JPH07390A - Ultrasonic probe - Google Patents
Ultrasonic probeInfo
- Publication number
- JPH07390A JPH07390A JP9668193A JP9668193A JPH07390A JP H07390 A JPH07390 A JP H07390A JP 9668193 A JP9668193 A JP 9668193A JP 9668193 A JP9668193 A JP 9668193A JP H07390 A JPH07390 A JP H07390A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic probe
- matching layer
- acoustic
- piezoelectric vibrator
- kinds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は超音波探触子を利用分野
とし、特に被検出体への送受波効率を高める音響整合層
の形成方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a field of application of an ultrasonic probe, and more particularly to a method of forming an acoustic matching layer which enhances transmission / reception efficiency with respect to an object to be detected.
【０００２】[0002]
【発明の背景】超音波探触子は、医用及び鉱工業用の超
音波診断装置及び探傷装置に超音波の送受波源として有
用される。通常では、超音波を効率的に送受波するた
め、超音波の発生源となる圧電振動子の前面に、音響整
合層を使用する。被検出体を生体とした場合には、その
音響インピーダンスが大きく異なることから、従来のも
のでは、二層構造として順次接近させていた。しかし、
このようなものでは、界面での反射により伝搬損失を生
ずることから、音響インピーダンスが連続的に変化する
一層構造の音響整合層が考えられた。BACKGROUND OF THE INVENTION An ultrasonic probe is useful as an ultrasonic wave transmitting / receiving source in ultrasonic diagnostic equipment and flaw detection equipment for medical and industrial applications. Usually, in order to transmit and receive ultrasonic waves efficiently, an acoustic matching layer is used in front of the piezoelectric vibrator that is the source of ultrasonic waves. When the body to be detected is a living body, the acoustic impedance of the body is largely different. Therefore, in the conventional case, the two layers have been sequentially approached. But,
In such a structure, since a propagation loss occurs due to reflection at the interface, an acoustic matching layer having a single layer structure in which acoustic impedance continuously changes was considered.
【０００３】[0003]
【従来技術】第３図はこの種一従来例を説明する超音波
探触子の断面図である。超音波探触子は、バッキング材
１上にＰＺＴ（ジルコン酸チタン酸鉛）からなる圧電振
動子２を固着し、その前面に音響整合層３を設けてな
る。音響整合層３は混合材をコーティングして形成され
る。混合材は、例えばエポキシ樹脂４とシリカ粉５を攪
拌して形成する。そして、コーティングする。混合材
は、沈澱により、比重の大きいシリカ粉４は下へ、小さ
いエポキシ樹脂粉５は上へ、順次、積層される。その
後、熱硬化し、音響インピーダンスの序々に変化する音
響整合層３が形成される。これにより、音響インピーダ
ンスを連続的に変化することが期待でき、界面での反射
による損失を防止できる。2. Description of the Related Art FIG. 3 is a sectional view of an ultrasonic probe for explaining a conventional example of this kind. In the ultrasonic probe, a piezoelectric vibrator 2 made of PZT (lead zirconate titanate) is fixed on a backing material 1, and an acoustic matching layer 3 is provided on the front surface thereof. The acoustic matching layer 3 is formed by coating a mixed material. The mixed material is formed, for example, by stirring the epoxy resin 4 and the silica powder 5. Then coat. As a result of precipitation, the mixed material is sequentially laminated such that the silica powder 4 having a large specific gravity is downward and the epoxy resin powder 5 having a small specific gravity is upward. Then, the acoustic matching layer 3 which is thermally cured and whose acoustic impedance gradually changes is formed. As a result, the acoustic impedance can be expected to change continuously, and loss due to reflection at the interface can be prevented.
【０００４】[0004]
【従来技術の問題点】しかしながら、このような超音波
探触子においては、基本的には、音響整合層３を沈澱に
より形成するので、音響インピーダンスを連続的に変化
させることが困難となる。また、混合材の攪拌及び沈澱
状態により、音響インピーダンスの変化率にバラツキを
生じる。また、フィラー等の添加物がある場合、その粉
末が静電気により塊となる不都合もあった。このような
ことから、充分な音響的特性を得ることができなかっ
た。また、沈澱が完了するまでは、温度をかけて硬化さ
せることができず、時間を費やして生産性の悪い問題が
あった。However, in such an ultrasonic probe, since the acoustic matching layer 3 is basically formed by precipitation, it is difficult to continuously change the acoustic impedance. Further, the rate of change in acoustic impedance varies depending on the state of stirring and precipitation of the mixed material. Further, when there is an additive such as a filler, there is also a problem that the powder becomes a lump due to static electricity. Therefore, it was not possible to obtain sufficient acoustic characteristics. In addition, until the precipitation is completed, it cannot be cured by applying a temperature, and it takes time to reduce productivity.
【０００５】[0005]
【発明の目的】本発明は音響的特性を良好として、生産
性に優れた超音波探触子を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide an ultrasonic probe having good acoustic characteristics and excellent productivity.
【０００６】[0006]
【解決手段】本発明は、音響整合層を形成するに際し、
音響インピーダンスの異なる少なくとも２種類の材料
を、序々に割合を変えながら蒸着して形成したことを解
決手段とする。以下、本発明の一実施例を説明する。According to the present invention, in forming an acoustic matching layer,
The solution is that at least two kinds of materials having different acoustic impedances are formed by vapor deposition while gradually changing the ratio. An embodiment of the present invention will be described below.
【０００７】第１図は本発明の一実施例を説明する超音
波探触子の図である。超音波探触子は、前述同様に、バ
ッキング材１上にＰＺＴからなる圧電振動子２を固着
し、その前面に音響整合層３を設けてなる。そして、こ
の実施例では、音響整合層３を蒸着により形成する。蒸
着はプラズマ溶射とし、ＰＺＴとウレタン樹脂からなる
２種の粉末６、７を別個に溶射する。ウレタン樹脂は、
音響インピーダンスを生体（約１．５×１０6Ｋｇ／ｍ2
ｓ）に接近した、約２．０×１０6Ｋｇ／ｍ2ｓのものを
使用する。そして、第１図に示したように、ＰＺＴ粉６
とウレタン樹脂粉７との量を時間とともに制御しなが
ら、溶射する。すなわち、ＰＺＴ粉６は最初に量を多く
し序々に少なくする。また、ウレタン樹脂粉７は、その
逆で、序々に量を多くする。FIG. 1 is a diagram of an ultrasonic probe for explaining an embodiment of the present invention. The ultrasonic probe has the piezoelectric vibrator 2 made of PZT fixed on the backing material 1 and the acoustic matching layer 3 provided on the front surface thereof, as described above. Then, in this embodiment, the acoustic matching layer 3 is formed by vapor deposition. The vapor deposition is plasma spraying, and two kinds of powders 6 and 7 composed of PZT and urethane resin are separately sprayed. Urethane resin is
Acoustic impedance of living body (about 1.5 × 10 6 Kg / m 2
s) of about 2.0 × 10 6 Kg / m 2 s is used. Then, as shown in FIG. 1, PZT powder 6
And the amount of urethane resin powder 7 are controlled with time, and thermal spraying is performed. That is, the amount of PZT powder 6 is increased first and then gradually decreased. On the contrary, the amount of the urethane resin powder 7 is gradually increased.
【０００８】このようなものでは、多層構造の音響整合
層とは異なり、音響インピーダンスが序々に小さくな
る。そして、沈澱方法に比較し、音響インピーダンスを
一定の変化率として、連続的に変化する制御ができ、明
確な界面がなくなる。したがって、界面での反射による
減衰を防止して、充分な音響的特性を得ることができ
る。また、表面は生体と同じ音響インピーダンスとなる
ので、その厚みをλ／４にする制約を受けなくて済む。
また、プラズマ溶射であるため、沈澱に比較して、硬化
時間を費やすことがないので、生産性を向上する。With such a structure, unlike the acoustic matching layer having a multilayer structure, the acoustic impedance gradually decreases. As compared with the precipitation method, the acoustic impedance can be controlled at a constant rate of change so that it can be controlled to change continuously, and there is no clear interface. Therefore, attenuation due to reflection at the interface can be prevented and sufficient acoustic characteristics can be obtained. Further, since the surface has the same acoustic impedance as that of a living body, it is not necessary to limit the thickness to λ / 4.
Further, since the plasma spraying is employed, the curing time is not spent as compared with the precipitation, so that the productivity is improved.
【０００９】[0009]
【他の事項】上記実施例では、超音波探触子を単板型と
したが、配列型でも凹凸（曲面）状でも適用でき、特に
曲面状の場合は蒸着による効果は大きい。また、粉６、
７はＰＺＴとウレタン樹脂の２種類としたが、圧電振動
子２及び被検出体に応じて選択できるとともに、３種類
以上であってもよい。また、２種類以上の粉末を同時に
蒸着できれば、プラズマ溶射以外でも使用できる。そし
て、音響整合層３を対象として説明したが、圧電振動子
２の固着されるバッキング材１にも適用できる。[Other Matters] In the above embodiments, the ultrasonic probe is a single plate type, but it can be applied to both an array type and a concave and convex (curved) shape. Also, powder 6,
Two types of PZT and urethane resin are used for 7, but three types or more may be selected depending on the piezoelectric vibrator 2 and the object to be detected. Further, if two or more kinds of powders can be vapor-deposited at the same time, they can be used other than plasma spraying. Although the acoustic matching layer 3 has been described as an object, the present invention can be applied to the backing material 1 to which the piezoelectric vibrator 2 is fixed.
【００１０】[0010]
【発明の効果】本発明は、音響整合層を形成するに際
し、音響インピーダンスの異なる少なくとも２種類の材
料を、序々に割合を変えながら蒸着して形成したので、
音響的特性を良好として、生産性に優れた超音波探触子
を提供できる。According to the present invention, at the time of forming the acoustic matching layer, at least two kinds of materials having different acoustic impedances are vapor-deposited while gradually changing the ratio.
An ultrasonic probe having good acoustic characteristics and excellent productivity can be provided.
【第１図】第１図は本発明の一実施例を説明する超音波
探触子の断面図である。FIG. 1 is a sectional view of an ultrasonic probe for explaining an embodiment of the present invention.
【第２図】第２図は本発明の一実施例による蒸着時の時
間に対する溶射量特性図である。[FIG. 2] FIG. 2 is a thermal spraying amount characteristic diagram with respect to time during vapor deposition according to an embodiment of the present invention.
【第３図】第３図は従来例を説明する超音波探触子の断
面図である。FIG. 3 is a sectional view of an ultrasonic probe for explaining a conventional example.
１ バッキング材、２ 圧電振動子、３ 音響整合層、
４ エポキシ樹脂、５シリカ粉、６ ＰＺＴ粉、７ ウ
レタン樹脂粉．1 backing material, 2 piezoelectric vibrators, 3 acoustic matching layers,
4 epoxy resin, 5 silica powder, 6 PZT powder, 7 urethane resin powder.
Claims (2)
響整合層を有する超音波探触子において、前記音響整合
層を形成するに際し、音響インピーダンスの異なる少な
くとも２種類の材料を、序々に割合を変えながら蒸着し
て形成したことを特徴とする超音波探触子。1. In an ultrasonic probe having an acoustic matching layer on the front surface of a piezoelectric vibrator that generates ultrasonic waves, at least two kinds of materials having different acoustic impedances are gradually formed when forming the acoustic matching layer. An ultrasonic probe characterized by being formed by vapor deposition while changing the proportion.
ッキング材を有する超音波探触子において、前記バッキ
ング材を形成するに際し、音響インピーダンスの異なる
少なくとも２種類の材料を、序々に割合を変えながら蒸
着して形成したことを特徴とする超音波探触子。2. In an ultrasonic probe having a backing material on the back surface of a piezoelectric vibrator that generates ultrasonic waves, when forming the backing material, at least two kinds of materials having different acoustic impedances are gradually mixed in proportion. An ultrasonic probe characterized by being formed by vapor deposition while changing it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9668193A JPH07390A (en) | 1993-03-31 | 1993-03-31 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9668193A JPH07390A (en) | 1993-03-31 | 1993-03-31 | Ultrasonic probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07390A true JPH07390A (en) | 1995-01-06 |
Family
ID=14171540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9668193A Pending JPH07390A (en) | 1993-03-31 | 1993-03-31 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07390A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4944296A (en) * | 1987-08-10 | 1990-07-31 | Hideo Suyama | Electronic toothbrush |
| JP2009005383A (en) * | 2008-08-04 | 2009-01-08 | Panasonic Corp | Ultrasonic wave transmitting/receiving apparatus |
| JP2009218749A (en) * | 2008-03-07 | 2009-09-24 | Panasonic Corp | Acoustic matching body, ultrasonic transducer, and ultrasonic flowmeter |
| US7755256B2 (en) | 2005-11-04 | 2010-07-13 | Kabushiki Kaisha Toshiba | Ultrasonic diagnostic apparatus and ultrasonic probe |
| JP2012005690A (en) * | 2010-06-25 | 2012-01-12 | Seiko Epson Corp | Measuring device, biological testing device, flow velocity measuring method, and pressure measuring method |
-
1993
- 1993-03-31 JP JP9668193A patent/JPH07390A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4944296A (en) * | 1987-08-10 | 1990-07-31 | Hideo Suyama | Electronic toothbrush |
| US7755256B2 (en) | 2005-11-04 | 2010-07-13 | Kabushiki Kaisha Toshiba | Ultrasonic diagnostic apparatus and ultrasonic probe |
| JP2009218749A (en) * | 2008-03-07 | 2009-09-24 | Panasonic Corp | Acoustic matching body, ultrasonic transducer, and ultrasonic flowmeter |
| JP2009005383A (en) * | 2008-08-04 | 2009-01-08 | Panasonic Corp | Ultrasonic wave transmitting/receiving apparatus |
| JP2012005690A (en) * | 2010-06-25 | 2012-01-12 | Seiko Epson Corp | Measuring device, biological testing device, flow velocity measuring method, and pressure measuring method |
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