention, in the laser processing apparatus, a plurality of laser beams generated by the solid-state laser apparatus are transmitted to the vicinity of a plurality of workpieces, and the focusing optical system focuses the laser beams on the workpiece surface. As a result, a single solid-state laser device can efficiently perform a plurality of laser processes simultaneously.

In the laser processing apparatus according to the thirteenth aspect of the present invention, since light from a plurality of solid-state laser devices is propagated to each condensing optical system, even if one solid-state laser device fails, each processing is performed. It has almost no effect on the device,
Simultaneously and reliably perform multiple laser processing.

In the solid-state laser device according to the fourteenth aspect of the present invention, since the light for stabilizing the oscillation wavelength is incident from the end face of the optical fiber forming a part of the laser resonator, the wavelength of the solid-state laser device is stabilized with a simple structure. Turn into

In the solid-state laser device according to the fifteenth aspect of the present invention, since the monitor light is guided directly to the optical monitor from the optical fiber forming a part of the laser resonator, the operating condition of the solid-state laser device is monitored with a simple structure.

According to the sixteenth aspect of the present invention, the solid-state laser device stabilizes the operation of the solid-state laser device by adjusting the angle of the output mirror by the output obtained from the optical monitor through the optical fiber forming a part of the laser resonator. Turn into.

The method of coating an optical fiber according to the invention of claim 17 is any one of claims 1 to 10 and 1.
A large number of optical fibers used in the solid-state laser device according to claims 4 to 16 and the laser processing device according to claims 11 to 13 are simultaneously polished and coated simultaneously.

[0050]

EXAMPLES Example 1. An embodiment of the invention of claim 1 will be described below with reference to the drawings. In FIG. 1, 1 is a total reflection mirror and 2 is an output mirror having a partial reflection coating.

Reference numeral 3 is a solid-state element containing an active solid medium, and in the case of a YAG laser, Nd is used as the active solid medium.
Doped Nd: YAG (Yttrium Al
A minimum light source 4 is a light source, and is formed of, for example, an arc lamp.

Reference numeral 5 is a power source for turning on the light source 4, and 6 is a condenser of the light source 4, which has, for example, an elliptical cross section and an inner surface formed of a light reflecting surface. Reference numeral 7 denotes a laser beam generated in the laser resonator composed of the mirrors 1 and 2.

Further, 80 is a condenser lens (condensing optical system) installed inside the resonator, and 91 is a partial reflection coating for partially reflecting the laser applied to the incident end face of the optical fiber 9. Further, the solid-state element 3 and the condenser lens 8
Both end surfaces of 0 are coated with a non-reflective coating for laser light.

Further, 9 is an optical fiber for transmitting a laser beam, 100 is a base, 101 is a lens holder, 1
Reference numeral 02 is an optical fiber holder.

Next, the operation will be described. The light source 4 and the solid-state element 3 are arranged in a condenser 6 whose inner surface is a reflector for the light source 4, such as a white ceramic. Power 5
Light is emitted from the light source 4 which is turned on, and the emitted light is guided to the solid-state element 36 directly or indirectly after being reflected in the condenser 6.

Part of the light guided to the solid-state element 3 is absorbed by the solid-state element 3 and excites the solid-state element 3 to form a laser medium. Spontaneous emission light generated from the laser medium is partially reflected by the total reflection mirror 1 and the end face of the optical fiber 9 by the partial reflection coating 91.
The laser light 7 is amplified while going back and forth between the laser resonators R formed by and the partial reflection coating 91.
The light is guided directly into the optical fiber 9 via.

Generally, the causes of the loss of incidence of laser light on the optical fiber include reflection at the end face of the optical fiber and the fact that the beam diameter is larger than the optical fiber diameter. In this embodiment, the reflected light at the end face of the optical fiber 9 is fed back into the laser oscillator R as it is, and therefore does not cause a loss.

Generally, the solid-state element 3 having a diameter of 3 mm or more is used, and the diameter of the optical fiber 9 is 1 mm or less. The beam diameter at each position is such that the arrangement of the condenser lens 80 and the structure of the resonator are devised. Thus, it can be set to a sufficiently practical value.

For example, the solid element 3 has a diameter of 4 mm and a length of 1
The total reflection mirror 1 has a curvature of 1 m, a condenser lens 80 has a condenser distance of 50 mm, a condenser lens 80 has a focal length of 50 mm, and is arranged at a focal position of the condenser lens 80 using Nd: YAG of 00 mm. Assuming that the end face of the optical fiber 9 is a flat surface and the distance between the total reflection mirror 1 and the condenser lens 80 is 400 mm, the beam diameter of the partial reflection coating 91 of the end face of the optical fiber 9 of the laser light 7 on the end face of the solid-state element 3 is The beam diameter is less than 1/10.

Therefore, the core diameter of the optical fiber 9 is 400 μm.
When it is set to about m, the incident loss of the laser light 7 on the optical fiber 9 is almost eliminated, and the oscillated laser light 7 can be guided to the optical fiber 9 extremely efficiently.

In the above embodiment, the single condenser lens 8 is used.
Although the example using 0 is shown, a telescope including a plurality of lenses may be used.

Further, in the above embodiment, an example of the oscillator having the fundamental wavelength of the solid-state laser is shown. However, a harmonic generating element or the like is introduced inside the laser resonator R to generate a second harmonic or a higher harmonic. It may be applied to a laser to be generated.

Further, although the lamp-pumped solid-state laser is shown in the above-mentioned embodiment, it may be applied to a semiconductor-laser-pumped solid-state laser, or another laser, and the same effect as that of the above-mentioned embodiment can be obtained.

Example 2. 2 is a sectional view showing another embodiment of the invention of claim 1, in which 2 is an output mirror, 10 is an index matching liquid, 21 is a total reflection coating of the output mirror 2, and The incident end face is in close contact with the total reflection coating 21 of the output mirror 2 via the index matching liquid 10.

Further, the total reflection coating 21 maintains the total reflection property as long as it is in contact with the air, but transmits a part of light only in the portion in contact with the index matching liquid 10.

The laser light 7 is focused by the condenser lens 80 at the position of the total reflection coating 21 of the output mirror to the optical fiber 9.
The diameter of the laser beam 7 is less than or equal to the diameter of the above, and the generated laser light 7 is directly guided into the optical fiber 9 through the index matching liquid 10.

According to this embodiment, even if the optical fiber 9 is damaged, the optical fiber 9 can be easily replaced with another one. Further, even if the beam diameter at the incident end face of the optical fiber 9 is larger than the diameter of the optical fiber 9, the total reflection coating 21 returns it to the inside of the laser resonator R and does not cause a loss.

Although the index matching liquid 10 is used in this embodiment, the leaked light may be guided to the optical fiber 9 by simply bringing the optical fiber 9 into close contact. Further, the coating 21 of the output mirror 2 may be a partial reflection coating, and the optical fiber holder 102 may be configured to be totally reflective to the laser light.

Example 3. FIG. 3 is a sectional view showing an embodiment of the invention of claim 3, wherein 2A is a cylindrical output mirror and 22 is a partial reflection coating of the output mirror 2A. The side surface of the output mirror 2A is optically polished, and its diameter is configured to be substantially equal to the core diameter of the optical fiber 9.

The incident surface of the optical fiber 9 is the output mirror 2A.
It is placed close to or close to. The laser light 7 has a diameter equal to or smaller than the diameter of the optical fiber 9 at the position of the partial reflection coating 22 of the output mirror 2A by the condenser lens 80 and is directly guided into the output mirror 2A.

Laser light 7 that spreads inside the output mirror 2A
Is repeatedly guided by the side surface of the cylindrical mirror and guided directly to the optical fiber 9 having substantially the same core diameter, so that the laser light 7 is guided to the optical fiber 9 with almost no loss.

According to this embodiment, since the laser resonator R and the optical fiber 9 can be separated while eliminating the loss of the optical fiber 9, it becomes easy to change the laser resonator R and maintain the optical fiber 9.

Example 4. FIG. 4 is a sectional view showing an embodiment of the invention of claim 4, in which 2B is an output mirror having a shape in which the tip of a cone is cut off. The side surface of the output mirror 2B is optically polished and is not coated or is coated to ensure total reflection.

The diameter of the tip of the output mirror 2B is configured to be substantially equal to the core diameter of the optical fiber 9, and the incident surface of this optical fiber 9 is placed in close contact with or close to the output mirror 2B.

Although the diameter of the laser beam 7 is large at the position of the partial reflection coating 22 of the output mirror 2B, the laser beam 7 is guided to a small region in the output mirror 2B while repeating total reflection on the side surface of the conical mirror. Then, it is coupled to the optical fiber 9 having a core diameter substantially the same as the diameter of the tip of the cone. With the above operation, the laser light is transmitted to the optical fiber 9 with almost no loss.
Be led to.

According to this embodiment, the number of parts is reduced, the reliability of the device is increased, and since the condenser lens 80 is not required inside the laser resonator R, the laser resonator R can be easily adjusted.

Example 5. FIG. 5 is a sectional view showing an embodiment of the invention of claim 2, in which 2C is an output mirror having a function of a convex lens. The incident surface of the optical fiber 9 is arranged at a position separated from the position of the output mirror 2C by the focal length of the convex lens formed by the output mirror 2C.

The laser light 7 is condensed on the incident end face of the optical fiber 9 by the output mirror 2C having a function of a convex lens, and is efficiently guided into the optical fiber 9.

According to this embodiment, since the output mirror 2C has a normal shape, the cost is low and the adjustment of the laser resonator R is easy.

Example 6. FIG. 6 is a cross-sectional view showing an embodiment of the invention of claim 5, in which 11 is a graded index lens, the focal point of which is located at the lens end surface. Reference numeral 111 is a partial reflection coating applied to the graded index lens 11.

The entrance surface of the optical fiber 9 is placed in close contact with or close to the graded index lens 11. The laser light 7 is condensed on the opposite end face by the graded index lens 11 and is efficiently guided into the optical fiber 9 which is in close contact with or close to the end face.

According to this embodiment, since the focus position of the laser beam 7 is always at the center of the end face of the graded index lens 11, the position setting of the optical fiber 9 becomes easy.

In each of the above embodiments, the optical fiber 9 is simply used.
However, the optical fiber 9 and the graded index lens 11 may be coupled by optical contact. Further, the index matching liquid 10 may be interposed between the optical fiber 9 and the graded index lens 11.

Example 7. FIG. 7 is a sectional view showing an embodiment of the invention of claim 6, in which 31 is a solid-state element 3.
It is a total reflection coating applied to the end surface of. The incident end face of the optical fiber 9 is closely attached to the solid-state element 3 or is disposed in proximity to the solid-state element 3 with the index matching liquid 10 interposed therebetween, and only the portion close to or close to this is partially reflected by the laser light 7.

The laser resonator R is formed between the total reflection mirror 1 and the total reflection coating 31 of the solid-state element 3, and the oscillated laser light 7 is extracted only from the incident end face of the optical fiber 9, so that the laser output is It is efficiently transmitted into the optical fiber 9.

According to this embodiment, each of the output mirrors 2, 2A, 2B, 2C and the condenser lens 12 as in the above embodiments can be dispensed with, so that the structure is very simple and the cost is low. .

Example 8. FIG. 8 is a sectional view showing an embodiment of claim 8, and in the figure, 31 is a total reflection coating applied to the end face of the solid-state element 3. Reference numeral 90 denotes an optical fiber bundle, the incident end face of which is in close contact with the solid-state element 3 or close to the solid-state element 3 with the index matching liquid 10 interposed therebetween.

As in the seventh embodiment, the laser resonator R
Is the total reflection mirror 1 and the total reflection coating 3 of the solid-state element 3.
Since the laser light 7 oscillated between the laser light 1 and the laser light 1 is extracted only from the incident end face of the optical fiber bundle 90, the laser output is efficiently transmitted into the optical fiber bundle 90.

According to this embodiment, each output mirror 2, 2
Not only does A, 2B, 2C and the condenser lens 80 become unnecessary, but also with a simple configuration, laser light can be efficiently guided to a plurality of optical fibers at the same time.

Example 9. FIG. 9 is a sectional view showing an embodiment of the invention of claim 9 in which 2D is an output mirror and 21 is a total reflection coating applied to the center of the output mirror 2D. The curvature of the output mirror 2D is set so as to form a so-called negative branch unstable resonator together with the total reflection mirror 1.

As shown in FIG. 10, the optical fiber bundle 90 is arranged side by side around the total reflection coating 21, and its end face is polished so as to coincide with the face of the output mirror 2D. 9 is the output mirror 2
The structure is embedded in D.

In this embodiment, the spontaneous emission light generated from the laser medium is amplified while reciprocating in the laser resonator R formed between the total reflection coating 21 of the total reflection mirror 1 and the output mirror 2D. , Laser light 7.

In the figure, the laser light 7 propagating from left to right is a plane wave, and the laser light propagating from right to left is once condensed in the laser resonator R and then expanded to reach the total reflection mirror 1. , Becomes a plane wave again by the total reflection mirror 1 and propagates to the right. Of the laser light 7 reaching the output mirror 2D, the light reaching the outside of the total reflection coating 21 is guided to the optical fiber 9.

According to this embodiment, the laser light 7 can be efficiently guided to a plurality of optical fibers at the same time. Moreover, since the unstable resonator is used, the laser light is uniformly guided to all the optical fibers 9.

Although the end face of the optical fiber 9 is non-reflective in the above embodiment, the end face of the optical fiber 9 may not necessarily be coated.

Example 10. FIG. 11 is a sectional view showing another embodiment of the invention of claim 9, in which 2E is an output mirror, 21 is a total reflection coating applied to the center of the output mirror 2E, and 22 is an output mirror 2E. It is a non-reflective coating.

In this embodiment, the surface of the total reflection coating 21 of the output mirror 2E serves as a resonator mirror, and like the ninth embodiment, the curvature forms a so-called negative branch unstable resonator together with the total reflection mirror 1. Is set to.

The optical fiber bundle 90 includes the total reflection coating 2
1 are arranged side by side, and the end face thereof is the output mirror 2E.
Are closely attached to or close to each other via the index matching liquid 10.

According to this embodiment, it is possible to easily and efficiently guide the laser light 7 to the plurality of optical fibers 9 simultaneously without using special processing. Further, as in the ninth embodiment, since the unstable resonator is adopted, all the optical fibers 9
The laser light 7 is evenly guided to.

Example 11. FIG. 12 is a cross-sectional view showing still another embodiment of the invention of claim 9 in FIG.
Is a thin plate-shaped solid element, that is, a slab-shaped solid-state element, 2F is an output mirror, and 21 is a total reflection coating applied to a portion of the output mirror 2F other than the portion where the optical fiber is embedded.

The curvature of the output mirror 2F is the total reflection mirror 1
At the same time, it is set so as to form a stable resonator in the slab thickness direction and a negative branch unstable resonator in the slab width direction as shown in FIG. Optical fiber bundle 9
0s are arranged side by side next to the total reflection coating 21.

According to this embodiment, the spontaneous emission light generated from the laser medium is amplified while reciprocating between the laser resonator R formed between the total reflection coating 21 of the total reflection mirror 1 and the output mirror 2F. Then, the laser light 7 is obtained. In the slab thickness direction, a zigzag optical path in which the total reflection is repeated on the upper and lower surfaces of the slab within the slab.

In the slab width direction of the solid-state element 3A, as shown in FIG.
As shown in FIG. 3, the laser light 7 propagating from left to right is a plane wave, and the laser light 7 propagating from right to left is once condensed in the laser resonator R and then expanded and reaches the total reflection mirror 1, A plane wave is again formed by the reflection mirror 1 and propagates to the right. Of the laser light 7 that reaches the output mirror 2F, the light that reaches the side of the total reflection coating 21 is guided to the optical fiber 9.

Also in this embodiment, the laser light 7 can be efficiently guided to a plurality of optical fibers simultaneously. Further, since the unstable resonator is used, the laser light 7 is uniformly guided to all the optical fibers 9.

Example 12. FIG. 14 is a cross-sectional view showing an embodiment of the invention of claim 7, in which 120 is a non-reflective coating applied to the optical fiber 9 and 92 is a partially reflective coating applied to the optical fiber 9.

The laser resonator R is composed of the total reflection mirror 1 and the partial reflection coating 92 of the optical fiber 9. That is, the optical path of the optical fiber 9 is a part of the optical path in the laser resonator R.

In this embodiment, the laser oscillation mode is determined according to the transmission mode of the optical fiber 9, and as a result, there is an advantage that the transmission efficiency of the optical fiber 9 is high.

Although the optical fiber 9 is simply used in the above embodiment, a single mode optical fiber 9 may be used, and in this case, the oscillation mode is a single mode. Also,
Although the partial reflection coating 92 is applied to the emitting end of the optical fiber 9K, a hole coupling may be used in which this portion is left with a circular opening and the rest is a total reflection coating.

Example 13. FIG. 15 is a sectional view showing another embodiment of the invention of claim 7, in which 31 is a total reflection coating applied to the end face of the solid-state element 3 and faces the end face of the optical fiber bundle 90. The part is non-reflective and the other part is totally reflective.

Reference numeral 120 is a non-reflective coating applied to the optical fiber bundle 90, and reference numeral 92 is a partially reflective coating applied to the optical fiber bundle 90. The laser resonator R is composed of the total reflection mirror 1 and the partial reflection coating 92 of the optical fiber 9. That is, as in the twelfth embodiment, each optical path of the optical fiber bundle 90 is a part of the optical path in the laser resonator R.

Also in this embodiment, the laser oscillation mode is determined according to the transmission mode of the optical fiber 9, and as a result, the transmission efficiency of the optical fiber 9 is high and it is possible to simultaneously transmit to a large number of optical fibers 9. is there.

Also, a single mode optical fiber 9 can be used. In this case, each optical fiber 9
The oscillation mode of the laser light 7 emitted from is a single mode, and since the phases of the respective lights are aligned, the condensing characteristics of the entire beam also conform to the single mode, resulting in a large cross-sectional area. It is possible to efficiently obtain the laser light 7 having a high condensing property from the laser medium having

Example 14 FIG. 16 is a sectional view showing an embodiment of the invention of claim 10, in which 90 is an optical fiber bundle, the incident end face 130 of each optical fiber is concave, and a partial reflection coating 92 is applied. There is. The laser resonator R is a planar total reflection mirror 1
And the incident end faces 130 of the respective optical fibers are configured in the same number as the number of the optical fibers 9.

In this embodiment, the laser light 7 can be simultaneously transmitted to a large number of optical fibers 9 and, at the same time, the number of the optical fibers 9 is increased or decreased depending on the size of the solid-state element 3 to review the resonator mirror. An efficient laser can be realized without the need.

Example 15. FIG. 17 is a sectional view showing an embodiment of the invention of claim 11, in which 12 is a condenser lens, 140 is a partial reflection coating, 800 is a workpiece, 810 is a processing nozzle, and 820 is a processing gas introduction. It is a mouth.

According to this, the laser light 7 generated from the solid-state laser device and directly guided into the optical fiber 9 is
The light is emitted from the opposite end of the optical fiber 9. Then, the laser light 7 is condensed by the condensing lens 12, and the workpiece 800 is laser-processed using the condensed beam.

In this embodiment, since the light guide by the optical fiber 9 is carried out with almost no loss, the workpiece 800
Laser processing can be performed efficiently.

In this embodiment, the solid-state laser device using the laser resonator R shown in the first embodiment has been described as an example, but the solid-state lasers described in the second to seventh embodiments and the twelfth embodiment. The same effect is obtained when the device is used.

Example 16. FIG. 18 is a sectional view showing an embodiment of the invention of claim 12, in which 90 is an optical fiber bundle, which is an incident end face 130 of each optical fiber 9.
Is concave and has a partially reflective coating 91. The laser resonator R is a planar total reflection mirror 1
And the incident end faces 130 of the respective optical fibers are configured in the same number as the number of the optical fibers 9.

The optical fiber bundle 90 is branched into a number equal to or smaller than the number of the optical fibers 9, and the condenser lens 12 and the processing nozzle 8 are provided in each branch.
10 is provided, and the number of branches can be processed simultaneously and efficiently.

In this example, the fourteenth example is used.
Although the solid-state laser device using the laser resonator R shown in 1 has been described as an example, the same effect can be obtained when the solid-state laser device described in each of the eighth to eleventh embodiments or the thirteenth embodiment is used.

Example 17 FIG. 19 is a cross-sectional view showing an embodiment of the invention of claim 13 in which one or a plurality of solid-state laser devices in which laser light 7 is directly guided to a plurality of optical fibers 9 are provided. The optical fibers 9 are taken out one by one and put together in one processing nozzle 810, whereby a plurality of laser processings are simultaneously performed.

According to this embodiment, even if one solid-state laser device cannot be used for maintenance, for example, the power at the processing nozzle 810 is not decreased so that the processing can be performed sufficiently stably. As a result, the reliability of the processing device is significantly improved.

In this example, the fourteenth example is used.
Although the solid-state laser device using the laser resonator R shown in 1 has been described as an example, the same effect can be obtained when the solid-state laser device described in each of the eighth to eleventh embodiments or the thirteenth embodiment is used.

Example 18. 20 is a sectional view showing an embodiment of the invention of claim 14, in which 2G is an output mirror and 13 is a light source for a seeder as an oscillating wave stabilizing means for stabilizing the frequency of a solid-state laser device. , 14 is a seed light, 15 is a condenser lens for guiding the seed light 14 into the optical fiber 9, 70 is a laser beam extracted to the outside, and 150 is a highly reflective coating applied to the end face of the optical fiber 9. Is.

According to this embodiment, the seeder light 14 from the seeder light source 13 propagates through the optical fiber 9 and is slightly emitted from the highly reflective coating 150 into the laser resonator R. The spontaneous emission light generated from the laser medium is highly reflective coating 150 on the output mirror 2G and the end surface of the optical fiber 9.
The laser light 7 is amplified while reciprocating between the laser cavities R formed between the laser cavities R, and becomes the laser light 7, which is extracted as laser light 70 from the output mirror 2G to the outside.

At this time, light having the same wavelength as the seed light 14 selectively oscillates. In this embodiment, the seeder light source 13
Since the wavelength of the laser light 7 can be selectively controlled by controlling the wavelength of, the wavelength can be stabilized with a simple configuration.

Example 19 FIG. 21 is a sectional view showing an embodiment of the invention of claim 15, in which 2G is an output mirror, 16 is an optical monitor, and 150 is a high reflection coating applied to the end face of the optical fiber 9.

According to this embodiment, the spontaneous emission light generated from the laser medium travels back and forth between the laser mirror R formed between the output mirror 2G and the highly reflective coating 150 on the end face of the optical fiber 9. Laser light that is amplified to
Therefore, the laser beam 70 is extracted from the output mirror 2G to the outside.

Also in this case, a part of the laser light oscillated by the high reflection coating 150 is guided to the optical fiber 9 and the power is detected by the optical monitor 16. This allows
The power of the laser light 7 can be monitored with a simple configuration.

Example 20. 22 is a cross-sectional view showing an embodiment of the invention of claim 16, in which 17 is an angle control device as an angle control means for controlling the angle of the output mirror 2H in two dimensions of xy, and 18 is an optical system. Monitor 16
Is a controller that sends a signal to the angle control device 17 according to the output of.

This controller 18 is an angle control device 17
Then, for example, an instruction to change the angle in the x direction is issued, the change in the angle and the change in the output are monitored, and the angle in the x direction for obtaining the maximum output is found. Next, the angle in the y direction is changed to find the angle in the y direction that gives the maximum output.

By repeating the above operation, the angle of the output mirror can be set so as to obtain the maximum output, whereby the resonance for easily obtaining the maximum output can be obtained based on the power monitor of the laser light 7 with a simple structure. It is possible to obtain a solid-state laser device capable of finding the container conditions.

Example 21. 23 and 24 are views for explaining the coating method of the optical fiber 9 according to the embodiment of the invention of claim 17. In FIG. 23, 103 is a cylindrical jig that bundles the optical fiber bundles 90, and the side surface is O.
It is ground to a degree that allows it to be airtight. Also, FIG.
4, 104 is a vacuum chamber, 105 is a vacuum pump, 106 is a material for coating, 107 is a heater,
Reference numeral 108 denotes a heater power source.

According to this embodiment, as shown in FIG. 23, the optical fiber bundle 90 is press-fitted or embedded with a heat-resistant adhesive in a cylindrical jig 103, and its incident end face 16
0 is collectively optically polished. Next, as shown in FIG. 24, the end surface of the optical fiber bundle 90 is fixed in the vacuum chamber 104.

Optical fiber bundle 9 of this vacuum chamber 104
On the opposite side of the 0 end surface, a coating material 106 is fixed together with the heater 107. And vacuum chamber 10
4 is evacuated by the pump 105, and then the heater power source 10
The temperature of the heater is raised by 8 to evaporate the coating material, and the coating is formed by the so-called vacuum deposition method. After the vapor deposition, the cylindrical jig 103 is taken out of the vacuum chamber 104, and the cylindrical jig 103 and the optical fiber bundle 90 are disassembled.

According to this embodiment, a large number of optical fibers 9
However, the optical fiber 9 coated with partial reflection, total reflection, etc. can be obtained at low cost.

The cylindrical jig 103 is made of an optical member such as quartz, and is polished and coated together with the optical fiber 9 to easily obtain the optical fiber 9 used in Examples 9 and 11. be able to.

[0139]

As described above, according to the first aspect of the present invention, the lens for beam reduction is installed inside the resonator, and the incident end face of the optical fiber for propagating laser light is the output mirror of the laser resonator. Since all or part of the laser light is directly extracted into the optical fiber, the structure of the device is simple, and the incident loss due to reflection on the optical fiber can be suppressed to an extremely low level. is there.

Further, according to the invention of claim 2, since the output mirror serves as a beam introducing means to the optical fiber, the laser output from the output mirror is directly coupled to the end face of the optical fiber by the output mirror itself, There is an effect that light is efficiently extracted into the optical fiber.

According to the third aspect of the present invention, a cylindrical output mirror is used, the diameter of which is approximately equal to the diameter of the optical fiber, and the output mirror is arranged in close contact with or close to the optical fiber. There is an effect that an output mirror can be easily produced and a laser can be efficiently extracted into the optical fiber.

According to the fourth aspect of the present invention, an output mirror having a conical tip cut off is used, and the diameter of its tip is made substantially equal to the diameter of the optical fiber, and the output mirror is placed in close contact with or close to the optical fiber. Since it was configured as
There is an effect that a condenser lens in the resonator is unnecessary and a laser beam can be efficiently extracted into the optical fiber.

According to the fifth aspect of the present invention, since the graded index lens is used as the output mirror and is arranged so as to be in close contact with or close to the optical fiber, the laser beam can be simply attached to the end face of the optical fiber. There is an effect that a laser beam that can be focused on the laser beam can be efficiently extracted into the optical fiber.

According to the invention of claim 6, a total reflection coating is applied to the end face of the solid-state element on the laser light emission side, and the incident end face of the transmission optical fiber is closely adhered to the end face of the laser light emission side of the solid-state element. With this configuration, there is an effect that laser light can be directly extracted into the optical fiber only from the portion where the optical fiber adheres to the solid-state element without loss.

Further, according to the invention of claim 7, since the laser resonator is provided with the coupling means for the optical fiber and the laser beam, and the laser resonator is constituted by the emission end face of the optical fiber and the total reflection mirror, the optical fiber itself. Will be incorporated into the laser resonator, and there is an effect that all of the generated laser light can be directly extracted from the optical fiber without loss.

According to the eighth aspect of the invention, since the optical fiber bundle is used in the solid-state laser device according to the first to seventh aspects, all the optical fibers of the optical fiber bundle have a simple configuration. Thus, there is an effect that a device that can efficiently transmit light is obtained.

According to the invention of claim 9, the laser resonator is an unstable resonator, and the optical fiber bundle is installed at the position of the laser output portion of the output mirror of the unstable resonator. Since it is configured, there is an effect that a laser light can be uniformly transmitted to each optical fiber of the optical fiber bundle without loss.

According to the tenth aspect of the present invention, the incident end face of the optical fiber bundle for laser propagation is a concave face and is provided with a partial reflection coating, each of which is a part of the output mirror of an independent laser resonator or Since it is configured to be all and the resonator is configured independently for each optical fiber of the optical fiber bundle, an effect that light can be uniformly transmitted to all optical fibers without loss is obtained There is.

According to the eleventh aspect of the present invention, the laser light generated from the solid-state laser device is transmitted to the vicinity of the workpiece, and the focusing optical system focuses the laser light on the surface of the workpiece. There is an effect that a laser can be efficiently processed.

According to the twelfth aspect of the invention, a plurality of laser beams generated from the solid-state laser according to any one of the eighth to tenth aspects and propagated through a plurality of optical fibers are generated. Since the light is condensed by the condensing optical system and a plurality of laser processings can be performed at the same time, there is an effect that a device capable of efficiently performing electric discharge machining can be obtained.

According to the invention of claim 13, claim 8 is provided.
11. A solid-state laser device according to claim 10 and a plurality of condensing optical systems for laser processing, each of which is generated from each of the solid-state laser devices and propagated through a plurality of optical fibers. Since it was introduced into one condensing optical system via each one optical fiber and it was possible to process multiple lasers at the same time, even if one solid-state laser device fails, The processing device is hardly affected, and at the same time, there is an effect that a device capable of reliably performing a plurality of laser processes is obtained.

According to the fourteenth aspect of the present invention, a part or all of the total reflection mirror of the laser resonator is constituted by the end face of the optical fiber, and the end face on the opposite side of the optical fiber is provided with a light for stabilizing the oscillation wavelength. Since it is configured to enter the laser beam, it is possible to obtain the one that can stabilize the wavelength of the solid-state laser device with a simple configuration.

According to the fifteenth aspect of the present invention, a part or all of the total reflection mirror of the laser resonator is composed of the end face of the optical fiber, and the optical monitor is installed on the end face opposite to the optical fiber. Since it is configured, there is an effect that it is possible to obtain a device capable of monitoring the operating condition of the solid-state laser device with a simple configuration.

According to the sixteenth aspect of the present invention, a part or all of the total reflection mirror of the laser resonator is constituted by an end face of the optical fiber, and an optical monitor is installed on the end face opposite to the optical fiber, and Since the angle of the output mirror is automatically adjusted, there is an effect that a simple structure can stabilize the operation of the solid-state laser device.

According to the seventeenth aspect of the present invention, a large number of optical fibers are fixed in a cylindrical jig made of metal or resin having smooth side surfaces with an adhesive or the like without any gap, Since the end faces of the optical fibers are collectively polished, the end faces of the optical fibers are simultaneously coated by introducing the end faces of the optical fibers into the vacuum chamber so as to maintain a vacuum by using the side surfaces of the jig. An effect is obtained in which an optical fiber can be simultaneously polished and coated at the same time.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a solid-state laser device according to another embodiment of the first aspect of the invention.

FIG. 3 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 4 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 5 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 6 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 7 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 8 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 9 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

10 is a sectional view taken along line XX in FIG.

FIG. 11 is a longitudinal sectional view showing a solid-state laser device according to another embodiment of the ninth aspect of the invention.

FIG. 12 is a vertical sectional view showing a solid-state laser device according to still another embodiment of the present invention.

13 is a plan sectional view showing a main part in FIG.

FIG. 14 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 15 is a vertical sectional view showing a solid-state laser device according to another embodiment of the present invention.

FIG. 16 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 17 is a vertical sectional view showing a laser processing apparatus according to an embodiment of the invention of claim 11;

FIG. 18 is a vertical sectional view showing a laser processing apparatus according to an embodiment of the invention of claim 12;

FIG. 19 is a vertical sectional view showing a laser processing apparatus according to an embodiment of the invention of claim 13;

FIG. 20 is a vertical sectional view showing a solid-state laser device according to an embodiment of the present invention.

FIG. 21 is a vertical sectional view showing a solid-state laser device according to an embodiment of the invention of claim 15;

FIG. 22 is a vertical sectional view showing a solid-state laser device according to an embodiment of the invention.

FIG. 23 is a perspective view of essential parts showing a jig used in a method of coating an optical fiber according to an embodiment of the invention of claim 17;

FIG. 24 is a conceptual diagram showing a coating device used in a method for coating an optical fiber according to an embodiment of the invention of claim 17;

FIG. 25 is a vertical sectional view showing a conventional solid-state laser device.

[Explanation of symbols]

1 Total Reflection Mirror 2, 2A, 2B, 2C, 2D, 2E, 2F, 2G Output Mirror 3 Solid State Element 4 Light Source 6 Condenser 7 Laser Light 9 Optical Fiber 11 Graded Index Lens 12 Condenser Lens (Condenser Optical System ) 13 light source for seeder (oscillation wavelength stabilizing means) 16 optical monitor 17 angle control device (angle control means) 18 controller 31 total reflection coating 92 partial reflection coating 103 cylindrical jig 104 vacuum chamber R laser resonator 130 incident end face

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Koji Yasui 8-1-1 Tsukaguchihonmachi, Amagasaki City Mitsubishi Electric Corporation Central Research Institute (72) Inventor Masaki Kuzumoto 8-1-1 Tsukaguchihonmachi, Amagasaki Mitsubishi Central Research Institute of Electric Co., Ltd. (72) Masaki Seguchi, 8-1-1 Tsukaguchi Honcho, Amagasaki City Mitsubishi Electric Corporation Central Research Institute (72) Kazuki Kuba 8-1-1, Tsukaguchi Honmachi, Amagasaki Mitsubishi Electric Corporation Stock Company Central Research Institute

Claims (17)

[Claims] 1. A light source, a light collector having an inner surface formed of a reflective surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state element that is excited to become a laser medium and generates light, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber that transmits the laser light are provided. In the solid-state laser device, the laser light incident end face of the optical fiber constitutes a part or all of an output mirror arranged to face the total reflection mirror so as to form the laser resonator, and A solid-state laser device, further comprising a reduction optical system for reducing the beam diameter on the end face of the optical fiber according to the diameter of the optical fiber. 2. A light source, a light collector having an inner surface formed of a reflecting surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state element that is excited to become a laser medium and generates light, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber that transmits the laser light are provided. In the solid-state laser device, an output mirror arranged so as to face the total reflection mirror so as to constitute the laser resonator serves as a beam introducing means to the optical fiber. 3. The solid-state laser device according to claim 2, wherein the output mirror has a cylindrical shape whose diameter is substantially equal to the core diameter of the optical fiber, and the output mirror and the optical fiber are arranged in close contact with or close to each other. 4. The output mirror has a conical shape with a tip cut off, the diameter of the tip of the cone is approximately equal to the core diameter of the optical fiber, and the output mirror and the optical fiber are arranged in close contact with or close to each other. Solid-state laser device. 5. The solid-state laser device according to claim 2, wherein the output mirror is a graded index lens, and the graded index lens and the optical fiber are arranged in close contact with or close to each other. 6. A light source, a light collector having an inner surface formed of a reflecting surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state element that is excited to become a laser medium and generates light, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber that transmits the laser light are provided. In a solid-state laser device, a total reflection coating is applied to an end face of the laser medium on the laser beam emitting side, and an incident end face of the optical fiber is a laser beam of the laser medium so that the laser beam is emitted into the optical fiber. A solid-state laser device characterized in that the solid-state laser device is closely attached to an end face on the light emission side. 7. A light source, a light collector having an inner surface formed of a reflecting surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state element that is excited to become a laser medium and generates light, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber that transmits the laser light are provided. In the solid-state laser device, the laser resonator is configured by a partial reflection coating and a total reflection mirror formed on an emission end face of the optical fiber so as to couple the laser to the optical fiber. apparatus. 8. The solid-state laser device according to claim 1, wherein the optical fiber is an optical fiber bundle. 9. A light source, a light collector having an inner surface formed of a reflecting surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. It is provided with a solid-state element that emits light when excited as a laser medium, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber bundle that transmits the laser light. In the solid-state laser device, the laser resonator is an unstable resonator, and the optical fiber bundle is installed at a position of a laser output portion of an output mirror of the unstable resonator. apparatus. 10. A light source, a light collector having an inner surface formed of a reflective surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state element that is excited to become a laser medium and generates light, a laser resonator that uses a total reflection mirror to take out the light generated from the laser medium as laser light, and an optical fiber that transmits the laser light are provided. In the solid-state laser device, the optical fiber is an optical fiber bundle, the incident end face of each optical fiber in the optical fiber bundle is a concave surface and a partial reflection coating is applied, A solid-state laser device comprising an independent laser cavity corresponding to an optical fiber. 11. A laser comprising: the solid-state laser device according to claim 1; and a focusing optical system for focusing a laser propagated through an optical fiber to perform laser processing. Processing equipment. 12. The solid-state laser device according to claim 8 and a plurality of condensing units that condense laser light propagated through a plurality of optical fibers and simultaneously perform a plurality of laser processes. A laser processing device equipped with an optical system. 13. A plurality of solid-state laser devices according to claim 8 and a plurality of laser beams propagated from each of the solid-state laser devices through separate optical fibers are collectively collected. And a laser processing apparatus including a plurality of focusing optical systems that simultaneously perform a plurality of laser processings. 14. A light source, a light collector having an inner surface formed of a reflecting surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state laser device comprising a solid-state element that is excited to become a laser medium and generates light, a laser resonator that is composed of a total reflection mirror and an output mirror, and that takes out the light generated from the laser medium as laser light. Part or all of the total reflection mirror of the laser resonator is composed of the optical fiber end face,
A solid-state laser device is further provided with an oscillation wavelength stabilizing means for making light for stabilizing an oscillation wavelength incident on an end face on the opposite side of the optical fiber. 15. A light source, a light collector having an inner surface formed of a reflective surface for reflecting light projected from the light source, and a light installed in the light collector and projected by the light source. A solid-state laser device comprising a solid-state element that is excited to become a laser medium and generates light, a laser resonator that is composed of a total reflection mirror and an output mirror, and that takes out the light generated from the laser medium as laser light. Part or all of the total reflection mirror of the laser resonator is composed of the optical fiber end face,
Further, a solid-state laser device, wherein an optical monitor is installed on the opposite end face of the optical fiber. 16. The solid-state laser device according to claim 15, further comprising an angle control means for the output mirror and a controller for controlling the angle control means so as to obtain the maximum output while referring to the output of the optical monitor. 17. A large number of optical fibers are fixed in a cylindrical jig made of metal, glass, or resin having smooth side surfaces with an adhesive or the like without any gaps, and the jigs are collectively collected as described above. A method for coating an optical fiber in which a large number of optical fiber end faces are polished and the optical fiber end faces are introduced into a vacuum chamber so as to maintain a vacuum using the jig side faces, and the end faces of the large number of optical fibers are simultaneously coated. .