JPH0743269A - Arrangement of three-way switching valve in moisture measuring apparatus - Google Patents

Arrangement of three-way switching valve in moisture measuring apparatus

Info

Publication number
JPH0743269A
JPH0743269A JP20690993A JP20690993A JPH0743269A JP H0743269 A JPH0743269 A JP H0743269A JP 20690993 A JP20690993 A JP 20690993A JP 20690993 A JP20690993 A JP 20690993A JP H0743269 A JPH0743269 A JP H0743269A
Authority
JP
Japan
Prior art keywords
way switching
switching valve
moisture
flow path
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20690993A
Other languages
Japanese (ja)
Inventor
Kazuhiro Hasegawa
和弘 長谷川
Takashi Shironokuchi
隆 城ノ口
Yamao Itou
日本男 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP20690993A priority Critical patent/JPH0743269A/en
Publication of JPH0743269A publication Critical patent/JPH0743269A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To realize smooth and accurate measuring operation by coupling a plurality of three-way switching valves through short channels and fixing onto a common board thereby simplifying the constitution of channel. CONSTITUTION:A series of three three-way switching valves 25, 27, 28 are arranged at a regularly shortened interval on a fixing board 17 which is then arranged on the upper face of a housing 16 in the frame 15 of measuring apparatus thus blocking the entirety. This structure minimizes the lengths of a gas introduction channel 31 between the valves 15, 27, 28, a gas short circuit channel 41, a gasified moisture lead-out channel 51, and a bypass channel 61 thus simplifying the constitution of channel. For example, respective COM sides and NO sides are aligned and the channels 31, 41, 51 coupled thereby produce a series of flow and a channel 61 is also arranged in parallel therewith. Furthermore, the channels to the gas introduction needle 24 and the gasified moisture lead-out needle 26 on the NC side in the valves 25, 27 can be shortened significantly.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、試料容器内に容納され
た被測定試料を加熱して水分を気化させ、当該試料中に
含まれる水分量を測定するカール・フィッシャー水分定
量法を実施するための水分測定装置における3方切換え
弁の配置構造の改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention implements a Karl Fischer moisture determination method in which a sample to be measured contained in a sample container is heated to vaporize moisture and the amount of moisture contained in the sample is measured. The present invention relates to the improvement of the arrangement structure of the three-way switching valve in the water content measuring device.

【0002】[0002]

【従来の技術】一般に、カール・フィッシャー水分定量
法を用いる水分測定装置においては、ドライパージされ
た試料容器内に被測定試料を容納しておき、当該試料容
器内を測定部に接続させた上で、これを外部から加熱し
て水分を気化させ、かつ気化された水分をキャリアガス
により測定部に導入させて、その水分量を測定するよう
にしている。
2. Description of the Related Art Generally, in a moisture measuring apparatus using the Karl Fischer moisture determination method, a sample to be measured is stored in a dry-purged sample container, and the inside of the sample container is connected to a measuring section. Then, this is heated from the outside to vaporize the moisture, and the vaporized moisture is introduced into the measurement section by the carrier gas to measure the amount of the moisture.

【0003】すなわち、従来のこの種の水分測定装置の
場合には、例えば、特開平1−216226号公報に開
示されているように、予めドライパージされた試料容器
内に被測定試料を容納すると共に、その開口部を蓋部材
の被蓋で密封シールさせておき、このようにドライパー
ジ下で被測定試料を密封容納した試料容器について、加
熱気化処理の直前に蓋部材を取り外して開蓋させ、かつ
当該開蓋された試料容器を装置の測定位置に移動して再
度、Oリングの介在で密封状態にシールさせ、その後、
先のように操作処理して測定するのである。
That is, in the case of this type of conventional moisture measuring apparatus, for example, as disclosed in Japanese Patent Laid-Open No. 1-216226, the sample to be measured is stored in a sample container which has been previously dry-purged. At the same time, the opening is hermetically sealed by the cover of the lid member, and with respect to the sample container in which the sample to be measured is hermetically stored under the dry purge in this way, the lid member is removed and opened immediately before the heating vaporization process. And, the opened sample container is moved to the measurement position of the device, and again sealed by the interposition of the O-ring, and thereafter,
The operation is processed and measured as described above.

【0004】しかし、前記した従来の水分測定装置で
は、被測定試料を容納した試料容器を用いる測定に際し
て、まず、加熱気化処理の直前に蓋部材を取り外して一
旦、開蓋させ、ついで、装置の測定位置に移動し、再
度、密封シールさせるようにしているために、せっかく
ドライパージ下で被測定試料を密封容納した試料容器内
に対しては、一旦、開蓋させた後、再度、密封シールさ
せるまでの間に、たとえ微量ではあるにもせよ、周囲雰
囲気から水分が侵入して、被測定試料の含有水分量を正
確かつ厳密には測定し得ないという、この種の水分測定
装置にとっては致命的な欠陥がある。
However, in the above-mentioned conventional moisture measuring apparatus, in the measurement using the sample container in which the sample to be measured is stored, first, the lid member is removed immediately before the heating and vaporizing treatment, and the lid is once opened. Since it is moved to the measurement position and sealed again, the inside of the sample container in which the sample to be measured is hermetically stored under the dry purge should be opened once and then sealed again. In the meantime, even if it is a small amount, moisture invades from the ambient atmosphere, and the moisture content of the sample to be measured cannot be measured accurately and exactly. It has a fatal defect.

【0005】そこで、本発明者らは、先に、次のような
試料容器の閉蓋密封シール手段を提案した。
Therefore, the present inventors have previously proposed the following means for sealing and sealing the sample container.

【0006】即ち、この提案された新規手段では、外部
からの水分の侵入不能な薄膜シート状蓋片を用い、ドラ
イパージ下で試料容器内に被測定試料を容納させると共
に、該試料容器の開口部に対し、この薄膜シート状蓋片
を接着シールして閉蓋密封させるものであり、このよう
に構成させた試料容器によれば、被測定試料の含有水分
量の測定に際し、該薄膜シート状蓋片に対して外部から
連通針などを直接、刺通させることにより、あらためて
試料容器を開蓋させずに、該連通針を介して被測定試料
の気化水分を容易に測定部へ取り出すことができる。
[0006] That is, in the proposed new means, a thin film sheet-like lid piece that is incapable of infiltration of moisture from the outside is used to store the sample to be measured in the sample container under dry purge and to open the sample container. The thin film sheet-like lid piece is adhesively sealed to the part to be closed and sealed. According to the sample container configured as described above, when the moisture content of the sample to be measured is measured, the thin film sheet-like By directly piercing the lid piece with a communication needle or the like from the outside, the vaporized water of the sample to be measured can be easily taken out to the measurement section through the communication needle without opening the sample container again. it can.

【0007】[0007]

【発明が解決しようとする課題】ここで、前記本発明者
らによって提案された試料容器の開口部を薄膜シート状
蓋片で閉蓋密封シールする手段の場合、その課題として
残されるのは、該試料容器を用いた水分測定装置におけ
る被測定試料の含有水分量測定のための各操作、つま
り、例えば、測定系主要部のドライパージ、キャリアガ
スの安定度の確認などの先行操作と、目的とする所要の
水分測定操作とが、必ずしも平易には行ない難いという
ことであり、また一方では、これに準じて装置を構成す
る測定システム各部の流路配置が繁雑化して好ましくな
いということである。
In the case of the means for sealing and sealing the opening of the sample container proposed by the present inventors with a thin film sheet-like lid piece, the problem to be solved remains. Each operation for measuring the water content of the sample to be measured in the water content measuring apparatus using the sample container, that is, the prior operation such as dry purge of the main part of the measurement system and confirmation of the stability of the carrier gas, and the purpose. It means that the required moisture measurement operation to be performed is not always easy to perform, and on the other hand, the flow path arrangement of each part of the measurement system that composes the device according to this is complicated and is not preferable. .

【0008】本発明は、このような水分測定装置におけ
る課題を解消するためになされたもので、その目的とす
るところは、薄膜シート状蓋片で閉蓋密封シールされた
試料容器を用い、該試料容器内の被測定試料の含有水分
量をカール・フィッシャー水分定量法で測定する装置に
おいて、装置を構成する測定システム各部での流路配
置、特に、測定操作に必須の各3方切換え弁の流路配置
を可及的に簡素化させ、これによって各測定操作の円滑
化、正確さを図るようにした、この種の水分測定装置に
おける3方切換え弁の配置構造を提供することである。
The present invention has been made in order to solve the problems in such a moisture measuring apparatus, and its object is to use a sample container which is hermetically sealed with a thin film sheet-like lid piece. In a device for measuring the water content of a sample to be measured in a sample container by the Karl Fischer moisture determination method, the flow passage arrangement in each part of the measurement system that constitutes the device, especially the three-way switching valves essential for the measurement operation It is an object of the present invention to provide an arrangement structure of a three-way switching valve in a moisture measuring device of this type, in which the arrangement of the flow paths is simplified as much as possible, thereby facilitating smoothness and accuracy of each measuring operation.

【0009】[0009]

【課題を解決するための手段】前記目的を達成するため
に、本発明に係る水分測定装置における3方切換え弁の
配置構造は、被測定試料を容納した試料容器体の開口部
を薄膜シート状蓋片で閉蓋密封シールさせてなる試料容
器を用い、加熱制御手段を含む加熱測定操作部に移行さ
れた試料容器の薄膜シート状蓋片に対して、キャリアガ
スを兼ねるドライガス供給源に第1の3方切換え弁を介
して連通させたガス導入針と、水分測定検出部に第2の
3方切換え弁を介して連通させた気化水分導出針とを刺
通させ、かつ第1及び第2の各3方切換え弁の選択切換
え制御によって、少なくともドライパージ操作、バック
グランド操作及び水分測定操作を夫々に行ない得るよう
にした水分測定装置において、測定システムの主要作動
部となる各3方切換え弁の配置構造を次のように構成さ
せたものである。
In order to achieve the above object, the arrangement structure of the three-way switching valve in the moisture measuring apparatus according to the present invention is such that the opening of the sample container body for accommodating the sample to be measured is a thin film sheet. Using a sample container that is closed and hermetically sealed with a lid piece, for the thin film sheet-like lid piece of the sample container that has been transferred to the heating measurement operation section including the heating control means, use a dry gas supply source that also serves as a carrier gas. The gas introduction needle communicated with the first three-way switching valve and the vaporized water derivation needle communicated with the moisture measurement detection unit through the second three-way switching valve are pierced, and the first and second In the moisture measuring device in which at least the dry purge operation, the background operation, and the moisture measuring operation can be individually performed by the selective switching control of the respective 2-way 3-way switching valves, the 3-way switching, which is the main operating part of the measuring system, is performed. The arrangement of the example valve is obtained by the following configuration.

【0010】即ち、前記ドライガス供給源からのガス導
入流路を前記第1の3方切換え弁に接続させ、該第1の
3方切換え弁には、ガス短絡流路を介して前記第2の3
方切換え弁を接近して接続させ、また、前記第2の3方
切換え弁には、気化水分導出流路の前流側に組み入れた
第3の3方切換え弁を接近して接続させると共に、該第
3の3方切換え弁を前記第1の3方切換え弁の前流側に
バイパス流路を介して接続させ、さらに、前記気化水分
導出流路の後流側を水分測定検出部に接続させることに
より、これらの第1、第2及び第3の各3方切換え弁を
可及的短間隔による流路接続で、相互に共通の取付け基
板上に一連に取付け配置して構成し、前記第1、第2及
び第3の各3方切換え弁の選択切換え制御によって、所
期通りの装置操作を行ない得るようにしたものである。
That is, the gas introduction passage from the dry gas supply source is connected to the first three-way switching valve, and the first three-way switching valve is connected to the second three-way switching valve via a gas short-circuit passage. Of 3
A three-way switching valve close to and connected to the second three-way switching valve, and a third three-way switching valve installed on the upstream side of the vaporized water derivation flow path to the second three-way switching valve. The third three-way switching valve is connected to the upstream side of the first three-way switching valve via a bypass flow path, and the downstream side of the vaporized moisture derivation flow path is connected to a moisture measurement detection unit. In this way, the first, second and third three-way switching valves are connected in series on a common mounting substrate with a flow path connection at the shortest possible interval. By the selective switching control of each of the first, second and third three-way switching valves, the desired device operation can be performed.

【0011】[0011]

【作用】従って、本発明による測定システムの各3方切
換え弁の配置構造では、第1、第2及び第3の各3方切
換え弁の選択切換え制御によって、装置における各操作
が次のようにして行なわれる。
Therefore, in the arrangement structure of each three-way switching valve of the measuring system according to the present invention, each operation in the device is performed as follows by the selective switching control of each of the first, second and third three-way switching valves. Will be performed.

【0012】即ち、ドライパージ操作時には、流量調節
されたドライガスを前記ガス導入針と気化水分導出針と
から加熱測定操作部に供給する。また、バックグランド
操作時には、流量調節されたキャリアガスをガス短絡流
路から水分測定検出部に供給する。さらに、水分測定操
作時には、流量調節されたキャリアガスをガス導入針か
ら試料容器内に供給すると共に、試料容器内の気化水分
をキャリアガスにより気化水分導出針から水分測定検出
部に供給する。
That is, during the dry purge operation, the dry gas whose flow rate has been adjusted is supplied to the heating measurement operation unit from the gas introduction needle and the vaporized water extraction needle. Further, during the background operation, the carrier gas whose flow rate has been adjusted is supplied from the gas short circuit flow path to the moisture measurement detection unit. Further, during the moisture measuring operation, the carrier gas whose flow rate has been adjusted is supplied from the gas introduction needle into the sample container, and the vaporized moisture in the sample container is supplied from the vaporized moisture derivation needle to the moisture measurement detection unit by the carrier gas.

【0013】[0013]

【実施例】以下、本発明に係る水分測定装置における3
方切換え弁の配置構造の実施例につき、図1ないし図7
を参照して詳細に説明する。
[Examples] 3 in the moisture measuring apparatus according to the present invention
1 to 7 for an embodiment of the arrangement structure of the one-way switching valve.
Will be described in detail with reference to.

【0014】図1(a)、(b)は、本発明に適用する
一例での水分測定装置における被測定試料を容納密封し
た試料容器と、該試料容器の密封用薄膜シート状蓋片に
対するガス導入針及び気化水分導出針の刺通状態を夫々
に示す各断面説明図であり、また、図2ないし図4は、
本発明に適用する一例での測定流路システムの概要構成
及び各測定操作毎のドライパージガスまたはキャリアガ
スの流れの態様を夫々に示す各流路システム構成図であ
り、さらに、図5及び図6は、本発明の一実施例による
各3方切換え弁の配置構造の概要構成を模式的に示す平
面説明図及び要部側面説明図である。
FIGS. 1 (a) and 1 (b) show a sample container in which a sample to be measured is sealed in a moisture measuring apparatus according to the present invention, and a gas for a thin film sheet-like lid piece for sealing the sample container. FIGS. 2 to 4 are cross-sectional explanatory views each showing a piercing state of an introducing needle and a vaporized water deriving needle, and FIGS.
FIG. 7 is a schematic diagram of the flow channel system showing an example of the configuration of the measurement flow channel system applied to the present invention and a flow mode of the dry purge gas or the carrier gas for each measurement operation, and FIGS. FIG. 2A is a plan view and a side view of a main part schematically showing a schematic configuration of an arrangement structure of each three-way switching valve according to an embodiment of the present invention.

【0015】図1(a)、(b)において、本例による
試料容器10としては、開口部11aを開口させた耐熱
性の試料容器体11を使用し、該耐熱性容器体11内を
ドライパージさせた状態で、その内部に被測定試料12
を容納すると共に、開口部11aには、外部からの水分
の侵入が不能な薄膜シート状蓋片、ここでは、アルミニ
ウムの箔膜シート片(以下、アルミシート片と呼ぶ)1
3を接着させることにより、全面で密封シールした構成
のものを用いる。
1 (a) and 1 (b), a heat-resistant sample container body 11 having an opening 11a is used as the sample container 10 according to this embodiment, and the inside of the heat-resistant container body 11 is dried. In the purged state, the sample to be measured 12 is
In addition, the opening 11a accommodates a thin film sheet-like lid piece in which moisture cannot enter from the outside, here, an aluminum foil film sheet piece (hereinafter referred to as an aluminum sheet piece) 1
A structure in which the entire surface is hermetically sealed by bonding 3 is used.

【0016】而して、このように構成された試料容器1
0は、開口部11aを密封シールしているアルミシート
片13に対して、詳細については次に述べるガス導入針
24と気化水分導出針25とを直接、刺通させて用い、
ガス導入針24から供給されるキャリアガスにより、容
器内部で気化された被測定試料12の気化水分を気化水
分導出針25から取出して、その含有水分量を測定する
のである。
Thus, the sample container 1 thus constructed
0 is used by directly piercing the aluminum sheet piece 13 that hermetically seals the opening 11a with a gas introduction needle 24 and a vaporized water derivation needle 25 described below.
With the carrier gas supplied from the gas introduction needle 24, the vaporized moisture of the sample to be measured 12 vaporized inside the container is taken out from the vaporized moisture derivation needle 25, and the amount of contained moisture is measured.

【0017】図2ないし図4において、本例による測定
流路システム20は、図2で代表して次のように構成さ
れる。
2 to 4, the measurement flow path system 20 according to the present example is configured as shown in FIG.

【0018】即ち、加熱測定操作部21は、下部が開口
されて上部に測定基板22aを設けると共に、隔壁22
bによって周囲から区分されて、前記被測定試料12を
容納密封し得る程度の容積にされた加熱測定室22を有
しており、この加熱測定室22の外周囲には、加熱制御
手段としての加熱部23が配置され、かつ前記測定基板
22a面に対しては、加熱測定室22内に向け、やや深
く突出されて第1の3方切換え弁25に接続させたガス
導入針24と、これよりもやや浅く突出されて第2の3
方切換え弁27に接続させた気化水分導出針26とが夫
々に設けられている。
That is, the heating / measurement operating section 21 is provided with a measurement substrate 22a on the upper side and an opening on the lower side, and the partition wall 22.
It has a heating measurement chamber 22 that is divided from the surroundings by b and has a volume that allows the sample 12 to be measured to be stored and sealed. The outside of the heating measurement chamber 22 serves as heating control means. A gas introduction needle 24, in which a heating unit 23 is arranged, and which is projected toward the inside of the heating measurement chamber 22 and is connected to a first three-way switching valve 25, with respect to the surface of the measurement substrate 22a, It is projected slightly shallower than the second 3
A vaporized water derivation needle 26 connected to the one-way switching valve 27 is provided for each.

【0019】また、キャリアガスを兼ねるドライガスと
しては、この場合、窒素ガスを用いており、該ドライガ
ス供給源30からのガス導入流路31には、供給ガスの
管路を選択的に切換える流路切換え弁32と、該流路切
換え弁32によって選択的に流路切換え可能にされたド
ライパージガス用の流量調節弁33及びキャリアガス用
の流量調節弁34の並列管路と、該並列管路の後流側に
流量検出手段としてのマスフローセンサ35と、該マス
フローセンサ35に続いて大気開放用の開閉弁36を介
したガス乾燥部37a、37bとを順次に設けて、これ
を前記ガス導入針24に接続された第1の3方切換え弁
25に連通させてある。
In this case, nitrogen gas is used as the dry gas which also serves as the carrier gas, and the gas introduction flow path 31 from the dry gas supply source 30 selectively switches the supply gas pipeline. A flow path switching valve 32, a parallel conduit of a flow rate control valve 33 for a dry purge gas and a flow rate control valve 34 for a carrier gas, which are selectively flow path switchable by the flow path switching valve 32, and the parallel pipe. A mass flow sensor 35 as a flow rate detecting means and a gas drying section 37a, 37b via an open / close valve 36 for opening to the atmosphere are sequentially provided on the wake side of the passage, and the mass flow sensor 35 is connected to the gas flow sensor. It is connected to a first three-way switching valve 25 connected to the introduction needle 24.

【0020】一方前記第1の3方切換え弁25と第2の
3方切換え弁27との相互間をガス短絡流路41によっ
て連通させてある。
On the other hand, the first three-way switching valve 25 and the second three-way switching valve 27 are connected to each other by a gas short-circuit passage 41.

【0021】さらに、水分測定検出部50に対しては、
この場合、前記気化水分導出針26に接続された第2の
3方切換え弁27からの気化水分導出流路51におい
て、第3の3方切換え弁28を介して連通させると共
に、該第3の3方切換え弁28と前記第1の3方切換え
弁25の前流側とを別のバイパス流路61により連通さ
せたものである。
Further, for the moisture measuring and detecting section 50,
In this case, in the vaporized moisture derivation flow path 51 from the second three-way switching valve 27 connected to the vaporized moisture derivation needle 26, the vaporized moisture derivation flow path 51 is communicated via the third three-way switching valve 28, and the third The three-way switching valve 28 and the upstream side of the first three-way switching valve 25 are connected by another bypass flow passage 61.

【0022】こゝで、本例の場合は、前記第1、第2、
第3の各3方切換え弁25、27、28として、夫々に
所謂、電磁切換え操作可能な電磁切換え弁を用いてお
り、その接続形態は、図2ないし図4、それに図5及び
図6に示すようにされる。
Here, in the case of this example, the first, second,
As the third three-way switching valves 25, 27, and 28, so-called electromagnetic switching valves capable of electromagnetic switching are used, and their connection forms are shown in FIGS. 2 to 4, and FIGS. 5 and 6. As shown.

【0023】即ち、第1の3方切換え弁25に関して、
入口(COM)側をガス導入流路31側に、常開出口
(NO)側を短絡流路41側に、常閉出口(NC)側を
ガス導入針24側に夫々接続させる。また、第2の3方
切換え弁27に関して、COM側を気化水分導出流路5
1側に、NO側を短絡流路41側に、NC側を気化水分
導出針26側に夫々接続させる。第3の3方切換え弁2
8に関して、COM側とNO側とを気化水分導出流路5
1内に、NC側をバイパス流路61側に夫々接続させ
る。
That is, regarding the first three-way switching valve 25,
The inlet (COM) side is connected to the gas introduction flow path 31 side, the normally open outlet (NO) side is connected to the short circuit flow path 41 side, and the normally closed outlet (NC) side is connected to the gas introduction needle 24 side. Further, regarding the second three-way switching valve 27, the vaporized moisture derivation flow path 5 is placed on the COM side.
1, the NO side is connected to the short circuit channel 41 side, and the NC side is connected to the vaporized water derivation needle 26 side. Third 3-way switching valve 2
8, the COM side and the NO side are vaporized moisture derivation flow paths 5
In 1, the NC side is connected to the bypass flow path 61 side, respectively.

【0024】なお、上記流路構成において、ガス導入流
路31にドライパージガス用の流量調節弁33とキャリ
アガス用の流量調節弁34との並列管路を組み入れたの
は、前者でのドライパージ操作時にあって、比較的多量
のドライパージガスを使用するのに対し、後者でのバッ
クグランド操作時及び水分測定操作時にあっては、比較
的少量のキャリアガスを使用するだけで済むからであ
る。
In the above-mentioned flow path configuration, the gas introducing flow path 31 is equipped with a parallel conduit of the flow rate adjusting valve 33 for dry purge gas and the flow rate adjusting valve 34 for carrier gas, which is the former dry purge. This is because a relatively large amount of dry purge gas is used during operation, whereas a relatively small amount of carrier gas is used during background operation and moisture measurement operation in the latter case.

【0025】続いて、本例構成による測定流路システム
の作用につき、各操作毎のドライパージガスまたはキャ
リアガスの流れを取上げて述べる。
Next, the operation of the measurement flow path system according to this embodiment will be described by taking up the flow of the dry purge gas or the carrier gas for each operation.

【0026】装置のドライパージ操作時(図2の状態に
該当し、ドライパージガスの流れが矢印aで示され
る。) 本ドライパージ操作は、装置の水分測定系における付着
水分除去のためになされるものであって、本実施例の場
合には、図2に示されているように、第1の3方切換え
弁25を短絡流路41側で閉じ、ガス導入針24側で開
き、第2の3方切換え弁27を短絡流路41側で閉じ、
気化水分導出針26側で開き、第3の3方切換え弁28
を気化水分導出流路51の後流側で閉じ、バイパス流路
61側で開くことにより、矢印aで示す如くに、ドライ
ガス供給源30のドライパージガスは、一方において、
ガス導入流路31内をドライパージした上で、ガス導入
針24から加熱測定操作部21の加熱測定室22内に供
給され、他方において、ガス導入流路31でバイパスさ
れ、そのバイパス流路61内及び第3の3方切換え弁2
8を通って気化水分導出流路51の前流側を夫々にドラ
イパージした上で、気化水分導出針26から、同様に加
熱測定操作部21の加熱測定室22内に供給され、該加
熱測定室22内をドライパージする。
At the time of the dry purge operation of the apparatus (corresponding to the state of FIG. 2, the flow of the dry purge gas is indicated by the arrow a.) This dry purge operation is performed for removing the adhered water in the water measuring system of the apparatus. In the case of the present embodiment, as shown in FIG. 2, the first three-way switching valve 25 is closed on the side of the short circuit passage 41, opened on the side of the gas introduction needle 24, and the second And close the three-way switching valve 27 on the short-circuit passage 41 side.
It opens on the side of the vaporized water lead-out needle 26, and the third 3-way switching valve 28
Is closed on the downstream side of the vaporized moisture derivation flow path 51 and opened on the bypass flow path 61 side, so that the dry purge gas of the dry gas supply source 30 is
After the gas introduction flow path 31 is dry-purged, it is supplied from the gas introduction needle 24 into the heating measurement chamber 22 of the heating measurement operation unit 21, and on the other hand, is bypassed by the gas introduction flow path 31 and the bypass flow path 61. Inner and third 3-way switching valve 2
After performing a dry purge on the upstream side of the vaporized moisture derivation flow path 51 through the respective parts 8, the vaporized moisture derivation needle 26 is similarly supplied into the heating measurement chamber 22 of the heating measurement operation unit 21 to perform the heating measurement. The inside of the chamber 22 is dry-purged.

【0027】そして、この時、耐熱性容器体11内に被
測定試料12を容納密封した試料容器10は、加熱測定
室22内に向けて上昇過程にあり、かつドライパージの
終了に伴い、該加熱測定室22内に入り込むことにな
る。
At this time, the sample container 10 in which the sample 12 to be measured is sealed in the heat-resistant container 11 is in the ascending process toward the heating and measuring chamber 22 and the dry purge is completed. It enters into the heating measurement chamber 22.

【0028】装置のバックグランド操作時(図3の状態
に該当し、キャリアガスの流れが矢印bで示される。) 本バックグランド操作は、装置におけるキャリアガスの
安定度を確認するためになされるものであって、本実施
例の場合には、図3に示されているように、第1の3方
切換え弁25を短絡流路41側で開き、ガス導入針24
側で閉じ、第2の3方切換え弁27を短絡流路41側で
開き、気化水分導出針26側で閉じ、第3の3方切換え
弁28を気化水分導出流路51内で開き、バイパス流路
61側で閉じることにより、矢印bで示す如くに、ドラ
イガス供給源30のキャリアガスは、ガス導入流路3
1、短絡流路41及び気化水分導出流路51内を夫々に
経て水分測定検出部50に供給され、該水分測定検出部
50において安定度が確認される。
During the background operation of the apparatus (corresponding to the state of FIG. 3, the flow of the carrier gas is indicated by the arrow b.) This background operation is performed to confirm the stability of the carrier gas in the apparatus. In the case of the present embodiment, as shown in FIG. 3, the first three-way switching valve 25 is opened on the side of the short circuit passage 41, and the gas introduction needle 24
Side, the second three-way switching valve 27 is opened on the short-circuit flow path 41 side, the vaporized water derivation needle 26 side is closed, and the third three-way switching valve 28 is opened on the vaporized water derivation flow path 51 to bypass. By closing on the side of the flow path 61, the carrier gas of the dry gas supply source 30 is closed by the gas introduction flow path 3 as shown by the arrow b.
1, the short-circuited flow channel 41 and the vaporized moisture derivation flow channel 51 are respectively supplied to the moisture measurement detection unit 50, and the stability is confirmed in the moisture measurement detection unit 50.

【0029】そして、この時、耐熱性容器体11内に被
測定試料12を容納密封した試料容器10は、加熱測定
室22内に完全に嵌入されて、そのアルミシート片13
に、先ず、ガス導入針24が刺通され、引続き、気化水
分導出針26が刺通されると共に、加熱部23による加
熱測定室22内の加熱、ひいては被測定試料12の含有
水分気化のための加熱がなされる。
At this time, the sample container 10 in which the sample 12 to be measured is contained and sealed in the heat-resistant container body 11 is completely inserted into the heating and measuring chamber 22, and the aluminum sheet piece 13 thereof is inserted.
First, the gas introduction needle 24 is pierced, and subsequently the vaporized water derivation needle 26 is pierced, and at the same time, the heating unit 23 heats the inside of the heating measurement chamber 22 and thus vaporizes the water content of the sample 12 to be measured. Is heated.

【0030】装置の水分測定操作時(図4の状態に該当
し、キャリアガスの流れが矢印cで示される。) 本水分測定操作は、装置の被測定試料の含有水分を気化
させて検出するためのものであって、本実施例の場合に
は、図4に示されているように、第1の3方切換え弁2
5を短絡流路41側で閉じ、ガス導入針24側で開き、
第2の3方切換え弁27を短絡流路41側で閉じ、気化
水分導出針26側で開き、第3の3方切換え弁28を気
化水分導出流路51内で開き、バイパス流路61側で閉
じることにより、矢印aで示す如くに、ドライガス供給
源30のキャリアガスは、ガス導入流路31内を経てガ
ス導入針24から試料容器10内に供給されると共に、
該試料容器10内で気化された被測定試料12の含有水
分を伴って気化水分導出針26により取出され、かつ気
化水分導出流路51内を経て水分測定検出部50に供給
され、該水分測定検出部50において含有水分量が測定
される。
At the time of the moisture measuring operation of the apparatus (corresponding to the state of FIG. 4, the flow of the carrier gas is shown by an arrow c.) In this moisture measuring operation, the moisture content of the sample to be measured of the apparatus is vaporized and detected. In the case of the present embodiment, as shown in FIG. 4, the first three-way switching valve 2
5 is closed on the short-circuit flow path 41 side and opened on the gas introduction needle 24 side,
The second three-way switching valve 27 is closed on the short-circuited flow passage 41 side, opened on the vaporized moisture derivation needle 26 side, the third three-way switching valve 28 is opened on the vaporized moisture derivation flow passage 51, and the bypass flow passage 61 side. By closing with, the carrier gas of the dry gas supply source 30 is supplied from the gas introduction needle 24 into the sample container 10 through the gas introduction passage 31, as shown by the arrow a.
The moisture content of the sample 12 to be measured vaporized in the sample container 10 is taken out by the vaporized moisture derivation needle 26 and is supplied to the moisture measurement detection unit 50 through the vaporized moisture derivation flow path 51 to measure the moisture content. The water content is measured by the detection unit 50.

【0031】そして、含有水分量の測定終了に合わせ
て、ここでの測定を終えた試料容器10は、加熱測定室
22内からの下降過程に移行するのであり、以上の操作
が繰り返して実行されるのである。
In accordance with the end of the measurement of the water content, the sample container 10 whose measurement has been completed shifts to the descending process from the inside of the heating measurement chamber 22, and the above operation is repeated. It is.

【0032】而して、前記各説明からも明らかなよう
に、この種の測定流路システムの場合には、一般に夫々
の各流路構成と、これらの各流路相互間を選択的に切換
え接続する夫々の各切換え弁とを主体にしており、かつ
その測定操作が、各切換え弁の選択作動によって行なわ
れるために、ここでの各切換え弁相互間での可及的に短
縮された流路接続による配置構成に合わせて、測定処理
をいかに効率的かつ合理的に行ない得るようにするかの
点が肝要になる。
As is apparent from the above explanations, therefore, in the case of this type of measurement flow channel system, generally, each flow channel configuration and these flow channels are selectively switched. Since each switching valve to be connected is mainly used and its measuring operation is performed by the selective operation of each switching valve, the flow shortened as much as possible between the switching valves here. The important point is how to perform the measurement process efficiently and rationally according to the arrangement configuration by the road connection.

【0033】そこで、本実施例においては、前記図2な
いし図4の測定流路システムに関して、加熱測定操作部
21に直接関連する第1の3方切換え弁25、第2の3
方切換え弁27及び第3の3方切換え弁28の夫々が、
前記夫々の各設定による各流路31、41、51、61
によって接続されるのに鑑み、図5及び図6に示されて
いるように、取付け基板17上に、これらの第1、第2
及び第3の各3方切換え弁25、27及び28の夫々を
順序よく可及的に短縮された間隔で一連に配備させると
共に、該取付け基板17を装置フレーム15内での筺体
16の上面に配置させて止着したものであり、その全体
が所謂ブロック化される。
Therefore, in the present embodiment, with respect to the measurement flow path system of FIGS. 2 to 4, the first 3-way switching valve 25 and the second 3-way switching valve 25 directly related to the heating measurement operation unit 21 are provided.
The one-way switching valve 27 and the third three-way switching valve 28 are respectively
Each flow path 31, 41, 51, 61 according to each setting described above.
In view of being connected by the above, as shown in FIG. 5 and FIG.
And each of the third three-way switching valves 25, 27, and 28 are arranged in series in order at intervals as short as possible, and the mounting substrate 17 is arranged on the upper surface of the housing 16 in the device frame 15. It is fastened and fixed, and the whole is what is called a block.

【0034】従って、このように構成される本実施例の
場合には、各3方切換え弁25、27及び28間の各流
路31、41、51、61の長さを必要とする最小限ま
で短くし得て、流路構成が極めてすっきりした形態にな
る。即ち、例えば、該取付け基板17上で一連に配備さ
れる第1、第2及び第3の各3方切換え弁25、27及
び28についてみると、図5及び図6の記載表示からも
明らかな如く、夫々のCOM側及びNO側が一線上に並
び、これらを通して接続する各流路、つまりガス導入流
路31、ガス短絡流路41及び気化水分導出流路51が
一連の流れで配されると共に、バイパス流路61につい
ても、これに平行に配されるもので、さらには、第1及
び第2の各3方切換え弁25、27におけるNC側のガ
ス導入針24及び気化水分導出針26への流路接続もま
た、極めて短い流路で接続させ得るのである。
Therefore, in the case of the present embodiment having such a configuration, the minimum length which requires the length of each flow path 31, 41, 51, 61 between each three-way switching valve 25, 27 and 28. Can be shortened, resulting in a streamlined configuration of the flow path. That is, for example, the first, second, and third three-way switching valves 25, 27, and 28 arranged in series on the mounting board 17 are clear from the indications shown in FIGS. 5 and 6. As described above, the respective COM side and NO side are arranged in a line, and the respective flow paths connected through them, that is, the gas introduction flow path 31, the gas short circuit flow path 41 and the vaporized moisture derivation flow path 51 are arranged in a series of flow. The bypass flow path 61 is also arranged in parallel to the bypass flow path 61, and further, to the NC side gas introduction needle 24 and the vaporized water derivation needle 26 in each of the first and second three-way switching valves 25 and 27. The flow path connection of can also be connected with an extremely short flow path.

【0035】なお、図5においては、第1の3方切換え
弁25のNC側からのガス導入針24への接続が、実線
図示のようにガス短絡流路41を潜ってなされている
が、これは第1の3方切換え弁25として市販品を利用
しているためであり、必要に応じては鎖線図示のように
直接的に接続させることが可能である。
In FIG. 5, the connection from the NC side of the first three-way switching valve 25 to the gas introduction needle 24 is made through the gas short-circuit passage 41 as shown by the solid line. This is because a commercially available product is used as the first three-way switching valve 25, and it can be directly connected as shown by a chain line if necessary.

【0036】ここでちなみに、通常形態のままで、前記
第1、第2及び第3の各3方切換え弁25、27及び2
8の夫々につき、その流路接続関係を比較的考慮するこ
となしに一般的に配置構成させた場合には、図7に一例
を示す如く、これらの各3方切換え弁25、27及び2
8での相互の間隔が比較的大きく離間されると共に、該
相互間を接続する各流路31、41、51、61もまた
比較的長くされることになり、このような態様では、同
図7からも明らかであるように、各流路31、41、5
1、61の夫々に多くの無駄を生じて、構成自体が煩雑
化し、円滑かつ迅速で効果的な操作がおぼつかなくな
り、メンテナンスなどについても容易ではなくなる。
Incidentally, the above-mentioned first, second and third three-way switching valves 25, 27 and 2 are used in the normal form.
In the case where each of the three eight-way switching valves 25, 27 and 2 is generally arranged without considering the flow path connection relationship, as shown in FIG.
8 are relatively widely separated from each other, and the flow paths 31, 41, 51, 61 connecting the two are also relatively long. In such a mode, in FIG. As is clear from FIG. 7, each flow path 31, 41, 5
A large amount of waste is generated in each of the Nos. 1 and 61, the configuration itself becomes complicated, smooth, quick and effective operation becomes unclear, and maintenance is not easy.

【0037】以上のように、本実施例構成においては、
アルミシート片13で閉蓋密封シールされた試料容器1
0内の被測定試料12の含有水分量を測定する場合、該
試料容器10の加熱測定操作に直接関係している第1、
第2、第3の各3方切換え弁25、27、28を相互に
接近させて一連に流路配置させたので、装置の測定流路
システム20のそれ自体を比較的簡単かつ簡素化された
構成にできると共に、該測定流路システム20による各
測定操作を容易かつ効率的に行ない得て、各測定操作の
円滑化、正確さが達成されるのである。
As described above, in the structure of this embodiment,
Sample container 1 with aluminum sheet piece 13 hermetically sealed
When measuring the water content of the sample 12 to be measured in 0, the first directly related to the heating measurement operation of the sample container 10,
Since the second and third three-way switching valves 25, 27, 28 are arranged close to each other and arranged in a series of flow paths, the measurement flow path system 20 of the apparatus itself is relatively simple and simplified. In addition to being configured, each measurement operation by the measurement flow path system 20 can be easily and efficiently performed, and smoothness and accuracy of each measurement operation can be achieved.

【0038】[0038]

【発明の効果】以上、実施例によって詳述したように、
上記構成とした本発明の水分測定装置における各3方切
換え弁の配置構造によれば、予めドライパージされた試
料容器体内に被測定試料を容納させた状態で、該試料容
器体の開口部を水分の侵入不能な薄膜シート状蓋片によ
り閉蓋密封シールさせた試料容器を用い、この試料容器
内の被測定試料の含有水分量をカール・フィッシャー水
分定量法によって測定する場合において、特に、試料容
器の加熱測定操作部に直接関係する主要な各3方切換え
弁、ここでは第1ないし第3の各3方切換え弁を相互に
接近して一連に流路配置させてあるので、測定流路シス
テム自体の効果的な簡素化、及びそのメンテナンスの簡
略化に合わせて、第1ないし第3の各3方切換え弁での
夫々の切換え作動に伴う各測定操作の円滑化、正確さを
容易に図ることができるという優れた特長を有するもの
である。
As described above in detail with reference to the embodiments,
According to the arrangement structure of each three-way switching valve in the moisture measuring apparatus of the present invention having the above-mentioned configuration, the opening of the sample container body is stored in the sample container body which has been previously dry-purged in a state where the sample to be measured is stored. When measuring the moisture content of the sample to be measured in this sample container by the Karl Fischer moisture determination method using a sample container sealed and sealed by a thin film sheet lid that is incapable of moisture infiltration, Since the main three-way switching valves, which are directly related to the heating measurement operation unit of the container, here, the first to third three-way switching valves, are arranged in a series so as to be close to each other, the measurement flow path is arranged. According to the effective simplification of the system itself and the simplification of its maintenance, the smoothness and accuracy of each measurement operation associated with the respective switching operations of the first to third three-way switching valves are facilitated. To plan Those having an excellent feature that kill.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)、(b)は、本発明に適用する一例での
水分測定装置における被測定試料を容納密封した試料容
器と、該試料容器の密封用薄膜シート状蓋片に対するガ
ス導入針及び気化水分導出針の刺通状態を夫々に示す各
断面説明図である。
1 (a) and 1 (b) are a sample container in which a sample to be measured in a moisture measuring apparatus according to an example of the present invention is stored and sealed, and gas is introduced into a sealing thin film sheet-like lid piece of the sample container. It is each cross-sectional explanatory view which shows the piercing state of a needle and a vaporized water extraction needle, respectively.

【図2】本発明に適用する一例での測定流路システムに
おける概要構成及びドライパージ操作時のドライガスの
流れを示す流路システム構成図である。
FIG. 2 is a flow chart system configuration diagram showing a schematic construction and a flow of dry gas at the time of a dry purge operation in a measurement flow passage system in an example applied to the present invention.

【図3】同例による測定流路システム構成でのバックグ
ランド操作時のキャリアガスの流れを示す流路システム
構成図である。
FIG. 3 is a flow path system configuration diagram showing a flow of a carrier gas during a background operation in the measurement flow path system configuration according to the same example.

【図4】同例による測定流路システム構成での水分測定
操作時のキャリアガスの流れを示す流路システム構成図
である。
FIG. 4 is a flow path system configuration diagram showing a flow of a carrier gas during a moisture measurement operation in the measurement flow path system configuration according to the same example.

【図5】本発明の一実施例による各3方切換え弁の配置
構造の概要構成を模式的に示す平面説明図である。
FIG. 5 is a plan explanatory view schematically showing a schematic configuration of an arrangement structure of each three-way switching valve according to an embodiment of the present invention.

【図6】同実施例による各3方切換え弁の配置構造の概
要構成を模式的に示す要部側面説明図である。
FIG. 6 is an explanatory side view of the main part schematically showing the schematic configuration of the arrangement structure of each three-way switching valve according to the same embodiment.

【図7】同通常形態のままの一般的な各3方切換え弁の
配置構造の概要構成を模式的に示す平面説明図である。
FIG. 7 is an explanatory plan view schematically showing a schematic configuration of an arrangement structure of general three-way switching valves in the same normal form.

【符号の説明】[Explanation of symbols]

10 試料容器 11 耐熱性容器体 11a 耐熱性容器体の開口部 12 被測定試料 13 アルミシート片(水分の侵入不能な薄膜シート状
蓋片) 15 装置フレーム 16 筺体 17 取付け基板 20 測定流路システム 21 加熱測定操作部 22 加熱測定室 22a 測定基板 22b 隔壁 23 加熱部(加熱制御手段) 24 ガス導入針 25 第1の3方切換え弁 26 気化水分導出針 27 第2の3方切換え弁 28 第3の3方切換え弁 30 ドライガス供給源 31 ガス導入流路 32 流路切換え弁 33 ドライパージガス用の流量調節弁 34 キャリアガス用の流量調節弁 35 マスフローセンサ(流量検出手段) 36 大気開放用の開閉弁 37a、37b ガス乾燥部 41 短絡流路 50 水分測定検出部 51 気化水分導出流路 61 バイパス流路 a ドライパージ操作時のドライガスの流れ b バックグランド操作時のキャリアガスの流れ c 水分測定操作時のキャリアガスの流れ
10 Sample Container 11 Heat-Resistant Container 11a Opening of Heat-Resistant Container 12 Sample to be Measured 13 Aluminum Sheet Piece (Thin-Film Sheet-Shaped Lid Piece That Cannot Intrude Moisture) 15 Device Frame 16 Housing 17 Mounting Board 20 Measurement Channel System 21 Heating measurement operation unit 22 Heating measurement chamber 22a Measurement substrate 22b Partition wall 23 Heating unit (heating control means) 24 Gas introduction needle 25 First three-way switching valve 26 Vaporized moisture derivation needle 27 Second three-way switching valve 28 Third 3-way switching valve 30 Dry gas supply source 31 Gas introduction flow path 32 Flow path switching valve 33 Flow rate control valve for dry purge gas 34 Flow rate control valve for carrier gas 35 Mass flow sensor (flow rate detection means) 36 Open / close valve for atmosphere release 37a, 37b Gas drying section 41 Short-circuited channel 50 Moisture measurement detection section 51 Vaporized moisture derivation channel 61 Bypass channel Flow of dry purge operation time of the dry gas stream b background operation when the carrier gas flow c moisture measurement operation when the carrier gas

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 被測定試料を容納した試料容器体の開口
部を薄膜シート状蓋片で閉蓋密封シールさせてなる試料
容器を用い、加熱制御手段を含む加熱測定操作部に移行
された試料容器の薄膜シート状蓋片に対して、キャリア
ガスを兼ねるドライガス供給源に第1の3方切換え弁を
介して連通させたガス導入針と、水分測定検出部に第2
の3方切換え弁を介して連通させた気化水分導出針とを
刺通させ、かつ第1及び第2の各3方切換え弁の選択切
換え制御によって、少なくともドライパージ操作、バッ
クグランド操作及び水分測定操作を夫々に行ない得るよ
うにした水分測定装置において、 前記ドライガス供給源からのガス導入流路を前記第1の
3方切換え弁に接続させ、該第1の3方切換え弁には、
ガス短絡流路を介して前記第2の3方切換え弁を接近し
て接続させ、また、前記第2の3方切換え弁には、気化
水分導出流路の前流側に組み入れた第3の3方切換え弁
を接近して接続させると共に、該第3の3方切換え弁を
前記第1の3方切換え弁の前流側にバイパス流路を介し
て接続させ、さらに、前記気化水分導出流路の後流側を
水分測定検出部に接続させることにより、これらの第
1、第2及び第3の各3方切換え弁を可及的短間隔によ
る流路接続で、相互に共通の取付け基板上に一連に取付
け配置して構成し、 前記第1、第2及び第3の各3方切換え弁の選択切換え
制御によって、ドライパージ操作時には、流量調節され
たドライガスを前記ガス導入針と気化水分導出針とから
前記加熱測定操作部に供給し、また、バックグランド操
作時には、流量調節されたキャリアガスを短絡流路から
前記水分測定検出部に供給し、さらに、水分測定操作時
には、流量調節されたキャリアガスを前記ガス導入針か
ら試料容器内に供給し、かつ該試料容器内の気化水分を
キャリアガスにより前記気化水分導出針から前記水分測
定検出部に供給するするようにしたことを特徴とする水
分測定装置における3方切換え弁の配置構造。
1. A sample transferred to a heating and measurement operation unit including a heating control unit, using a sample container in which an opening of a sample container body accommodating a sample to be measured is closed and hermetically sealed with a thin film sheet lid piece. The thin film sheet-like lid of the container is connected to a dry gas supply source that also serves as a carrier gas through a first three-way switching valve, and a moisture measuring and detecting unit is provided with a second gas introducing needle.
The vaporized moisture outlet needle, which is communicated via the three-way switching valve, is pierced and the selective switching control of the first and second three-way switching valves allows at least a dry purge operation, a background operation, and a moisture measurement. In a moisture measuring device capable of performing respective operations, a gas introduction flow path from the dry gas supply source is connected to the first three-way switching valve, and the first three-way switching valve includes:
The second three-way switching valve is closely connected via a gas short-circuit flow path, and the second three-way switching valve has a third flow path incorporated in a front side of the vaporized moisture derivation flow path. The three-way switching valve is closely connected, and the third three-way switching valve is connected to the upstream side of the first three-way switching valve via a bypass flow path, and the vaporized moisture derivation flow is further provided. By connecting the wake side of the channel to the moisture measuring / detecting section, these first, second and third three-way switching valves can be connected to each other with a flow path connection at the shortest possible interval. When the dry purge operation is performed, the dry gas whose flow rate is adjusted is vaporized with the gas introduction needle by the selective switching control of the first, second and third three-way switching valves. It is supplied to the heating measurement operation unit from the water extraction needle, and the background operation is performed. At the time of operation, a carrier gas whose flow rate is adjusted is supplied from the short-circuit flow path to the moisture measuring and detecting unit, and at the time of a moisture measuring operation, a carrier gas whose flow rate is adjusted is supplied from the gas introduction needle into the sample container, and An arrangement structure of a three-way switching valve in a moisture measuring device, wherein vaporized moisture in the sample container is supplied from the vaporized moisture derivation needle to the moisture measurement detection unit by a carrier gas.
JP20690993A 1993-07-30 1993-07-30 Arrangement of three-way switching valve in moisture measuring apparatus Pending JPH0743269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20690993A JPH0743269A (en) 1993-07-30 1993-07-30 Arrangement of three-way switching valve in moisture measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20690993A JPH0743269A (en) 1993-07-30 1993-07-30 Arrangement of three-way switching valve in moisture measuring apparatus

Publications (1)

Publication Number Publication Date
JPH0743269A true JPH0743269A (en) 1995-02-14

Family

ID=16531088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20690993A Pending JPH0743269A (en) 1993-07-30 1993-07-30 Arrangement of three-way switching valve in moisture measuring apparatus

Country Status (1)

Country Link
JP (1) JPH0743269A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018533028A (en) * 2015-11-09 2018-11-08 ブラベンダー メステクニク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンデイトゲゼルシャフト Apparatus and method for measuring moisture in a sample
JP2018533730A (en) * 2016-04-27 2018-11-15 エルジー・ケム・リミテッド Apparatus for measuring moisture of solid sample, method of measuring moisture content of solid sample, and method of analyzing imidation ratio
JP2019113327A (en) * 2017-12-21 2019-07-11 株式会社三菱ケミカルアナリテック Moisture measurement method and moisture measurement apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018533028A (en) * 2015-11-09 2018-11-08 ブラベンダー メステクニク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンデイトゲゼルシャフト Apparatus and method for measuring moisture in a sample
US10852226B2 (en) 2015-11-09 2020-12-01 Brabender Messtechnik Gmbh & Co. Kg Apparatus and method for determining the moisture of a sample
JP2018533730A (en) * 2016-04-27 2018-11-15 エルジー・ケム・リミテッド Apparatus for measuring moisture of solid sample, method of measuring moisture content of solid sample, and method of analyzing imidation ratio
US10928301B2 (en) 2016-04-27 2021-02-23 Lg Chem, Ltd. Apparatus for measuring moisture of solid sample, method for measuring moisture content of solid sample, and method for analyzing imidization ratio
JP2019113327A (en) * 2017-12-21 2019-07-11 株式会社三菱ケミカルアナリテック Moisture measurement method and moisture measurement apparatus

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